CN111347783B

CN111347783B - Liquid discharge head and liquid discharge apparatus

Info

Publication number: CN111347783B
Application number: CN201911301297.4A
Authority: CN
Inventors: 内田和见; 福泽祐马
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2018-12-21
Filing date: 2019-12-17
Publication date: 2022-11-11
Anticipated expiration: 2039-12-17
Also published as: EP3705296A1; EP3705296B1; CN111347783A

Abstract

The invention provides a liquid ejection head and a liquid ejection apparatus which reduce the influence of crosstalk. The liquid ejection head includes: a plurality of nozzles that eject liquid along a first axis; an independent flow channel row provided for each of the plurality of nozzles, and including a plurality of independent flow channels arranged side by side along a second axis orthogonal to the first axis when viewed in the direction of the first axis; and a common liquid chamber that communicates in common with the plurality of independent flow passages, in the liquid ejection head, the plurality of independent flow passages include a first independent flow passage and a second independent flow passage adjacent in the independent flow passage row, and a first opening in the common liquid chamber that is a connection port connected to the first independent flow passage and a second opening in the common liquid chamber that is a connection port connected to the second independent flow passage are different in position in the direction of the first axis.

Description

Liquid discharge head and liquid discharge apparatus

Technical Field

The present invention relates to a liquid ejection head and a liquid ejection apparatus.

Background

Conventionally, a liquid ejection head has been proposed which ejects a liquid such as ink from a plurality of nozzles. For example, patent document l discloses a structure in which a liquid is ejected from a nozzle by varying the pressure in a pressure chamber communicating with the nozzle.

In recent liquid ejecting heads, there is a very high demand for high density nozzles. However, when a plurality of nozzles are formed at high density, a phenomenon (hereinafter, referred to as "crosstalk") occurs in which pressure fluctuations in one pressure chamber affect pressure fluctuations in a pressure chamber in the vicinity thereof. When the crosstalk occurs, an error occurs in the ejection characteristics of each nozzle.

Patent document l: japanese patent laid-open publication No. 20l3-l84372

Disclosure of Invention

In order to solve the above problem, a liquid ejection head according to a preferred embodiment of the present invention includes: a plurality of nozzles that eject liquid along a first axis; an independent flow path row provided for each of the plurality of nozzles, and including a plurality of independent flow paths arranged side by side along a second axis orthogonal to the first axis when viewed in a direction of the first axis; and a common liquid chamber that communicates in common with the plurality of independent flow passages, in the liquid ejection head, the plurality of independent flow passages include a first independent flow passage and a second independent flow passage adjacent in the independent flow passage row, and a first opening in the common liquid chamber that is a connection port connected to the first independent flow passage and a second opening in the common liquid chamber that is a connection port connected to the second independent flow passage are different in position in the direction of the first axis.

A liquid ejection head according to another aspect of the present invention includes: a plurality of nozzles that eject liquid along a first axis; an independent flow path row provided for each of the plurality of nozzles, and including a plurality of independent flow paths arranged side by side along a second axis orthogonal to the first axis when viewed in a direction of the first axis; a first common liquid chamber that communicates with the plurality of independent flow passages in common; a second common liquid chamber that communicates in common with the plurality of independent flow passages, in the liquid ejection head, the plurality of independent flow passages include first independent flow passages and second independent flow passages that are adjacent in the independent flow passage row, a first opening in the first common liquid chamber as a connection port connected to the first independent flow passage and a second opening in the first common liquid chamber as a connection port connected to the second independent flow passage are different in position in the direction of the first axis, and a third opening in the second common liquid chamber as a connection port connected to the first independent flow passage and a fourth opening in the second common liquid chamber as a connection port connected to the second independent flow passage are different in position in the direction of the first axis.

A liquid ejection head according to another aspect of the present invention includes: a plurality of nozzles that eject liquid along a first axis; an independent flow channel row provided for each of the plurality of nozzles, and including a plurality of independent flow channels arranged side by side along a second axis orthogonal to the first axis when viewed in the direction of the first axis; and a common liquid chamber that communicates in common with the plurality of independent flow passages, in the liquid ejection head, the plurality of independent flow passages include a first independent flow passage and a second independent flow passage adjacent in the independent flow passage row, and a direction of a first opening in the common liquid chamber as a connection port connected to the first independent flow passage and a direction of a second opening in the common liquid chamber as a connection port connected to the second independent flow passage are different.

A liquid ejection head according to another aspect of the present invention includes: a plurality of nozzles that eject liquid along a first axis; an independent flow path row provided for each of the plurality of nozzles, and including a plurality of independent flow paths arranged side by side along a second axis orthogonal to the first axis when viewed in a direction of the first axis; a first common liquid chamber which is commonly communicated with the plurality of independent flow passages; and a second common liquid chamber that communicates in common with the plurality of independent flow passages, the plurality of independent flow passages including a first independent flow passage and a second independent flow passage adjacent in the independent flow passage row, a direction of a first opening in the first common liquid chamber as a connection port connected to the first independent flow passage and a direction of a second opening in the first common liquid chamber as a connection port connected to the second independent flow passage being different, and a direction of a third opening in the second common liquid chamber as a connection port connected to the first independent flow passage and a direction of a fourth opening in the second common liquid chamber as a connection port connected to the second independent flow passage being different. The present invention is also specified as a liquid ejecting apparatus including the liquid ejecting head according to each of the above-described aspects.

Drawings

Fig. 1 is a block diagram showing a configuration of a liquid discharge apparatus according to a first embodiment of the present invention.

Fig. 2 is an exploded perspective view of the liquid ejection head.

Fig. 3 is a sectional view of the liquid ejection head.

Fig. 4 is a sectional view of the liquid ejection head.

Fig. 5 is a schematic view of a flow channel formed in a liquid ejection head.

Fig. 6 is a sectional view of a first independent flow passage.

Fig. 7 is a sectional view of a second independent flow passage.

Fig. 8 is a sectional view of the first independent flow channel side in the first common liquid chamber.

Fig. 9 is a sectional view of the second independent flow channel side in the first common liquid chamber.

Fig. 10 is a sectional view of the first individual flow channel side in the second common liquid chamber.

Fig. 11 is a sectional view of the second individual flow channel side in the second common liquid chamber.

Detailed Description

A. Detailed description of the preferred embodiments

Fig. 1 is a configuration diagram illustrating a liquid discharge apparatus 100 according to an embodiment of the present invention. The liquid discharge apparatus 100 of the present embodiment is an ink jet printing apparatus that discharges ink as an example of a liquid onto the medium 12. The medium 12 is typically a printing paper, but a printing object of any material such as a resin film or a fabric may be used as the medium 12. As illustrated in fig. 1, the liquid ejecting apparatus 100 is provided with a liquid container 14 that stores ink. For example, an ink cartridge that can be attached to and detached from the liquid ejecting apparatus 100, a bag-shaped ink bag formed of a flexible film, or an ink tank that can replenish ink is used as the liquid container 14. A plurality of inks different in color are stored in the liquid container 14.

