JP7283164B2 - Diaphragm type compressor, cooling unit, projector, recording device and 3D model manufacturing device - Google Patents

Description

The present invention relates to a diaphragm compressor, a cooling unit, a projector, a recording device, and a three-dimensional structure manufacturing device.

Conventionally, various diaphragm-type compressors have been used that include a diaphragm and a compression section that allows fluid to flow in and out by pressing the diaphragm. For example, Patent Literature 1 discloses a diaphragm pump that has a diaphragm and a pump chamber, and reciprocates the diaphragm to transfer fluid.

JP-A-2002-106468

However, conventional diaphragm compressors, such as the diaphragm pump described in Patent Document 1, cannot effectively compress fluid. Further, simply connecting two or more structures having diaphragms and compression chambers in which the fluid is compressed may move the fluid effectively, but may not compress the fluid effectively. In addition, the entire device becomes large.

A diaphragm compressor according to the present invention for solving the above problems includes a structure including a pressing portion, a diaphragm, and a substrate partly separated from and partly joined to the diaphragm. , the pressing part is disposed on the side of the diaphragm opposite to the substrate, a spaced portion between the diaphragm and the substrate is a part of a flow path through which a fluid flows, and each of the two or more structures are arranged in series.

1 is a schematic diagram showing a usage example of a diaphragm-type compressor according to Example 1 of the present invention in a projector; FIG. 1 is a schematic diagram showing an example of a recording apparatus that can use a diaphragm compressor according to Embodiment 1 of the present invention; FIG. 1 is a schematic diagram showing an example of use of a diaphragm compressor in a recording apparatus according to Example 1 of the present invention; FIG. Schematic diagram showing an example of a three-dimensional modeling apparatus that can use the diaphragm compressor according to the first embodiment of the present invention. FIG. 1 is a schematic diagram showing an example of use of a diaphragm compressor according to Example 1 of the present invention in a three-dimensional modeling apparatus; BRIEF DESCRIPTION OF THE DRAWINGS Front sectional drawing which shows the diaphragm compressor which concerns on Example 1 of this invention. BRIEF DESCRIPTION OF THE DRAWINGS Front sectional drawing which shows the compression unit of the diaphragm compressor which concerns on Example 1 of this invention. 1 is a perspective sectional view showing a compression unit of a diaphragm compressor according to Embodiment 1 of the present invention; FIG. FIG. 2 is a front cross-sectional view showing a diaphragm compressor according to Embodiment 2 of the present invention; The perspective view showing the diaphragm compressor concerning Example 3 of this invention. FIG. 11 is a perspective view showing a diaphragm compressor according to Embodiment 3 of the present invention, viewed from an angle different from that of FIG. 10; 4 is a front cross-sectional view showing a diaphragm compressor according to Embodiment 4 of the present invention; FIG.

First, the present invention will be generally described.
A diaphragm compressor according to a first aspect of the present invention for solving the above problems has a structure including a pressing portion, a diaphragm, and a substrate partly separated from and partly joined to the diaphragm. a body, wherein the pressing portion is disposed on the opposite side of the diaphragm from the substrate, the spaced portion between the diaphragm and the substrate is part of a flow path through which fluid flows, and two or more The channels of each of the structures are arranged in series.

According to this aspect, the fluid can be effectively compressed by two or more structures. In addition, since each channel of two or more structures is a single member arranged in series, the size of the device can be reduced. Therefore, it is possible to provide a compact diaphragm compressor capable of effectively compressing fluid.

A diaphragm-type compressor according to a second aspect of the present invention comprises a buffer chamber for containing fluid compressed by the structure, and the buffer chamber is provided between the spaced portions of the two or more structures via valves. It is characterized by being connected with each.

According to this aspect, since the buffer chamber for containing the fluid compressed by the structure is provided, and the fluid can be compressed even in the buffer chamber, a diaphragm compressor capable of compressing the fluid particularly effectively can be provided. .

A diaphragm compressor according to a third aspect of the present invention is the second aspect, wherein the buffer chamber has two or more It overlaps any one of the spaced portions of the structure.

According to this aspect, the buffer chamber overlaps any one of the spaced portions of the two or more structures when viewed from the direction intersecting the direction in which the two or more structures are arranged in series. there is Therefore, it is possible to reduce the size of the device particularly effectively.

A diaphragm compressor according to a fourth aspect of the present invention is, in the second or third aspect, a first plate portion in which the diaphragm is formed, a second plate portion in which the buffer chamber is formed, and a third plate portion formed between the first plate portion and the second plate portion, in which a path connecting a compression chamber compressed by the pressing portion pressing the diaphragm and the buffer chamber is formed; , wherein the third plate portion has higher rigidity than the first plate portion and the second plate portion.

