JP7297423B2 - 吐出材吐出装置およびインプリント装置 - Google Patents

吐出材吐出装置およびインプリント装置 Download PDF

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Publication number
JP7297423B2
JP7297423B2 JP2018198690A JP2018198690A JP7297423B2 JP 7297423 B2 JP7297423 B2 JP 7297423B2 JP 2018198690 A JP2018198690 A JP 2018198690A JP 2018198690 A JP2018198690 A JP 2018198690A JP 7297423 B2 JP7297423 B2 JP 7297423B2
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film
ejection
space
liquid
discharge
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JP2020018997A5 (enExample
JP2020018997A (ja
Inventor
信途 川原
裕一 岩▲崎▼
義雅 荒木
敬恭 長谷川
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Canon Inc
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Canon Inc
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Priority to US16/766,384 priority Critical patent/US11535039B2/en
Priority to PCT/JP2018/043683 priority patent/WO2019107383A1/en
Priority to KR1020207015462A priority patent/KR102312743B1/ko
Publication of JP2020018997A publication Critical patent/JP2020018997A/ja
Publication of JP2020018997A5 publication Critical patent/JP2020018997A5/ja
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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2018198690A 2017-11-30 2018-10-22 吐出材吐出装置およびインプリント装置 Active JP7297423B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US16/766,384 US11535039B2 (en) 2017-11-30 2018-11-28 Ejection-material ejection apparatus and imprinting apparatus
PCT/JP2018/043683 WO2019107383A1 (en) 2017-11-30 2018-11-28 Ejection-material ejection apparatus and imprinting apparatus
KR1020207015462A KR102312743B1 (ko) 2017-11-30 2018-11-28 토출재 토출 장치 및 임프린트 장치

Applications Claiming Priority (4)

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JP2017230766 2017-11-30
JP2017230766 2017-11-30
JP2018136707 2018-07-20
JP2018136707 2018-07-20

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JP2020018997A JP2020018997A (ja) 2020-02-06
JP2020018997A5 JP2020018997A5 (enExample) 2021-11-18
JP7297423B2 true JP7297423B2 (ja) 2023-06-26

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Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
JP2023160683A (ja) * 2022-04-23 2023-11-02 浜理薬品工業株式会社 連続分液装置及び連続分液方法
CN115464983A (zh) * 2022-10-25 2022-12-13 广东亮图电子设备有限公司 一种打印头专用外置固件连接墨囊的进墨水盖子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015046197A1 (ja) 2013-09-30 2015-04-02 富士フイルム株式会社 圧力緩衝装置、液体流通装置、画像記録装置、及び液体流通装置の状態検出方法
JP2016032103A (ja) 2014-07-25 2016-03-07 キヤノン株式会社 液体吐出装置、インプリント装置および物品製造方法
JP2019098588A (ja) 2017-11-30 2019-06-24 キヤノン株式会社 吐出材吐出装置
JP2019122907A (ja) 2018-01-15 2019-07-25 キヤノン株式会社 吐出材吐出装置およびインプリント装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018464A1 (de) * 1990-06-08 1991-12-12 Ott Kg Lewa Membran fuer eine hydraulisch angetriebene membranpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015046197A1 (ja) 2013-09-30 2015-04-02 富士フイルム株式会社 圧力緩衝装置、液体流通装置、画像記録装置、及び液体流通装置の状態検出方法
JP2016032103A (ja) 2014-07-25 2016-03-07 キヤノン株式会社 液体吐出装置、インプリント装置および物品製造方法
JP2019098588A (ja) 2017-11-30 2019-06-24 キヤノン株式会社 吐出材吐出装置
JP2019122907A (ja) 2018-01-15 2019-07-25 キヤノン株式会社 吐出材吐出装置およびインプリント装置

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