As illustrated in fig. 1, the liquid discharge apparatus 100 includes: a control unit 20, a conveying mechanism 22, a moving mechanism 24, and a liquid ejection head 26. The control Unit 20 includes a Processing circuit such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array), and a memory circuit such as a semiconductor memory, and collectively controls each element of the liquid ejection apparatus 100. The transport mechanism 22 transports the medium 12 in the Y-axis direction under the control of the control unit 20.

The moving mechanism 24 reciprocates the liquid ejection head 26 in the X-axis direction under the control of the control unit 20. The X-axis intersects the Y-axis along which the medium 12 is conveyed. Typically, the X-axis is orthogonal to the Y-axis. The moving mechanism 24 of the present embodiment includes a substantially box-shaped conveyance body 82 that houses the liquid discharge head 26, and a conveyance belt 84 to which the conveyance body 82 is fixed. Further, a configuration in which a plurality of liquid discharge heads 26 are mounted on the carrier 82, or a configuration in which the liquid container 14 is mounted on the carrier 82 together with the liquid discharge heads 26 may be adopted.

The liquid ejection head 26 ejects the ink supplied from the liquid container 14 to the medium 12 from the plurality of nozzles under the control performed by the control unit 20. The control unit 20 generates various signals and voltages for ejecting ink from the nozzles, and supplies the signals and voltages to the liquid ejection head 26. Ink is ejected along the Z-axis. The axis perpendicular to the X-Y plane is the Z axis. That is, the X-axis and the Y-axis are orthogonal to the Z-axis. The Z-axis is an illustration of a "first axis", the Y-axis is an illustration of a "second axis", and the X-axis is an illustration of a "third axis". The liquid ejection head 26 ejects ink onto the medium 12 in parallel with the conveyance of the medium 12 by the conveyance mechanism 22 and the repetitive reciprocation of the conveyance body 82, thereby forming a desired image on the surface of the medium 12.

Fig. 2 is an exploded perspective view of the liquid ejection head 26. As illustrated in fig. 2, the liquid ejection head 26 includes a plurality of nozzles N aligned in the Y-axis direction. The plurality of nozzles N of the present embodiment are divided into a first row L1 and a second row L2 that are arranged side by side with an interval therebetween in the X-axis direction. Each of the first row L1 and the second row L2 is a set of a plurality of nozzles N linearly arranged in the Y-axis direction. As illustrated in fig. 2, the positions of the nozzles N on the Y axis are different between the first row L1 and the second row L2. Specifically, the nozzles N of one of the second columns L2 are located between two nozzles N adjacent to each other in the first column L1 when viewed from the direction of the X-axis.

Fig. 3 is a sectional view taken along the line iii-iii in fig. 2, and fig. 4 is a sectional view taken along the line iv-iv in fig. 2. Fig. 3 is a sectional view of an element associated with one nozzle N in the first row L1, and fig. 4 is a sectional view of an element associated with one nozzle N in the second row L2. As understood from fig. 3 and 4, the elements associated with the nozzles N of the first row L1 and the elements associated with the nozzles N of the second row L2 are in an inverted relationship with respect to the Y-Z plane.

As illustrated in fig. 2 to 4, the liquid ejection head 26 includes a flow channel structure 30. The flow channel structure 30 constitutes a flow channel for supplying ink to each nozzle N. As illustrated in fig. 2, the vibration plate 42, the protective substrate 46, and the housing 48 are provided in the flow channel structure 30 in the negative direction of the Z axis. On the other hand, in the flow passage base plate 32 in the positive direction of the Z axis, the nozzle plate 62, the first vibration absorber 64, and the second vibration absorber 65 are provided. Each element of the liquid ejection head 26 is a long plate-like member schematically along the Y axis, and is bonded to each other with an adhesive, for example.

The nozzle plate 62 is a plate-like member on which a plurality of nozzles N are formed, and is provided on the surface of the flow channel structure 30 in the positive direction of the Z axis. Each of the plurality of nozzles N is a circular through-hole through which ink passes. The nozzle plate 62 of the present embodiment is formed with a plurality of nozzles N constituting the first row L1 and a plurality of nozzles N constituting the second row L2. For example, the nozzle plate 62 is manufactured by processing a silicon single crystal substrate by a semiconductor manufacturing technique such as dry etching or wet etching. In the manufacture of the nozzle plate 62, a known material or a known manufacturing method can be arbitrarily used.

As illustrated in fig. 2 to 4, the flow channel structure 30 includes a flow channel substrate 32 and a pressure chamber substrate 34. The flow channel substrate 32 is located in the positive Z-axis direction of the flow channel structure 30, and the pressure chamber substrate 34 is located in the negative Z-axis direction of the flow channel structure 30. As illustrated in fig. 2, a space Ka1 and a space Ka2 are formed in the flow channel substrate 32. The spaces Ka1 and Ka2 are elongated openings along the Y axis, respectively. The space Ka1 is formed in the positive direction of the X axis in the flow channel substrate 32, and the space Ka2 is formed in the negative direction of the X axis in the flow channel substrate 32.

The flow channel substrate 32 of the present embodiment is configured by laminating a first substrate 321 and a second substrate 322. The first substrate 321 is located between the second substrate 322 and the pressure chamber substrate 34. As illustrated in fig. 3 and 4, the space Ka1 is formed to extend between the first substrate 321 and the second substrate 322. Similarly, the space Ka2 is formed to extend between the first substrate 321 and the second substrate 322.

The housing portion 48 is a case for storing ink. Inside the housing 48, a space Kb1 corresponding to the space Ka1 and a space Kb2 corresponding to the space Ka2 are formed. The space Ka1 of the flow channel structure 30 and the space Kb1 of the housing 48 communicate with each other, and the space Ka2 of the flow channel structure 30 and the space Kb2 of the housing 48 communicate with each other. A space formed by the space Ka1 and the space Kb1 functions as the first common liquid chamber K1, and a space formed by the space Ka2 and the space Kb2 functions as the second common liquid chamber K2. The first common liquid chamber K1 and the second common liquid chamber K2 are spaces formed in common so as to extend over the plurality of nozzles N, and store ink supplied to the plurality of nozzles N.

The housing 48 has an inlet 481 and an outlet 482. The ink is supplied to the first common liquid chamber K1 through the introduction port 481. The ink in the second common liquid chamber K2 is discharged through the discharge port 482. As illustrated in fig. 3 and 4, the first vibration absorbing body 64 is a flexible film that constitutes a part of the wall surface of the first common liquid chamber K1. A portion of the first vibration absorber 64 that deforms in response to pressure fluctuations of the ink in the first common liquid chamber K1 (hereinafter referred to as "first deformation portion 641") constitutes a part of the wall surface of the first common liquid chamber K1. In other words, it can be said that the portion of the first vibration absorbing body 64 that is not fixed to the surface of the flow path substrate 32 is the first deformation portion 641. The first deforming portion 641 is deformed in accordance with the pressure variation in the first common liquid chamber K1, thereby absorbing the pressure variation of the ink in the first common liquid chamber K1. As understood from the above description, the first common liquid chamber K1 has the first deformation portion 641.

