JP2020159227A - Diaphragm compressor, cooling unit, projector, recording device and three-dimensional structure manufacturing device - Google Patents

Abstract

To provide a diaphragm compressor capable of effectively compressing fluid.SOLUTION: A diaphragm compressor 1 comprises: a diaphragm 3; and a substrate 4 that is connected to the diaphragm 3 and sandwiches the fluid which is compressed by pressing the diaphragm 3 in a pressing direction P, together with the diaphragm 3. In the diaphragm 3 of a region R where the fluid is compressed by the diaphragm 3 and the substrate 4 in a plan view, an annular groove 3b having a thin thickness is provided in the pressing direction P. With the diaphragm compressor 1 having such a configuration, it is possible to compress fluid effectively.SELECTED DRAWING: Figure 6

Description

The present invention relates to a diaphragm type compressor, a cooling unit, a projector, a recording device, and a three-dimensional model manufacturing device.

Conventionally, various diaphragm type compressors equipped with a diaphragm have been used. Among such devices, there is a diaphragm type compressor including a diaphragm and a compression chamber in which a fluid is compressed by pressing the diaphragm. For example, Patent Document 1 discloses a microdiaphragm pump including a diaphragm and a diaphragm chamber in which a fluid is compressed by pressing the diaphragm.

Japanese Unexamined Patent Publication No. 2011-256741

However, in a diaphragm type compressor provided with a conventional diaphragm and a compression chamber, the fluid may not be effectively compressed because the reduction rate of the volume of the compression chamber when the diaphragm is pressed is not sufficient. For example, the microdiaphragm pump of Patent Document 1 is not configured to be able to effectively compress the fluid because the reduction rate of the volume of the diaphragm chamber due to pressing the diaphragm is not sufficient.

The diaphragm type compressor of the present invention for solving the above problems includes a diaphragm and a substrate which is connected to the diaphragm and sandwiches a fluid compressed by pressing the diaphragm in a pressing direction with the diaphragm. In a plan view, the diaphragm in a region where the fluid is compressed by the diaphragm and the substrate is provided with a ring-shaped groove having a thin thickness in the pressing direction.

The schematic diagram which shows the use example in the projector of the diaphragm type compressor which concerns on Example 1 of this invention. The schematic diagram which shows the example of the recording apparatus which can use the diaphragm type compressor which concerns on Example 1 of this invention. The schematic diagram which shows the use example in the recording apparatus of the diaphragm type compressor which concerns on Example 1 of this invention. The schematic diagram which shows the example of the 3D modeling apparatus which can use the diaphragm type compressor which concerns on Example 1 of this invention. The schematic diagram which shows the use example in the 3D modeling apparatus of the diaphragm type compressor which concerns on Example 1 of this invention. The schematic diagram which shows the diaphragm type compressor which concerns on Example 1 of this invention. FIG. 3 is a perspective sectional view showing a diaphragm type compressor according to a first embodiment of the present invention. An enlarged perspective sectional view showing a part of the diaphragm type compressor according to the first embodiment of the present invention. An enlarged perspective sectional view showing a part of the diaphragm type compressor according to the second embodiment of the present invention. The graph which shows the displacement amount of the compression chamber at the time of pressing a diaphragm in the diaphragm type compressor which concerns on Example 1 and Example 2 of this invention, and the diaphragm type compressor which concerns on Comparative Example 1. FIG. An enlarged perspective sectional view showing a part of the diaphragm type compressor according to the third embodiment of the present invention. FIG. 3 is a perspective sectional view showing a diaphragm type compressor according to a fourth embodiment of the present invention. An enlarged perspective sectional view showing a part of the diaphragm type compressor according to the fourth embodiment of the present invention.

First, the present invention will be described schematically.
In the diaphragm type compressor of the first aspect of the present invention for solving the above problems, a diaphragm and a fluid connected to the diaphragm and compressed by pressing the diaphragm in a pressing direction are sandwiched between the diaphragm and the diaphragm. It is characterized in that a ring-shaped groove having a thickness in the pressing direction is provided in the diaphragm in a region where the diaphragm and the substrate compress a fluid in a plan view.

According to this aspect, since the groove portion recessed in the pressing direction is provided in the region (overlap region) where the fluid is compressed between the diaphragm and the substrate in a plan view, the diaphragm can be efficiently deformed and the fluid can be deformed. Can be effectively compressed.

The diaphragm type compressor according to the second aspect of the present invention is characterized in that, in the first aspect, the groove portion is provided with a pressing assisting member that assists the pressing of the diaphragm.

According to this aspect, since the groove portion is provided with the pressing assisting member for assisting the pressing of the diaphragm, the diaphragm can be deformed particularly effectively.

In the second aspect, the diaphragm type compressor according to the third aspect of the present invention includes a receiving portion that receives a pressing force from a pressing portion that presses the diaphragm in the pressing direction, and the pressing auxiliary member and the receiving portion. The portions are characterized in that they overlap in the pressing direction.

