JP7213842B2 - Cyanide electrolytic roughening silver plating solution - Google Patents
Cyanide electrolytic roughening silver plating solution Download PDFInfo
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Description
本発明は電解銀めっき液に関する。具体的には、銀源としてシアン化銀を用いて成る電解銀めっき液であり、高度に粗化されためっき皮膜が得られる電解銀めっき液に関する。 The present invention relates to an electrolytic silver plating solution. More specifically, the present invention relates to an electrolytic silver plating solution that uses silver cyanide as a silver source and that provides a highly roughened plating film.
銀はその白い光沢から古来より宝飾品に多用されてきた。銀は貴金属の中では比較的産出量が多く安価であるため、現代においてもシルバーアクセサリや食器などの装飾用途に銀めっきが施される。また、銀は室温における電気伝導率が全金属中で最大であるため、銀めっきはICやトランジスタなど電子デバイス向けのリードフレームや基板などにも多用されている。さらに、銀は可視光線の反射率が全金属中で最大であるため、LEDに代表される発光装置用のリードフレームや各種基板上に銀めっきが多用されている。その他、軸受部品や銀の抗菌性を利用した用途にも銀めっきが用いられている。 Silver has been widely used in jewelry since ancient times because of its white luster. Among precious metals, silver is produced in relatively large quantities and is inexpensive, so silver plating is still used today for decorative purposes such as silver accessories and tableware. In addition, since silver has the highest electrical conductivity among all metals at room temperature, silver plating is often used for lead frames and substrates for electronic devices such as ICs and transistors. Furthermore, since silver has the highest reflectance of visible light among all metals, silver plating is often used on lead frames and various substrates for light-emitting devices represented by LEDs. In addition, silver plating is also used for bearing parts and applications that utilize the antibacterial properties of silver.
これまで、半導体業界ではICパッケージの信頼性を高めるために様々な取り組みがなされてきた。特に、ポップコーン現象と呼ばれるICパッケージの破壊を防ぐため、粗化めっきの開発が進められてきた。下地めっきとなる銅やニッケルのめっき表面を粗くすることで、アンカー効果によるめっきと樹脂間の密着性向上を狙っている。たとえば、特許文献1には、2層の粗化めっきを駆使して密着性の向上を図る技術が記載されている。しかしながら、これら従来の技術だけでは、最表面に行う貴金属めっきが被覆されることにより、そのアンカー効果が十分に発揮されなくなるという問題があった。そのため、電気的特性に優れた銀めっき自体を粗化して最表面に施す方法が望まれている。一方で、銀めっきは熱による再結晶化が起こりやすいという特性がある。そのため、従来の典型的な粗化銅めっきや粗化ニッケルめっきに見られるような針状のめっきは、銀めっきの場合においては熱処理によりアンカー効果が低下する恐れがある。 Various efforts have been made in the semiconductor industry to improve the reliability of IC packages. In particular, in order to prevent destruction of IC packages called the popcorn phenomenon, the development of roughening plating has been promoted. By roughening the plating surface of copper or nickel, which is the base plating, we aim to improve the adhesion between the plating and the resin by the anchor effect. For example, Patent Literature 1 describes a technique for improving adhesion by making full use of two layers of roughening plating. However, with these conventional techniques alone, there is the problem that the noble metal plating applied to the outermost surface prevents the anchor effect from being fully exhibited. Therefore, there is a demand for a method of roughening the silver plating itself, which has excellent electrical properties, and applying it to the outermost surface. On the other hand, silver plating has the property of being easily recrystallized by heat. Therefore, in the case of silver plating, there is a possibility that the needle-like plating seen in typical roughened copper plating and roughened nickel plating may lose its anchoring effect due to heat treatment.
硫黄系化合物を用いた銀めっき液は従来から知られている。特許文献2には、シアン化物に変わる銀の安定化剤として、チオール類やジスルフィド化合物を含んで成る銀めっき液が開示されている。また、特許文献3には、チオ硫酸によりめっき液を安定化させる方法が開示されている。このように、特にシアン非含有銀めっき液や無電解銀めっき液において安定剤や還元剤などとして、硫黄化合物、特にチオ硫酸は利用されてきた。しかしながら、チオ硫酸がシアン化合物の解毒剤として有名であることもあって、めっきの粗化を目的にシアン系電解銀めっき液にチオ硫酸もしくはその塩を使用した例は無い。 A silver plating solution using a sulfur-based compound is conventionally known. Patent Document 2 discloses a silver plating solution containing a thiol or a disulfide compound as a silver stabilizer instead of cyanide. Further, Patent Document 3 discloses a method of stabilizing a plating solution with thiosulfuric acid. Thus, sulfur compounds, particularly thiosulfuric acid, have been used as stabilizers and reducing agents, particularly in cyanide-free silver plating solutions and electroless silver plating solutions. However, since thiosulfuric acid is well-known as an antidote for cyanide compounds, there is no example of using thiosulfuric acid or a salt thereof in a cyanide electrolytic silver plating solution for the purpose of roughening the plating.
