JP7114169B2 - Cutting blade shaping method - Google Patents

Description

The present invention relates to a cutting blade shaping method for cutting a workpiece such as a semiconductor wafer.

2. Description of the Related Art Cutting apparatuses are widely used for cutting plate-like workpieces such as semiconductor wafers, ceramic substrates, resin substrates, and glass substrates. For example, a cutting machine is used to divide a semiconductor wafer when manufacturing device chips including an electronic device or the like, or to divide a ceramic capacitor sheet. Cutting is performed by rotating an annular cutting blade attached to the tip of the spindle of the cutting device to cut into the workpiece.

Cutting blades of various shapes are used for cutting according to the purpose of the processing. For example, in Patent Document 1, in order to form a groove having a V-shaped cross-sectional shape along a planned division line (street) of a semiconductor wafer, a V-shaped cutting is performed in which the contour of the tip corresponds to the shape of the groove. A blade approach is disclosed. Further, Patent Document 2 discloses a method of forming grooves using a cutting blade with a V-shaped contour at the tip in order to expose an alignment mark on the surface of a ceramic chip capacitor sheet.

A cutting blade having a surface inclined with respect to the width direction at its tip, such as the above V-shaped cutting blade, can be used, for example, by placing a cutting blade with a rectangular contour at the tip under predetermined conditions. It is obtained by cutting with a grindstone) and shaping the cutting blade so that the tip thereof is inclined.

JP 2009-105211 A Japanese Unexamined Patent Application Publication No. 2004-39906

The above shaping of the cutting blade is performed, for example, by repeating the process of cutting the dresser board with the cutting blade many times so that linear grooves are formed on the surface of the dresser board. Therefore, when the cutting blade is shaped, a large number of grooves are formed on the surface of the dresser board, and the dresser board with the grooves formed over the entire surface is discarded. Therefore, there is a problem that a large number of dresser boards are used for shaping the cutting blade, increasing the cost.

Further, in the above method, when shaping the tip of the cutting blade, the dresser board is cut with the cutting blade so that a groove deep enough to accommodate the tip is formed in the surface of the dresser board. As a result, there is a problem that the cutting blade wears out significantly during shaping.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for shaping a cutting blade that can save the dresser board. Another object of the present invention is to provide a method for shaping a cutting blade that causes less wear of the cutting blade.

According to the present invention, a cutting apparatus comprising a chuck table for holding a workpiece and a cutting means having a cutting blade for cutting the workpiece held by the chuck table is used to: A cutting blade shaping method for forming an inclination on the side surface of the tip of the cutting blade, comprising: a holding step of holding a dresser board by the chuck table; and placing the cutting blade on the dresser board held by the chuck table. a groove forming step of forming a linear groove in the dresser board by cutting; By positioning the cutting blade and the dresser board relative to each other along the length direction of the groove, one side surface of the cutting blade is moved to one side wall of the dresser board. and positioning the cutting blade so that the other side surface side of the tip of the cutting blade cuts into the other side wall side of the dresser board exposed inside the groove, and the cutting a second cutting step of cutting the other side surface of the cutting blade into the other side wall of the dresser board by relatively moving the blade and the dresser board along the length direction of the groove; and by the first cutting step and the second cutting step, one of the tip portions of the cutting blade is tapered outward in the radial direction of the cutting blade. A method of shaping a cutting blade is provided that forms a slope on one side and the other side.

Moreover, in the present invention, the first cutting step and the second cutting step may be alternately performed. Further, in the present invention, after the first cutting step is continuously performed a plurality of times to form an inclination on one side surface of the tip portion of the cutting blade, the second cutting step is continuously performed a plurality of times. may be implemented to form a bevel on the other side of the tip of the cutting blade .

In the method for shaping a cutting blade according to the present invention, the side wall of the dresser board formed by a single groove is cut a plurality of times by the side face of the cutting blade for shaping. As a result, compared to the conventional method of shaping the cutting blade by repeating the process of forming grooves on the surface of the dresser board, the area where the grooves are formed on the surface of the dresser board can be reduced, and the dresser board can be saved. can be done.

Further, in the first cutting step and the second cutting step, the cutting blade is moved along the groove formed in the dresser board in advance, and the side surface of the cutting blade is brought into contact with the side wall of the dresser board to cut the cutting blade. perform shaping. As a result, compared to the conventional method of shaping the cutting blade while forming new grooves on the surface of the dresser board, the widthwise central portion of the cutting blade reduces the amount that cuts the dresser board, suppressing the wear of the cutting blade. can.