According to this aspect, the pressing force from the pressing portion can be efficiently transmitted to the pressing auxiliary member by the receiving portion.

The diaphragm type compressor according to the fourth aspect of the present invention is characterized in that, in the third aspect, the receiving portion has a higher rigidity than the diaphragm.

According to this aspect, since the receiving portion has a higher rigidity than the diaphragm, the pressing force from the pressing portion can be transmitted to the pressing auxiliary member particularly efficiently.

In the diaphragm type compressor of the fifth aspect of the present invention, in any one of the second to fourth aspects, the diaphragm has an island portion surrounded by the groove portion, and in the receiving portion, the said The surface facing the groove portion is located on the pressing direction side with respect to the surface facing the island portion.

According to this aspect, the diaphragm has an island portion surrounded by a groove portion, and the receiving portion has a concave portion at a position facing the island portion (convex portion). Therefore, by fitting the concave portion to the convex portion. The receiving portion can be easily and accurately positioned with respect to the diaphragm.

The diaphragm type compressor according to the sixth aspect of the present invention is characterized in that, in any one of the second to fifth aspects, the pressing auxiliary member has a Young's modulus smaller than that of the diaphragm.

According to this aspect, since the pressing auxiliary member has a smaller Young's modulus and is softer than the diaphragm, damage to the diaphragm in the groove due to pressing the groove with the pressing auxiliary member can be suppressed.

The cooling unit according to the seventh aspect of the present invention includes a diaphragm type compressor according to any one of the first to sixth aspects, a fluid heat dissipation section, a fluid heat exchange section, and a fluid expansion section. The diaphragm type compressor is arranged between the heat exchange section and the heat dissipation section.

According to this aspect, since the diaphragm type compressor capable of effectively compressing the fluid is provided, a high-performance cooling unit can be obtained.

The projector of the eighth aspect of the present invention includes a light source, a panel that absorbs light, a heat exchange medium, and a cooling unit of the seventh aspect, and the heat exchange medium includes the light source and the panel. It is characterized in that it is provided between at least one of the above and the heat exchange unit.

According to this aspect, since the diaphragm type compressor capable of effectively compressing the fluid is provided, a high-performance projector can be obtained.

The recording device of the ninth aspect of the present invention includes a recording head for ejecting ink, an electronic circuit board connected to the recording head, a heat exchange medium, and a cooling unit of the seventh aspect. The heat exchange medium is provided between at least one of the recording head and the electronic circuit board and the heat exchange unit.

According to this aspect, since the diaphragm type compressor capable of effectively compressing the fluid is provided, a high-performance recording device can be obtained.

The three-dimensional model manufacturing apparatus according to the tenth aspect of the present invention includes a hopper that houses a raw material that is a constituent material of the three-dimensional model, a melting portion that melts the raw material, and the raw material from the hopper to the melting portion. The heat exchange medium is provided between the supply path and the heat exchange unit, comprising a supply path for supplying the heat exchange medium, a heat exchange medium, and a cooling unit according to the seventh aspect. ..

According to this aspect, since the diaphragm type compressor capable of effectively compressing the fluid is provided, it is possible to obtain a high-performance three-dimensional model manufacturing apparatus.

Hereinafter, the diaphragm type compressor according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[Example 1] (FIGS. 1 to 10)
The diaphragm type compressor 1 according to the first embodiment of the present invention will be described.

<Projector>
First, with reference to FIG. 1, a projector 100, which is an example of an apparatus using the diaphragm type compressor 1 according to the first embodiment of the present invention, will be described.

The projector 100 shown in FIG. 1 includes a light source unit 102 including a light source 114, a phosphor 111, a dichroic mirror 113, and the like. It also includes an optical element unit 103 including an optical element 112a for red light, an optical element 112b for green light, an optical element 112c for blue light, a projection lens 104, and the like. Further, a cooling unit 101 for cooling the light source unit 102 and the optical element unit 103 is provided. Here, the panel 112 is an optical element that absorbs the light emitted from the light source 114.

The cooling unit 101 includes a diaphragm type compressor 1, a heat exchange section 107, an expansion section 108 of a fluid as a refrigerant, an evaporator 106 as a heat dissipation section, and the like, which will be described in detail later, and is a primary refrigerant pipe. The primary refrigerant flows through 109 in the direction F. With such a configuration, the cooling unit 101 can cool the light source unit 102 and the optical element unit 103, that is, the light source 114 and the panel 112, which are objects to be cooled.

The primary refrigerant is compressed by the diaphragm type compressor 1 and the temperature is raised. Here, the primary refrigerant flowing into the diaphragm type compressor 1 is a low pressure gas, and the primary refrigerant flowing out from the diaphragm type compressor 1 is a high pressure gas.

The primary refrigerant compressed by the diaphragm type compressor 1 is cooled to a predetermined temperature by the heat exchange unit 107. Here, the primary refrigerant cooled by the heat exchange unit 107 is a high-pressure liquid.

