GB2112944A - Calibration of thickness gauges - Google Patents
Calibration of thickness gauges Download PDFInfo
- Publication number
- GB2112944A GB2112944A GB08200173A GB8200173A GB2112944A GB 2112944 A GB2112944 A GB 2112944A GB 08200173 A GB08200173 A GB 08200173A GB 8200173 A GB8200173 A GB 8200173A GB 2112944 A GB2112944 A GB 2112944A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coating thickness
- probe
- measuring
- substrate
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/008—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 with calibration coefficients stored in memory
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A probe contains a measurement coil system (8) using induction or eddy current effects to measure the thickness of a coating over a conductive or magnetic substrate. The probe is first used to form a calibration chart in a memory system (16) by being raised physically above a suitable substrate, simultaneous measurements being made of the motion of the probe e.g. by displacement transducer (6, 7) and of the measurement coil (8) output. The probe is then positioned on the coating to be measured and the output applied to the memory system where the calibration chart is used to recover the values of physical movement (and hence coating thickness) which give any particular value of measurement coil output. <IMAGE>
Description
SPECIFICATION
A self-calibrating thickness gauge
THE PROBLEM
There is a widespread requirement in the painting and plating industries for the measurement of the thickness of a coating layer.
Inevitably the demands for accuracy are becoming more exigent, particularly where the coating material is expensive and so must be guaranteed to exceed a certain thickness, but where excess thickness represents an unjustifiable expense.
DEFINITIONS
The following definitions will be used throughout this paper.
COATING -The topmost layer of which it is desired to know the thickness.
SUBSTRATE -The underlying base material to which the coating is applied.
PRESENT ART
There are many instruments on the market; these fall into four categories which are:
1. Destructive
2. Eddy Current
3. Magnetic pull-off
4. Electromagnetic induction
Destructive tests, involving either cutting through the coating, or total removal of an area of coating, while of reasonable accuracy, probably of the order of +3%, are of limited value for the very
reason that they are destructive.
EDDY CURRENT INSTRUMENTS
Eddy current tests are performed using high frequency currents; the effect of eddy currents,
induced in a surface placed adjacent to the
measuring coil, can be used as a measure of the
separation of the coil from the surface, and thus of
the thickness of any coating which intervenes.
Eddy current tests are usually used for the
measurements of non-conductive coatings on
conductive but non-ferromagnetic substrates, though they are capable of measuring certain other combinations as well. They have, in particular, only limited application to coatings on magnetic substrates.
Eddy current tests offer their highest accuracy when measuring non-conductive coatings on nonferromagnetic, conductive substrates, where their accuracy is limited by the variation in properties between the many and several substrated materials. Owing to the large range of suitable substrates, it is not possible to place a limit on the accuracy attainable, though commercial instruments claim about 3% on samples of aluminium. Owing to the degree of variability of the effect of different substrates on the output from a measuring head, it is customary to calibrate
an instrument on one substrate only, often 'aluminium, and to use various expedients in the
treatment of the signal to render the results from
different substrates as like as possible.
PERMANENT MAGNET GAUGES
Magnetic pull-off gauges are used for nonmagnetic coatings on ferromagnetic substrates.
The accuracy of measurement attainable is limited by variations in the permeability of a substrate and is generally accepted to be not better than 10%.
INDUCTION GAUGES
Electromagnetic induction instruments work at a low frequency, typically'less than 500 c/s and use the effect of an adjacent magnetic surface on the inductance of a coil (usually a balance coil system), as a measure of the separation between the coil system and the substrate and thus the thickness of the intervening coating. Once again, accuracy is limited by the variation in properties, both permeability and conductivity, of the substrate. A figure of 3% is claimed for accuracy, but this is probably only achieved on mild steel substrates.
A method of intrinsically unlimited accuracy is known where two separate coil systems are used, the first is placed over the coating on a substrate and a second is separated by an adjustable amount from a separate, uncoated smaple of an indentical substrate. When the separation of the second is varied by an adjustment mechanism and the output from both coils is compared, a balance point will be observed when the separation of the second coil from its substrate is the same as the first.
The means of adjustment used for the second coil may be calibrated to show the separation from its substrate and thus to indicate directly the thickness of the coating which it is desired to know. The system is now limited to use on inductive systems only, but could also be used on eddy current systems.
