JP2002350123A - Method for supporting measurement, measuring system and measurement support program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable even measurers having a low degree of skill to a measurement job to efficiently measure a work to be measured. SOLUTION: A measuring point A30 of the work to be measured which is measured immediately before is displayed on a monitor screen 16, and a next measuring point B31 is positioned on the upper right outside of the screen. At this time, guide information comprising a route 34 for guiding a movement of an observation position from a start point 32 of the route displayed corresponding to a position of the measuring point A30 to an end point 33 of the route displayed corresponding to a position of the measuring point B31, and the observation position 35 showing a position of an observation image being displayed on the monitor screen 16 is displayed within the monitor screen 16. The route 34 is determined on the basis of a measurement program indicating the position of each measuring point, a measurement condition, a measurement order and the like and of an avoid region set on the basis of a structure in a height direction of the work to be measured or the like.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a design data or a work manufactured in accordance with the design data, the work being created using a reference work conforming to the design data.
Measure each measurement point based on the measurement program that indicates the measurement conditions and the measurement procedure, which is the specification of the measurement point and the detection tool used for measurement at each measurement point, and obtain the measurement results. The present invention relates to a technique for measuring a work to be measured, for example, a technique which can be suitably used for measuring a dimension of a workpiece such as a die or a lead frame, particularly for measuring a fine dimension.

[0002]

2. Description of the Related Art There are devices such as a measuring microscope and a tool microscope for performing measurement by the above-mentioned method. When using these devices to measure a plurality of workpieces manufactured from certain design data, the following two-step procedure is generally required. (1) Teaching Measurements that indicate measurement conditions and measurement procedures including measurement point positions and lighting methods that are set in advance using design data or a reference work that is a work manufactured using the design data. Create and store a program. Teaching using design data is sometimes called offline teaching, and teaching using reference workpieces is sometimes called imitative teaching. (2) Measurement The work to be measured is placed on the stage of the apparatus, and the work to be measured is measured according to the contents of the measurement program created in (1).

In (2), a measurer moves the work to be measured by manual operation, and introduces the work to a measurement point in the field of view of a microscope or a monitor image captured by a CCD camera or the like. However, since the measuring microscope has a narrow field of view, when a certain measuring point on the workpiece to be measured is within the field of view, the next measuring point after the measuring point is often out of the field of view of the microscope or the monitor image. Exists. In such a case, the measurer moves the workpiece by operating the stage based on empirical knowledge and a counter display indicating the position coordinates of the stage, and introduces the next measurement point into the field of view or the monitor image. There must be.

Here, if the measurer is a sufficiently skilled person,
The operation amount of the stage required to introduce the next measurement point can be intuitively grasped from the counter display, and the measurement point can be introduced into the field of view or the monitor image in a short time. However, when the measurer is a general worker, it is necessary to carefully operate the stage while watching both the counter display and the field of view of the microscope or the monitor image.

[0005] As described above, there is a problem that the work efficiency of the measurement work of the work to be measured is highly dependent on the skill of the measurer in the measurement work. Several proposals have been made on this issue. Japanese Patent Application Laid-Open No. 9-257425 discloses a technique for visually displaying, on a monitor image, a direction in which a next measurement point is located when viewed from a current stage position, as a movement mark. This movement mark can indicate the direction and distance of the next measurement point when the current position displayed on the monitor image is used as the base point, and also displays the distance required for movement to the next measurement point. It is possible.

Japanese Patent Application Laid-Open No. 2000-9449 discloses a technique for operating a stage such that horizontal and vertical straight lines intersecting at the center of a monitor screen overlap a vertical line for positioning and a horizontal line for positioning. It has been disclosed. At this time, a moving instruction icon is displayed at both ends of the horizontal and vertical straight lines intersecting at the center of the monitor screen, so that an instruction of a stage moving operation can be given on the monitor screen.

With these techniques, the measurer can visually confirm the standard of the stage operation required to reach the next measurement point from the current position displayed on the monitor screen. However, some workpieces to be measured by the measuring microscope or the tool microscope have a large structure in the height direction, such as a mold.

In the measurement of a workpiece to be measured having a large structure in the height direction, the structure in the height direction must be obstructed to move linearly from one measurement point to the next measurement point. There is. In such a case, the measurer must operate the stage to the next measurement point while carefully selecting a path so that the workpiece and the objective lens do not contact each other. This is a problem particularly in a measurement microscope or a tool microscope in which measurement of a fine structure and measurement of a large structure are mixed.

[0009] In view of the above problems, it is an object of the present invention to enable a measurer having a low level of skill in measuring work to efficiently measure a work to be measured.