The primary refrigerant cooled by the heat exchange unit 107 is expanded by the expansion unit 108, and the temperature drops. Here, the primary refrigerant expanded by the expansion unit 108 is a low-pressure liquid.

In the evaporator 106, the primary refrigerant is changed from a liquid to a gas inside the evaporator 106, and the heat inside the evaporator 106 is absorbed. Here, the light source unit 102, the optical element unit 103, and the cooling unit 101 are connected by a secondary refrigerant pipe 110, and the secondary refrigerant circulates in the secondary refrigerant pipe 110 by the liquid feed pump 105. That is, a secondary refrigerant and a secondary refrigerant pipe 110 as heat exchange media are provided between the light source 114 and the panel 112 and the heat exchange unit 107. The primary refrigerant pipe 109 and the secondary refrigerant pipe 110 are arranged side by side inside the evaporator 106 of the cooling unit 101. Since the evaporator 106 has such an internal configuration, the secondary refrigerant is cooled inside the evaporator 106 which has become cold by changing the primary refrigerant from a liquid to a gas. The cooled secondary refrigerant circulates in the light source unit 102 and the optical element unit 103, so that the light source unit 102 and the optical element unit 103 are cooled.

As described above, the heat exchange unit 107 is configured to be able to receive the heat from the light source 114 and the panel 112. As described above, the heat exchange unit 107 is configured to be able to receive heat from at least one of the light source 114 and the panel 112, so that a high-performance projector can be obtained.

<Recording device>
Next, a recording device 200, which is an example of a device using the diaphragm type compressor 1 according to the first embodiment of the present invention, will be described with reference to FIGS. 2 and 3. Since the cooling unit 101 used in the recording device 200 has the same configuration as the cooling unit 101 of FIG. 1, detailed description of the cooling unit 101 will be omitted.

As shown in FIG. 2, the recording device 200 has a square box-shaped main body 212, and a carriage 213 is installed in the central region of the main body 212 so as to extend along the main scanning direction A in FIG. Guided by the guide spindle 214, the guide spindle 214 is provided so as to be reciprocally movable in the principal scanning direction A.

As shown in FIG. 2, in the central region of the main body 212, a platen 215 as a long plate-shaped medium support portion is placed at a lower position facing the carriage 213 in a state in which the longitudinal direction thereof is parallel to the main scanning direction. Have been placed. A paper feed cassette 216 is mounted on the lower part of the front surface of the recording device 200 in a state where it can be inserted and removed from the concave mounted portion 212A formed in the main body 212 so that the front side opens. Further, a plurality of ink cartridges 217 are loaded inside the cover 212B that covers the front surface of the right end portion of the main body 212.

The ink of each ink cartridge 217 is supplied to the carriage 213 through a plurality of ink supply tubes (not shown) attached to the flexible wiring board 218, and the recording head provided at the lower part of the carriage 213 as shown in FIG. Ink droplets are ejected from 219. The recording head 219 has a pressure element (piezoelectric element, electrostatic element, heat generating element, etc.) that applies a pressure for ejecting ink to the ink for each nozzle, and a predetermined voltage is applied to the pressure element. When applied, ink droplets are ejected from the corresponding nozzles.

At the time of recording, the recording medium is fed from the cassette 216, and ink droplets are ejected from the recording head 219 in the process of moving to the main scanning direction A together with the carriage 213 with respect to the recording medium located on the platen 215. As a result, one line of recording is performed. In this way, the recording operation by one scan of the carriage 213 and the transfer operation of the recording medium in the transfer direction B to the next line are alternately repeated, so that the recording on the recording medium is advanced. Further, various operation switches 220 including a power switch are provided in the lower part of the front left end of the main body 212. Along with recording, the temperature of the electronic circuit board 211 that sends a drive signal to the recording head 219 and the recording head 219 rises. When the temperature of the recording head 219 rises, the properties of the ink in the ink supply path in the recording head 219 including the nozzle change, and the ejection performance may deteriorate. Further, when the temperature of the electronic circuit board 211 rises, there is a risk that the drive signal may be erroneously transmitted.

Therefore, as shown in FIG. 3, the carriage 213 is provided with a cooling unit 101, a liquid feed pump 105, and a secondary refrigerant pipe 110, as in the projector 100 of FIG. Here, a secondary refrigerant and a secondary refrigerant pipe 110 as heat exchange media are provided between the recording head 219, the electronic circuit board 211, and the heat exchange unit 107. The carriage 213 is provided with a head unit 210 including a recording head 219 and an electronic circuit board 211 connected to the recording head 219. The heat exchange unit 107 of the cooling unit 101 includes the recording head 219 and the electronic circuit board. It is configured to be able to receive heat from 211. As described above, the heat exchange unit 107 is configured to be able to receive heat from at least one of the recording head 219 and the electronic circuit board 211, so that a high-performance recording device can be obtained.