This method, while of unlimited accuracy.
requires the use of two separate coil systems which must be manipulated manually, and of a second sample of uncoated substrate. The accuracy of the method is limited in practice by variations between the two sets of coils caused by extraneous factors such as environment, since the two coils could be at quite different temperatures, and by variations between nominally, but not actually, identical samples of substrate.
THE NEW INVENTION
This invention reveals a method which obviates these difficulties and offers a convenient instrument of inherently unlimited accuracy.
The invention consits of a self-calibrating system wherein the relationship between the output of a measuring probe and its separation from a substrate is determined automatically by moving the probe physically away from an uncoated sample of the substrate by means of a driving system, typically pneumatic, and measuring the motion of the probe, typically by means of a Linear Variable-Displacement
Transofmer (L.V.D.T.) whilst at the same time measuring the output from a measuring probe, typically of a three coil balanced construction. The two sets of measurements if not already in digital form are digitised by means of an analogue to digital converter. The digital measurements are then used to form a look-up table in memory in the computer such that the measured signal may be related to a known separation throughout the full range of the instrument.This couid be done for instance by using the motion signal to form an address in memory and storing output from the measuring head at that address. This calibration chart is independently determined for each substrate and may be constructed with any required degree of accuracy.
It is necessary to set the zero point of the
L.V.D.T. for each calibration and this together with the control of all signals is performed by a computer system, typically a microprocessor.
One form of the invention is described by reference to the figure.
Referring to Fig. 1: An outer housing 1 is placed in contact with an uncoated substrate.
Inside the housing, a rod 5, attached at its upper end to a flexible diaphragm 4, carries the core 7 of a linear-variable-displacementtransducer 6. (L.V.D.T.) and a coil system 8, which is wound round a core, whose tip 11, is held lightly in contact with the substrate by means of the resilience of diaphragm 4. A cavity 3 is formed in the housing with one wall bounded by the diaphragm 4. The cavity communicates by means of a flexible tube 2 with a means of communication.
An excitation signal from a generator 9 is connected to the input coil of the L.V.D.T.
A second excitation signal from a generator 10 is connected to a measurement coil system 8.
The output signal from the L.V.D.T. is passed through signal conditioning circuits 12 to render it into a direct voltage signal which is then converted into a digital form. This signal will be referred to as the distance signal.
The output signal from the coil system 8 is passed through signal conditioning circuits 14 which render it into a direct voltage and permit the removal of initial offsets and temperature effects.
This signal is then converted into a digital form.
This signal will be referred to as the probe output signal.
The distance signal is used to form an address for a Random Access Memory 16 in such a manner that at convenient discrete increments of the spacing of tip 11 from the substrate, the momentary value of the probe output signal is entered into an address defined by the control computer as corresponding to a known spacing.
In use, an initiation signal is given by the operator when the outer housing is placed on an uncoated substrate; this causes the initial value of the distance signal to be used as a zero distance measurement, and then causes the means of evacuation to start to reduce the pressure in cavity 3, thus raising rod 5 and increasing the distance
between tip 11 and the substrate. As each
increment of distance selected by the computer is
reached, the momentary value of the probe output
signal is entered into an appropriate memory
location. When tip 11 has been moved to its
maximum range the calibration phase is complete,
the evacuation of cavity 3 is ceased and air is
admitted.
When subsequently it is desired to make a
thickness measurement, the outer housing is
placed on a coated substrate, tip 11 now resting
on the top of the coating, urged by the pressure of
diaphragm 4 acting simply as a spring. The probe
signal obtained in this condition now corresponds
to that of a separation equal to the coating
thickness and this is found by scanning the table
held in memory for the value most nearly
corresponding: the position of this value in
memory now gives the thickness of the coating
and is presented to the operator, suitably scaled
on a display.
In practice, to avoid the approximation inherent
in the above procedure, an interpolation, linear or
otherwise, would usually be performed between
the two nearest values found during the
comparison of probe output signal with values
obtained on calibration.
A first development of this system is the
incorporation of-a means of measurement of the
probe temperature in order that the temperature
coefficient of the probe may be determined
automatically by the storage of sets of graphs
made at different temperatures.
