JP7230399B2 - Sliding member and sliding device using the sliding member - Google Patents
Sliding member and sliding device using the sliding member Download PDFInfo
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- JP7230399B2 JP7230399B2 JP2018181237A JP2018181237A JP7230399B2 JP 7230399 B2 JP7230399 B2 JP 7230399B2 JP 2018181237 A JP2018181237 A JP 2018181237A JP 2018181237 A JP2018181237 A JP 2018181237A JP 7230399 B2 JP7230399 B2 JP 7230399B2
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
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- Y02T10/80—Technologies aiming to reduce greenhouse gasses emissions common to all road transportation technologies
- Y02T10/86—Optimisation of rolling resistance, e.g. weight reduction
Description
本発明は、摺動部材に係り、更に詳細には、水素フリーの硬質炭素膜を備える摺動部材に関する。 TECHNICAL FIELD The present invention relates to a sliding member, and more particularly to a sliding member provided with a hydrogen-free hard carbon film.
内燃機関用の摺動部材の表面に低摩擦の固体潤滑膜を形成することで、省燃費化や部材の長寿命化が図られており、上記固体潤滑膜として明確な結晶構造を持たない非晶質の硬質炭素膜が開発されている。 By forming a low-friction solid lubricating film on the surface of a sliding member for an internal combustion engine, it is possible to save fuel and extend the service life of the member. Crystalline hard carbon films have been developed.
上記硬質炭素膜（ダイヤモンドライクカーボン：ＤＬＣ）は、その炭素原子同士の結合に、ｓｐ２結合とｓｐ３結合の両方の結合を含む。 The hard carbon film (diamond-like carbon: DLC) includes both sp2 and sp3 bonds in the bonds between carbon atoms.
そして、上記ｓｐ２結合は潤滑性を発現し、上記ｓｐ３結合は高硬度を発現するため、硬質炭素膜は、ｓｐ２結合とｓｐ３結合との割合によって特性が異なり、また、水素など他の元素の含有率などによっても、硬度や密度、耐熱性などの特性が大きく変化する。 Since the sp2 bond expresses lubricity and the sp3 bond expresses high hardness, the hard carbon film has different characteristics depending on the ratio of the sp2 bond and the sp3 bond, and also contains other elements such as hydrogen. Properties such as hardness, density, and heat resistance also change greatly depending on the modulus.
上記硬質炭素膜のｓｐ２結合とｓｐ３結合との割合や水素などの含有率は、成膜方法や成膜条件により調節することができ、目的に応じて、スパッタリング、アークイオンプレーティングなどのＰＶＤ方式やプラズマＣＶＤなどの成膜法が採用されている。 The ratio of sp2 bonds and sp3 bonds and the content of hydrogen in the hard carbon film can be adjusted by the film forming method and film forming conditions. and plasma CVD are adopted.
特許文献１には、水素と炭素以外の他元素を添加することで高硬度化した硬質炭素膜が開示されている。 Patent Literature 1 discloses a hard carbon film whose hardness is increased by adding elements other than hydrogen and carbon.
しかしながら、内燃機関用の摺動部材のうち、ピストンピンは、燃焼圧によって押し下げられたピストンからの応力をコンロッドに伝えるため、摺動面の面圧が非常に高く、相手攻撃性が高いであると相手部材を摩耗させてしまう。そして、摩耗粉が発生すると摺動面の摩擦力が上がり、発熱や潤滑不良などによって油膜が切れ、ついには焼き付きが生じてしまう。 However, among the sliding members for an internal combustion engine, the piston pin transmits the stress from the piston pushed down by the combustion pressure to the connecting rod, so the contact pressure on the sliding surface is extremely high and it is highly aggressive. and wear the mating member. When abrasion powder is generated, the frictional force on the sliding surface increases, and the oil film breaks due to heat generation and poor lubrication, and eventually seizure occurs.
本発明は、このような従来技術の有する課題に鑑みてなされたものであり、その目的とするところは、相手攻撃性が低くかつ耐焼き付き性に優れる摺動部材を提供することにある。 SUMMARY OF THE INVENTION The present invention has been made in view of the problems of the prior art, and an object thereof is to provide a sliding member that is less aggressive to a mating member and has excellent seizure resistance.