<Three-dimensional model manufacturing equipment>
Next, a three-dimensional model manufacturing apparatus 300, which is an example of an apparatus using the diaphragm type compressor 1 according to the first embodiment of the present invention, will be described with reference to FIGS. 4 and 5. Since the cooling unit 101 used in the recording device 200 has the same configuration as the cooling unit 101 of FIG. 1, detailed description of the cooling unit 101 will be omitted. Here, the X direction in FIGS. 4 and 5 is a horizontal direction, and the Y direction is a horizontal direction and a direction orthogonal to the X direction. The Z direction is the vertical direction.

In addition, "three-dimensional modeling" in this specification indicates that a so-called three-dimensional model is formed, and is so-called, for example, a flat plate shape, for example, a shape composed of one layer. It is also included to form a shape having a thickness even if it is a two-dimensional shape.

As shown in FIG. 4, the three-dimensional model manufacturing apparatus 300 includes a hopper 302 that houses pellets 319 as a constituent material (raw material) constituting the three-dimensional model. The pellets 319 housed in the hopper 302 are supplied to the circumferential surface 304a of the substantially columnar flat screw 304 via the supply path 303.

A spiral notch 304b extending from the circumferential surface 304a to the central portion 304c is formed on the bottom surface of the flat screw 304. Therefore, by rotating the flat screw 304 with the motor 306 in the direction along the Z direction as the rotation axis, the pellets 319 are fed from the circumferential surface 304a to the central portion 304c.

Barrels 305 are provided at positions facing the bottom surface of the flat screw 304 at predetermined intervals. A heater 307 and a heater 308 are provided near the upper surface of the barrel 305. Since the flat screw 304 and the barrel 305 have such a configuration, the space formed by the notch 304b formed between the bottom surface of the flat screw 304 and the top surface of the barrel 305 by rotating the flat screw 304. Pellets 319 are supplied to the portion 320 and move from the circumferential surface 304a to the central portion 304c. When the pellet 319 moves through the space portion 320 due to the notch 304b, the pellet 319 is melted or plasticized by the heat of the heater 307 and the heater 308, and is applied by the pressure accompanying the movement of the narrow space portion 320. Be pressured. By plasticizing the pellet 319 in this way, the fluid constituent material is ejected from the nozzle 310a.

In a plan view, a movement path 305a of a constituent material, which is a molten pellet 319, is formed in the central portion of the barrel 305. The movement path 305a is connected to the nozzle 310a of the injection unit 310 that ejects the constituent material.

The injection unit 310 has a configuration capable of continuously injecting a fluid-state constituent material from the nozzle 310a. The injection unit 310 is provided with a heater 309 for adjusting the constituent material to a desired viscosity. The constituent material injected from the injection unit 310 is injected in a linear shape. Then, the constituent material is linearly ejected from the injection portion 310 to form a layer of the constituent material.

In the three-dimensional model manufacturing apparatus 300 of FIG. 4, the injection unit 321 is formed by the hopper 302, the supply path 303, the flat screw 304, the barrel 305, the motor 306, the injection unit 310, and the like. The three-dimensional molded article manufacturing apparatus 300 of this embodiment is configured to include one injection unit 321 for injecting the constituent material, but may be configured to include a plurality of injection units 321 for injecting the constituent material.

Further, the three-dimensional model manufacturing apparatus 300 includes a stage unit 322 for mounting a layer formed by being injected from the injection unit 321. The stage unit 322 includes a plate 311 on which the layer is actually placed. Further, the stage unit 322 includes a first stage 312 on which a plate 311 is placed and whose position can be changed along the Y direction by driving the first drive unit 315. Further, the stage unit 322 includes a second stage 313 on which the first stage 312 is mounted and whose position can be changed along the X direction by driving the second drive unit 316. The stage unit 322 includes a base unit 314 that can change the position of the second stage 313 along the Z direction by driving the third drive unit 317.

Further, the three-dimensional model manufacturing apparatus 300 is electrically connected to a control unit 318 that controls various drives of the injection unit 321 and various drives of the stage unit 322.

Further, the three-dimensional model manufacturing apparatus 300 includes a supply path cooling unit 323 for cooling the supply path 303. In the supply path cooling unit 323, the heat generated by the heater 307, the heater 308, the heater 309, and the like heats the supply path 303, and the pellet 319 of the supply path 303 melts, causing a supply failure of the pellet 319 in the supply path 303. It is a device for cooling the supply path 303 in order to suppress the above.

As shown in FIG. 5, the supply path cooling unit 323 is provided with a cooling unit 101, a liquid feed pump 105, and a secondary refrigerant pipe 110, similarly to the projector 100 in FIG. 1 and the carriage 213 in FIG. Has been done. The secondary refrigerant pipe 110 is arranged in the vicinity of the supply path 303, and the heat exchange unit 107 of the cooling unit 101 is configured to be able to receive heat from the supply path 303. That is, a secondary refrigerant and a secondary refrigerant pipe 110 as heat exchange media are provided between the supply path 303 and the heat exchange unit 107. As described above, since the heat exchange unit 107 of the cooling unit 101 is configured to be able to receive the heat from the supply path 303, it is possible to obtain a high-performance three-dimensional model manufacturing apparatus.