The second vibration absorber 65 is a flexible film that constitutes a part of the wall surface of the second common liquid chamber K2. A portion of the second vibration absorber 65 that deforms in response to pressure fluctuations of the ink in the second common liquid chamber K2 (hereinafter referred to as a "second deformation portion 651") constitutes a part of the wall surface of the second common liquid chamber K2. In other words, it can be said that the portion of the second vibration absorbing body 65 that is not fixed to the surface of the flow path base plate 32 is the second deforming portion 651. The second deforming portion 651 deforms in accordance with the pressure variation in the second common liquid chamber K2, thereby absorbing the pressure variation in the ink in the second common liquid chamber K2. As understood from the above description, the second common liquid chamber K2 has the second deformation portion 651.

Fig. 5 is a schematic view of the flow channels formed in the liquid ejection head 26. As illustrated in fig. 5, in the flow channel structure 30, an independent flow channel Q is formed for each nozzle N. That is, a plurality of independent flow paths Q are provided for the plurality of nozzles N, respectively. As illustrated in fig. 3 and 4, the nozzle plate 62 has nozzles N formed in portions of wall surfaces constituting the independent flow paths Q. That is, the nozzle N is formed to branch from the independent flow passage Q. The first common liquid chamber K1 and the second common liquid chamber K2 communicate with each other via the independent flow passage Q. Specifically, the independent flow passage Q is formed so that the space Ka1 of the first common liquid chamber K1 and the space Ka2 of the second common liquid chamber K2 communicate with each other. The independent flow passage Q is a flow passage formed from the inner wall surface of the first common liquid chamber K1 to the inner wall surface of the second common liquid chamber K2. The independent flow paths Q corresponding to the nozzles N of the first row L1 and the independent flow paths Q corresponding to the nozzles N of the second row L2 are in an inverted relationship with respect to the Y-Z plane.

As illustrated in fig. 5, the plurality of independent flow channels Q are arranged side by side with each other along the Y-axis. That is, an independent flow path row including a plurality of independent flow paths Q is formed. Specifically, the independent flow paths Q corresponding to the nozzles N in the first row L1 and the independent flow paths Q corresponding to the nozzles N in the second row L2 are alternately arranged in the Y-axis direction. As understood from the above description, the plurality of independent flow passages Q communicate with the first common liquid chamber K1 and the second common liquid chamber K2, respectively. Among the inks supplied from the first common liquid chamber K1 to the individual flow paths Q, the ink not ejected from the nozzles N is stored in the second common liquid chamber K2.

As illustrated in fig. 5, the liquid ejecting apparatus 100 includes a circulation mechanism 90. The circulation mechanism 90 is a mechanism for returning the ink discharged from the liquid ejection head 26 to the liquid ejection head 26. The circulation mechanism 90 is a mechanism that circulates the ink supplied to the liquid ejection head 26, and includes, for example, a supply flow path 91, a discharge flow path 92, and a circulation pump 93.

The supply flow path 91 is a flow path for supplying ink to the first common liquid chamber K1, and is connected to the introduction port 481 of the first common liquid chamber K1. The discharge flow path 92 is a flow path for discharging ink from the second common liquid chamber K2, and is connected to a discharge port 482 of the second common liquid chamber K2. The circulation pump 93 is a pressure-feed mechanism that feeds the ink supplied from the discharge flow path 92 to the supply flow path 91. That is, the ink discharged from the second common liquid chamber K2 flows back into the first common liquid chamber K1 via the discharge flow path 92, the circulation pump 93, and the supply flow path 91. As understood from the above description, the circulation mechanism 90 functions as an element for recovering ink from the second common liquid chamber K2 and returning the recovered ink to the first common liquid chamber K1. The circulation mechanism 90 may collect ink from the first common liquid chamber K1 and return the ink to the second common liquid chamber K2.

As illustrated in fig. 5, the independent flow passage Q includes a pressure chamber C. As illustrated in fig. 2, the pressure chambers C are formed on the pressure chamber substrate 34. The pressure chamber substrate 34 is a plate-like member in which a plurality of pressure chambers C are provided for the plurality of nozzles N, respectively. Each pressure chamber C is an elongated space along the X axis in a plan view. As illustrated in fig. 2 and 3, the pressure chambers C corresponding to the nozzles N in the first row L1 are arranged in the positive direction of the X axis on the pressure chamber substrate 34 along the Y axis direction. As illustrated in fig. 4, the plurality of pressure chambers C corresponding to the respective nozzles N of the second row L2 are arrayed on a portion of the pressure chamber substrate 34 in the negative direction of the X axis along the direction of the Y axis. Each pressure chamber C overlaps the nozzle N in a plan view.

Similarly to the nozzle plate 62, the flow path substrate 32 and the pressure chamber substrate 34 can be manufactured by processing a silicon single crystal substrate by, for example, a semiconductor manufacturing technique. In the production of the flow channel substrate 32 and the pressure chamber substrate 34, any known material or production method can be used.

As illustrated in fig. 2, in the pressure chamber substrate 34, a vibration plate 42 is formed on a surface on the opposite side to the flow path substrate 32. The diaphragm 42 of the present embodiment is a plate-shaped member that can elastically vibrate. In addition, a part or the whole of the vibration plate 42 may be formed integrally with the pressure chamber substrate 34 by selectively removing a part in the plate thickness direction with respect to a region corresponding to the pressure chamber C in the plate-shaped member having a predetermined plate thickness. The pressure chamber C is a space between the flow path substrate 32 and the vibration plate 42.

As illustrated in fig. 2 to 4, in the vibration plate 42, an energy generating portion 44 is formed for each nozzle N on a surface on the opposite side of the pressure chamber C. A plurality of energy generating portions 44 are provided for the plurality of nozzles N, respectively. Each energy generating portion 44 generates energy for ejecting ink. Specifically, the energy generating portion 44 is a driving element for ejecting ink from the nozzles N by varying the pressure in the pressure chamber C. In the present embodiment, a piezoelectric element that changes the volume of the pressure chamber C by deforming the diaphragm 42 is used as the energy generating portion 44. That is, the energy generating portion 44 generates pressure for ejecting ink. Specifically, the energy generating portion 44 is an actuator that deforms by the supply of a drive signal, and is formed in an elongated shape along the X axis in a plan view. The plurality of energy generating portions 44 are arranged in the Y-axis direction so as to correspond to the plurality of pressure chambers C. When the vibration plate 42 vibrates in conjunction with the deformation of the energy generating portion 44, the ink filled in the pressure chamber C is discharged through the nozzle N by the pressure fluctuation in the pressure chamber C.

The protective substrate 46 of fig. 2 is a plate-shaped member that protects the plurality of energy generating portions 44 and reinforces the mechanical strength of the vibration plate 42. A protection substrate 46 is provided on the side opposite to the pressure chamber substrate 34 with the vibration plate 42 interposed therebetween. A plurality of energy generating portions 44 are provided between the protective substrate 46 and the vibration plate 42. The protective substrate 46 is formed of, for example, silicon (Si). As illustrated in fig. 3 and 4, for example, a wiring board 50 is bonded to the surface of the diaphragm 42. The wiring board 50 is a mounting member on which a plurality of wirings for electrically connecting the control unit 20 or the power supply circuit and the liquid ejection head 26 are formed. For example, a Flexible wiring board 50 such as an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable) can be preferably used. The drive circuit 52 mounted on the wiring substrate 50 supplies a drive signal to each energy generating portion 44.