It is a perspective view which shows the structural example of a cutting device. It is a perspective view which shows the structural example of a cutting means. FIG. 4 is a perspective view showing how the dresser board is attached to the dicing tape; FIG. 4 is a cross-sectional view showing how the dresser board is held by the chuck table; FIG. 4 is a perspective view schematically showing how grooves are formed in a dresser board; FIG. 4 is a cross-sectional view showing a state of processing feed; FIG. 4 is a perspective view showing a dresser board that has undergone a groove forming process; FIG. 4 is a perspective view schematically showing how the tip of the cutting blade is shaped; 9(A), 9(B), and 9(C) are enlarged front views enlarging the tip of the cutting blade and the groove formed in the dresser board. 10(A), 10(B), and 10(C) are enlarged front views enlarging the tip of the cutting blade and the groove formed in the dresser board. 11(A), 11(B), and 11(C) are enlarged front views enlarging the tip of the cutting blade and the groove formed in the dresser board. 12(A), 12(B), and 12(C) are enlarged front views enlarging the tip of the cutting blade and the groove formed in the dresser board.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, a configuration example of a cutting device that can be used to implement the cutting blade shaping method according to the present embodiment will be described. FIG. 1 is a perspective view showing a configuration example of the cutting device 2. As shown in FIG.

The cutting device 2 includes a base 4 that supports each component constituting the cutting device 2 and a cover 6 that covers the upper surface of the base 4 . Inside the cover 6, a cutting means (cutting unit) 8 for cutting a plate-like workpiece 11 such as a semiconductor wafer, a ceramic substrate, a resin substrate, or a glass substrate is accommodated. The cutting means 8 is moved in the index feed direction (Y-axis direction) by a cutting means moving mechanism (not shown).

A chuck table 10 for holding a workpiece 11 is provided below the cutting means 8 . The chuck table 10 is moved, for example, in the processing feed direction (X-axis direction) by a chuck table moving mechanism (not shown), and rotated by a rotation mechanism (not shown) around a rotation axis substantially parallel to the vertical direction (Z-axis direction). rotate to

A cassette table 12 is installed at the corner of the base 4 . A cassette 14 capable of accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette table 12 . The cassette table 12 is moved in the vertical direction (Z-axis direction) by, for example, a cassette table moving mechanism (not shown), and adjusts the height of the cassette 14 so that the workpiece 11 can be appropriately carried out and carried in.

A touch panel type monitor 16 serving as a user interface is provided on the side 6a side of the cover 6 . This monitor 16 is connected to a control unit (not shown) or the like that controls each part of the cutting device 2 .

FIG. 2 is a perspective view showing a configuration example of the cutting means 8. As shown in FIG. The cutting means 8 has a spindle housing 18, in which a spindle 20 driven to rotate by a motor (not shown) is accommodated. The tip of the spindle 20 is exposed to the outside of the spindle housing 18 , and a blade mount 22 including a boss (projection) 24 and a fixed flange 26 is attached to the tip by a nut 28 . A male thread 30 is formed on the boss portion 24 .

An annular cutting blade 32 for cutting the workpiece 11 is attached to the cutting means 8 . The cutting blade 32 is, for example, an annular cutting blade whose entirety is made of metal or resin. By inserting the boss portion 24 of the blade mount 22 into the mounting hole of the cutting blade 32, further inserting the boss portion 24 into the detachable flange 34, and screwing the fixing nut 36 onto the male thread 30 and tightening it, the cutting blade 32 is It is sandwiched from both sides by the fixed flange 26 and the detachable flange 34 and fixed to the tip of the spindle 20 .

By rotating the spindle 20 , the cutting blade 32 is rotated, and the cutting blade 32 cuts into the workpiece 11 held by the chuck table 10 , thereby cutting the workpiece 11 .

In this embodiment, the cutting blade 32 is shaped using the cutting device as described above. Specifically, a dresser board for shaping the cutting blade 32 is held by the chuck table 10, and after forming a linear groove in the dresser board, the cutting blade 32 is cut into the dresser board a plurality of times along the groove. The shape of the tip of the cutting blade 32 is corrected by inserting it. Details of the cutting blade shaping method according to the present embodiment will be described below.