<Diaphragm compressor>
Next, the configuration of the diaphragm type compressor 1 of this embodiment will be described in detail with reference to FIGS. 6 to 8. In addition, in FIGS. 6 to 8, in order to make it easy to understand the outline of the structure, some of the constituent members are omitted, or some of the constituent members are simplified and shown. It may be expressed differently.

As shown in FIG. 6, the diaphragm type compressor 1 of this embodiment is provided between the actuator 2, the actuator 2, and the diaphragm 3 as a pressing portion that presses the diaphragm 3 and the diaphragm 3 in the pressing direction P. It has a columnar receiving portion 9 (receiving portion 9A), a substrate 4 connected to the diaphragm 3, and an outer wall portion 5 covering them. The actuator 2 of this embodiment is a piezoelectric element, which is connected to an amplifier (not shown) connected to a signal generator (not shown), and receives the signal generator and the amplifier by driving the amplifier. The diaphragm 3 can be pressed in the pressing direction P via the 9. Here, the pressing direction P corresponds to the direction in which the diaphragm 3 is displaced as the actuator 2 is driven.

As shown in FIG. 6, in the diaphragm type compressor 1 of the present embodiment, a primary refrigerant which is a fluid can flow into the compression chamber 6 on the side of the substrate 4 opposite to the actuator 2 in the pressing direction P. A suction port 17 is provided, and the suction port 17 is provided with a suction valve 7. The diaphragm 3 is released from the state of being pressed by the actuator 2 and pushed up in the direction opposite to the pressing direction P, so that the inside of the compression chamber 6 becomes negative pressure, the suction valve 7 opens, and the suction port is opened. When 17 is opened, the primary refrigerant flows into the compression chamber 6. As described above, only when the primary refrigerant flows into the compression chamber 6, the suction valve 7 changes its posture so that the primary refrigerant flows toward the compression chamber 6 and does not flow back.

As shown in FIG. 6, in the diaphragm type compressor 1 of the present embodiment, the discharge port 18 capable of flowing out the primary refrigerant from the compression chamber 6 on the side opposite to the actuator 2 in the pressing direction P on the substrate 4 Is provided, and a discharge valve 8 is provided at the discharge port 18. The diaphragm 3 is pushed down in the pressing direction P by the actuator 2, so that the inside of the compression chamber 6 becomes a positive pressure, the discharge valve 8 is opened, and the discharge port 18 is opened, so that the primary refrigerant flows out from the compression chamber 6. To do. In this way, only when the primary refrigerant flows out of the compression chamber 6, the discharge valve 8 changes its posture so that the primary refrigerant flows only in the direction in which it flows out of the compression chamber 6 and does not flow back. ..

As shown in FIGS. 6 to 8, the diaphragm 3 of the diaphragm type compressor 1 of the present embodiment is provided with an annular groove portion 3b and a circular island portion 3a surrounded by the groove portion 3b. More specifically, as shown in FIG. 6, the groove portion 3b recessed in the pressing direction P is provided in the overlapping region R in the diaphragm 3 where the diaphragm 3 and the compression chamber 6 overlap in the pressing direction P. There is. A ring-shaped pressing assisting member 10 (pressing assisting member 10A) is provided in the groove portion 3b. The receiving portion 9 is arranged so as to overlap both the island portion 3a and the pressing auxiliary member 10 in the groove portion 3b when viewed from the pressing direction P. Since the receiving portion 9 is arranged in this way, the diaphragm type compressor 1 of the present embodiment can press both the island portion 3a and the pressing auxiliary member 10 in the groove portion 3b via the receiving portion 9 by the actuator 2. It has a good structure.

As shown in FIG. 8, in the diaphragm type compressor 1 of the present embodiment, the distance L1 which is the depth of the pressing direction P of the groove 3b is the height of the pressing direction P of the pressing auxiliary member 10. It is longer than a certain distance L2. Therefore, in the diaphragm type compressor 1 of the present embodiment, there is a gap G between the receiving portion 9 and the pressing auxiliary member 10, but since the diaphragm 3 is made of a thin metal, it is removed from the actuator 2. When the island portion 3a receives the pressing force, the island portion 3a is recessed, and the receiving portion 9 contacts not only the island portion 3a but also the pressing auxiliary member 10. Therefore, the diaphragm type compressor 1 of the present embodiment is configured to receive the pressing force from the actuator 2 not only in the island portion 3a but also in the groove portion 3b. In this embodiment, the pressing auxiliary member 10 is made of polyethylene terephthalate, but is not particularly limited.

