JP7318398B2 - Liquid ejection head and liquid ejection device - Google Patents

Description

The present invention relates to a liquid ejection head and a liquid ejection apparatus.

2. Description of the Related Art A liquid ejection head that ejects liquid such as ink from a plurality of nozzles has been conventionally proposed. For example, Japanese Patent Application Laid-Open No. 2002-200003 discloses a configuration in which liquid is ejected from a nozzle by varying the pressure in a pressure chamber communicating with the nozzle.

JP 2013-184372 A

In recent years, there has been a very high demand for high-density nozzles in liquid jet heads. However, when a large number of nozzles are formed at a high density, a phenomenon (hereinafter referred to as "crosstalk") occurs in which pressure fluctuations in one pressure chamber affect pressure fluctuations in neighboring pressure chambers. When crosstalk occurs, an error occurs in the ejection characteristics of each nozzle.

In order to solve the above problems, a liquid ejection head according to a preferred aspect of the present invention is provided with a plurality of nozzles for ejecting liquid along a first axis, and each of the plurality of nozzles is provided with the first axis. an array of individual flow paths including a plurality of individual flow paths arranged side by side along a second axis orthogonal to the first axis when viewed from the direction of , and a common liquid chamber commonly communicating with the plurality of individual flow paths. wherein the plurality of individual flow paths includes a first individual flow path and a second individual flow path adjacent to each other in the row of individual flow paths, and the first individual flow path in the common liquid chamber A first opening, which is a connection port with a channel, and a second opening, which is a connection port with the second individual channel in the common liquid chamber, have different positions in the direction of the first axis.

A liquid ejection head according to another aspect of the present invention is provided with a plurality of nozzles for ejecting liquid along a first axis, and each of the plurality of nozzles is provided with a an individual channel array including a plurality of individual channels arranged side by side along a second orthogonal axis; a first common liquid chamber commonly communicating with the plurality of individual channels; and the plurality of individual channels and a second common liquid chamber commonly communicating with a liquid ejection head, wherein the plurality of individual flow paths are adjacent to each other in the row of individual flow paths. a first opening that is a connection port with the first individual channel in the first common liquid chamber, and a second opening that is a connection port with the second individual channel in the first common liquid chamber are different in position in the direction of the first axis, and have a third opening that is a connection port to the first individual flow path in the second common liquid chamber and the second individual flow path in the second common liquid chamber. The position in the direction of the first axis is different from that of the fourth opening which is a connection port with the .

A liquid ejection head according to another aspect of the present invention is provided with a plurality of nozzles for ejecting liquid along a first axis, and each of the plurality of nozzles is provided with a A liquid ejection head comprising: an individual channel row including a plurality of individual channels arranged side by side along a second orthogonal axis; and a common liquid chamber commonly communicating with the plurality of individual channels. The plurality of individual flow channels includes a first individual flow channel and a second individual flow channel adjacent to each other in the row of individual flow channels, and a first individual flow channel serving as a connection port to the first individual flow channel in the common liquid chamber. The direction of the first opening is different from the direction of the second opening, which is a connection port to the second individual channel in the common liquid chamber.

A liquid ejection head according to another aspect of the present invention is provided with a plurality of nozzles for ejecting liquid along a first axis, and each of the plurality of nozzles is provided with a an individual channel array including a plurality of individual channels arranged side by side along a second orthogonal axis; a first common liquid chamber commonly communicating with the plurality of individual channels; and the plurality of individual channels and a second common liquid chamber commonly communicating with a liquid ejection head, wherein the plurality of individual flow paths are adjacent to each other in the row of individual flow paths. and a direction of a first opening that is a connection port with the first individual channel in the first common liquid chamber and a second opening that is a connection port with the second individual channel in the first common liquid chamber Different from the direction of the opening, the direction of the third opening, which is the connection port of the second common liquid chamber with the first individual flow path, and the connection of the second common liquid chamber with the second individual flow path. It is different from the direction of the fourth opening, which is the mouth. The present invention can also be specified as a liquid ejection apparatus including the liquid ejection head according to each aspect described above.

1 is a block diagram showing the configuration of a liquid ejection device according to a first embodiment of the invention; FIG. 3 is an exploded perspective view of the liquid ejection head; FIG. 3 is a cross-sectional view of a liquid ejection head; FIG. 3 is a cross-sectional view of a liquid ejection head; FIG. FIG. 4 is a schematic diagram of flow paths formed in the liquid ejection head. FIG. 4 is a cross-sectional view of a first individual channel; It is a sectional view of a 2nd individual channel. 4 is a cross-sectional view of the first common liquid chamber on the side of the first individual channel; FIG. FIG. 4 is a cross-sectional view of the first common liquid chamber on the second individual channel side; FIG. 4 is a cross-sectional view of the first individual channel side in the second common liquid chamber; FIG. 4 is a cross-sectional view of the second common liquid chamber on the side of the second individual channel;

A. Embodiment FIG. 1 is a configuration diagram illustrating a liquid ejecting apparatus 100 according to an embodiment of the present invention. The liquid ejecting apparatus 100 of the present embodiment is an inkjet printing apparatus that ejects ink, which is an example of liquid, onto the medium 12 . The medium 12 is typically printing paper, but any material, such as resin film or cloth, can be used as the medium 12 to be printed. As illustrated in FIG. 1, a liquid container 14 that stores ink is installed in the liquid ejection device 100 . For example, a cartridge detachable from the liquid ejecting apparatus 100, a bag-shaped ink pack made of a flexible film, or an ink tank capable of replenishing ink is used as the liquid container 14. FIG. A plurality of types of ink with different colors are stored in the liquid container 14 .

As illustrated in FIG. 1, the liquid ejection device 100 includes a control unit 20, a transport mechanism 22, a movement mechanism 24, and a liquid ejection head . The control unit 20 includes a processing circuit such as a CPU (Central Processing Unit) or FPGA (Field Programmable Gate Array) and a memory circuit such as a semiconductor memory, and controls each element of the liquid ejection device 100 in an integrated manner. The transport mechanism 22 transports the medium 12 in the Y-axis direction under the control of the control unit 20 .

The moving mechanism 24 reciprocates the liquid ejection head 26 in the X-axis direction under the control of the control unit 20 . The X-axis intersects the Y-axis along which media 12 is transported. The X-axis and the Y-axis are typically orthogonal. The moving mechanism 24 of this embodiment includes a substantially box-shaped carrier 82 that houses the liquid ejection head 26, and a carrier belt 84 to which the carrier 82 is fixed. A configuration in which a plurality of liquid ejection heads 26 are mounted on the transport body 82 or a configuration in which the liquid container 14 is mounted on the transport body 82 together with the liquid ejection heads 26 may be adopted.