<Holding process>
In this embodiment, first, a holding step of holding the dresser board by the chuck table 10 of the cutting device 2 is performed. FIG. 3 is a perspective view showing how the dresser board 13 is attached to the dicing tape 38. As shown in FIG. First, an annular frame 40 is attached to the outer peripheral portion of the dicing tape 38 . Then, the rear surface 13b side of the flat dresser board 13 used for shaping the cutting blade 32 is attached to the dicing tape 38 so that the front surface 13a side is exposed upward.

The dresser board 13 is produced by fixing abrasive grains such as white alundum (WA) or green carborundum (GC) with a binding material such as resin or ceramics. However, the material, shape, structure, etc. of the dresser board 13 are not limited.

After that, the dresser board 13 attached to the dicing tape 38 is held by the chuck table 10 of the cutting device 2 . FIG. 4 is a sectional view showing how the dresser board 13 is held by the chuck table 10. As shown in FIG. The upper surface of the chuck table 10 serves as a holding surface 10a for sucking and holding the workpiece 11. The holding surface 10a is connected to a suction source (not shown) through a suction path formed inside the chuck table 10. there is

When the dresser board 13 is held by the chuck table 10, first, the dicing tape 38 is brought into contact with the holding surface 10a of the chuck table 10 so that the surface 13a side of the dresser board 13 is exposed upward. The attached frame 40 is fixed with a clamp 42. - 特許庁In this state, the dresser board 13 is suction-held on the chuck table 10 via the dicing tape 38 by applying the negative pressure of the suction source to the holding surface 10a.

Through the above steps, the dresser board 13 can be held by the chuck table 10 . Instead of the chuck table 10, a chuck table that holds the dresser board 13 by a mechanical method, an electrical method, or the like may be used.

<Groove forming process>
Next, a groove forming step is performed to form linear grooves in the dresser board 13 . FIG. 5 is a perspective view schematically showing how grooves are formed in the dresser board 13. As shown in FIG.

The cutting blade 32 shown in FIG. 5 is covered with a wheel cover 44 attached to the spindle housing 18 . The wheel cover 44 includes a pipe 46 into which a cutting fluid such as pure water is introduced, and a pair of nozzles 48 connected to the pipe 46 and arranged on both sides (front and back) of the cutting blade 32 . The cutting fluid introduced into the pipe 46 is jetted from a pair of nozzles 48 toward both side surfaces of the cutting blade 32 .

When the cutting blade 32 cuts into the dresser board 13, the cutting blade 32 and the dresser board 13 are cooled by supplying cutting fluid from the nozzle 48 to the contact area between the cutting blade 32 and the dresser board 13. Cutting defects caused by frictional heat generated between 32 and dresser board 13 are suppressed. Also, cutting waste generated from the dresser board 13 and the like is discharged outside the contact area between the cutting blade 32 and the dresser board 13 .

In the groove forming step, first, the cutting means 8 is lowered vertically while the cutting blade 32 provided in the cutting means 8 is rotated, and the lower end of the cutting blade 32 is lowered below the surface 13a of the dresser board 13 and It is arranged outside the dresser board 13 so as to be positioned above the back surface 13b. After that, the cutting blade 32 and the dresser board 13 are relatively moved. Specifically, the chuck table 10 is moved in the processing feed direction, that is, in the direction parallel to the holding surface 10 a and perpendicular to the axis of the spindle 20 .

FIG. 6 is a cross-sectional view showing a state of processing feed. As shown in FIG. 6, with the cutting blade 32 rotated in the direction indicated by arrow A, the chuck table 10 is moved in the direction indicated by arrow B (processing feed direction). As a result, the dresser board 13 is cut by the cutting blade 32 to form a linear groove 13c on the surface 13a side of the dresser board 13 .

FIG. 7 is a perspective view showing the dresser board 13 that has undergone the groove forming process. A linear groove 13 c having a width substantially equal to the width of the cutting blade 32 is formed on the surface 13 side of the dresser board 13 by the groove forming process. The dresser board 13 has one side wall (first side wall) 13d and the other side wall (second side wall) 13e which are exposed inside the groove 13c and whose height matches the depth of the groove 13c. formed.

Although FIG. 7 shows the dresser board 13 in which one groove 13c is formed, the cutting blade 32 may be cut into the dresser board 32 a plurality of times to form a plurality of parallel grooves 13c.

