JP2020050912A - Slide member, and sliding device using slide member - Google Patents
Slide member, and sliding device using slide member Download PDFInfo
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- JP2020050912A JP2020050912A JP2018181237A JP2018181237A JP2020050912A JP 2020050912 A JP2020050912 A JP 2020050912A JP 2018181237 A JP2018181237 A JP 2018181237A JP 2018181237 A JP2018181237 A JP 2018181237A JP 2020050912 A JP2020050912 A JP 2020050912A
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- sliding member
- carbon film
- hard carbon
- sliding
- surface roughness
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- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 36
- 230000003746 surface roughness Effects 0.000 claims abstract description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract 4
- 230000013011 mating Effects 0.000 claims description 15
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 6
- 238000002485 combustion reaction Methods 0.000 claims description 6
- 238000001069 Raman spectroscopy Methods 0.000 claims description 4
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000001237 Raman spectrum Methods 0.000 abstract description 4
- 230000016571 aggressive behavior Effects 0.000 abstract description 4
- 230000000052 comparative effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/80—Technologies aiming to reduce greenhouse gasses emissions common to all road transportation technologies
- Y02T10/86—Optimisation of rolling resistance, e.g. weight reduction
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Pistons, Piston Rings, And Cylinders (AREA)
Abstract
Description
本発明は、摺動部材に係り、更に詳細には、水素フリーの硬質炭素膜を備える摺動部材に関する。 The present invention relates to a sliding member, and more particularly, to a sliding member provided with a hydrogen-free hard carbon film.
内燃機関用の摺動部材の表面に低摩擦の固体潤滑膜を形成することで、省燃費化や部材の長寿命化が図られており、上記固体潤滑膜として明確な結晶構造を持たない非晶質の硬質炭素膜が開発されている。 By forming a low-friction solid lubricating film on the surface of a sliding member for an internal combustion engine, fuel saving and long life of the member have been achieved, and the solid lubricating film does not have a clear crystal structure. A crystalline hard carbon film has been developed.
上記硬質炭素膜（ダイヤモンドライクカーボン：ＤＬＣ）は、その炭素原子同士の結合に、ｓｐ２結合とｓｐ３結合の両方の結合を含む。 The hard carbon film (diamond-like carbon: DLC) contains both sp2 bonds and sp3 bonds in the bonds between its carbon atoms.
そして、上記ｓｐ２結合は潤滑性を発現し、上記ｓｐ３結合は高硬度を発現するため、硬質炭素膜は、ｓｐ２結合とｓｐ３結合との割合によって特性が異なり、また、水素など他の元素の含有率などによっても、硬度や密度、耐熱性などの特性が大きく変化する。 Since the sp2 bond exhibits lubricity and the sp3 bond exhibits high hardness, the hard carbon film has different characteristics depending on the ratio between the sp2 bond and the sp3 bond, and contains other elements such as hydrogen. The properties such as hardness, density, heat resistance and the like greatly change depending on the rate and the like.
上記硬質炭素膜のｓｐ２結合とｓｐ３結合との割合や水素などの含有率は、成膜方法や成膜条件により調節することができ、目的に応じて、スパッタリング、アークイオンプレーティングなどのＰＶＤ方式やプラズマＣＶＤなどの成膜法が採用されている。 The ratio of sp2 bonds and sp3 bonds and the content of hydrogen and the like of the hard carbon film can be adjusted by a film forming method and film forming conditions, and depending on the purpose, a PVD method such as sputtering or arc ion plating is used. And a film forming method such as plasma CVD.
特許文献１には、水素と炭素以外の他元素を添加することで高硬度化した硬質炭素膜が開示されている。 Patent Literature 1 discloses a hard carbon film whose hardness is increased by adding elements other than hydrogen and carbon.
しかしながら、内燃機関用の摺動部材のうち、ピストンピンは、燃焼圧によって押し下げられたピストンからの応力をコンロッドに伝えるため、摺動面の面圧が非常に高く、相手攻撃性が高いであると相手部材を摩耗させてしまう。そして、摩耗粉が発生すると摺動面の摩擦力が上がり、発熱や潤滑不良などによって油膜が切れ、ついには焼き付きが生じてしまう。 However, among the sliding members for internal combustion engines, the piston pin transmits stress from the piston depressed by the combustion pressure to the connecting rod, so that the surface pressure of the sliding surface is very high, and the opponent aggressiveness is high. Then, the mating member is worn. Then, when abrasion powder is generated, the frictional force of the sliding surface increases, and the oil film is cut off due to heat generation or poor lubrication, and eventually seizure occurs.
