TW202144623A - Cyanide type electrolytic roughening silver plating liquid - Google Patents
Cyanide type electrolytic roughening silver plating liquid Download PDFInfo
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本發明關於電鍍銀液。具體而言,關於使用氰化銀作為銀源而成之電鍍銀液,得到經高度粗化鍍敷的皮膜之電鍍銀液。The present invention relates to electroplating silver baths. Specifically, about the silver electroplating liquid which used silver cyanide as a silver source, the electroplating silver liquid of the coating film which was highly roughened was obtained.
銀由於其白色光澤而自古以來被多用於珠寶商品。銀由於在貴金屬之中產出量比較多而便宜,故即使在現代也在銀配件或餐具等之裝飾用途中施予鍍銀。又,銀由於在室溫下的導電率為全部金屬中最大,故鍍銀係在IC或電晶體等電子裝置取向的引線框架或基板等中亦被多用。再者,銀由於可見光線的反射率為全部金屬中最大,故在以LED為代表的發光裝置用之引線框架或各種基板上,多使用鍍銀。另外,在軸承零件或利用銀的抗菌性之用途中,亦使用鍍銀。Silver has been used in jewelry products since ancient times due to its white luster. Since silver is relatively cheap among precious metals, silver plating is applied even in modern times for decorative purposes such as silver accessories or tableware. In addition, since silver has the highest electrical conductivity among all metals at room temperature, silver plating is also widely used in lead frames, substrates, and the like of electronic devices such as ICs and transistors. Furthermore, since silver has the highest reflectivity of visible light among all metals, silver plating is often used on lead frames and various substrates for light-emitting devices such as LEDs. In addition, silver plating is also used for bearing parts or applications utilizing the antibacterial properties of silver.
至目前為止,於半導體業界中為了提高IC封裝的可靠性,而採取了各式各樣的措施。特別地,為了防止被稱為爆米花現象的IC封裝之破壞,進行粗化鍍敷之開發。將成為基底鍍敷的銅或鎳之鍍敷表面予以粗化,目標為藉由錨定效果而提高鍍敷與樹脂間之密著性。例如,專利文獻1中記載一種運用2層的粗化鍍敷而謀求密著性的提升之技術。然而,於此等習知技術中,僅在最表面進行的貴金屬鍍層被覆,所以有其錨定效果無法被充分發揮之問題。因此,希望將電特性優異的鍍銀本身予以粗化而施予至最表面之方法。另一方面,鍍銀係有因熱而容易發生再結晶化之特性。因此,如在以往之典型的粗化鍍銅或粗化鍍鎳所見到的針狀鍍敷,係在鍍銀之情況中有因熱處理而錨定效果下降之虞。So far, various measures have been taken in the semiconductor industry in order to improve the reliability of IC packages. In particular, in order to prevent the destruction of IC packages called the popcorn phenomenon, rough plating has been developed. The plating surface of copper or nickel used as base plating is roughened, and the aim is to improve the adhesion between plating and resin by the anchor effect. For example, Patent Document 1 describes a technique for improving adhesion by using two-layer roughening plating. However, in these conventional techniques, since only the outermost surface is covered with a noble metal plating layer, there is a problem that the anchoring effect cannot be sufficiently exerted. Therefore, a method of roughening the silver plating itself excellent in electrical properties and applying it to the outermost surface is desired. On the other hand, the silver-plated system has the characteristic of being easily recrystallized by heat. Therefore, in the case of silver plating, the needle-like plating as seen in conventional rough copper plating or rough nickel plating has a possibility of lowering the anchoring effect due to heat treatment.
