JP5163541B2 - Vacuum suction pad - Google Patents

Vacuum suction pad Download PDF

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JP5163541B2
JP5163541B2 JP2009047833A JP2009047833A JP5163541B2 JP 5163541 B2 JP5163541 B2 JP 5163541B2 JP 2009047833 A JP2009047833 A JP 2009047833A JP 2009047833 A JP2009047833 A JP 2009047833A JP 5163541 B2 JP5163541 B2 JP 5163541B2
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edge
workpiece
edge holder
skirt
suction
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JP2010201536A (en
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耕一 根本
尚 鈴木
拓人 森
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Mitsubishi Materials Techno Corp
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本発明は、表面に凹凸を有する平板状のワークを搬送する際に、空気の吸引によって生じる真空を利用し吸着する真空パッドに関するものである。   The present invention relates to a vacuum pad that adsorbs using a vacuum generated by suction of air when a flat workpiece having irregularities on its surface is conveyed.

従来より、平板状のワークを搬送する際には、その大きさに見合った複数個の吸着パッドを用いて、上記ワークを吸着することにより搬送を行っていた。その際に用いられる吸着パッドとしては、例えば、特許文献１に示すように、真空吸引源に接続される根本部と、前記根本部と一体的に設けられるスカート部からなり、前記スカート部は、前記根本部の周端部から拡径して延在する第一スカート体と、前記第一のスカート体の周端部から内方に縮径して屈曲する第２スカート体と、前記第２スカート体の周端部から外方に拡径して屈曲する第３スカート体を有するべローズ式真空パッドが提案されている。   Conventionally, when a flat workpiece is conveyed, the workpiece is conveyed by adsorbing the workpiece using a plurality of suction pads corresponding to the size of the workpiece. As the suction pad used in that case, for example, as shown in Patent Document 1, a root portion connected to a vacuum suction source and a skirt portion provided integrally with the root portion, the skirt portion is A first skirt body extending in diameter from a peripheral end portion of the root portion; a second skirt body bending inward from a peripheral end portion of the first skirt body; There has been proposed a bellows type vacuum pad having a third skirt body that is bent by expanding the diameter outward from the peripheral end portion of the skirt body.

しかしながら、この従来のベローズ式真空パッドは、吸着しようとする面に基準長さ２５ｍｍで、最大高さが４００ミクロン（４００ｓ）程度以上の凹凸がある場合には、パッドとワークとの抵触部よりリークが多くなり、パッド内部が真空状態にならず、ワークを吸着することができないという問題がある。また、この状態はベローズを軸方向に強く押し付けても同様である。   However, this conventional bellows type vacuum pad has a reference length of 25 mm on the surface to be adsorbed and has a concavo-convex with a maximum height of about 400 microns (400 s) or more. There is a problem that leaks increase, the inside of the pad is not evacuated, and the workpiece cannot be sucked. This state is the same even if the bellows is strongly pressed in the axial direction.

そこで、例えば、特許文献２に示すように、円盤状をなす支持板と、該支持板の下面に形成され、内部に吸着空間を有する略円筒状のリング状壁部と、前記支持板中央に取り付けられ、前記吸着空間に連通する吸着パイプとを備え、前記リング状壁部の支持板側略３分の２をショアＣ硬度３５及至２５の軟質弾性部材で、接地面側略３分の１をショアＣ硬度１５及至１０の軟質弾性部材で形成して重ね合わせ、かつ吸着空間がすり鉢形状となるよう、支持板側に向かって肉厚としたワーク用吸着パッドが提案されている。   Therefore, for example, as shown in Patent Document 2, a disk-shaped support plate, a substantially cylindrical ring-shaped wall portion formed on the lower surface of the support plate and having an adsorption space therein, and the center of the support plate A suction pipe that is attached and communicates with the suction space, and the support plate side approximately two-thirds of the ring-shaped wall portion is a soft elastic member having a Shore C hardness of 35 to 25, and the contact surface side approximately one-third. Has been proposed which is made of a soft elastic member having a shore C hardness of 15 to 10 and is superposed, and is thickened toward the support plate so that the suction space has a mortar shape.

この従来の吸着パッドは、リング状壁部の支持板側略３分の２をショアＣ硬度３５及至２５の軟質弾性部材で形成するとともに、接地面側略３分の１をショアＣ硬度１５及至１０の軟質弾性部材で形成して重ね合わせることにより、ワークの吸着面に凹凸が生じていた場合には、接地面側の柔らかい軟質弾性部材が、凹凸を吸収して良好な吸着を行うことができる。   In this conventional suction pad, approximately two-thirds of the ring-shaped wall side of the support plate is formed of a soft elastic member having a Shore C hardness of 35 to 25, and approximately one-third of the ground surface side is approximately 15 to Shore C hardness. By forming the 10 soft elastic members and superimposing them, if there are irregularities on the adsorption surface of the workpiece, the soft soft elastic members on the ground contact surface side can absorb the irregularities and perform good adsorption it can.