本発明は、このような従来技術の有する課題に鑑みてなされたものであり、その目的とするところは、相手攻撃性が低くかつ耐焼き付き性に優れる摺動部材を提供することにある。 The present invention has been made in view of such problems of the related art, and an object of the present invention is to provide a sliding member having low opponent aggression and excellent seizure resistance.
本発明者らは、上記目的を達成すべく鋭意検討を重ねた結果、水素フリーの硬質炭素膜を所望の硬さにすると共に、所望の表面粗さにすることにより、上記目的が達成できることを見出し、本発明を完成するに至った。 The present inventors have conducted intensive studies to achieve the above object, and as a result, have found that the hydrogen-free hard carbon film has a desired hardness and a desired surface roughness, thereby achieving the object. As a result, the present invention has been completed.
即ち、本発明の摺動部材は、基材と、上記基材表面に形成された硬質炭素膜と、を備える。
そして、上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下であり、表面粗さ（Ｒａ）が、０．０５μｍ以下であることを特徴とする。
That is, the sliding member of the present invention includes a base material and a hard carbon film formed on the surface of the base material.
The hard carbon film has a carbon element concentration of more than 98 atomic% and an intensity ratio (ID / IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band in the Raman spectrum. Is 0.7 or less, and the surface roughness (Ra) is 0.05 μm or less.
また、本発明の摺動装置は、摺動部材と、該摺動部材と摺動する相手部材と、を備える。
そして、上記相手部材が、アルミニウム合金及び／又は銅合金をから成る摺動面を有し、上記摺動部材が上記摺動部材であることを特徴とする。
Further, the sliding device of the present invention includes a sliding member, and a partner member that slides on the sliding member.
The mating member has a sliding surface made of an aluminum alloy and / or a copper alloy, and the sliding member is the sliding member.
本発明によれば、ラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下である水素フリーの硬質炭素膜を形成し、表面粗さ（Ｒａ）を０．０５μｍ以下にしたため、相手攻撃性が低くかつ耐焼き付き性に優れる摺動部材を提供することができる。 According to the present invention, a hydrogen-free hard carbon film having an intensity ratio (ID / IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band of the Raman spectroscopy spectrum of 0.7 or less is provided. Since it is formed and has a surface roughness (Ra) of 0.05 μm or less, it is possible to provide a sliding member having low opponent aggressiveness and excellent seizure resistance.
本発明の摺動部材について詳細に説明する。
上記摺動部材は、基材と、上記基材表面に形成された硬質炭素膜と、を備え、上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下であり、表面粗さ（Ｒａ）が、０．０５μｍ以下である。
The sliding member of the present invention will be described in detail.
The sliding member includes a base material and a hard carbon film formed on the surface of the base material. The hard carbon film has a carbon element concentration of more than 98 atomic% and a D band of Raman spectrum. The intensity ratio (ID / IG) between the peak intensity (ID) and the peak intensity (IG) of the G band is 0.7 or less, and the surface roughness (Ra) is 0.05 μm or less.
一般に、硬質炭素膜の特性は、ラマン分光スペクトルにおける、１３５０ｃｍ−１近傍のＤバンドのピークと、１５５０ｃｍ−１近傍のＧバンドのピークと関連付けて評価されている。 In general, the characteristics of the hard carbon film are evaluated in association with the peak of the D band near 1350 cm −1 and the peak of the G band near 1550 cm −1 in the Raman spectrum.
上記Ｄバンドのピークは構造の乱れと欠陥に起因し、上記Ｇバンドのピークは炭素原子の六角格子内振動（グラファイト構造）に起因しており、Ｄバンドのピークと、Ｇバンドのピークとの強度比（ＩＤ／ＩＧ）が小さいほど、硬質炭素膜の硬度が高くなると考えられている。 The peak of the D band is caused by structural disorder and defects, and the peak of the G band is caused by vibration in a hexagonal lattice of carbon atoms (graphite structure). It is considered that the smaller the strength ratio (ID / IG), the higher the hardness of the hard carbon film.
本発明の硬質炭素膜は、ラマン分光スペクトルの強度比（ＩＤ／ＩＧ）が０．７以下であり、構造の乱れや欠陥が少なく硬度が高い。 The hard carbon film of the present invention has an intensity ratio (ID / IG) of Raman spectroscopy spectrum of 0.7 or less, has little structural disorder and defects, and has high hardness.
