JP7290484B2 - 異常検知装置、異常検知システム、及び異常検知方法 - Google Patents
異常検知装置、異常検知システム、及び異常検知方法 Download PDFInfo
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- JP7290484B2 JP7290484B2 JP2019116705A JP2019116705A JP7290484B2 JP 7290484 B2 JP7290484 B2 JP 7290484B2 JP 2019116705 A JP2019116705 A JP 2019116705A JP 2019116705 A JP2019116705 A JP 2019116705A JP 7290484 B2 JP7290484 B2 JP 7290484B2
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- 238000001514 detection method Methods 0.000 title claims description 160
- 238000005259 measurement Methods 0.000 claims description 249
- 238000012545 processing Methods 0.000 claims description 156
- 238000004519 manufacturing process Methods 0.000 claims description 141
- 230000005856 abnormality Effects 0.000 claims description 103
- 238000000034 method Methods 0.000 claims description 52
- 238000004364 calculation method Methods 0.000 claims description 47
- 230000008602 contraction Effects 0.000 claims 1
- 238000013500 data storage Methods 0.000 description 29
- 238000003860 storage Methods 0.000 description 20
- 239000004065 semiconductor Substances 0.000 description 12
- 238000007689 inspection Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000000611 regression analysis Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000003066 decision tree Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000007637 random forest analysis Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000010801 machine learning Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
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| JP2019116705A JP7290484B2 (ja) | 2019-06-24 | 2019-06-24 | 異常検知装置、異常検知システム、及び異常検知方法 |
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| JP2019116705A JP7290484B2 (ja) | 2019-06-24 | 2019-06-24 | 異常検知装置、異常検知システム、及び異常検知方法 |
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| Publication Number | Publication Date |
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| JP2021002295A JP2021002295A (ja) | 2021-01-07 |
| JP2021002295A5 JP2021002295A5 (enExample) | 2022-06-02 |
| JP7290484B2 true JP7290484B2 (ja) | 2023-06-13 |
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| JP2019116705A Active JP7290484B2 (ja) | 2019-06-24 | 2019-06-24 | 異常検知装置、異常検知システム、及び異常検知方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7722253B2 (ja) * | 2022-04-27 | 2025-08-13 | 横河電機株式会社 | 情報処理装置、要因分析方法及び要因分析プログラム |
| WO2024176347A1 (ja) * | 2023-02-21 | 2024-08-29 | 株式会社日立ハイテク | 異常検出装置及び異常検出方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010287011A (ja) | 2009-06-11 | 2010-12-24 | Hitachi Ltd | 装置異常監視方法及びシステム |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4138613B2 (ja) * | 2003-09-05 | 2008-08-27 | 株式会社東芝 | 製造工程設計方法及び製造工程設計支援方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2010287011A (ja) | 2009-06-11 | 2010-12-24 | Hitachi Ltd | 装置異常監視方法及びシステム |
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| JP2021002295A (ja) | 2021-01-07 |
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