JP7203961B2 - 誘導及び光学変位センサを用いた厚さ測定 - Google Patents
誘導及び光学変位センサを用いた厚さ測定 Download PDFInfo
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- JP7203961B2 JP7203961B2 JP2021515227A JP2021515227A JP7203961B2 JP 7203961 B2 JP7203961 B2 JP 7203961B2 JP 2021515227 A JP2021515227 A JP 2021515227A JP 2021515227 A JP2021515227 A JP 2021515227A JP 7203961 B2 JP7203961 B2 JP 7203961B2
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- thickness
- optical displacement
- eddy current
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
Claims (3)
- センサシステム(100)であって、
コイル(120a)の両端に連結された励起電子回路(121)を有する、少なくとも1つの前記コイル(120a)を含む、渦電流センサ(120)と、
光学変位センサ(140)と前記渦電流センサ(120)との間の垂直距離を固定するように、前記渦電流センサ(120)に固設された光学変位センサ(140)であって、前記光学変位センサ(140)は、前記光学変位センサ(140)の測定軸が前記コイル(120a)の対称軸と同一直線上にあるように、前記コイル(120a)の上部上にかつ前記コイル(120a)と同心に位置する、光学変位センサ(140)と、
プロセッサ(151)及びメモリ(152)を含むコンピューティングデバイス(150)であって、前記渦電流センサ(120)及び前記光学変位センサ(140)からのセンサデータを受信するように連結され、金属基材(185)の少なくとも1つの側面上に導電性材料を含むコーティング層(187)を含むコーティングされた基材(180)を測定するときに取得された前記センサデータを分析して、前記コーティング層(187)の少なくとも厚さを決定するように適合された、コンピューティングデバイス(150)と、を備える、センサシステム(100)。 - 金属基材(185)上にコーティング層(187)を含むコーティングされた基材(180)の厚さを測定する方法であって、
光学変位センサと渦電流センサとの間の垂直距離を固定するように、少なくとも1つのコイル(120a)及び前記コイル(120a)の両端に連結された励起電子回路(121)を含む渦電流センサ(120)と、前記渦電流センサ(120)に固設された光学変位センサ(140)を含むセンサシステム(100)であって、前記光学変位センサ(140)は、前記光学変位センサ(140)の測定軸が前記コイル(120a)の対称軸と同一直線上にあるように、前記コイル(120a)の上部上にかつ前記コイル(120a)と同心に位置し、プロセッサ(151)及びメモリ(152)を含み、前記コイル(120a)に、かつ前記光学変位センサ(140)の出力に連結されたコンピューティングデバイス(150)と、を含む、センサシステム(100)を提供することと、
前記渦電流センサ(120)及び前記光学変位センサ(140)が、各々、前記コーティングされた基材(180)を測定することから受信されたセンサデータを生成することと、
前記コンピューティングデバイス(150)が、前記渦電流センサ(120)及び前記光学変位センサ(140)から受信された前記センサデータを分析して、前記コーティング層(187)の少なくとも前記厚さを決定することと、を含み、前記コーティング層は導電性材料を含む、方法。 - 前記励起電子回路が、反復パルス電流信号を前記コイルに提供し、前記センサデータの前記分析が、受信された波形又はそこから導出された統計値として前記受信センサデータを較正値と比較することによって、前記渦電流センサによって感知された波形を分析することを含む、請求項2に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862735583P | 2018-09-24 | 2018-09-24 | |
US62/735,583 | 2018-09-24 | ||
US16/569,214 US11143495B2 (en) | 2018-09-24 | 2019-09-12 | Thickness measurement with inductive and optical displacement sensors |
US16/569,214 | 2019-09-12 | ||
PCT/US2019/052541 WO2020068711A1 (en) | 2018-09-24 | 2019-09-24 | Thickness measurement with inductive and optical displacement sensors |
Publications (2)
Publication Number | Publication Date |
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JP2022500660A JP2022500660A (ja) | 2022-01-04 |
JP7203961B2 true JP7203961B2 (ja) | 2023-01-13 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021515227A Active JP7203961B2 (ja) | 2018-09-24 | 2019-09-24 | 誘導及び光学変位センサを用いた厚さ測定 |
Country Status (7)
Country | Link |
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US (1) | US11143495B2 (ja) |
EP (1) | EP3857163A4 (ja) |
JP (1) | JP7203961B2 (ja) |
KR (1) | KR102646550B1 (ja) |
CN (1) | CN112789478B (ja) |
CA (1) | CA3113260A1 (ja) |