[0010]

A measurement support method according to one aspect of the present invention is a measurement program created using design data or a reference work conforming to the design data, and includes: According to the measurement program in which the measurement conditions at each of the measurement points and the measurement order of each of the measurement points are shown, when measuring the workpiece to be measured based on the design data, the measurement program Based on the measurement order being determined, determine a path for moving the observation position of the workpiece to be measured from the position of the measurement point measured immediately before to the position of the measurement point where the next measurement is performed, and determine the observation position. When moving along the determined route, a guide indicating the route and the current position of the moving observation position on the route. To solve the aforementioned problems by displaying the information.

According to the above method, the measurer refers to the guide information indicating the future movement route of the observation position, and thereby determines the movement required to reach the next measurement point at the observation position. Since the outline of the direction and distance can be grasped from the guide information, the operation to move the observation position smoothly can be performed even if the level of skill in the measurement work is low, and the work of measuring the work to be measured can be performed efficiently. It becomes possible.

In the above-described measurement support method according to the present invention, a condition to be determined when the route is determined is selected from the prepared route determination conditions, and the route is determined under the selected condition. May be determined. Here, the route determination condition may indicate an operation condition for moving the observation position, for example, an allowable moving direction of the observation position.

By doing so, for example, a path that can move the observation position with a relatively simple operation is determined for a less skilled operator, and a skilled person is required to determine the movement of the observation position. Therefore, it is possible to determine a route that requires a highly difficult operation, so that it is possible to determine a route according to the skill level of the measurer.

In the above-described measurement support method according to the present invention, when the position of the next measurement point to be measured is included in a range observable at the moved observation position, The guide information may be hidden.

By doing so, when the next measurement point becomes observable and the guide information is no longer needed, the guide information is not displayed. For example, the observation image and the guide information are superimposed on the same monitor screen. This eliminates the hassle of displaying unnecessary guide information when displaying it.

In the above-described measurement support method according to the present invention, when the moving observation position is moved along the path from a current position to a position of a measurement point where the next measurement is performed. May be further displayed.

Here, the length of the road may be expressed, for example, in terms of the amount of operation required to move the observation position. By doing so, the measurer can recognize in advance how much the observation position needs to be moved in order to reach the position of the measurement point where the next measurement is performed.

Further, in the above-described measurement support method according to the present invention, an avoidance area for inhibiting entry of the observation position to be moved is set, and in determining the path, a path that avoids the avoidance area is selected. You may do so. According to this configuration, it is possible to appropriately move the observation position even for a workpiece to be measured having a large structure in the height direction such as a mold.

A measuring system according to another aspect of the present invention includes an observation system for observing a workpiece to be measured,
Observation position control means for changing the observation position of the work to be measured in the observation system by moving the work to be measured relative to the observation system, and observation position detection means for detecting the position of the observation position And observation image display means for displaying an observation image of the observation position obtained by the observation system, a position of each measurement point on the workpiece to be measured, a measurement condition at each measurement point, and a measurement order of each measurement point. A path for determining a path for moving the observation position from the position of the measurement point measured immediately before to the position of the measurement point to be measured next based on the measurement order shown in the measurement program shown Determining means for moving the observation position along the determined path from the position of the immediately preceding measurement point to the position of the next measurement point The present invention as described above, comprising: guide information display means for displaying guide information indicating the route and the current position of the moving observation position on the route when moving. The same operation and effect as those of the measurement support method can be obtained, and the above-described problem is solved.

Note that even with a measurement support program for causing a computer to perform the same control as the procedure performed in the above-described measurement support method according to the present invention, the above-described problem can be solved by causing the computer to execute the program. Can be solved.

[0021]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows the configuration of an image measurement system that measures a work to be measured using a manual measurement microscope that moves a stage by manual operation. Here, a case where the present invention is implemented by this image measurement system will be described.

In FIG. 1, a work 5 to be measured is placed on an observation position control section comprising a Y-axis stage 1, an X-axis stage 2, a Y-axis moving handle 3, and an X-axis moving handle 4. When the measurer operates the X-axis moving handle 4 and the Y-axis moving handle 3, the X-axis stage 2 and the Y-axis stage 1
Moves, and the observation position of the work 5 to be measured is changed.

