JP7153862B2 - 階段状スロー軸コリメータを有するレーザシステム - Google Patents

階段状スロー軸コリメータを有するレーザシステム Download PDF

Info

Publication number
JP7153862B2
JP7153862B2 JP2021545363A JP2021545363A JP7153862B2 JP 7153862 B2 JP7153862 B2 JP 7153862B2 JP 2021545363 A JP2021545363 A JP 2021545363A JP 2021545363 A JP2021545363 A JP 2021545363A JP 7153862 B2 JP7153862 B2 JP 7153862B2
Authority
JP
Japan
Prior art keywords
dispersive element
wbc
laser system
wavelength
collimators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021545363A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022508765A5 (https=
JP2022508765A (ja
JPWO2020081335A5 (https=
Inventor
ブライアン・ロックマン
ビエン・チャン
マシュー・ソーター
ワン－ロン・ジョウ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of JP2022508765A publication Critical patent/JP2022508765A/ja
Publication of JP2022508765A5 publication Critical patent/JP2022508765A5/ja
Publication of JPWO2020081335A5 publication Critical patent/JPWO2020081335A5/ja
Application granted granted Critical
Publication of JP7153862B2 publication Critical patent/JP7153862B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4062—Edge-emitting structures with an external cavity or using internal filters, e.g. Talbot filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
    • G02B27/0922—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers the semiconductor light source comprising an array of light emitters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1073—Beam splitting or combining systems characterized by manufacturing or alignment methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02255—Out-coupling of light using beam deflecting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H01S5/4043—Edge-emitting structures with vertically stacked active layers
    • H01S5/405—Two-dimensional arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)
JP2021545363A 2018-10-15 2019-10-10 階段状スロー軸コリメータを有するレーザシステム Active JP7153862B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862745623P 2018-10-15 2018-10-15
US62/745,623 2018-10-15
PCT/US2019/055509 WO2020081335A1 (en) 2018-10-15 2019-10-10 Laser system with staircased slow-axis collimators

Publications (4)

Publication Number Publication Date
JP2022508765A JP2022508765A (ja) 2022-01-19
JP2022508765A5 JP2022508765A5 (https=) 2022-04-07
JPWO2020081335A5 JPWO2020081335A5 (https=) 2022-04-07
JP7153862B2 true JP7153862B2 (ja) 2022-10-17

Family

ID=70160418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021545363A Active JP7153862B2 (ja) 2018-10-15 2019-10-10 階段状スロー軸コリメータを有するレーザシステム

Country Status (5)

Country Link
US (3) US11183816B2 (https=)
JP (1) JP7153862B2 (https=)
CN (1) CN112868150B (https=)
DE (1) DE112019003882B4 (https=)
WO (1) WO2020081335A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7153862B2 (ja) * 2018-10-15 2022-10-17 パナソニックＩｐマネジメント株式会社 階段状スロー軸コリメータを有するレーザシステム
US11095084B1 (en) * 2019-02-07 2021-08-17 Panasonic Intellectual Property Management Co., Ltd. Laser system with isolated optical cavity
WO2023287954A1 (en) * 2021-07-16 2023-01-19 Panasonic Intellectual Property Management Co, Ltd Single emitter stacking for wavelength-beam-combining laser systems
CN115902832B (zh) * 2023-01-05 2026-02-24 北京小兀科技有限公司 一种解决单线激光雷达拖尾的方法
JP7412662B1 (ja) * 2023-07-12 2024-01-12 三菱電機株式会社 レーザ装置およびレーザ加工装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070291812A1 (en) 2004-06-16 2007-12-20 Petersen Paul M Segmented Diode Laser System
US20120033697A1 (en) 2010-08-03 2012-02-09 President And Fellows Of Harvard College Wavelength beam combining of quantum cascade laser arrays
JP2012508453A (ja) 2008-11-04 2012-04-05 マサチューセッツ インスティテュート オブ テクノロジー ２次元レーザ素子の外部キャビティ１次元多波長ビーム結合
CN102916341A (zh) 2012-10-31 2013-02-06 中国科学院长春光学精密机械与物理研究所 一种单管半导体激光器合束方法
JP2013521666A (ja) 2010-03-05 2013-06-10 テラダイオード，インコーポレーテッド 波長ビーム結合システムおよび方法
WO2014087726A1 (ja) 2012-12-03 2014-06-12 三菱電機株式会社 半導体レーザ装置
US20150331245A1 (en) 2012-02-22 2015-11-19 Parviz Tayebati Wavelength beam combining laser systems with micro-optics
US20150362739A1 (en) 2014-06-13 2015-12-17 James Zambuto Optical alignment systems and methods for wavelength beam combining laser systems
US20160161752A1 (en) 2013-03-15 2016-06-09 Trumpf Laser Gmbh + Co. Kg Device for wavelength combining of laser beams
JP2018518048A (ja) 2015-05-13 2018-07-05 トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングＴＲＵＭＰＦ Ｌａｓｅｒ ＧｍｂＨ 可変フィードバック制御をともなう稠密波長ビーム結合

