CN112123938B - Ink jet head and ink jet printer - Google Patents
Ink jet head and ink jet printer Download PDFInfo
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- CN112123938B CN112123938B CN201911013000.4A CN201911013000A CN112123938B CN 112123938 B CN112123938 B CN 112123938B CN 201911013000 A CN201911013000 A CN 201911013000A CN 112123938 B CN112123938 B CN 112123938B
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- piezoelectric member
- piezoelectric
- ink jet
- ink
- jet head
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/10—Finger type piezoelectric elements
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
The invention provides an ink jet head and an ink jet printer, which can make liquid ejection performance in a plurality of pressure chambers uniform. An ink jet head according to an aspect includes a piezoelectric substrate having a first piezoelectric member, a second piezoelectric member, and a base plate, the first piezoelectric member, the second piezoelectric member, and the base plate being stacked, the second piezoelectric member being disposed on one side of the first piezoelectric member in a first direction, a first direction dimension of a central portion of the second piezoelectric member being smaller than a first direction dimension of an end portion of the second piezoelectric member, the base plate being disposed on one side of the second piezoelectric member in the first direction, and a bend of a boundary portion between the base plate and the second piezoelectric member being larger than a bend of a boundary portion between the first piezoelectric member and the second piezoelectric member.
Description
Technical Field
Embodiments of the present invention relate to an inkjet head and an inkjet printer.
Background
In an ink jet head including a plurality of pressure chambers, it is known that a plurality of grooves are formed in parallel in a piezoelectric member formed by joining a plurality of piezoelectric bodies. In such a liquid ejection head, for example, after two piezoelectric bodies are joined together with an adhesive to form a base plate, a plurality of pressure chambers arranged in a predetermined direction are formed by machining.
In such an ink jet head, it is required to uniformize ink ejection performance of the plurality of pressure chambers.
Disclosure of Invention
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an ink jet head and an ink jet printer capable of uniformizing ink ejection performance of a plurality of pressure chambers.
An ink jet head according to an embodiment includes a piezoelectric substrate having a first piezoelectric member, a second piezoelectric member, and a base portion, the second piezoelectric member is disposed on one side of the first piezoelectric member in the first direction, and, in the second piezoelectric body member, a dimension of a central portion in a second direction intersecting the first direction in the first direction is smaller than a dimension of an end portion in the second direction in the first direction, the base portion is disposed on an opposite side of the second piezoelectric member from the first piezoelectric member in the first direction, and a boundary portion between the base portion and the second piezoelectric member is bent, and the boundary portion of the base portion and the second piezoelectric member has a larger curvature than the boundary portion of the first piezoelectric member and the second piezoelectric member.
An inkjet printer according to an embodiment includes an inkjet head including a piezoelectric substrate having a first piezoelectric member, a second piezoelectric member, and a base plate, the first piezoelectric member, the second piezoelectric member, and the base plate being stacked, the second piezoelectric member being disposed on one side of the first piezoelectric member in a first direction, a first direction dimension at a central portion of the second piezoelectric member being smaller than a first direction dimension at an end portion of the second piezoelectric member, the base plate being disposed on one side of the second piezoelectric member in the first direction, a curvature of a boundary portion between the base plate and the second piezoelectric member being larger than a curvature of a boundary portion between the first piezoelectric member and the second piezoelectric member, and a supply device that conveys a medium to a relative position of the inkjet head.
Drawings
Fig. 1 is an explanatory diagram schematically showing the configuration of a printer according to the first embodiment.
Fig. 2 is an exploded perspective view showing the configuration of an ink jet head used in the printer.
Fig. 3 is an enlarged cross-sectional view showing the structure of the ink jet head.
Fig. 4 is an explanatory diagram showing the configuration of the ink jet head.
Fig. 5 is an enlarged perspective view showing a main part configuration of the ink jet head.
Fig. 6 is a side view showing an enlarged configuration of a main part of the ink jet head.
Fig. 7 is a plan view partially omitted to show the structure of the ink jet head.
Fig. 8 is a side view showing the configuration of the ink jet head.