This observation position is detected by an observation position detection section comprising a two-axis counter 10 and displayed as a numerical value. Information indicating the observation position is sent via a counter value take-in cable 11 and transmitted to a computer main body 12. It is configured to capture. An observation system including an objective lens 6 and a microscope main body 7 is provided above the work 5 to be measured, and a measurer can observe an observation image (microscope image) of an observation position of the work 5 to be measured illuminated by an illumination system (not shown). )
It is possible to observe Further, the focal plane of the observation system is adjusted by using a Z-axis control mechanism (not shown).
Is relatively moved in the height direction (Z-axis direction) with respect to, it is possible to obtain an observation image focused on a desired height of the workpiece 5 to be measured. It is also possible to change the observation image to one with a desired magnification by replacement.

The observation image obtained by the microscope body 7 is
The image is taken by the CD camera 8 and sent to the computer main body 12 via the image capturing cable 9, and the computer main body 1
The observation image can be displayed on the monitor screen 16 of the monitor 15 by being taken in by the image processing board 13 mounted on the device 2 and subjected to image processing.

The storage device 14 incorporated in the computer main body 12 is prepared in advance based on a software program 24 (see FIG. 2) described later, design data, or a reference work manufactured using the design data. In addition, a measurement program 25 (not shown) expressing a measurement condition and a measurement procedure in which the positions of one or more measurement points for measuring the work 5 to be measured are indicated, and for selecting a movement path of the work to be measured. (Not shown) indicating the priority of the information is stored.

Next, the internal configuration of the image measurement system shown in FIG. 1 will be described. Referring to FIG.
2 includes a CPU 20, a storage device 14, and a memory 21. The image processing board 13 is connected to an external bus, and is controlled by the CPU 20. The observation position information transmitted from the two-axis counter 10 via the counter value capturing cable 11 is received by the CPU 20. The storage device 14 stores in advance a software program 24, a measurement program 25, and path selection information 26 (not shown). These are read out from the storage device 14 by the CPU 20 when the image measurement system is started, and are stored in the memory 21. Are stored respectively.

In the configuration shown in FIG. 2, an image processing board 13 constituting an observation image display section includes a CCD camera 8
The A / D converter 22 converts the observation image sent through the image taking cable 9 into multi-valued image data, and writes the data in the image memory 23 sequentially. The image data written in the image memory 23 is thereafter read out and sent to the monitor 15 via a monitor cable (not shown).
An observation image based on the image data is displayed on the monitor screen 16. The CPU 20 writes display data indicating various measurement tools for specifying measurement items such as edges, straight lines, and line widths and display data of guide information described later in the storage area of the multi-valued image data in the image memory 23. In addition, it is possible to superimpose and display the display of these various measurement tools and guide information on the observation image represented by the multi-valued image data. FIG. 3 shows an example of a display on the monitor screen 16 when the display data of the guide information is written in the image memory 23 in this manner.

FIG. 3 shows a monitor screen 16 during the measurement of the workpiece 5 according to the measurement program 25.
This is the screen displayed on the screen. On the monitor screen 16, a measurement point A30 measured immediately before is displayed. Also,
The measurement point A is displayed outside the upper right screen of the monitor screen 16.
30 is located next to the measurement point B31, and the observation position is slightly moved to the information in the same figure to monitor both the measurement point A30 and the measurement point B31 as shown in FIG. It is possible to display them simultaneously on the screen 16. Further, guide information is displayed in the lower right part of the monitor screen 16 shown in FIG.
The guide information includes a start point 32 of the path displayed corresponding to the position of the immediately preceding measurement point A30, an end point 33 of the path displayed corresponding to the position of the next measurement point B31 following the measurement point A30, Start point 32 to end point 33
This is a display including a path 34 for guiding the movement of the observation position up to and an observation position 35 indicating the position of the observation image currently displayed on the monitor screen 16.

Although not specifically shown, as guide information, not only the path to the next measurement point but also the path to each measurement point up to the end specified by the measurement program 25 is displayed together. Alternatively, this display is convenient for the measurer to grasp the entire movement route.

The guide information includes an observation position 35.
The amount of stage operation required to guide the observation position from the vertex 37 to the only vertex 37 on the path 34 and the amount of stage operation required to guide the observation position from the vertex 37 to the end point 33 are the X-axis movement handles. 4 and a handle operation amount display 36 using the rotation amount of the Y-axis moving handle 3 as a display unit is displayed near the route 34. Here, the handle operation amount display 36 is the number of vertices on the route 34 plus 1, that is, the starting point 32 of the route, all vertices,
The number of lines formed by connecting the end point 33 of the route along the route is displayed simultaneously. In FIG. 3, since the vertex is only one of the vertices 37, the handle operation amount display 36 is set to 2
Only one is displayed. Further, the steering wheel operation amount display 36 may be displayed only for the line segment in which the observation position 35 is displayed in an overlapping manner. In this case, the display of the handle operation amount may be displayed in large characters and colors as the sole handle operation amount display section 38 so that the measurer's attention is easily drawn.