According to this aspect, the performance of the diaphragm compressor is reduced by providing the highly rigid third plate portion between the first plate portion in which the diaphragm is formed and the second plate portion in which the buffer chamber is formed. It is possible to increase the rigidity of the diaphragm compressor without reducing the

A diaphragm compressor according to a fifth aspect of the present invention is a diaphragm compressor according to any one of the first to fourth aspects, wherein the pressing portion comprises a pressing force transmission plate straddling the diaphragms of each of the two or more structures. are arranged.

According to this aspect, the pressing portion is provided with the pressing force transmission plate that straddles the diaphragms of the two or more structures. For this reason, two or more diaphragms can be pressed synchronously, so that diaphragm pressing control can be simplified.

A diaphragm compressor according to a sixth aspect of the present invention, in any one of the first to fifth aspects, is characterized in that the volumes of the spaced portions of the two or more structures are different in size. Characterized by

According to this aspect, by varying the volume of the spaced portion, two or more structures can be optimized according to the installation location of the diaphragm compressor, the required performance, and the like.

A cooling unit according to a seventh aspect of the present invention includes the diaphragm compressor according to any one of the first to sixth aspects, a fluid heat radiation section, a fluid heat exchange section, a fluid expansion section, wherein the diaphragm compressor is arranged between the heat exchanging section and the heat radiating section.

According to this aspect, since a compact diaphragm compressor capable of effectively compressing a fluid is provided, a compact and high-performance cooling unit can be obtained.

A projector according to an eighth aspect of the present invention includes a light source, a panel that absorbs light, a heat exchange medium, and the cooling unit according to the seventh aspect, wherein the heat exchange medium comprises the light source and the panel. and the heat exchange part.

According to this aspect, since a compact diaphragm compressor capable of effectively compressing a fluid is provided, a compact and high-performance projector can be provided.

A recording apparatus according to a ninth aspect of the present invention comprises a recording head for ejecting ink, an electronic circuit board connected to the recording head, a heat exchange medium, and the cooling unit according to the seventh aspect, A heat exchange medium is provided between one of the recording head and the electronic circuit board and the heat exchange section.

According to this aspect, since a compact diaphragm compressor capable of effectively compressing a fluid is provided, a compact and high-performance recording apparatus can be obtained.

A three-dimensional structure manufacturing apparatus according to a tenth aspect of the present invention includes a hopper that stores raw materials that are constituent materials of a three-dimensional structure, a melting section that melts the raw materials, and the raw materials that are transferred from the hopper to the melting section. a supply path for supplying a heat exchange medium; and the cooling unit of the seventh aspect, wherein the heat exchange medium is provided between the supply path and the heat exchange section. .

According to this aspect, since a compact diaphragm compressor capable of effectively compressing a fluid is provided, a compact and high-performance three-dimensional structure manufacturing apparatus can be provided.

A diaphragm compressor according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[Example 1] (Figs. 1 to 10)
A diaphragm compressor 1 according to Embodiment 1 of the present invention will be described.

<Projector>
First, referring to FIG. 1, a projector 100, which is an example of a device using a diaphragm compressor 1 according to a first embodiment of the present invention, will be described.

A projector 100 shown in FIG. 1 includes a light source unit 102 including a light source 114, a phosphor 111, a dichroic mirror 113, and the like. It also has a panel 112 having an optical element 112a for red light, an optical element 112b for green light, and an optical element 112c for blue light, and an optical element unit 103 having a projection lens 104 and the like. It also has a cooling unit 101 for cooling the light source unit 102 and the optical element unit 103 . Here, the panel 112 is an optical element that absorbs light emitted from the light source 114 .

The cooling unit 101 includes the diaphragm compressor 1 of this embodiment, which will be described later in detail, a heat exchange section 107, a fluid expansion section 108 that is a refrigerant, an evaporator 106 as a heat radiation section, and the like. 109 is configured to allow the primary refrigerant to flow in direction F. With such a configuration, the cooling unit 101 can cool the light source unit 102 and the optical element unit 103, that is, the light source 114 and the panel 112, which are objects to be cooled.

The primary refrigerant is compressed by the diaphragm compressor 1 and heated. Here, the primary refrigerant flowing into the diaphragm compressor 1 is a low pressure gas, and the primary refrigerant flowing out of the diaphragm compressor 1 is a high pressure gas.

A primary refrigerant compressed by the diaphragm compressor 1 is cooled to a predetermined temperature in the heat exchange section 107 . Here, the primary refrigerant cooled in the heat exchange section 107 is a high-pressure liquid.

The primary refrigerant cooled in the heat exchange section 107 is expanded in the expansion section 108 and the temperature is lowered. Here, the primary refrigerant expanded by the expansion section 108 is a low-pressure liquid.

