JP7183094B2 - 基板処理方法および基板処理装置 - Google Patents
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 53
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical group CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 51
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- 239000003960 organic solvent Substances 0.000 claims description 18
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- 238000004090 dissolution Methods 0.000 claims description 11
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
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- General Chemical & Material Sciences (AREA)
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- Molecular Biology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Description
11A 湿式処理ユニット、基板処理ユニット(第1処理部)
13A 乾燥処理ユニット、基板処理ユニット(第2処理部)
15 センターロボット(搬送機構)
130 高圧チャンバ(チャンバ)
FF 凝固膜
LF 液膜
PT パターン(凹凸パターン)
S 基板
Claims (16)
- 第1処理部で、表面に凹凸パターンが形成された基板に湿式処理を施した後、前記基板の表面を有機溶剤を含む液膜で覆う工程と、
前記液膜の少なくとも表面近傍を凝固させて凝固膜を形成する工程と、
前記凝固膜で表面が覆われた前記基板を第2処理部へ搬送する工程と、
前記第2処理部で、前記凝固膜に対し溶解液を供給して、前記凝固膜を溶解させる工程と、
前記基板の表面から前記溶解液を除去して前記基板を乾燥させる工程と
を備える基板処理方法。 - 前記凝固膜が、前記液膜の少なくとも表面近傍を冷却することにより形成される請求項1に記載の基板処理方法。
- 前記基板を乾燥させる工程では、超臨界流体を用いて前記基板を乾燥させる請求項1または2に記載の基板処理方法。
- 前記第2処理部は、前記基板を受け入れるチャンバを有し、
前記チャンバ内で、液状の低表面張力液により前記溶解液を置換した後、前記低表面張力液を超臨界流体の状態から気化させて前記基板を乾燥させる請求項1ないし3のいずれかに記載の基板処理方法。 - 前記超臨界流体が二酸化炭素である請求項3または4に記載の基板処理方法。
- 前記液膜の少なくとも表面が冷却によって前記凝固膜に転換される一方、前記凝固膜と前記基板との間で前記液膜の一部が液状に維持される請求項1ないし5のいずれかに記載の基板処理方法。
- 前記液膜に含まれる前記有機溶剤がイソプロピルアルコールまたはアセトンである請求項1ないし6のいずれかに記載の基板処理方法。
- 前記液膜は、前記有機溶剤に加えて、融点が常温と同等またはそれ以上である添加剤を含む請求項1ないし7のいずれかに記載の基板処理方法。
- 前記添加剤がターシャリーブチルアルコールである請求項8に記載の基板処理方法。
- 前記溶解液がイソプロピルアルコールまたはアセトンである請求項1ないし9のいずれかに記載の基板処理方法。
- 前記液膜として、前記凹凸パターンの内部を充填する充填用液膜と、前記充填用液膜とは異なる材料により前記充填用液膜を覆う凝固用液膜とを形成し、
前記凝固用液膜を構成する液体の凝固点よりも低温に冷却することで前記凝固用液膜を凝固させる請求項1ないし10のいずれかに記載の基板処理方法。 - 前記凝固用液膜を構成する液体の凝固点が、前記充填用液膜を構成する液体の凝固点よりも高い請求項11に記載の基板処理方法。
- 前記充填用液膜を構成する液体の凝固点が常温以下であり、前記凝固用液膜を構成する液体の凝固点が常温以上である請求項11に記載の基板処理方法。
- 表面に凹凸パターンが形成された基板に対し、湿式処理、前記基板の表面を液膜で覆う処理、および、前記液膜を、前記液膜を構成する液体の凝固点よりも低温に冷却して凝固させ凝固膜に転換させる処理を実行する第1処理部と、
前記凝固膜が形成された前記基板を受け入れ、前記凝固膜に対し溶解液を供給して前記凝固膜を溶解させる処理、および、前記基板の表面から前記溶解液を除去して前記基板を乾燥させる処理を実行する第2処理部と、
前記第1処理部から前記第2処理部へ、前記凝固膜が形成された前記基板を搬送する搬送機構と
を備える基板処理装置。 - 前記第2処理部は、前記凝固膜に対して前記溶解液としての有機溶剤を供給する溶解液供給部を有する請求項14に記載の基板処理装置。
- 前記溶解液がイソプロピルアルコールまたはアセトンである請求項14または15に記載の基板処理装置。
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JP2019058735A JP7183094B2 (ja) | 2019-03-26 | 2019-03-26 | 基板処理方法および基板処理装置 |
PCT/JP2020/007669 WO2020195474A1 (ja) | 2019-03-26 | 2020-02-26 | 基板処理方法および基板処理装置 |
KR1020217029411A KR102626637B1 (ko) | 2019-03-26 | 2020-02-26 | 기판 처리 방법 및 기판 처리 장치 |
