JP7204203B2 - Heaters and fluid controllers - Google Patents

Description

The present disclosure relates to heaters and fluid control devices.

A film heater has been proposed that includes a heater wire that is bent into a planar shape and an adhesive film layer that sandwiches the heater wire (see, for example, Patent Document 1).

JP 2009-176502 A

However, when the film heater of Patent Document 1 is used to heat a fluid control device including a plurality of joints and a plurality of fluid control devices, it is necessary to design a film heater suitable for the shape of the fluid control device. As a result, design time for the fluid control device increases, and there are restrictions on subsequent design changes and modifications.

Accordingly, an object of the present disclosure is to provide a versatile heater and a fluid control device including the heater.

To solve the above object, a heater according to one aspect of the present disclosure includes a first circuit layer having a first positive wire and a first negative wire, a plurality of second positive wires, a plurality of second negative wires, and a second circuit layer having a plurality of PTC resistors; Two minus wires each extend in a second direction intersecting the first direction, the plurality of second plus wires and the plurality of second minus wires are alternately arranged along the first direction, and each PTC A resistor is arranged between the second plus line and the second minus line that are adjacent in the first direction, and each connection line is positioned between the first circuit layer and the second circuit layer. Then, each second plus line and the first plus line are electrically connected, and each second minus line and the first minus line are electrically connected.

The first plus line is positioned between both ends of each second plus line in the second direction when viewed from a direction orthogonal to both the first direction and the second direction, and the first minus line may be positioned between both ends of each second minus line in the second direction when viewed from a direction orthogonal to both the first direction and the second direction.

A film substrate having a first major surface and a second major surface opposite to the first surface, wherein the first circuit layer is formed on the first major surface and the second circuit layer is formed on the first major surface. may be formed on the second main surface.

A power supply connection for receiving power to the first plus line and the first minus line, wherein the power supply connection is an end of the first plus line and the first minus line in the first direction. may be provided in

A fluid control device according to one aspect of the present disclosure includes a gas line having a plurality of joints arranged in a row, a plurality of fluid control devices fixed to the plurality of joints, and the plurality of fluid control devices. a pair of the above-described heaters provided on both sides along the direction in which the devices are arranged to heat the plurality of joints and the plurality of fluid control devices, wherein the first direction is the plurality of fluid control devices; The second direction is parallel to the direction in which the devices are arranged, and the second direction is parallel to the direction in which the plurality of fluid control devices contact each other.

Each heater may have a substantially rectangular shape, and a notch may be formed at a position avoiding the first plus wire and the first minus wire.

A manifold having a plurality of the gas lines and connected across the plurality of gas lines may be further provided, and the manifold may penetrate through the cutout.

According to the present disclosure, it is possible to provide a versatile heater and a fluid control device including the same.

1 is a perspective view of a fluid control device according to an embodiment; FIG. FIG. 4 is a perspective view of a base plate; FIG. 4 is a perspective view of one gas line attached to the base plate; It is a front view of a heater. FIG. 4 is a front view of an uncut heater; (a) is a schematic diagram of the first circuit layer of the heater, and (b) is a schematic diagram of the second circuit layer of the heater. Fig. 2 is a perspective view of a heater clip;

A heater and a fluid control device according to embodiments of the present disclosure will be described with reference to the drawings. In the following description, the direction in which the gas line 3 extends is defined as a first direction D1, the direction orthogonal to the flat plate portion 2A is defined as a second direction D2, and the direction parallel to the flat plate portion 2A and orthogonal to the first direction D1 is defined as a third direction. Let the direction be D3.

FIG. 1 is a perspective view of a fluid control device 1 according to this embodiment.
FIG. 2 is a perspective view of the base plate 2. FIG.

As shown in FIG. 1 , the fluid control device 1 includes a base plate 2 , a plurality (two lines) of gas lines 3 , a heater section 4 , a manifold 16 and a plurality of heater clips 20 .