In the evaporator 106 , the primary refrigerant is changed from liquid to gas inside the evaporator 106 to absorb heat inside the evaporator 106 . Here, the light source unit 102 , the optical element unit 103 and the cooling unit 101 are connected by a secondary coolant pipe 110 , and the secondary coolant is circulated through the secondary coolant pipe 110 by the liquid feed pump 105 . That is, a secondary refrigerant serving as a heat exchange medium and a secondary refrigerant pipe 110 are provided between the light source 114 and the panel 112 and the heat exchange section 107 . A primary refrigerant pipe 109 and a secondary refrigerant pipe 110 are arranged side by side inside the evaporator 106 of the cooling unit 101 . Since the evaporator 106 has such an internal configuration, the secondary refrigerant is cooled inside the evaporator 106, which has become low temperature by changing the primary refrigerant from liquid to gas. The light source unit 102 and the optical element unit 103 are cooled by the circulation of the cooled secondary coolant through the light source unit 102 and the optical element unit 103 .

Thus, the heat exchange section 107 is configured to be able to receive heat from the light source 114 and the panel 112 . By configuring the heat exchange unit 107 to receive heat from at least one of the light source 114 and the panel 112 in this manner, a compact and high-performance projector can be provided.

<Recording device>
Next, a recording apparatus 200, which is an example of an apparatus using the diaphragm compressor 1 according to the first embodiment of the present invention, will be described with reference to FIGS. 2 and 3. FIG. Note that the cooling unit 101 used in the recording apparatus 200 has the same configuration as the cooling unit 101 in FIG. 1, so detailed description of the cooling unit 101 is omitted.

As shown in FIG. 2, the recording apparatus 200 has a rectangular box-shaped main body 212, and a carriage 213 is installed in the central region of the main body 212 so as to extend along the main scanning direction A in FIG. It is provided so as to be reciprocally movable in the main scanning direction A by being guided by the main guide shaft 214 .

As shown in FIG. 2, in the central region of the main body 212, a platen 215 as an elongated plate-shaped medium support portion is arranged in a lower position facing the carriage 213 with its longitudinal direction parallel to the main scanning direction. are placed. At the bottom of the front surface of the recording apparatus 200, a paper feeding cassette 216 is removably attached to a recessed mounting portion 212A formed in the main body 212 so that the front side is open. A plurality of ink cartridges 217 are loaded inside a cover 212B that covers the front surface of the right end of the main body 212. As shown in FIG.

The ink in each ink cartridge 217 is supplied to the carriage 213 through a plurality of ink supply tubes (not shown) attached to the flexible wiring board 218, and the recording head provided below the carriage 213 as shown in FIG. Ink droplets are ejected from 219 . The recording head 219 includes pressure elements (piezoelectric elements, electrostatic elements, heating elements, etc.) for applying pressure to the ink to eject the ink, and a predetermined voltage is applied to the pressure elements. Ink droplets are ejected from the corresponding nozzles by being applied.

During printing, a recording medium is fed from the cassette 216, and ink droplets are ejected from the recording head 219 in the process of moving in the main scanning direction A together with the carriage 213 onto the recording medium positioned on the platen 215. Thus, recording for one line is performed. In this way, the recording operation by one scan of the carriage 213 and the transportation operation of the recording medium in the transportation direction B up to the next line are alternately repeated, thereby proceeding the recording on the recording medium. Further, various operation switches 220 including a power switch are provided on the lower left front surface of the main body 212 . It should be noted that the temperature of the print head 219 and the electronic circuit board 211 that sends drive signals to the print head 219 increases as the print proceeds. When the temperature of the recording head 219 rises, the properties of the ink in the ink supply path within the recording head 219 including the nozzles change, and there is a possibility that the ejection performance may deteriorate. Further, when the temperature of the electronic circuit board 211 rises, there is a risk of erroneous transmission of the drive signal.

Therefore, as shown in FIG. 3, the carriage 213 is provided with the cooling unit 101, the liquid transfer pump 105, and the secondary refrigerant pipe 110, similarly to the projector 100 of FIG. Here, a secondary coolant as a heat exchange medium and a secondary coolant pipe 110 are provided between the recording head 219 and the electronic circuit board 211 and the heat exchange section 107 . The carriage 213 is provided with a head unit 210 having a recording head 219 and an electronic circuit board 211 connected to the recording head 219 . It is configured to be able to receive heat from 211 . Since the heat exchange unit 107 is configured to receive heat from at least one of the print head 219 and the electronic circuit board 211 in this manner, a compact and high-performance printing apparatus can be provided.

<Three-dimensional object manufacturing equipment>
Next, a three-dimensional structure manufacturing apparatus 300, which is an example of an apparatus using the diaphragm compressor 1 according to the first embodiment of the present invention, will be described with reference to FIGS. 4 and 5. FIG. Note that the cooling unit 101 used in the recording apparatus 200 has the same configuration as the cooling unit 101 in FIG. 1, so detailed description of the cooling unit 101 is omitted. Here, the X direction in FIGS. 4 and 5 is the horizontal direction, and the Y direction is the horizontal direction and perpendicular to the X direction. Also, the Z direction is the vertical direction.

