JP7131336B2 - 光偏向装置、距離測定装置、及び移動体 - Google Patents
光偏向装置、距離測定装置、及び移動体 Download PDFInfo
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- JP7131336B2 JP7131336B2 JP2018223369A JP2018223369A JP7131336B2 JP 7131336 B2 JP7131336 B2 JP 7131336B2 JP 2018223369 A JP2018223369 A JP 2018223369A JP 2018223369 A JP2018223369 A JP 2018223369A JP 7131336 B2 JP7131336 B2 JP 7131336B2
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Description
まず、実施形態の可動装置を適用した光走査システムについて、図1~図4に基づいて詳細に説明する。
次に、実施形態の可動装置を適用した画像投影装置について、図5および図6を用いて詳細に説明する。
次に、実施形態の可動装置13を適用した光書込装置について図7および図8を用いて詳細に説明する。
次に、上記実施形態の可動装置を適用した距離測定装置について、図9および図10を用いて詳細に説明する。
次に、上記実施形態の可動装置を自動車のヘッドライトに適用したレーザヘッドランプ50について、図11 を用いて説明する。図11は、レーザヘッドランプ50の構成の一例を説明する概略図である。
次に、上記実施形態の可動装置を適用したヘッドマウントディスプレイ60について、図12~13を用いて説明する。ここでヘッドマウントディスプレイ60は、人間の頭部に装着可能な頭部装着型ディスプレイで、例えば、眼鏡に類する形状とすることができる。ヘッドマウントディスプレイを、以降ではHMDと省略して示す。
次に、実施形態の可動装置のパッケージングについて図14を用いて説明する。
まず、可動装置について図15~図16を用いて詳細に説明する。
次に、可動装置の駆動梁を駆動させる制御装置の制御の詳細について説明する。
<光偏向装置の構成>
次に、上述で説明した可動装置13を有する第1の実施形態に係る光偏向装置の構成について図19~図20を参照して説明する。図19は、本実施形態に係る光偏向装置の構成の一例を説明する図であり、(a)は平面図であり、(b)は(a)のP-P断面図である。
次に、本実施形態に係る光偏向装置の製造方法について説明する。図22は、本実施形態に係る光偏向装置の製造方法の一例を示すフローチャートである。
(走査角度の拡大の効果)
ここで、本実施形態の効果の説明に先立ち、図24を参照して比較例を説明する。図24は比較例に係る光偏向装置の構成を説明する断面図である。
一方、本実施形態に係る製造方法では、セラミック基板70上の金属薄膜81cによる円環図形82の中心と、反射面14の平面中心が高精度に一致させる仮配置をした後、金属薄膜81cと光透過部材80の被固定部位に設けた金属層との間に介在させた半田を溶解させる。これにより、加熱で半田が溶解した際に、金属薄膜81cと金属層との間で濡れ広がる半田の表面積が大きくなるため、大きな表面張力を発現させることができ、表面張力の作用で仮配置からの位置ずれを低減させるセルフアライメント効果を得ることができる。そして、半田接合時における光透過部材80とセラミック基板70との間の位置ずれを抑制し、光透過部材80の半球の曲率中心と、可動装置13の反射面14における入射光の反射位置とを高精度に合わせることができる。
第1の実施形態に係る変形例1では、光透過部材が、中空の円錐状の形状を含む例を説明する。なお、既に説明した実施の形態と同一の構成部についての説明は省略する場合がある。
第1の実施形態に係る変形例2では、光透過部材が、セラミック基板の平面部と交差する方向を円筒軸方向とする中空の円筒状の形状を含む例を説明する。
第1の実施形態に係る変形例2では、光透過部材が、可動部の回動軸に沿った方向を円筒軸方向とする中空の半円筒状の形状を含む例を説明する。
次に、第2の実施形態の光偏向装置を、図28及び図29を参照して説明する。なお、既に説明した実施の形態と同一の構成部についての説明は省略する場合がある。
次に、第3の実施形態の光偏向装置を、図30を参照して説明する。
11 制御装置
12、12b 光源装置
13、13A 可動装置
14 反射面
15 被走査面
25 光源装置ドライバ
26 可動装置ドライバ
30 制御部
31 駆動信号出力部
50 レーザヘッドランプ
51 ミラー
52 透明板
60 ヘッドマウントディスプレイ
60a フロント
60b テンプル
61 導光板
62 ハーフミラー
63 装着者
70、76 セラミック基板(基板の一例)
70a 平面部
13a 平面部(第2平面部の一例)
76a 平面部(第1平面部の一例)
70b、76b キャビティ(凹部の一例)
71 スペーサ部材
72 ワイヤ
80、80a、80b、80c 光透過部材
81、84 接合部
81a 金属層
81b 半田層
81c 金属薄膜
82 円環図形(閉図形の一例)
82c 矩形図形(閉図形の一例)
90 突起部
120 可動部
130a、130b 駆動梁
131a~131f 圧電駆動部a
132a~132f 圧電駆動部b
140、140a 支持部
150 電極接続部
161 シリコン支持層
162 酸化シリコン層
163 シリコン活性層
201 下部電極
202 圧電部
203 上部電極
400 自動車
701 自動車(移動体の一例)
500 ヘッドアップディスプレイ装置
650 レーザプリンタ
700 ライダ装置
702 被対象物
801 パッケージ部材
802 取付部材
803 透過部材
E軸 回動軸
Claims (9)
- 平面部と、凹部と、を含む基板と、
前記凹部の底部に配置されたスペーサ部材と、
前記スペーサ部材上に配置された支持部と、
前記平面部以上の高さで光を反射する反射面を備え、前記支持部に回動可能に支持された可動部と、
前記可動部を覆い、前記平面部上に配置された光透過部材と、を有し、
前記平面部上には、金属薄膜により閉図形が形成され、
前記平面部上に固定される前記光透過部材の被固定部位には金属層が設けられ、
前記光透過部材は、前記閉図形の前記金属薄膜と、前記被固定部位の前記金属層と、が接合されて、前記閉図形上に固定されており、
前記閉図形上の前記光透過部材の外側には、少なくとも3つの突起部が形成されている
光偏向装置。 - 前記閉図形は円環図形である請求項1に記載の光偏向装置。
- 前記光透過部材は、中空の半球状の形状を含む請求項1、又は2に記載の光偏向装置。
- 前記光透過部材は、中空の円錐状の形状を含む請求項1、又は2に記載の光偏向装置。
- 前記光透過部材は、前記平面部、又は前記第2平面部と交差する方向を円筒軸方向とする中空の円筒状の形状を含む
請求項1、又は2に記載の光偏向装置。 - 前記光透過部材は、前記可動部の回動軸に沿った方向を円筒軸方向とする中空の半円筒状の形状を含む
請求項1に記載の光偏向装置。 - 前記可動部にそれぞれの一端が接続され、前記可動部を挟んで、前記可動部を回動可能に支持する1対の駆動梁を有し、
前記可動部は、前記支持部に前記1対の駆動梁を介して回動可能に支持されている
請求項1乃至6の何れか1項に記載の光偏向装置。 - 請求項1乃至7の何れか1項に記載の光偏向装置を有する距離測定装置。
- 請求項8の距離測定装置を有する移動体。
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