しかし、この特許文献２の従来技術では、ワークの吸着面に凹凸があった場合には、その凹凸を接地面側の柔らかい軟質弾性部材により吸収し吸着することができるが、ワーク自体が湾曲したり偏角した場合には、これに対応することができず吸着することができないという問題がある。   However, in the prior art of this Patent Document 2, when the workpiece attracting surface has irregularities, the irregularities can be absorbed and adsorbed by the soft elastic elastic member on the grounding surface side, but the workpiece itself is curved. In the case where the angle is deviated, there is a problem that this cannot be dealt with and cannot be adsorbed.

特開平０７−０６０６７４号公報Japanese Patent Application Laid-Open No. 07-060674 特開平０６−３０７２００号公報Japanese Patent Laid-Open No. 06-307200

本発明は、かかる事情に鑑みてなされたもので、平板状のワークを搬送する際に、その吸着面に凹凸があった場合でも、その凹凸を吸収し、かつワークの湾曲または偏角にも対応して吸着することのできる真空パッドを提供することを課題とする。   The present invention has been made in view of such circumstances, and even when a flat workpiece is transported, even if the suction surface has irregularities, the irregularities are absorbed and the workpiece is also curved or deviated. It is an object to provide a vacuum pad that can be adsorbed correspondingly.

上記課題を解決するために、請求項１に記載の発明は、蛇腹状のスカート部の一端部に、このスカート部内を真空にする真空装置からのパイプが接続された基部が気密的に設けられ、上記蛇腹状のスカート部内の大径部に、少なくとも一つ以上の貫通穴が形成された円板状の固定板が設けられ、上記蛇腹状のスカート部の大径部からなる他端部に、当該他端部と当接するとともに、少なくとも一つ以上の貫通穴が形成された軟質ゴムよりなる円板状のエッジホルダが設けられ、当該エッジホルダと上記固定板とが一体的に形成されるとともに、上記エッジホルダの外装面には、上記エッジホルダよりも軟らかい軟質ゴムより形成されて、平面上のワークの板面に当接する環状のエッジ部が気密的に設けられていることを特徴とするものである。   In order to solve the above-mentioned problem, the invention according to claim 1 is characterized in that a base portion connected to a pipe from a vacuum device that evacuates the inside of the skirt portion is hermetically provided at one end portion of the bellows-like skirt portion. A disc-shaped fixing plate in which at least one or more through holes are formed in the large-diameter portion of the bellows-like skirt portion, and the other end portion comprising the large-diameter portion of the bellows-like skirt portion. And a disc-shaped edge holder made of soft rubber having at least one through hole formed in contact with the other end, and the edge holder and the fixing plate are integrally formed. In addition, the exterior surface of the edge holder is formed of a soft rubber softer than the edge holder, and an annular edge portion that comes into contact with the plate surface of the work on a plane is airtightly provided. To do

また、請求項２に記載の発明は、請求項１に記載の真空吸着パッドにおいて、上記エッジホルダは、硬度６０度の軟質ゴムにより形成されていることを特徴とするものである。   According to a second aspect of the present invention, in the vacuum suction pad according to the first aspect, the edge holder is formed of a soft rubber having a hardness of 60 degrees.

そして、請求項３に記載の発明は、請求項１に記載の真空吸着パッドにおいて、上記エッジ部は、硬度３０度の軟質ゴムにより形成されていることを特徴とするものである。   According to a third aspect of the present invention, in the vacuum suction pad according to the first aspect, the edge portion is formed of a soft rubber having a hardness of 30 degrees.

請求項１〜３のいずれかの発明によれば、蛇腹状のスカート部内に、円板状の固定板を設け、この固定板と軟質ゴムよりなるエッジホルダとを一体的に形成するとともに、当該エッジホルダの外装面に、このエッジホルダより軟らかい軟質ゴムよりなるエッジ部を設けているため、ワークを吸着し搬送する際に、ワークが湾曲または偏角によって変形したとしても、軟質ゴムよりなるエッジホルダにより、その変形を吸収することができる。   According to any one of claims 1 to 3, a disk-shaped fixing plate is provided in the bellows-like skirt portion, and the fixing plate and an edge holder made of soft rubber are integrally formed. Since the edge part made of soft rubber softer than the edge holder is provided on the exterior surface of the edge holder, even when the work is attracted and transported, even if the work is deformed by bending or declination, the edge made of soft rubber The holder can absorb the deformation.