In this specification, the term "three-dimensional modeling" refers to forming a so-called three-dimensional model. It also includes forming a shape that has a thickness, even if it is a two-dimensional shape.

As shown in FIG. 4, the three-dimensional structure manufacturing apparatus 300 includes a hopper 302 that stores pellets 319 as constituent materials (raw materials) that form the three-dimensional structure. The pellets 319 stored in the hopper 302 are supplied to the circumferential surface 304a of the substantially cylindrical flat screw 304 via the supply path 303 .

A spiral notch 304b is formed in the bottom surface of the flat screw 304 from the circumferential surface 304a to the central portion 304c. Therefore, by rotating the flat screw 304 with the motor 306 with the direction along the Z direction as the rotation axis, the pellets 319 are sent from the circumferential surface 304a to the central portion 304c.

A barrel 305 is provided at a position facing the bottom surface of the flat screw 304 at a predetermined interval. A heater 307 and a heater 308 are provided near the upper surface of the barrel 305 . Since the flat screw 304 and the barrel 305 have such a configuration, by rotating the flat screw 304, a space formed by the notch 304b formed between the bottom surface of the flat screw 304 and the top surface of the barrel 305 is formed. Pellets 319 are fed to portion 320 and move from circumferential surface 304a to central portion 304c. When the pellet 319 moves through the space 320 defined by the notch 304b, the pellet 319 is melted or plasticized by the heat of the heater 307 and the heater 308, and is pressurized by the pressure caused by moving through the narrow space 320. pressured. Thus, the pellet 319 is plasticized and the fluid constituent material is injected from the nozzle 310a.

A moving path 305a of the constituent material, which is the melted pellet 319, is formed in the central portion of the barrel 305 in plan view. The movement path 305a is connected to a nozzle 310a of an injection section 310 that injects the constituent material.

The injection section 310 is configured to continuously inject the constituent material in a fluid state from the nozzle 310a. The injection section 310 is provided with a heater 309 for setting the constituent material to a desired viscosity. The constituent material injected from the injection part 310 is injected in a linear shape. Then, a layer of the constituent material is formed by linearly injecting the constituent material from the injection section 310 .

In the three-dimensional structure manufacturing apparatus 300 of FIG. 4, an injection unit 321 is formed by a hopper 302, a supply path 303, a flat screw 304, a barrel 305, a motor 306, an injection section 310, and the like. Note that the three-dimensional structure manufacturing apparatus 300 of this embodiment is configured to include one injection unit 321 for injecting the constituent material, but may be configured to include a plurality of injection units 321 for injecting the constituent material.

The three-dimensional structure manufacturing apparatus 300 also includes a stage unit 322 for placing layers formed by injection from the injection unit 321 . The stage unit 322 has a plate 311 on which the layers are actually placed. Further, the stage unit 322 includes a first stage 312 on which the plate 311 is placed and whose position can be changed along the Y direction by driving the first driving section 315 . Further, the stage unit 322 includes a second stage 313 on which the first stage 312 is placed and whose position can be changed along the X direction by driving the second driving section 316 . The stage unit 322 includes a base portion 314 that can change the position of the second stage 313 along the Z direction by driving the third driving portion 317 .

The three-dimensional structure manufacturing apparatus 300 is also electrically connected to a control unit 318 that controls various drives of the injection unit 321 and various drives of the stage unit 322 .

Furthermore, the three-dimensional structure manufacturing apparatus 300 includes a supply path cooling section 323 for cooling the supply path 303 . The supply path cooling unit 323 heats the supply path 303 with the heat from the heater 307, the heater 308, and the heater 309, and melts the pellets 319 in the supply path 303, resulting in poor supply of the pellets 319 in the supply path 303. is a device for cooling the supply path 303 to suppress the

As shown in FIG. 5, the supply path cooling unit 323 is provided with the cooling unit 101, the liquid feed pump 105, and the secondary refrigerant pipe 110, similar to the projector 100 in FIG. 1 and the carriage 213 in FIG. It is The secondary refrigerant pipe 110 is arranged near the supply path 303 , and the heat exchange section 107 of the cooling unit 101 is configured to be able to receive heat from the supply path 303 . That is, a secondary refrigerant serving as a heat exchange medium and a secondary refrigerant pipe 110 are provided between the supply path 303 and the heat exchange section 107 . Since the heat exchange section 107 of the cooling unit 101 is configured to be able to receive heat from the supply path 303 in this manner, a compact and high-performance three-dimensional structure manufacturing apparatus can be provided.