Fig. 9 is an explanatory view showing a method of manufacturing the ink jet head.
Fig. 10 is an explanatory diagram illustrating a configuration and a manufacturing method of an ink jet head according to a comparative example.
Fig. 11 is an explanatory diagram illustrating a configuration and a manufacturing method of an ink jet head according to a comparative example.
Description of the reference numerals
10 … head member, 11 … nozzle plate, 11a … nozzle, 12 … first actuator unit (actuator unit), 13 … second actuator unit (actuator unit), 14 … first cover (cover), 15 … second cover (cover), 20 … base portion, 21 … piezoelectric actuator, 22 … driving element, 23 … pressure chamber, 24a … first piezoelectric element (piezoelectric element), 24b … second piezoelectric element (piezoelectric element), 25 … adhesive layer, 26 … electrode, 27 … adhesive layer, 30 … ink guide, 31 … guide rib, 32 … guide tube, 42 … wiring, 43 … electrical connection portion, 62 … ink guide, 63 … guide rib, 64 … guide tube, 65 … outside rib, 66 … inside rib, 70 … common liquid chamber, 71-73 …, 100 … printer, 200 ink jet head 200 …, 300 … circulation circuit, 301 … downstream tank, … upstream pump unit (actuator unit), … tank pump unit), … upstream pump unit, 400 … flow path switching member, 401 … on/off valve, 500 … control device.
Detailed Description
Next, a printer 100 according to an embodiment will be described with reference to fig. 1 to 9. Arrows X, Y, Z indicate three mutually orthogonal directions, respectively. In the drawings, the components are appropriately enlarged, reduced, or omitted for convenience of explanation.
Fig. 1 is a perspective view showing a printer 100 according to the present embodiment. Fig. 2 is an exploded perspective view partially omitting the structure of an ink jet head 200 used in the printer 100. Fig. 3 is an enlarged sectional view showing the configuration of the ink-jet head 1. Fig. 4 is an explanatory diagram showing a comparison of the sectional shapes at the center portion P1 as the first position and the end portion P2 as the second position of fig. 3. Fig. 5 is a perspective view showing an enlarged configuration of a main portion of the ink jet head, showing a region a of fig. 2. Fig. 6 is a side view showing an enlarged configuration of a main portion of the inkjet head 1, showing a region B of fig. 5. Fig. 7 is a plan view partially omitting the configuration of the ink-jet head 1, and fig. 8 is a side view illustrating the configuration of the ink-jet head 1.
Note that, in the drawings, the nozzle 11a is shown to be disposed above for convenience of explanation, but the inkjet head 200 is provided to the printer 100 in a posture in which the nozzle 11a faces downward.
As shown in fig. 1, the printer 100 is an inkjet printer having an inkjet head 200, a circulation circuit 300, a flow path switching member 400, and a control device 500. The printer 100 includes a feeder that feeds a sheet-like recording medium such as paper to a position opposite to the inkjet head 200 and discharges the recording medium printed with ink ejected from the inkjet head 200, an outer contour body that houses the respective components, and the like. The printer 100 of the present embodiment is a so-called circulation type in which ink is always circulated and supplied to the inkjet head 200.
As shown in fig. 1, 2, and 8, the inkjet head 200 has a head member 10 and a nozzle plate 11 formed with a plurality of nozzles 11 a. The inkjet head 200 constitutes the common liquid chamber 70 in the internal space constituted by the head member 10 and the nozzle plate 11.
The head member 10 includes: a pair of actuator units 12 and 13 arranged on the lower surface side of the nozzle plate 11 so as to face each other; and a pair of covers 14, 15 covering both sides of the pair of actuator units 12, 13.
The nozzle plate 11 is formed in a rectangular plate shape. The nozzle plate 11 has a plurality of nozzles 11a arranged in one direction. The nozzle plate 11 covers a pair of actuator units 12, 13 and a pair of caps 14, 15 from above in fig. 1.
