JP7289439B2 - suction pad - Google Patents

Description

TECHNICAL FIELD The present invention relates to a suction pad for sucking and conveying an object to be conveyed.

2. Description of the Related Art A suction pad is known that uses negative pressure generated by a vacuum source, such as a vacuum ejector or a vacuum pump, to suck and hold a workpiece (hereinafter referred to as a workpiece). . For example, Patent Literature 1 discloses a suction pad that is suitable for suctioning and holding workpieces that are particularly susceptible to deformation.

In the suction pad disclosed in Patent Document 1, when a negative pressure is generated inside the skirt portion via the suction path to suck the work, the deformation region (first slope) of the skirt portion formed of an elastic body Since the surface region) follows the deformation of the work, it is possible to reliably and smoothly suck and hold even a work that is easily deformed such as a thin work or a bag work filled with contents.

JP 2018-65194 A

However, in the suction pad according to Patent Document 1, the skirt portion is formed in a truncated cone shape, and the outer peripheral edge shape is circular. Therefore, there is a limit to how much the skirt can be deformed and how easily it can be deformed, and there is a limit to how well the skirt can follow the deformation of the workpiece. On the other hand, it is possible to increase the deformation amount and ease of deformation of the skirt by reducing the thickness (thickness) of the skirt, but reducing the thickness of the skirt reduces durability. I had a problem.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances. To provide a suction pad which does not impair durability.

As a result of earnest investigations to solve the above problems, the inventors have found solution means having the following configuration, and have completed the present invention. That is, the present invention is a suction pad having a support provided with a suction path, and a skirt member provided around the lower part of the support and brought into contact with an object to be conveyed during a suction operation through the suction path. The skirt member is formed with elastic petal-like portions separated by a plurality of recesses formed in the range from the outer circumference to the inner circumference thereof, and the elastic petal-like portions are formed in the axial cross-section of the support. a first inclined surface rising from the outer end of the skirt portion; and a second inclined surface formed continuously from the first inclined surface and extending to the lower circumference of the support. is formed with a rib portion protruding from the inner surface thereof, and the rib portion is formed on the second inclined surface and extends in the radial direction of the skirt member.

According to the present invention, it is possible to provide a suction pad that ensures follow-up performance during suction even for easily deformable workpieces, and does not impair the durability of members related to the follow-up performance.

1 is a perspective view of a suction pad according to a first embodiment of the invention; FIG. 1 is a cross-sectional view of a suction pad according to a first embodiment of the invention; FIG. It is a bottom view of the adsorption pad concerning a 1st embodiment of the present invention. FIG. 4 is a state diagram illustrating how the suction pad according to the first embodiment of the present invention sucks and holds a workpiece; FIG. 5 is a perspective view of a suction pad according to a second embodiment of the invention; FIG. 5 is a cross-sectional view of a suction pad according to a second embodiment of the invention; It is a bottom view of the adsorption pad concerning the 2nd Embodiment of this invention. FIG. 10 is a state diagram for explaining how the suction pad according to the second embodiment of the present invention sucks and holds a workpiece;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. It should be noted that the present invention is not limited to the following description, and can be modified as appropriate without departing from the gist of the present invention.

[First embodiment]
The perspective view of FIG. 1, the cross-sectional view of FIG. 2, and the bottom view of FIG. 3 show the suction pad 10 according to this embodiment in a state in which it is not substantially deformed without being subjected to external force. In the suction pad 10 according to the present embodiment, the workpiece, which is the object to be transferred, is brought into contact with the skirt portion 40 as a skirt member provided around the lower part of the support 20, and the internal space formed in the skirt portion 40 is sucked. By reducing the pressure of the surrounding environment of the pad 10 to a level lower than that of the environment surrounding the pad 10, the skirt portion 40 is caused to adhere to the surface of the work to hold the work.