The display unit of the handle operation amount display 36 does not necessarily need to be the rotation amount of the X-axis and Y-axis moving handles (4 and 3 in FIG. 1). For example, if the observation position control unit is configured using a joystick that can move the observation position only in some predetermined directions, the measurer uses the observation position control unit. An average speed when the observation position is moved in the direction may be acquired in advance, and the remaining time until reaching the next vertex (or the end point 33) predicted based on the average speed may be displayed. .

As shown in FIG. 4, when the measurement point A30 measured immediately before and the measurement point B31 to which measurement is next instructed are simultaneously displayed on the monitor screen 16, the guide information is displayed. It is also possible to hide it. For example, when a measurement tool used in the next measurement uses a tool that can be measured at an arbitrary position on the monitor screen 16, if the next measurement point B 31 is already displayed on the monitor screen 16, the observation position Is unnecessary. However, at the corners of the monitor screen 16, the measurement accuracy often deteriorates due to the influence of the aberration of the optical system included in the observation system. It is also possible to control the guide display so that the expected accuracy area 39 is specified in advance, and the guide display is hidden when the next measurement point enters the expected measurement accuracy area 39.

Next, a method of determining a route for guiding the movement of the observation position will be described with reference to FIG. FIG.
(A) is an example of a screen for setting conditions for a route calculation method. On the screen shown in FIG. 5A, as the route calculation method,
Two types of condyles, a beginner mode and an advanced mode, can be selected. Here, the beginner mode is X mode as shown in FIG.
In this mode, the observation position can be moved only in the positive and negative directions of the axis and in the positive and negative directions of the Y axis. In other words, by prohibiting the oblique movement that requires simultaneous operation of the X-axis moving handle 4 and the Y-axis moving handle 3, even a beginner can easily perform the operation of moving the observation position along the calculated route. You. On the other hand, in the advanced mode, as shown in FIG. 5C, in addition to the four directions of movement in the beginner mode, four directions of newly oblique movement are added, and the advanced mode is determined by the beginner mode. It can be expected that the moving distance to the next measurement point will be shorter than the moving distance. The route calculation method selected here is stored in the memory 21 of FIG. 2 as the route selection information 26, and is referred to when executing the route calculation.

In FIG. 5A, a "priority route setting" button is provided on the right side of the setting of the route calculation method.
An explanation of the priority route in the beginner mode is shown in FIG. As shown in the example of FIG.
Is at the origin of the coordinate system and the next measurement point B31 is located in the first quadrant, there are two types of shortest paths that can be taken in the above-mentioned beginner mode, path 1 and path 2. Which one of the two types of routes is selected is determined by the measurer presetting whether the first moving direction is the positive direction of the Y axis or the positive direction of the X axis. . The setting of the priority is not limited to the first quadrant, but is set for all the quadrants, that is, for the four moving directions. The setting of the priority of the moving direction may be performed, for example, in terms of operability or preference when the moving amount with respect to the rotation amount of the steering wheel is set differently in the X-axis direction and the Y-axis direction by the setting of the observation position control unit. It is set by the measurer taking into account.

In this embodiment, the route is determined in the route calculation according to the following priorities. Short-path route> A route with a small number of vertices on the route> A route with a long moving distance in the direction of higher priority set in the setting of the priority route> In a direction of higher priority set in the setting of the priority route In the case of FIG. 5D, the path lengths of the path 1 and the path 2 are the same, and the number of vertices on the path is also one and the same. Since the movement distances in the axial direction are also the same, one of the route 1 and the route 2 that moves first in the direction of higher priority set in the setting of the priority route is selected.

On the screen shown in FIG. 5A, there is provided a check box for giving an instruction to use the avoidance area. In addition, a static or dynamic avoidance area can be selected. The avoidance area will be described.

The avoidance area referred to here is the work 5 to be measured.
Is a region where there is a high risk that the workpiece 5 and the observation system physically collide when obtaining the observation image of For example,
As shown in FIG. 5E, there is a work 5 to be measured having a plane A having a certain height and a plane B having a height higher than the plane A, and measures an object to be measured on the plane A at a certain magnification. At the height of the objective lens 6 selected for
In such a case, an avoidance area is set as shown by a dashed line in FIG. 5E to avoid this contact. When the avoidance area is set, the route including the avoidance area is automatically excluded from the candidates when executing the route calculation.