上記事情から、従来の技術では、貴金属、特に電気的特性や半田濡れ性に優れた銀と、樹脂と、の密着性を向上することは容易ではない。また、針状の銀は、再結晶による性能低下や、ウィスカの心配がある。そのため、針状ではない形で粗化された銀皮膜を得られる銀めっき液の開発が望まれている。 Due to the circumstances described above, it is not easy to improve the adhesion between noble metals, especially silver, which has excellent electrical properties and solder wettability, and resins with conventional techniques. In addition, needle-like silver has concerns about deterioration of performance due to recrystallization and whiskers. Therefore, it is desired to develop a silver plating solution capable of obtaining a silver film roughened in a non-acicular shape.
本発明の目的は高度に粗化された銀皮膜が得られる電解銀めっき液を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide an electrolytic silver plating solution capable of obtaining a highly roughened silver film.
本発明者は鋭意研究の結果、電解銀めっき液にチオ硫酸及び/又はその塩を添加することにより、針状ではない高度に粗化された銀皮膜が得られることを見出し、本発明を完成するに至った。上記課題を解決する本発明は、以下に記載するものである。 As a result of intensive research, the present inventor found that a non-acicular, highly roughened silver film can be obtained by adding thiosulfuric acid and/or its salt to an electrolytic silver plating solution, and completed the present invention. came to. The present invention for solving the above problems is described below.
[1] 銀換算で10~100g/Lのシアン化銀又はシアン化銀塩と、
1~200g/Lの電気伝導塩と、
3~500g/Lのチオ硫酸及び/又はその塩と、
を含有することを特徴とする電解銀めっき液。
[1] 10 to 100 g/L of silver cyanide or silver cyanide salt in terms of silver;
1 to 200 g/L of an electrically conductive salt;
3 to 500 g/L of thiosulfuric acid and/or a salt thereof;
An electrolytic silver plating solution characterized by containing
[2] 前記電気伝導塩が、シアン塩、リン酸塩、ピロリン酸塩、硝酸塩、クエン酸塩、酒石酸塩、チオシアン塩、硫酸塩、及びホウ酸又はその塩から成る群から選ばれる少なくとも1種である[1]に記載の電解銀めっき液。 [2] The electrically conductive salt is at least one selected from the group consisting of cyanates, phosphates, pyrophosphates, nitrates, citrates, tartrates, thiocyanates, sulfates, and boric acid or salts thereof. The electrolytic silver plating solution according to [1].
[3] pH(25℃)が7.0~13.0である[1]に記載の電解銀めっき液。 [3] The electrolytic silver plating solution according to [1], which has a pH (25°C) of 7.0 to 13.0.
本発明の電解粗化銀めっき液は、針状ではない高度に粗化された銀皮膜が安定して得られる。具体的には、図1、2に示すように塊状の結晶が伸びるような形状の皮膜が得られる。これにより、再結晶により粗化形状が劣化する恐れが少ない。また、めっきが成長する方向に大きな凹凸が生じ、樹脂などと接着させた際に高いアンカー効果が得られる。さらには、安定した性能が得られることから、製造歩留まりが向上する。 The electro-roughening silver plating solution of the present invention stably provides a highly roughened silver film that is not acicular. Specifically, as shown in FIGS. 1 and 2, a film having a shape in which massive crystals are elongated is obtained. As a result, there is little possibility that the roughened shape will deteriorate due to recrystallization. In addition, large unevenness is generated in the direction in which the plating grows, and a high anchor effect can be obtained when it is adhered to a resin or the like. Furthermore, since stable performance is obtained, manufacturing yield is improved.
本発明の電解銀めっき液は、銀塩として銀換算で10~100g/Lのシアン化銀錯体と、1~200g/Lの電気伝導塩と、3~500g/Lのチオ硫酸もしくはその塩を含有する。以下、本発明の電解銀めっき液を構成する各成分について説明する。 The electrolytic silver plating solution of the present invention contains 10 to 100 g/L of a silver cyanide complex, 1 to 200 g/L of an electrically conductive salt, and 3 to 500 g/L of thiosulfuric acid or a salt thereof in terms of silver as a silver salt. contains. Each component constituting the electrolytic silver plating solution of the present invention will be described below.