<Diaphragm type compressor>
Next, the configuration of the diaphragm compressor 1 of this embodiment will be described in detail with reference to FIGS. 6 to 8. FIG. In addition, in FIGS. 6 to 8, there are cases where some of the constituent members are shown in a simplified form so as to make it easier to understand the outline of the structure, and are shown in a different shape from the actual shape.

As shown in FIG. 6, the diaphragm compressor 1 of the present embodiment includes an outer wall portion 21, a compression unit 10 having a diaphragm 11 inside the outer wall portion 21, and a pressing portion that presses the diaphragm 11 a pressing unit 20 having 22 . The pressing portion 22 of this embodiment is a piezo element, and is configured to be able to press the diaphragm 11 in the pressing direction P by being deformed by applying a voltage. However, the pressing part 22 is not limited to one having a piezo element.

As shown in FIGS. 6 to 8, the compression unit 10 of the present embodiment includes a first plate portion 12 formed with two diaphragms 11 and two chambers 14 as compression chambers, a buffer chamber 15, an inhalation A second plate portion 13 having an opening 16 and a discharge port 17 formed thereon, and a third plate portion 30 formed between the first plate portion 12 and the second plate portion 13 are provided. The first plate portion 12 has a first plate member 12a formed with two diaphragms 11 and a second plate member 12b forming two chambers 14 together with the first plate member 12a. there is 7 and 8, the second plate portion 13 includes a fluid path 16b connecting the suction port 16 and the chamber 14A of the two chambers 14, and a chamber 14B of the two chambers 14. , and a fluid path 17b connecting the discharge port 17. 7 and 8, the third plate portion 30 is a valve that opens and closes a fluid path 16b that connects the suction port 16 and the chamber 14A, and a fluid path 18 that connects the chamber 14A and the buffer chamber 15. 18a, a fluid path 19 that connects the buffer chamber 15 and the chamber 14B, and a valve 17a that opens and closes the fluid path 17b that connects the chamber 14B and the discharge port 17. As shown in FIG. 7 and 8, the second plate member 12b is provided with a valve 16a that opens and closes the fluid path 16b and a valve 19a that opens and closes the fluid path 19. As shown in FIGS.

6 to 8, the compression unit 10 of the present embodiment includes a structure 10A including a diaphragm 11A of the two diaphragms 11 and a chamber 14A, and a structure 10A of the two diaphragms 11. A structure 10B including a diaphragm 11B and a chamber 14B are integrally arranged in series to form one unit.

Further, as shown in FIG. 6, the pressing unit 20 of the present embodiment includes, as the pressing portion 22, a pressing portion 22A capable of pressing the diaphragm 11A and a pressing portion 22B capable of pressing the diaphragm 11B. there is The diaphragm compressor 1 of this embodiment moves the two pressing portions 22 in the pressing direction P to press the two diaphragms 11, thereby effectively compressing the refrigerant, which is a fluid. Specifically, the diaphragm 11A is pressed and released by the pressing portion 22A, thereby sucking the refrigerant from the suction port 16 and introducing it into the chamber 14A. Furthermore, the refrigerant is introduced from the chamber 14A into the buffer chamber 15 by pressing the diaphragm 11A with the pressing portion 22A. Then, the refrigerant is introduced from the buffer chamber 15 into the chamber 14B by pressing and releasing the pressing portion 22B against the diaphragm 11B. By pressing the diaphragm 11B with the pressing portion 22B, the refrigerant is discharged from the chamber 14B through the discharge port 17. As shown in FIG. In addition, in the pressing unit 20 of the present embodiment, the pressing portions 22A and 22B are moved in the pressing direction P synchronously. Further, along with these operations, the refrigerant is compressed in the chambers 14A and 14B, and the refrigerant is also compressed in the buffer chamber 15.

To summarize here, the diaphragm compressor 1 of the present embodiment includes two structures, a structure 10A and a structure 10B, each having a diaphragm 11 and a chamber 14 as a compression chamber in which fluid is compressed. Two structures are formed as one unit arranged in series.

In other words, the diaphragm compressor 1 of the present embodiment includes the pressing portion 22, the diaphragm 11, the second plate portion 13 which is a substrate partly separated from the diaphragm 11 and partly joined to the diaphragm 11, and The pressing portion 22 is arranged on the opposite side of the diaphragm 11 from the second plate portion 13 and the third plate portion 30, and the diaphragm 11 A spaced portion (fluid path 16b, fluid path 17b, fluid path 18, and fluid path 19) between the second plate portion 13 and the third plate portion 30 constitutes a part of the flow path through which the fluid flows. The channels of each of structures 10A and 10B are arranged in series. Since the diaphragm compressor 1 of this embodiment has such a configuration, it can effectively compress the refrigerant, which is a fluid, by the two or more structures 10A and 10B. Further, the diaphragm compressor 1 of this embodiment is a single member in which the flow paths of the two or more structures 10A and 10B are arranged in series, so that the size of the device can be reduced. . Therefore, the diaphragm compressor 1 of this embodiment is a compact diaphragm compressor capable of effectively compressing fluid.
Although the diaphragm compressor 1 of this embodiment has two structures 10A and 10B, it has three or more structures, and the three or more structures are arranged in series. The structure formed as a unit may be sufficient.