The actuator units 12, 13 have a base portion 20. The base portion 20 is formed in a rectangular parallelepiped shape having upper and lower surfaces orthogonal to the Z axis, a front surface and a back surface orthogonal to the X axis, and both side surfaces orthogonal to the Y axis. The base portion 20 is made of a material selected from, for example, metal, ceramic, or resin. In the present embodiment, the base portion 20 is described below in a posture in which the thickness direction is along the X axis, the longitudinal direction is along the Y axis, and the width direction is along the Z axis.
The piezoelectric body actuator 21 is fixed to an upper surface (first surface) of the base portion 20, which is an end surface close to the nozzle 11a, via an adhesive layer 27.
As shown in fig. 5 in an enlarged manner, the piezoelectric body actuator 21 (actuator) has a plurality of driving elements 22 arranged in the Y direction.
The piezoelectric actuator 21 is configured such that a plurality of grooves constituting pressure chambers are formed in a piezoelectric substrate on which a first piezoelectric body member 21a, a second piezoelectric body member 21b, and a base plate 21c serving as a base portion are laminated.
For example, the first piezoelectric member 21a is a predetermined plate-like member formed of a PZT-based piezoelectric ceramic material, and has a constant thickness dimension.
The second piezoelectric member 21b is formed in a plate shape made of a PZT-based piezoelectric ceramic material, and is arranged to overlap one side of the first piezoelectric member 21a in the Z direction, which is the first direction. The second piezoelectric body member 21b is configured such that the dimension in the first direction is smaller at the center portion than at the end portions in the parallel direction of the pressure chambers 23, i.e., the X direction. For example, the difference in the first-direction dimension of the second piezoelectric member 21b between the center portion P1 and the both end portions P2 of the nozzle row and the pressure chamber row is 2.5% or more of the first-direction dimension of the second piezoelectric member 21 b.
The base plate 21c is a plate having a predetermined thickness, and is disposed to overlap one side of the second piezoelectric body member 21b in the first direction. The adhesive layer 27, which is the boundary portion between the base plate 21c and the second piezoelectric member 21b, has a larger curvature than the adhesive layer 25, which is the boundary portion between the first piezoelectric member 21a and the second piezoelectric member 21 b.
A plurality of grooves constituting the pressure chambers 23 are formed on one surface of the piezoelectric substrate so as to intersect the first direction. The depth of the groove reaches the middle portion of the second piezoelectric body member 21b from the surface of the first piezoelectric body member 21a across the adhesive layer 25. The groove has a depth not reaching the base plate 21c, and the bottom of the groove is formed by the second piezoelectric body member 21 b.
The piezoelectric actuator 21 configured as described above has a plurality of pressure chambers 23 arranged along the Y direction, which is one direction in which the plurality of driving elements 22 are arranged. The pressure chamber 23 is formed by a groove formed in the piezoelectric body actuator 21. The pressure chamber 23 includes a space sandwiched by the plurality of driving elements 22 on both sides.
In the piezoelectric actuator 21, although the piezoelectric member has a linear expansion coefficient different from that of the base plate 21c as a base material and may warp and bend when cooled after curing, the second piezoelectric member 21b in the present embodiment is cured and then polished flat in the manufacturing process, and the ratio of the first piezoelectric member 21a to the second piezoelectric member 21b is made uniform. That is, the ratio of the piezoelectric body in the nozzle row between the both end portions and the central portion is configured to be small.
The plurality of pressure chambers 23 are arranged corresponding to the nozzles 11a of the nozzle plate 11. That is, the driving elements 22 for ejecting ink from the nozzles 11a are disposed on both sides of the pressure chambers 23. The ink is stored in each pressure chamber 23. The flow path cross-sectional areas of the plurality of pressure chambers 23 are configured to be the same. That is, the plurality of pressure chambers 23 have the same flow path cross-sectional area when the driving element 22 is driven, and also have the same flow path cross-sectional area when the driving element 22 is not driven.
The drive element 22 includes, for example, two piezoelectric elements 24a and 24 b. The driving element 22 has a first piezoelectric element 24a at a position close to the nozzle 11a and a second piezoelectric element 24b at a position distant from the nozzle 11 a.