The liquid ejection head 26 ejects ink supplied from the liquid container 14 onto the medium 12 from a plurality of nozzles under the control of the control unit 20 . The control unit 20 generates various signals and voltages for ejecting ink from the nozzles and supplies them to the liquid ejection head 26 . Ink is ejected along the Z-axis. The axis perpendicular to the XY plane is the Z axis. That is, the X-axis and the Y-axis are orthogonal to the Z-axis. The Z-axis is an example of the "first axis", the Y-axis is an example of the "second axis", and the X-axis is an example of the "third axis". A desired image is formed on the surface of the medium 12 by the liquid ejection head 26 ejecting ink onto the medium 12 in parallel with the transportation of the medium 12 by the transportation mechanism 22 and the repetitive reciprocation of the transportation body 82 .

FIG. 2 is an exploded perspective view of the liquid ejection head 26. FIG. As illustrated in FIG. 2, the liquid ejection head 26 has a plurality of nozzles N arranged in the Y-axis direction. The plurality of nozzles N of the present embodiment are divided into a first row L1 and a second row L2 which are spaced apart from each other in the X-axis direction. Each of the first row L1 and the second row L2 is a set of a plurality of nozzles N linearly arranged in the Y-axis direction. As illustrated in FIG. 2, the positions of the nozzles N on the Y-axis are different between the first row L1 and the second row L2. Specifically, when viewed from the direction of the X-axis, one nozzle N in the second row L2 is positioned between two nozzles N adjacent to each other in the first row L1.

3 is a cross-sectional view taken along line III--III in FIG. 2, and FIG. 4 is a cross-sectional view taken along line IV--IV in FIG. 3 is a cross-sectional view of the elements associated with one nozzle N in the first row L1, and FIG. 4 is a cross-sectional view of the elements associated with one nozzle N in the second row L2. As can be seen from FIGS. 3 and 4, the elements associated with the nozzles N in the first row L1 and the elements associated with the nozzles N in the second row L2 are in an inverted relationship with respect to the YZ plane. .

As illustrated in FIGS. 2 to 4, the liquid ejection head 26 has a flow path structure 30. As shown in FIG. The flow path structure 30 configures a flow path for supplying each nozzle N with ink. As illustrated in FIG. 2 , a vibration plate 42 , a protective substrate 46 and a housing 48 are installed in the negative direction of the Z-axis in the flow path structure 30 . On the other hand, a nozzle plate 62 , a first vibration absorber 64 and a second vibration absorber 65 are installed in the positive direction of the Z-axis on the flow path substrate 32 . Each element of the liquid ejection head 26 is generally an elongated plate-shaped member along the Y-axis, and is joined together using an adhesive, for example.

The nozzle plate 62 is a plate-like member in which a plurality of nozzles N are formed, and is installed on the surface of the flow path structure 30 in the positive direction of the Z axis. Each of the plurality of nozzles N is a circular through hole through which ink passes. A plurality of nozzles N forming a first row L1 and a plurality of nozzles N forming a second row L2 are formed on the nozzle plate 62 of the present embodiment. For example, the nozzle plate 62 is manufactured by processing a silicon single crystal substrate using a semiconductor manufacturing technique such as dry etching or wet etching. However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the nozzle plate 62 .

As illustrated in FIGS. 2 to 4, the channel structure 30 includes a channel substrate 32 and a pressure chamber substrate . The flow path substrate 32 is positioned in the positive direction of the Z axis in the flow path structure 30 , and the pressure chamber substrate 34 is positioned in the negative direction of the Z axis in the flow path structure 30 . As illustrated in FIG. 2, the channel substrate 32 is formed with a space Ka1 and a space Ka2. Each of space Ka1 and space Ka2 is an elongated opening along the Y-axis. The space Ka1 is formed in the positive direction of the X-axis in the channel substrate 32, and the space Ka2 is formed in the negative direction of the X-axis in the channel substrate 32. As shown in FIG.

The channel substrate 32 of this embodiment is configured by laminating a first substrate 321 and a second substrate 322 . A first substrate 321 is positioned between the second substrate 322 and the pressure chamber substrate 34 . A space Ka1 is formed across the first substrate 321 and the second substrate 322, as illustrated in FIGS. Similarly, a space Ka2 is formed across the first substrate 321 and the second substrate 322 .

The housing part 48 is a case for storing ink. A space Kb1 corresponding to the space Ka1 and a space Kb2 corresponding to the space Ka2 are formed in the housing portion 48 . The space Ka1 of the flow path structure 30 and the space Kb1 of the housing 48 communicate with each other, and the space Ka2 of the flow path structure 30 and the space Kb2 of the housing 48 communicate with each other. The space composed of the space Ka1 and the space Kb1 functions as the first common liquid chamber K1, and the space composed of the space Ka2 and the space Kb2 functions as the second common liquid chamber K2. The first common liquid chamber K1 and the second common liquid chamber K2 are spaces commonly formed over the plurality of nozzles N and store ink supplied to the plurality of nozzles N. As shown in FIG.

An inlet 481 and an outlet 482 are formed in the housing portion 48 . Ink is supplied through the inlet 481 to the first common liquid chamber K1. Ink in the second common liquid chamber K2 is discharged through the discharge port 482. As shown in FIG. As illustrated in FIGS. 3 and 4, the first vibration absorber 64 is a flexible film forming part of the wall surface of the first common liquid chamber K1. A portion of the first vibration absorber 64 that deforms according to pressure fluctuations of the ink in the first common liquid chamber K1 (hereinafter referred to as a "first deformation portion 641") is a part of the wall surface of the first common liquid chamber K1. configure. It can also be said that the portion of the first vibration absorber 64 that is not fixed to the surface of the channel substrate 32 is the first deformation portion 641 . The first deforming portion 641 deforms according to the pressure fluctuation in the first common liquid chamber K1, thereby absorbing the pressure fluctuation of the ink in the first common liquid chamber K1. As understood from the above description, the first common liquid chamber K1 has the first deformation portion 641. As shown in FIG.

The second vibration absorber 65 is a flexible film forming part of the wall surface of the second common liquid chamber K2. A portion of the second vibration absorber 65 that deforms according to pressure fluctuations of the ink in the second common liquid chamber K2 (hereinafter referred to as a “second deformation portion 651”) is a part of the wall surface of the second common liquid chamber K2. configure. In other words, the portion of the second vibration absorber 65 that is not fixed to the surface of the channel substrate 32 is the second deformation portion 651 . The second deforming portion 651 absorbs pressure fluctuations of the ink inside the second common liquid chamber K2 by deforming according to the pressure fluctuations inside the second common liquid chamber K2. As understood from the above description, the second common liquid chamber K2 has the second deformation portion 651. As shown in FIG.

