JP7157480B2 - 2次元材料薄膜検出方法および2次元材料薄膜検出システム - Google Patents
2次元材料薄膜検出方法および2次元材料薄膜検出システム Download PDFInfo
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Description
[C] = [XYZSpectrum] × pinv([V]) ・・・・・・・・(9)
[XYZCorrent] = [C] × [V] ・・・・・・・・・・・・(10)
[M] = [Score] × pinv([VColor]) ・・・・・・・・(11)
[SSpectrum]380~780nm = [EV][M][VColor] ・・・・・(12)
12:ラマン分光計
13:記憶装置
14:プロセッサ
15:出力装置
C1~C3:畳み込み層
FC1~FC3:全結合層
P1~P2:プーリング層
S1~S6:ステップ
Claims (10)
- 2次元材料薄膜検出方法であって、
光学顕微鏡を介して複数の2次元材料薄膜のそれぞれのサンプル画像を撮り、前記複数のサンプル画像を記憶装置に保存し、
前記複数の2次元材料薄膜をラマン分光計を介して測定し、複数の層数および複数の位置を前記記憶装置に保存し、
プロセッサを介して、前記記憶装置をアクセスし、前記複数のサンプル画像に対して可視光ハイパースペクトル計算を実行し、複数の可視光ハイパースペクトル画像を生成し、
前記プロセッサを介してトレーニングおよび検証手順を実行し、前記複数の可視光ハイパースペクトル画像に対して画像特徴計算を実行し、前記複数の層数および前記複数の位置と共に検証を実行して薄膜予測モデルを確立し、
前記光学顕微鏡を介して検出待ち薄膜画像を撮り、前記プロセッサを介して前記可視光ハイパースペクトル計算を実行し、前記薄膜予測モデルに基づいて前記検出待ち薄膜画像の層数分布結果を生成し、
出力装置を介して前記層数分布結果を出力することを特徴とする、2次元材料薄膜検出方法。 - 前記可視光ハイパースペクトル計算の波長範囲が380~780nmの間にあり、スペクトルの分解能は1nmであることを特徴とする、請求項1に記載の2次元材料薄膜検出方法。
- 前記トレーニングおよび検証手順は、前記複数の可視光ハイパースペクトル画像をトレーニングセット、検証セットおよびテストセットに分類することを含むことを特徴とする、請求項1に記載の2次元材料薄膜検出方法。
- 前記画像特徴計算は、決定木分析、主成分分析、ディープニューラルネットワーク分析のいずれか一つを含むことを特徴とする、請求項1に記載の2次元材料薄膜検出方法。
- 前記ディープニューラルネットワーク分析は、深層ニューラルネットワーク、1次元畳み込みニューラルネットワーク、および3次元畳み込みニューラルネットワークのいずれか一つを含むことを特徴とする、請求項4に記載の2次元材料薄膜検出方法。
- 光学顕微鏡と、ラマン分光計と、記憶装置と、プロセッサと出力装置を備える2次元材料薄膜検出システムであって、
前記光学顕微鏡は、複数の2次元材料薄膜のそれぞれのサンプル画像を撮り、且つ検出待ち薄膜画像を撮り、
前記ラマン分光計は、2次元材料薄膜を測定して複数の層数および複数の位置を取得し、
前記記憶装置は、前記光学顕微鏡および前記ラマン分光計に接続し、前記複数のサンプル画像および対応する前記複数の層数および前記複数の位置を保存し、
前記プロセッサは、前記記憶装置に接続し、複数の命令を実行して以下のステップを実行し、
前記複数のサンプル画像をアクセスして可視光ハイパースペクトル計算を実行して複数のハイパースペクトル画像生成し、
トレーニングおよび検証手順を実行して前記複数の可視光ハイパースペクトル画像に対して画像特徴計算を実行し、前記複数の層数および前記複数の位置と共に検証を実行して薄膜予測モデルを確立し、
前記検出待ち薄膜画像をアクセスして前記可視光ハイパースペクトル計算を実行し、前記薄膜予測モデルに基づいて前記検出待ち薄膜画像の層数分布結果を生成し、
前記出力装置は前記層数分布結果を出力することを特徴とする、2次元材料薄膜検出システム。 - 前記可視光ハイパースペクトル計算の波長範囲が380~780nmの間にあり、スペクトルの分解能は1nmであることを特徴とする、請求項6に記載の2次元材料薄膜検出システム。
- 前記トレーニングおよび検証手順は、前記複数の可視光ハイパースペクトル画像をトレーニングセット、検証セットおよびテストセットに分類することを含むことを特徴とする、請求項6に記載の2次元材料薄膜検出システム。
- 前記画像特徴計算は、決定木分析、主成分分析、ディープニューラルネットワーク分析のいずれか一つを含むことを特徴とする、請求項6に記載の2次元材料薄膜検出システム。
- 前記ディープニューラルネットワーク分析は、深層ニューラルネットワーク、1次元畳み込みニューラルネットワーク、および3次元畳み込みニューラルネットワークのいずれか一つを含むことを特徴とする、請求項9に記載の2次元材料薄膜検出システム。
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