The first piezoelectric element 24a and the second piezoelectric element 24b are polarized in opposite directions, and are bonded via the adhesive layer 25.
An electrode 26 is provided on a surface of the driving element 22 disposed in the pressure chamber 23, that is, on an inner surface of the pressure chamber 23.
As shown in fig. 2, an ink guide 30 is formed on a surface (second surface) of the base portion 20. The ink guide 30 includes a T-shaped guide rib 31 rising from the second surface in the X direction, and a cylindrical guide tube 32 extending downward from a Y-direction central portion of the guide rib 31. The guide rib 31 and the guide tube 32 are integrally configured.
That is, the first actuator unit 12 and the second actuator unit 13 have the same configuration except that the number of the guide pipes 32 is different.
The base portion 20 includes a plurality of driver ICs 41 for driving the piezoelectric actuator 21 and a plurality of wires 42 (electrodes) for connecting the driver ICs 41 and the electrodes 26. That is, the back surface of the base portion 20 functions as a printed wiring board. The wirings 42 are configured to correspond one-to-one to the driving elements 22. The base portion 20 has an electrical connection portion 43 formed continuously with the wiring 42 on the rear surface.
The base portion 20 has a plurality of positioning recesses 20a on one end side in the Y direction of the rear surface. The base portion 20 has an outer rib 36 formed on an edge of the other end side in the Y direction of the back surface and rising in the X direction. The outer ribs 36 reach the upper and lower ends of the base portion 20. The outer rib 36 has a plurality of positioning projections 36a on its projecting distal end surface.
The first cover 14 is provided on the surface side of the first actuator unit 12. The first cover 14 has a plate-like portion 51 and an outer rib 52. The first cover 14 is formed in an L shape in plan view.
The second cover 15 is provided on the back side of the second actuator unit 13. The second cover 15 has a plate-like portion 61 and an ink guide 62. The ink guide 62 includes an L-shaped guide rib 63 rising from an inner surface in the X direction, and a cylindrical guide tube 64 extending downward from a center portion and both end portions of the guide rib 63 in the Y direction. The guide rib 63 and the guide tube 64 are integrally configured.
These first actuator unit 12, second actuator unit 13, first cap 14, and second cap 15 constitute the head member 10 in combination. Nozzle plate 11 is fixed to head member 10.
As shown in fig. 1, 7, and 8, in the head member 10 in the assembled state, the distal end surfaces of the outer ribs 33, 36, 52, 65 and the inner ribs 34, 66 abut against the surfaces of the opposing members, whereby three liquid chambers 71 to 73 partitioned by the pair of base portions 20 are formed in the upper half portion of the head member 10. Further, the ink flow paths communicating with the liquid chambers 71 to 73 are formed by the guide tubes 32, 64 extending from the centers of the three inner ribs 34, 66. The liquid chambers 71 to 73 and the plurality of pressure chambers 23 constitute a common liquid chamber 70 through which ink flows.
The three guide tubes 32 formed at the first actuator unit 12 are first outflow ports 74 for ink. One guide tube 32 formed in the second actuator unit 13 is an inflow port 75 of ink. The three guide tubes 64 formed in the second cover 15 are second outlet ports 76 for ink. An on-off valve 401 as a flow path switching member 400 is provided between the secondary sides of the three first outlets 74 and the three second outlets 76 and the primary side of the circulation circuit 300. The opening/closing valve 401 is connected to the control device 500, and is driven based on a command from the control device 500 to open and close the flow path between each outlet and the circulation circuit 300.
The circulation circuit 300 includes, for example: a downstream ink tank 301 provided on the secondary side of the inkjet head 200; a pump 302 for supplying the ink in the downstream ink tank 301 to the secondary side; and an upstream ink tank 303 provided on the secondary side of the pump 302 and on the primary side of the inkjet head 200. The circulation circuit 300 has a filter or the like, for example. Circulation loop 300 fluidly connects downstream ink tank 301, pump 302, and upstream ink tank 303 with inkjet head 200 via conduits. The circulation circuit 300 constitutes a fluid circuit that circulates ink so that the ink that has passed through the inkjet head 200 from the upstream ink tank 303 is returned to the downstream ink tank 301 and is supplied again to the inkjet head 200 via the upstream ink tank 303.