また、吸着面に凹凸を有するワークを搬送する場合には、上記エッジホルダを上記固定板に平行に固定することによって、上記外装面に設けられた軟らかい軟質ゴムよりなる環状のエッジ部の先端部の面圧力が均一になるため、吸着面の凹凸を吸収して良好な吸着を行うことができ、搬送作業の効率化を図ることができる。   In addition, when transporting a workpiece having irregularities on the suction surface, by fixing the edge holder in parallel to the fixing plate, the tip of an annular edge portion made of soft soft rubber provided on the exterior surface Since the surface pressure is uniform, it is possible to absorb unevenness on the suction surface and perform good suction, and to improve the efficiency of the transport operation.

さらに、エッジホルダの中心部をスカート部内の大径部に設けれた固定板と一体的に固定することにより、上記エッジホルダが変形したとしても、このエッジホルダの外装面に設けられた環状の上記エッジ部を、常にワークの吸着面に対して直角に維持することができるため、ワークの吸着面に対しての吸着効率を高めることができる。   Furthermore, even if the edge holder is deformed by integrally fixing the center portion of the edge holder with the fixing plate provided in the large-diameter portion in the skirt portion, an annular shape provided on the exterior surface of the edge holder is provided. Since the edge portion can always be maintained at a right angle to the workpiece suction surface, the suction efficiency with respect to the workpiece suction surface can be increased.

そして、蛇腹状のスカート部の大径部からなる他端部と、上記エッジホルダの内装面とを当接するため、ワークの湾曲または偏角によりワークが変形し、その変形をエッジホルダが吸収して変形したとしも、その変形を蛇腹状のスカート部が吸収することができるとともに、上記大径部との当接部は、吸着盤の作用により離脱することがない。その結果、ワークの湾曲または偏角によって変形が生じたとしても、スカート部内の真空を破壊することなく、良好な吸着を行うことができる。   And since the other end part which consists of a large diameter part of a bellows-like skirt part and the interior surface of the said edge holder contact | abut, a workpiece | work deform | transforms by the curvature or declination of a workpiece | work, and the edge holder absorbs the deformation | transformation. Even if deformed, the bellows-like skirt portion can absorb the deformation, and the contact portion with the large-diameter portion is not separated by the action of the suction disk. As a result, even if deformation occurs due to the curvature or declination of the workpiece, good suction can be performed without breaking the vacuum in the skirt portion.

請求項２に記載の発明によれば、エッジホルダを硬度６０度の軟質ゴムにより形成するため、上記エッジホルダ自体の剛性を保つことができ、外装面に取り付けたエッジ部を確実に固定することができるとともに、スカート部内の固定板とを一体的に形成したとしても、ワークの湾曲や偏角に対して変形することができるため、吸着効率を高めることができる。   According to the second aspect of the invention, since the edge holder is formed of soft rubber having a hardness of 60 degrees, the rigidity of the edge holder itself can be maintained, and the edge portion attached to the exterior surface can be securely fixed. In addition, even if the fixing plate in the skirt portion is integrally formed, it can be deformed with respect to the curvature and declination of the workpiece, so that the adsorption efficiency can be increased.

請求項３に記載の発明によれば、エッジ部を硬度３０度の軟質ゴムにより形成するため、ワークの板面に細かな凹凸があったとしても、面圧力を維持したまま吸着することができるのため、あらゆる用途に使用される平板状のワークを吸着することできる。   According to the third aspect of the present invention, since the edge portion is formed of a soft rubber having a hardness of 30 degrees, even if there are fine irregularities on the plate surface of the workpiece, it can be adsorbed while maintaining the surface pressure. Therefore, it is possible to adsorb a flat workpiece used for any application.

本発明の真空吸着パッドの一実施形態を示す正面図の半断面図である。It is a half sectional view of the front view showing one embodiment of the vacuum suction pad of the present invention. 本発明の真空吸着パッドの一実施形態の円板状の固定板を示し、（ａ）は平面図、（ｂ）は正面図を示す。The disk-shaped fixing plate of one Embodiment of the vacuum suction pad of this invention is shown, (a) is a top view, (b) shows a front view. 本発明の真空吸着パッドの一実施形態のエッジ部が取り付けられた円板状のエッジホルダを示し、（ａ）は平面図、（ｂ）は正面図を示す。The disk-shaped edge holder with which the edge part of one Embodiment of the vacuum suction pad of this invention was attached is shown, (a) is a top view, (b) shows a front view. 本発明の真空吸着パッドの凹凸を有する平板状のワークに吸着した状態の説明図であり、（ａ）はワークが湾曲した状態、（ｂ）は偏角した状態である。It is explanatory drawing of the state attracted | sucked to the flat plate-shaped workpiece | work which has the unevenness | corrugation of the vacuum suction pad of this invention, (a) is the state which the workpiece | work curved, (b) is the state which declined. 本発明の真空吸着パッドを吸着機に取り付けた状態を示す説明図である。It is explanatory drawing which shows the state which attached the vacuum suction pad of this invention to the suction device.

