JP7211773B2 - Image measuring machine and image measuring program - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image measuring machine that captures an image of a workpiece and performs measurement.

The image measuring machine captures an image of an object to be measured (hereinafter also referred to as a "work"), analyzes this image, extracts shapes such as straight lines, circles, polygons, etc., and measures the distance and inclination of the extracted shape. , diameter, and width.

In such a vision measuring machine, Patent Documents 1 and 2 disclose a part program function that records a measurement procedure in advance and reproduces the recorded measurement procedure when, for example, measuring a workpiece of the same shape. be done.

In the image measuring machine, the stage is moved so that the measurement point of the object to be measured is aligned with the reference position of the imaging area. In an image measuring machine equipped with an electric stage, an operator operates a joystick or the like provided on a remote box to move the electric stage for alignment. In a manual-type image measuring machine, even when a part program is being executed, the stage must be moved manually by the operator.

The moving direction of the electric stage can be indicated by a joystick, and the moving speed can be set according to the operator's preference by operating a speed control knob. For this reason, the operator operates the joystick to move the stage while referring to the image of the work shown on the display. Then, when the image of the measurement point appears, a mouse operation is performed to paste the measurement tool for edge detection to the image displayed on the software screen, and the button operation for executing edge detection is performed on the screen.

The basic measurement operation is to move the stage to the measurement point and perform edge detection from the captured image. At this time, operations are performed using both hands, for example, the mouse is operated with the right hand and the joystick is operated with the left hand (stage movement).

Here, the positioning operation for the electric stage using the joystick requires fine adjustment of the inclination angle of the lever of the joystick. Therefore, the joystick is operated while operating the speed control knob for adjusting the moving speed of the stage to perform the fine movement operation at the time of positioning.

Japanese Patent Publication No. 3-57403 Japanese Patent Application Laid-Open No. 2003-139520

However, when finely adjusting the position near the measurement point, it is not possible to adjust the speed while moving the stage with only one hand (for example, the left hand). At this time, it is possible to adjust the speed by switching between the speed control knob and the joystick with one hand, but the advantage of being able to adjust the speed while operating the joystick cannot be utilized.

As explained earlier, when performing measurement operations with a vision measuring machine, the main operations are, for example, the mouse operation with the right hand and the joystick operation (stage movement) with the left hand. , left hand: speed control knob), it is necessary to switch the operation of the right hand between the mouse and the joystick, which deteriorates the working efficiency of the measurement operation (edge detection).

SUMMARY OF THE INVENTION It is an object of the present invention to provide an image measuring instrument and an image measuring program capable of improving the usability of the operation of a manual type measuring instrument equipped with an electric stage and increasing work efficiency.

One aspect of the present invention is an image measuring machine that measures the dimensions of an object to be measured from an image of the object, comprising an imaging unit that captures an image of the object to be measured; moving means for moving the relative position of, operating means operated by the operator to receive an instruction of the moving direction, and control means for controlling the moving means along the moving direction received by the operating means, The control means is characterized in that the moving speed of the moving means is adjusted in accordance with the amount of deviation between the measurement target point of the object to be measured and the reference point of the photographing area.

According to such a configuration, when moving the relative position between the object to be measured and the imaging area by the imaging means by the moving means, is used to adjust the moving speed of the moving means. As a result, the moving speed is automatically adjusted according to the amount of deviation so that the operator can easily operate the moving speed.

In the image measuring machine, the control means sets the moving speed to a first speed when the amount of deviation exceeds a preset allowable range, and sets the moving speed to a first speed when the amount of deviation is within the allowable range. It is preferable to set a second speed that is slower than the first speed. As a result, even if the amount of operation of the operation means by the operator is the same, if the amount of deviation exceeds the allowable range, the robot moves quickly, and if the amount of deviation falls within the allowable range, it moves slowly. become.