For example, the setting of the avoidance area shown in FIG. 5E is applied as it is, and the measurement points A30 and B31 are read from the measurement program 25 stored in the memory 21 of FIG. It is assumed that the route from to the measurement point B31 is determined under the moving condition of the beginner mode. In this case, as shown in FIG. 6, two routes of route 1 and route 2 are first obtained as the shortest route. However, since the route 2 in FIG. 6 has entered the avoidance area, it is excluded from the candidates, and the route 1 is selected.

In the route calculation in consideration of the avoidance area, the route is determined according to the following priorities. A route that does not enter the avoidance area> A route with a short route> A route with a small number of vertices on the route> A route with a long moving distance in the direction of higher priority set in the priority route setting> A setting in the priority route setting As an example of actually obtaining a route with the above-described priority, a description will be given of FIG. 7 in which the setting of the measurement point and the avoidance area in FIG. 6 is replaced with the advanced mode.

First, the shortest path is obtained as in the beginner mode. Then, the route 1 and the route 2 are obtained as candidates. However, as shown in FIG. 7A, both of them enter the avoidance area, so that it is determined that they do not satisfy the highest priority, and are not candidates.

Next, in order to find a route that does not enter the avoidance area, the avoidance area boundary line intersecting with the route 1 (FIG. 7A)
End point of the line segment of the dashed-dotted line) and the end point of the line segment of the boundary line of the avoidance area crossed by the path 2. In this case, the end points related to both the route 1 and the route 2 are the end points 1 and 2.

Here, all the shortest paths passing through the end point 1 or the end point 2 as the relay points between the measurement points A30 and B31 are obtained. Here, on the route passing through the end point 1, the shortest route from the end point 1 to the measurement point B31 enters the avoidance area, and is therefore again excluded from the candidate. In this case, the end point of the dash-dot line segment of the avoidance area intersecting with the route is obtained in the same manner as described above. The end points obtained at this time are the end point 1, the end point 2, and the end point 3. However, the end point 2 which is a pair of the end point 1 and the end point 1 which are already passing points is excluded, and only the end point 3 is obtained. Therefore, endpoint 3 is newly registered as a relay point, and the shortest path connecting endpoint 3 and measurement point B31 is obtained. Here also, since the shortest route enters the avoidance area, the end point 4 is newly registered as a relay point as in the past. Since the shortest path from the end point 4 to the measurement point B31 does not enter the avoidance area, an effective path 3 is obtained.

On the other hand, when the end point 2 is a relay point,
Since the shortest route from to the measurement point B31 does not enter the avoidance area, an effective route is required. Representative examples of this route include two routes, route 4 and route 5. FIG. 7B shows the routes 3, 4, and 5 which are the effective routes obtained as described above.

Although none of these three routes enters the avoidance area, routes 4 and 5 have equal distances, and route 3 has a longer distance than both. The route 4 has three vertices while the route 5 has two. If the above features are applied to the above-described priorities, path 5> path 4> path 3, and path 5 is selected.

As described above, the route avoiding the avoidance area between the two measurement points read from the measurement program 25 stored in the memory 21 of FIG. 2 is obtained according to the route selection information 26. The software program 24 that causes the CPU 20 to perform the process of determining the route for guiding the movement of the observation position as described above will be described.

FIG. 8 is a flowchart showing the contents of a first example of the route determination process performed by the CPU 20. This process is for determining a route when the avoidance area is not set, and is performed by the CPU 20 reading out the software program 24 from the memory 21 and executing it.

First, in S101, the selection of mode setting and the setting contents of the priority route, which are the contents of the condition setting for route determination set along the screen shown in FIG. 5A, are acquired. In S102, the measurement program 25 is read from the memory 21, and the position of the measurement point A30 at which the measurement was performed immediately before and the position of the measurement point B31 to be measured next are acquired, and the measurement point B31 is obtained from the measurement point A30. The shortest route to is required. The resulting path is a variable A (i) (i = 1, 2,...)
Are stored one by one.

Here, the route A obtained in the previous step
It is determined in S103 whether or not (i) is unique. If the determination result is Yes, this unique route A (i) is substituted for the variable R in S104, and then the process proceeds to S112. On the other hand, when the determination result of S103 is N
If it is o, the process proceeds to S105.

In S105, a route having the minimum number of vertices through which the route passes is selected from the plurality of routes A (i), and the selected route is defined as a variable B (j) (j = 1, 2,...). )
Are stored one by one. Here, it is determined in S106 whether or not there is only one route B (j) obtained in the previous step, and if the determination result is Yes, S107.
, This single path B (j) is substituted for the variable R, and the process then proceeds to S112. On the other hand, if the decision result in S106 is No, the process proceeds to S108.

