JP7365662B2 - Heater fixtures and fluid control devices - Google Patents

Description

The present disclosure relates to heater fixtures and fluid control devices.

An integrated valve has been proposed in which a plurality of clips are provided between a mounting plate and a base plate, and a heater block is attached to an integrated unit on the base plate using the plurality of clips (see, for example, Patent Document 1).

Japanese Patent Application Publication No. 11-294615

However, in the integrated valve of Patent Document 1, it is necessary to provide a plurality of clips between the mounting plate and the base plate, making the assembly work complicated and time-consuming.

Therefore, an object of the present disclosure is to provide a heater fixture and a fluid control device that can simplify and shorten assembly work.

In order to solve the above object, a fluid control device that is one aspect of the present disclosure includes a base plate in which an insertion hole is formed, a plurality of joints arranged in a line on the base plate, and a plurality of joints arranged in a row on the base plate. a gas line having a plurality of fluid control devices fixed to the gas line; a heater section provided on both sides along the longitudinal direction of the gas line; a pair of side plate sections abutting the heater section from the outside; a connecting portion that connects the side plate portions and one end of at least one side plate portion of the pair of side plate portions in a direction orthogonal to the base plate; and a protrusion that is inserted into the insertion hole and located on the opposite side of the base plate to the side where the gas line is provided.

The protruding portion may protrude perpendicularly to the one side plate portion.

The protruding portion may protrude toward the other side plate portion.

The heater fixture is provided so as to protrude from one end of each side plate in a direction orthogonal to the base plate in a direction crossing each side plate, and is inserted into the insertion hole to supply the gas of the base plate. A pair of protrusions located on the opposite side to the side where the line is provided, and a pair of extensions extending from the other end of each side plate in the direction perpendicular to the base plate to the opposite side of the one end. It may have an exit part.

A heater fixture that is an aspect of the present disclosure includes a pair of side plate portions that face each other at a predetermined interval and extend in a predetermined direction, and connects one end of the pair of side plate portions in the predetermined direction. a pair of protrusions provided to protrude from the other end in the predetermined direction of each side plate in a direction intersecting each side plate, and from the one end of each side plate. , has a pair of extensions extending on the opposite side from the other end.

According to the present disclosure, it is possible to provide a heater fixture and a fluid control device that can simplify and shorten assembly work.

FIG. 1 is a perspective view of a fluid control device according to the present embodiment. FIG. 3 is a perspective view of the base plate. FIG. 3 is a perspective view of the fluid control device in a state where a heater section and a plurality of clips are not attached. FIG. 3 is a perspective view of a heater clip. (a) is a front view of the heater clip, and (b) is a side view of the heater clip. FIG. 3 is a view of the base plate to which the heater clip is attached, viewed from below. FIG. 7 is a front view of a heater clip according to a modification. FIG. 7 is a plan view of a base plate according to a modified example.

A heater fixture and a fluid control device according to embodiments of the present disclosure will be described with reference to the drawings. In the following description, the upper and lower sides refer to the upper and lower sides of FIG. 1, the direction in which the gas line 3 extends is a first direction D1, and the direction parallel to the flat plate portion 2A and orthogonal to the first direction D1 is a second direction D2.

FIG. 1 is a perspective view of a fluid control device 1 according to this embodiment.
FIG. 2 is a perspective view of the base plate 2.

As shown in FIG. 1, the fluid control device 1 includes a base plate 2, a gas line 3, a heater section 4, and a plurality of heater clips 20. In this embodiment, only one gas line 3 is provided on the base plate 2, but a plurality of gas lines 3 may be provided.

As shown in FIG. 2, the base plate 2 is made of a metal material such as stainless steel, and has a flat plate portion 2A and a pair of support portions 2B. The flat plate portion 2A has a rectangular shape in a plan view, and has a plurality of pairs of slits 2c and a plurality of pairs of bolt threading holes 2d. In this embodiment, three pairs of slits 2c and six pairs of bolt threading holes 2d are formed in the flat plate portion 2A. In addition, in FIG. 2, only the pair of bolt threading holes 2d are numbered. Each support portion 2B has a substantially rectangular shape, is connected to the long side of the flat plate portion 2A, and is perpendicular to the flat plate portion 2A. Each slit 2c corresponds to an insertion hole.