使用硫系化合物的鍍銀液係以往已知。專利文獻2中揭示作為代替氰化物的銀之安定化劑,包含硫醇類或二硫醚化合物而成之鍍銀液。又,專利文獻3中揭示藉由硫代硫酸使鍍敷液安定化之方法。如此地,尤其作為不含氰的鍍銀液或無電解鍍銀液中的安定劑或還原劑等,利用硫化合物,尤其硫代硫酸。然而,硫代硫酸亦為有名的氰化合物之解毒劑,於以鍍敷的粗化為目的而在氰化物電鍍銀液中使用硫代硫酸或其鹽者之例係沒有。 [先前技術文獻]A silver plating solution using a chalcogenide compound has been conventionally known. Patent Document 2 discloses a silver plating solution containing a thiol or a disulfide compound as a stabilizer for silver in place of cyanide. In addition, Patent Document 3 discloses a method of stabilizing the plating solution by thiosulfuric acid. In this way, a sulfur compound, especially thiosulfuric acid, is used as a stabilizer or a reducing agent in a cyanide-free silver plating solution or an electroless silver plating solution, or the like. However, thiosulfuric acid is also known as an antidote for cyanide compounds, and there is no example of using thiosulfuric acid or its salt in a cyanide electroplating silver bath for the purpose of roughening plating. [Prior Art Literature]
[專利文獻1]國際公開編號WO2017/077903 [專利文獻2]日本專利第6608597號 [專利文獻3]日本專利第3300519號[Patent Document 1] International Publication No. WO2017/077903 [Patent Document 2] Japanese Patent No. 6608597 [Patent Document 3] Japanese Patent No. 3300519
[發明所欲解決的課題][Problems to be solved by the invention]
根據上述情事,於以往之技術中,不容易提高貴金屬尤其電特性或焊錫潤濕性優異的銀與樹脂之密著性。又,針狀的銀係有因再結晶所致的性能降低,或在金屬表面上金屬單晶自然成長之晶鬚的掛慮。因此,希望開發出能得到以非針狀的形式粗化的銀皮膜之鍍銀液。In view of the above, in the prior art, it was not easy to improve the adhesion between noble metals, especially silver, which is excellent in electrical properties and solder wettability, and resins. In addition, the needle-shaped silver system has a concern that the performance is lowered due to recrystallization, or that the whisker of the metal single crystal grows spontaneously on the metal surface. Therefore, it is desired to develop a silver plating solution that can obtain a silver film roughened in a non-needle form.
本發明之目的在於提供一種電鍍銀液,其能得到經高度粗化的銀皮膜。 [解決課題的手段]The object of the present invention is to provide a silver electroplating solution which can obtain a highly roughened silver film. [Means to solve the problem]
本發明者專心致力地研究,結果發現藉由在電鍍銀液中添加硫代硫酸及/或其鹽,可得到非針狀的經高度粗化的銀皮膜,終於完成本發明。解決上述課題的本發明係記載於以下。The inventors of the present invention have made intensive studies and found that by adding thiosulfuric acid and/or its salts to the silver electroplating solution, a non-needle-shaped, highly roughened silver film can be obtained, and the present invention was finally completed. The present invention for solving the above-mentioned problems is described below.
[1]一種電鍍銀液,其特徵為含有: 以銀換算10~100g/L的氰化銀或氰化銀鹽, 1~200g/L的導電鹽,與 3~500g/L的硫代硫酸或其鹽。[1] A silver electroplating solution, characterized by containing: Silver cyanide or silver cyanide salt of 10-100g/L converted to silver, 1~200g/L of conductive salt, with 3~500g/L of thiosulfuric acid or its salt.
[2]如[1]記載之電鍍銀液,其中前述導電鹽係選自由氰鹽、磷酸鹽、焦磷酸鹽、硝酸鹽、檸檬酸鹽、酒石酸鹽、硫氰鹽、硫酸鹽及硼酸或其鹽所成之群組的至少1種。[2] The silver electroplating solution according to [1], wherein the conductive salt is selected from cyanide, phosphate, pyrophosphate, nitrate, citrate, tartrate, thiocyanate, sulfate and boric acid or its At least one of the group consisting of salt.
[3]如[1]記載之電鍍銀液,其pH(25℃)為7.0~13.0。 [發明的效果][3] The silver electroplating solution according to [1], wherein the pH (25° C.) is 7.0 to 13.0. [Effect of invention]
本發明之電解粗化鍍銀液係可安定地得到非針狀之經高度粗化的銀皮膜。具體而言,如圖1、2所示,得到如塊狀的結晶成長之形狀的皮膜。藉此,因再結晶所致的粗化形狀劣化之虞少。又,在鍍敷成長的方向中產生大的凹凸,於與樹脂等接著之際得到高的錨定效果。再者,由於得到安定的性能,故製造良率提升。The electrolytically roughened silver plating solution of the present invention can stably obtain a non-needle-shaped, highly roughened silver film. Specifically, as shown in FIGS. 1 and 2 , a coating in the shape of a massive crystal growth was obtained. Thereby, there is little possibility of deterioration of the roughened shape due to recrystallization. In addition, large unevenness occurs in the direction in which the plating grows, and a high anchoring effect is obtained when it is attached to a resin or the like. Furthermore, since stable performance is obtained, the manufacturing yield is improved.