Further, the diaphragm compressor 1 of this embodiment includes a buffer chamber 15 that accommodates the fluid compressed by the structures 10A and 10B. Buffer chamber 15 is connected via valves 18a and 19a to chambers 14A and 14B, which are compression chambers of the two structures 10A and 10B, respectively. The diaphragm compressor 1 of this embodiment forms one unit including the two structures 10A and 10B and the buffer chamber 15. As shown in FIG. That is, the diaphragm compressor 1 of this embodiment is provided with a buffer chamber 15 that is connected to the chambers 14A and 14B via valves 18a and 19a and that accommodates the fluid compressed by the structure 10A. 15 is also configured to compress the fluid. Therefore, the diaphragm compressor is capable of compressing fluid particularly effectively.

Further, in the diaphragm compressor 1 of this embodiment, as shown in FIGS. , overlaps the fluid path 18 and the fluid path 19 of the spaced portions of the two or more structures 10A and 10B. For this reason, the diaphragm compressor 1 of this embodiment makes it possible to reduce the size of the device particularly effectively.

Further, in the diaphragm compressor 1 of this embodiment, as shown in FIGS. 6 to 8, the surfaces of the chambers 14A and 14B on the side of the diaphragm 11 are both curved. Since the surface of the chamber 14 on the side of the diaphragm 11 is curved, the diaphragm compressor 1 of the present embodiment can reduce the gap formed in the chamber 14 when pressed, and effectively press the chamber 14. It is possible to compress the fluid particularly effectively.

In addition, in the diaphragm compressor 1 of this embodiment, the volumes of the spaced portions of the structures 10A and 10B are different. By varying the volumes of the separated portions, the two or more structures 10A and 10B can be optimized according to the installation location of the diaphragm compressor 1 and the required performance.

Further, as described above, the diaphragm compressor 1 of this embodiment includes the first plate portion 12 in which the diaphragm 11 and the chamber 14 are formed, the second plate portion 13 in which the buffer chamber 15 is formed, and the first Between the plate portion 12 and the second plate portion 13, there is provided a third plate portion 30 in which fluid paths 18 and 19, which are paths connecting the chamber 14 and the buffer chamber 15, are formed. Here, the third plate portion 30 of the present embodiment is made of metal and has higher rigidity than the first plate portion 12 and the second plate portion 13 made of resin. For example, since the first plate portion 12 has the diaphragm 11, it is difficult to make it highly rigid. However, as in the diaphragm compressor 1 of the present embodiment, the performance of the diaphragm compressor 1 is reduced by making the third plate portion 30 more rigid than the first plate portion 12 and the second plate portion 13. The diaphragm type compressor 1 can be made highly rigid without causing any deformation. In this embodiment, the first plate portion 12 and the third plate portion 30, and the second plate portion 13 and the third plate portion 30 are both adhered with an adhesive. In this case, by making the third plate portion 30 higher in rigidity than the first plate portion 12 and the second plate portion 13, the first plate portion 12 and the third plate portion 30, and the second plate portion 13 and the Peeling of the third plate portion 30 can be suppressed.

As described above, in the pressing unit 20 of the present embodiment, the pressing portions 22A and 22B move in the pressing direction P synchronously. That is, the diaphragm compressor 1 of this embodiment includes two pressing portions 22 that press the diaphragm 11, and the pressing portions 22 are configured to be able to press the two diaphragms 11 synchronously. As in the diaphragm compressor 1 of this embodiment, by adopting a configuration in which two or more diaphragms 11 are synchronously pressed, the pressing control of the diaphragms 11 can be simplified. Further, as described above, in this embodiment, the first plate portion 12 and the third plate portion 30 are adhered with an adhesive agent. By synchronizing them, it is possible to suppress biased movement of the structures 10A and 10B, and to suppress peeling of the first plate portion 12 and the third plate portion 30 .