WO (1) | WO2020068711A1 (ja) |
Families Citing this family (10)
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US9335296B2 (en) | 2012-10-10 | 2016-05-10 | Westinghouse Electric Company Llc | Systems and methods for steam generator tube analysis for detection of tube degradation |
JP6895918B2 (ja) * | 2018-03-23 | 2021-06-30 | 古河電気工業株式会社 | 磁気ディスク用アルミニウム合金基板、ディスク駆動装置、及び磁気ディスク用アルミニウム合金基板の製造方法 |
US11935662B2 (en) | 2019-07-02 | 2024-03-19 | Westinghouse Electric Company Llc | Elongate SiC fuel elements |
JP7440621B2 (ja) | 2019-09-19 | 2024-02-28 | ウェスティングハウス エレクトリック カンパニー エルエルシー | コールドスプレー堆積物のその場付着試験を行うための装置及びその使用方法 |
US11519710B2 (en) * | 2020-02-26 | 2022-12-06 | Honeywell Limited | High accuracy and high stability magnetic displacement sensor in the presence of electromagnetic interferences |
US11740356B2 (en) * | 2020-06-05 | 2023-08-29 | Honeywell International Inc. | Dual-optical displacement sensor alignment using knife edges |
CN114152183B (zh) * | 2021-11-15 | 2023-05-26 | 中北大学 | 一种连续变曲率工件涂层厚度的涡流测量校正方法 |
US20230253542A1 (en) | 2022-02-07 | 2023-08-10 | Honeywell International Inc. | Traceability of Battery Electrodes with Fiducial Markers |
US20230391571A1 (en) | 2022-06-06 | 2023-12-07 | Honeywell International Inc. | Machine Direction Position Profile Measurement in Sheet Manufacturing Systems |
US20240159685A1 (en) | 2022-11-11 | 2024-05-16 | Honeywell International Inc. | Compact-Cross Direction C-Frame Scanner |
Citations (1)
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JP2002148012A (ja) | 2000-11-08 | 2002-05-22 | Ulvac Japan Ltd | 膜厚測定装置及び膜厚測定方法 |
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2019
- 2019-09-12 US US16/569,214 patent/US11143495B2/en active Active
- 2019-09-24 EP EP19867836.9A patent/EP3857163A4/en active Pending
- 2019-09-24 CA CA3113260A patent/CA3113260A1/en active Pending
- 2019-09-24 KR KR1020217011464A patent/KR102646550B1/ko active IP Right Grant
- 2019-09-24 CN CN201980064926.8A patent/CN112789478B/zh active Active
- 2019-09-24 JP JP2021515227A patent/JP7203961B2/ja active Active
- 2019-09-24 WO PCT/US2019/052541 patent/WO2020068711A1/en unknown
Patent Citations (1)
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JP2002148012A (ja) | 2000-11-08 | 2002-05-22 | Ulvac Japan Ltd | 膜厚測定装置及び膜厚測定方法 |
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Publication number | Publication date |
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JP2022500660A (ja) | 2022-01-04 |
CA3113260A1 (en) | 2020-04-02 |
KR102646550B1 (ko) | 2024-03-12 |
US20200096308A1 (en) | 2020-03-26 |
CN112789478A (zh) | 2021-05-11 |
CN112789478B (zh) | 2023-10-20 |
KR20210057809A (ko) | 2021-05-21 |
US11143495B2 (en) | 2021-10-12 |
EP3857163A4 (en) | 2022-06-29 |
EP3857163A1 (en) | 2021-08-04 |
WO2020068711A1 (en) | 2020-04-02 |
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