[シアン化銀錯体]
本発明の電解銀めっき液には、銀源として公知のシアン化銀錯体を制限なく使用することができる。シアン化銀錯体としては、シアン化銀、シアン化銀カリウム、シアン化銀ナトリウムが例示される。
[Silver cyanide complex]
In the electrolytic silver plating solution of the present invention, any known silver cyanide complex can be used without limitation as a silver source. Examples of silver cyanide complexes include silver cyanide, potassium silver cyanide, and sodium silver cyanide.
本発明の電解銀めっき液におけるシアン化銀錯体の濃度は、銀イオン濃度として、10~100g/Lであることが好ましく、20~70g/Lであることがより好ましい。銀イオン濃度が10g/L未満である場合、析出効率が低下するうえ、所望の銀膜厚を得られなくなる場合がある。一方、銀イオン濃度が100g/Lを超える場合、被めっき物によるめっき液の持ち出しによる銀塩のロスが多くなり経済的ではない。 The concentration of the silver cyanide complex in the electrolytic silver plating solution of the present invention is preferably 10 to 100 g/L, more preferably 20 to 70 g/L, in terms of silver ion concentration. If the silver ion concentration is less than 10 g/L, the deposition efficiency may decrease and a desired silver film thickness may not be obtained. On the other hand, if the silver ion concentration exceeds 100 g/L, the loss of silver salt increases due to the removal of the plating solution by the object to be plated, which is not economical.
[電気伝導塩]
本発明の電解銀めっき液に配合される電気伝導塩は、水溶液が電気伝導性を有するものであれば特に種類は問わないが、工業的に安定して使用することや経済的に電解銀めっき液を製造するために、シアン塩、リン酸塩、硝酸塩、クエン酸塩、酒石酸塩、チオシアン塩、硫酸塩、及びホウ酸又はその塩から選ばれる少なくとも1種を含有することが好ましい。その他、可溶性有機酸塩なども好ましい。これらは単独で用いてもよく、2種類以上を併用してもよい。シアン塩としては、シアン化カリウムやシアン化ナトリウムなどが例示される。リン酸塩としては、リン酸カリウム、リン酸ナトリウム、リン酸アンモニウムなどが例示される。ピロリン酸塩としては、ピロリン酸カリウム、ピロリン酸ナトリウム、ピロリン酸アンモニウムなどが例示される。硝酸塩としては、硝酸カリウム、硝酸ナトリウム、硝酸アンモニウムなどが例示される。クエン酸塩としては、クエン酸カリウム、クエン酸ナトリウム、クエン酸アンモニウムなどが例示される。酒石酸としては、酒石酸カリウム、酒石酸ナトリウム、酒石酸ナトリウムカリウムなどが例示される。チオシアン塩としては、チオシアン化カリウムやチオシアン化ナトリウムなどが例示される。硫酸塩としては硫酸カリウム、硫酸ナトリウム、硫酸アンモニウムなどが例示される。ホウ酸又はその塩としてはホウ酸、ホウ酸ナトリウム、ホウ酸カリウムなどが例示される。
[Electrically conductive salt]
The electrically conductive salt to be incorporated in the electrolytic silver plating solution of the present invention is not particularly limited as long as the aqueous solution has electrical conductivity. In order to produce the liquid, it is preferable to contain at least one selected from cyanates, phosphates, nitrates, citrates, tartrates, thiocyanates, sulfates, and boric acid or salts thereof. In addition, soluble organic acid salts are also preferred. These may be used alone or in combination of two or more. Examples of cyanide salts include potassium cyanide and sodium cyanide. Examples of phosphates include potassium phosphate, sodium phosphate and ammonium phosphate. Examples of pyrophosphate include potassium pyrophosphate, sodium pyrophosphate and ammonium pyrophosphate. Examples of nitrates include potassium nitrate, sodium nitrate, and ammonium nitrate. Examples of citrates include potassium citrate, sodium citrate, and ammonium citrate. Examples of tartaric acid include potassium tartrate, sodium tartrate, sodium potassium tartrate and the like. Examples of thiocyanates include potassium thiocyanide and sodium thiocyanide. Examples of sulfates include potassium sulfate, sodium sulfate, and ammonium sulfate. Examples of boric acid or salts thereof include boric acid, sodium borate, potassium borate and the like.
本発明の電解銀めっき液における電気伝導塩の濃度は、1~200g/Lが好ましい。電気伝導塩の濃度が1g/L未満である場合、めっき液の電気抵抗が高くなりすぎ、適切な陰極電流密度によるめっき製造ができない。 The electroconductive salt concentration in the electrolytic silver plating solution of the present invention is preferably 1 to 200 g/L. If the concentration of the electrically conductive salt is less than 1 g/L, the electrical resistance of the plating solution becomes too high, making it impossible to produce plating with a suitable cathode current density.