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4057861B2 (ja) * 2002-08-20 2008-03-05 松下電器産業株式会社 半導体レーザ装置及びその製造方法
US6894846B1 (en) * 2003-10-30 2005-05-17 Alliance Fiber Optic Products Optical add/drop apparatus and the method for making the same
US8488245B1 (en) 2011-03-07 2013-07-16 TeraDiode, Inc. Kilowatt-class diode laser system
JP5832455B2 (ja) 2010-03-05 2015-12-16 テラダイオード， インコーポレーテッド 選択的再配置および回転波長ビーム結合システムならびに方法
US8670180B2 (en) 2010-03-05 2014-03-11 TeraDiode, Inc. Wavelength beam combining laser with multiple outputs
US9256073B2 (en) 2010-03-05 2016-02-09 TeraDiode, Inc. Optical cross-coupling mitigation system for multi-wavelength beam combining systems
US8724222B2 (en) 2010-10-31 2014-05-13 TeraDiode, Inc. Compact interdependent optical element wavelength beam combining laser system and method
US8891579B1 (en) * 2011-12-16 2014-11-18 Nlight Photonics Corporation Laser diode apparatus utilizing reflecting slow axis collimators
WO2013119858A1 (en) * 2012-02-07 2013-08-15 Dueck Robert Two-dimensional laser system employing two dispersive elements
US9325144B2 (en) 2012-02-14 2016-04-26 TeraDiode, Inc. Two-dimensional multi-beam stabilizer and combining systems and methods
US9104029B2 (en) 2012-02-22 2015-08-11 TeraDiode, Inc. Multi-wavelength beam combining system and method
US9746679B2 (en) 2012-02-22 2017-08-29 TeraDiode, Inc. Wavelength beam combining laser systems utilizing lens roll for chief ray focusing
US9587977B2 (en) * 2012-08-31 2017-03-07 Nikon Corporation Boresight error monitor for laser radar integrated optical assembly
US20140240831A1 (en) 2012-11-28 2014-08-28 TeraDiode, Inc. Stabilization of High-Power WBC Systems
US9335551B2 (en) 2012-11-28 2016-05-10 TeraDiode, Inc. Welding techniques using multi-wavelength beam combining systems
CN203398519U (zh) * 2013-07-29 2014-01-15 武汉锐科光纤激光器技术有限责任公司 一种斜面式多管半导体激光器耦合装置
WO2015191542A1 (en) 2014-06-14 2015-12-17 TeraDiode, Inc. Stabilization of wavelength beam combining laser systems in the non-wavelength beam combining direction
US20170222401A1 (en) 2015-05-13 2017-08-03 Trumpf Laser Gmbh Dense wavelength beam combining with variable feedback control
CN104979749B (zh) * 2015-06-25 2017-11-28 鞍山伟光力激光科技有限公司 一种高功率半导体光纤耦合激光器及其耦合方法
EP3184232B1 (en) * 2015-12-23 2025-05-28 Universität Stuttgart Drilling device, method, and use
WO2017127526A1 (en) * 2016-01-20 2017-07-27 TeraDiode, Inc. Wavelength beam combining laser systems utilizing prisms for beam quality improvement and bandwidth reduction
CN207074784U (zh) * 2017-08-16 2018-03-06 江苏天元激光科技有限公司 一种多波长高功率半导体激光器
JP7153862B2 (ja) * 2018-10-15 2022-10-17 パナソニックＩｐマネジメント株式会社 階段状スロー軸コリメータを有するレーザシステム