さらに、上記硬質炭素膜は、炭素の元素濃度が９８原子％を超える水素フリーの硬質炭素膜であり、炭素原子と大きさが異なる水素原子や他の原子を含有しないため、膜内部に疎密な部分がなく、均一かつ高密度であるため負荷荷重に対する変形抵抗が大きく、耐久性が優れる。 Further, the hard carbon film is a hydrogen-free hard carbon film having a carbon element concentration of more than 98 atomic%, and does not contain hydrogen atoms and other atoms different in size from carbon atoms. Since there are no parts, uniformity and high density, deformation resistance to applied load is large, and durability is excellent.
加えて、本発明の摺動部材は、表面粗さ（Ｒａ）が０．０５μｍ以下であり、摺動面が平滑であるため、上記硬質炭素膜の変形し難さと相俟って、高い面圧下においても、粗さ凹凸の山つぶれなど局所的な変形がなく片当たりが防止されて相手攻撃性が小さい。したがって、相手部材から摩耗粉が発生し難いため耐焼付き性が優れる。 In addition, since the sliding member of the present invention has a surface roughness (Ra) of 0.05 μm or less and a smooth sliding surface, it is difficult to deform the hard carbon film, and the sliding member has a high surface roughness. Even under rolling, there is no local deformation such as crushing of the unevenness of the roughness and uneven contact is prevented, and the opponent aggressiveness is small. Therefore, wear powder is hardly generated from the mating member, so that the seizure resistance is excellent.
上記摺動部材は、表面粗さ（Ｒａ）が、０．０２μｍ以下であることがより好ましい。
表面粗さ（Ｒａ）が０．０２μｍ以下であることで、さらに相手攻撃性が小さくなり耐焼付き性が向上する。
More preferably, the sliding member has a surface roughness (Ra) of 0.02 μm or less.
When the surface roughness (Ra) is 0.02 μm or less, the aggressiveness of the partner is further reduced, and the seizure resistance is improved.
上記硬質炭素膜は、強度比（ＩＤ／ＩＧ）が０．３以上であることが好ましい。
強度比（ＩＤ／ＩＧ）が０．３未満では、硬質炭素膜が硬くなり過ぎ、グラファイトライクな特性が小さくなって硬質炭素膜自体の潤滑性や相手なじみ性が低下し、摺動部材の表面粗さによっては相手攻撃性が高くなることがあり、相手部材を摩耗させ易くなる。
The hard carbon film preferably has an intensity ratio (ID / IG) of 0.3 or more.
If the strength ratio (ID / IG) is less than 0.3, the hard carbon film becomes too hard, the graphite-like property becomes small, the lubricity of the hard carbon film itself and the conformability of the hard carbon film are reduced, and the surface of the sliding member is reduced. Depending on the roughness, the opponent aggressiveness may increase, and the opponent member is easily worn.
本発明では、硬質炭素膜の強度比（ＩＤ／ＩＧ）を、以下の条件で測定した。
装置：Ｒａｍａｎｏｒ Ｔ６４０００ （Ｊｏｂｉｎ Ｙｖｏｎ／愛宕物産）
測定モード：顕微ラマン
対物レンズ：×１００
ビーム径：１μｍ
光源：Ａｒ＋レーザー／５１４．５ ｎｍ
レーザーパワー：１０ｍＷ
回折格子：Ｓｐｅｃｔｒｏｇｒａｐｈ ６００ ｇｒ／ｍｍ
分散：Ｓｉｎｇｌｅ ２１Ａ／ｍｍ
スリット：１００ μｍ
検出器：ＣＣＤ／Ｊｏｂｉｎ Ｙｖｏｎ １０２４×２５６
In the present invention, the strength ratio (ID / IG) of the hard carbon film was measured under the following conditions.