FIG. 5 is a schematic diagram of flow paths formed in the liquid ejection head 26. As shown in FIG. As illustrated in FIG. 5 , an individual channel Q is formed for each nozzle N in the channel structure 30 . That is, a plurality of individual flow paths Q are provided for a plurality of nozzles N, respectively. As illustrated in FIGS. 3 and 4, nozzles N are formed in portions of the nozzle plate 62 that constitute the wall surfaces of the individual flow paths Q. As shown in FIGS. That is, the nozzle N is formed so as to branch from the individual flow path Q. As shown in FIG. The first common liquid chamber K1 and the second common liquid chamber K2 are communicated with each other through individual channels Q. As shown in FIG. Specifically, the individual flow paths Q are formed such that the space Ka1 of the first common liquid chamber K1 and the space Ka2 of the second common liquid chamber K2 communicate with each other. The individual channel Q is a channel formed from the inner wall surface of the first common liquid chamber K1 to the inner wall surface of the second common liquid chamber K2. The individual flow paths Q corresponding to the nozzles N in the first row L1 and the individual flow paths Q corresponding to the nozzles N in the second row L2 have an inverted relationship with respect to the YZ plane.

As illustrated in FIG. 5, the plurality of individual flow paths Q are arranged side by side along the Y-axis. That is, an individual channel row including a plurality of individual channels Q is formed. Specifically, the individual flow paths Q corresponding to the nozzles N in the first row L1 and the individual flow paths Q corresponding to the nozzles N in the second row L2 are alternately arranged in the Y-axis direction. As understood from the above description, the plurality of individual channels Q communicate with each of the first supply liquid chamber K1 and the second common liquid chamber K2. Of the ink supplied to the individual flow paths Q from the first common liquid chamber K1, the ink that is not ejected from the nozzles N is stored in the second common liquid chamber K2.

As illustrated in FIG. 5 , the liquid ejection device 100 has a circulation mechanism 90 . The circulation mechanism 90 is a mechanism that circulates the ink discharged from the liquid ejection head 26 to the liquid ejection head 26 . The circulation mechanism 90 is a mechanism for circulating the ink supplied to the liquid ejection head 26 , and includes, for example, a supply channel 91 , a discharge channel 92 and a circulation pump 93 .

The supply channel 91 is a channel for supplying ink to the first common liquid chamber K1, and is connected to the inlet port 481 of the first common liquid chamber K1. The discharge channel 92 is a channel for discharging ink from the second common liquid chamber K2, and is connected to the discharge port 482 of the second common liquid chamber K2. The circulation pump 93 is a pumping mechanism that sends the ink supplied from the discharge channel 92 to the supply channel 91 . That is, the ink discharged from the second common liquid chamber K2 is circulated to the first common liquid chamber K1 via the discharge channel 92, the circulation pump 93, and the supply channel 91. FIG. As can be understood from the above description, the circulation mechanism 90 functions as an element that recovers ink from the second common liquid chamber K2 and returns the recovered ink to the first common liquid chamber K1. A configuration is also adopted in which the circulation mechanism 90 recovers the ink from the first common liquid chamber K1 and returns it to the second common liquid chamber K2.

The individual channel Q includes a pressure chamber C as illustrated in FIG. As illustrated in FIG. 2, pressure chambers C are formed in pressure chamber substrate 34 . The pressure chamber substrate 34 is a plate-like member in which a plurality of pressure chambers C are provided for the plurality of nozzles N, respectively. Each pressure chamber C is an elongated space along the X-axis in plan view. As illustrated in FIGS. 2 and 3, a plurality of pressure chambers C corresponding to the nozzles N of the first row L1 are arranged in the positive direction of the X axis in the pressure chamber substrate 34 along the Y axis. arrayed. As illustrated in FIG. 4, a plurality of pressure chambers C corresponding to the nozzles N of the second row L2 are arranged along the Y-axis direction in the pressure chamber substrate 34 in the negative direction of the X-axis. . Each pressure chamber C overlaps the nozzle N in plan view.

The flow path substrate 32 and the pressure chamber substrate 34 are manufactured by processing a silicon single crystal substrate, for example, using semiconductor manufacturing technology, like the nozzle plate 62 described above. However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the flow path substrate 32 and the pressure chamber substrate 34 .

As illustrated in FIG. 2, a vibration plate 42 is formed on the surface of the pressure chamber substrate 34 opposite to the flow path substrate 32 . The diaphragm 42 of this embodiment is a plate-like member that can vibrate elastically. Part or all of the vibration plate 42 is integrated with the pressure chamber substrate 34 by selectively removing a portion of the region corresponding to the pressure chambers C in the thickness direction of the plate-like member having a predetermined thickness. can be formed into The pressure chamber C is a space located between the channel substrate 32 and the vibration plate 42 .

As exemplified in FIGS. 2 to 4, an energy generating section 44 is formed for each nozzle N on the surface of the vibration plate 42 opposite to the pressure chambers C. As shown in FIGS. A plurality of energy generators 44 are provided for the plurality of nozzles N, respectively. Each energy generator 44 generates energy for ejecting ink. Specifically, the energy generating section 44 is a driving element that causes ink to be ejected from the nozzles N by varying the pressure in the pressure chambers C. As shown in FIG. In this embodiment, a piezoelectric element that changes the volume of the pressure chamber C by deforming the vibration plate 42 is used as the energy generator 44 . That is, the energy generator 44 generates pressure for ejecting ink. Specifically, the energy generating section 44 is an actuator that deforms when supplied with a drive signal, and is formed in a long shape along the X-axis in a plan view. The multiple energy generators 44 are arranged in the Y-axis direction so as to correspond to the multiple pressure chambers C. As shown in FIG. When the vibration plate 42 vibrates in conjunction with the deformation of the energy generating section 44, the pressure in the pressure chamber C fluctuates, and ink filled in the pressure chamber C passes through the nozzle N and is ejected.

The protective substrate 46 in FIG. 2 is a plate-shaped member that protects the plurality of energy generating portions 44 and reinforces the mechanical strength of the diaphragm 42 . A protective substrate 46 is installed on the side opposite to the pressure chamber substrate 34 with the diaphragm 42 interposed therebetween. A plurality of energy generators 44 are installed between the protective substrate 46 and the diaphragm 42 . The protective substrate 46 is made of silicon (Si), for example. As illustrated in FIGS. 3 and 4, a wiring substrate 50 is bonded to the surface of the diaphragm 42, for example. The wiring board 50 is a mounting component formed with a plurality of wirings for electrically connecting the control unit 20 or the power supply circuit and the liquid ejection head 26 . For example, a flexible wiring board 50 such as FPC (Flexible Printed Circuit) or FFC (Flexible Flat Cable) is preferably employed. A drive circuit 52 mounted on the wiring board 50 supplies a drive signal to each energy generator 44 .