[チオ硫酸(塩)]
本発明の電解銀めっき液に配合されるチオ硫酸及び/又はその塩(以下、「チオ硫酸(塩)」と略記する)は、具体的にはチオ硫酸、チオ硫酸カリウム、チオ硫酸ナトリウムなどが例示される。これらは単独で用いてもよく、2種類以上を併用してもよい。
[Thiosulfate (salt)]
Thiosulfuric acid and/or a salt thereof (hereinafter abbreviated as "thiosulfuric acid (salt)") to be incorporated in the electrolytic silver plating solution of the present invention specifically includes thiosulfuric acid, potassium thiosulfate, sodium thiosulfate, and the like. exemplified. These may be used alone or in combination of two or more.
本発明の電解銀めっき液におけるチオ硫酸(塩)の濃度は、3~500g/Lであることが好ましく、3~300g/Lであることがより好ましい。チオ硫酸(塩)の濃度が3g/L未満である場合、析出する銀結晶の形状・サイズが均一にならない。チオ硫酸(塩)の濃度が500g/Lを超える場合、沈殿が生じる恐れがある。 The concentration of thiosulfuric acid (salt) in the electrolytic silver plating solution of the present invention is preferably 3 to 500 g/L, more preferably 3 to 300 g/L. When the concentration of thiosulfuric acid (salt) is less than 3 g/L, the shape and size of precipitated silver crystals are not uniform. If the concentration of thiosulfate (salt) exceeds 500 g/L, precipitation may occur.
[その他の成分]
本発明の電解銀めっき液においては、上記成分の他に、粘度を低下させ、銀皮膜のムラ発生を抑制するために、本発明の目的を損なわない範囲で界面活性剤などの成分を含有させることができる。界面活性剤としては、ポリオキシエチレンアルキルエーテル硫酸ナトリウムなどの陰イオン性界面活性剤や、ポリオキシエチレンアルキルエーテル縮合物などの非イオン性界面活性剤が例示される。
[Other ingredients]
In the electrolytic silver plating solution of the present invention, in addition to the above components, a component such as a surfactant is added to the extent that the object of the present invention is not impaired in order to reduce the viscosity and suppress the occurrence of unevenness in the silver film. be able to. Examples of surfactants include anionic surfactants such as sodium polyoxyethylene alkyl ether sulfate and nonionic surfactants such as polyoxyethylene alkyl ether condensates.
以下、実施例によって本発明を具体的に説明する。本発明はこれらの実施例に限定されるものではない。 EXAMPLES The present invention will be specifically described below with reference to examples. The invention is not limited to these examples.
(実施例1~12、比較例1~7)
被めっき物としては0.1dm2の銅板を用いた。まず、銅板に、アルカリ系の脱脂液で脱脂処理を施した後、希硫酸で中和し、その後、シアン浴により無光沢の銅めっきを約1.7μm施した。その後、シアン系ストライク浴により銀めっきを約0.1μm施した。
(Examples 1 to 12, Comparative Examples 1 to 7)
A copper plate of 0.1 dm 2 was used as the object to be plated. First, a copper plate was degreased with an alkaline degreasing solution, neutralized with dilute sulfuric acid, and then matte copper plated with a thickness of about 1.7 μm using a cyanide bath. After that, about 0.1 μm silver plating was applied using a cyan-based strike bath.
表1、2に記載する組成で、実施例1~12、比較例1~7のめっき液を調製した。調製されためっき液0.5Lをポンプで吹き上げ、1cm角の正方形を残してマスキングされた被めっき物にめっき液を当てて、表1、2に記載する条件下で、銀膜厚が4μmになるまで電解銀めっき操作を行い、清浄な純水で洗浄した後、乾燥した。 Plating solutions of Examples 1 to 12 and Comparative Examples 1 to 7 were prepared with the compositions shown in Tables 1 and 2. 0.5 L of the prepared plating solution is blown up with a pump, and the plating solution is applied to the masked object to be plated leaving a square of 1 cm square, and the silver film thickness is 4 μm under the conditions described in Tables 1 and 2. Electrolytic silver plating was carried out until the surface became clear, washed with clean pure water, and then dried.
