JP7160978B2 - 真空ポンプ及び真空ポンプを監視する方法 - Google Patents

真空ポンプ及び真空ポンプを監視する方法 Download PDF

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Publication number
JP7160978B2
JP7160978B2 JP2021040051A JP2021040051A JP7160978B2 JP 7160978 B2 JP7160978 B2 JP 7160978B2 JP 2021040051 A JP2021040051 A JP 2021040051A JP 2021040051 A JP2021040051 A JP 2021040051A JP 7160978 B2 JP7160978 B2 JP 7160978B2
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Prior art keywords
vacuum pump
vacuum
rotor
pump
measurement unit
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JP2021040051A
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English (en)
Japanese (ja)
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JP2021156287A (ja
Inventor
パスカル・ヴィールシュ
ヨッヘン・ベットヒャー
ヴィクトル・ドルシュト
ミルコ・メコタ
ミヒャエル・シュヴァイクヘーファー
ダーニエール・ジーベン
ヘルベルト・シュタムラー
トビアス・シュトル
アドリーアン・ヴィルト
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プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
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Priority claimed from EP20166248.3A external-priority patent/EP3686432B1/de
Priority claimed from EP20170014.3A external-priority patent/EP3736447A1/de
Application filed by プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト filed Critical プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
Publication of JP2021156287A publication Critical patent/JP2021156287A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/12—Vibration

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2021040051A 2020-03-27 2021-03-12 真空ポンプ及び真空ポンプを監視する方法 Active JP7160978B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP20166248 2020-03-27
EP20166248.3A EP3686432B1 (de) 2020-03-27 2020-03-27 Vakuumpumpe
EP20170014.3A EP3736447A1 (de) 2020-04-17 2020-04-17 Vakuumpumpe und verfahren zum überwachen einer vakuumpumpe
EP20170014 2020-04-17

Publications (2)

Publication Number Publication Date
JP2021156287A JP2021156287A (ja) 2021-10-07
JP7160978B2 true JP7160978B2 (ja) 2022-10-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021040051A Active JP7160978B2 (ja) 2020-03-27 2021-03-12 真空ポンプ及び真空ポンプを監視する方法

Country Status (3)

Country Link
EP (1) EP3808988B1 (de)
JP (1) JP7160978B2 (de)
CN (1) CN113446243A (de)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007270829A (ja) 2006-03-06 2007-10-18 Shimadzu Corp 真空ポンプ
JP2008516139A (ja) 2004-10-07 2008-05-15 エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング 高速回転式の真空ポンプ
JP2009544888A (ja) 2006-07-26 2009-12-17 オーリコン レイボルド バキューム ゲーエムベーハー ターボ分子ポンプの状態を測定する方法及びターボ分子ポンプ
JP2019518168A (ja) 2016-06-13 2019-06-27 エドワーズ リミテッド ポンプアセンブリ、方法及びコンピュータプログラム
JP2019163764A (ja) 2018-03-05 2019-09-26 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、および真空ポンプの作動のための方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE483114T1 (de) * 2005-08-24 2010-10-15 Mecos Traxler Ag Magnetlagereinrichtung mit verbesserter gehäusedurchführung bei vakuum
DE202015003927U1 (de) * 2015-05-29 2015-07-13 Oerlikon Leybold Vacuum Gmbh Steuerungselektronik für eine Vakuumpumpe sowie Vakuumpumpe
JP7006520B2 (ja) * 2018-06-14 2022-01-24 株式会社島津製作所 真空ポンプおよび診断システム
EP3686432B1 (de) * 2020-03-27 2022-06-08 Pfeiffer Vacuum Technology AG Vakuumpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008516139A (ja) 2004-10-07 2008-05-15 エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング 高速回転式の真空ポンプ
JP2007270829A (ja) 2006-03-06 2007-10-18 Shimadzu Corp 真空ポンプ
JP2009544888A (ja) 2006-07-26 2009-12-17 オーリコン レイボルド バキューム ゲーエムベーハー ターボ分子ポンプの状態を測定する方法及びターボ分子ポンプ
JP2019518168A (ja) 2016-06-13 2019-06-27 エドワーズ リミテッド ポンプアセンブリ、方法及びコンピュータプログラム
JP2019163764A (ja) 2018-03-05 2019-09-26 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、および真空ポンプの作動のための方法

Also Published As

Publication number Publication date
EP3808988A2 (de) 2021-04-21
EP3808988B1 (de) 2024-01-10
JP2021156287A (ja) 2021-10-07
EP3808988A3 (de) 2021-06-09
CN113446243A (zh) 2021-09-28

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