In the above image measuring machine, when the control means sets the movement speed to the second speed when the amount of deviation falls within the allowable range, measures the measurement point, and then moves to the next measurement target point. , the moving speed is preferably set to a third speed that is faster than the second speed. As a result, the measurement of the measurement point is completed, and when moving to the next measurement point, it becomes possible to move quickly.

In the image measuring machine, it is preferable that the control means gradually decrease the moving speed as the amount of deviation approaches the allowable range from a point where the amount exceeds the allowable range. As a result, when the amount of deviation approaches the allowable range, the moving speed gradually slows down, making positioning easier.

The image measuring instrument further includes sound output means, wherein the control means outputs a first sound from the sound output means when the amount of deviation exceeds the allowable range, and outputs a first sound when the amount of deviation is within the allowable range. Alternatively, control may be performed to output a second sound different from the first sound from the sound output means. This makes it possible to recognize by sound that the amount of deviation is within the allowable range.

The image measuring machine may further include display means for displaying the image captured by the imaging means, and the control means may perform control to display the set moving speed on the display means. This makes it possible to visually grasp the currently set movement speed.

Another aspect of the present invention is an image measurement program for controlling an image measuring machine for measuring dimensions of an object to be measured from an image of the object, the program comprising: capturing an image of the object to be measured in a computer; a step of moving the relative positions of the object to be measured and the photographing area in response to an instruction of a movement method based on the operation of the operation means by the operator; and a step of adjusting the moving speed of the relative position between the object to be measured and the imaging region according to the amount of deviation.

According to such a configuration, when moving the relative positions of the object to be measured and the imaging region, the moving speed is adjusted according to the amount of deviation between the measurement target point of the object to be measured and the reference point of the imaging region. be. As a result, the moving speed is automatically adjusted according to the amount of deviation so that the operator can easily operate the moving speed.

In the above image measurement program, in the step of adjusting the moving speed, if the amount of deviation exceeds a preset allowable range, the moving speed is set to a first speed, and if the amount of deviation is within the allowable range , the moving speed is preferably set to a second speed that is slower than the first speed. As a result, even if the amount of operation of the operation means by the operator is the same, if the amount of deviation exceeds the allowable range, the robot moves quickly, and if the amount of deviation falls within the allowable range, it moves slowly. become.

In the above image measurement program, in the step of adjusting the moving speed, the moving speed is set to the second speed when the amount of deviation is within the allowable range, and after measuring the measurement point, moving to the next measurement target point. When moving, it is preferable to set the moving speed to a third speed that is faster than the second speed. As a result, the measurement of the measurement point is completed, and when moving to the next measurement point, it becomes possible to move quickly.

In the above image measurement program, it is preferable that, in the step of adjusting the moving speed, the moving speed is gradually decreased as the amount of deviation approaches the allowable range from a point where the deviation exceeds the allowable range. As a result, when the amount of deviation approaches the allowable range, the moving speed gradually slows down, making positioning easier.

In the image measurement program, in the step of adjusting the moving speed, if the amount of deviation exceeds the allowable range, a first sound is output, and if the amount of deviation is within the allowable range, the first sound is A different second sound may be output. This makes it possible to recognize by sound that the amount of deviation is within the allowable range.

In the image measurement program, the step of adjusting the moving speed may display the set moving speed on the display means. This makes it possible to visually grasp the currently set movement speed.

1 is a perspective view illustrating an image measuring machine according to an embodiment; FIG. It is a perspective view which illustrates an operation means. 2 is a block diagram illustrating the configuration of the control system of the image measuring machine according to the embodiment; FIG. (a) to (c) are diagrams showing examples of display according to the amount of deviation. It is a figure which shows the relationship between a stage position and a moving speed. (a) and (b) are diagrams showing display examples of the display when the deviation amount is within the allowable range. FIG. 10 is a diagram showing the relationship between stage position and movement speed when automatic speed setting is disabled; (a) and (b) are diagrams showing display examples of moving speed levels. 4 is a flow chart illustrating an image measurement method according to the present embodiment;

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of members that have already been described will be omitted as appropriate.