本発明者らは、上記目的を達成すべく鋭意検討を重ねた結果、水素フリーの硬質炭素膜を所望の硬さにすると共に、所望の表面粗さにすることにより、上記目的が達成できることを見出し、本発明を完成するに至った。 As a result of intensive studies aimed at achieving the above object, the present inventors have found that the above object can be achieved by making the hydrogen-free hard carbon film have a desired hardness and a desired surface roughness. The discovery led to the completion of the present invention.
即ち、本発明の摺動部材は、基材と、上記基材表面に形成された硬質炭素膜と、を備える。
そして、上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．５５以下であり、表面粗さ（Ｒａ）が、０．０５μｍ以下であることを特徴とする。
That is, the sliding member of the present invention includes a base material and a hard carbon film formed on the surface of the base material.
The hard carbon film has an element concentration of carbon exceeding 98 atomic %, and an intensity ratio (ID/IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band in the Raman spectroscopic spectrum. is 0.55 or less , and the surface roughness (Ra) is 0.05 μm or less.
また、本発明の摺動装置は、摺動部材と、該摺動部材と摺動する相手部材と、を備える。
そして、上記相手部材が、アルミニウム合金及び／又は銅合金をから成る摺動面を有し、上記摺動部材が上記摺動部材であることを特徴とする。
Moreover, the sliding device of the present invention includes a sliding member and a mating member that slides with the sliding member.
The mating member has a sliding surface made of an aluminum alloy and/or a copper alloy, and the sliding member is the sliding member.
本発明によれば、ラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下である水素フリーの硬質炭素膜を形成し、表面粗さ（Ｒａ）を０．０５μｍ以下にしたため、相手攻撃性が低くかつ耐焼き付き性に優れる摺動部材を提供することができる。 According to the present invention, a hydrogen-free hard carbon film having an intensity ratio (ID/IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band in Raman spectroscopy is 0.7 or less. Since the surface roughness (Ra) is set to 0.05 μm or less, it is possible to provide a sliding member that has low mating aggressiveness and excellent seizure resistance.
本発明の摺動部材について詳細に説明する。
上記摺動部材は、基材と、上記基材表面に形成された硬質炭素膜と、を備え、上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下であり、表面粗さ（Ｒａ）が、０．０５μｍ以下である。
The sliding member of the present invention will be described in detail.
The sliding member includes a base material and a hard carbon film formed on the surface of the base material, the hard carbon film having a carbon element concentration of more than 98 atomic % and a D band of Raman spectroscopy spectrum The intensity ratio (ID/IG) between the peak intensity (ID) of the G band and the peak intensity (IG) of the G band is 0.7 or less, and the surface roughness (Ra) is 0.05 μm or less.
一般に、硬質炭素膜の特性は、ラマン分光スペクトルにおける、１３５０ｃｍ－１近傍のＤバンドのピークと、１５５０ｃｍ－１近傍のＧバンドのピークと関連付けて評価されている。 In general, the properties of hard carbon films are evaluated in relation to the D-band peak near 1350 cm −1 and the G-band peak near 1550 cm −1 in the Raman spectrum.
上記Ｄバンドのピークは構造の乱れと欠陥に起因し、上記Ｇバンドのピークは炭素原子の六角格子内振動（グラファイト構造）に起因しており、Ｄバンドのピークと、Ｇバンドのピークとの強度比（ＩＤ／ＩＧ）が小さいほど、硬質炭素膜の硬度が高くなると考えられている。 The D band peak is due to structural disorder and defects, the G band peak is due to hexagonal lattice vibration of carbon atoms (graphite structure), and the difference between the D band peak and the G band peak is It is believed that the smaller the intensity ratio (ID/IG), the higher the hardness of the hard carbon film.
本発明の硬質炭素膜は、ラマン分光スペクトルの強度比（ＩＤ／ＩＧ）が０．７以下であり、構造の乱れや欠陥が少なく硬度が高い。 The hard carbon film of the present invention has an intensity ratio (ID/IG) of Raman spectroscopy spectrum of 0.7 or less, has few structural disturbances and defects, and has high hardness.