The controller 500 drives the pump 302 to circulate the ink in the downstream ink tank 301 through the circulation circuit formed by the inkjet head 200 and the circulation circuit 300. Further, the control device 500 makes the pressure of the ink in each pressure chamber 23 constant during printing in which the ink is discharged from the nozzle 11a of the inkjet head 200 to the paper sheet, and makes the flow rate of the ink in each pressure chamber 23 constant during non-printing in which the ink is not discharged from the nozzle 11 a. In the pressure chamber 23, the ink pressurized by driving the driving element 22 is ejected from the nozzle 11a as ink droplets. Ink not used as ink droplets is discharged from the opened outlet port to the outside of the liquid chamber.
Note that, in order to eject ink droplets from the nozzles 11a, a drive voltage is applied to the drive elements 22 by a drive circuit via the wiring 42. When a current flows into the first piezoelectric element 24a and the second piezoelectric element 24b of the driving element 22, the driving element 22 performs the shared mode deformation. Specifically, the first piezoelectric element 24a and the second piezoelectric element 24b shown in fig. 4 are bent in opposite directions to each other. By the bending of the first piezoelectric element 24a and the second piezoelectric element 24b, the driving element 22 is bent and deformed in an L shape, and the volume of the adjacent pressure chamber 23 becomes small. When the pressure chamber 23 becomes small and the ink in the pressure chamber 23 becomes high pressure, ink droplets are strongly ejected from the nozzle 11 a.
A method of manufacturing the ink jet head 1 according to the present embodiment will be described below with reference to fig. 9. First, a method of manufacturing the actuator units 12, 13 in the method of manufacturing the inkjet head 1 will be described. In the manufacturing process of the actuator units 12 and 13, first, the second piezoelectric body member 21b is bonded to the base plate 21c with an adhesive, and is heated and cured. For example, the laminate is heated to 120 degrees to be cured, and then cooled to room temperature. At this time, as shown in fig. 9, the base plate 21c and the piezoelectric body have different linear expansion coefficients, and thus warpage occurs in the laminate. The laminate formed by joining the base plate 21c and the second piezoelectric member 21b is bent such that the center portion on the front side is formed as a convex surface that bulges toward one side in the lamination direction, and the center portion on the back side is formed as a concave surface that is concaved toward one side in the lamination direction.
Next, the convex surface and the concave back surface of the laminate are polished to be flat. At this time, for example, the thickness to be polished is 25 μm at the central portion where the polishing amount is the largest, and as a result, the thickness of the second piezoelectric body part 21b is thicker at both ends than at the central portion, and the difference thereof is 25 μm at the maximum.
After that, the first piezoelectric body member 21a is adhesively bonded. Then, the laminated body in which the base plate 21c, the second piezoelectric body member 21b, and the first piezoelectric body member 21a are laminated is heated and cured, and returned to room temperature. At this time, the laminate is bent again as it is heated, solidified, and cooled.
Further, the laminated body is machined by a dicing saw, or the like to form actuator units 12 and 13 having an outer shape of a predetermined shape.
Next, a plurality of grooves are formed in the laminated body of the actuator units 12 and 13 by machining, and a conductive film constituting an electrode is formed and patterned at a predetermined portion of the outer surfaces of the actuator units 12 and 13 including the grooves by a method such as vacuum deposition or electroless nickel plating.
The head member 10 is configured by further assembling the first cap 14 and the second cap 15 to the actuator units 12 and 13 configured as described above.
Further, the nozzle plate 11 is adhesively attached so as to cover the pressure chamber 23. At this time, the nozzle plate 11 is attached to a position where the nozzle 11a is disposed to face the pressure chamber 23. Further, the driver IC chip and the circuit board are connected to the electrode 42 formed on the base portion 20, thereby completing the ink jet head 1.