[Configuration of image measuring machine]
FIG. 1 is a perspective view illustrating an image measuring machine according to this embodiment.
FIG. 2 is a perspective view illustrating the operating means.
The image measuring machine 1 according to the present embodiment is a device that captures an image of a workpiece W, which is an object to be measured, and measures the dimensions of a predetermined portion of the workpiece W from this image.
The image measuring machine 1 includes imaging means 10 for capturing an image of the workpiece W, moving means 20 for moving the relative positions of the workpiece W and the imaging area of the imaging means 10, and operating means 30 operated by an operator. , and control means 40 for controlling the moving means 20 .

The imaging means 10 has a camera 11 and an optical system 12, and is provided so as to be vertically movable in the height direction (Z-axis direction). The optical system 12 irradiates the work W with illumination light and forms an image of the work W on the light receiving surface of the camera 11 . The image of the workpiece W is converted into an image (image data) by the camera 11 and sent to the control means 40 .

The moving means 20 has a stage 21 on which the workpiece W is placed, and a drive section 22 for moving the stage 21 in two horizontal axes (X-axis direction and Y-axis direction). The drive unit 22 electrically moves the stage 21 in the horizontal direction. This constitutes an electric XY stage.

The operating means 30 is a remote box, and receives instructions such as the direction of movement, the speed of movement, and the adjustment of illumination light by the operator's operation. The operation means 30 is provided with a joystick 31 for receiving a direction of movement. The operator operates the joystick 31 to receive the direction in which the stage 21 is to be moved. The operating means 30 is provided with a speed control knob 32 . By turning the speed control knob 32, the moving speed of the stage 21 can be adjusted. In addition, the operating means 30 is provided with a dimming knob 33 and an emergency stop button 35 .

With such moving means 20 and operating means 30, the image measuring machine 1 according to the present embodiment constitutes a manual type image measuring machine 1 in which the electrically movable stage 21 is operated by the operator to perform measurement. be.

The control means 40 is provided in the main body of the measuring machine. The control means 40 gives an instruction to the drive section 22 along the movement direction received by the joystick 31 of the remote box, and controls the stage 21 to move in the direction corresponding to the joystick 31 . At this time, the control means 40 moves the stage 21 at the speed level set by the speed control knob 32 of the remote box. That is, even if the amount of operation of the joystick 31 is the same, the stage 21 moves at a moving speed corresponding to the speed level set by the speed control knob 32 .

For example, when it is desired to move the stage 21 by a large amount, the speed adjustment knob 32 is set to a high speed. As a result, the stage 21 can be moved at high speed even with a slight operation of the joystick 31 . On the other hand, when it is desired to finely adjust the position of the stage 21, the speed adjustment knob 32 is set to a low speed. As a result, even if the joystick 31 is greatly operated, the stage 21 moves at a low speed, which facilitates fine adjustment of alignment.

Further, in the image measuring machine 1 according to the present embodiment, the control means 40 automatically adjusts the moving speed of the moving means 20 according to the amount of deviation between the measurement target point of the work W and the reference point of the imaging area of the imaging means 10. control to adjust accordingly. That is, the moving speed of the stage 21 that is easy for the operator to operate is automatically set according to the amount of deviation between the measurement target point and the reference point. Specific speed control will be described later.

The image measuring machine 1 can measure the workpiece W by moving the stage 21 according to instructions sent from the joystick 31 . A computer 100 may be connected to the image measuring machine 1 . The computer 100 includes a main body 101, a keyboard 102 and a mouse 103 as input means, and a display 104 as output means. Various kinds of processing by the control means 40 may be realized by program processing executed by the main body 101 .

FIG. 3 is a block diagram illustrating the configuration of the control system of the image measuring machine according to this embodiment.
An image signal of the workpiece W captured by the camera 11 is converted into digital image data by the AD converter 415 and stored in the image memory 416 . The digital image data stored in the image memory 416 is displayed on the display 104 by the operation of the display control section 437 .