さらに、上記硬質炭素膜は、炭素の元素濃度が９８原子％を超える水素フリーの硬質炭素膜であり、炭素原子と大きさが異なる水素原子や他の原子を含有しないため、膜内部に疎密な部分がなく、均一かつ高密度であるため負荷荷重に対する変形抵抗が大きく、耐久性が優れる。 Furthermore, the hard carbon film is a hydrogen-free hard carbon film with a carbon element concentration of more than 98 atomic %, and does not contain hydrogen atoms or other atoms different in size from carbon atoms, so that the inside of the film is sparse and dense. Since it has no parts, is uniform and has a high density, it has high resistance to deformation and excellent durability.
加えて、本発明の摺動部材は、表面粗さ（Ｒａ）が０．０５μｍ以下であり、摺動面が平滑であるため、上記硬質炭素膜の変形し難さと相俟って、高い面圧下においても、粗さ凹凸の山つぶれなど局所的な変形がなく片当たりが防止されて相手攻撃性が小さい。したがって、相手部材から摩耗粉が発生し難いため耐焼付き性が優れる。 In addition, the sliding member of the present invention has a surface roughness (Ra) of 0.05 μm or less, and the sliding surface is smooth. Even in rolling, there is no local deformation such as crumbling of roughness and unevenness, and uneven contact is prevented, and the attacking property against the opponent is small. Therefore, abrasion powder is less likely to be generated from the mating member, so the seizure resistance is excellent.
上記摺動部材は、表面粗さ（Ｒａ）が、０．０２μｍ以下であることがより好ましい。
表面粗さ（Ｒａ）が０．０２μｍ以下であることで、さらに相手攻撃性が小さくなり耐焼付き性が向上する。
More preferably, the sliding member has a surface roughness (Ra) of 0.02 μm or less.
When the surface roughness (Ra) is 0.02 μm or less, the aggression against the mating member is further reduced and the seizure resistance is improved.
上記硬質炭素膜は、強度比（ＩＤ／ＩＧ）が０．３以上であることが好ましい。
強度比（ＩＤ／ＩＧ）が０．３未満では、硬質炭素膜が硬くなり過ぎ、グラファイトライクな特性が小さくなって硬質炭素膜自体の潤滑性や相手なじみ性が低下し、摺動部材の表面粗さによっては相手攻撃性が高くなることがあり、相手部材を摩耗させ易くなる。
The hard carbon film preferably has an intensity ratio (ID/IG) of 0.3 or more.
If the strength ratio (ID/IG) is less than 0.3, the hard carbon film becomes too hard, the graphite-like characteristics are reduced, and the lubricity and mating compatibility of the hard carbon film itself are reduced. Depending on the roughness, the mating aggressiveness may increase, and the mating member may be easily worn.
本発明では、硬質炭素膜の強度比（ＩＤ／ＩＧ）を、以下の条件で測定した。
装置：Ｒａｍａｎｏｒ Ｔ６４０００ （Ｊｏｂｉｎ Ｙｖｏｎ／愛宕物産）
測定モード：顕微ラマン
対物レンズ：×１００
ビーム径：１μｍ
光源：Ａｒ＋レーザー／５１４．５ ｎｍ
レーザーパワー：１０ｍＷ
回折格子：Ｓｐｅｃｔｒｏｇｒａｐｈ ６００ ｇｒ／ｍｍ
分散：Ｓｉｎｇｌｅ ２１Ａ／ｍｍ
スリット：１００ μｍ
検出器：ＣＣＤ／Ｊｏｂｉｎ Ｙｖｏｎ １０２４×２５６
In the present invention, the strength ratio (ID/IG) of the hard carbon film was measured under the following conditions.