図１〜５は、本発明の真空吸着パッドの一実施形態を示すものである。
図１に示すように、本発明の真空吸着パッド１０は、蛇腹状のスカート部２の一端部２ｃに、真空装置からのパイプ９が接続された基部１が気密的に固定され、上記スカート部２内の大径部２ａに設けられた円板状の固定板３と、軟質ゴムよりなる円板状のエッジホルダ４とが、平行になるように一体的に形成されるとともに、このエッジホルダ４の内装面４ｂに、スカート部２の他端部２ｄに形成された大径部２ｂが当接されることにより概略構成されている。 1-5 shows one Embodiment of the vacuum suction pad of this invention.
As shown in FIG. 1, a vacuum suction pad 10 according to the present invention has a base 1 to which a pipe 9 from a vacuum device is connected in an airtight manner to one end 2c of a bellows-like skirt 2. The disk-shaped fixing plate 3 provided on the large-diameter portion 2a in 2 and the disk-shaped edge holder 4 made of soft rubber are integrally formed so as to be parallel to each other. The large-diameter portion 2b formed on the other end portion 2d of the skirt portion 2 is brought into contact with the four interior surfaces 4b.

また、基部１には、中心部に雌ねじが形成された貫通穴１ｃが穿設されている。この基部１の一端面１ａ側には、上記真空装置からのパイプ９の一端部９ａに形成された雄ねじ部が、基部１の雌ねじが形成された貫通穴１ｃと螺合して、気密的に固定されている。さらに、基部１の他端面１ｂには、蛇腹状のスカート部２の一端部を塞ぐ天板部（一端部）２ｃが当接され、固定ボルト７により気密的に固定されている。この天板部（一端部）２ｃには、基部１の貫通穴１ｃと挿通する穴部２ｅが形成されている。   In addition, the base 1 is provided with a through hole 1c having a female screw formed in the center. On the one end face 1a side of the base portion 1, a male screw portion formed on one end portion 9a of the pipe 9 from the vacuum apparatus is screwed into a through hole 1c in which the female screw of the base portion 1 is formed, and is airtight. It is fixed. Further, a top plate portion (one end portion) 2 c that closes one end portion of the bellows-like skirt portion 2 is brought into contact with the other end surface 1 b of the base portion 1 and is hermetically fixed by a fixing bolt 7. The top plate portion (one end portion) 2c is formed with a hole portion 2e through which the through hole 1c of the base portion 1 is inserted.

そして、スカート部２は、天板部（一端部）２ｃの周端部から外方に拡径して延在する第１スカート体２ｅと、この第１スカート体２ｅの周端部から内方に縮径して屈曲する第２スカート体２ｆと、この第２スカート体２ｆの周端部から外方に拡径する第３スカート体２ｇとから構成され蛇腹状に形成されている。この第１スカート体２ｅと第２スカート体２ｆとの境目部は大径部２ａが形成されるとともに、スカート部２の他端部２ｄである第３スカート部２ｇの周端部に大径部２ｂが形成されている。   The skirt portion 2 includes a first skirt body 2e extending outward from the peripheral end portion of the top plate portion (one end portion) 2c and an inward direction from the peripheral end portion of the first skirt body 2e. The second skirt body 2f is bent to a reduced diameter, and the third skirt body 2g is formed in a bellows shape. The second skirt body 2f has a diameter increased outward from the peripheral end of the second skirt body 2f. A large diameter portion 2a is formed at the boundary between the first skirt body 2e and the second skirt body 2f, and a large diameter portion is formed at the peripheral end portion of the third skirt portion 2g which is the other end portion 2d of the skirt portion 2. 2b is formed.