In the above description, the grooves 13c are formed in the dresser board 13 by the cutting blade 32, but the chuck table 10 may hold the dresser board 13 in which grooves are formed in advance. In this case, the groove forming process can be omitted. It should be noted that the width of the grooves formed in advance in the dresser board 13 can be, for example, greater than or equal to the width of the cutting blade 32 .

<Shaping process>
Next, using the dresser board 13 obtained through the groove forming process, a shaping process for shaping the tip of the cutting blade 32 is performed. FIG. 8 is a perspective view schematically showing how the tip of the cutting blade 32 is shaped.

In the shaping process, the side wall of the tip of the rotating cutting blade 32 is cut into the side wall exposed inside the groove 13 c of the dresser board 13 held by the chuck table 10 . As a result, the side surface of the tip of the cutting blade 32 is worn and its shape is corrected.

The shaping process includes a first cutting process in which one side surface of the tip of the cutting blade 32 is cut into one of the side walls exposed inside the groove 13c of the dresser board 13, and the other side of the tip of the cutting blade 32. and a second cutting step of cutting the side surface side into the other side wall exposed inside the groove 13c of the dresser board 13 .

By performing the first cutting step and the second cutting step, both side surfaces of the tip portion of the cutting blade 32 are inclined, for example, to obtain the cutting blade 32 having a shape that tapers outward in the radial direction. be able to. Details of the first cutting process and the second cutting process will be described below.

[First cutting step]
In the shaping process, first, one side of the tip of the cutting blade 32 is cut into the side wall of the dresser board 13 to correct the shape of one side of the tip of the cutting blade 32, which is a first cutting process. do. 9(A), 9(B), and 9(C) show the grooves formed in the tip of the cutting blade 32 and the dresser board 13 viewed from the length direction of the groove 13c in the first cutting step. 13c is an enlarged front view of FIG. Here, for convenience of explanation, the width of the groove 13c and the thickness of the cutting blade 32 are exaggerated.

The dresser board 13 includes a first side wall 13d and a second side wall 13e which are exposed inside the groove 13c and whose height matches the depth of the groove 13c. The cutting blade 32 also includes, at its tip, one side surface (first side surface) 32a and the other side surface (second side surface) 32b corresponding to both side surfaces when viewed in the radial direction.

In the first cutting step, first, the cutting blade 32 is arranged at the end 13f (see FIG. 8) of the groove 13c formed in the dresser board 13. As shown in FIG. The cutting blade 32 is arranged such that its radial direction substantially coincides with the longitudinal direction of the groove 13c.

Here, as shown in FIG. 9A, the cutting blade 32 has a first side surface 32a that overlaps the first side wall 13d side of the dresser board 13 when viewed from the radial direction, and a second side surface 32b that overlaps the dresser board. 13 is positioned so as not to overlap with the side of the second side wall 13e. At this time, the distance between the upper end of the first side wall 13d and the region of the first side surface 32a whose height is the same as the upper end is assumed to be D11. Further, the lower end 32c of the cutting blade 32 is arranged above the back surface 13b of the dresser board 13. As shown in FIG.

Thereafter, the chuck table 10 is processed and fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length direction of the groove 13c. As a result, the first side surface 32a side of the cutting blade 32 cuts into the first side wall 13d side of the dresser board 13, and the first side wall 13d side of the dresser board 13 is cut. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D11.

When the first side surface 32a side of the cutting blade 32 cuts into the first side wall 13d side of the dresser board 13, the first side surface 32a of the cutting blade 32 is worn and the shape is corrected. Further, by cutting the side of the first side wall 13d, a new first side wall 13g is formed on the dresser board 13 (see FIG. 9B).

Next, the cutting blade 32 is again arranged at the end portion 13f (see FIG. 8), and cutting is performed in the same manner so that the cutting blade 32 cuts into the first side wall 13g side. However, as shown in FIG. 9B, the cutting blade 32 is arranged so that the distance between the upper end of the first side wall 13g and the region of the first side surface 32a whose height is the same as the upper end is D12. Positioned. The value of D12 may be the same as or different from D11. For example, D12 can be set to a value greater than D11.

When processing and feeding is performed in this state, the first side surface 32a side of the cutting blade 32 cuts into the first side wall 13g side, and the first side wall 13g side of the dresser board 13 is cut. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D12. This cutting further corrects the shape of the cutting blade 32 on the side of the first side surface 32a. Further, by cutting the side of the first side wall 13g, a new first side wall 13h is formed on the dresser board 13 (see FIG. 9(C)).

