JP7158379B2 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

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JP7158379B2
JP7158379B2 JP2019524479A JP2019524479A JP7158379B2 JP 7158379 B2 JP7158379 B2 JP 7158379B2 JP 2019524479 A JP2019524479 A JP 2019524479A JP 2019524479 A JP2019524479 A JP 2019524479A JP 7158379 B2 JP7158379 B2 JP 7158379B2
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powder
plasma
powder container
plasma processing
inlet
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JPWO2020217466A1 (https=
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卓也 岩田
俊輔 伊藤
陽大 丹羽
倫子 丹羽
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
JP2019524479A 2019-04-26 2019-04-26 プラズマ処理装置 Active JP7158379B2 (ja)

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PCT/JP2019/017976 WO2020217466A1 (ja) 2019-04-26 2019-04-26 プラズマ処理装置

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JPWO2020217466A1 JPWO2020217466A1 (https=) 2020-10-29
JP7158379B2 true JP7158379B2 (ja) 2022-10-21

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5026949A (en) 1988-11-24 1991-06-25 Gaz De France Method of cracking a batch of heavy hydrocarbons into lighter hydrocarbons
JP2005534814A (ja) 2002-08-02 2005-11-17 スリーエム イノベイティブ プロパティズ カンパニー プラズマ溶射
JP2009138231A (ja) 2007-12-06 2009-06-25 Tocalo Co Ltd 黒色酸化イットリウム溶射皮膜の形成方法および黒色酸化イットリウム溶射皮膜被覆部材
JP2014031579A (ja) 2012-07-13 2014-02-20 Toshiba Corp 伝熱部材の加工方法および伝熱部材
JP2016522734A (ja) 2013-03-14 2016-08-04 エスディーシーマテリアルズ， インコーポレイテッド プラズマシステムを用いる高処理量粒子産生

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5026949A (en) 1988-11-24 1991-06-25 Gaz De France Method of cracking a batch of heavy hydrocarbons into lighter hydrocarbons
JP2005534814A (ja) 2002-08-02 2005-11-17 スリーエム イノベイティブ プロパティズ カンパニー プラズマ溶射
JP2009138231A (ja) 2007-12-06 2009-06-25 Tocalo Co Ltd 黒色酸化イットリウム溶射皮膜の形成方法および黒色酸化イットリウム溶射皮膜被覆部材
JP2014031579A (ja) 2012-07-13 2014-02-20 Toshiba Corp 伝熱部材の加工方法および伝熱部材
JP2016522734A (ja) 2013-03-14 2016-08-04 エスディーシーマテリアルズ， インコーポレイテッド プラズマシステムを用いる高処理量粒子産生

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WO2020217466A1 (ja) 2020-10-29
JPWO2020217466A1 (https=) 2020-10-29

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