According to the thus configured ink-jet head 200 and the printer 100 using the ink-jet head 200, the second piezoelectric body member 21b is configured such that the Z-direction dimension is large at the central portion, and the bending of the boundary portion of the base plate 21c and the second piezoelectric body member 21b is larger than the bending of the boundary portion of the first piezoelectric body member 21a and the second piezoelectric body member 21 b. Therefore, for example, even when warpage occurs due to the influence of heat in the manufacturing process, the ratio of the first piezoelectric member 21a to the second piezoelectric member 21b can be made uniform. Therefore, the pressure of the ink in the plurality of pressure chambers can be made constant, and the ejection amount of the ink ejected from the nozzles 11a can be made uniform.
Fig. 10 is an explanatory diagram illustrating an inkjet head 120 having an actuator unit 121 according to a comparative example. The inkjet head 120 is configured by laminating and bonding a first piezoelectric member 121a and a second piezoelectric member 121b on a base plate 121c and heating and curing. In the ink jet head 120 of such a configuration of the comparative example, the second piezoelectric member is configured equally in size in the first direction. In addition, in the inkjet head 120, the adhesive layer 125, which is a boundary portion between the first piezoelectric member 121a and the second piezoelectric member 121b, constitutes a curved surface convex at the center. The adhesive layer 125 is bent to the same extent as the adhesive layer 127 which is the boundary portion between the second piezoelectric member 121b and the base plate 121 c.
Therefore, when the actuator unit 121 is provided with the grooves, the positions of the boundary portions of the plurality of grooves arranged in the row direction of the nozzle row greatly differ depending on the positions of the grooves, and thus the ratios of the piezoelectric bodies of the first piezoelectric body and the second piezoelectric body greatly vary.
For example, fig. 11 is an explanatory diagram showing the cross-sectional shapes of the nozzle rows of the ink jet head 120 according to the comparative example in the vicinity of the pressure chambers 123 at the center portion P1 and the end portion P2. As shown in fig. 11, the inkjet head 120 greatly differs in the ratio of the first piezoelectric body part 121a to the second piezoelectric body part 121b according to the location of the second direction. In contrast, as shown in fig. 4 according to the present embodiment, even if the portion in the second direction is changed, the ratio of the first piezoelectric member 21a to the second piezoelectric member 21b is hardly changed. Therefore, the ink jet head 1 according to the present embodiment can obtain stable liquid ejection performance by suppressing variation in the piezoelectric material ratio to make the ratio uniform.
Note that the present embodiment is not limited to the above example, and can be implemented by appropriately changing the shape and material of each portion.
In the above embodiment, the pressure chambers 23 are formed by the plurality of grooves and arranged along the nozzle row, but for example, an air chamber not communicating with the nozzles 11a may be provided between the adjacent pressure chambers, and the pressure chambers 23 in which the plurality of grooves are alternately arranged and the air chambers interposed between the pressure chambers 23 may be formed.
The liquid to be discharged is not limited to ink, and various liquids such as a liquid containing conductive particles for forming a wiring pattern of a printed wiring board can be applied.
In addition to the above-described configuration, the liquid ejection head may be configured to eject ink droplets by deforming a vibration plate by static electricity, or configured to eject ink droplets from nozzle holes by thermal energy such as a heater.
In addition, although the above embodiment shows an example in which the ink jet head is used in an ink jet recording apparatus, the present invention is not limited to this, and for example, the present invention can be used in a 3D printer, an industrial manufacturing machine, and a medical application, and can achieve reduction in size, weight, and cost.
According to the ink jet head and the printer of at least one embodiment described above, even when warping occurs due to the influence of heat in the manufacturing process, the ratio of the first piezoelectric member 21a to the second piezoelectric member 21b can be made uniform, and the ejection performance can be made uniform.
While several embodiments of the invention have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the invention. These new embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and modifications are included in the scope and spirit of the invention, and are also included in the invention described in the claims and the equivalent scope thereof.