After that, the cutting blade 32 is arranged again at the end portion 13f (see FIG. 8), and cutting is performed in the same procedure so that the cutting blade 32 cuts into the first side wall 13h side. However, as shown in FIG. 9(C), the cutting blade 32 is arranged so that the distance between the upper end of the first side wall 13h and the region of the first side wall 32a whose height is the same as the upper end is D13. Positioned. The value of D13 may be the same as or different from D11 and D12. For example, D13 can be set to a value greater than D12.

When processing and feeding is performed in this state, the first side surface 32a side of the cutting blade 32 cuts into the first side wall 13h side, and the first side wall 13h side of the dresser board 13 is cut. At this time, the width of the cutting blade 32 cut into the dresser board 13 (cutting width) is D13. This cutting further corrects the shape of the cutting blade 32 on the side of the first side surface 32a.

By repeating the first cutting step of cutting the first side surface 32a side of the cutting blade 32 into the side wall of the dresser board 13 in this way, the first side surface 32a side of the tip portion of the cutting blade 32 is shaped. , the first side surface 32a may be beveled so that the cutting blade 32 tapers radially outward.

There is no limit to the number of times the first cutting step is performed and the cutting width of the cutting blade 32, and these are appropriately set so that the first side surface 32a side of the cutting blade 32 is corrected to a desired shape. For example, cutting with the above-described cutting widths D11, D12, and D13 may be performed a plurality of times, and in this case, the number of times of cutting can be set freely. In the above description, the cutting blade 32 cuts the side wall of the dresser board 13 with three types of cutting widths D11, D12, and D13, but the number of types of cutting widths can be freely set.

[Second cutting step]
Next, a second cutting step is performed in which the other side of the tip of the cutting blade 32 is cut into the side wall of the dresser board 13 to modify the shape of the other side of the tip of the cutting blade 32 . 10(A), 10(B), and 10(C) show the grooves formed in the tip of the cutting blade 32 and the dresser board 13 viewed from the length direction of the groove 13c in the second cutting step. 13c is an enlarged front view of FIG. The first side wall 13i corresponds to the first side wall after the completion of the first cutting step.

In the second cutting step, first, the cutting blade 32 is arranged at the end 13f (see FIG. 8) of the groove 13c formed in the dresser board 13. As shown in FIG. The cutting blade 32 is arranged such that its radial direction substantially coincides with the longitudinal direction of the groove 13c.

Here, as shown in FIG. 10(A), the first side surface 32a of the cutting blade 32 does not overlap the first side wall 13i side of the dresser board 13 when viewed from the radial direction, and the second side surface 32b of the cutting blade 32 does not overlap the dresser board 13 side. It is positioned so as to overlap the second side wall 13 e side of the board 13 . At this time, the distance between the upper end of the second side wall 13e and the region of the second side surface 32b whose height is the same as the upper end is assumed to be D21. Further, the lower end 32c of the cutting blade 32 is arranged above the back surface 13b of the dresser board 13. As shown in FIG.

Thereafter, the chuck table 10 is processed and fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length direction of the groove 13c. Thereby, the second side surface 32b side of the cutting blade 32 cuts into the second side wall 13e side of the dresser board 13, and the second side wall 13e side of the dresser board 13 is cut. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D21.

When the second side surface 32b side of the cutting blade 32 cuts into the second side wall 13e side of the dresser board 13, the second side surface 32b of the cutting blade 32 is worn and the shape is corrected. Further, a second side wall 13j is newly formed on the dresser board 13 by cutting the second side wall 13e (see FIG. 10B).

Next, the cutting blade 32 is arranged again at the end portion 13f (see FIG. 8), and cutting is performed in the same manner so that the cutting blade 32 cuts into the second side wall 13j side. However, as shown in FIG. 10(B), the cutting blade 32 is arranged so that the distance between the upper end of the second side wall 13j and the region of the second side surface 32b whose height is the same as the upper end is D22. Positioned. The value of D22 may be the same as or different from D21. For example, D22 can be set to a value greater than D21.

When processing and feeding is performed in this state, the second side surface 32b side of the cutting blade 32 cuts into the second side wall 13j side, and the second side wall 13j side of the dresser board 13 is cut. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D22. This cutting further corrects the shape of the cutting blade 32 on the side of the second side surface 32b. Further, the second side wall 13k is newly formed on the dresser board 13 by cutting the second side wall 13j (see FIG. 10(C)).