As shown in FIG. 2, the base plate 2 is made of a metal material such as stainless steel, and has a flat plate portion 2A and a pair of support portions 2B. The flat plate portion 2A has a rectangular shape in plan view, and is formed with a plurality of pairs of slits 2c and a plurality of pairs of bolt screw holes 2d. In this embodiment, the flat plate portion 2A is formed with three pairs of slits 2c and six pairs of bolt screw holes 2d. In addition, in FIG. 2, only the pair of bolt screw holes 2d are given reference numerals. Each supporting portion 2B has a substantially rectangular shape, is connected to the long side of the flat plate portion 2A, and is perpendicular to the flat plate portion 2A.

FIG. 3 is a perspective view of one gas line 3 attached to the base plate 2 .

The gas line 3 includes an inlet pipe 5, an outlet pipe 6, a plurality of joints 7, and a plurality of fluid control devices 8-14.

The inlet pipe 5 serves as a fluid inlet in the gas line 3 . The outlet pipe 6 serves as a fluid outlet in the gas line 3 . The plurality of joints 7 are block-shaped, located between the inlet pipe 5 and the outlet pipe 6, and arranged in a row on the flat plate portion 2A of the base plate 2. As shown in FIG. A gas flow path is formed in each joint 7 . Each joint 7 is fixed to the base plate 2 by screwing a pair of bolts (not shown) through a pair of bolt screw holes 2d.

The plurality of fluid control devices 8 to 14 include a manual valve 8, automatic valves (for example, fluid-driven automatic valves) 9 to 11, manual regulators (reducing valves) 12, pressure gauges 13, and flow rate control devices. (For example, a mass flow controller (MFC: Mass Flow Controller)) 14 . The automatic valve 10 is a three-way valve. As shown in FIG. 3, fixing portions 8A to 14A are provided for each of the fluid control devices 8 to 14, and bolts 15 are attached to the fixing portions 8A to 14A (only one bolt is given a reference number for the sake of simplification of the drawing). ) are inserted into the corresponding joints 7, respectively.

A manifold 16 is provided for a plurality of gas lines 3 . The manifold 16 is positioned between adjacent joints 7 and connected to the fixed portion 10A of the automatic valve 10 . Purge gas is supplied to manifold 16 and supplied to a plurality of three-way valves.

As shown in FIG. 1, the heater section 4 includes an aluminum block 4A, a pair of heater support plates 4B, a pair of heaters 4C, and a pair of heat insulation covers 4D.

The aluminum block 4A is provided so as to cover the inlet pipe 5. As shown in FIG.

The pair of heater support plates 4B are made of thin sheet metal such as stainless steel, extend in the first direction D1, and have a substantially rectangular shape. A pair of heater support plates 4B are provided on both side surfaces of the gas line 3 along the first direction D1. Specifically, each heater support plate 4B is in contact with the side surface of the aluminum block 4A, the side surface of the joint 7, the side surface of the fixed portions 8A-14A of the fluid control devices 8-14, and the side surface of the MFC 14.

The pair of heaters 4C are, for example, PTC heaters, and have substantially the same shape as the pair of heater support plates 4B. The pair of heaters 4C are located outside the pair of heater support plates 4B and are in contact with the pair of heater support plates 4B. Thereby, the pair of heaters 4C are supported by the pair of heater support plates 4B. The heat from the pair of heaters 4C heats the gas (for example, hydrogen fluoride) flowing through the inlet pipe 5 and passing through the joint 7 and the fluid control devices 8 to 14, and liquefies the gas that is liquefied at room temperature. is prevented.

The pair of heat insulating covers 4D are made of a heat insulating material such as silicone sponge, and have substantially the same shape as the pair of heater support plates 4B. A pair of heat insulating covers 4D are positioned outside the pair of heaters 4C and are in contact with the pair of heaters 4C. The pair of heat insulation covers 4D suppress the heat of the pair of heaters 4C from being transferred to the outside.