Claims (8)
1. An ink jet head includes a piezoelectric substrate having a first piezoelectric member, a second piezoelectric member, and a base portion,
the second piezoelectric member is disposed on one side of the first piezoelectric member in a first direction, and a dimension of a central portion in a second direction intersecting the first direction in the first direction is smaller than a dimension of an end portion in the second direction in the first direction in the second piezoelectric member,
the base portion is disposed on an opposite side of the second piezoelectric member from the first piezoelectric member in the first direction, a boundary portion of the base portion and the second piezoelectric member is bent, and the bending of the boundary portion of the base portion and the second piezoelectric member is larger than the bending of the boundary portion of the first piezoelectric member and the second piezoelectric member,
the difference in the first-direction dimension between the end portion and the central portion of the second piezoelectric member is 2.5% or more of the dimension of the second piezoelectric member in the first direction.
2. An ink jet head according to claim 1,
a plurality of grooves arranged in the second direction intersecting the first direction are formed on a surface of one side of the piezoelectric substrate.
3. An ink jet head according to claim 2,
the first piezoelectric member and the second piezoelectric member are made of a PZT-based piezoelectric ceramic material,
the first piezoelectric member and the base portion have different linear expansion coefficients and are bonded by an adhesive layer,
the second piezoelectric member has a different linear expansion coefficient from the base portion and is bonded by an adhesive layer,
the bottom of the tank is disposed on the second piezoelectric member.
4. An ink jet head according to claim 2,
the groove constitutes a part of a flow path of ink and constitutes a pressure chamber.
5. An ink jet printer includes an ink jet head and a supply device,
the ink jet head includes a piezoelectric substrate having a first piezoelectric member, a second piezoelectric member, and a substrate plate stacked,
the second piezoelectric member is disposed on one side of the first piezoelectric member in a first direction, and a first direction dimension at a central portion of the second piezoelectric member is smaller than a first direction dimension at an end portion of the second piezoelectric member,
the base plate is disposed on one side of the second piezoelectric member in the first direction, and a bending of a boundary portion between the base plate and the second piezoelectric member is larger than a bending of a boundary portion between the first piezoelectric member and the second piezoelectric member,
the supply device delivers a medium to a relative position of the inkjet head,
the difference in the first-direction dimension between the end portion and the central portion of the second piezoelectric member is 2.5% or more of the dimension of the second piezoelectric member in the first direction.
6. The inkjet printer of claim 5,
a plurality of grooves arranged in a second direction intersecting the first direction are formed on one surface of the piezoelectric substrate.
7. The inkjet printer of claim 6,
the first piezoelectric member and the second piezoelectric member are made of a PZT-based piezoelectric ceramic material,
the first piezoelectric body member and the base plate have different linear expansion coefficients and are bonded by an adhesive layer,
the second piezoelectric body member has a different linear expansion coefficient from the base plate and is bonded by an adhesive layer,
the bottom of the tank is disposed on the second piezoelectric member.
8. The ink jet printer of claim 6,
the groove constitutes a part of a flow path of ink and constitutes a pressure chamber.
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Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053036A (en) * | 1983-09-02 | 1985-03-26 | Mitsubishi Electric Corp | Manufacture of semiconductor element |