[Example 2] (FIGS. 9 and 10)
Next, the diaphragm type compressor 1 according to the second embodiment of the present invention will be described with reference to FIGS. 9 and 10. Note that FIG. 9 is a diagram corresponding to FIG. 8 in the diaphragm type compressor 1 of the first embodiment. FIG. 10 is a graph showing the amount of displacement of the compression chamber 6 when the diaphragm is pressed in the diaphragm type compressor 1 according to the first and second embodiments and the diaphragm type compressor according to the comparative example 1, and one point. The chain line corresponds to the diaphragm type compressor 1 of Example 1, the broken line corresponds to the diaphragm type compressor 1 of Example 2, and the solid line corresponds to the diaphragm type compressor of Comparative Example 1. Further, the constituent members common to those in the first embodiment are indicated by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 9, the diaphragm type compressor 1 of this embodiment does not include the pressing auxiliary member 10 in the groove portion 3b. In other words, the diaphragm type compressor 1 of the present embodiment has exactly the same configuration as the diaphragm type compressor 1 of the first embodiment except that the groove portion 3b is not provided with the pressing auxiliary member 10.

FIG. 10 is a graph showing the displacement amount of the compression chamber 6 when the diaphragm 3 in the diaphragm type compressor 1 of the first and second embodiments and the diaphragm type compressor of the comparative example 1 is pressed. Corresponds to the front sectional view of the compression chamber 6 when pressed. Here, Comparative Example 1 corresponds to a diaphragm type compressor in which the groove portion 3b is not formed in the diaphragm 3 in the diaphragm type compressor 1 of Examples 1 and 2.

As shown in FIG. 10, compared to the diaphragm type compressor of Comparative Example 1 in which the diaphragm 3 represented by the solid line does not have the groove portion 3b, the groove portion 3b is formed in the diaphragm 3 represented by the alternate long and short dash line and the broken line. The diaphragm type compressor 1 of the first and second embodiments having the above is effectively displaced. Although the difference seems to be small in FIG. 10, a comparison between the diaphragm type compressor 1 of Example 1 represented by the alternate long and short dash line and the diaphragm type compressor 1 of Example 2 represented by the broken line is carried out. The displacement amount of the diaphragm type compressor 1 of Example 1 is clearly larger.

[Example 3] (Fig. 11)
Next, the diaphragm type compressor 1 according to the third embodiment of the present invention will be described with reference to FIG. Note that FIG. 11 is a diagram corresponding to FIG. 8 in the diaphragm type compressor 1 of the first embodiment. Further, the constituent members common to those in the first and second embodiments are indicated by the same reference numerals, and detailed description thereof will be omitted.

The diaphragm type compressor 1 of this embodiment has a configuration different from that of the diaphragm type compressor 1 of the first embodiment only in the pressing auxiliary member 10. As described above, in the diaphragm type compressor 1 of the first embodiment, the distance L1 which is the depth of the pressing direction P of the groove 3b is longer than the distance L2 which is the height of the pressing direction P of the pressing auxiliary member 10A. It was. On the other hand, as shown in FIG. 11, in the diaphragm type compressor 1 of the present embodiment, the distance L1, which is the depth of the pressing direction P of the groove portion 3b, is the pressing of the pressing auxiliary member 10 (pressing auxiliary member 10B). It is shorter than the distance L2, which is the height of the direction P. The pressing auxiliary member 10B of this embodiment is made of rubber. Therefore, in the diaphragm type compressor 1 of the present embodiment, there is a gap G between the receiving portion 9 and the island portion 3a, but since the pressing auxiliary member 10 is made of rubber, the pressing auxiliary member 10 is formed from the actuator 2. When the pressing auxiliary member 10 receives the pressing force, the pressing auxiliary member 10 contracts, and the receiving portion 9 contacts not only the pressing auxiliary member 10 but also the island portion 3a. Therefore, the diaphragm type compressor 1 of this embodiment is configured to receive the pressing force from the actuator 2 not only in the groove portion 3b but also in the island portion 3a. However, in the present invention, the distance L1 which is the depth of the pressing direction P of the groove portion 3b and the distance L2 which is the height of the pressing direction P of the pressing auxiliary member 10A may be the same.

[Example 4] (FIGS. 12 and 13)
Next, the diaphragm type compressor 1 according to the third embodiment of the present invention will be described with reference to FIGS. 12 and 13. Note that FIG. 12 is a diagram corresponding to FIG. 7 in the diaphragm type compressor 1 of the first embodiment, and FIG. 13 is a diagram corresponding to FIG. 8 in the diaphragm type compressor 1 of the first embodiment. Further, the constituent members common to those in the first to third embodiments are indicated by the same reference numerals, and detailed description thereof will be omitted.

The diaphragm type compressor 1 of the present embodiment has a configuration different from that of the diaphragm type compressor 1 of the first embodiment only in the shape of the receiving portion 9 and the material of the pressing auxiliary member 10 (pressing auxiliary member 10C). As described above, the receiving portions 9A of Examples 1 to 3 were columnar. On the other hand, as shown in FIGS. 12 and 13, in the diaphragm type compressor 1 of the present embodiment, the receiving portion 9 (receiving portion 9B) has the leg portion 9b at a position where it comes into contact with the pressing auxiliary member 10. ing. That is, the receiving portion 9B of this embodiment has a shape in which a cylindrical body portion 9a is combined with a cylindrical leg portion 9b. The inner portion surrounded by the leg portion 9b constitutes a fitting portion 9c that fits into the island portion 3a of the diaphragm 3.