In S108, a plurality of routes B are set based on the setting contents of the priority route obtained in the process of S101.
Of (j), the route having the longest moving distance in the direction set with a higher priority is selected, and the selected routes are stored one by one in variables C (k) (k = 1, 2,...). Is done.

Here, the route C obtained in the previous step
It is determined in S109 whether or not (k) is unique. If the determination result is Yes, this unique route C (k) is substituted for the variable R in S110, and then the process proceeds to S112. On the other hand, when the determination result of S106 is N
If it is o, the process proceeds to S111.

In S111, a plurality of routes C are set based on the setting contents of the priority route obtained in the process of S101.
In (k), only one route that moves first in the direction of higher priority is selected, and the selected route is substituted for the variable R. In S112, display data representing the route substituted for the variable R is written to the image memory 23 and displayed on the monitor screen 16 of the monitor 15 as the determined route. Then, the route determination processing ends.

Next, FIG. 9 will be described. The figure shows a CPU
20 is a flowchart showing the processing contents of a second example of the path determination processing performed by the CPU 20; This process is for determining a route when the avoidance area is set, and this process is also performed by the CPU 20 reading out the software program 24 from the memory 21 and executing it.

First, in S201, S101 of FIG.
Similarly to the above, the selection of the mode setting and the setting contents of the priority route, which are the contents of the condition setting for the route determination set along the screen shown in FIG. In S202, the definition information of the range of the avoidance area is obtained. A method for acquiring the information on the avoidance area will be described later.

In S203, the measurement program 25 is read from the memory 21, and the position of the measurement point A30 at which the measurement was performed immediately before and the position of the measurement point B31 at which the measurement is performed next are obtained. The shortest path to the measurement point B31 is obtained. The resulting path is a variable D (l) (l = 1, 2,...)
Are stored one by one.

Here, the route D obtained in the previous step
In (1), it is determined in S204 whether there is a route that does not enter the avoidance area. This determination result is Y
If es, the route A (i) (i = 1, 2,
…). After the process of S205 is completed, the process proceeds to S103 of FIG. 8, and thereafter, the same process as the first example of the above-described route determination process is performed by the CPU 20. On the other hand, if the result of the determination process in S204 is N
If it is o, the process proceeds to S206.

In S206, among the line segments indicating the boundaries of the avoidance area, the end points of the line segment that the path D (l) crosses first are detected for all D (l), and the detected end points are set to the variable P.
(Q) (q = 1, 2,...). In S207, the shortest path from the measurement point A30 to the measurement point B31 via the end point P (q) is obtained. The paths obtained as a result are additionally stored one by one in a variable E (m) (m = 1, 2,...).

Here, all the Es for which the route is stored
Whether or not (m) does not enter the avoidance area is determined in S2.
08. If the result of this determination is Yes, the route E (m) that does not enter the avoidance area is assigned to the variable A (i) in S209. After finishing the process of S209, the process proceeds to S103 of FIG. 8, and thereafter, the same process as the first example of the above-described route determination process is performed by the CPU 2.
Performed by 0. On the other hand, if the result of the determination process in S208 is No, the process proceeds to S210.

In S210, the end points P (q) through which the route E (m) that invades the avoidance area are additionally stored in the variables Ph (r) (r = 1, 2,...) One by one. Is done. In S211, the end point excluding Ph (r) and the end point of the line segment that crosses the path E (m) first among the line segments indicating the boundary of the avoidance area enters the avoidance area E (m).
Is detected, and the detected end point is newly set in the variable P
(Q). Then, after completing this process, the process returns to S207, and the above-described process is repeated.

The above processing is the second example of the path determination processing. Next, a method of giving information about the range of the avoidance area to the image measurement system shown in FIG. 1 will be described. In the example of the screen shown in FIG. 5A, a file (avoidance area file) storing information indicating the avoidance area is stored in the storage device 1.
And a "new registration" button operated to give a request to newly register the information indicating the avoidance area at the time of measurement. I have. in this way,
The avoidance area file can be prepared together with the creation of the measurement program, or can be newly registered immediately before measuring the work to be measured.

Referring now to FIG. FIG. 11 is a diagram for explaining a registration method when a new avoidance area is registered. In this method, an avoidance area is registered while observing a workpiece to be measured by the image measurement system shown in FIG. An outline of the registration procedure will be described with reference to a state transition diagram shown in FIG.