FIG. 3 shows a perspective view of the fluid control device 1 in a state where the heater section 4 and the plurality of clips 20 are not attached.

The gas line 3 includes an inlet pipe 5, an outlet pipe 6, a plurality of joints 7, and a plurality of fluid control devices 8-14.

The inlet pipe 5 serves as an inlet for fluid in the gas line 3. The outlet pipe 6 serves as a fluid outlet in the gas line 3. The plurality of joints 7 have a block shape, are located between the inlet pipe 5 and the outlet pipe 6, and are arranged in a line on the flat plate portion 2A of the base plate 2. Each joint 7 is formed with a gas flow path. Further, each joint 7 is fixed to the base plate 2 by a pair of bolts (not shown) being screwed together through a pair of bolt screw holes 2d.

The plurality of fluid control devices 8 to 14 include a manual valve 8, automatic valves (for example, fluid-driven automatic valves) 9 to 11, a manual regulator (pressure reducing valve) 12, a pressure gauge 13, and a flow rate control device. (For example, a mass flow controller (MFC)) 14. As shown in FIG. 3, fixing parts 8A to 14A are provided for each of the fluid control devices 8 to 14, and bolts 15 are attached to the fixing parts 8A to 14A (only one bolt is given a reference number for simplicity of illustration). ) are respectively fixed to the corresponding joints 7 by inserting them.

As shown in FIG. 1, the heater section 4 includes an aluminum block 4A, a pair of heater support plates 4B, a pair of heaters 4C, a pair of heat insulation covers 4D, and a thermostat 4E.

The aluminum block 4A is provided to cover the inlet pipe 5.

The pair of heater support plates 4B are made of thin sheet metal such as stainless steel, extend along the first direction D1, and have a substantially rectangular shape. A pair of heater support plates 4B are provided on both sides of the gas line 3 along the first direction D1. Specifically, each heater support plate 4B is in contact with a side surface of the aluminum block 4A, a side surface of the joint 7, a side surface of the fixing parts 8A to 14A of the fluid control devices 8 to 14, and a side surface of the MFC 14.

The pair of heaters 4C are seat heaters (rubber heaters) and have substantially the same shape as the pair of heater support plates 4B. The pair of heaters 4C are located outside the pair of heater support plates 4B, and are in contact with the pair of heater support plates 4B. Thereby, the pair of heaters 4C are supported by the pair of heater support plates 4B. A power cable 4F is connected to each heater 4C. The heat from the pair of heaters 4C heats the gas (for example, hydrogen fluoride) that flows in through the inlet pipe 5 and passes through the joint 7 and the fluid control devices 8 to 14, and liquefies the gas that liquefies at room temperature. is prevented.

The pair of heat insulating covers 4D are made of a heat insulating material such as silicone sponge, and have substantially the same shape as the pair of heater support plates 4B. The pair of heat insulating covers 4D are located outside the pair of heaters 4C and are in contact with the pair of heaters 4C. The pair of heat insulating covers 4D suppress the heat from the pair of heaters 4C from being transmitted to the outside.

The thermostat 4E is provided at the upstream end of one heater support plate 4B, and prevents the temperature of the heater 4C from rising above a predetermined temperature.

The distance between the pair of slits 2c is configured to be approximately equal to the width of the gas line 3 with the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulating covers 4D attached. That is, the distance between the pair of slits 2c in the second direction D2 is determined by the width of the joint 7 in the second direction D2, the thickness of the pair of heater support plates 4B, the thickness of the pair of heaters 4C, and the thickness of the pair of heat insulation covers 4D. The length is approximately equal to the sum of the thicknesses.

Next, the heater clip 20, which is a heater fixture, will be explained.

FIG. 4 is a perspective view of the heater clip 20.
FIG. 5A is a front view of the heater clip 20, and FIG. 5B is a side view of the heater clip 20.
FIG. 6 is a view of the base plate 2 to which the heater clip 20 is attached, viewed from below.

As shown in FIGS. 4 and 5, the heater clip 20 is formed by bending a thin sheet metal such as stainless steel, and includes a pair of side plate parts 21, a pair of protruding parts 22, a connecting part 23, and a pair of side plate parts 21, a pair of protruding parts 22, a connecting part 23, It has an extension part 24.