In the following description, one of two individual flow paths Q adjacent to each other in the Y-axis direction is referred to as "first individual flow path Q1" and the other as "second individual flow path Q2". FIG. 6 is a cross-sectional view of the first individual channel Q1, and FIG. 7 is a cross-sectional view of the second individual channel Q2. FIG. 6 is an enlarged view of the individual channel Q illustrated in FIG. 3, and FIG. 7 is an enlarged view of the individual channel Q illustrated in FIG.

The first individual channel Q1 is the individual channel Q corresponding to any one nozzle N (hereinafter referred to as "first nozzle N1") in the first row L1, and the second individual channel Q2 is the second individual channel Q2. It is an individual channel Q corresponding to an arbitrary one nozzle N (hereinafter referred to as "second nozzle N2") in row L2. The first nozzle N1 and the second nozzle N2 are two nozzles N that are adjacent to each other when viewed in the X-axis direction among the plurality of nozzles N formed on the nozzle plate 62 . In addition, the pressure chamber C corresponding to the first individual channel Q1 among the plurality of pressure chambers C is denoted as "first pressure chamber C1", and the pressure chamber C corresponding to the second individual channel Q2 among the plurality of pressure chambers C Chamber C will be referred to as "second pressure chamber C2". The first individual channel Q1 and the second individual channel Q2 are in an inverted relationship with respect to the XZ plane. The channel resistance R of the first individual channel Q1 and the channel resistance R of the second individual channel Q2 are substantially equal.

As illustrated in FIG. 6, the wall surface of the first common liquid chamber K1 is formed with a first opening O1 that is a connection port with the first individual channel Q1. It can also be said that the interface between the first common liquid chamber K1 and the first individual channel Q1 is the first opening O1. On the other hand, the wall surface of the second common liquid chamber K2 is formed with a third opening O3 that is a connection port with the first individual channel Q1. It can also be said that the interface between the second common liquid chamber K2 and the first individual channel Q1 is the third opening O3. As can be understood from the above description, the channel from the first opening O1 to the third opening O3 is the first individual channel Q1.

Further, as illustrated in FIG. 7, the wall surface of the first common liquid chamber K1 is formed with a second opening O2 that is a connection port with the second individual channel Q2. It can also be said that the interface between the first common liquid chamber K1 and the second individual flow path Q2 is the second opening O2. A wall surface of the second common liquid chamber K2 is formed with a fourth opening O4 that is a connection port with the second individual channel Q2. It can also be said that the interface between the second common liquid chamber K2 and the second individual channel Q2 is the fourth opening O4. As understood from the above description, the passage from the second opening O2 to the fourth opening O4 is the second individual passage Q2.

As illustrated in FIG. 6, the first individual channel Q1 includes a first communication channel Q11 and a second communication channel Q12. The first communication channel Q11 communicates between the first common liquid chamber K1 and the first nozzle N1. Specifically, the first communication channel Q11 is a channel from the first opening O1 formed in the wall surface of the space Ka1 to the opening of the first nozzle N1 in the negative direction of the Z axis. The first communication channel Q11 of this embodiment includes a first channel 111, a pressure chamber C, and a second channel 112. As shown in FIG. The first flow path 111 communicates the space Ka1 and the first pressure chamber C1. Specifically, the first flow path 111 is a through hole formed along the Z-axis in the first substrate 321 . The first pressure chamber C1 communicates the first channel 111 and the second channel 112 with each other. As described above, the first pressure chamber C1 is an elongated space formed in the pressure chamber substrate 34 and extending along the X axis. The energy generator 44 corresponding to the first nozzle N1 is installed on the surface of the vibration plate 42 opposite to the first pressure chamber C1. In other words, the energy generator 44 corresponding to the first nozzle N1 is provided in the middle of the first individual flow path Q1. The energy generator 44 corresponding to the first nozzle N1 is an example of the "first energy generator". The second flow path 112 communicates the pressure chamber C and the first nozzle N1. Specifically, the second flow path 112 is a through hole formed along the Z-axis over the first substrate 321 and the second substrate 322 .

The first pressure chamber C1 communicates with the first common liquid chamber K1 via the first flow path 111 and communicates with the first nozzle N1 via the second flow path 112 . Therefore, the ink that is filled in the first pressure chamber C1 from the first common liquid chamber K1 through the first flow path 111 is transferred to the second flow path by the deformation of the energy generating section 44 corresponding to the first pressure chamber C1. 112 and is discharged from the first nozzle N1.

The second communication channel Q12 communicates the second common liquid chamber K2 and the first nozzle N1. Specifically, the second communication channel Q12 is a channel extending from a plane including the central axis of the first nozzle N1 and parallel to the YZ plane to a third opening O3 formed in the side surface of the space Ka2. is. The second communication channel Q12 of this embodiment includes a third channel 121, a fourth channel 122 and a fifth channel 123. As shown in FIG. The third channel 121 communicates between the first nozzle N1 and the fourth channel 122 . Specifically, the third flow path 121 is formed along the X-axis on the surface of the second substrate 322 in the positive direction of the Z-axis. The fourth channel 122 communicates the third channel 121 and the fifth channel 123 . Specifically, the fourth channel 122 is a through hole formed along the Z-axis in the second substrate 322 . The fifth channel 123 communicates the fourth channel 122 and the second common liquid chamber K2. Specifically, the fifth flow path 123 is formed along the X-axis on the surface of the second substrate 322 in the negative direction of the Z-axis. Of the ink supplied from the first common liquid chamber K1 to the first individual channel Q1, the ink that is not ejected from the first nozzle N1 is stored in the second common liquid chamber K2.

As illustrated in FIG. 7, the second individual channel Q2 includes a third communication channel Q23 and a fourth communication channel Q24. The third communication channel Q23 corresponds to the first communication channel Q11, and the fourth communication channel Q24 corresponds to the second communication channel Q12. The first communication channel Q11 and the fourth communication channel Q24 are alternately positioned along the Y-axis in the positive direction of the X-axis. The second communication channel Q12 and the third communication channel Q23 are alternately positioned along the Y-axis in the negative direction of the X-axis.