This measurement may typically be made by
passing a direct current through the coils of the
probe and using this as a resistance thermometer.
A second development of this system is to use the computer to calculate an equation for each graph as required, which is then used to calculate the separation thus permitting interpolation between measured points and, with care, extrapolation also.
A third development of this system is to use the facility to calculate separation using an equation to permit the user to enter a previously known equation, determined previously using this instrument, or otherwise.
A fourth development of this system is to permit the presentation of discrete coated samples, of known coating thickness, to the measurement probe, with manual insertion to the computer system of this known thickness, thus permitting a graph to be stored of measurements of combinations of coating and substrate where the coating does have an effect on the output from .the probe. This graph will have a limited number of known points, so the facility of the instrument to calculate the equation to a curve fitting these points, is essential in order to allow interpolation to a sufficient resolution and accuracy, for the instrument to be of utility.
A fifth development is to use the computing
ability of the system to extrapolate 'backwards,'
i.e. towards the zero thickness measurement, in order that measurements may be made on coated samples for which an uncoated substrate is not available.
Claims (19)
1. I claim a method of measuring the thickness
of a coating applied to a substrate wherein
calibration of a measuring probe is made on an uncoated substrate by physical movement of the
probe relative to the substrate and simultaneous
measurement of the position of the probe and of
the electrical output from a coil system forming a
part of the probe which is affected by the
proximity of the substrate. The two measurements
are stored in a digital memory in such a manner
that in subsequent measurements where the
probe is spaced away from the substrate by the
presence of a coating, the stored values of
electrical output can be used to recover the
physical separation of the probe which gave that value of electrical output when the probe/
substrate system was calibrated.
2. I claim a system for measuring coating thickness as in claim 1 where the measurement of
motion is made by means of a Linear Variable
Displacement Transducer.
3. A claim a system for measuring coating
thickness as in claim 1 where the measurement of
motion is made by means of a grating.
4. I claim a system for measuring coating
thickness as in Claim 1 where the measurement of motion is made by means of wave interference.
5. I claim a system for measuring coating
thickness as in Claim 1 where the means of
causing movement is pnuematic.
6. 1 claim a system for measuring coating
thickness as in Claim 1 where the means of
causing movement is an electric motor.
7. I claim a system for measuring coating
thickness as in Claim 1 where the means of
causing movement is a solenoid.
8. 1 claim a system for measuring coating
thickness as in Claim 1 where the coil system
consists of one coil only.
9. 1 claim a system for measuring coating
thickness as in Claim 1 where the coil system
consists of two coils, an excitation coil and a
search coil.
10. I claim a system for measuring coating
thickness as in Claim 1 where the coil system
consists of a three coil balanced system, where
two coils are connected in opposition so as to
reduce the standing output to a lower level.
11. I claim a system for measuring coating
thickness as in Claims No's 1-10 where
correction for varying temperature of the probe is
made by the measurement of the temperature of
the probe and the storage of compensating values
in the digital memory system.
12. I claim a system for measuring coating
thickness as in Claim No. 11 where the
measurement of temperature is made by the
passage of current through the coils and the use of
those coils as a resistance thermometer.
13. I claim a system for measuring coating
thickness as in Claims No'd 1 to 1 2 above where the simultaneous measurements of separation of
the probe from the substrate and the electrical
output form the probe coil system as stored in the
digital memory are used to calculate an equation
relating to three or more of these measurements
and the use of this equation to interpolate
between these points in order to provide an improved accuracy in measurement of coating
thickness.
14. I claim a system for measuring coating
thickness as in Claim No. 13 above, where the
calculated equation is used to extrapolate outside
the values obtained on calibration.
1 5. I claim a system for measuring coating
thickness as in Claims Numbered 1 to 14 above,
where the form and constants of an equation
relating separation and electrical signal from a coil
system may be entered by an operator by a
keyboard or switches.
1 6. 1 claim a system for measuring coating
thickness as in Claim No. 1 5 above where the
form and constants may be entered from a storage
medium.
17. 1 claim a system for measuring coating
thickness as in Claim No. 13 or 14 above where
the measurements of separation from the
substrate are made other than by physical
movement of the probe and where these
measurements of separation are entered on a
suitable keyboard or switches.