Equipment: Ramanor T64000 (Jobin Yvon / Atago Bussan)
Measurement mode: Raman microscopic Objective lens: × 100
Beam diameter: 1 μm
Light source: Ar + laser / 514.5 nm
Laser power: 10mW
Diffraction grating: Spectrograph 600 gr / mm
Dispersion: Single 21A / mm
Slit: 100 μm
Detector: CCD / Jobin Yvon 1024 × 256
本発明の摺動部材は、内燃機関用の摺動部材、例えば、ピストン、ピストンピン、ピストンリング、ピストンスカート、シリンダライナ、コンロッド、クランクシャフト、ベアリング、軸受け、メタル、ギヤー、チェーン、ベルト、オイルポンプ等、摩擦条件が厳しく、低摩擦性が要求される様々な摺動部材に使用できるが、特に、ピストンピンは燃焼圧をコンロッドに伝達するため、摺動面の面圧が高く、高い耐焼付き性が要求されるため好適に使用できる。 The sliding member of the present invention is a sliding member for an internal combustion engine, for example, a piston, a piston pin, a piston ring, a piston skirt, a cylinder liner, a connecting rod, a crankshaft, a bearing, a bearing, a metal, a gear, a chain, a belt, and an oil. Although it can be used for various sliding members that require low friction, such as pumps, which have severe friction conditions, the piston pin transmits the combustion pressure to the connecting rod, so the surface pressure on the sliding surface is high, and high burn resistance Since stickiness is required, it can be suitably used.
本発明の摺動部材をピストンピンに用いることで、ピストンの軸径やピン幅が狭く、摺動面の面積が小さく摺動面の面圧が高い場合であっても焼付きを防止できる。
加えて、ピストンやコンロッドの相手部材の摩耗をも防止できるため、ピストンピン孔が拡がることによる、打音の発生を防止できる。
By using the sliding member of the present invention for the piston pin, seizure can be prevented even when the shaft diameter and the pin width of the piston are narrow, the area of the sliding surface is small, and the surface pressure of the sliding surface is high.
In addition, abrasion of the mating member of the piston or the connecting rod can be prevented, so that the occurrence of a tapping sound due to the expansion of the piston pin hole can be prevented.
したがって、ピストンピンを短小化することができ、ピストン形状の設計の自由度が高くなり、例えば、ピストンスカートをピストンヘッドよりも小径化するなどによる軽量化が可能であり、燃費性能を向上させることができる。 Therefore, the length of the piston pin can be shortened, and the degree of freedom in designing the piston shape is increased.For example, it is possible to reduce the weight by reducing the diameter of the piston skirt as compared with the piston head, thereby improving fuel efficiency. Can be.
本発明の摺動部材は、摺動面がアルミニウム合金及び／又は銅合金をから成る相手部材と組み合わせることが好ましい。同種材同士を摺動させるとその親和性が高さから凝着が生じ易く、摩耗が生じて耐焼付き性が低下する。 The sliding member of the present invention is preferably combined with a mating member whose sliding surface is made of an aluminum alloy and / or a copper alloy. When the same kind of material is slid, adhesion tends to occur due to its high affinity, and abrasion occurs to reduce seizure resistance.
本発明の摺動部材がピストンピンである場合は、例えば、摺動面がアルミニウム合金であるピストンと、摺動面が銅合金であるコンロッドと組み合わせた摺動装置とすることで、軽量化が可能になる。 When the sliding member of the present invention is a piston pin, for example, a sliding device combining a piston whose sliding surface is made of an aluminum alloy and a connecting rod whose sliding surface is made of a copper alloy reduces weight. Will be possible.
上記基材としては、鉄（Ｆｅ）を５０％質量以上含有する鉄系材料を使用することができ、浸炭鋼を好ましく使用できる。
浸炭鋼は、表面が硬く局所的な負荷荷重に対して変形し難い一方で、内部は靭性を有し折れにくいためピストンピンに好適に使用できる。
As the base material, an iron-based material containing 50% by mass or more of iron (Fe) can be used, and carburized steel can be preferably used.
Carburized steel has a hard surface and is not easily deformed by a local applied load, but has a tough inside and is hardly broken, so that it can be suitably used for a piston pin.
以下、本発明を実施例により詳細に説明するが、本発明は下記実施例に限定されるものではない。 Hereinafter, the present invention will be described in detail with reference to examples, but the present invention is not limited to the following examples.
［実施例１］
浸炭鋼（ ＳＣｒ４２０）を研磨して表面粗さ（Ｒａ）を０．０２μｍにした後、洗浄した基材にアークイオンプレーディング法により、ＩＤ／ＩＧが０．５５の硬質炭素膜（日本アイ・ティ・エフ：ＨＡコーティング）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）が０．００６μｍの摺動部材を得た。
[Example 1]
After carburizing steel (SCr420) was polished to a surface roughness (Ra) of 0.02 μm, a hard carbon film having an ID / IG of 0.55 was applied to the washed base material by arc ion plating (Nihon Eye Co., Ltd.). (TF coating: HA coating) was formed and droplets were removed by tape wrapping to obtain a sliding member having a surface roughness (Ra) of 0.006 μm.