The fourth communication channel Q24 communicates between the first common liquid chamber K1 and the second nozzle N2. Specifically, the fourth communication channel Q24 is a channel extending from the second opening O2 formed in the side surface of the space Ka1 to a plane including the central axis of the second nozzle N2 and parallel to the YZ plane. is. The fourth communication channel Q24 of this embodiment includes a sixth channel 241, a seventh channel 242 and an eighth channel 243. As shown in FIG. The sixth channel 241 connects the first common liquid chamber K1 and the seventh channel 242 . Specifically, the sixth flow path 241 is formed along the X-axis on the surface of the second substrate 322 in the negative direction of the Z-axis. The seventh channel 242 connects the sixth channel 241 and the eighth channel 243 . Specifically, the seventh channel 242 is a through hole formed along the Z-axis in the second substrate 322 . The eighth channel 243 communicates the seventh channel 242 and the second nozzle N2. Specifically, the eighth channel 243 is formed along the X-axis on the surface of the second substrate 322 in the positive direction of the Z-axis.

The third communication channel Q23 is a channel that communicates the second common liquid chamber K2 and the second nozzle N2. Specifically, the third communication channel Q23 is a channel from the opening of the second nozzle N2 in the negative direction of the Z axis to the fourth opening O4 formed in the upper surface of the space Ka2. The third communication channel Q23 of this embodiment includes a ninth channel 231, a second pressure chamber C2, and a tenth channel 232. As shown in FIG. The ninth flow path 231 connects the second nozzle N2 and the second pressure chamber C2. Specifically, the ninth channel 231 is a through hole formed along the Z-axis over the first substrate 321 and the second substrate 322 . The second pressure chamber C2 communicates the ninth flow path 231 and the tenth flow path 232 with each other. As described above, the second pressure chamber C2 is an elongated space formed in the pressure chamber substrate 34 and extending along the X axis. The energy generator 44 corresponding to the second nozzle N2 is installed on the surface of the vibration plate 42 opposite to the second pressure chamber C2. In other words, the energy generator 44 corresponding to the second nozzle N2 is provided in the middle of the second individual flow path Q2. The energy generator 44 corresponding to the second nozzle N2 is an example of the "second energy generator". The tenth flow path 232 communicates the second pressure chamber C2 and the space Ka2. Specifically, the tenth channel 232 is a through hole formed along the Z-axis in the first substrate 321 .

Ink is filled into the second pressure chamber C2 from the first common liquid chamber K1 through the fourth communication channel Q24 and the ninth channel 231. As shown in FIG. The ink in the second pressure chamber C2 is ejected from the second nozzle N2 through the ninth flow path 231 due to the deformation of the energy generating section 44. As shown in FIG. Of the ink supplied from the first common liquid chamber K1 to the second individual channel Q2, the ink that is not ejected from the second nozzle N2 is stored in the second common liquid chamber K2.

The first opening O1, the second opening O2, the third opening O3 and the fourth opening O4 will be described in detail below. 8 is a cross-sectional view of the first common liquid chamber K1 on the side of the first individual channel Q1, and FIG. 9 is a cross-sectional view of the side of the second individual channel Q2 in the first common liquid chamber K1. 10 is a sectional view of the second common liquid chamber K2 on the side of the first individual channel Q1, and FIG. 11 is a sectional view of the second common liquid chamber K2 on the side of the second individual channel Q2.

As illustrated in FIGS. 8 and 9, the first common liquid chamber K1 has a first surface F1, a second surface F2, a third surface F3 and a fourth surface F4. The first surface F1, the second surface F2, the third surface F3, and the fourth surface F4 constitute the wall surface of the first common liquid chamber K1. The first surface F1 is the bottom surface of the space Ka1. It can also be said that the portion of the wall surface of the space Ka1 along the Y-axis in the positive direction of the Z-axis is the first surface F1. Specifically, the first surface F1 is entirely composed of the first deformation portion 641 . At least a portion of the first surface F1 may be formed by the first deformation portion 641. As shown in FIG. For example, the first deformed portion 641 and the flow path substrate 32 may constitute the first surface F1. The second surface F2 is the upper surface of the space Ka1. It can also be said that the portion of the wall surface of the space Ka1 along the Y-axis in the negative direction of the Z-axis is the second surface F2. That is, the first surface F1 and the second surface F2 face each other. Specifically, the second surface F2 is configured by the flow path substrate 32 .

The third surface F3 and the fourth surface F4 are part of the side surfaces of the space Ka1. That is, the third plane F3 and the fourth plane F4 are planes that intersect with the first plane F1 and the second plane F2. In this embodiment, the third plane F3 and the fourth plane F4 are orthogonal to the first plane F1 and the second plane F2. Specifically, the third surface F3 is a portion of the side surface of the space Ka1 along the Y-axis in the negative direction of the X-axis. On the other hand, the fourth surface F4 is a portion along the Y-axis in the positive direction of the X-axis among the side surfaces of the space Ka1. That is, the third surface F3 and the fourth surface F4 face each other. The third surface F3 and the fourth surface F4 are configured by the flow path substrate 32. As shown in FIG.

As illustrated in FIG. 8, the first opening O1 is provided on the second surface F2. That is, the first opening O 1 faces the first deformation portion 641 . The opening parallel to the XY plane is the first opening O1. As illustrated in FIG. 9, the second opening O2 is provided on the third surface F3. That is, the second opening O2 faces the fourth surface F4. The opening parallel to the YZ plane is the second opening O2. As understood from the above description, the first opening O1 and the second opening O2 are not parallel.

As illustrated in FIGS. 8 and 9, the positions of the first opening O1 and the second opening O2 in the Z-axis direction are different. It can also be said that the first opening O1 and the second opening O2 have different heights. The position of the first opening O1 in the Z-axis direction is, for example, the position of the center of gravity p1 of the first opening O1 in the Z-axis direction. The position of the second opening O2 in the Z-axis direction is, for example, the position of the center of gravity p2 of the second opening O2 in the Z-axis direction. Specifically, the first opening O1 is positioned in the negative direction of the Z-axis relative to the second opening O2. In other words, the first opening O1 is located closer to the pressure chamber substrate 34 than the second opening O2. That is, the first opening O1 is positioned higher than the second opening O2.

The distance D1 between the first opening O1 and the first deformation portion 641 is different from the distance D2 between the second opening O2 and the second deformation portion 651. As shown in FIG. The distance D1 is, for example, the shortest distance from the center of gravity p1 of the first opening O1 to the surface of the first deformation portion 641 in the negative direction of the Z axis. The distance D2 is, for example, the shortest distance from the center of gravity p2 of the second opening O2 to the surface of the first deformation portion 641 in the negative direction of the Z axis. Specifically, distance D1 is greater than distance D2. That is, the first opening O1 is located farther from the first deformation portion 641 than the second opening O2.

Also, the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different. The direction P1 of the first opening O1 is the normal direction of the first opening O1. It can also be said that the direction of the central axis of the first flow path 111 is the direction P1 of the first opening O1. Similarly, the direction P2 of the second opening O2 is the normal direction of the second opening O2. It can also be said that the direction of the central axis of the sixth flow path 241 is the direction P2 of the second opening O2. Specifically, the direction P1 of the first opening O1 is along the Z-axis, and the direction P2 of the second opening O2 is along the X-axis. That is, the angle between the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees.