After that, the cutting blade 32 is arranged again at the end portion 13f (see FIG. 8), and cutting is performed in the same manner so that the cutting blade 32 cuts into the second side wall 13k side. However, as shown in FIG. 10(C), the cutting blade 32 is arranged such that the distance between the upper end of the second side wall 13k and the region of the second side surface 32b whose height is the same as the upper end is D23. Positioned. The value of D23 may be the same as or different from D21 and D22. For example, D23 can be set to a value greater than D22.

When processing and feeding is performed in this state, the second side surface 32b side of the cutting blade 32 cuts into the second side wall 13k, and the second side wall 13k side of the dresser board 13 is cut. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D23. This cutting further corrects the shape of the cutting blade 32 on the side of the second side surface 32b.

By repeating the second cutting step of cutting the second side surface 32b side of the cutting blade 32 into the side wall of the dresser board 13 in this manner, the second side surface 32b side of the tip portion of the cutting blade 32 is shaped. , the second side surface 32b may be beveled so that the cutting blade 32 tapers radially outward.

There is no limit to the number of times the second cutting step is performed and the cutting width of the cutting blade 32, and these are appropriately set so that the second side surface 32b side of the cutting blade 32 is corrected to a desired shape. For example, cutting with the above-described cutting widths D21, D22, and D23 may be performed a plurality of times, and in this case, the number of times of cutting can be set freely. In the above description, the cutting blade 32 cuts the side wall of the dresser board 13 with three types of cut widths D21, D22, and D23, but the number of types of cut widths can be set freely.

As described above, by performing the first cutting step and the second cutting step, both side surfaces of the tip portion of the cutting blade 32 can be inclined. As a result, for example, a cutting blade 32 whose tip portion tapers radially outward (the cutting blade 32 whose tip portion profile is V-shaped or trapezoidal when viewed from the radial direction) can be obtained.

In the shaping process, the side wall of the dresser board 13 formed by the single groove 13c is cut into the side wall of the cutting blade 32 a plurality of times for shaping. As a result, compared to the conventional method of shaping the cutting blade 32 by repeating the step of forming grooves on the surface of the dresser board 13, the area where the grooves are formed on the surface of the dresser board 13 can be reduced. can be saved.

Further, in the first cutting step and the second cutting step, the cutting blade 32 is moved along the groove 13c formed in the dresser board 13 in advance, and the cutting blade 32 moves toward the first side surface 32a side or the second side surface. The 32b side is brought into contact with the dresser board 13. Therefore, compared with the conventional method of shaping the cutting blade 32 while newly forming grooves on the surface of the dresser board 13, the widthwise central portion of the dresser board 13 reduces the cutting amount of the dresser board. Wear of the cutting blade 32 can be suppressed.

In addition, in the above method, the cutting amount of the dresser board 13 by the cutting blade 32 can be reduced compared to the case of forming a new groove in the dresser board 13 and shaping the cutting blade. 13 can be relatively moved. Thereby, the time required for shaping the cutting blade can be shortened.

Furthermore, in the first cutting step and the second cutting step, the groove 13c formed by the cutting blade 32 in the groove forming step and having a shape corresponding to the cutting blade 32 can be used. As a result, the first side surface 32a side and the second side surface 32b side of the cutting blade 32 are evenly brought into contact with the dresser board 13, and the cutting blade 32 can be shaped accurately.

Note that, in the above description, the first cutting step is continuously performed a plurality of times (FIGS. 9A to 9C), and after forming an inclination on the first side surface 32a of the cutting blade 32, the second cutting step is performed. 10(A) to 10(C)) to form an inclination on the second side surface 32b of the cutting blade 32, but the order of cutting is this. is not limited to For example, the first cutting process and the second cutting process can be alternately performed.

In the above description, the first cutting step and the second cutting step are performed using one groove 13c, but the number of grooves 13c used for shaping the cutting blade 32 is not limited. For example, a plurality of grooves 13c are formed in the dresser board 13, the first cutting process is performed multiple times using one groove 13c, and the second cutting process is performed multiple times using the other grooves 13c. can also

<Modified example of shaping process>
In FIGS. 9 and 10, an example in which the cutting blade 32 is cut into the side wall of the dresser board 13 a plurality of times while the height of the cutting blade 32 is constant has been described. In each step, a plurality of cuts with different heights of the cutting blade 32 may be performed. A modification of the shaping process will be described below.