JPS61255872A (en) * | 1985-05-09 | 1986-11-13 | Matsushita Electric Ind Co Ltd | Thermal head |
JPH0433868A (en) * | 1990-05-30 | 1992-02-05 | Rohm Co Ltd | Manufacture of thermal head |
JPH10157105A (en) * | 1996-11-28 | 1998-06-16 | Tec Corp | Ink jet printer head |
CN1229727A (en) * | 1997-12-15 | 1999-09-29 | 莱克斯马克国际公司 | Printhead stress relief |
CN1241159A (en) * | 1997-09-30 | 2000-01-12 | 精工爱普生股份有限公司 | Ink jet type recording head and method of producing same |
EP1005987A2 (en) * | 1998-12-04 | 2000-06-07 | Konica Corporation | Ink jet head and method of manufacturing ink jet head |
JP2002052714A (en) * | 2000-05-30 | 2002-02-19 | Kyocera Corp | Ink jet recording head |
CN1576008A (en) * | 2003-07-23 | 2005-02-09 | 精工爱普生株式会社 | Liquid injection head and producing method thereof and die used in the same method |
CN101879814A (en) * | 2009-03-26 | 2010-11-10 | 精工爱普生株式会社 | The manufacture method of jet head liquid, jet head liquid and liquid injection apparatus |
CN102428204A (en) * | 2009-03-25 | 2012-04-25 | 密执安州立大学董事会 | Compact organic vapor jet printing print head |
CN102673151A (en) * | 2011-03-09 | 2012-09-19 | 东芝泰格有限公司 | Ink jet head and method of manufacturing the ink jet head |
CN104185555A (en) * | 2012-03-30 | 2014-12-03 | 京瓷株式会社 | Piezoelectric actuator, inkjet head, and method for manufacturing piezoelectric actuator |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438739A (en) * | 1993-05-25 | 1995-08-08 | Compaq Computer Corporation | Method of making an elongated ink jet printhead |
US6731012B1 (en) * | 1999-12-23 | 2004-05-04 | International Business Machines Corporation | Non-planar surface for semiconductor chips |
JP2003011364A (en) | 2001-06-29 | 2003-01-15 | Sharp Corp | Ink jet head |
JP5040726B2 (en) | 2008-02-28 | 2012-10-03 | コニカミノルタホールディングス株式会社 | Ink jet head and coating apparatus provided with ink jet head |
JP6909605B2 (en) | 2017-03-22 | 2021-07-28 | エスアイアイ・プリンテック株式会社 | Manufacturing method of liquid injection head tip, liquid injection head, liquid injection device and liquid injection head tip |
JP2018158533A (en) | 2017-03-23 | 2018-10-11 | 東芝テック株式会社 | Drive waveform generation device, liquid discharge head, inkjet recording device, and drive waveform generation method |
JP6929678B2 (en) | 2017-03-24 | 2021-09-01 | 東芝テック株式会社 | Inkjet heads and printers |
-
2019
- 2019-06-24 JP JP2019116616A patent/JP7292998B2/en active Active
- 2019-10-23 CN CN201911013000.4A patent/CN112123938B/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053036A (en) * | 1983-09-02 | 1985-03-26 | Mitsubishi Electric Corp | Manufacture of semiconductor element |
JPS61255872A (en) * | 1985-05-09 | 1986-11-13 | Matsushita Electric Ind Co Ltd | Thermal head |
JPH0433868A (en) * | 1990-05-30 | 1992-02-05 | Rohm Co Ltd | Manufacture of thermal head |
JPH10157105A (en) * | 1996-11-28 | 1998-06-16 | Tec Corp | Ink jet printer head |
CN1241159A (en) * | 1997-09-30 | 2000-01-12 | 精工爱普生股份有限公司 | Ink jet type recording head and method of producing same |
CN1229727A (en) * | 1997-12-15 | 1999-09-29 | 莱克斯马克国际公司 | Printhead stress relief |
EP1005987A2 (en) * | 1998-12-04 | 2000-06-07 | Konica Corporation | Ink jet head and method of manufacturing ink jet head |
JP2002052714A (en) * | 2000-05-30 | 2002-02-19 | Kyocera Corp | Ink jet recording head |
CN1576008A (en) * | 2003-07-23 | 2005-02-09 | 精工爱普生株式会社 | Liquid injection head and producing method thereof and die used in the same method |
CN102428204A (en) * | 2009-03-25 | 2012-04-25 | 密执安州立大学董事会 | Compact organic vapor jet printing print head |
CN101879814A (en) * | 2009-03-26 | 2010-11-10 | 精工爱普生株式会社 | The manufacture method of jet head liquid, jet head liquid and liquid injection apparatus |
CN102673151A (en) * | 2011-03-09 | 2012-09-19 | 东芝泰格有限公司 | Ink jet head and method of manufacturing the ink jet head |
CN104185555A (en) * | 2012-03-30 | 2014-12-03 | 京瓷株式会社 | Piezoelectric actuator, inkjet head, and method for manufacturing piezoelectric actuator |
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CN112123938A (en) | 2020-12-25 |
JP2021000804A (en) | 2021-01-07 |
JP7292998B2 (en) | 2023-06-19 |
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