The pair of side plate portions 21 extend in the vertical direction (predetermined direction) and are parallel to the outer surfaces of the pair of heat insulating covers 4D. Is the distance between the pair of side plate parts 21 (corresponding to a predetermined interval) approximately equal to the width of the gas line 3 with the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulating covers 4D attached? It is slightly shorter.

Each protruding portion 22 is provided at the lower end of each side plate portion 21 so as to protrude inward, and is perpendicular to the pair of side plate portions 21 . Note that the angle between the protruding portion 22 and the side plate portion 21 is not limited to a right angle (90°), but may be an obtuse angle (greater than 90° and smaller than 180°). The protruding portion 22 only needs to protrude from the lower end of the side plate portion 21 in a direction intersecting the side plate portion 21 . The width of each protrusion 22 in the first direction D1 and the second direction D2 is configured to be shorter than the width of each slit 2c in the first direction D1 and second direction D2. The distance between the inner ends of the pair of protrusions 22 in the second direction D2 is shorter than the distance between the pair of slits 2c in the second direction D2. As shown in FIG. 6, when each heater clip 20 is attached to the flat plate portion 2A, the inner end of each protruding portion 22 is located inside each slit 2c.

The connecting portion 23 extends along the second direction D2 and is parallel to the flat plate portion 2A of the base plate 2. The connecting portion 23 connects the upper ends of the pair of side plate portions 21. The width of the connecting portion 23 in the first direction D1 is approximately half the width of each side plate portion 21 in the first direction D1. The distance between the connecting portion 23 and the pair of protruding portions 22 in the vertical direction is determined by the vertical length of the pair of heater support plates 4B, the pair of heaters 4C, or the pair of heat insulating covers 4D, and the flat plate portion 2A of the base plate 2. The length is approximately equal to or slightly longer than the total length of the plate thickness.

The pair of extending portions 24 extend upward from the upper ends of the pair of side plate portions 21 and are parallel to the outer surfaces of the pair of heat insulating covers 4D. The length of each extending portion 24 in the vertical direction is approximately half the length of the connecting portion 23 in the second direction D2. The width of each extending portion 24 in the first direction D1 is approximately half the width of each side plate portion 21 in the first direction D1.

As shown in FIG. 5(a), when an operator pinches the pair of extension parts 24 and applies force to bring them closer together, the pair of side plate parts 21 are elastically deformed and separated from each other. It spreads like that. In this state, the heater clip 20 is lowered toward the gas line 3 in which the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulation covers 4D are in contact with each other, and each protrusion 22 is inserted into the corresponding slit. 2c, and then separate the pair of extensions 24. As a result, the pair of side plates 21 of the heater clip 20 compress the joint 7, the pair of heater support plates 4B, the pair of heaters 4C, and the pair of heat insulating covers 4D by elastic force.

As shown in FIG. 6, when each heater clip 20 is attached to the flat plate portion 2A, the inner end of each protruding portion 22 is located inside each slit 2c.

According to the fluid control device 1 as described above, the heater clip 20 includes a pair of side plate parts 21 that abut the heater part 4 from the outside, a connecting part 23 that connects the pair of side plate parts 21, and a pair of side plate parts 21. The base plate 2 has a protrusion 22 that protrudes from the lower end in a direction intersecting the side plate 21, is inserted into the slit 2c, and is positioned on the lower surface 2E side of the base plate 2. Therefore, the heater section 4 can be attached to the gas line 3 simply by inserting the heater clip 20 into the base plate 2, so that the assembly work can be simplified and shortened. Furthermore, since the protruding parts 22 are inserted into the slits 2c and located on the lower surface 2E side of the base plate 2, even if each heater clip 20 is pulled upward, the protruding parts 22 are caught on the edges of the slits 2c, and the heater clips 20 can be prevented from coming off from the flat plate portion 2A.

Since each protruding part 22 is orthogonal to each side plate part 21, each protruding part 22 comes into contact with the lower surface 2E of the base plate 2, thereby further preventing the heater clip 20 from coming off from the flat plate part 2A. can.

Since the protrusion 22 protrudes toward the other side plate 21, the heater clip 20 can be attached to the base plate 2 simply by inserting the protrusion 22 of the heater clip 20 into the slit 2c.