As shown in FIGS. 1 to 3, the support 20 and the skirt portion 40 constituting the suction pad 10 can be formed integrally or by forming them separately and then joining them. The support 20 and the skirt portion 40 can be made of the same resin material, or can be made of a combination of different resin materials. As the resin material constituting the support 20 and the skirt portion 40, nitrile rubber, hydroxide nitrile rubber, silicone rubber, urethane rubber, butyl rubber, styrene-butadiene rubber, and acrylic rubber are used so that these members are elastic. , fluororubber, fluorosilicone rubber, ethylene-propylene rubber, chloroprene rubber, and other synthetic rubber materials and natural rubber materials can be used. Thermoplastic elastomers and thermosetting elastomers can also be used.

It is also possible to use a resin material that exhibits specific properties by adding a filler to the resin material. Specifically, resin materials that have been made conductive by the addition of carbon black, graphite, carbon fiber, metal powder, or metal foil, etc., and heat resistance has been acquired by the addition of carbon nanotubes, carbon black, talc, calcium carbonate, etc. Examples include resin materials and resin materials that have acquired detectability with a metal detector due to the addition of metal powder. Furthermore, in order to improve structural strength, for example, wollastonite, potassium titanate, xonotlite, gypsum fiber, aluminum borate, MOS, aramid fiber, carbon fiber, glass fiber, talc, mica, glass flakes, or poly A resin material to which oxybenzoyl whisker or the like is added, and a resin material to which, for example, silica balloon, glass balloon, or shirasu balloon or the like is added for weight reduction can also be used.

The suction pad 10 according to this embodiment can be formed by known molding such as compression molding, transfer molding, injection molding, or cast molding.

The support 20 has a cylindrical shape with a suction path 22 formed therein. The opening 24 of the suction path 22 is formed with a predetermined inner diameter D1 so that a structure such as a set screw (not shown), which is screwed with an article holding portion of an article conveying machine such as a robot arm, can be inserted. It is A portion of the inner wall 26 of the suction path 22 has an engaged recess 28 having an inner diameter D2 larger than the inner diameter D1 of the opening 24 and capable of engaging a structure such as a set screw inserted through the opening 24. is provided. The suction pad 10 is connected directly below the suction path 22 with a vacuum source such as a vacuum ejector or a vacuum pump provided in the article transport machine connected through engagement between the engaged recess 28 and a structure such as a set screw. By discharging the air in the internal space 30 and the independent internal space 50 described later, and reducing the pressure in the internal space 30 and the independent internal space 50 to a state lower than the surrounding environment, the skirt portion 40 is adsorbed to the surface of the work to remove the work. is configured to hold In addition, although the support body 20 has a cylindrical (cylindrical) shape as an example, it is not limited to this, and may have another polygonal shape. Further, all or part of the support 20 may have a bellows structure that expands and contracts in the vertical direction in FIG. The diameter of the support 20 (the outer diameter of the opening 24) can be arbitrarily set according to the characteristics of the workpiece, the dimensions of the article holding section of the article conveying machine, and the like.

A skirt portion 40 is formed below the outer peripheral surface 21 of the support 20 . The skirt portion 40 is formed so as to extend radially outward and downward from the lower portion of the outer peripheral surface 21 of the support 20 so as to widen. When the lower circumference of the outer peripheral surface 21 of the support 20 is defined as the inner circumference (IC) and the outer edge 41 of the skirt portion 40 is defined as the outer circumference (OE) having the maximum diameter, the skirt portion 40 has Elastic petals 42 are formed separated by a plurality of recesses 60 formed to the inner circumference (IC). That is, the peripheral portion of the skirt portion 40 is configured such that the elastic petal-shaped portions 42 and the concave portions 60 appear alternately and continuously. In addition, in this embodiment, an example in which ten elastic petal-shaped portions 42 separated by ten concave portions 60 are formed is shown. The elastic petal-shaped portion 42 according to the present embodiment corresponds to the outer surface side of the second inclined surface 46 described below, and extends vertically from each side of the second outer surface 461 formed in a substantially rectangular shape. The first outer surface 441 corresponding to the outer surface side of the first inclined surface 44 has an appearance of a substantially rectangular bucket shape, and is elastically deformed by contact with the work and can follow the deformation of the work. It is constructed as a flexible elastic member. In other words, the elastic petal-shaped portion 42 according to the present embodiment is configured such that the peripheral portion of the skirt portion 40 is deformed at two locations so that the second outer surface 461 separated by the adjacent recesses 60 has a substantially rectangular shape. It is configured to have an inflection point.