[Example 2] (Fig. 9)
Next, a diaphragm compressor 1 according to Embodiment 2 of the present invention will be described with reference to FIG. 9 is a diagram corresponding to FIG. 6 of the diaphragm compressor 1 of the first embodiment. Further, constituent members common to those of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

The diaphragm compressor 1 of Example 1 includes a plurality of pressing portions 22 that synchronously press two or more diaphragms 11 . On the other hand, as shown in FIG. 9, the diaphragm compressor 1 of the present embodiment includes only one pressing portion 22, and a pressing portion 22 is positioned between the pressing portion 22 and the diaphragms 11A and 11B. A pressing force transmission plate 31 is provided for simultaneously transmitting the pressing force from the portion 22 to each diaphragm 11 . That is, in the diaphragm compressor 1 of this embodiment, the pressing portion 22 is provided with a pressing force transmission plate 31 that straddles the diaphragms 11A and 11B of the two or more structures 10A and 10B. Therefore, two or more diaphragms 11 can be pressed synchronously, so that the pressing control of the diaphragms 11 can be simplified. In addition, like the diaphragm type compressor 1 of the present embodiment, by adopting a configuration using one pressing portion 22, it is possible to reduce the cost, and it is possible to particularly simplify the pressing control of the diaphragm 11. . In addition, since the pressing portion 22 can be made large, the amount of displacement can be increased, and the fluid can be compressed particularly effectively.

[Example 3] (Figs. 10 and 11)
Next, a diaphragm compressor 1 according to Embodiment 3 of the present invention will be described with reference to FIGS. 10 and 11. FIG. Further, constituent members common to those of the first and second embodiments are denoted by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIGS. 10 and 11, the diaphragm compressor 1 of this embodiment includes a compression unit 10 in which two structures 10A and 10B are arranged in series. Further, the diaphragm compressor 1 of the present embodiment has an actuator 2 that expands and contracts in the expansion and contraction direction E by applying a voltage, and a pressing portion that can press the diaphragm 11 formed in the compression unit 10 in the pressing direction P. A pressing unit 20 having 22 is provided. Specifically, when a voltage is applied and the actuator 2 extends in the extension/contraction direction E, the pressing unit 20 extends in the extension/contraction direction E and contracts in the pressing direction P, and the diaphragm pressing portion 22a of the pressing portion 22 extends to the structure 10A. diaphragm 11A and diaphragm 11B of structure 10B.

As shown in FIG. 11, the compression unit 10 has a suction port 16 formed in the structure 10A and a discharge port 17 formed in the structure 10B. The internal configuration of the compression unit 10 is similar to that of the diaphragm compressor 1 of the first embodiment. The compression unit 10 also includes a structure 10A having a diaphragm 11A and a chamber 14 (not shown) and a structure 10B having a diaphragm 11B and a chamber 14 (not shown). The compression unit 10 is formed as one unit in which two structures 10A and 10B are arranged in series.

As shown in FIGS. 10 and 11, the pressing unit 20 has a cylindrical shape capable of accommodating the compression unit 10 inside. A diaphragm pressing portion 22a of the pressing portion 22 is provided at a position on the first plate portion 12 side and in contact with the diaphragms 11A and 11B. A second plate pressing portion 22b of the pressing portion 22 is provided at a position that contacts with the . In addition, the pressing unit 20 includes actuators 2a and 2b that can extend and contract in the stretching direction E, which is a direction that intersects the longitudinal direction of the pressing portion 22, at both ends of the pressing portion 22 in the longitudinal direction. I have.

Since the pressing unit 20 has such a configuration, a voltage is applied to the actuators 2a and 2b, and the actuators 2a and 2b expand and contract in the expansion and contraction direction E, so that the entire compression unit 10 can be expanded only in the expansion and contraction direction E. It deforms in the pressing direction P as well. Then, when the entire compression unit 10 is deformed in the pressing direction P, the diaphragm pressing portion 22a presses the diaphragms 11A and 11B while the second plate portion pressing portion 22b presses the second plate portion 13. As shown in FIG.

[Example 4] (Fig. 12)
Next, a diaphragm compressor 1 according to Embodiment 4 of the present invention will be described with reference to FIG. Further, constituent members common to those of the first to third embodiments are denoted by the same reference numerals, and detailed description thereof will be omitted.

In the diaphragm compressor 1 of Example 1, the surfaces of the chambers 14A and 14B on the side of the diaphragm 11 were curved. However, like the diaphragm compressor 1 of this embodiment shown in FIG. 12, the surfaces of the chambers 14A and 14B on the side of the diaphragm 11 may be planar.

It goes without saying that the present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the invention described in the claims, and these modifications are also included in the scope of the present invention. For example, the diaphragm compressor 1 of the present invention can be applied to various other devices such as robots in addition to the projector 100, the recording device 200 and the three-dimensional structure manufacturing device 300. Moreover, the pressing unit 20 having a configuration completely different from that of the pressing units 20 of the first to third embodiments may be provided.