An operator's command from keyboard 102 and mouse 103 is transmitted to CPU 439 via interface (I/F) 438 . The CPU 439 executes measurement processing in accordance with an operator's command or a part program stored in the program memory 440 . A work memory 441 provides a work area for various processes of the CPU 439 .

The CPU 439 receives a movement direction instruction received by the joystick 31 of the operation means 30, drives the X-axis motor 252 and the Y-axis motor 253 corresponding to the movement direction of the joystick 31, and moves the stage 21 along the XY axes. move. Also, the CPU 439 drives the Z-axis motor 254 to move the imaging means 10 along the Z-axis.

An X-axis encoder 242 , a Y-axis encoder 243 and a Z-axis encoder 244 are provided to detect the positions of the camera 11 in the X-axis, Y-axis, and Z-axis directions with respect to the stage 21 . The outputs of the X-axis encoder 242 , Y-axis encoder 243 and Z-axis encoder 244 are taken into the CPU 439 . The lighting control unit 445 generates an analog amount of command voltage based on the command value generated by the CPU 439 to drive the lighting device 121 .

[Example of display]
Next, a display example of the display 104 in the measurement operation will be described.
FIGS. 4(a) to 4(c) are diagrams showing examples of display according to the amount of deviation.
When the part program in which the measurement procedure is recorded is executed, the operator moves the stage 21 to the measurement location according to the recorded measurement procedure. In the manual type image measuring machine 1, the stage 21 is manually operated using the joystick 31 of the remote box or the like.

When the application software for the manual measuring machine is executed, when the stage movement command is executed, the amount of deviation between the reference point P1 of the shooting area and the current stage position is displayed on the screen window (camera imaging screen) displayed by the software. A guide will appear.

The guide display is, for example, two crosshairs, a first crosshair CR1 and a second crosshair CR2, as shown in FIGS. 4(a) to 4(c). The crossing point of the first cross line CR1 indicates the reference point P1 of the imaging area at the current stage position. The reference point P1 is automatically set at the center of the imaging area. The intersection position of the crosshairs displayed in the photographing area becomes the reference point P1. The second cross line CR2 is a guide display that indicates the direction of deviation between the measurement target point TP and the reference point P1 of the imaging region with reference to the first cross line CR1. The measurement target point TP is the position where the edge detection measurement tool is executed when the part program is recorded. That is, the coordinate positions recorded in the part program are applied. After the start of execution of the part program, if the current stage position (the center position of the imaging area screen) deviates from the measurement tool execution position, a guide indicating the amount of deviation is displayed on the screen. The horizontal direction (horizontal direction) of the display 104 is the X-axis direction, and the vertical direction (vertical direction) is the Y-axis direction.

FIG. 4(a) is a display example in the case where deviations occur in both the X-axis and Y-axis directions.
When there is a shift amount in both the X-axis and the Y-axis, the second cross line CR2 is displayed shifted in the X direction and the Y direction with respect to the first cross line CR1. In this example, the crossing point P2 of the second cross line CR2 is shown to the lower right with respect to the crossing point (reference point P1) of the first cross line CR1. The operator can recognize from this guide display that the measurement target point TP is deviated to the lower right with respect to the reference point P1 of the photographing area.

Also, if there is a deviation, the second cross line CR2 is displayed in a color that indicates it. In the example shown in FIG. 4A, both the vertical and horizontal lines of the second crosshair CR2 are displayed in red because there is a deviation on both the X-axis and the Y-axis. Here, the misalignment is displayed in red, but it may be displayed in another color, or may be displayed in another manner such as blinking.

FIG. 4B is a display example when only the deviation amount along the X-axis is within the allowable range.
By operating the joystick 31 to move the stage 21, the operator aligns the measurement target point TP and the reference point P1 of the photographing area so as to eliminate the deviation. When the displacement amount along the X-axis, for example, falls within a preset allowable range due to this movement of the stage 21, the vertical line of the first cross line CR1 and the vertical line of the second cross line CR2 match, and the vertical line changes to a color (eg, green) to indicate that the color of the

On the other hand, since the deviation along the Y-axis remains, the intersection P2 of the second cross line CR2 is displayed below the intersection (reference point P1) of the first cross line CR1. Also, there is a deviation between the horizontal line of the first cross line CR1 and the horizontal line of the second cross line CR2, and the horizontal line of the second cross line CR2 is displayed in red to indicate the deviation.