[實施發明的形態][The form of carrying out the invention]
本發明之電鍍銀液含有銀鹽以銀換算為10~100g/L的氰化銀錯合物、1~200g/L的導電鹽與3~500g/L的硫代硫酸或其鹽。以下,說明構成本發明之電鍍銀液的各成分。The silver electroplating solution of the present invention contains silver cyanide complexes of 10-100 g/L of silver salt, 1-200 g/L of conductive salt and 3-500 g/L of thiosulfuric acid or its salt. Hereinafter, each component which comprises the silver electroplating liquid of this invention is demonstrated.
[氰化銀錯合物] 於本發明之電鍍銀液中,作為銀源,可無限制地使用眾所周知的氰化銀錯合物。作為氰化銀錯合物,可例示氰化銀、氰化銀鉀、氰化銀鈉。[Silver cyanide complex] In the silver electroplating solution of the present invention, as the silver source, well-known silver cyanide complexes can be used without limitation. Examples of the silver cyanide complex include silver cyanide, silver potassium cyanide, and silver sodium cyanide.
本發明之電鍍銀液中的氰化銀錯合物之濃度,係作為銀離子濃度,較佳為10~100g/L,更佳為20~70g/L。銀離子濃度未達10g/L時,析出效率降低,而且有得不到所欲的銀膜厚之情況。另一方面,銀離子濃度超過100g/L時,因被鍍敷物帶出鍍敷液所造成的銀鹽之損失變多,而不經濟的。The concentration of the silver cyanide complex in the silver electroplating solution of the present invention, as the concentration of silver ions, is preferably 10-100 g/L, more preferably 20-70 g/L. When the silver ion concentration is less than 10 g/L, the precipitation efficiency decreases, and the desired silver film thickness may not be obtained. On the other hand, when the silver ion concentration exceeds 100 g/L, the loss of the silver salt due to being carried out of the plating solution by the object to be plated increases, which is uneconomical.
[導電鹽] 本發明之電鍍銀液中所摻合的導電鹽,只要其水溶液具有導電性,則不特別地問種類為何,但為了工業的上安定地使用或經濟地製造電鍍銀液,較佳為包含由氰鹽、磷酸鹽、硝酸鹽、檸檬酸鹽、酒石酸鹽、硫氰鹽、硫酸鹽及硼酸或其鹽所選出的至少1種。此外,可溶性有機酸鹽等亦較佳。此等可單獨使用,也可併用2種類以上。作為氰鹽,可例示氰化鉀或氰化鈉等。作為磷酸鹽,可例示磷酸鉀、磷酸鈉、磷酸銨等。作為焦磷酸鹽,可例示焦磷酸鉀、焦磷酸鈉、焦磷酸銨等。作為硝酸鹽,可例示硝酸鉀、硝酸鈉、硝酸銨等。作為檸檬酸鹽,可例示檸檬酸鉀、檸檬酸鈉、檸檬酸銨等。作為酒石酸,可例示酒石酸鉀、酒石酸鈉、酒石酸鈉鉀等。作為硫氰鹽,可例示硫氰化鉀或硫氰化鈉等。作為硫酸鹽,可例示硫酸鉀、硫酸鈉、硫酸銨等。作為硼酸或其鹽,可例示硼酸、硼酸鈉、硼酸鉀等。[conductive salt] The conductive salt blended in the silver electroplating solution of the present invention is not particularly concerned as long as the aqueous solution has conductivity, but it is preferable to include At least one selected from cyanide, phosphate, nitrate, citrate, tartrate, thiocyanate, sulfate, and boric acid or its salt. Moreover, a soluble organic acid salt etc. are also preferable. These may be used alone or in combination of two or more. As a cyanide salt, potassium cyanide, sodium cyanide, etc. can be illustrated. As a phosphate, potassium phosphate, sodium phosphate, ammonium phosphate, etc. can be illustrated. As a pyrophosphate, potassium pyrophosphate, sodium pyrophosphate, ammonium pyrophosphate, etc. are illustrated. As nitrate, potassium nitrate, sodium nitrate, ammonium nitrate, etc. are illustrated. As a citrate, potassium citrate, sodium citrate, ammonium citrate, etc. are illustrated. As tartaric acid, potassium tartrate, sodium tartrate, sodium potassium tartrate, etc. can be illustrated. As a thiocyanate, potassium thiocyanate, sodium thiocyanate, etc. can be illustrated. As a sulfate, potassium sulfate, sodium sulfate, ammonium sulfate, etc. can be illustrated. As boric acid or its salt, boric acid, sodium borate, potassium borate, etc. can be illustrated.