以上のようにして得られた実施例1~12、比較例1~7の銀皮膜について、光沢度と算術平均粗さを計測した。ここでいう光沢度とは、日本電色工業株式会社製のデンシトメーターND-11で測定される数値である。また、ここでいう算術平均粗さとは株式会社キーエンス製形状測定レーザマイクロスコープVK-9700を用いて倍率150倍で解析して得られた算術平均粗さの値である。測定結果は表1、2に示す。 The glossiness and arithmetic mean roughness of the silver films of Examples 1 to 12 and Comparative Examples 1 to 7 obtained as described above were measured. The term "glossiness" as used herein is a numerical value measured with a densitometer ND-11 manufactured by Nippon Denshoku Industries Co., Ltd. Further, the arithmetic mean roughness here is a value of arithmetic mean roughness obtained by analyzing with a shape measuring laser microscope VK-9700 manufactured by KEYENCE CORPORATION at a magnification of 150 times. The measurement results are shown in Tables 1 and 2.
また、実施例2、比較例6、7の銀皮膜について、日本電子株式会社製走査電子顕微鏡JSM-IT300HRで観察した結果をそれぞれ図1~6に示す。
Further, the results of observing the silver films of Example 2 and Comparative Examples 6 and 7 with a scanning electron microscope JSM-IT300HR manufactured by JEOL Ltd. are shown in FIGS. 1 to 6, respectively.
実施例1~12で得られた銀皮膜は、いずれも光沢度が0.0、算術平均粗さが0.30μm以上であった。色調は白色で、ムラがなく良好な外観であった。また、図1、2に例示されるように塊状の結晶が均一に析出した状態となっていた。浴安定性も良好であった。 The silver films obtained in Examples 1 to 12 all had a glossiness of 0.0 and an arithmetic mean roughness of 0.30 μm or more. The color tone was white, and the appearance was good without unevenness. Also, as exemplified in FIGS. 1 and 2, lumpy crystals were uniformly precipitated. Bath stability was also good.
比較例1~4で得られた銀皮膜は、いずれも光沢度が0.1以上で、算術平均粗さが0.30μm未満であった。色調は白色で、ムラがなく良好な外観であった。浴安定性も良好であった。 The silver films obtained in Comparative Examples 1 to 4 all had a glossiness of 0.1 or more and an arithmetic mean roughness of less than 0.30 μm. The color tone was white, and the appearance was good without unevenness. Bath stability was also good.
比較例5、6で得られた銀皮膜は、いずれも光沢度が0.0、算術平均粗さが0.30μm未満であった。色調は白色で、ムラがなく良好な外観であった。浴安定性も良好であった。
本発明者はチオ硫酸(塩)の代わりにヨウ化物塩を用いても銀めっきが粗化されることを見出したが、図3、4に例示されるように針状・板状の銀結晶が析出し、電子顕微鏡で確認する限りにおいて均一とは言い難い外観であった。
The silver films obtained in Comparative Examples 5 and 6 both had a glossiness of 0.0 and an arithmetic mean roughness of less than 0.30 μm. The color tone was white, and the appearance was good without unevenness. Bath stability was also good.
The present inventor found that silver plating was roughened even when iodide salt was used instead of thiosulfate (salt). was precipitated, and the appearance was hardly uniform as far as it was confirmed with an electron microscope.
比較例7で得られた銀皮膜は、光沢度が0.0、算術平均粗さが0.30μm未満であった。色調は白色で、ムラがなく良好な外観であった。また、図5、6に例示されるように結晶のサイズはまばらであった。浴安定性は良好であった。
The silver film obtained in Comparative Example 7 had a glossiness of 0.0 and an arithmetic mean roughness of less than 0.30 μm. The color tone was white, and the appearance was good without unevenness. Also, the crystal sizes were sparse as illustrated in FIGS. Bath stability was good.
Claims (3)
1~200g/Lの電気伝導塩と、
3~500g/Lのチオ硫酸又はその塩と、
を含有することを特徴とする電解粗化銀めっき液。 10 to 100 g/L of silver cyanide or silver cyanide salt in terms of silver;
1 to 200 g/L of an electrically conductive salt;
3 to 500 g/L of thiosulfuric acid or a salt thereof;
An electrolytic roughening silver plating solution characterized by containing
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CN202180029421.5A CN115917050A (en) | 2020-04-21 | 2021-04-20 | Cyanogen-based electrolytic roughening silver plating solution |
TW110114249A TW202144623A (en) | 2020-04-21 | 2021-04-21 | Cyanide type electrolytic roughening silver plating liquid |
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CN1516754A (en) | 2001-06-12 | 2004-07-28 | 法国梅塔勒科技公司 | Mixture for use as brightening agent in electrodeposit solution of silver gold orone of their alloys |
JP5147540B2 (en) | 2008-05-22 | 2013-02-20 | 日本電信電話株式会社 | Organic matter analysis method and organic matter analyzer |
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