そして、スカート部２内の大径部２ａに設けられた円板状の固定板３は、図２（ａ）に示すように、その中心部に貫通する長穴３ｂが穿設されている。この貫通長穴３ｂの中心部には、図２（ｂ）に示すように、円形をなす凸状の固定金具３ａが、貫通長穴３ｂの長手方向の両端部を開口して接合されている。この固定金具３ａには、その中心に雌ねじが形成された貫通穴３ｃが穿設されている。   The disk-shaped fixing plate 3 provided in the large-diameter portion 2a in the skirt portion 2 is provided with a long hole 3b penetrating through the central portion thereof as shown in FIG. As shown in FIG. 2B, a convex fixing metal fitting 3a having a circular shape is joined to the center of the through long hole 3b with both ends in the longitudinal direction of the through long hole 3b being opened. . The fixing fitting 3a is provided with a through hole 3c having a female screw formed at the center thereof.

さらに、固定板３の固定金具３ａと一体的に形成されるエッジホルダ４は、硬度６０度の軟質ゴムにより形成されている。また、このエッジホルダ４は、図３（ａ）に示すように、円板状に形成され、その中心部に固定板３の固定金具３ａと嵌合する穴部４ｄが穿設されるとともに、その穴部４ｄを中心に貫通穴４ｃ（図では４ヶ所）が穿設されている。   Further, the edge holder 4 formed integrally with the fixing bracket 3a of the fixing plate 3 is made of soft rubber having a hardness of 60 degrees. Further, as shown in FIG. 3A, the edge holder 4 is formed in a disc shape, and a hole portion 4d that fits the fixing bracket 3a of the fixing plate 3 is formed at the center thereof. Through holes 4c (four places in the figure) are formed around the hole 4d.

また、図３（ｂ）に示すように、エッジホルダ４の外装面４ａには、その外周部近傍に凹部４ｅが環状に形成されている。この環状の凹部４ｅには、環状のエッジ部５が嵌合されている。この環状のエッジ部５は、硬度３０度の軟質ゴムより形成されている。また、エッジ部５は、エッジホルダ４の凹部４ｅより外方に突出するとともに、漸次縮小し先端部が鋭角に形成されている。   Moreover, as shown in FIG.3 (b), the recessed part 4e is cyclically | annularly formed in the exterior surface 4a of the edge holder 4 in the outer peripheral part vicinity. An annular edge portion 5 is fitted in the annular recess 4e. The annular edge portion 5 is formed of a soft rubber having a hardness of 30 degrees. Further, the edge portion 5 protrudes outward from the concave portion 4e of the edge holder 4, and is gradually reduced so that the tip portion is formed at an acute angle.

そして、図１に示すように、エッジホルダ４と固定板３とは、エッジホルダ４の内装面４ｂ側に、固定板３の凸状の固定金具３ａの縮小部を、エッジホルダ４の穴部４ｄに嵌合させるとともに、エッジホルダ４の外装面４ａ側に座金６が介装され、締め付けボルト８により固定されて、一体的に形成されている。また、固定板３とエッジホルダ４とは、組み付けた状態において、座金６により平行が維持されている。この座金６は、円板状に形成され、中心部は締め付けボルト８が挿通する貫通穴が形成されているとともに、その貫通穴の周辺には、エッジホルダ４の貫通穴４ｃと同位置に、同形の貫通穴が穿設されている。   As shown in FIG. 1, the edge holder 4 and the fixing plate 3 are formed so that the reduced portion of the convex fixing metal fitting 3 a of the fixing plate 3 is provided on the side of the interior surface 4 b of the edge holder 4. While being fitted to 4d, a washer 6 is interposed on the exterior surface 4a side of the edge holder 4, and is fixed by a fastening bolt 8 to be integrally formed. In addition, the fixed plate 3 and the edge holder 4 are maintained parallel by the washer 6 in the assembled state. The washer 6 is formed in a disc shape, and a through hole through which the tightening bolt 8 is inserted is formed at the center, and the periphery of the through hole is at the same position as the through hole 4c of the edge holder 4, A through hole having the same shape is formed.

以上の構成からなる真空吸着パッド１０を用いて、凹凸を有した平板状のワークｔを真空装置からの吸引により吸着して搬送するためには、まず図５に示すように、吸着機ｎに真空吸着パッド１０を取り付ける。この際に、真空吸着パッド１０の基部１の一端部１ａに、真空装置からのパイプ９を螺合して気密的に固定する。   In order to suck and convey a flat workpiece t having irregularities by suction from a vacuum apparatus using the vacuum suction pad 10 having the above configuration, first, as shown in FIG. A vacuum suction pad 10 is attached. At this time, the pipe 9 from the vacuum apparatus is screwed to the one end 1a of the base 1 of the vacuum suction pad 10 to fix it in an airtight manner.