1 8. 1 claim a system for measuring coating
thickness as in Claim No. 17 above where the
measurements of separation are entered from a
storage medium.
19. 1 claim a system for measuring coating thickness as in Claims numbered 1 to 1 8 above
where the initial calibration is made on already
coated substrate and the thickness of this coating
is found by extrapolation towards the zero coating
thickness by means of an equation or otherwise.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08200173A GB2112944A (en) | 1982-01-05 | 1982-01-05 | Calibration of thickness gauges |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08200173A GB2112944A (en) | 1982-01-05 | 1982-01-05 | Calibration of thickness gauges |
Publications (1)
Publication Number | Publication Date |
---|---|
GB2112944A true GB2112944A (en) | 1983-07-27 |
Family
ID=10527447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08200173A Pending GB2112944A (en) | 1982-01-05 | 1982-01-05 | Calibration of thickness gauges |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2112944A (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2156526A (en) * | 1984-02-10 | 1985-10-09 | Deutsch Pruef Messgeraete | A method of and apparatus for measuring the thickness of a layer |
EP0274042A2 (en) * | 1986-12-22 | 1988-07-13 | Bosch-Siemens HausgerÀ¤te GmbH | Circuit for the establishement and interpretation of binary words by measurement techniques |
US5854553A (en) * | 1996-06-19 | 1998-12-29 | Skf Condition Monitoring | Digitally linearizing eddy current probe |
EP1017061A1 (en) * | 1998-12-28 | 2000-07-05 | Siemens Aktiengesellschaft | Method and device for measuring a surface inhomogeneity of a nuclear reactor component and use of the method for measuring an electrically practically non-conductive layer |
DE19951015C1 (en) * | 1999-10-22 | 2001-01-25 | Bosch Gmbh Robert | Process for characterizing metal electrodes of ceramic sensor electrodes comprises using multi-step measuring process |
EP1167917A1 (en) * | 2000-06-29 | 2002-01-02 | Snecma Moteurs | Method for wall thickness measurement of a hollow blade |
US6549006B2 (en) * | 2000-04-07 | 2003-04-15 | Cuong Duy Le | Eddy current measurements of thin-film metal coatings using a selectable calibration standard |
WO2003073040A2 (en) * | 2002-02-26 | 2003-09-04 | Shell Internationale Research Maatschappij B.V. | Measurement method for determining a surface profile |
US6741076B2 (en) | 2000-04-07 | 2004-05-25 | Cuong Duy Le | Eddy current measuring system for monitoring and controlling a CMP process |
US6762604B2 (en) | 2000-04-07 | 2004-07-13 | Cuong Duy Le | Standalone eddy current measuring system for thickness estimation of conductive films |
US7019519B2 (en) | 2000-04-07 | 2006-03-28 | Cuong Duy Le | Thickness estimation using conductively related calibration samples |
CN102141698A (en) * | 2011-03-04 | 2011-08-03 | 深圳市华星光电技术有限公司 | Film thickness measuring device and correction method thereof |
US20120222464A1 (en) * | 2011-03-04 | 2012-09-06 | Shenzhen China Star Optoelectronics Technology Co. Ltd | Film-thickness measuring device and calibration method thereof |
CN109612382A (en) * | 2019-02-01 | 2019-04-12 | 哈尔滨恒达交通设备技术开发有限公司 | A kind of train brake pad thickness measurement equipment |
EP2754993B1 (en) * | 2013-01-10 | 2021-01-13 | Elcometer Limited | Instrument and method for measuring coating thickness |
CN112789478A (en) * | 2018-09-24 | 2021-05-11 | 霍尼韦尔国际公司 | Thickness measurement using inductive and optical displacement sensors |
-
1982
- 1982-01-05 GB GB08200173A patent/GB2112944A/en active Pending
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2156526A (en) * | 1984-02-10 | 1985-10-09 | Deutsch Pruef Messgeraete | A method of and apparatus for measuring the thickness of a layer |