In the following description, one of two independent flow paths Q adjacent to each other in the Y-axis direction is referred to as a "first independent flow path Q1", and the other is referred to as a "second independent flow path Q2". Fig. 6 is a sectional view of the first independent flow passage Q1, and fig. 7 is a sectional view of the second independent flow passage Q2. Fig. 6 is an enlarged view of the independent flow channel Q illustrated in fig. 3, and fig. 7 is an enlarged view of the independent flow channel Q illustrated in fig. 4.

The first independent flow path Q1 is an independent flow path Q corresponding to any one of the nozzles N in the first row L1 (hereinafter referred to as "first nozzle N1"), and the second independent flow path Q2 is an independent flow path Q corresponding to any one of the nozzles N in the second row L2 (hereinafter referred to as "second nozzle N2"). The first nozzle N1 and the second nozzle N2 are two nozzles N adjacent to each other when viewed from the direction of the X axis among the plurality of nozzles N formed on the nozzle plate 62. Among the plurality of pressure chambers C, the pressure chamber C corresponding to the first independent flow passage Q1 is referred to as "first pressure chamber C1", and among the plurality of pressure chambers C, the pressure chamber C corresponding to the second independent flow passage Q2 is referred to as "second pressure chamber C2". The first independent flow path Q1 and the second independent flow path Q2 are in an inverted relationship with respect to the X-Z plane. The flow resistance R of the first independent flow path Q1 is substantially equal to the flow resistance R of the second independent flow path Q2.

As illustrated in fig. 6, a first opening O1, which is a connection port with the first independent flow path Q1, is formed in a wall surface of the first common liquid chamber K1. In other words, it can be said that the boundary surface between the first common liquid chamber K1 and the first independent flow passage Q1 is the first opening O1. On the other hand, a third opening O3, which is a connection opening with the first independent flow path Q1, is formed in a wall surface of the second common liquid chamber K2. In other words, it can be said that the boundary surface between the second common liquid chamber K2 and the first individual flow passage Q1 is the third opening O3. As understood from the above description, the flow path from the first opening O1 to the third opening O3 is the first independent flow path Q1.

Further, as illustrated in fig. 7, a second opening O2, which is a connection port with the second independent flow path Q2, is formed in a wall surface of the first common liquid chamber K1. In other words, it can be said that the boundary surface between the first common liquid chamber K1 and the second independent flow passage Q2 is the second opening O2. A fourth opening O4, which is a connection opening to the second individual flow path Q2, is formed in the wall surface of the second common liquid chamber K2. In other words, the boundary surface between the second common liquid chamber K2 and the second independent flow channel Q2 may be the fourth opening O4. As understood from the above description, the flow passage from the second opening O2 to the fourth opening O4 is the second independent flow passage Q2.

As illustrated in fig. 6, the first independent flow passage Q1 includes a first communicating flow passage Q11 and a second communicating flow passage Q12. The first communication flow passage Q11 communicates the first common liquid chamber K1 with the first nozzle N1. Specifically, the first communication flow path Q11 is a flow path from the first opening O1 formed in the wall surface of the space Ka1 to the opening in the negative direction of the Z axis in the first nozzle N1. The first communication flow passage Q11 of the present embodiment includes a first flow passage 111, a first pressure chamber C1, and a second flow passage 112. The first flow passage 111 communicates the space Ka1 with the first pressure chamber C1. Specifically, the first channel 111 is a through-hole formed along the Z axis in the first substrate 321. The first pressure chamber C1 communicates the first flow passage 111 and the second flow passage 112. As described above, the first pressure chamber C1 is an elongated space formed on the pressure chamber substrate 34 along the X axis. An energy generating portion 44 corresponding to the first nozzle N1 is provided on a surface of the vibration plate 42 on the opposite side to the first pressure chamber C1. In other words, it can be said that the energy generating portion 44 corresponding to the first nozzle N1 is provided in the middle of the first independent flow path Q1. In addition, the energy generating portion 44 corresponding to the first nozzle N1 is exemplified as a "first energy generating portion". The second flow passage 112 communicates the pressure chamber C with the first nozzle N1. Specifically, the second flow channel 112 is a through hole formed along the Z axis so as to extend over the first substrate 321 and the second substrate 322.

The first pressure chamber C1 communicates with the first common liquid chamber K1 via the first flow passage 111, and communicates with the first nozzle N1 via the second flow passage 112. Therefore, the ink filled in the first pressure chamber C1 from the first common liquid chamber K1 through the first flow channel 111 is ejected from the first nozzle N1 through the second flow channel 112 by the deformation of the energy generating portion 44 corresponding to the first pressure chamber C1.

The second communication flow passage Q12 communicates the second common liquid chamber K2 and the first nozzle N1. Specifically, the second communication flow path Q12 is a flow path extending from a plane including the central axis of the first nozzle N1 and parallel to the Y-Z plane to the third opening O3 formed in the side surface of the space Ka2. The second communication flow passage Q12 of the present embodiment includes a third flow passage 121, a fourth flow passage 122, and a fifth flow passage 123. The third flow passage 121 communicates the first nozzle N1 with the fourth flow passage 122. Specifically, the third flow channel 121 is formed along the X axis on the surface in the positive direction of the Z axis in the second substrate 322. The fourth flow passage 122 communicates the third flow passage 121 and the fifth flow passage 123. Specifically, the fourth flow channel 122 is a through-hole formed along the Z axis in the second substrate 322. The fifth flow passage 123 communicates the fourth flow passage 122 with the second common liquid chamber K2. Specifically, the fifth flow channel 123 is formed along the X axis on the surface of the second substrate 322 in the negative direction of the Z axis. Among the inks supplied from the first common liquid chamber K1 to the first independent flow path Q1, the ink that is not ejected from the first nozzle N1 is stored in the second common liquid chamber K2.

As illustrated in fig. 7, the second independent flow passage Q2 includes a third communicating flow passage Q23 and a fourth communicating flow passage Q24. The third communicating flow passage Q23 corresponds to the first communicating flow passage Q11, and the fourth communicating flow passage Q24 corresponds to the second communicating flow passage Q12. The first communication flow passage Q11 and the fourth communication flow passage Q24 are located at positions alternating along the Y axis in the positive direction of the X axis. The second communication flow passage Q12 and the third communication flow passage Q23 are located at positions alternating along the Y axis in the negative direction of the X axis.

The fourth communication flow passage Q24 communicates the first common liquid chamber K1 and the second nozzle N2. Specifically, the fourth communication flow path Q24 is a flow path from the second opening O2 formed in the side surface of the space Ka1 to a plane including the central axis of the second nozzle N2 and parallel to the Y-Z plane. The fourth communication flow passage Q24 of the present embodiment includes a sixth flow passage 241, a seventh flow passage 242, and an eighth flow passage 243. The sixth flow passage 241 connects the first common liquid chamber K1 and the seventh flow passage 242. Specifically, the sixth flow channel 241 is formed along the X axis on the surface of the second substrate 322 in the negative direction of the Z axis. The seventh flow passage 242 connects the sixth flow passage 241 and the eighth flow passage 243. Specifically, the seventh flow channel 242 is a through-hole formed along the Z axis in the second substrate 322. The eighth flow passage 243 communicates the seventh flow passage 242 with the second nozzle N2. Specifically, the eighth flow channel 243 is formed along the X axis on the surface of the second substrate 322 in the positive direction of the Z axis.