In FIG. 10B, a state in which the screen shown in FIG. 5A is displayed is referred to as a base state (A), which is referred to as an initial state. This initial state (A)
In FIG. 5, when the "new registration" button provided on the screen shown in FIG. 5A is operated, a new registration event of the avoidance area is executed, and the state is changed from the initial state (A) to the alignment (on the work to be measured). (Defining a coordinate system).

In the state (B) during alignment,
As shown in FIG. 10 (a), the measurer gives an instruction to sequentially register the positions while moving the observation position to the image measurement system, so that the X-axis having a positive direction from passing through is determined. The straight line parallel to and passing through the determined X axis is determined as the Y axis. here,
The positive direction of the Y axis is a direction heading from the intersection with the X axis.

When the registration of the position is completed, the alignment is completed, and the state transits from the state of alignment (B) to the state of avoidance area coordinate registration (C) by an alignment completion event. In this state (C), the coordinates indicating the position while moving the observation position are registered in order, and then the coordinate registration is completed by selecting “coordinate registration complete” from a pop-up menu (not shown). 2 is stored in the memory 21. When the coordinate registration is completed, the state returns to the initial state (A) from the state (C) in which the avoidance area coordinates are being registered by the coordinate registration completion event.

The work of the above procedure may be performed using an image obtained by photographing the work to be measured by a digital camera or the like without observing the work to be measured. As described above, if this image measurement system embodying the present invention is used, the path from the immediately preceding measurement point to the next measurement point is displayed on the monitor screen at the time of measurement. The measurement work can be advanced only by gazing at only the object, and a path in which the workpiece to be measured does not contact the observation system is automatically selected and displayed, thereby contributing to an improvement in the efficiency of the measurement work.

In the example of the screen shown in FIG. 5A, in addition to the above-mentioned screens, there are radio buttons for selecting either a static avoidance area or a dynamic avoidance area as an avoidance area. Is provided. Here, the static avoidance area is the one shown in FIG.
This is an avoidance area that occurs when the distance between the observation system and the work to be measured is fixed at a certain distance, such as the avoidance area registered in the example shown in FIG. Therefore, for example, if the height of the observation system is changed during measurement so as to be higher than the plane B in FIG. 10A, the avoidance area can change according to the height. Each time, a complicated operation such as registering the avoidance area and switching as necessary is generated.

On the other hand, FIGS. 11 (a), (b),
In the case where the three-dimensional shape data of the workpiece to be measured as shown in the three views of (c) is in the form of, for example, three-dimensional CAD data, FIG. 11D and FIG. As shown, the avoidance area when the height of the observation system is Z1,
The avoidance area when the height of the observation system is Z2 can be dynamically obtained, and an appropriate avoidance area can be used according to a change in the height of the observation system. FIG. 5 (a)
When a dynamic avoidance area is selected in the screen example shown in FIG. 1, it is instructed to cause the image measurement system shown in FIG. 1 to perform such avoidance area setting processing based on the three-dimensional shape data of the work to be measured. Is done.

The software program 24 including the route determination processing shown in FIGS. 8 and 9 is recorded on a recording medium readable by the computer 12, and the program is read out from the recording medium by the computer 12 and executed. It is also possible to implement the present invention.

Examples of a recording medium on which a software program can be recorded and which can be read by a computer include a memory such as a ROM or a hard disk device provided as an internal or external accessory device in the computer, and a floppy (registered trademark) disk. (Floppy D
isk), MO (magneto-optical disk), CD-ROM, DV
A portable storage medium such as a D-ROM can be used.

The recording medium may be a storage device provided in a program server connected to a computer via a communication line. In this case, a transmission signal obtained by modulating a carrier with a data signal representing a software program is transmitted through a communication line as a transmission medium, and a computer demodulates a transmission signal sent from a program server. The software program can be executed by reproducing the control program.

[0071]

As described in detail above, the present invention provides
A measurement program created using design data or a reference work adapted to the design data, wherein the position of each measurement point, the measurement conditions at each measurement point, and the measurement order of each measurement point are shown. According to the measurement program, when measuring the workpiece to be measured manufactured based on the design data, the next measurement is performed from the position of the measurement point measured immediately before based on the measurement order shown in the measurement program. Determining a path for moving the observation position of the workpiece to be measured to the position of the measurement point to be performed; and moving the observation position along the determined path, the observation being moved with the path. Guide information indicating the current position of the position on the route is displayed.

Thus, according to the present invention, even a measurer having a low level of skill in the measurement operation can perform an operation of smoothly moving the observation position, and can efficiently perform the measurement operation on the work to be measured. Become like

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a configuration of an image measurement system that implements the present invention.