次いで、真空装置からの吸引を開始して、真空吸着パッド１０を吸着機ｎの作動によりワークｔに当接する。この際に、細かな凹凸を吸着面に形成した平板状のワークの場合には、図４に示すように、エッジホルダ４の外装面４ａに設けられた硬度３０度の軟質ゴムのエッジ部５の先端部の面圧力によって、上記凹凸を吸収して良好な吸着を行うことができる。   Next, suction from the vacuum device is started, and the vacuum suction pad 10 is brought into contact with the workpiece t by the operation of the suction machine n. At this time, in the case of a flat plate-like workpiece in which fine irregularities are formed on the suction surface, as shown in FIG. 4, the edge portion 5 of soft rubber having a hardness of 30 degrees provided on the exterior surface 4a of the edge holder 4 is used. By the surface pressure of the tip portion, the above unevenness can be absorbed and good adsorption can be performed.

また、図４に示すように、平板状のワークを真空吸着バッド１０の吸着によって搬送する際に、当該ワークの湾曲または偏角によって撓んだり、或いは捻れたりした場合には、硬度６０度の軟質ゴムよりなるエッジホルダ４により、ワークｔの変形を吸収して、エッジ部５とワークｔ面との直角を維持して良好な吸着を行うことができる。この際に、エッジホルダ４の中心部は、その外装面４ａに設けられた座金６によって、スカート部２内の大径部に設けられた固定板３との平行を維持するとともに、座金６を当接しないエッジホルダ４の周辺部は、ワークの湾曲または偏角に追従して変形する。   In addition, as shown in FIG. 4, when a flat workpiece is conveyed by suction of the vacuum suction pad 10, if the workpiece is bent or twisted due to the curvature or declination of the workpiece, the hardness is 60 degrees. The edge holder 4 made of soft rubber can absorb the deformation of the workpiece t and maintain the right angle between the edge portion 5 and the workpiece t surface, thereby performing good suction. At this time, the center portion of the edge holder 4 is maintained parallel to the fixing plate 3 provided at the large diameter portion in the skirt portion 2 by the washer 6 provided on the exterior surface 4a, and the washer 6 is The peripheral portion of the edge holder 4 that does not contact is deformed following the curvature or declination of the workpiece.

そして、平板状のワークｔを任意の場所に搬送後、真空装置からの吸引を停止して、真空吸着バッド１０をワークｔより離脱させる。その後、真空吸着パッドは、吸着装置ｎと共に、定位置に戻り、次なるワークの搬送を行う。   And after conveying the flat workpiece | work t to arbitrary places, the suction from a vacuum device is stopped and the vacuum suction pad 10 is made to detach | leave from the workpiece | work t. Thereafter, the vacuum suction pad returns to a fixed position together with the suction device n to carry the next workpiece.

上述の実施形態の真空吸着パッド１０によれば、蛇腹状のスカート部２内に、円板状の固定板３を設け、この固定板３と軟質ゴムよりなるエッジホルダ４とを一体的に形成するとともに、エッジホルダ４の外装面４ａに、このエッジホルダ４より軟らかい軟質ゴムよりなるエッジ部５を設けているため、ワークｔを吸着し搬送する際に、ワークが湾曲または偏角によって変形したとしても、軟質ゴムよりなるエッジホルダ４によって、その変形を吸収することができる。   According to the vacuum suction pad 10 of the above-described embodiment, the disk-shaped fixing plate 3 is provided in the bellows-like skirt portion 2, and the fixing plate 3 and the edge holder 4 made of soft rubber are integrally formed. In addition, since the edge portion 5 made of soft rubber softer than the edge holder 4 is provided on the exterior surface 4a of the edge holder 4, the workpiece is deformed by bending or declination when the workpiece t is sucked and conveyed. However, the deformation can be absorbed by the edge holder 4 made of soft rubber.

また、吸着面に凹凸を有するワークｔを搬送する場合には、エッジホルダ４を固定板３に固定することにより、外装面４ａに設けられた軟らかい軟質ゴムよりなる環状のエッジ部５の先端部の面圧力が均一になるため、ワークの吸着面の凹凸を吸収し良好な吸着を行うことができ、搬送作業の効率化を図ることができる。   In addition, when transporting a workpiece t having irregularities on the suction surface, by fixing the edge holder 4 to the fixing plate 3, the tip of the annular edge portion 5 made of soft soft rubber provided on the exterior surface 4a. Since the surface pressure is uniform, it is possible to absorb irregularities on the suction surface of the workpiece and perform good suction, and to improve the efficiency of the transporting work.