FIG. 4(c) is a display example when the amount of deviation is within the allowable range for both the X-axis and the Y-axis.
When the amount of deviation in the XY direction between the measurement target point TP and the reference point P1 of the photographing area falls within the permissible range due to the operator's operation, the second cross line CR2 overlaps the first cross line CR1, and the vertical and horizontal lines are displayed. changes to a color (eg, green) to indicate that the color of the The operator can recognize that the amount of deviation is within the allowable range by the overlap of the first crosshair CR1 and the second crosshair CR2 and the change in color.

[Example of automatic adjustment of movement speed]
Next, an example of automatic adjustment of the moving speed by the control means 40 will be described.
FIG. 5 is a diagram showing the relationship between stage position and movement speed.
The horizontal axis shown in FIG. 5 is the current position of the stage 21 and the vertical axis is the moving speed of the stage 21 . Note that the relationship between the stage position and the moving speed shown in FIG. 5 is an example, and the present invention is not limited to this.

In the image measuring machine 1 according to this embodiment, the control means 40 adjusts the moving speed of the moving means 20 according to the amount of deviation between the measurement target point TP of the workpiece W and the reference point P1 of the imaging area of the imaging means 10. to control. Here, the reference point P1 of the photographing area is equivalent to the current position of the stage 21. FIG. As shown in FIG. 5, an allowable range centering on the measurement target point TP is set for the current position of the stage 21 . The allowable range is the allowable range of deviation between the current position and the measurement target point TP. If this amount of deviation is within the allowable range, measurement can be performed from the acquired image.

When the current position of the stage 21 is out of the allowable range, the control means 40 sets the moving speed of the stage 21 to the first speed V1. As a result, the stage 21 can be quickly moved by the operator's operation of the joystick 31, and even if it is away from the measurement target point TP, it can be quickly approached.

On the other hand, when the current position of the stage 21 is within the allowable range, the control means 40 sets the moving speed of the stage 21 to a second speed V2 that is lower than the first speed V1. When the current position of the stage 21 approaches the measurement target point TP and falls within the allowable range, alignment must be performed by fine adjustment. At this time, the moving speed of the stage 21 is automatically set to the second speed V2, making it easier to finely move the stage 21 by operating the joystick 31 .

Thus, when the amount of deviation between the current position of the stage 21 and the measurement target point TP exceeds the allowable range, the first velocity V1 is set to be relatively fast, and when within the allowable range, the velocity is set to be relatively slow. Since the second speed V2 is set, the moving speed of the stage 21 can be automatically adjusted to a speed that facilitates alignment regardless of the operation of the speed adjusting knob 32 by the operator.

Even if the operation amount of the joystick 31 is the same, the operator can quickly move the stage 21 when the amount of deviation exceeds the allowable range, and when the amount of deviation is within the allowable range, the speed adjustment knob can be moved. Allows you to move slowly without turning 32.

Further, when the control means 40 sets the moving speed to the second speed V2 and moves to the next measurement target point TP after measuring the measurement point, the moving speed is set faster than the second speed V2. A third speed (for example, the first speed V1) may be set. As a result, when the measurement of one measurement location is completed and the next measurement location is to be moved, the stage 21 can be quickly moved again to quickly move to the next measurement location.

Note that the first speed V1 may be a moving speed corresponding to the speed level set by the speed adjustment knob 32 . Further, it is preferable to provide a deceleration region in which the moving speed is gradually decreased from the first speed V1 to the second speed V2 as the deviation approaches the allowable range from the point where the deviation exceeds the allowable range. As a result, when the amount of deviation approaches the allowable range, the moving speed gradually slows down from the first speed V1 to the second speed V2, thereby facilitating positioning.

