JP7291303B1 - 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム - Google Patents

焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム Download PDF

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JP7291303B1
JP7291303B1 JP2022564618A JP2022564618A JP7291303B1 JP 7291303 B1 JP7291303 B1 JP 7291303B1 JP 2022564618 A JP2022564618 A JP 2022564618A JP 2022564618 A JP2022564618 A JP 2022564618A JP 7291303 B1 JP7291303 B1 JP 7291303B1
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focus position
image
focus
estimation
feature
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JPWO2023002679A5 (https=
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朱里 伊藤
智親 竹嶋
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Hamamatsu Photonics KK
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/67—Focus control based on electronic image sensor signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/36—Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G03B13/36—Autofocus systems
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/60—Type of objects
    • G06V20/69—Microscopic objects, e.g. biological cells or cellular parts
    • G06V20/693—Acquisition

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Mathematical Physics (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Biophysics (AREA)
  • Signal Processing (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Computational Linguistics (AREA)
  • Medical Informatics (AREA)
  • Image Analysis (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP2022564618A 2021-07-19 2022-03-10 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム Active JP7291303B1 (ja)

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JP2023091124A JP2023111948A (ja) 2021-07-19 2023-06-01 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム

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JP2021118889 2021-07-19
JP2021118889 2021-07-19
PCT/JP2022/010693 WO2023002679A1 (ja) 2021-07-19 2022-03-10 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム

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JPWO2023002679A1 JPWO2023002679A1 (https=) 2023-01-26
JP7291303B1 true JP7291303B1 (ja) 2023-06-14
JPWO2023002679A5 JPWO2023002679A5 (https=) 2023-06-28

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JP2023091124A Pending JP2023111948A (ja) 2021-07-19 2023-06-01 焦点位置推定システム、焦点位置推定方法、焦点位置推定プログラム、半導体検査システム及び生体観察システム

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US (1) US20240160089A1 (https=)
EP (1) EP4336238A4 (https=)
JP (2) JP7291303B1 (https=)
KR (1) KR20240026280A (https=)
CN (1) CN117693703A (https=)
TW (1) TW202305437A (https=)
WO (1) WO2023002679A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4488738A4 (en) * 2022-03-02 2026-01-07 Nikon Corp METHOD, PROGRAM AND DEVICE FOR FOCUS ADJUSTMENT
DE102024116985A1 (de) * 2024-06-17 2025-12-18 Carl Zeiss Microscopy Gmbh Verfahren zum Nachführen einer Fokuslage einer Bildgebungseinrichtung in eine Soll-Fokuslage

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09311102A (ja) * 1996-05-24 1997-12-02 Hitachi Ltd フロー式粒子画像解析方法および装置
WO2007139201A1 (ja) * 2006-05-31 2007-12-06 Olympus Corporation 生体試料撮像方法および生体試料撮像装置
JP2012008450A (ja) * 2010-06-28 2012-01-12 Sony Corp 顕微鏡及び合焦点方法
WO2015107927A1 (ja) * 2014-01-17 2015-07-23 ソニー株式会社 画像処理装置および方法、並びにプログラム
WO2019181053A1 (ja) * 2018-03-22 2019-09-26 富士フイルム株式会社 デフォーカス量測定装置、方法およびプログラム、並びに判別器
WO2020071499A1 (ja) * 2018-10-05 2020-04-09 富士フイルム株式会社 フォーカス位置評価装置、方法、及びプログラム
JP2020060602A (ja) * 2018-10-04 2020-04-16 キヤノン株式会社 焦点調整装置およびその制御方法ならびにプログラム
WO2020104521A2 (de) * 2018-11-20 2020-05-28 Leica Microsystems Cms Gmbh Lernender autofokus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2775349B1 (en) 2007-03-08 2021-08-11 Cellavision AB A method for determining an in-focus position and a vision inspection system
JP7494490B2 (ja) * 2020-03-05 2024-06-04 ソニーグループ株式会社 信号取得装置、信号取得システム、及び信号取得方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09311102A (ja) * 1996-05-24 1997-12-02 Hitachi Ltd フロー式粒子画像解析方法および装置
WO2007139201A1 (ja) * 2006-05-31 2007-12-06 Olympus Corporation 生体試料撮像方法および生体試料撮像装置
JP2012008450A (ja) * 2010-06-28 2012-01-12 Sony Corp 顕微鏡及び合焦点方法
WO2015107927A1 (ja) * 2014-01-17 2015-07-23 ソニー株式会社 画像処理装置および方法、並びにプログラム
WO2019181053A1 (ja) * 2018-03-22 2019-09-26 富士フイルム株式会社 デフォーカス量測定装置、方法およびプログラム、並びに判別器
JP2020060602A (ja) * 2018-10-04 2020-04-16 キヤノン株式会社 焦点調整装置およびその制御方法ならびにプログラム
WO2020071499A1 (ja) * 2018-10-05 2020-04-09 富士フイルム株式会社 フォーカス位置評価装置、方法、及びプログラム
WO2020104521A2 (de) * 2018-11-20 2020-05-28 Leica Microsystems Cms Gmbh Lernender autofokus

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KR20240026280A (ko) 2024-02-27
EP4336238A1 (en) 2024-03-13
US20240160089A1 (en) 2024-05-16
CN117693703A (zh) 2024-03-12
WO2023002679A1 (ja) 2023-01-26
JP2023111948A (ja) 2023-08-10
TW202305437A (zh) 2023-02-01
JPWO2023002679A1 (https=) 2023-01-26
EP4336238A4 (en) 2025-05-14

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