さらに、エッジホルダ４の中心部をスカート部２内の大径部２ａに設けた固定板３と一体的に固定することにより、エッジホルダ４が変形したとしても、このエッジホルダ４の外装面４ａに設けられた環状のエッジ部５は、常にワークｔの吸着面に対して直角に維持することができるため、ワークｔの吸着面に対しての吸着効率を高めることができる。   Furthermore, even if the edge holder 4 is deformed by fixing the center portion of the edge holder 4 integrally with the fixing plate 3 provided on the large diameter portion 2a in the skirt portion 2, the exterior surface 4a of the edge holder 4 is deformed. Since the annular edge portion 5 provided on the workpiece can always be maintained at a right angle to the suction surface of the workpiece t, the suction efficiency of the workpiece t with respect to the suction surface can be increased.

そして、蛇腹状に形成されたスカート部２の大径部２ｂからなる他端部２ｄと、エッジホルダ４の内装面４ｂとを当接することにより、ワークｔが湾曲または偏角により変形し、その変形をエッジホルダ４が吸収して変形したとしも、その変形を蛇腹状のスカート部２が吸収するとともに、大径部２ｂとの当接部は、吸着盤と同等の作用により離脱することがない。その結果、ワークｔの湾曲または偏角によって変形が生じたとしても、スカート部内の真空を破壊することなく、良好な吸着を行うことができる。   Then, the work t is deformed by bending or declination by contacting the other end 2d formed of the large-diameter portion 2b of the skirt portion 2 formed in a bellows shape and the interior surface 4b of the edge holder 4, Even if the edge holder 4 absorbs the deformation and deforms, the bellows-like skirt portion 2 absorbs the deformation, and the contact portion with the large diameter portion 2b can be detached by the same action as the suction disk. Absent. As a result, even if deformation occurs due to the curvature or declination of the workpiece t, good suction can be performed without breaking the vacuum in the skirt portion.

さらに、エッジホルダ４を硬度６０度の軟質ゴムにより形成することによって、エッジホルダ４自体の剛性を保つことができ、外装面４ａに取り付けたエッジ部５を確実に固定することができるとともに、スカート部２内の固定板３と一体的に形成しても、ワークｔの湾曲や偏角に対して変形することができるため、吸着効率を高めることができる。   Further, by forming the edge holder 4 from a soft rubber having a hardness of 60 degrees, the rigidity of the edge holder 4 itself can be maintained, the edge portion 5 attached to the exterior surface 4a can be securely fixed, and the skirt Even if it is formed integrally with the fixing plate 3 in the portion 2, it can be deformed with respect to the curvature and declination of the workpiece t, so that the adsorption efficiency can be increased.

また、エッジ部５を硬度３０度の軟質ゴムにより形成することによって、ワークｔの吸着面に細かな凹凸があったとしても、面圧力を維持したまま吸着することができるのため、あらゆる用途に使用する平板状のワークを吸着することできる。   In addition, by forming the edge portion 5 with a soft rubber having a hardness of 30 degrees, even if there is a fine unevenness on the adsorption surface of the workpiece t, it can be adsorbed while maintaining the surface pressure, so it can be used for all purposes. The flat workpiece to be used can be adsorbed.

さらに、円板状の固定板３とエッジホルダ４とを一体的に形成する際に、エッジホルダ４の外装面４ａ側に円板状の座金６を介装し、固定板３の凸状の固定金具３ａの縮小部側に、締め付けボルト８を螺合して固定するため、軟質ゴムよりなるエッジホルダ４を確実に固定することができるとともに、エッジホルダ４と固定板３とを平行に固定することができる。また、貫通穴４ｃと同形の貫通穴を座金６の同位置に形成するため、ワークｔの湾曲または偏角により、エッジホルダ４が変形したとしも、このエッジホルダ４の貫通穴４ｃの変形によって、閉塞される状態を引き起こすことがなく、真空装置からの吸引を妨げずに効率良く吸引することができる。   Further, when the disk-shaped fixing plate 3 and the edge holder 4 are integrally formed, a disk-shaped washer 6 is interposed on the exterior surface 4 a side of the edge holder 4, and the convex shape of the fixing plate 3 is formed. Since the fastening bolt 8 is screwed and fixed to the reduced portion side of the fixing bracket 3a, the edge holder 4 made of soft rubber can be fixed securely, and the edge holder 4 and the fixing plate 3 are fixed in parallel. can do. Further, since the through hole having the same shape as the through hole 4c is formed at the same position of the washer 6, even if the edge holder 4 is deformed due to the curvature or declination of the workpiece t, the deformation of the through hole 4c of the edge holder 4 As a result, it is possible to perform the suction efficiently without disturbing the suction from the vacuum device without causing a closed state.