As shown in FIG. 13, the diaphragm type compressor 1 of this embodiment also has a gap G between the receiving portion 9 and the island portion 3a, similarly to the diaphragm type compressor 1 of the third embodiment. .. However, like the diaphragm type compressor 1 of the third embodiment, the pressing auxiliary member 10C of the present embodiment is made of rubber. Therefore, in the diaphragm type compressor 1 of the present embodiment, when the pressing auxiliary member 10 receives the pressing force from the actuator 2, the pressing auxiliary member 10 shrinks and the receiving portion 9 is not only the pressing auxiliary member 10 but also the island portion. It also contacts 3a. Therefore, the diaphragm type compressor 1 of this embodiment is configured to receive the pressing force from the actuator 2 not only in the groove portion 3b but also in the island portion 3a.

In summary, the diaphragm type compressor 1 of Examples 1 to 4 includes a diaphragm 3 and a compression chamber 6 in which a fluid is compressed by pressing the diaphragm 3 in the pressing direction, and the diaphragm is provided in the pressing direction P. A groove 3b recessed in the pressing direction P is provided in the overlapping region R of the diaphragm 3 in which the 3 and the compression chamber 6 overlap. In other words, the diaphragm type compressor 1 of Examples 1 to 4 sandwiches the diaphragm 3 and the fluid that is connected to the diaphragm 3 and is compressed by pressing the diaphragm 3 in the pressing direction P with the diaphragm 3. A ring-shaped groove 3b having a thin ring shape is provided in the pressing direction P in the diaphragm 3 of the region (overlap region R) in which the diaphragm 3 and the substrate 4 compress the fluid in a plan view. Has been done. As described above, in the diaphragm type compressor 1 of Examples 1 to 4, since the groove portion 3b recessed in the pressing direction P is provided in the overlap region R in the diaphragm 3, the diaphragm 3 can be efficiently deformed. And can effectively compress the fluid. In the diaphragm type compressor 1 of Examples 1 to 4, the groove portion 3b is formed not in the central portion of the compression chamber 6 but in the outer peripheral portion (lip). With such a configuration, the diaphragm 3 can be deformed particularly effectively.

Further, the diaphragm type compressor 1 of the first, third, and fourth embodiments is provided with a pressing assisting member 10 in the groove 3b to assist the pressing of the diaphragm 3. Therefore, the diaphragm 3 can be deformed particularly effectively. Further, with such a configuration, for example, even if the diaphragm 3 deteriorates and the diaphragm 3 is easily damaged starting from the groove portion 3b, the diaphragm 3 is arranged by arranging the pressing auxiliary member 10 in the groove portion 3b. Damage can be suppressed.

Further, the diaphragm type compressor 1 of the first, third, and fourth embodiments includes a receiving portion 9 that receives a pressing force from the actuator 2 that presses the diaphragm 3 in the pressing direction P, and receives the pressing auxiliary member 10. The portion 9 overlaps with the pressing direction P. Therefore, the pressing force from the actuator 2 can be efficiently transmitted to the pressing auxiliary member 10 by the receiving portion 9. Specifically, for example, a large area can be pressed by using an actuator 2 having a small cross section like the actuator 2 used in the diaphragm type compressor 1 of the first, third, and fourth embodiments.

Further, in the diaphragm type compressor 1 of Examples 1, 3 and 4, the receiving portion 9 is thicker than the island portion 3a of the diaphragm 3 in the pressing direction P, and has higher rigidity than the diaphragm 3. It is configured in. Therefore, the pressing force from the actuator 2 can be transmitted to the pressing assisting member 10 particularly efficiently. It should be noted that "it is configured to have a higher rigidity than the diaphragm 3" means that it is sufficient if the diaphragm 3 is configured to have a higher rigidity than at least a part of the portion that receives the pressing force from the actuator 2.

Further, in the diaphragm type compressor 1 of the fourth embodiment, the diaphragm 3 has an island portion 3a which is an island-shaped convex portion surrounded by a groove portion 3b, and the receiving portion 9 is recessed at a position facing the island portion 3a. It has a fitting portion 9c (the surface facing the groove portion is located on the pressing direction P side from the surface facing the island portion 3a). Therefore, the receiving portion 9 can be easily and accurately positioned with respect to the diaphragm 3 by fitting the fitting portion 9c which is a concave portion to the island portion 3a which is a convex portion.

Further, in the diaphragm type compressor 1 of the first, third, and fourth embodiments, the pressing auxiliary member 10 is composed of a member having a smaller Young's modulus than the diaphragm 3 and being soft. Therefore, damage to the diaphragm 3 in the groove portion 3b due to pressing the groove portion 3b by the pressing auxiliary member 10 can be suppressed.

It is needless to say that the present invention is not limited to the above examples, and various modifications can be made within the scope of the invention described in the claims, and these are also included in the scope of the present invention. For example, the diaphragm type compressor 1 of the present invention can be applied to various other devices such as a robot, in addition to the projector 100, the recording device 200, and the three-dimensional model manufacturing device 300.