2, the elastic petal-shaped portion 42 is formed continuously from a first inclined surface 44 rising from the outer end portion 41 and a center side end portion 43 of the first inclined surface 44, and is formed below the support body 20. and a second slanted surface 46 leading to a turn. The first slanted surface 44 and the second slanted surface 46 form the outline of an independent internal space 50 that communicates with the internal space 30 located directly below the suction passage 22 . The first inclined surface 44 has a cross-sectional shape with a predetermined thickness toward the lower side, and each independent internal space 50 defined by these surfaces, including the second inclined surface 46, is defined by the workpiece. Since it is possible to follow the deformation independently, the workpiece can be reliably held by suction. In this case, the thickness of the first inclined surface 44 is preferably smaller than the thickness of the second inclined surface 46 in order to improve the work followability of the outer end of the suction pad 10 and prevent vacuum leakage. . In this embodiment, for the purpose of improving the followability to the deformation of the work, it is not necessary to gradually decrease the thickness of the cross-sectional view of the first inclined surface 44 toward the lower side. There is no risk of impairing the durability of such members.

A plurality of rib portions 48 are formed extending from the second inclined surface 46 in the radial direction of the skirt portion 40 so as to face the internal space 30 of the skirt portion 40 to an independent internal space 50 reaching the first inclined surface 44. (10 in this embodiment). The plurality of ribs 48 are projecting members protruding from the inner surface of the skirt 40 toward the independent internal space 50 formed by the respective elastic petals 42, and are made of the same material as the skirt 40 and integrally formed therewith. can be formed into The rib portion 48 can be formed separately from the skirt portion 40. For example, a resin material having higher rigidity than the skirt portion 40 can be used. The rib portion 48 itself extends radially at regular intervals until it reaches the first inclined surface 44 , with its longitudinal direction being the radial direction of the skirt portion 40 . The bottom surface of the rib portion 48 is formed as an inclined surface 480 that gently descends radially outward. The shape and material of the rib portion 48 are appropriately selected in accordance with the work, etc., in order to facilitate the intake and exhaust and to suppress the side slipping phenomenon of the work. It is preferable that the bottom surface (inclined surface 480) of the rib portion 48 is located closer to the support 20 than the outer periphery (OE) of the outer end portion 41 of the skirt portion 40 so that the decompressed state can be maintained.

When a work contacts the first inclined surface 44 during suction, the first inclined surface 44 elastically deforms in the arrow X (diameter expansion) direction in FIG. 3 while following the shape of the work. As the first inclined surface 44 deforms, the workpiece gradually comes into contact with the outermost inclined surface 480 of the rib portion 48 . Based on the rib portion 48, the first inclined surface 44 and the second inclined surface 46 forming the outline of the independent internal space 50 are bent in the arrow Y direction (along the radial direction) in FIG. The workpiece is transformed into a mountain fold. By transforming the work into a mountain fold within the independent internal space 50 , the work is transformed into a valley fold based on the adjacent concave portions 60 . As described above, with the suction pad 10 according to the present embodiment, the work is deformed into a bellows-folded state in which mountain folds and valley folds are alternately repeated, and the work is sucked. It is possible to suppress the occurrence of a gap with the work, and to reliably suck and hold the easily deformable work. The suction pad 10 according to the present embodiment has a substantially rectangular bucket shape by a first outer surface 441 extending vertically from each side of a second outer surface 461 in which the elastic petal-shaped portion 42 is formed in a substantially rectangular shape. , the adsorption area of the elastic petal-shaped portion 42 can be increased, so that the adsorption force can be increased.