The third communication flow passage Q23 is a flow passage that communicates the second common liquid chamber K2 and the second nozzle N2. Specifically, the third communication flow passage Q23 is a flow passage extending from the opening in the negative direction of the Z axis in the second nozzle N2 to the fourth opening O4 formed in the upper surface of the space Ka2. The third communication flow passage Q23 of the present embodiment includes a ninth flow passage 231, a second pressure chamber C2, and a tenth flow passage 232. The ninth flow channel 231 connects the second nozzle N2 and the second pressure chamber C2. Specifically, the ninth flow channel 231 is a through-hole formed along the Z-axis so as to extend over the first substrate 321 and the second substrate 322. The second pressure chamber C2 communicates the ninth flow passage 231 with the tenth flow passage 232. As described above, the second pressure chamber C2 is an elongated space formed on the pressure chamber substrate 34 along the X axis. An energy generating portion 44 corresponding to the second nozzle N2 is provided on a surface of the vibration plate 42 on the opposite side to the second pressure chamber C2. In other words, it can be said that the energy generating portion 44 corresponding to the second nozzle N2 is provided in the middle of the second independent flow path Q2. In addition, the energy generating portion 44 corresponding to the second nozzle N2 is exemplified as "second energy generating portion". The tenth flow passage 232 communicates the second pressure chamber C2 with the space Ka2. Specifically, the tenth flow channel 232 is a through-hole formed along the Z axis in the first substrate 321.

The ink is filled into the second pressure chamber C2 from the first common liquid chamber K1 through the fourth communication flow path Q24 and the ninth flow path 231. The ink in the second pressure chamber C2 is ejected from the second nozzle N2 through the ninth flow channel 231 by the deformation of the energy generating portion 44. Of the inks supplied from the first common liquid chamber K1 to the second independent flow path Q2, the ink not ejected from the second nozzle N2 is stored in the second common liquid chamber K2.

The first opening O1, the second opening O2, the third opening O3, and the fourth opening O4 will be described in detail below. Fig. 8 is a sectional view of the first individual flow passage Q1 side in the first common liquid chamber K1, and fig. 9 is a sectional view of the second individual flow passage Q2 side in the first common liquid chamber K1. Further, fig. 10 is a sectional view of the first independent flow passage Q1 side in the second common liquid chamber K2, and fig. 11 is a sectional view of the second independent flow passage Q2 side in the second common liquid chamber K2.

As illustrated in fig. 8 and 9, the first common liquid chamber K1 has a first face F1, a second face F2, a third face F3, and a fourth face F4. The first face F1, the second face F2, the third face F3, and the fourth face F4 constitute a wall surface of the first common liquid chamber K1. The first face F1 is the bottom face of the space Ka 1. In other words, a portion of the wall surface of the space Ka1 along the Y axis in the positive direction of the Z axis may be the first surface F1. Specifically, the first surface F1 is formed over the entire first deformation portion 641. In addition, at least a portion of the first surface F1 may be formed of the first deforming part 641. For example, the first surface F1 may be formed by the first deforming part 641 and the flow path substrate 32. The second face F2 is the upper surface of the space Ka 1. In other words, a portion of the wall surface of the space Ka1 along the Y axis in the negative direction of the Z axis may be the second surface F2. That is, the first surface F1 and the second surface F2 face each other. Specifically, the second surface F2 is formed by the flow path substrate 32.

The third surface F3 and the fourth surface F4 are part of the side surface of the space Ka 1. That is, the third surface F3 and the fourth surface F4 are surfaces intersecting the first surface F1 and the second surface F2. In the present embodiment, the third surface F3 and the fourth surface F4 are orthogonal to the first surface F1 and the second surface F2. Specifically, the third surface F3 is a portion along the Y axis in the negative direction of the X axis among the side surfaces of the space Ka 1. On the other hand, the fourth surface F4 is a portion along the Y axis in the positive direction of the X axis in the side surface of the space Ka 1. That is, the third surface F3 and the fourth surface F4 face each other. The third surface F3 and the fourth surface F4 are formed by the flow path substrate 32.

As illustrated in fig. 8, the first opening O1 is provided on the second face F2. That is, the first opening O1 faces the first deforming part 641. The opening parallel to the X-Y plane is the first opening O1. As illustrated in fig. 9, the second opening O2 is provided on the third surface F3. That is, the second opening O2 faces the fourth face F4. The opening parallel to the Y-Z plane is the second opening O2. As understood from the above description, the first opening O1 and the second opening O2 are not parallel.

As illustrated in fig. 8 and 9, the first opening O1 and the second opening O2 are different in position in the Z-axis direction. In other words, the first opening O1 and the second opening O2 may be different in height. The position of the first opening O1 in the Z-axis direction is, for example, a position in the Z-axis direction at the center of gravity p1 of the first opening O1. The position in the Z-axis direction of the second opening O2 is, for example, a position in the Z-axis direction at the center of gravity p2 of the second opening O2. Specifically, the first opening O1 is located in the negative direction of the Z axis with respect to the second opening O2. In other words, the first opening O1 may be located closer to the pressure chamber substrate 34 than the second opening O2. That is, the first opening O1 is at a higher position than the second opening O2.

The distance Dl between the first opening O1 and the first deforming part 641 and the distance D2 between the second opening O2 and the first deforming part 641 are different. The distance Dl is, for example, the shortest distance from the center of gravity p1 of the first opening O1 to the surface of the first deforming part 641 in the negative direction of the Z axis. The distance D2 is, for example, the shortest distance from the center of gravity p2 of the second opening O2 to the surface of the first deformation portion 641 in the negative direction of the Z axis. Specifically, the distance Dl is greater than the distance D2. That is, the first opening O1 is located at a position farther from the first deforming portion 641 than the second opening O2.

Further, the direction P1 of the first opening O1 is different from the direction P2 of the second opening O2. The direction P1 of the first opening O1 is a direction of a normal line of the first opening O1. In other words, the direction of the central axis of the first flow channel 111 may be the direction P1 of the first opening O1. Similarly, the direction P2 of the second opening O2 is the direction of the normal to the second opening O2. In other words, the direction of the central axis of the sixth flow channel 241 may be the direction P2 of the second opening O2. Specifically, the direction P1 of the first opening O1 is a direction along the Z axis, and the direction P2 of the second opening O2 is a direction along the X axis. That is, the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees.