Apparatus: Ramanor T64000 (Jobin Yvon/Atago Bussan)
Measurement mode: Microscopic Raman Objective lens: ×100
Beam diameter: 1 μm
Light source: Ar + laser/514.5 nm
Laser power: 10mW
Diffraction grating: Spectrograph 600 gr/mm
Dispersion: Single 21A/mm
Slit: 100 μm
Detector: CCD/Jobin Yvon 1024×256
本発明の摺動部材は、内燃機関用の摺動部材、例えば、ピストン、ピストンピン、ピストンリング、ピストンスカート、シリンダライナ、コンロッド、クランクシャフト、ベアリング、軸受け、メタル、ギヤー、チェーン、ベルト、オイルポンプ等、摩擦条件が厳しく、低摩擦性が要求される様々な摺動部材に使用できるが、特に、ピストンピンは燃焼圧をコンロッドに伝達するため、摺動面の面圧が高く、高い耐焼付き性が要求されるため好適に使用できる。 The sliding member of the present invention is a sliding member for an internal combustion engine, such as a piston, piston pin, piston ring, piston skirt, cylinder liner, connecting rod, crankshaft, bearing, bearing, metal, gear, chain, belt, oil, etc. It can be used for various sliding parts such as pumps, which have severe friction conditions and require low friction. Adhesiveness is required, so it can be used preferably.
本発明の摺動部材をピストンピンに用いることで、ピストンの軸径やピン幅が狭く、摺動面の面積が小さく摺動面の面圧が高い場合であっても焼付きを防止できる。
加えて、ピストンやコンロッドの相手部材の摩耗をも防止できるため、ピストンピン孔が拡がることによる、打音の発生を防止できる。
By using the sliding member of the present invention for a piston pin, seizure can be prevented even when the shaft diameter and pin width of the piston are narrow, the area of the sliding surface is small, and the surface pressure of the sliding surface is high.
In addition, since wear of mating members of the piston and the connecting rod can be prevented, it is possible to prevent the generation of hammering noise due to the expansion of the piston pin hole.
したがって、ピストンピンを短小化することができ、ピストン形状の設計の自由度が高くなり、例えば、ピストンスカートをピストンヘッドよりも小径化するなどによる軽量化が可能であり、燃費性能を向上させることができる。 Therefore, the piston pin can be shortened, which increases the degree of freedom in designing the piston shape. For example, it is possible to reduce the weight by making the piston skirt smaller in diameter than the piston head, thereby improving the fuel efficiency. can be done.
本発明の摺動部材は、摺動面がアルミニウム合金及び／又は銅合金をから成る相手部材と組み合わせることが好ましい。同種材同士を摺動させるとその親和性が高さから凝着が生じ易く、摩耗が生じて耐焼付き性が低下する。 The sliding member of the present invention is preferably combined with a mating member whose sliding surface is made of an aluminum alloy and/or a copper alloy. When similar materials are made to slide against each other, they tend to adhere due to their high affinity, causing wear and reducing seizure resistance.
本発明の摺動部材がピストンピンである場合は、例えば、摺動面がアルミニウム合金であるピストンと、摺動面が銅合金であるコンロッドと組み合わせた摺動装置とすることで、軽量化が可能になる。 When the sliding member of the present invention is a piston pin, for example, weight reduction can be achieved by combining a piston with an aluminum alloy sliding surface and a connecting rod with a copper alloy sliding surface. be possible.
上記基材としては、鉄（Ｆｅ）を５０％質量以上含有する鉄系材料を使用することができ、浸炭鋼を好ましく使用できる。
浸炭鋼は、表面が硬く局所的な負荷荷重に対して変形し難い一方で、内部は靭性を有し折れにくいためピストンピンに好適に使用できる。
As the base material, an iron-based material containing 50% by mass or more of iron (Fe) can be used, and carburized steel can be preferably used.
Carburized steel has a hard surface and is not easily deformed by a local load, while the inside has toughness and is not easily broken, so it can be suitably used for piston pins.
以下、本発明を実施例により詳細に説明するが、本発明は下記実施例に限定されるものではない。 EXAMPLES The present invention will be described in detail below with reference to examples, but the present invention is not limited to the following examples.