Work suitable for the suction pad 10 according to the present embodiment to be handled is, for example, a thin object or a bag whose surface shape is deformed by a relatively weak force when sucked, but is not particularly limited. not something.

FIG. 4 is a state diagram illustrating how the suction pad 10 according to the present embodiment sucks and holds the work W. As shown in FIG. At the time of suction, the suction pad 10 is connected to an article conveying machine such as a robot arm through a structure such as a set screw that screws together with an article holding portion (not shown). It goes without saying that the number of suction pads 10 to be operated simultaneously can be adjusted according to the weight and shape of the workpiece W. When the workpiece W comes into contact with the outer end 41 of the skirt portion 40 of the suction pad 10, that is, the elastic petal-shaped portion 42, the suction (exhaust) of air by the vacuum source is started. Then, the air in the internal space 30 and the independent internal space 50 positioned directly below the suction path 22 is discharged, and the internal space 30 and the independent internal space 50 are in a state of reduced pressure than the ambient environment. When the work W comes into contact with the first inclined surface 44, the first inclined surface 44 elastically deforms in the arrow X (diameter expansion) direction in FIG. 3 while following the shape of the work W. As the first inclined surface 44 deforms, the workpiece W gradually comes into contact with the outermost inclined surface 480 of the rib portion 48 . Based on the rib portion 48, the first inclined surface 44 and the second inclined surface 46 forming the outline of the independent internal space 50 are bent in the arrow Y direction (along the radial direction) in FIG. The work W is transformed into a mountain fold MF. By transforming the work W into the mountain fold MF in the independent internal space 50 , the work W is transformed into the valley fold VF based on the adjacent concave portions 60 . The work W is attracted to the suction pad 10 by being deformed into a bellows folded state in which mountain folds MF and valley folds VF are alternately repeated.

When removing the adsorption pad 10 adsorbed to the workpiece W, after stopping the suction (exhaust) of air by the vacuum source, for example, a ventilation vent provided in the article conveying machine (not shown) is opened to release the air directly below the suction path 22. The decompressed state is released by flowing into the internal space 30 and the independent internal space 50 located at . With the release of the decompressed state, the elastic deformation of the first inclined surface 44 in contact with the work W is also released, and the first inclined surface 44 and the work W are separated from each other. Next, the work W is separated from the inclined surface 480 of the rib portion 48, and the deformation of the mountain fold MF in the independent space 50 of the work W is also released. By canceling the deformation of the workpiece W in the mountain fold MF in the independent internal space 50, the deformation of the valley fold VF in the adjacent concave portion 60 is also released, so that the suction pad 10 can be removed from the workpiece W. .

[Second embodiment]
The perspective view of FIG. 5, the cross-sectional view of FIG. 6, and the bottom view of FIG. 7 show the suction pad 10' according to this embodiment in a state in which it is not substantially deformed without being subjected to external force. Similar to the suction pad 10 according to the first embodiment, the suction pad 10' according to the present embodiment has a skirt portion 40' as a skirt member provided around the lower part of the support 20'. , and the internal space formed in the skirt portion 40' is made to be in a reduced pressure state than the surrounding environment of the suction pad 10', so that the skirt portion 40' is attracted to the surface of the work to hold the work. .

As shown in FIGS. 5 to 7, the support 20' and the skirt portion 40' that constitute the suction pad 10' can be formed integrally or by forming them separately and then joining them. The support 20' and the skirt portion 40' can be made of the same resin material as shown in the first embodiment, or can be made of a combination of different resin materials.