US4695797A (en) * | 1984-02-10 | 1987-09-22 | Karl Deutsch Pruf- und Messgeratebau GmbH+Co. KG | Method of and apparatus for layer thickness measurement |
EP0274042A2 (en) * | 1986-12-22 | 1988-07-13 | Bosch-Siemens HausgerÀ¤te GmbH | Circuit for the establishement and interpretation of binary words by measurement techniques |
EP0274042A3 (en) * | 1986-12-22 | 1989-07-05 | Bosch-Siemens HausgerÀ¤te GmbH | Circuit for the establishement and interpretation of binary words by measurement techniques |
US5854553A (en) * | 1996-06-19 | 1998-12-29 | Skf Condition Monitoring | Digitally linearizing eddy current probe |
EP1017061A1 (en) * | 1998-12-28 | 2000-07-05 | Siemens Aktiengesellschaft | Method and device for measuring a surface inhomogeneity of a nuclear reactor component and use of the method for measuring an electrically practically non-conductive layer |
DE19951015C1 (en) * | 1999-10-22 | 2001-01-25 | Bosch Gmbh Robert | Process for characterizing metal electrodes of ceramic sensor electrodes comprises using multi-step measuring process |
US6549006B2 (en) * | 2000-04-07 | 2003-04-15 | Cuong Duy Le | Eddy current measurements of thin-film metal coatings using a selectable calibration standard |
US7019519B2 (en) | 2000-04-07 | 2006-03-28 | Cuong Duy Le | Thickness estimation using conductively related calibration samples |
US6741076B2 (en) | 2000-04-07 | 2004-05-25 | Cuong Duy Le | Eddy current measuring system for monitoring and controlling a CMP process |
US6762604B2 (en) | 2000-04-07 | 2004-07-13 | Cuong Duy Le | Standalone eddy current measuring system for thickness estimation of conductive films |
EP1167917A1 (en) * | 2000-06-29 | 2002-01-02 | Snecma Moteurs | Method for wall thickness measurement of a hollow blade |
WO2002001145A1 (en) * | 2000-06-29 | 2002-01-03 | Snecma Moteurs | Method for measuring the thickness of a hollow vane wall |
FR2811076A1 (en) * | 2000-06-29 | 2002-01-04 | Snecma Moteurs | METHOD FOR MEASURING THE WALL THICKNESS OF A HOLLOW BLADE |
WO2003073040A3 (en) * | 2002-02-26 | 2004-03-11 | Shell Int Research | Measurement method for determining a surface profile |
US6734670B2 (en) * | 2002-02-26 | 2004-05-11 | Shell Oil Company | Determining a surface profile of an object |
WO2003073040A2 (en) * | 2002-02-26 | 2003-09-04 | Shell Internationale Research Maatschappij B.V. | Measurement method for determining a surface profile |
CN1307401C (en) * | 2002-02-26 | 2007-03-28 | 国际壳牌研究有限公司 | Measurement method for determining a surface profile |
CN102141698A (en) * | 2011-03-04 | 2011-08-03 | 深圳市华星光电技术有限公司 | Film thickness measuring device and correction method thereof |
CN102141698B (en) * | 2011-03-04 | 2012-07-11 | 深圳市华星光电技术有限公司 | Film thickness measuring device and correction method thereof |
US20120222464A1 (en) * | 2011-03-04 | 2012-09-06 | Shenzhen China Star Optoelectronics Technology Co. Ltd | Film-thickness measuring device and calibration method thereof |
WO2012119328A1 (en) * | 2011-03-04 | 2012-09-13 | 深圳市华星光电技术有限公司 | Film thickness measurement device and correction method thereof |
EP2754993B1 (en) * | 2013-01-10 | 2021-01-13 | Elcometer Limited | Instrument and method for measuring coating thickness |
CN112789478A (en) * | 2018-09-24 | 2021-05-11 | 霍尼韦尔国际公司 | Thickness measurement using inductive and optical displacement sensors |
CN112789478B (en) * | 2018-09-24 | 2023-10-20 | 霍尼韦尔国际公司 | Thickness measurement using inductive and optical displacement sensors |
CN109612382A (en) * | 2019-02-01 | 2019-04-12 | 哈尔滨恒达交通设备技术开发有限公司 | A kind of train brake pad thickness measurement equipment |
CN109612382B (en) * | 2019-02-01 | 2024-05-10 | 哈尔滨恒达交通设备技术开发有限公司 | Train brake lining thickness measuring instrument |
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