［実施例１］
浸炭鋼（ ＳＣｒ４２０）を研磨して表面粗さ（Ｒａ）を０．０２μｍにした後、洗浄した基材にアークイオンプレーディング法により、ＩＤ／ＩＧが０．５５の硬質炭素膜（日本アイ・ティ・エフ：ＨＡコーティング）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）が０．００６μｍの摺動部材を得た。
[Example 1]
After carburizing steel (SCr420) was polished to a surface roughness (Ra) of 0.02 μm, a hard carbon film with an ID/IG of 0.55 (Nippon Eye Co., Ltd.) was applied to the cleaned substrate by arc ion plating. TF: HA coating) was formed, and droplets were removed by tape wrapping to obtain a sliding member with a surface roughness (Ra) of 0.006 μm.
［実施例２］
テープラップ処理により、表面粗さ（Ｒａ）を０．０２８μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 2]
A sliding member was obtained in the same manner as in Example 1, except that the surface roughness (Ra) was adjusted to 0.028 μm by tape wrapping.
［実施例３］
テープラップ処理により、表面粗さ（Ｒａ）を０．０３９μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 3]
A sliding member was obtained in the same manner as in Example 1, except that the surface roughness (Ra) was adjusted to 0.039 μm by tape wrapping.
［実施例４］
ＩＤ／ＩＧが０．５１の硬質炭素膜（日本アイ・ティ・エフ）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２２１μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 4]
A hard carbon film (Japan ITF) with an ID/IG of 0.51 is formed, droplets are removed by tape wrapping, and the surface roughness (Ra) is set to 0.0221 μm. A sliding member was obtained in the same manner as in 1.
［実施例５］
ＩＤ／ＩＧが０．５５の硬質炭素膜（日本アイ・ティ・エフ）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 5]
A hard carbon film (Nippon ITF) with an ID/IG of 0.55 was formed, droplets were removed by tape wrapping, and the surface roughness (Ra) was set to 0.02 μm. A sliding member was obtained in the same manner as in 1.
［実施例６］
アークイオンプレーディング法により、ＩＤ／ＩＧが０．２８の硬質炭素膜（ハウザー社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２１３μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 6]
A hard carbon film (Hauser) with an ID/IG of 0.28 is formed by an arc ion plating method, droplets are removed by tape wrapping, and the surface roughness (Ra) is made 0.0213 μm. A sliding member was obtained in the same manner as in Example 1.
［比較例１］
テープラップ処理により表面粗さ（Ｒａ）を０．０９５２μｍにする他は、実施例６と同様にして摺動部材を得た。
[Comparative Example 1]
A sliding member was obtained in the same manner as in Example 6, except that the surface roughness (Ra) was adjusted to 0.0952 μm by tape wrapping.
［比較例２］
フィルター型カソーディック真空アーク法（ＦＣＶＡ方式）により、ＩＤ／ＩＧが０．７８の硬質炭素膜（ナノフィルム テクノロジーズインターナショナル社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２０５μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 2]
A hard carbon film (Nanofilm Technologies International) with an ID/IG of 0.78 is formed by the filtered cathodic vacuum arc method (FCVA method), droplets are removed by tape wrapping, and the surface roughness (Ra ) was set to 0.0205 μm, a sliding member was obtained in the same manner as in Example 1.
［比較例３］
スパッタにより、ＩＤ／ＩＧが１．９３の硬質炭素膜（神港精機社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２１μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 3]
A hard carbon film (Shinko Seiki Co., Ltd.) with an ID/IG of 1.93 is formed by sputtering, droplets are removed by tape wrapping, and the surface roughness (Ra) is set to 0.021 μm. A sliding member was obtained in the same manner as in Example 1.
［比較例４］
ＰＶＤ法により、クロム（Ｃｒ）を含有するＩＤ／ＩＧが０．６４の硬質炭素膜（エリコンバルザース社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０４５μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 4]
A hard carbon film (Oerlikon Balzers) containing chromium (Cr) and having an ID/IG of 0.64 was formed by PVD, droplets were removed by tape wrapping, and the surface roughness (Ra) was reduced to 0. A sliding member was obtained in the same manner as in Example 1, except that the thickness was 0.045 μm.
＜評価＞
実施例１～６、比較例１～４の摺動部材を以下の方法で評価した。
評価結果を表１に示す。
<Evaluation>
The sliding members of Examples 1-6 and Comparative Examples 1-4 were evaluated by the following methods.