As illustrated in FIGS. 10 and 11, the second common liquid chamber K2 has a fifth surface F5, a sixth surface F6, a seventh surface F7 and an eighth surface F8. The fifth surface F5, the sixth surface F6, the seventh surface F7, and the eighth surface F8 constitute the wall surface of the second common liquid chamber K2. The fifth surface F5 is the bottom surface of the space Ka1. It can also be said that the portion of the wall surface of the space Kb1 in the positive direction of the Z-axis is the fifth surface F5. Specifically, the fifth surface F5 is entirely composed of the second deformation portion 651 . At least a portion of the fifth surface F5 may be configured by the second deformation portion 651. For example, the second deformation portion 651 and the flow path substrate 32 may constitute the fifth surface F5. The sixth surface F6 is the upper surface of the space Kb1. It can also be said that the portion of the wall surface of the space Kb1 in the negative direction of the Z-axis is the sixth surface F6. Specifically, the sixth surface F6 is configured by the flow path substrate 32 . The fifth surface F5 and the sixth surface F6 face each other.

The seventh surface F7 and the eighth surface F8 are part of the side surfaces of the space Kb1. That is, the seventh plane F7 and the eighth plane F8 are planes that intersect the fifth plane F5 and the sixth plane F6. In this embodiment, the seventh plane F7 and the eighth plane F8 are orthogonal to the fifth plane F5 and the sixth plane F6. Specifically, the seventh surface F7 is a portion of the side surface of the space Kb1 along the Y-axis in the positive direction of the X-axis. On the other hand, the eighth surface F8 and the seventh surface F7 are portions along the Y-axis in the negative direction of the X-axis among the side surfaces of the space Kb1. That is, the seventh surface F7 and the eighth surface F8 face each other. The seventh surface F7 and the eighth surface F8 are configured by the flow path substrate 32. As shown in FIG.

As illustrated in FIG. 10, the third opening O3 is provided on the seventh surface F7. That is, the third opening O3 faces the eighth surface F8. An opening parallel to the YZ plane is the third opening O3. As illustrated in FIG. 11, the fourth opening O4 is provided on the sixth surface F6. That is, the fourth opening O4 faces the second deformation portion 651. As shown in FIG. An opening parallel to the XY plane is the fourth opening O4. As understood from the above description, the third opening O3 and the fourth opening O4 are not parallel.

As illustrated in FIGS. 8 and 9, the positions of the third opening O3 and the fourth opening O4 in the Z-axis direction are different. In other words, the third opening O3 and the fourth opening O4 have different heights. The position of the third opening O3 in the Z-axis direction is, for example, the position of the center of gravity p3 of the third opening O3 in the Z-axis direction. The position of the fourth opening O4 in the Z-axis direction is, for example, the position of the center of gravity p4 of the fourth opening O4 in the Z-axis direction. Specifically, the fourth opening O4 is positioned in the negative direction of the Z-axis relative to the third opening O3. In other words, the fourth opening O4 is positioned closer to the pressure chamber substrate 34 than the third opening O3. That is, the fourth opening O4 is positioned higher than the third opening O3.

The distance D3 between the third opening O3 and the second deformation portion 651 and the distance D4 between the fourth opening O4 and the second deformation portion 651 are different. The distance D4 is, for example, the shortest distance from the center of gravity p4 of the fourth opening O4 to the surface of the second deformation portion 651 in the negative direction of the Z axis. The distance D3 is, for example, the shortest distance from the center of gravity p3 of the third opening O3 to the surface of the second deformation portion 651 in the negative direction of the Z axis. Specifically, distance D4 is greater than distance D3. That is, the fourth opening O4 is located farther from the second deformation portion 651 than the third opening O3.

Also, the direction P3 of the third opening O3 and the direction P4 of the fourth opening O4 are different. The direction P3 of the third opening O3 is the normal direction of the third opening O3. It can also be said that the direction of the central axis of the fifth flow path 123 is the direction P3 of the third opening O3. Similarly, the direction P4 of the fourth opening O4 is the normal direction of the fourth opening O4. It can also be said that the direction of the central axis of the tenth flow path 232 is the direction P4 of the fourth opening O4. Specifically, the direction P3 of the third opening O3 is along the X-axis, and the direction P4 of the fourth opening O4 is along the Z-axis. That is, the angle between the direction P3 of the third opening O3 and the direction P4 of the fourth opening O4 is 90 degrees.

As described above, the first individual channel Q1 and the second individual channel Q2 are in an inverted relationship. Therefore, as illustrated in FIGS. 8 and 11, the first opening O1 and the fourth opening O4 have the same position in the Z-axis direction. Also, the direction P1 of the first opening O1 and the direction P4 of the fourth opening O4 are the same. That is, the first opening O1 and the fourth opening O4 are parallel. Further, as illustrated in FIGS. 9 and 10, the second opening O2 and the third opening O3 have the same position in the Z-axis direction. Also, the second opening O2 and the third opening O3 are parallel. Specifically, the direction P2 of the second opening O2 and the direction P3 of the third opening O3 are opposite.

Here, crosstalk between adjacent individual flow paths Q will be described. Crosstalk can be mechanically generated through the structure forming the flow path or fluidly generated through the liquid in the flow path. The latter crosstalk is greatly influenced by the behavior of the liquid in the common liquid chamber K (K1, K2) where adjacent individual flow paths Q are fluidically connected. For example, the closer the fluxes generated in the vicinity of the openings O (O1, O2, O3, O4) are, the greater the mutual influence on the fluxes and the greater the crosstalk. Also, the smaller the absorption and attenuation of the pressure fluctuations propagating into the common liquid chamber K through each opening O, the greater the crosstalk.

As can be understood from the above description, in this embodiment, the positions of the first opening O1 and the second opening O2 are different in the Z-axis direction. The distance between the first opening O1 and the second opening O2 can be increased as compared with the configuration in which the positions in the Z-axis direction are the same. That is, the distance between the flux generated near the first opening O1 and the flux generated near the second opening O2 is increased. As a result, the flux generated near the first opening O1 and the flux generated near the second opening O2 are unlikely to affect each other. Therefore, crosstalk between the first individual channel Q1 and the second individual channel Q2 can be reduced. As a result, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. The ejection characteristics are, for example, ejection speed, ejection direction, and ejection amount. As can be understood from the above description, even when a plurality of individual channels Q are arranged at high density, there is an advantage that crosstalk between adjacent individual channels Q can be suppressed.