FIGS. 6A and 6B are diagrams showing display examples when the amount of deviation is within the allowable range.
FIG. 6(b) shows an enlarged view of part A in FIG. 6(a).
The application software that displays the guide on the display 104 automatically adjusts the moving speed of the stage 21 in conjunction with the preset allowable positioning range. When the second crosshair CR2 enters the allowable range with respect to the first crosshair CR1, the display changes to a color indicating that it has entered the allowable range.

Along with this, the moving speed of the stage 21 is set from the first speed V1 to the second speed V2. In order to avoid sudden changes in speed, when the stage 21 reaches a certain area (deceleration area) outside the allowable range, a pre-calculated deceleration map (speed setting correspondence data for the distance to the target position) is applied. The corresponding speed value is sent from the application software to the measuring instrument by a command.

Such automatic speed setting by the control means 40 may be enabled/disabled. For example, enable/disable can be switched arbitrarily by the operator (switch or setting).

FIG. 7 is a diagram showing the relationship between the stage position and the moving speed when the automatic speed setting is disabled.
When the automatic speed setting is disabled, the moving speed is fixed at the first speed V1 regardless of the current position of the stage 21. FIG. The first speed V1 may be a moving speed corresponding to the speed level set by the speed control knob 32. FIG.

Further, the image measuring instrument 1 according to the present embodiment may further include a speaker 105 (see FIG. 1) as sound output means. The speaker 105 is built in the main body 101 of the computer 100, for example. The control means 40 outputs a first sound from the speaker 105 when the amount of deviation exceeds the allowable range, and outputs a second sound different from the first sound from the speaker 105 when the amount of deviation is within the allowable range. may be controlled to output. This makes it possible to recognize by sound that the amount of deviation is within the allowable range. The notification by sound is more effective when combined with the notification by the color of the crosshairs described above.

[Display of movement speed level]
Next, display of the movement speed level will be described.
FIGS. 8A and 8B are diagrams showing display examples of moving speed levels.
FIG. 8(b) shows an enlarged view of the B portion shown in FIG. 8(a).
The control means 40 performs display required for image measurement on the display 104 by application software. FIG. 8A shows a display example when image measurement is performed.

In such display during image measurement, the control means 40 preferably displays a level display image G representing the currently set moving speed of the stage 21 on the display 104 . As shown in FIG. 8(b), the level display image G representing the moving speed displays, for example, speed levels divided into several stages. The higher the display level, the faster the moving speed of the stage 21 is set. By referring to the level display image G representing the moving speed, the operator can visually grasp the currently set moving speed.

When operating the image measuring machine 1 during measurement, the operator basically performs operations while viewing the workpiece image displayed on the display 104 of the computer 100 . In most cases, the moving speed of the stage 21 of the image measuring machine 1 is normally set to the highest speed. In many cases, there is an assumption that workers also move at the highest speed.

If the speed adjustment knob 32 of the remote box is set to the minimum value (for example, set to "0"), the ABS operation (to change the machine coordinate system of the vision measuring machine 1 to operation to determine) or operation to determine the coordinate system of the object to be measured (operation to determine the coordinate system that matches the reference of the object to be measured), the stage is in a state where it does not move.
As a work procedure, it is good to always check the status of the remote box first. If the stage 21 does not move even if the 31 is operated, there is a possibility that an operation trouble will occur.
Also, if the operator operates the joystick 31 without noticing that the speed control knob 32 is set to the maximum value, the stage 21 will unintentionally move faster, causing trouble.

Therefore, as shown in FIGS. 8A and 8B, a level display image G representing the currently set moving speed of the stage 21 is displayed on the display 104 so that the status of the remote box can be checked even if the state of the remote box has not yet been confirmed. Also, the current setting level of the moving speed of the stage 21 can be grasped, and it is possible to prevent operation troubles.