本發明之電鍍銀液中的導電鹽之濃度較佳為1~200g/L,更佳為10~200g/L,特佳為20~180g/L。導電鹽之濃度未達1g/L時,鍍敷液的電阻變過高,無法藉由適當的陰極電流密度進行鍍敷製造。The concentration of the conductive salt in the silver electroplating solution of the present invention is preferably 1-200 g/L, more preferably 10-200 g/L, and particularly preferably 20-180 g/L. When the concentration of the conductive salt is less than 1 g/L, the resistance of the plating solution becomes too high, and the plating production cannot be performed with an appropriate cathode current density.
[硫代硫酸(鹽)] 本發明之電鍍銀液中所摻合的硫代硫酸及/或其鹽(以下簡稱「硫代硫酸(鹽)」),具體而言可例示硫代硫酸、硫代硫酸鉀、硫代硫酸鈉等。此等可單獨使用,也可併用2種類以上。[thiosulfuric acid (salt)] The thiosulfuric acid and/or its salt (hereinafter referred to as "thiosulfuric acid (salt)") blended in the silver electroplating solution of the present invention can be specifically exemplified by thiosulfuric acid, potassium thiosulfate, and sodium thiosulfate Wait. These may be used alone or in combination of two or more.
本發明之電鍍銀液中的硫代硫酸(鹽)之濃度較佳為3~500g/L,更佳為3~300g/L,尤佳為3~150 g/L。硫代硫酸(鹽)之濃度未達3g/L時,析出的銀結晶之形狀・尺寸變不均勻。硫代硫酸(鹽)之濃度超過500g/L時,有發生沈澱之虞。The concentration of thiosulfuric acid (salt) in the silver electroplating solution of the present invention is preferably 3-500 g/L, more preferably 3-300 g/L, and particularly preferably 3-150 g/L. When the concentration of thiosulfuric acid (salt) is less than 3 g/L, the shape and size of the precipitated silver crystals become uneven. When the concentration of thiosulfuric acid (salt) exceeds 500 g/L, precipitation may occur.
[其他成分] 於本發明之電鍍銀液中,除了上述成分之外,為了使黏度降低,抑制銀皮膜不均之發生,在不損害本發明目的之範圍內,還可含有界面活性劑等之成分。作為界面活性劑,可例示聚氧乙烯烷基醚硫酸鈉等之陰離子性界面活性劑或聚氧乙烯烷基醚縮合物等之非離子性界面活性劑。[other ingredients] In the silver electroplating solution of the present invention, in addition to the above-mentioned components, in order to reduce the viscosity and suppress the occurrence of unevenness of the silver film, components such as surfactants may be contained within the range that does not impair the purpose of the present invention. Examples of the surfactant include anionic surfactants such as polyoxyethylene alkyl ether sodium sulfate, and nonionic surfactants such as polyoxyethylene alkyl ether condensates.
本發明之電鍍銀液係可藉由使上述氰化銀或氰化銀鹽、導電鹽、硫代硫酸及/或其鹽與視需要的其他成分溶解於水中而製造。又,亦較佳為將導電鹽、硫代硫酸及/或其鹽與視需要的其他成分預先溶解於水中,在使用時添加氰化銀或氰化銀鹽。The silver electroplating solution of the present invention can be produced by dissolving the above-mentioned silver cyanide or silver cyanide salt, conductive salt, thiosulfuric acid and/or its salt and other components as needed in water. Moreover, it is also preferable to dissolve a conductive salt, thiosulfuric acid and/or its salt, and other components as needed in water in advance, and to add silver cyanide or a silver cyanide salt at the time of use.