According to the configuration of this embodiment in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different, the flux generated near the first opening O1 and the flux generated near the second opening O2 The direction is different. That is, the flux generated in the vicinity of the first opening O1 and the flux generated in the vicinity of the second opening O2 are unlikely to affect each other. Therefore, crosstalk between the first individual flow path Q1 and the second individual flow path Q2 can be reduced compared to a configuration in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are the same. As a result, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. Especially in this embodiment, since the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees, the cross between the first individual flow path Q1 and the second individual flow path Q2 The effect of being able to reduce talk is remarkable.

Since the first opening O1 is closer to the energy generating section 44 than the second opening O2, pressure fluctuations due to the energy generating section 44 are likely to propagate to the first common liquid chamber K1 via the first opening O1. In the present embodiment, since the distance D1 is longer than the distance D2, pressure fluctuations propagating from the first opening O1 toward the first deformation portion 641 are likely to be attenuated. Therefore, the effect of being able to reduce crosstalk is remarkable. The first opening O1 is provided on the second surface F2, and the second opening O2 is provided on the third surface F3. The effect of being able to reduce crosstalk is remarkable. Further, according to the configuration in which the first opening O1 faces the first deforming portion 641, there is an advantage that the first deforming portion 641 can easily absorb pressure fluctuations propagating through the first opening O1. Similarly, since the fourth opening O4 faces the second deformation portion 651, the second deformation portion 651 can easily absorb pressure fluctuations propagating through the fourth opening O4.

For example, in a configuration in which the position of the third opening O3 in the Z-axis direction is the same as that of the first opening O1, and the position of the fourth opening O4 in the Z-axis direction is the same as that of the second opening O2, the first individual flow The channel length of the channel Q1 and the channel length of the second individual channel Q2 are different, and an error in ejection characteristics occurs in each of the first nozzle N1 and the second nozzle N2. In contrast, in this embodiment, the first opening O1 and the fourth opening O4 have the same position in the Z-axis direction, and the second opening O2 and the third opening O3 have the same position in the Z-axis direction. According to the configuration of (1), since the channel length of the first individual channel Q1 and the channel length of the second individual channel Q2 are close to each other, errors in the discharge characteristics of each of the first nozzle N1 and the second nozzle N2 are reduced. can.

Further, for example, in a configuration in which the direction P3 of the third opening O3 is parallel to the direction P1 of the first opening O1 and the direction P4 of the fourth opening O4 is parallel to the direction P2 of the second opening O2, the first individual flow The channel length of the channel Q1 and the channel length of the second individual channel Q2 are different, and an error in ejection characteristics occurs in each of the first nozzle N1 and the second nozzle N2. In contrast, in the present embodiment, the direction P1 of the first opening O1 and the direction P4 of the fourth opening O4 are parallel, and the direction P2 of the second opening O2 and the direction P3 of the third opening O3 are parallel. , the channel length of the first individual channel Q1 and the channel length of the second individual channel Q2 approach each other. Therefore, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. Each structure in the relationship between the third opening O3 and the fourth opening O4 can achieve the same effect as the effect of each structure in the relationship between the first opening O1 and the second opening O2 illustrated above.

B. Modifications The forms illustrated above can be modified in various ways. Specific modified aspects that can be applied to the above-described modes are exemplified below. Two or more aspects arbitrarily selected from the following examples can be combined as appropriate within a mutually consistent range.

(1) The shape of the individual flow path Q is not limited to the configuration illustrated in the above embodiment. For example, the first communication flow path Q11 may include other flow paths in addition to the first flow path 111, the first pressure chamber C1, and the second flow path 112. The same applies to the second communication channel Q12, the third communication channel Q23 and the fourth communication channel Q24. Also, the first individual channel Q1 and the second individual channel Q2 may have different shapes, or the first individual channel Q1 and the second individual channel Q2 may have the same shape. That is, the first opening O1 and the fourth opening O4 have different positions in the Z-axis direction, or the second opening O2 and the third opening O3 have different positions in the Z-axis direction. A configuration is also employed.

(2) In the above embodiment, the flow path substrate 32 is formed by stacking the first substrate 321 and the second substrate 322, but the configuration of the flow path substrate 32 is not limited to the above example. For example, the channel substrate 32 may be composed of a single layer, or may be composed of a laminate of three or more layers.

(3) In the above embodiment, the first opening O1 and the second opening O2 have different positions in the Z-axis direction, and the first opening O1 and the second opening O2 have different directions P1 and P2. Although the liquid ejection head 26 that employs both of them has been exemplified, only one of the configurations may be employed. Only one of a configuration in which the positions of the first opening O1 and the second opening O2 are different in the Z-axis direction and a configuration in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different is adopted. However, the effect of reducing crosstalk between the first individual flow path Q1 and the second individual flow path Q2 can be realized.

(4) In the above embodiment, the first opening O1 is formed on the second surface F2 of the first common liquid chamber K1, and the second opening O2 is formed on the third surface F3. The position where O2 is formed is arbitrary. For example, the first opening O1 may be formed on the third surface F3 and the second opening O2 may be formed on the second surface F2. That is, one of the first opening O1 and the second opening O2 should face the first deformed portion 641 . Similarly, one of the third opening O 3 and the fourth opening O 4 may face the second deformation portion 651 .

Also, the first opening O1 and the second opening O2 may be formed on the same plane. For example, a configuration in which both the first opening O1 and the second opening O2 are formed on the second surface F2, or a configuration in which both the first opening O1 and the second opening O2 are formed on the second surface F2 are also adopted. be. Similarly, the third opening O3 and the fourth opening O4 may be formed in the same plane.

(5) In the above embodiment, the first vibration absorber 64 and the second vibration absorber 65 may be omitted. That is, it is not essential that the first deforming portion 641 form part of the wall surface of the first common liquid chamber K1 and the second deforming portion 651 form part of the wall surface of the second common liquid chamber K2.

(6) In the above embodiment, the configuration in which the liquid ejection device 100 includes the circulation mechanism 90 is illustrated, but it is not essential that the liquid ejection device 100 includes the circulation mechanism 90 . That is, either the first row L1 or the second row L2 is omitted. For example, when the second row L2 is omitted, various elements related to the second row L2 are also omitted. For example, the second common liquid chamber K2 is omitted. That is, the third opening O3 and the fourth opening O4 are also omitted.

(7) In the above embodiment, the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees. The angle formed by the direction P2 is arbitrary. From the viewpoint of reducing crosstalk, the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is preferably 45 degrees or more. As the angle between the direction P1 of the first opening O1 and the direction P2 of the second opening O2 approaches 90 degrees, the effect of reducing crosstalk is more pronounced. However, a configuration is also adopted in which the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is less than 45 degrees. Similarly, the angle formed by the direction P3 of the third opening O3 and the direction P4 of the fourth opening O4 is also arbitrary.