As illustrated in fig. 10 and 11, the second common liquid chamber K2 has a fifth face F5, a sixth face F6, a seventh face F7, and an eighth face F8. The fifth face F5, the sixth face F6, the seventh face F7, and the eighth face F8 constitute wall surfaces of the second common liquid chamber K2. The fifth face F5 is the bottom face of the space Ka2. In other words, the fifth surface F5 may be a portion in the positive direction of the Z axis in the wall surface of the space Ka2. Specifically, the fifth surface F5 is formed by the second deforming part 651 across the entire surface. At least a part of the fifth surface F5 may be constituted by the second deforming part 651. For example, the fifth surface F5 may be formed by the second deforming part 651 and the flow path substrate 32. The sixth face F6 is the upper surface of the space Ka2. In other words, it can be said that the portion of the wall surface of the space Ka2 in the negative direction of the Z axis is the sixth surface F6. Specifically, the sixth surface F6 is formed by the flow path substrate 32. The fifth surface F5 and the sixth surface F6 face each other.

The seventh face F7 and the eighth face F8 are part of the side faces of the space Ka2. That is, the seventh surface F7 and the eighth surface F8 intersect the fifth surface F5 and the sixth surface F6. In the present embodiment, the seventh surface F7 and the eighth surface F8 are orthogonal to the fifth surface F5 and the sixth surface F6. Specifically, the seventh face F7 is a portion of the side face of the space Ka2 along the Y axis in the positive direction of the X axis. On the other hand, the eighth surface F8 is a portion along the Y axis in the negative direction of the X axis in the side surface of the space Ka2. That is, the seventh face F7 and the eighth face F8 face each other. The seventh surface F7 and the eighth surface F8 are formed by the flow channel substrate 32.

As illustrated in fig. 10, the third opening O3 is provided on the seventh face F7. That is, the third opening O3 faces the eighth opening F8. The opening parallel to the Y-Z plane is a third opening O3. As illustrated in fig. 11, the fourth opening O4 is provided on the sixth face F6. That is, the fourth opening O4 faces the second deforming portion 651. The opening parallel to the X-Y plane is a fourth opening O4. As understood from the above description, the third opening O3 is not parallel to the fourth opening O4.

As illustrated in fig. 10 and 11, the third opening O3 and the fourth opening O4 are different in position in the Z-axis direction. In other words, the third opening O3 and the fourth opening O4 may have different heights. The position in the Z-axis direction of the third opening O3 is, for example, a position in the Z-axis direction at the center of gravity p3 of the third opening O3. The position in the Z-axis direction of the fourth opening O4 is, for example, a position in the Z-axis direction at the center of gravity p4 of the fourth opening O4. Specifically, the fourth opening O4 is located on the negative direction of the Z axis with respect to the third opening O3. In other words, the fourth opening O4 may be located closer to the pressure chamber substrate 34 than the third opening O3. That is, the fourth opening O4 is at a position higher than the third opening O3.

A distance D3 between the third opening O3 and the second deforming part 651 and a distance D4 between the fourth opening O4 and the second deforming part 651 are different. The distance D4 is, for example, the shortest distance from the center of gravity p4 of the fourth opening O4 to the surface of the second deformation portion 651 in the negative direction of the Z axis. The distance D3 is, for example, the shortest distance from the center of gravity p3 of the third opening O3 to the surface of the second deformation portion 651 in the negative direction of the Z axis. Specifically, the distance D4 is greater than the distance D3. That is, the fourth opening O4 is located farther from the second deforming portion 651 than the third opening O3.

Further, the direction P3 of the third opening O3 is different from the direction P4 of the fourth opening O4. The direction P3 of the third opening O3 is a direction of a normal line of the third opening O3. In other words, the direction of the central axis of the fifth flow channel 123 may be the direction P3 of the third opening O3. Similarly, the direction P4 of the fourth opening O4 is a direction of a normal line of the fourth opening O4. In other words, the direction of the central axis of the tenth flow passage 232 may be the direction P4 of the fourth opening O4. Specifically, the direction P3 of the third opening O3 is a direction along the X axis, and the direction P4 of the fourth opening O4 is a direction along the Z axis. That is, an angle formed by the direction P3 of the third opening O3 and the direction P4 of the fourth opening O4 is 90 degrees.

As described above, the first independent flow path Q1 and the second independent flow path Q2 are in an inverted relationship. Therefore, as illustrated in fig. 8 and 11, the first opening O1 and the fourth opening O4 are located at the same position in the Z-axis direction. Further, the direction P1 of the first opening O1 is the same as the direction P4 of the fourth opening O4. That is, the first opening O1 is parallel to the fourth opening O4. As illustrated in fig. 9 and 10, the second opening O2 and the third opening O3 are located at the same position in the Z-axis direction. Further, the second opening O2 is parallel to the third opening O3. Specifically, the direction P2 of the second opening O2 is opposite to the direction P3 of the third opening O3.

Here, crosstalk between adjacent independent channels Q will be described. Crosstalk includes crosstalk that is mechanically generated by a structure constituting a flow channel and crosstalk that is fluidically generated by a liquid in the flow channel. The latter crosstalk has a large influence on the operating state of the liquid in the common liquid chamber K (K1, K2) which is a portion where the adjacent independent flow paths Q are fluidically connected to each other. For example, the closer the fluid fluxes (flux) generated near the respective openings O (O1, O2, O3, O4) are to each other and the more uniform the orientation is, the greater the influence on the mutual fluid fluxes and the greater the crosstalk. Further, the crosstalk increases as the absorption and attenuation of the pressure fluctuation propagating through each opening O into the common liquid chamber K decreases.

As understood from the above description, in the present embodiment, since the positions of the first opening O1 and the second opening O2 in the Z-axis direction are different, the distance between the first opening O1 and the second opening O2 can be increased, for example, compared to a configuration in which the positions of the first opening O1 and the second opening O2 in the Z-axis direction are the same. That is, the distance between the fluid flux generated in the vicinity of the first opening O1 and the fluid flux generated in the vicinity of the second opening O2 is increased. As a result, the fluid flux generated in the vicinity of the first opening O1 and the fluid flux generated in the vicinity of the second opening O2 hardly affect each other. Therefore, crosstalk between the first and second independent flow paths Q1 and Q2 can be reduced. Further, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. The ejection characteristics include, for example, ejection speed, ejection direction, and ejection amount. As understood from the above description, even when a plurality of independent flow paths Q are arranged at high density, there is an advantage that crosstalk between the mutually adjacent independent flow paths Q can be suppressed.

According to the configuration of the present embodiment in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different, the directions of the fluid flux generated in the vicinity of the first opening O1 and the fluid flux generated in the vicinity of the second opening O2 are different. That is, the fluid flux generated in the vicinity of the first opening O1 and the fluid flux generated in the vicinity of the second opening O2 hardly affect each other. Therefore, as compared with the structure in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are the same, crosstalk between the first independent flow path Q1 and the second independent flow path Q2 can be reduced. Further, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. In the present embodiment, in particular, since the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees, the effect of reducing crosstalk between the first independent flow path Q1 and the second independent flow path Q2 is significant.