Since the heater clip 20 has a pair of extensions 24 extending upward from the upper end of each side plate 21, an operator can pinch the pair of extensions 24 and apply force in a direction toward each other. By adding this, the pair of side plate portions 21 can be elastically deformed and separated from each other. Thereby, the heater clip 20 can be easily attached to the base plate 2 while attaching the heater section 4 to the gas line 3 using the heater clip 20.

Note that the present disclosure is not limited to the embodiments described above. Those skilled in the art can make various additions, changes, etc. within the scope of the present disclosure.

For example, as shown in the heater clip 120 in FIG. 7, the protruding portion 122 of the heater clip 120 may be provided at the lower end of each side plate portion 21 so as to protrude outward.

In this case, as shown in FIG. 8, the slit 102c of the base plate 102 includes a first slit 102c1 and a second slit 102c2, which are formed along the first direction D2. The first slit 102c1 and the second slit 102c2 communicate with each other. The width of the first slit 102c1 in the first direction D1 and the second direction D2 is configured to be larger than the width of each protrusion 122 in the first direction D1 and the second direction D2. The width is smaller than the width of each protruding portion 122 in the second direction D2 and larger than the width (thickness) of each side plate portion 21 in the second direction D2.

When attaching the heater clip 120 to the base plate 102, after inserting each protrusion 122 into the first slit 102c1, slide the heater clip 120 toward the second slit 102c2, and then insert each side plate 21 of the heater clip 120 into the first slit 102c1. Insert into the second slit 102c2. Thereby, it is possible to suppress the heater clip 120 from coming off from the flat plate portion 2A.

In the above embodiment, each joint 7 is fixed to the base plate 2 by a pair of bolts (not shown) screwed into a pair of bolt threading holes 2d, but all the joints are not fixed to the base plate 2. It is good as long as it can be fixed only in the necessary places.

In the above embodiment, the protrusion 22 is provided on both of the pair of side plate parts 21, but it may be provided on at least one of the pair of side plate parts 21. The number of heater clips 20 is not limited to three, but may be any number.

In the above embodiment, the fluid control device 1 includes a manual valve, an automatic valve, a pressure gauge, a regulator, and a mass flow controller as fluid control equipment, but it may also include a filter or the like in addition to these.

1: Fluid control device, 2: Base plate, 2c, 102c: Slit, 3: Gas line, 4: Sensor section, 7: Joint, 8 to 14: Fluid control device, 2-, 120: Heater clip, 21: Side plate section , 22, 122: protruding part, 23: connecting part, 24: extending part

Claims (5)

A base plate with an insertion hole formed,
a gas line having a plurality of joints arranged in a line on the base plate and a plurality of fluid control devices fixed to the plurality of joints;
a heater section provided on both sides along the longitudinal direction of the gas line;
a pair of side plate portions that abut the heater portion from the outside; a connecting portion that connects the pair of side plate portions; and one end of at least one side plate portion of the pair of side plate portions in a direction orthogonal to the base plate. a protruding part that is provided so as to protrude in a direction intersecting the one side plate part, is inserted into the insertion hole, and is located on the opposite side of the base plate to the side where the gas line is provided. A fluid control device comprising: The fluid control device according to claim 1, wherein the protruding portion protrudes perpendicularly to the one side plate portion. The fluid control device according to claim 2, wherein the protrusion protrudes toward the other side plate. The heater fixture is
A side where the gas line of the base plate is provided so as to protrude from one end of each side plate in a direction orthogonal to the base plate in a direction intersecting each side plate, and is inserted into the insertion hole. a pair of protrusions located on opposite sides of the
The fluid control device according to claim 2, further comprising a pair of extension portions extending from the other end of each side plate in a direction perpendicular to the base plate to the opposite side of the one end. a pair of side plate portions that face each other at a predetermined interval and extend in a predetermined direction;
a connecting portion connecting one end of the pair of side plate portions in the predetermined direction;
a pair of protrusions provided to protrude from the other end of each side plate in the predetermined direction in a direction intersecting each side plate;
A heater fixture comprising: a pair of extending portions extending from the one end of each side plate portion to a side opposite to the other end.

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