(8) The energy generator 44 that generates energy for ejecting the liquid in the pressure chamber C from the nozzle N is not limited to the piezoelectric element. For example, it is possible to use, as the energy generator 44, a heating element that generates bubbles in the pressure chamber C by heating to change the pressure. As can be understood from the above examples, the energy generating section 44 is comprehensively expressed as an element that ejects the liquid in the pressure chamber C from the nozzle N, and has an operation method such as a piezoelectric method and a thermal method, and a specific configuration. It doesn't matter how. That is, the energy for ejecting liquid includes both heat and pressure.

(9) In the above embodiment, the serial liquid ejection apparatus 100 that reciprocates the transport body 82 on which the liquid ejection head 26 is mounted is exemplified. The present invention can also be applied to devices.

(10) The liquid ejecting apparatus 100 exemplified in the above embodiments can be employed in various types of equipment such as facsimile machines and copiers, in addition to equipment dedicated to printing. However, the application of the liquid ejecting apparatus of the present invention is not limited to printing. For example, a liquid ejecting apparatus that ejects a solution of a coloring material is used as a manufacturing apparatus for forming a color filter for a display device such as a liquid crystal display panel. Also, a liquid ejecting apparatus that ejects a solution of a conductive material is used as a manufacturing apparatus for forming wiring and electrodes of a wiring substrate. Further, a liquid ejecting apparatus that ejects a solution of an organic matter related to living organisms is used as a manufacturing apparatus for manufacturing biochips, for example.

DESCRIPTION OF SYMBOLS 100... Liquid ejection apparatus, 12... Medium, 14... Liquid container, 20... Control unit, 22... Transport mechanism, 24... Movement mechanism, 82... Transport body, 84... Transport belt, 26... Liquid ejection head, 30... Flow path Structure 32 Flow path substrate 321 First substrate 322 Second substrate 34 Pressure chamber substrate 42 Diaphragm 44 Energy generation unit 46 Protection substrate 48 Case 481 , 482... Inlet, 50... Wiring board, 52... Drive circuit, 62... Nozzle plate, 64... First vibration absorber, 65... Second vibration absorber, 641... First deformation part, 651... Second deformation part, 90 Circulation mechanism 91 Supply channel 92 Discharge channel 93 Circulation pump C Pressure chamber C1 First pressure chamber C2 Second pressure chamber L1 First row L2 Second Column N...Nozzle N1...First nozzle N2...Second nozzle K1...First common liquid chamber K2...Second common liquid chamber Q...Individual channel Q1...First individual channel Q11... First communication channel, Q12... Second communication channel, Q2... Second individual channel, Q23... Third communication channel, Q24... Fourth communication channel, 111... First channel, 112... Second stream 121... 3rd flow path 122... 4th flow path 123... 5th flow path 241... 6th flow path 242... 7th flow path 243... 8th flow path 231... 9th flow path , 232... Tenth channel, O1... First opening, O2... Second opening, O3... Third opening, O4... Fourth opening, F1... First surface, F2... Second surface, F3... Third surface, F4...fourth surface, F5...fifth surface, F6...sixth surface, F7...seventh surface, F8...eighth surface.

Claims (9)

a plurality of nozzles for ejecting liquid along a first axis;
an individual channel array including a plurality of individual channels provided for each of the plurality of nozzles and arranged in parallel along a second axis orthogonal to the first axis when viewed from the direction of the first axis;
a common liquid chamber communicating with the plurality of individual channels in common;
A liquid ejection head comprising
The plurality of individual channels includes a first individual channel and a second individual channel adjacent to each other in the row of individual channels,
A first opening, which is a connection port of the common liquid chamber with the first individual channel, and a second opening, which is a connection port of the common liquid chamber with the second individual channel, are arranged along the first axis. different positions in the direction,
the common liquid chamber has first and second surfaces facing each other, and a third surface,
at least part of the first surface is configured by a deformable portion that deforms according to pressure fluctuations of the liquid in the common liquid chamber;
The second surface is provided with the first opening,
The third surface is provided with the second opening
liquid ejection head . The direction of the first opening is different from the direction of the second opening
The liquid ejection head according to claim 1 . a plurality of nozzles for ejecting liquid along a first axis;
an individual channel array including a plurality of individual channels provided for each of the plurality of nozzles and arranged in parallel along a second axis orthogonal to the first axis when viewed from the direction of the first axis;
a first common liquid chamber commonly communicating with the plurality of individual channels;
a second common liquid chamber communicating in common with the plurality of individual channels;
A liquid ejection head comprising
The plurality of individual channels includes a first individual channel and a second individual channel adjacent to each other in the row of individual channels,
A first opening, which is a connection port of the first common liquid chamber with the first individual channel, and a second opening, which is a connection port of the first common liquid chamber with the second individual channel, different positions in the direction of the first axis,
A third opening, which is a connection port of the second common liquid chamber with the first individual channel, and a fourth opening, which is a connection port of the second common liquid chamber with the second individual channel, Liquid ejection heads having different positions in the direction of the first axis. the first opening and the fourth opening have the same position in the direction of the first axis;
The second opening and the third opening have the same position in the direction of the first axis.
4. The liquid ejection head according to claim 3 . The first common liquid chamber has a first deformable portion that deforms according to pressure fluctuations of the liquid inside,
The second common liquid chamber has a second deformable portion that deforms according to pressure fluctuations of the liquid inside,
The distance between the first opening and the first deforming portion is different from the distance between the second opening and the first deforming portion,
The distance between the third opening and the second deformation portion is different from the distance between the fourth opening and the second deformation portion
5. The liquid ejection head according to claim 3 or 4 . In the first individual flow path, a first communication flow path that communicates between the first common liquid chamber and a first nozzle of the plurality of nozzles generates energy for ejecting liquid. 1 an energy generator is provided,
In the second individual flow path, a second communication flow path for communicating the second common liquid chamber with a second nozzle of the plurality of nozzles is provided for generating energy for ejecting the liquid. 2 an energy generator is provided,
the distance between the first opening and the first deformation portion is greater than the distance between the second opening and the first deformation portion;
A distance between the fourth opening and the second deformation portion is greater than a distance between the third opening and the second deformation portion.
The liquid ejection head according to claim 5 . The first opening faces the first deformation portion,
The fourth opening faces the second deformation portion
7. The liquid ejection head according to claim 6 . Different from the direction of the first opening and the direction of the second opening,
The direction of the third opening is different from the direction of the fourth opening
The liquid ejection head according to any one of claims 3 to 7 . a liquid ejection head according to any one of claims 3 to 8 ;
and a circulation mechanism that collects liquid from one of the first common liquid chamber and the second common liquid chamber and circulates the liquid to the other.

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