The support 20' has a cylindrical shape with a suction channel 22'. The opening 24' of the suction path 22' has a predetermined inner diameter D1 so that a structure such as a set screw (not shown) can be inserted, which is screwed with an article holding portion of an article conveying machine such as a robot arm. ' is formed. A portion of the inner wall 26' of the aspiration channel 22' has an inner diameter D2' that is greater than the inner diameter D1' of the opening 24' and is engageable by a structure such as a set screw inserted through the opening 24'. An engaging concave portion 28' is provided. The suction pad 10' has a vacuum source such as a vacuum ejector or a vacuum pump provided in the article conveying machine connected to the engaged concave portion 28' through engagement with a structure such as a set screw. The air in the internal space 30' located directly below and the independent internal space 50' described later is discharged, and the internal space 30' and the independent internal space 50' are made to be in a state of pressure lower than the surrounding environment, thereby reducing the skirt portion 40'. It is configured to be able to hold the work by making it stick to the surface of the work. The support 20' has a cylindrical (cylindrical) shape as an example, but is not limited to this and may have another polygonal shape. Further, all or part of the support 20' may have a bellows structure that expands and contracts in the vertical direction in FIG. The diameter of the support 20' (the outer diameter of the opening 24') can be arbitrarily set according to the characteristics of the workpiece, the dimensions of the article holding section of the article conveying machine, and the like.

A skirt portion 40' is formed at the lower portion of the outer peripheral surface 21' of the support 20'. The skirt portion 40' extends radially outward and downward from the lower portion of the outer peripheral surface 21' of the support 20' so as to widen. When the lower circumference of the outer peripheral surface 21' of the support 20' is defined as the inner circumference (IC), and the outer edge 41' of the skirt portion 40' is defined as the outer circumference (OE) having the maximum diameter, the skirt portion 40' has the outer circumference (OE). Resilient petals 42' are formed separated by a plurality of recesses 60' extending from the outer circumference (OE) to the inner circumference (IC). That is, the peripheral edge of the skirt portion 40' is configured such that the elastic petal-shaped portions 42' and the recesses 60' appear alternately and continuously. This embodiment shows an example in which six elastic petal-shaped portions 42' separated by six recesses 60' are formed. The elastic petal-shaped portion 42' according to the present embodiment corresponds to the outer surface side of the second inclined surface 46' described below, and each of the second outer surfaces 461' formed in a substantially triangular shape with rounded corners. A first outer surface 441' extending vertically from the side with a gentle inclination angle and corresponding to the outer surface side of the first inclined surface 44' has an appearance formed in a substantially triangular bucket shape, and is similar to the workpiece. It is configured as an elastic member that is elastically deformed by contact with the workpiece and can follow the deformation of the workpiece. That is, the elastic petal-shaped portion 42' according to the present embodiment is configured such that the second outer surface 461' separated by the adjacent recesses 60' has a substantially triangular shape with rounded corners. The portion is configured to have one inflection point.

6, the elastic petal-shaped portion 42' is formed continuously from the first inclined surface 44' rising from the outer end portion 41' and the central end portion 43' of the first inclined surface 44'. and a second ramp 46' leading to the lower circumference of the support 20'. The first slanted surface 44' and the second slanted surface 46' form an outline of an independent internal space 50' that communicates with the internal space 30' located directly below the suction passage 22'. The first sloping surface 44' has a cross-sectional shape with, for example, a predetermined wall thickness toward the lower side, and each independent interior space 50 contoured by these surfaces, including the second sloping surface 46'. ' can follow the deformation of the work independently, so that the work can be reliably sucked and held. In this case, the thickness of the first inclined surface 44' is made thinner than the thickness of the second inclined surface 46' in order to improve the work followability of the outer end of the suction pad 10' and prevent vacuum leakage. is preferred. In this embodiment, for the purpose of improving the followability to the deformation of the work, it is not necessary to gradually decrease the thickness of the cross-sectional view of the first inclined surface 44' toward the lower side. There is no fear of impairing the durability of the member related to.