Since the first opening O1 is at a position closer to the energy generating portion 44 than the second opening O2, the pressure variation generated by the energy generating portion 44 is likely to propagate into the first common liquid chamber K1 via the first opening O1. In the present embodiment, since the distance Dl is greater than the distance D2, the pressure variation propagating from the first opening O1 toward the first deforming portion 641 is likely to be attenuated. Therefore, the effect of reducing crosstalk is significant. Since the first opening O1 is provided on the second face F2 and the second opening O2 is provided on the third face F3, the effect of reducing crosstalk is remarkable, for example, compared with a structure in which the first opening O1 and the second opening O2 are provided on the same face. Further, according to the structure in which the first opening O1 faces the first deforming portion 641, there is an advantage in that the first deforming portion 641 easily absorbs pressure fluctuations propagating through the first opening O1. Similarly, since the fourth opening O4 faces the second deforming portion 651, the second deforming portion 651 can easily absorb pressure fluctuations propagating through the fourth opening O4.

For example, in a configuration in which the position in the Z-axis direction at the third opening O3 is the same as the first opening O1 and the position in the Z-axis direction at the fourth opening O4 is the same as the second opening O2, the flow path length of the first independent flow path Q1 is different from the flow path length of the second independent flow path Q2, and an error in the ejection characteristic occurs in each of the first nozzle N1 and the second nozzle N2. In contrast, according to the configuration of the present embodiment in which the positions in the Z-axis direction of the first opening O1 and the fourth opening O4 are the same and the positions in the Z-axis direction of the second opening O2 and the third opening O3 are the same, the flow path length of the first independent flow path Q1 is close to the flow path length of the second independent flow path Q2, and therefore, errors in the ejection characteristics in each of the first nozzle N1 and the second nozzle N2 can be reduced.

Further, for example, in a configuration in which the direction P3 of the third opening O3 is parallel to the direction P1 of the first opening O1 and the direction P4 of the fourth opening O4 is parallel to the direction P2 of the second opening O2, the flow path length of the first independent flow path Q1 is different from the flow path length of the second independent flow path Q2, and an error in the ejection characteristic occurs in each of the first nozzle N1 and the second nozzle N2. In contrast, in the present embodiment, since the direction P1 of the first opening O1 is parallel to the direction P4 of the fourth opening O4 and the direction P2 of the second opening O2 is parallel to the direction P3 of the third opening O3, the flow path length of the first independent flow path Q1 is close to the flow path length of the second independent flow path Q2. Therefore, errors in the ejection characteristics of each of the first nozzle N1 and the second nozzle N2 can be reduced. Further, each structure in the relationship between the third opening O3 and the fourth opening O4 can achieve the same effects as those of each structure in the relationship between the first opening O1 and the second opening O2 exemplified above.

B. Modification example

The manner in which the above is exemplified is capable of many variations. Specific modifications that can be applied to the above-described modes will be exemplified below. Two or more arbitrarily selected from the following examples can be appropriately combined within a range not inconsistent with each other.

(1) The shape of the independent flow path Q is not limited to the structure exemplified in the above embodiment. For example, the first communication flow passage Q11 may include other flow passages in addition to the first flow passage 111, the first pressure chamber C1, and the second flow passage 112. The same applies to the second communication flow passage Q12, the third communication flow passage Q23, and the fourth communication flow passage Q24. Note that the first independent flow path Q1 and the second independent flow path Q2 may have different shapes, or the first independent flow path Q1 and the second independent flow path Q2 may have the same shape. That is, the position in the Z-axis direction may be different between the first opening O1 and the fourth opening O4, or the position in the Z-axis direction may be different between the second opening O2 and the third opening O3.

(2) Although the flow path substrate 32 is configured by laminating the first substrate 321 and the second substrate 322 in the above-described embodiment, the structure of the flow path substrate 32 is not limited to the above-described example. For example, the flow channel substrate 32 may be formed of a single layer, or the flow channel substrate 32 may be formed of a stack of three or more layers.

(3) In the above-described embodiment, the liquid discharge head 26 is illustrated as having both a structure in which the positions in the Z-axis direction of the first opening O1 and the second opening O2 are different and a structure in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different, but any structure may be used. Even if only one of the structure in which the positions in the Z-axis direction of the first opening O1 and the second opening O2 are different and the structure in which the direction P1 of the first opening O1 and the direction P2 of the second opening O2 are different is adopted, the effect of reducing crosstalk between the first independent flow path Q1 and the second independent flow path Q2 can be achieved.

(4) In the above-described embodiment, the first opening O1 is formed in the second surface F2 of the first common liquid chamber K1, and the second opening O2 is formed in the third surface F3, but the positions where the first opening O1 and the second opening O2 are formed are arbitrary. For example, the first opening O1 may be formed in the third surface F3, and the second opening O2 may be formed in the second surface F2. That is, one of the first opening O1 and the second opening O2 may face the first deforming portion 641. Similarly, one of the third opening O3 and the fourth opening O4 may be opposed to the second deforming portion 651.

The first opening O1 and the second opening O2 may be formed on the same surface. For example, both the first opening O1 and the second opening O2 may be formed on the second surface F2, or both the first opening O1 and the second opening O2 may be formed on the third surface F3. Similarly, the third opening O3 and the fourth opening O4 may be formed on the same surface.

(5) In the above-described aspect, the first vibration absorber 64 and the second vibration absorber 65 may be omitted. That is, it is not essential that the first deforming portion 641 forms a part of the wall surface of the first common liquid chamber K1, and the second deforming portion 651 forms a part of the wall surface of the second common liquid chamber K2.

(6) Although the liquid discharge apparatus 100 is provided with the circulation mechanism 90 in the above-described embodiment, the liquid discharge apparatus 100 does not necessarily need to be provided with the circulation mechanism 90. That is, either the first row L1 or the second row L2 may be omitted. For example, when the second row L2 is omitted, various elements related to the second row L2 are also omitted. For example, the second common liquid chamber K2 is omitted. That is, the third opening O3 and the fourth opening O4 are also omitted.

(7) In the above-described embodiment, the configuration in which the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 90 degrees is exemplified, but the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is arbitrary. From the viewpoint of reducing crosstalk, it is preferable that the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is 45 degrees or more. Further, the effect of reducing crosstalk becomes more remarkable as the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 is closer to 90 degrees. However, the angle formed by the direction P1 of the first opening O1 and the direction P2 of the second opening O2 may be smaller than 45 degrees. Similarly, an angle formed by the direction P3 of the third opening O3 and the direction P4 of the fourth opening O4 is also arbitrary.

(8) The energy generating portion 44 that generates energy for ejecting the liquid in the pressure chamber C from the nozzle N is not limited to the piezoelectric element. For example, a heat generating element that generates bubbles in the pressure chamber C by heating and thereby fluctuates in pressure may be used as the energy generating portion 44. As understood from the above examples, the energy generating portion 44 is generally expressed as an element for ejecting the liquid in the pressure chamber C from the nozzle N, and is not limited to the operation modes such as the piezoelectric mode and the thermal mode, or the specific configuration. That is, the energy for ejecting the liquid includes both heat and pressure.

(9) Although the serial-type liquid discharge device 100 in which the transport body 82 on which the liquid discharge head 26 is mounted reciprocates is illustrated in the above-described embodiment, the present invention can be applied to a line-type liquid discharge device in which a plurality of nozzles N are distributed across the entire width of the medium 12.