FIG. 2 is a diagram showing an internal configuration of the image measurement system shown in FIG.

FIG. 3 is a diagram showing a display example of guide information.

FIG. 4 is a diagram showing a screen display example when guide information is hidden.

FIG. 5 is a diagram illustrating a route determination technique.

FIG. 6 is a diagram illustrating a route determination procedure in a beginner mode.

FIG. 7 is a diagram illustrating a route determination procedure in the expert mode.

FIG. 8 is a flowchart illustrating processing contents of a first example of a path determination processing.

FIG. 9 is a flowchart showing the processing content of a second example of the route determination processing.

FIG. 10 is a diagram illustrating an example of a method of setting an avoidance area.

FIG. 11 is a diagram illustrating a setting example of a dynamic avoidance area using three-dimensional CAD data.

[Explanation of symbols]

 Reference Signs List 1 Y-axis stage 2 X-axis stage 3 Y-axis movement handle 4 X-axis movement handle 5 Workpiece to be measured 6 Objective lens 7 Microscope body 8 CCD camera 9 Image capture cable 10 2-axis counter 11 Counter value capture cable 12 Computer body 13 Image processing Board 14 Storage device 15 Monitor 16 Monitor screen 20 CPU 21 Memory 22 AD conversion unit 23 Image memory 24 Software program 25 Measurement program 26 Route selection information 30 Measurement point A 31 Measurement point B 32 Route start point 33 Route end point 34 Route 35 Observation Position 36 Handle operation amount display 37 Vertex 38 Only handle operation amount display 39 Expected measurement accuracy area

Claims (9)

[Claims] 1. A measurement program created by using design data or a reference work adapted to the design data, wherein a position of each measurement point, a measurement condition at each measurement point, and a measurement order of each measurement point are determined. When measuring a workpiece to be measured manufactured based on the design data according to the measurement program shown, the position of the measurement point measured immediately before based on the measurement order shown in the measurement program To determine the path for moving the observation position of the workpiece to be measured to the position of the measurement point at which the next measurement is to be performed. When the observation position is moved along the determined path, the path and the movement are determined. Displaying a guide information indicating a current position of the observation position in the route on the route. 2. The method according to claim 1, wherein a condition to be determined when the route is determined is selected from the prepared route determination conditions, and the route is determined under the selected condition. Item 2. The measurement support method according to Item 1. 3. The measurement support method according to claim 2, wherein the condition for determining the route indicates an allowable moving direction of the observation position. 4. The guide information is not displayed when the position of the measurement point at which the next measurement is to be performed is included in a range that can be observed at the moved observation position. The measurement support method according to claim 1. 5. The method according to claim 1, further comprising the step of displaying a length of a path when the observation position being moved is moved along the path from a current position to a position of a measurement point at which the next measurement is performed. The measurement support method according to claim 1, wherein: 6. The measurement support method according to claim 5, wherein the length of the path is expressed in units of an operation amount of an operation required to move the observation position. 7. The method according to claim 1, wherein an avoidance area for prohibiting entry of the observation position to be moved is set, and a path avoiding the avoidance area is selected in determining the path. Measurement support method. 8. An observation system for observing a work to be measured, and an observation position for changing an observation position of the work to be measured in the observation system by moving the work to be measured relative to the observation system. Control means, observation position detection means for detecting the position of the observation position, observation image display means for displaying an observation image of the observation position obtained by the observation system, position of each measurement point in the workpiece to be measured, The measurement to be performed next from the position of the measurement point that was measured immediately before based on the measurement conditions at each measurement point and the measurement order indicated by the measurement program indicating the measurement order of each measurement point Path determination means for determining a path for moving the observation position until reaching the position of a point; and determining the observation position along the determined path. Guide information display means for displaying guide information indicating the path and the current position of the moving observation position on the path when moving from the position of the previous measurement point to the position of the next measurement point And a measurement system comprising: 9. A measurement program created by using design data or a reference work adapted to the design data, wherein a position of each measurement point, a measurement condition at each measurement point, and a measurement order of each measurement point are determined. According to the measurement program shown, a measurement support program to be performed by the computer by causing the computer to perform the measurement support when measuring the workpiece to be measured based on the design data, Based on the measurement order shown in the measurement program, a path for moving the observation position of the workpiece to be measured from the position of the measurement point measured immediately before to the position of the measurement point where the next measurement is performed is determined. Processing, and moving the observation position along the determined route. Measurements support program for causing a processing for displaying the guide information indicating the current position in 該経 path of the observation position is being, to the computer.