A rib extending radially of the skirt portion 40' from the second inclined surface 46' so as to face the internal space 30' of the skirt portion 40' to the independent internal space 50' reaching the first inclined surface 44'. A plurality of portions 48' are formed (six in this embodiment). A plurality of ribs 48' are projecting members projecting from the inner surface of the skirt portion 40' toward the independent internal space 50' formed by the respective elastic petal-shaped portions 42'. They can be integrally formed from the same material. The rib portion 48' can be formed separately from the skirt portion 40', and for example, a resin material having higher rigidity than the skirt portion 40' can be used. The rib portions 48' themselves have their longitudinal direction in the radial direction of the skirt portion 40' and each extend radially toward the first inclined surface 44' at regular intervals. The bottom surface of the rib portion 48' is formed as an inclined surface 480' that gently descends radially outward. The shape and material of the rib portion 48' are appropriately selected in accordance with the work and the like in order to facilitate smooth intake and exhaust and to suppress the occurrence of the side slip phenomenon of the work. The bottom surface (inclined surface 480') of the rib portion 48' is positioned closer to the support 20' than the outer periphery (OE) of the outer end portion 41' of the skirt portion 40' so that the reduced pressure state can be maintained. preferably configured.

When a work contacts the first inclined surface 44' during suction, the first inclined surface 44' elastically deforms in the arrow X' (diameter expansion) direction in FIG. 7 while following the shape of the work. As the first inclined surface 44' deforms, the workpiece gradually comes into contact with the outermost inclined surface 480' of the rib portion 48'. Based on the rib portion 48', the first inclined surface 44' and the second inclined surface 46' forming the outline of the independent internal space 50' extend in the arrow Y' direction (along the radial direction) in FIG. It bends, and as a result, the workpiece is transformed into a mountain fold. When the work is deformed into a mountain fold within the independent internal space 50', the work is deformed into a valley fold based on the adjacent concave portions 60'. As described above, in the suction pad 10' according to the present embodiment, the work is deformed into a bellows-folded state in which mountain folds and valley folds are alternately repeated, and the work is sucked. It is possible to suppress the occurrence of a gap between 40' and the work, and to reliably hold the easily deformable work by suction. The suction pad 10' according to the present embodiment extends vertically with a gentle inclination angle from each side of the second outer surface 461' in which the elastic petal-shaped portion 42' is formed in a substantially triangular shape with rounded corners. Since the first outer surface 441' is configured in a substantially triangular bucket shape, the work followability of the elastic petal-shaped portion 42' can be increased, so that the reliability of attracting and holding easily deformable work can be improved. can be made

FIG. 8 is a diagram for explaining how the suction pad 10' according to the present embodiment sucks and holds the workpiece W. As shown in FIG. At the time of suction, the suction pad 10' is connected to an article conveying machine such as a robot arm through a structure such as a set screw that is screwed to an article holding portion (not shown). It goes without saying that the number of suction pads 10' to be operated simultaneously can be adjusted according to the weight and shape of the work W. When the workpiece W comes into contact with the outer end 41' of the skirt portion 40' of the suction pad 10', that is, the elastic petal-shaped portion 42', the vacuum source starts sucking (exhausting) air. Then, the air in the internal space 30' and the independent internal space 50' located directly under the suction path 22' is discharged, and the internal space 30' and the independent internal space 50' are in a state of pressure lower than the surrounding environment. When the work W comes into contact with the first inclined surface 44', the first inclined surface 44' follows the shape of the work W and elastically deforms in the arrow X (diameter expansion) direction in FIG. As the first inclined surface 44' deforms, the workpiece W gradually comes into contact with the outermost inclined surface 480' of the rib portion 48'. Based on the rib portion 48', the first inclined surface 44' and the second inclined surface 46' forming the outline of the independent internal space 50' are bent in the arrow Y direction (along the radial direction) in FIG. As a result, the work W is transformed into a mountain fold MF. By transforming the work W into the mountain fold MF within the independent internal space 50', the work W is transformed into the valley fold VF based on the adjacent concave portions 60'. The work W is attracted to the suction pad 10' by being deformed into a bellows folded state in which mountain folds MF and valley folds VF are alternately repeated.