The distance between the pair of slits 2c is substantially equal to the width of the gas line 3 with the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulating covers 4D attached. That is, the distance between the pair of slits 2c in the third direction D3 is the width of the joint 7 in the third direction D3, the thickness of the pair of heater support plates 4B, the thickness of the pair of heaters 4C, and the thickness of the pair of heat insulation covers 4D. It is configured substantially equal to the total length of the thickness.

Next, the heater 4C will be explained.

FIG. 4 is a front view of the heater 4C.
FIG. 5 is a front view of an uncut heater 30. FIG.
6A is a schematic diagram of the first circuit layer 32 of the heater 30, and FIG. 6B is a schematic diagram of the second circuit layer 33 of the heater 30. FIG.

As shown in FIGS. 5 and 6, the uncut heater 30 has a substantially rectangular shape and includes a film substrate 31, a first circuit layer 32, a second circuit layer 33, a plurality of connection lines 34, and a connector. 35 and a pair of insulating sheets 36 . In FIGS. 5 and 6, only one connection line 34 is given a reference number.

The film substrate 31 has a substantially rectangular shape and is made of, for example, a polyimide film. The film substrate 31 has a first major surface 31A and a second major surface 31B located on the opposite side of the first major surface 31A.

As shown in FIG. 6A, the first circuit layer 32 is formed on the first main surface 31A of the film substrate 31. As shown in FIG. The first circuit layer 32 has a first positive wire 32A and a first negative wire 32B. The first plus line 32A and the first minus line 32B each extend along the first direction D1.

As shown in FIG. 6B, the second circuit layer 33 is formed on the second major surface 31B of the film substrate 31. As shown in FIG. The second circuit layer 33 has a plurality of second plus wires 33A, a plurality of second minus wires 33B, and a plurality of PTC resistors 33C. Each of the second plus lines 33A and each of the second minus lines 33B extends in a second direction D2 perpendicular to (crossing) the first direction D1. The plurality of second plus lines 33A and the plurality of second minus lines 33B are alternately arranged along the first direction D1. In FIGS. 4 to 6, only one second plus line 33A, only one second minus line 33B, and only one PTC resistor 33C are denoted by reference numerals.

The first plus line 32A is positioned between both ends of each second plus line 33A in the second direction D2 when viewed from a direction perpendicular to both the first direction D1 and the second direction D2. The first minus wire 32B is positioned between both ends of each of the second minus wires 33B in the second direction D2 when viewed from a direction orthogonal to both the first direction D1 and the second direction D2. In the present embodiment, the first plus line 32A and the first minus line 32B are located near the approximate center of the film substrate 31 in the second direction D2.

Each PTC resistor 33C is made of semiconductor ceramic containing barium titanate as a main component, and has a positive temperature coefficient characteristic. That is, each PTC resistor 33C has the property that the resistance value rises sharply at a specific temperature (Curie temperature) and the temperature rise stops. Each PTC resistor 33C has a strip shape, extends along the second direction D2, and is arranged between the second plus line 33A and the second minus line 33B adjacent to each other in the first direction D. As shown in FIG.

In the film substrate 31, when viewed from a direction perpendicular to both the first direction D1 and the second direction D2, the intersection of the first plus wire 32A and the plurality of second plus wires 33A, A plurality of through holes 31c penetrating through the film substrate 31 in the thickness direction are formed at the intersections of the minus wires 32B and the plurality of second minus wires 33B.

Each connection line 34 is arranged in each through hole 31c to electrically connect each second plus line 33A and first plus line 32A, and electrically connect each second minus line 33B and first minus line 32B. connected to each other.

The connector 35 corresponds to a power supply connection portion, and is provided at an end portion of the film substrate 31 in the first direction D1. A positive power cable 35A and a negative power cable 35B are connected to the connector 35 .