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070291812A1 (en) 2004-06-16 2007-12-20 Petersen Paul M Segmented Diode Laser System
JP2012508453A (ja) 2008-11-04 2012-04-05 マサチューセッツ インスティテュート オブ テクノロジー ２次元レーザ素子の外部キャビティ１次元多波長ビーム結合
JP2013521666A (ja) 2010-03-05 2013-06-10 テラダイオード，インコーポレーテッド 波長ビーム結合システムおよび方法
US20120033697A1 (en) 2010-08-03 2012-02-09 President And Fellows Of Harvard College Wavelength beam combining of quantum cascade laser arrays
US20150331245A1 (en) 2012-02-22 2015-11-19 Parviz Tayebati Wavelength beam combining laser systems with micro-optics
CN102916341A (zh) 2012-10-31 2013-02-06 中国科学院长春光学精密机械与物理研究所 一种单管半导体激光器合束方法
WO2014087726A1 (ja) 2012-12-03 2014-06-12 三菱電機株式会社 半導体レーザ装置
US20160161752A1 (en) 2013-03-15 2016-06-09 Trumpf Laser Gmbh + Co. Kg Device for wavelength combining of laser beams
US20150362739A1 (en) 2014-06-13 2015-12-17 James Zambuto Optical alignment systems and methods for wavelength beam combining laser systems
JP2018518048A (ja) 2015-05-13 2018-07-05 トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングＴＲＵＭＰＦ Ｌａｓｅｒ ＧｍｂＨ 可変フィードバック制御をともなう稠密波長ビーム結合

Also Published As

Publication number Publication date
CN112868150A (zh) 2021-05-28
US20230275404A1 (en) 2023-08-31
CN112868150B (zh) 2024-07-30
JP2022508765A (ja) 2022-01-19
US11682882B2 (en) 2023-06-20
DE112019003882B4 (de) 2022-12-01
US11183816B2 (en) 2021-11-23
DE112019003882T5 (de) 2021-04-22
US20220045483A1 (en) 2022-02-10
WO2020081335A9 (en) 2020-12-30
WO2020081335A1 (en) 2020-04-23
US20200119525A1 (en) 2020-04-16
US12107395B2 (en) 2024-10-01

Similar Documents

Publication Publication Date Title
JP7153862B2 (ja) 階段状スロー軸コリメータを有するレーザシステム
JP6547072B2 (ja) ビーム品質改良および帯域幅低減のためのプリズムを利用する波長ビーム組み合わせレーザシステム
US10241338B2 (en) Wavelength beam combining laser systems utilizing lens roll for chief ray focusing
CN102986097B (zh) 选择性重新定位与旋转波长光束组合系统与方法
US9350141B2 (en) Stabilization of wavelength beam combining laser systems in the non-wavelength beam combining direction
JP2022508765A5 (https=)
JP7296605B2 (ja) 波長ビーム結合共振器のアライメントのためのシステムおよび方法
JP6585171B2 (ja) 波長ビーム結合レーザシステムのための光学相互結合軽減システム
JP7126137B2 (ja) 波長合成技術用レーザシステムにおけるパワー及びスペクトラムのモニタリング
US8817832B2 (en) Multi-wavelength diode laser array
CN104678557A (zh) 高功率波长光束组合系统的稳定化
JPWO2020081335A5 (https=)
WO2015191451A1 (en) Wavelength beam combining laser systems utilizing lens roll for chief ray focusing

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210611

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220330

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220502

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220510

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220602

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220823

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220920

R151 Written notification of patent or utility model registration

Ref document number: 7153862

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151