［実施例２］
テープラップ処理により、表面粗さ（Ｒａ）を０．０２８μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 2]
A sliding member was obtained in the same manner as in Example 1, except that the surface roughness (Ra) was reduced to 0.028 μm by tape wrapping.
［実施例３］
テープラップ処理により、表面粗さ（Ｒａ）を０．０３９μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 3]
A sliding member was obtained in the same manner as in Example 1, except that the surface roughness (Ra) was reduced to 0.039 μm by tape wrapping.
［実施例４］
ＩＤ／ＩＧが０．５１の硬質炭素膜（日本アイ・ティ・エフ）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２２１μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 4]
Except that a hard carbon film (IDF) having an ID / IG of 0.51 was formed, droplets were removed by tape wrapping, and the surface roughness (Ra) was set to 0.0221 μm. A sliding member was obtained in the same manner as in Example 1.
［実施例５］
ＩＤ／ＩＧが０．５５の硬質炭素膜（日本アイ・ティ・エフ）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 5]
Example 2 A hard carbon film (IDF) having an ID / IG of 0.55 was formed, droplets were removed by tape wrapping, and the surface roughness (Ra) was adjusted to 0.02 μm. A sliding member was obtained in the same manner as in Example 1.
［実施例６］
アークイオンプレーディング法により、ＩＤ／ＩＧが０．２８の硬質炭素膜（ハウザー社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２１３μｍにする他は、実施例１と同様にして摺動部材を得た。
[Example 6]
Aside from forming a hard carbon film (Hauser Co., Ltd.) having an ID / IG of 0.28 by the arc ion plating method, removing the droplets by tape wrapping, and setting the surface roughness (Ra) to 0.0213 μm. Then, a sliding member was obtained in the same manner as in Example 1.
［比較例１］
テープラップ処理により表面粗さ（Ｒａ）を０．０９５２μｍにする他は、実施例６と同様にして摺動部材を得た。
[Comparative Example 1]
A sliding member was obtained in the same manner as in Example 6, except that the surface roughness (Ra) was adjusted to 0.0952 μm by tape wrapping.
［比較例２］
フィルター型カソーディック真空アーク法（ＦＣＶＡ方式）により、ＩＤ／ＩＧが０．７８の硬質炭素膜（ナノフィルム テクノロジーズインターナショナル社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２０５μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 2]
A hard carbon film (Nanofilm Technologies International) having an ID / IG of 0.78 was formed by a filter type cathodic vacuum arc method (FCVA method), droplets were removed by tape wrapping, and the surface roughness (Ra) ) Was changed to 0.0205 μm, and a sliding member was obtained in the same manner as in Example 1.
［比較例３］
スパッタにより、ＩＤ／ＩＧが１．９３の硬質炭素膜（神港精機社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０２１μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 3]
A hard carbon film having an ID / IG of 1.93 (Shinko Seiki Co., Ltd.) was formed by sputtering, droplets were removed by tape wrapping, and the surface roughness (Ra) was adjusted to 0.021 μm. A sliding member was obtained in the same manner as in Example 1.
［比較例４］
ＰＶＤ法により、クロム（Ｃｒ）を含有するＩＤ／ＩＧが０．６４の硬質炭素膜（エリコンバルザース社）を形成し、テープラップ処理によりドロップレットを除去し、表面粗さ（Ｒａ）を０．０４５μｍにする他は、実施例１と同様にして摺動部材を得た。
[Comparative Example 4]
A hard carbon film (Oerlikon Balzers, Inc.) containing chromium (Cr) and having an ID / IG of 0.64 was formed by a PVD method, droplets were removed by tape wrapping, and the surface roughness (Ra) was reduced to 0. A sliding member was obtained in the same manner as in Example 1 except that the thickness was 0.045 μm.
＜評価＞
実施例１〜６、比較例１〜４の摺動部材を以下の方法で評価した。
評価結果を表１に示す。
<Evaluation>
The sliding members of Examples 1 to 6 and Comparative Examples 1 to 4 were evaluated by the following methods.
Table 1 shows the evaluation results.