[Image measurement program]
Next, an image measurement program according to this embodiment will be described.
FIG. 9 is a flowchart illustrating an image measurement method according to this embodiment.
The image processing program causes the computer 100 to execute predetermined steps of the image processing method shown in FIG.
In the example shown in FIG. 9, the image processing program includes the steps of photographing the workpiece W (step S102), moving the stage 21 (steps S103 to S105), and measuring dimensions (steps S106 to S107). The image processing program is executed as application software.

First, the workpiece W is placed on the stage 21 (step S101). The workpiece W is placed at a predetermined position on the stage 21 by an operator. Next, the workpiece W is photographed (step S102). An image of the work W is captured by the imaging means 10 . The captured image of the work W is displayed on the display 104 .

Next, the stage 21 is moved (first speed V1) (step S103). That is, the image processing program sets the moving speed of the stage 21 to the first speed V1, and moves the stage 21 based on the instruction from the operator.

Next, it is determined whether or not it is within the allowable range (step S104). That is, by moving the stage 21, it is determined whether or not the deviation amount between the measurement target point TP and the reference point P1 of the photographing area is within a preset allowable range. If the deviation amount is not within the allowable range, the process returns to step S103, and the stage 21 continues to move at the first speed V1. If the amount of deviation falls within the allowable range, the process proceeds to step S105, where the moving speed of the stage 21 is set to a second speed V2 that is lower than the first speed V1, and alignment is performed.

In this alignment, the moving speed of the stage 21 is set to the second speed V2, so fine adjustment of the alignment by the stage 21 is easy. Further, while the processing of steps S103 to S105 is being performed, the display 104 may display a guide of the first cross line CR1 and the second cross line CR2. Also, a sound may be output to indicate that it is within the allowable range.

After alignment, dimension measurement is performed (step S106). The operator selects a button for executing edge detection from the image by operating the mouse. Edges are then detected from the image and dimension measurements are made based on the edges.

Subsequently, it is determined whether or not there is a next measurement point (step S107). If there is a next measurement point, the process returns to step S103 and the subsequent processes are repeated. If there is no next measurement point, the process ends.

When the relative positions of the work W and the imaging area are moved by such an image processing program, the moving speed of the stage 21 is determined according to the amount of deviation between the measurement target point TP of the work W and the reference point P1 of the imaging area. (first speed V1 and second speed V2) are adjusted. As a result, the moving speed is automatically adjusted according to the amount of deviation so that the operator can easily operate the moving speed.

When moving the stage 21 with the joystick 31, the operator can quickly move the stage 21 at the first speed V1 if the amount of deviation exceeds the allowable range. Further, when the deviation amount falls within the allowable range, even if the operation amount of the joystick 31 is the same, the movement can be performed slowly at the second speed V2. As a result, it is possible to quickly and reliably move to the measurement target point TP.

In the above image processing program, when it is determined whether or not the range is within the allowable range in step S104, a sound may be output from the speaker 105 to inform the user of the fact that the range is within the allowable range.

As described above, according to the present embodiment, when the operator manually moves the measurement target point TP of the work W to match the reference point P1 of the imaging area, the measurement target point TP is the reference point of the imaging area. It is set so that the movement speed automatically slows down when approaching P1. Therefore, since there is no need to operate the speed control knob 32 when performing the measurement, the measurement operation can be performed without releasing the hands holding the joystick 31 and the mouse 103 . As a result, it is possible to improve the usability of the operation of the manual type image measuring machine 1 equipped with the electrically movable stage 21, and to improve the working efficiency.

[Modification of Embodiment]
Although the present embodiment has been described above, the present invention is not limited to these examples. For example, in the above description, the horizontal position of the imaging means 10 is fixed, and the stage 21 moves horizontally. . Further, the guide display of the deviation amount may be other than the cross line as long as it can indicate the direction of the deviation. In addition, additions, deletions, and design changes made by those skilled in the art to the above-described embodiments, and combinations of features of the embodiments as appropriate, do not include the gist of the present invention. to the extent possible are included within the scope of the present invention.