Each insulating sheet 36 has the same shape as that of the film substrate 31 and is made of, for example, a polyimide film. is attached to the second main surface 31B of the film substrate 31 so as to cover the .

By cutting the heater 30 so as to match the shape of the gas line 3, the heater 4C shown in FIG. 4 is formed. A plurality of substantially rectangular notches 4e1 to 4e5 are formed in the heater 4C. The notches 4e1 and 4e2 are formed on one side (lower side) of the heater 4C in the second direction D2, and the notches 4e3 to 4e5 are formed by further notching the portions where the notch 4e1 is formed. . Cutouts 4e1 to 4e5 cut out portions of the plurality of second plus wires 33A and second minus wires 33B. All the cutouts 4e1 to 4e5 are formed at positions avoiding the first plus line 32A and the first minus line 32B. As shown in FIG. 1, the manifold 16 penetrates the notch 4e4.

Next, the heater clip 20 will be explained.

7 is a perspective view of the heater clip 20. FIG.

As shown in FIG. 7, the heater clip 20 is formed by bending a thin sheet metal such as stainless steel, and includes a pair of side plate portions 21, a pair of protrusions 22, a connecting portion 23, and a pair of extensions. 24.

The pair of side plate portions 21 extend in the vertical direction (predetermined direction) and are parallel to the outer surfaces of the pair of heat insulating covers 4D. Each protruding portion 22 is provided so as to protrude inward from the lower end of each side plate portion 21 and is perpendicular to the pair of side plate portions 21 . The connecting portion 23 extends along the third direction D3 and is parallel to the flat plate portion 2A of the base plate 2 . The connecting portion 23 connects the upper ends of the pair of side plate portions 21 . The width of the connecting portion 23 in the first direction D1 is approximately half the width of each side plate portion 21 in the first direction D1. The pair of extending portions 24 extend upward from the upper ends of the pair of side plate portions 21 and are parallel to the outer surfaces of the pair of heat insulating covers 4D. The vertical length of each extending portion 24 is approximately half the length of the connecting portion 23 in the third direction D3.

In each heater clip 20, when an operator pinches the pair of extending portions 24 and applies a force to bring them closer to each other, the pair of side plate portions 21 are elastically deformed and spread apart from each other. In this state, the heater clip 20 is lowered toward the gas line 3 in contact with the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulating covers 4D, and the protrusions 22 are formed into corresponding slits. 2c, and the pair of extensions 24 are separated. As a result, the pair of side plate portions 21 of the heater clip 20 compress the joint 7, the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulation covers 4D by elastic force.

According to the heaters 4C and 30 as described above, by forming the first plus wire 32A and the first minus wire 33A close to each other, some of the plurality of second plus wires 33A and second minus wires 33B can be cut and used. Thereby, heaters 4C and 30 having versatility can be provided. Therefore, there is no need to manufacture a dedicated product that matches the area to be heated, and the design time of the fluid control device 1 can be shortened.

When viewed from the third direction D3, the first plus line 32A is positioned between both ends of each of the second plus lines 33A in the second direction D2. , between both ends of each second minus line 33B in the second direction D2. As a result, the portion of the heater 30 outside the first plus wire 32A and the first minus wire 32B in the second direction D2 can be cut.

A film substrate 31 is further provided, with a first circuit layer 32 formed on the first major surface 31A and a second circuit layer 33 formed on the second major surface 31B. Therefore, heaters 4C and 30 having flexibility can be provided.

Since the connector 35 is provided at the end of the first plus line 32A and the first minus line 32B in the first direction D1, it can be cut at any position in the second direction D2, further improving versatility. can be made

The heater 4C has a substantially rectangular shape, and cutouts 4e1 to 4e5 are formed at positions avoiding the first plus line 32A and the first minus line 32B, so that only the portions of the fluid control device 1 that need to be heated are heated. It is possible to easily provide the heater 4C for heating.