CN202080021459.3A CN113574340B (zh) | 2019-03-26 | 2020-02-26 | 基板处理方法以及基板处理装置 |
TW109106880A TWI757698B (zh) | 2019-03-26 | 2020-03-03 | 基板處理方法及基板處理裝置 |
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WO (1) | WO2020195474A1 (ja) |
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Citations (5)
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JP2012074564A (ja) | 2010-09-29 | 2012-04-12 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板処理方法 |
JP2015050414A (ja) | 2013-09-04 | 2015-03-16 | 株式会社Screenホールディングス | 基板乾燥装置 |
JP2018163992A (ja) | 2017-03-27 | 2018-10-18 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2019029491A (ja) | 2017-07-27 | 2019-02-21 | 株式会社Screenホールディングス | 基板処理方法、基板処理液及び基板処理装置 |
JP2019046942A (ja) | 2017-08-31 | 2019-03-22 | 株式会社Screenホールディングス | 基板乾燥方法および基板処理装置 |
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JP2008130685A (ja) * | 2006-11-17 | 2008-06-05 | Sony Corp | 微細構造体の処理方法、処理装置、及びその微細構造体 |
JP4895774B2 (ja) * | 2006-11-24 | 2012-03-14 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP5681560B2 (ja) | 2011-05-17 | 2015-03-11 | 東京エレクトロン株式会社 | 基板乾燥方法及び基板処理装置 |
JP5859888B2 (ja) | 2012-03-26 | 2016-02-16 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6131162B2 (ja) * | 2012-11-08 | 2017-05-17 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6304592B2 (ja) * | 2014-03-25 | 2018-04-04 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6612632B2 (ja) * | 2016-01-26 | 2019-11-27 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6703858B2 (ja) | 2016-02-26 | 2020-06-03 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6914138B2 (ja) * | 2017-07-26 | 2021-08-04 | 株式会社Screenホールディングス | 基板処理方法及び基板処理装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012074564A (ja) | 2010-09-29 | 2012-04-12 | Dainippon Screen Mfg Co Ltd | 基板処理装置及び基板処理方法 |
JP2015050414A (ja) | 2013-09-04 | 2015-03-16 | 株式会社Screenホールディングス | 基板乾燥装置 |
JP2018163992A (ja) | 2017-03-27 | 2018-10-18 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP2019029491A (ja) | 2017-07-27 | 2019-02-21 | 株式会社Screenホールディングス | 基板処理方法、基板処理液及び基板処理装置 |
JP2019046942A (ja) | 2017-08-31 | 2019-03-22 | 株式会社Screenホールディングス | 基板乾燥方法および基板処理装置 |
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Publication number | Publication date |
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CN113574340B (zh) | 2023-04-28 |
TWI757698B (zh) | 2022-03-11 |
KR20210126694A (ko) | 2021-10-20 |
KR102626637B1 (ko) | 2024-01-18 |
TW202038355A (zh) | 2020-10-16 |
CN113574340A (zh) | 2021-10-29 |
JP2020161610A (ja) | 2020-10-01 |
WO2020195474A1 (ja) | 2020-10-01 |
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