本發明之電鍍銀液較佳為以pH7.0~13.0(25℃,以下相同)使用,更佳為以pH8.0~13.0使用。pH未達7.0時,陰極電流效率下降,所得之皮膜不形成充分的膜厚。pH超過13.0時,所得之皮膜的外觀變差。The silver electroplating solution of the present invention is preferably used at pH 7.0-13.0 (25° C., the same below), more preferably at pH 8.0-13.0. When the pH is less than 7.0, the cathodic current efficiency decreases, and the obtained film does not form a sufficient film thickness. When the pH exceeds 13.0, the appearance of the obtained film deteriorates.
本發明之電鍍銀液的液溫較佳為10~80℃,更佳為20~60℃。若鍍敷浴的液溫脫離上述範圍,則陰極電流效率下降,有損害鍍敷浴的安定性之情況。The liquid temperature of the silver electroplating solution of the present invention is preferably 10-80°C, more preferably 20-60°C. When the liquid temperature of the plating bath deviates from the above-mentioned range, the cathode current efficiency decreases, and the stability of the plating bath may be impaired.
使用本發明之電鍍銀液時的電流密度,係考慮鍍敷液的組成或液溫、其他條件而設定。例如,以液溫60℃使用鍍敷液時,電流密度較佳設定在30~100A/dm2 。不設定在適當的電流密度時,在鍍敷外觀或鍍敷皮膜之特性有發生異常之虞。又,鍍敷浴變不安定,有發生鍍敷液成分的分解之情況。 [實施例]The current density when the silver electroplating solution of the present invention is used is set in consideration of the composition of the plating solution, the solution temperature, and other conditions. For example, when the plating solution is used at a solution temperature of 60° C., the current density is preferably set to 30 to 100 A/dm 2 . If the current density is not set to an appropriate current density, there is a possibility of abnormality in the appearance of the plating and the properties of the plating film. In addition, the plating bath becomes unstable, and decomposition of the plating solution components may occur. [Example]
以下,藉由實施例來具體地說明本發明。本發明不受此等實施例所限定。Hereinafter, the present invention will be specifically described by way of examples. The present invention is not limited by these embodiments.
(實施例1~12、比較例1~7) 作為被鍍敷物,使用0.1dm2 的銅板。首先,對於銅板,以鹼系的脫脂液施予脫脂處理後,以稀硫酸中和,然後,藉由氰浴施予約1.7μm的無光澤之鍍銅。然後,藉由氰系打底鍍浴施予約0.1μm的鍍銀。(Examples 1 to 12 and Comparative Examples 1 to 7) As the object to be plated, a 0.1 dm 2 copper plate was used. First, the copper plate was subjected to degreasing treatment with an alkali-based degreasing solution, neutralized with dilute sulfuric acid, and then subjected to matt copper plating of about 1.7 μm in a cyanide bath. Then, silver plating of about 0.1 μm was applied by a cyano-based primer bath.
以表1、2中記載之組成,調製實施例1~12、比較例1~7之鍍敷液。以幫浦噴起所調製的鍍敷液0.5L,將鍍敷液噴到殘留1cm見方的正方形而經遮掩的被鍍敷物,於表1、2記載之條件下,進行電鍍銀操作直到銀膜厚成為4μm,以潔淨的純水洗淨後,進行乾燥。With the compositions described in Tables 1 and 2, the plating solutions of Examples 1 to 12 and Comparative Examples 1 to 7 were prepared. Spray 0.5L of the prepared plating solution with a pump, and spray the plating solution to the object to be plated that remains in a square of 1 cm square and has been masked. The thickness was 4 μm, washed with clean pure water, and dried.
對於如以上所得之實施例1~12、比較例1~7之銀皮膜,計測光澤度與算術平均粗糙度。此處所言的光澤度,就是以日本電色工業股份有限公司製之光密度計ND-11所測定的數值。又,此處所言的算術平均粗糙度,就是使用股份有限公司KEYENCE製形狀測定雷射顯微鏡VK-9700,以倍率150倍解析所得的算術平均粗糙度之值。測定結果係顯示於表1、2中。The glossiness and the arithmetic mean roughness of the silver films of Examples 1 to 12 and Comparative Examples 1 to 7 obtained as described above were measured. The glossiness mentioned here is the value measured by the optical density meter ND-11 made by Nippon Denshoku Kogyo Co., Ltd. In addition, the arithmetic mean roughness referred to here is the value of the arithmetic mean roughness obtained by analysis at a magnification of 150 times using a shape measuring laser microscope VK-9700 manufactured by KEYENCE Co., Ltd. The measurement results are shown in Tables 1 and 2.