When removing the suction pad 10 ′ that has been sucked to the workpiece W, after stopping the suction (exhaust) of air by the vacuum source, for example, a ventilation vent provided in the article conveying machine (not shown) is opened, and the air is sucked through the suction path 22 . The decompressed state is released by flowing into the 'internal space 30' and the independent internal space 50' located directly below. With the release of the decompressed state, the elastic deformation of the first inclined surface 44' in contact with the work W is also released, and the first inclined surface 44' and the work W are separated. Next, the work W is separated from the inclined surface 480' of the rib portion 48', and the deformation of the mountain fold MF in the independent space 50' of the work W is also released. By canceling the deformation of the workpiece W in the independent internal space 50′, the deformation of the valley fold VF in the adjacent concave portion 60′ is also canceled, so the suction pad 10′ is removed from the workpiece W. be able to.

As described above, according to the present invention, it is possible to provide a suction pad that ensures follow-up performance during suction even for easily deformable workpieces, and does not impair the durability of members related to the follow-up performance. can be done.

In the description of the present embodiment, the form of the suction pad in which 10 or 6 elastic petal-like portions are formed in the skirt portion has been described, but the number of elastic petal-like portions formed in the skirt portion is It is not limited to , but can be appropriately changed in consideration of the material, shape, easiness of deformation, etc. of the workpiece to be sucked and held. Further, the external shape of the elastic petal-shaped portions is not limited to the rectangular tub shape exemplified in the first embodiment or the triangular tub shape exemplified in the second embodiment. There is no limitation on the shape as long as the recess can form an independent space inside. That is, as the elastic petal-shaped portion, the peripheral edge portion of the skirt portion is formed so that the shape of the second outer surface separated by the adjacent recesses has a predetermined shape other than a rectangular shape or a triangular shape (for example, a pentagonal shape). A configuration having a plurality of inflection points (three or more points) may be employed.

10, 10' suction pads 20, 20' support bodies 21, 21' outer peripheral surfaces 22, 22' suction paths 24, 24' openings 26, 26' inner walls 28, 28' engaged recesses 30, 30' internal space 40 , 40' skirt portions 41, 41' outer ends 42, 42' elastic petal-like portions 44, 44' first inclined surfaces 441, 441' first outer surfaces 46, 46' second inclined surfaces 461, 461 'Second outer surfaces 48, 48' Ribs 480, 480' Inclined surfaces 50, 50' Independent internal spaces 60, 60' Recess W Work MF Mountain fold VF Valley fold

Claims (5)

A suction pad having a support provided with a suction path, and a skirt member provided around the lower part of the support and in contact with a transported body during a suction operation via the suction path,
The skirt member is formed with elastic petal-shaped portions separated by a plurality of recesses formed in the range from the outer periphery to the inner periphery thereof,
The elastic petal-shaped portion has a first inclined surface rising from the outer end portion of the skirt member in an axial cross-section of the support, and is continuously formed from the first inclined surface and surrounds the lower portion of the support. and a second inclined surface leading to
The elastic petal-shaped portion is formed with a rib portion protruding from the inner surface thereof, and the rib portion is formed on the second inclined surface and extends in the radial direction of the skirt member. suction pad. 2. The suction pad according to claim 1, wherein the rib portion has an inclined surface extending in the radial direction of the skirt member. 2. The suction pad according to claim 1, wherein the elastic petal-shaped portion is deformed into a mountain fold based on the rib portion during a suction operation through the suction path. 4. The suction pad according to claim 3 , wherein the transported object deforms into a mountain fold as the elastic petal-shaped portion deforms, and deforms into a valley fold based on the concave portion. 2. The suction pad according to claim 1, wherein said support and said skirt member are integrally formed with each other.

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