（耐焼付き性）
５Ｗ３０汎用油を１滴塗布した平滑な相手部材上で摺動部材を往復摺動させ、３分毎に荷重を１００Ｎずつ上げ、摩擦係数が跳ね上がった点を焼付きとし、焼付きが起こった荷重を焼付き荷重とした。
実施例１〜４、６及び比較例１〜４では相手部材にアルミニウム合金（ＡＣ８Ａ材）を用い、実施例５では相手部材に銅合金を用いた。
(Seizure resistance)
The sliding member is reciprocated and slid on a smooth mating member coated with one drop of 5W30 general-purpose oil, and the load is increased by 100 N every 3 minutes. Was taken as the seizure load.
In Examples 1 to 4, 6 and Comparative Examples 1 to 4, an aluminum alloy (AC8A material) was used for the mating member, and in Example 5, a copper alloy was used for the mating member.
（相手攻撃性）
０Ｗ２０油を連続滴下した平滑な相手部材上で摺動部材に４００Ｎの荷重をかけ、１５分間往復摺動させ、摺動部材と相手部材の摩耗量を形状測定器にて測定した。
実施例１〜４、６及び比較例１〜４では相手部材にアルミニウム合金（ＡＣ８Ａ材）を用い、実施例５では相手部材に銅合金を用いた。
(Opponent aggression)
A load of 400 N was applied to the sliding member on a smooth mating member to which 0W20 oil was continuously dropped, and the sliding member was slid back and forth for 15 minutes, and the wear amount of the sliding member and the mating member was measured by a shape measuring instrument.
In Examples 1 to 4, 6 and Comparative Examples 1 to 4, an aluminum alloy (AC8A material) was used for the mating member, and in Example 5, a copper alloy was used for the mating member.
硬質炭素膜のＩＤ／ＩＧが０．７以下、かつ表面粗さ（Ｒａ）が、０．０５μｍ以下である実施例１〜６は、焼き付き荷重が１４００Ｎ以上であり、相手部材の摩耗量も少ないことから、本発明の摺動部材は、耐焼き付き性が優れると共に相手攻撃性が低いことが確認された。 In Examples 1 to 6 in which the ID / IG of the hard carbon film was 0.7 or less and the surface roughness (Ra) was 0.05 μm or less, the seizure load was 1400 N or more and the amount of wear of the mating member was small. From this, it was confirmed that the sliding member of the present invention has excellent seizure resistance and low aggressiveness to a partner.
比較例１は、表面粗さが大きいため相手攻撃性が高かった。比較例２，３はＩＤ／ＩＧが大きく、また、比較例４は添加元素を含むため、耐焼き付き性が低かった。
また、実施例４と実施例６との比較から、ＩＤ／ＩＧが０．３以上であると、相手攻撃性がより低くなることが確認された。
In Comparative Example 1, the opponent aggressiveness was high because the surface roughness was large. Comparative Examples 2 and 3 had a large ID / IG, and Comparative Example 4 contained an additional element, so that the seizure resistance was low.
Further, from a comparison between Example 4 and Example 6, it was confirmed that when the ID / IG was 0.3 or more, the opponent aggressiveness was further reduced.
Claims (5)
上記硬質炭素膜が、炭素の元素濃度が９８原子％を超え、かつラマン分光スペクトルのＤバンドのピーク強度（ＩＤ）とＧバンドのピーク強度（ＩＧ）との強度比（ＩＤ／ＩＧ）が０．７以下であり、
表面粗さ（Ｒａ）が、０．０５μｍ以下であることを特徴とすることを特徴とする摺動部材。 A sliding member comprising a substrate and a hard carbon film formed on the surface of the substrate,
The hard carbon film has a carbon element concentration of more than 98 atomic% and an intensity ratio (ID / IG) between the peak intensity (ID) of the D band and the peak intensity (IG) of the G band in the Raman spectroscopy spectrum is 0. 0.7 or less;
A sliding member having a surface roughness (Ra) of 0.05 μm or less.
上記相手部材が、アルミニウム合金及び／又は銅合金をから成る摺動面を有し、
上記摺動部材が上記請求項１〜４のいずれか１つの項に記載の摺動部材であることを特徴とする摺動装置。 A sliding device comprising: a sliding member, and a mating member that slides with the sliding member,
The mating member has a sliding surface made of an aluminum alloy and / or a copper alloy,
A sliding device, wherein the sliding member is the sliding member according to any one of claims 1 to 4.
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