(10) The liquid ejecting apparatus 100 exemplified in the above-described embodiment can be used for various devices such as a facsimile machine and a copying machine, in addition to a device dedicated to printing. It is obvious that the application of the liquid ejection device of the present invention is not limited to printing. For example, a liquid ejecting apparatus that ejects a solution of a color material is used as an apparatus for manufacturing a color filter of a display device such as a liquid crystal display panel. Further, the liquid ejecting apparatus that ejects the solution of the conductive material can be used as a manufacturing apparatus for forming the wiring or the electrode of the wiring board. Further, a liquid ejecting apparatus that ejects a solution of an organic substance related to a living body is used as a manufacturing apparatus for manufacturing, for example, a biochip.

Description of the symbols

100 \ 8230and liquid ejection devices; 12 8230a medium; 14, 8230and a liquid container; 20 \ 8230and a control unit; 22\8230anda conveying mechanism; 24\8230amoving mechanism; 82 \ 8230and a conveying body; 84 \ 8230and a conveyer belt; 26 8230A liquid ejection head; 30, 8230a flow channel structure; 32 \ 8230and a flow channel substrate; 321, 8230a first substrate; 322, 8230, a second substrate; 34 \ 8230and pressure chamber base plate; 42 \ 8230a vibrating plate; 44 8230and an energy generating part; 46 \ 8230, a protective substrate; 48 \ 8230and a basket part; 481. 482 \ 8230and an introduction port; 50 8230and a wiring substrate; 52\8230anda drive circuit; 62 \ 8230a nozzle plate; 64 \ 8230and a first vibration absorber; 65\8230anda second vibration absorber; 641\8230anda first deformation part; 651 \ 8230a second deformation part; 90 \ 8230and a circulating mechanism; 91\8230anda supply channel; 92 \ 8230and a discharge channel; 93 \ 8230and a circulating pump; c8230and pressure chamber; c1 \ 8230, a first pressure chamber; c2 \ 8230and a second pressure chamber; l1 \ 8230, first column; 12 \ 8230and the second column; n8230and nozzle; n1\8230anda first nozzle; n2 \ 8230and a second nozzle; k1 \8230, a first common liquid chamber; k2 \8230anda second common liquid chamber; q \8230andan independent flow channel; q1 \ 8230and a first independent flow channel; q11 (8230), a first communicating flow channel; q12 (8230); a second communicating flow channel; q2 (8230), a second independent flow channel; q23\8230anda third communicating flow channel; q24 \ 8230and a fourth communicating flow channel; 111 \ 8230a first flow channel; 112 \ 8230and a second flow passage; 121, 8230and a third flow channel; 122 \ 8230a fourth flow channel; 123 \ 8230and a fifth flow channel; 241, 8230, a sixth flow channel; 242\8230anda seventh flow channel; 243 \ 8230and an eighth flow passage; 231 \ 8230and a ninth flow channel; 232 \ 8230and a tenth flow channel; o1 \8230afirst opening; o2 \8230anda second opening; o3 \8230athird opening; o4 \ 8230and a fourth opening; f1 \ 8230first side; f2 \8230anda second face; f3 \ 8230and the third face; f4 \ 8230sixth face; f5\8230anda fifth surface; f6 \ 8230and sixth; f7 \ 8230and the seventh aspect; f8 (8230); eighth site.

Claims

1. A liquid ejection head includes:

a plurality of nozzles that eject liquid along a first axis;

an independent flow channel row provided for each of the plurality of nozzles, and including a plurality of independent flow channels arranged side by side along a second axis orthogonal to the first axis when viewed in the direction of the first axis;

a common liquid chamber commonly communicating with the plurality of independent flow channels,

in the liquid ejection head,

the plurality of independent flow channels include a first independent flow channel and a second independent flow channel adjacent to each other in the independent flow channel row,

a first opening in the common liquid chamber as a connection port connected to the first individual flow passage and a second opening in the common liquid chamber as a connection port connected to the second individual flow passage are different in position in the direction of the first axis,

a first nozzle is disposed in the first independent flow passage, and a second nozzle is disposed in the second independent flow passage.

2. A liquid ejection head according to claim 1,

the common liquid chamber has a deformation portion that deforms in accordance with pressure fluctuations of the liquid inside,

the distance between the first opening and the deformation portion and the distance between the second opening and the deformation portion are different.

3. A liquid ejection head according to claim 1,

the common liquid chamber has a first surface and a second surface opposed to each other, and a third surface,

at least a part of the first surface is constituted by a deformable portion that deforms in accordance with a pressure variation of the liquid in the common liquid chamber,

on the second face, the first opening is provided,

on the third face, the second opening is provided.

4. A liquid ejection head according to any one of claims 1 to 3,

the direction of the first opening is different from the direction of the second opening.

5. A liquid ejection head includes:

a plurality of nozzles that eject liquid along a first axis;

an independent flow path row provided for each of the plurality of nozzles, and including a plurality of independent flow paths arranged side by side along a second axis orthogonal to the first axis when viewed in a direction of the first axis;

a first common liquid chamber that communicates with the plurality of independent flow passages in common;

a second common liquid chamber communicating with the plurality of independent flow channels in common,

in the liquid ejection head,

a first opening in the first common liquid chamber as a connection port connected to the first independent flow passage and a second opening in the first common liquid chamber as a connection port connected to the second independent flow passage are different in position in the direction of the first axis,

a third opening in the second common liquid chamber, which is a connection port connected to the first individual flow channel, and a fourth opening in the second common liquid chamber, which is a connection port connected to the second individual flow channel, are different in position in the direction of the first axis.

6. A liquid ejection head according to claim 5,

the first opening is located at the same position as the fourth opening in the direction of the first axis,

the second opening is located at the same position in the direction of the first axis as the third opening.

7. A liquid ejection head according to claim 5 or claim 6,

the first common liquid chamber has a first deformation portion that deforms in accordance with pressure fluctuations of the liquid inside,

the second common liquid chamber has a second deformation portion that deforms in accordance with pressure fluctuations of the liquid inside,

a distance between the first opening and the first deformation portion and a distance between the second opening and the first deformation portion are different,

the distance between the third opening and the second deformation portion and the distance between the fourth opening and the second deformation portion are different.

8. A liquid ejection head according to claim 7,

a first communication flow path that communicates the first common liquid chamber with a first nozzle among the plurality of nozzles is provided in the first independent flow path, and a first energy generating portion that generates energy for ejecting liquid is provided in the first communication flow path,

a second independent flow path in which a second common liquid chamber is connected to a second nozzle among the plurality of nozzles, and a second energy generating portion that generates energy for ejecting liquid is provided in the second independent flow path,

a distance between the first opening and the first deformation portion is larger than a distance between the second opening and the first deformation portion,

the distance between the fourth opening and the second deformation portion is greater than the distance between the third opening and the second deformation portion.

9. A liquid ejection head according to claim 8,

the first opening is opposed to the first deformation portion,

the fourth opening is opposed to the second deformation portion.

10. A liquid ejection head according to claim 5,

the direction of the first opening is different from the direction of the second opening,

the direction of the third opening is different from the direction of the fourth opening.

11. A liquid ejecting apparatus includes:

a liquid ejection head according to any one of claim 5 to claim 10;

and a circulation mechanism that collects liquid from one of the first common liquid chamber and the second common liquid chamber and returns the liquid to the other.