又,對於實施例2、比較例6、7之銀皮膜,以日本電子股份有限公司製掃描電子顯微鏡JSM-IT300HR進行觀察,結果各自顯示於圖1~6中。Moreover, the silver films of Example 2 and Comparative Examples 6 and 7 were observed with a scanning electron microscope JSM-IT300HR manufactured by JEOL Ltd., and the results are shown in FIGS. 1 to 6 , respectively.
實施例1~12所得之銀皮膜皆光澤度為0.0,算術平均粗糙度為0.30μm以上。色調為白色,無不均而為良好的外觀。又,如圖1、2所例示,成為塊狀的結晶均勻析出之狀態。浴安定性亦良好。All of the silver films obtained in Examples 1 to 12 had a glossiness of 0.0 and an arithmetic mean roughness of 0.30 μm or more. The color tone is white, and it has a good appearance without unevenness. Moreover, as illustrated in FIGS. 1 and 2 , the bulk crystals are uniformly precipitated. Bath stability is also good.
比較例1~4所得之銀皮膜皆光澤度為0.1以上,算術平均粗糙度未達0.30μm。色調為白色,無不均而為良好的外觀。浴安定性亦良好。All of the silver films obtained in Comparative Examples 1 to 4 had a glossiness of 0.1 or more, and an arithmetic mean roughness of less than 0.30 μm. The color tone is white, and it has a good appearance without unevenness. Bath stability is also good.
比較例5、6所得之銀皮膜皆光澤度為0.0,算術平均粗糙度未達0.30μm。色調為白色,無不均而為良好的外觀。浴安定性亦良好。 本發明者發現即使代替硫代硫酸(鹽),使用碘化物鹽,也將鍍銀粗化,但如圖3、4所例示,析出針狀・板狀的銀結晶,於電子顯微鏡確認的範圍內,為難以說是均勻的外觀。The glossiness of the silver films obtained in Comparative Examples 5 and 6 was 0.0, and the arithmetic mean roughness was less than 0.30 μm. The color tone is white, and it has a good appearance without unevenness. Bath stability is also good. The inventors of the present invention found that even if an iodide salt was used instead of thiosulfuric acid, the silver plating was roughened, but as shown in Figs. Inside, it is hard to say that the appearance is uniform.
比較例7所得之銀皮膜係光澤度為0.0,算術平均粗糙度未達0.30μm。色調為白色,無不均而為良好的外觀。又,如圖5、6所例示,結晶的尺寸為稀散。浴安定性良好。The glossiness of the silver film system obtained in Comparative Example 7 was 0.0, and the arithmetic mean roughness was less than 0.30 μm. The color tone is white, and it has a good appearance without unevenness. Moreover, as illustrated in FIGS. 5 and 6 , the size of the crystals is scattered. Bath stability is good.
[圖1]係實施例2所得之銀被膜的顯微鏡照片(370倍)。 [圖2]係實施例2所得之銀被膜的顯微鏡照片(5000倍)。 [圖3]係比較例6所得之銀被膜的顯微鏡照片(370倍)。 [圖4]係比較例6所得之銀被膜的顯微鏡照片(5000倍)。 [圖5]係比較例7所得之銀被膜的顯微鏡照片(370倍)。 [圖6]係比較例7所得之銀被膜的顯微鏡照片(5000倍)。FIG. 1 is a microscope photograph (370 times) of the silver film obtained in Example 2. FIG. [ Fig. 2 ] A microscope photograph (5000 times) of the silver film obtained in Example 2. [Fig. 3 is a microscope photograph (370 times) of the silver film obtained in Comparative Example 6. FIG. FIG. 4 is a microscope photograph (5000 times) of the silver film obtained in Comparative Example 6. FIG. FIG. 5 is a microscope photograph (370 times) of the silver film obtained in Comparative Example 7. FIG. FIG. 6 is a microscope photograph (5000 times) of the silver film obtained in Comparative Example 7. FIG.
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