DESCRIPTION OF SYMBOLS 1... Diaphragm type compressor, 2... Actuator, 2a... Actuator,
2b... actuator, 10... compression unit, 10A... structure,
10B... Structure, 11... Diaphragm, 11A... Diaphragm,
11B... Diaphragm, 12... First plate portion, 12a... First plate member,
12b... second plate member, 13... second plate portion (substrate), 14... chamber (compression chamber),
14A... chamber (compression chamber), 14B... chamber (compression chamber), 15... buffer chamber,
16... Suction port, 16a... Valve, 16b... Fluid path, 17... Discharge port, 17a... Valve,
17b...fluid path, 18...fluid path, 18a...valve, 19...fluid path, 19a...valve,
20... Pressing unit, 21... Outer wall part, 22... Pressing part, 22A... Pressing part,
22B... Pressing part, 22a... Diaphragm pressing part, 22b... Second plate pressing part,
30... Third plate portion (substrate), 31... Pressing force transmission plate, 100... Projector,
DESCRIPTION OF SYMBOLS 101... Cooling unit, 102... Light source unit, 103... Optical element unit,
104... Projection lens, 105... Liquid feed pump, 106... Evaporator (heat radiation part),
107...Heat exchange part, 108...Expansion part, 109...Primary refrigerant pipe,
110... Secondary refrigerant pipe (heat exchange medium), 111... Phosphor, 112... Panel,
112a... optical element for red light, 112b... optical element for green light,
112c... optical element for blue light, 113... dichroic mirror, 114... light source,
200... Recording device, 210... Head unit, 211... Electronic circuit board,
212A... Mounting part, 212B... Cover, 213... Carriage, 214... Main guide shaft,
215... Platen, 216... Cassette, 217... Ink cartridge,
218... flexible wiring board, 219... recording head, 220... operation switch,
300... three-dimensional structure manufacturing apparatus, 302... hopper, 303... supply route,
304... Flat screw, 304a... Circumferential surface, 304b... Notch,
304c... Central portion, 305... Barrel, 305a... Moving path, 306... Motor,
307...Heater, 308...Heater, 309...Heater, 310...Injection part,
310a... Nozzle, 311... Plate, 312... First stage,
313... Second stage, 314... Base unit, 315... First drive unit, 316... Second drive unit,
317... Third drive unit, 318... Control unit, 319... Pellet, 320... Spatial part,
321... injection unit, 322... stage unit, 323... supply path cooling part

Claims (9)

a pressing part;
a structure comprising a diaphragm and a substrate partially spaced from and partially bonded to the diaphragm;
The pressing portion is arranged on the opposite side of the diaphragm from the substrate,
the spaced portion between the diaphragm and the substrate is part of a flow path through which a fluid flows;
the channels of each of the two or more structures are arranged in series ;
The pressing portions include a first pressing portion that presses the diaphragm of each of the two or more structures, and a second pressing portion that contacts and presses the substrate from a side opposite to the side on which the first pressing portion is provided. 2. A diaphragm compressor , comprising: 2 pressing parts . In the diaphragm compressor according to claim 1,
A buffer chamber containing a fluid compressed by the structure,
A diaphragm compressor, wherein the buffer chamber is connected to a portion of each of the spaced portions of the two or more structures through valves. In the diaphragm compressor according to claim 2,
The buffer chamber overlaps any one of the spaced portions of the two or more structures when viewed from a direction intersecting the direction in which the two or more structures are arranged in series. A diaphragm compressor characterized by: In the diaphragm compressor according to claim 2 or 3,
a first plate portion in which the diaphragm is formed; a second plate portion in which the buffer chamber is formed; and the pressing portion pressing the diaphragm between the first plate portion and the second plate portion. a third plate portion formed with a path connecting the compression chamber compressed by and the buffer chamber,
A diaphragm compressor, wherein the third plate portion has higher rigidity than the first plate portion and the second plate portion. In the diaphragm compressor according to any one of claims 1 to 4 ,
A diaphragm compressor, wherein the volumes of the spaced portions of each of the two or more structures are different in size. A diaphragm compressor according to any one of claims 1 to 5 ;
a fluid heat sink;
a fluid heat exchange section;
a fluid expansion section;
A cooling unit, wherein the diaphragm compressor is arranged between the heat exchanging section and the heat radiating section. a light source;
a panel that absorbs light;
a heat exchange medium;
a cooling unit according to claim 6 ;
with
The projector according to claim 1, wherein the heat exchange medium is provided between one of the light source and the panel and the heat exchange section. a recording head that ejects ink;
an electronic circuit board connected to the recording head;
a heat exchange medium;
a cooling unit according to claim 6 ;
with
A recording apparatus, wherein the heat exchange medium is provided between one of the recording head and the electronic circuit board and the heat exchange section. a hopper that contains raw materials that will be constituent materials of the three-dimensional model;
a melting section that melts the raw material;
a supply path for supplying the raw material from the hopper to the melting section;
a heat exchange medium;
a cooling unit according to claim 6 ;
with
The three-dimensional structure manufacturing apparatus, wherein the heat exchange medium is provided between the supply path and the heat exchange section.

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