1 ... Diaphragm type compressor, 2 ... Actuator (pressing part), 3 ... Diaphragm,
3a ... island part (convex part), 3b ... groove part, 4 ... substrate, 5 ... outer wall part, 6 ... compression chamber, 7 ... suction valve,
8 ... Discharge valve, 9 ... Receiving part, 9A ... Receiving part, 9B ... Receiving part, 9a ... Body part, 9b ... Leg part,
9c ... Fitting portion (recess), 10 ... Pressing auxiliary member, 10A ... Pressing auxiliary member,
10B ... Pressing auxiliary member, 17 ... Suction port, 18 ... Discharge port, 101 ... Cooling unit,
102 ... Light source unit, 103 ... Optical element unit, 104 ... Projection lens,
105 ... Liquid feed pump, 106 ... Evaporator (heat dissipation part), 107 ... Heat exchange part, 108 ... Expansion part,
109 ... primary refrigerant pipe, 110 ... secondary refrigerant pipe (heat exchange medium), 111 ... phosphor,
112 ... Panel, 112a ... Optical element for red light, 112b ... Optical element for green light,
112c ... Optical element for blue light, 113 ... Dichroic mirror, 114 ... Light source,
200 ... Recording device, 210 ... Head unit, 211 ... Electronic circuit board,
212A ... Mounted part, 212B ... Cover, 213 ... Carriage, 214 ... Guide spindle,
215 ... Platen, 216 ... Cassette, 217 ... Ink Cartridge,
218 ... Flexible wiring board, 219 ... Recording head, 220 ... Operation switch,
300 ... 3D model manufacturing equipment, 302 ... Hopper, 303 ... Supply path,
304 ... Flat screw, 304a ... Circumferential surface, 304b ... Notch,
304c ... central part, 305 ... barrel, 305a ... movement path, 306 ... motor,
307 ... heater, 308 ... heater, 309 ... heater, 310 ... injection part,
310a ... Nozzle, 311 ... Plate, 312 ... First stage,
313 ... 2nd stage, 314 ... Base unit, 315 ... 1st drive unit, 316 ... 2nd drive unit,
317 ... 3rd drive unit, 318 ... control unit, 319 ... pellet, 320 ... space part,
321 ... Injection unit, 322 ... Stage unit, 323 ... Supply path cooling unit,
L1 ... distance, L2 ... distance, R ... overlap area

Claims (10)

A diaphragm and a substrate that is connected to the diaphragm and sandwiches a fluid that is compressed by pressing the diaphragm in the pressing direction with the diaphragm.
A diaphragm type compressor characterized in that a ring-shaped groove having a thin thickness in the pressing direction is provided in the diaphragm in a region where the fluid is compressed by the diaphragm and the substrate in a plan view. In the diaphragm type compressor according to claim 1,
A diaphragm type compressor characterized in that the groove portion is provided with a pressing assisting member that assists pressing of the diaphragm. In the diaphragm type compressor according to claim 2.
A receiving portion that receives a pressing force from a pressing portion that presses the diaphragm in the pressing direction is provided.
A diaphragm type compressor characterized in that the pressing assisting member and the receiving portion overlap in the pressing direction. In the diaphragm type compressor according to claim 3,
The receiving portion is a diaphragm type compressor characterized by having a higher rigidity than the diaphragm. In the diaphragm type compressor according to any one of claims 2 to 4.
The diaphragm has an island portion surrounded by the groove portion, and the diaphragm has an island portion.
A diaphragm type compressor in the receiving portion, wherein the surface facing the groove portion is located on the pressing direction side with respect to the surface facing the island portion. In the diaphragm type compressor according to any one of claims 2 to 5,
The pressing auxiliary member is a diaphragm type compressor characterized by having a Young's modulus smaller than that of the diaphragm. The diaphragm type compressor according to any one of claims 1 to 6.
The heat dissipation part of the fluid and
The heat exchange part of the fluid and
The expansion part of the fluid and
With
A cooling unit characterized in that the diaphragm type compressor is arranged between the heat exchange section and the heat dissipation section. Light source and
A panel that absorbs light and
With heat exchange medium
The cooling unit according to claim 7 and
With
A projector characterized in that the heat exchange medium is provided between at least one of the light source and the panel and the heat exchange unit. A recording head that ejects ink and
An electronic circuit board connected to the recording head,
With heat exchange medium
The cooling unit according to claim 7 and
With
A recording device characterized in that the heat exchange medium is provided between at least one of the recording head and the electronic circuit board and the heat exchange unit. A hopper that houses the raw materials that make up the three-dimensional model,
A melting part that melts the raw material and
A supply path for supplying the raw material from the hopper to the molten portion, and
With heat exchange medium
The cooling unit according to claim 7 and
With
The three-dimensional model manufacturing apparatus, characterized in that the heat exchange medium is provided between the supply path and the heat exchange unit.

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