Table 1 shows the evaluation results.
（耐焼付き性）
５Ｗ３０汎用油を１滴塗布した平滑な相手部材上で摺動部材を往復摺動させ、３分毎に荷重を１００Ｎずつ上げ、摩擦係数が跳ね上がった点を焼付きとし、焼付きが起こった荷重を焼付き荷重とした。
実施例１～４、６及び比較例１～４では相手部材にアルミニウム合金（ＡＣ８Ａ材）を用い、実施例５では相手部材に銅合金を用いた。
(Seizure resistance)
The sliding member is reciprocatingly slid on a smooth mating member coated with a drop of 5W30 general-purpose oil, and the load is increased by 100 N every 3 minutes. was taken as the seizure load.
In Examples 1 to 4 and 6 and Comparative Examples 1 to 4, an aluminum alloy (AC8A material) was used as the mating member, and in Example 5, a copper alloy was used as the mating member.
（相手攻撃性）
０Ｗ２０油を連続滴下した平滑な相手部材上で摺動部材に４００Ｎの荷重をかけ、１５分間往復摺動させ、摺動部材と相手部材の摩耗量を形状測定器にて測定した。
実施例１～４、６及び比較例１～４では相手部材にアルミニウム合金（ＡＣ８Ａ材）を用い、実施例５では相手部材に銅合金を用いた。
(opponent aggression)
A load of 400 N was applied to the sliding member on a smooth mating member on which 0W20 oil was continuously dripped, and the sliding member was reciprocally slid for 15 minutes, and the amount of wear between the sliding member and the mating member was measured with a shape measuring instrument.
In Examples 1 to 4 and 6 and Comparative Examples 1 to 4, an aluminum alloy (AC8A material) was used as the mating member, and in Example 5, a copper alloy was used as the mating member.
硬質炭素膜のＩＤ／ＩＧが０．７以下、かつ表面粗さ（Ｒａ）が、０．０５μｍ以下である実施例１～６は、焼き付き荷重が１４００Ｎ以上であり、相手部材の摩耗量も少ないことから、本発明の摺動部材は、耐焼き付き性が優れると共に相手攻撃性が低いことが確認された。 Examples 1 to 6, in which the ID/IG of the hard carbon film is 0.7 or less and the surface roughness (Ra) is 0.05 μm or less, have a seizure load of 1400 N or more, and the wear amount of the mating member is small. Therefore, it was confirmed that the sliding member of the present invention has excellent anti-seizure property and low attacking property.
比較例１は、表面粗さが大きいため相手攻撃性が高かった。比較例２，３はＩＤ／ＩＧが大きく、また、比較例４は添加元素を含むため、耐焼き付き性が低かった。
また、実施例４と実施例６との比較から、ＩＤ／ＩＧが０．３以上であると、相手攻撃性がより低くなることが確認された。
Comparative Example 1 had a high surface roughness, so it was highly aggressive to the opponent. Comparative Examples 2 and 3 had large ID/IG, and Comparative Example 4 had low seizure resistance because it contained additive elements.
Also, from a comparison between Example 4 and Example 6, it was confirmed that when the ID/IG is 0.3 or more, the opponent's aggression becomes lower.
Claims (5)
上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．５５以下であり、
表面粗さ（Ｒａ）が、０．０５μｍ以下であることを特徴とすることを特徴とする摺動部材。 A sliding member comprising a base material and a hard carbon film formed on the surface of the base material,
The hard carbon film has a carbon element concentration of more than 98 atomic %, and an intensity ratio (ID/IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band in the Raman spectroscopy spectrum is 0. .55 or less,
A sliding member characterized by having a surface roughness (Ra) of 0.05 μm or less.
上記相手部材が、アルミニウム合金及び／又は銅合金をから成る摺動面を有し、
上記摺動部材が上記請求項１～４のいずれか１つの項に記載の摺動部材であることを特徴とする摺動装置。 A sliding device comprising a sliding member and a mating member that slides against the sliding member,
The mating member has a sliding surface made of an aluminum alloy and/or a copper alloy,
A sliding device, wherein the sliding member is the sliding member according to any one of claims 1 to 4.
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