Further provided is a manifold 16 connected across a plurality of gas lines 3, and the manifold 16 passes through the notch 4e4, so that the heater 4C that is applicable to the fluid control device 1 provided with the manifold 16 can be easily provided. can do.

Note that the present disclosure is not limited to the embodiments described above. Those skilled in the art can make various additions, modifications, etc. within the scope of the present disclosure.

For example, the first plus wire 32A and the first minus wire 32B were positioned near the approximate center in the second direction D2 on the film substrate 31, but are positioned at either end in the second direction D2. may

Although the connector 35 is provided at the end in the first direction D1 with respect to the film substrate 31, it may be connected to either end in the second direction D2.

Although the heaters 4C and 30 are provided with the film base material 31, the base material is not limited to the film base material 31 and may be another base material. The second plus wire 33A and the second minus wire 33B extend in the direction perpendicular to the first plus wire 32A and the first minus wire 32B, but they may extend in the direction crossing the first plus wire 32A and the first minus wire 32B.

In the above embodiment, the fluid control device 1 includes manual valves, automatic valves, pressure gauges, regulators, and mass flow controllers as fluid control devices, but may also include filters and the like.

1: fluid control device 4C, 30: heater 4e1 to 4e4: notch 7: joint 8 to 14: fluid control device 16: manifold 31: film substrate 31A: first main surface 31B: second 2 main surfaces 32: first circuit layer 32A: first plus wire 32B: first minus wire 33: second circuit layer 33A: second plus wire 33B: second minus wire 33C: PTC resistor , 34: Connection line, 35: Connector, D1: First direction, D2: Second direction

Claims (7)

a first circuit layer having a first positive wire and a first negative wire;
a second circuit layer having a plurality of second positive wires, a plurality of second negative wires, and a plurality of PTC resistors;
a plurality of connection lines; and
the first plus wire and the first minus wire each extend in a first direction;
Each second plus line and each second minus line extend in a second direction crossing the first direction, and the plurality of second plus lines and the plurality of second minus lines extend along the first direction. staggered by
each PTC resistor is arranged between the second plus line and the second minus line that are adjacent in the first direction;
Each connecting line is located between the first circuit layer and the second circuit layer, electrically connecting each second positive line and the first positive line, and connecting each second negative line and the first negative line. A heater that is electrically connected to a wire. the first plus line is positioned between both ends of each second plus line in the second direction when viewed from a direction orthogonal to both the first direction and the second direction;
2. The first minus wire according to claim 1, wherein said first minus wire is located between both ends of said second minus wire in said second direction when viewed from a direction orthogonal to both said first direction and said second direction. heater. further comprising a film substrate having a first main surface and a second main surface located on the opposite side of the first surface;
The first circuit layer is formed on the first main surface,
3. The heater according to claim 1, wherein said second circuit layer is formed on said second main surface. further comprising a power feed connection for receiving power to the first positive line and the first negative line;
4. The heater according to any one of claims 1 to 3, wherein the power supply connecting portion is provided at ends of the first plus line and the first minus line in the first direction. a gas line having a plurality of joints arranged in a row and a plurality of fluid control devices fixed to the plurality of joints;
A pair of heaters according to any one of claims 1 to 4, which are provided on both sides along the direction in which the plurality of fluid control devices are arranged and heat the plurality of joints and the plurality of fluid control devices. and
The fluid control device, wherein the first direction is parallel to a direction in which the plurality of fluid control devices are arranged, and the second direction is parallel to a direction in which the plurality of fluid control devices contact each other. 6. The fluid control device according to claim 5, wherein each heater has a substantially rectangular shape, and a notch is formed at a position avoiding the first plus wire and the first minus wire. Having a plurality of the gas lines,
further comprising a manifold connected across the plurality of gas lines,
7. The fluid control device according to claim 6, wherein said manifold extends through said notch.

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