DESCRIPTION OF SYMBOLS 1... Image measuring machine 10... Imaging means 11... Camera 12... Optical system 20... Moving means 21... Stage 22... Driving part 30... Operating means 31... Joystick 32... Speed control knob 33... Dimming knob 35... Emergency stop button 40 ...control means 100...computer 101...main body 102...keyboard 103...mouse 104...display 105...speaker 121...lighting device 242...X-axis encoder 243...Y-axis encoder 244...Z-axis encoder 252...X-axis motor 253...Y-axis motor 254 Z-axis motor 415 AD conversion unit 416 Image memory 437 Display control unit 439 CPU
440 Program memory 441 Work memory 445 Illumination controller CR1 First cross line CR2 Second cross line G Level display image P1 Reference point P2 Intersection TP Measurement target point V1 First speed V2 2-speed W...work

Claims (12)

An image measuring machine for measuring dimensions of an object to be measured from an image of the object,
imaging means for capturing an image of the object to be measured;
a moving means for moving the relative positions of the object to be measured and the imaging area of the imaging means;
an operation means operated by an operator for receiving an instruction of a movement direction;
a control means for controlling the moving means along the moving direction received by the operating means;
with
The image measuring machine, wherein the control means adjusts the moving speed of the moving means in accordance with the amount of deviation between the measurement target point of the object to be measured and a predetermined reference point in the photographing area. The control means sets the moving speed to a first speed when the amount of deviation exceeds a preset allowable range, and sets the moving speed to the first speed when the amount of deviation is within the allowable range. 2. The image measuring machine according to claim 1, wherein a second speed slower than the speed is set. The control means sets the moving speed to the second speed when the amount of deviation falls within the allowable range, and when moving to the next measurement target point after measuring the measurement point, the 3. The image measuring machine according to claim 2, wherein the moving speed is set to a third speed faster than the second speed. 4. The image measuring machine according to claim 2, wherein the control means gradually reduces the moving speed as the amount of deviation approaches the allowable range from a point exceeding the allowable range. further comprising sound output means,
The control means outputs a first sound from the sound output means when the amount of deviation exceeds the allowable range, and outputs a first sound from the sound output means when the amount of deviation is within the allowable range. 5. The image measuring machine according to any one of claims 2 to 4, wherein control is performed to output a second sound different from the sound. further comprising display means for displaying the image captured by the imaging means,
The image measuring machine according to any one of claims 1 to 5, wherein the control means controls the display means to display the set moving speed. An image measuring program for controlling an image measuring machine for measuring dimensions of an object to be measured from an image of the object,
to the computer,
capturing an image of the object to be measured;
a step of moving the relative positions of the object to be measured and the imaging region in response to a movement direction instruction based on the operation of the operation means by the operator;
adjusting the moving speed of the relative position between the measurement object and the imaging area according to the amount of deviation between the measurement target point of the measurement object and a predetermined reference point in the imaging area;
An image measurement program characterized by executing In the step of adjusting the moving speed, the moving speed is set to a first speed when the amount of deviation exceeds a preset allowable range, and the moving speed is set when the amount of deviation is within the allowable range. is set to a second speed slower than the first speed. In the step of adjusting the moving speed, the moving speed is set to the second speed when the amount of deviation falls within the allowable range, and after measuring the measurement point, movement to the next measurement target point is performed. 9. The image measurement program according to claim 8, wherein, when performing, the movement speed is set to a third speed faster than the second speed. 10. The image according to claim 8, wherein in the step of adjusting the moving speed, the moving speed is gradually reduced as the amount of deviation approaches the allowable range from a point where the amount of deviation exceeds the allowable range. measurement program. In the step of adjusting the moving speed, when the amount of deviation exceeds the allowable range, a first sound is output, and when the amount of deviation is within the allowable range, a second sound different from the first sound is output. 11. The image measurement program according to any one of claims 8 to 10, wherein the program outputs 2 sounds. 12. The image measuring program according to any one of claims 7 to 11, wherein in the step of adjusting the moving speed, the set moving speed is displayed on display means.

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