なお、上記実施の形態において、蛇腹状のスカート部２内の大径部２ａに設けられる固定板４に穿設される穴を、貫通長穴３ｂを用いる場合についてのみ説明したが、これに限定されるものではなく、例えば、固定板の任意の位置に、少なくとも一つ以上の貫通穴を用いても対応可能である。また、蛇腹状のスカート部２を第１スカート体２ｅと、第２スカート体２ｆと、第３スカート体２ｇとを用いて２段の凹凸を形成する場合につてのみ説明したが、これに限定されるものではなく、例えば、スカート体を増やすことにより、４段または５段の凹凸を形成しても対応可能である。さらに、エッジホルダ４に気密的に設けられた環状のエッジ部５を、エッジホルダ４と別体として形成する場合についてのみ説明したが、これに限定されるものではなく、例えば、エッジホルダ４とエッジ部５とを一体に形成しても対応可能である。   In addition, in the said embodiment, although the hole drilled in the fixing plate 4 provided in the large diameter part 2a in the bellows-like skirt part 2 was demonstrated only about the case where the penetration long hole 3b was used, it is limited to this. For example, at least one or more through holes can be used at any position of the fixing plate. Further, although the description has been given only in the case where the accordion-shaped skirt portion 2 is formed using the first skirt body 2e, the second skirt body 2f, and the third skirt body 2g, the two-step unevenness is described, but the present invention is not limited thereto. For example, it is possible to deal with the case where four or five steps of unevenness are formed by increasing the skirt body. Furthermore, although the case where the annular edge portion 5 provided in an airtight manner on the edge holder 4 is formed as a separate body from the edge holder 4 has been described, the present invention is not limited thereto. Even if it forms the edge part 5 integrally, it can respond.

表面に凹凸を有する平板状のワークを搬送する際に利用することができる。   It can be used when transporting a flat work having irregularities on the surface.

１ 基部
２ スカート部
２ａ 大径部
２ｂ 大径部
２ｃ 一端部（天板部）
２ｄ 他端部
３ 固定板
３ａ 固定金具
３ｂ 貫通長穴
４ エッジホルダ
４ａ 外装面
４ｂ 内装面
４ｃ 貫通穴
５ エッジ部
６ 座金
７ 固定ボルト
８ 締め付けボルト
９ パイプ
１０ 真空吸着パッド
ｔ ワーク
ｎ 吸着機 1 Base part 2 Skirt part 2a Large diameter part 2b Large diameter part 2c One end part (top plate part)
2d Other end portion 3 Fixing plate 3a Fixing bracket 3b Through long hole 4 Edge holder 4a Exterior surface 4b Interior surface 4c Through hole 5 Edge portion 6 Washer 7 Fixing bolt 8 Tightening bolt 9 Pipe 10 Vacuum suction pad t Work n Suction machine

Claims (3)

蛇腹状のスカート部の一端部に、このスカート部内を真空にする真空装置からのパイプが接続された基部が気密的に設けられ、
上記蛇腹状のスカート部内の大径部に、少なくとも一つ以上の貫通穴が形成された円板状の固定板が設けられ、
上記蛇腹状のスカート部の大径部からなる他端部に、当該他端部と当接するとともに、少なくとも一つ以上の貫通穴が形成された軟質ゴムよりなる円板状のエッジホルダが設けられ、当該エッジホルダと上記固定板とが一体的に形成されるとともに、
上記エッジホルダの外装面には、上記エッジホルダよりも軟らかい軟質ゴムより形成されて、平面上のワークの板面に当接する環状のエッジ部が気密的に設けられていることを特徴とする真空吸着パッド。 At one end of the bellows-like skirt part, a base part connected to a pipe from a vacuum device that evacuates the inside of the skirt part is airtightly provided,
A disk-shaped fixing plate in which at least one or more through holes are formed in the large diameter portion in the bellows-shaped skirt portion,
A disc-shaped edge holder made of soft rubber is provided on the other end portion of the large-diameter portion of the bellows-like skirt portion, which is in contact with the other end portion and has at least one through hole. The edge holder and the fixing plate are integrally formed,
The outer surface of the edge holder is formed of soft rubber softer than the edge holder, and an annular edge portion that comes into contact with the plate surface of the workpiece on a plane is airtightly provided. Adsorption pad. 上記エッジホルダは、硬度６０度の軟質ゴムにより形成されていることを特徴とする請求項１に記載の真空吸着パッド。   The vacuum suction pad according to claim 1, wherein the edge holder is made of soft rubber having a hardness of 60 degrees. 上記エッジ部は、硬度３０度の軟質ゴムにより形成されていることを特徴とする請求項１に記載の真空吸着パッド。   The vacuum suction pad according to claim 1, wherein the edge portion is formed of a soft rubber having a hardness of 30 degrees.
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