11(A), 11(B), and 11(C) show the tip of the cutting blade 32 and the dresser board 13 viewed from the length direction of the groove 13c in the modification of the first cutting step. Fig. 13 is an enlarged side view showing a groove 13c formed in the groove 13c; FIG. 11(A) shows how the cutting blade 32 is arranged at the end 13f (see FIG. 8) of the groove 13c formed in the dresser board 13, as in FIG. 9(A).

The distance from the surface 13a of the dresser board 13 to the lower end 32c of the cutting blade 32 at this time is D31. D31 is set to a value less than the thickness of the dresser board 13 . In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, the first side surface 32a side of the cutting blade 32 cuts into the first side wall 13d, and the first side wall 13d side of the dresser board 13 is cut.

At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D11. Further, by cutting the side of the first side wall 13d, a new first side wall 13g is formed on the dresser board 13 (see FIG. 11(B)).

Next, as shown in FIG. 11(B), the distance between the upper end of the first side wall 13g and the region of the first side surface 32a whose height is the same as the upper end is D12, and the lower end 32c of the cutting blade 32 is D12. to the surface 13a of the dresser board 13 is D32. In addition, D32 is a value smaller than D31, and the lower end 32c of the cutting blade 32 is arranged above FIG. 11(A).

In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, of the first side surface 32a side of the cutting blade 32, a region located below the surface 13a of the dresser board 13 cuts into the first side wall 13g, and the first side wall 13g side of the dresser board 13 is cut. be.

At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D12. Further, by cutting the side of the first side wall 13g, a new first side wall 13h is formed on the dresser board 13 (see FIG. 11(C)).

Next, as shown in FIG. 11(C), the distance between the upper end of the first side wall 13h and the region of the first side surface 32a whose height is the same as the upper end is D13, and the lower end 32c of the cutting blade 32 is D13. to the surface 13a of the dresser board 13 is D33, the cutting blade 32 is arranged at the end 13f (see FIG. 8). In addition, D33 is a value smaller than D32, and the lower end 32c of the cutting blade 32 is arranged above FIG. 11(B).

In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, of the first side surface 32a side of the cutting blade 32, a region located below the surface 13a of the dresser board 13 cuts into the first side wall 13h, and the first side wall 13h side of the dresser board 13 is cut. be. At this time, the width of the cutting blade 32 cut into the dresser board 13 (cutting width) is D13.

After that, the second cutting process is performed in the same manner as the first cutting process. 12(A), 12(B), and 12(C) show the grooves 13c formed on the tip of the cutting blade 32 and the dresser board 13 as seen from the length direction of the groove 13c in a modified example of the second cutting step. Fig. 13 is an enlarged side view showing a groove 13c formed in the groove 13c; FIG. 12(A) shows how the cutting blade 32 is arranged at the end 13f (see FIG. 8) of the groove 13c formed in the dresser board 13, as in FIG. 10(A). The first side wall 13i corresponds to the first side wall after the completion of the first cutting step.

The distance from the surface 13a of the dresser board 13 to the lower end 32c of the cutting blade 32 at this time is assumed to be D41. D41 is set to a value less than the thickness of the dresser board 13 . In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, the second side wall 32b side of the cutting blade 32 cuts into the second side wall 13e, and the second side wall 13e side of the dresser board 13 is cut.

At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D21. Further, the second side wall 13j is newly formed on the dresser board 13 by cutting the second side wall 13e (see FIG. 12(B)).

Next, as shown in FIG. 12(B), the distance between the upper end of the second side wall 13j and the region of the second side surface 32b whose height is the same as the upper end is D22, and the lower end 32c of the cutting blade 32 is D22. to the surface 13a of the dresser board 13 is D42. In addition, D42 is a value smaller than D41, and the lower end 32c of the cutting blade 32 is arranged above FIG. 12(A).

In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, of the second side surface 32b side of the cutting blade 32, a region located below the surface 13a of the dresser board 13 cuts into the second side wall 13j, and the second side wall 13j side of the dresser board 13 cuts. be done.

At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D22. Further, the second side wall 13k is newly formed on the dresser board 13 by cutting the second side wall 13j (see FIG. 12(C)).

Next, as shown in FIG. 12(C), the distance between the upper end of the second side wall 13k and the region of the second side surface 32b whose height is the same as the upper end is D23, and the lower end 32c of the cutting blade 32 is D23. to the surface 13a of the dresser board 13 is D43, the cutting blade 32 is arranged at the end 13f (see FIG. 8). In addition, D43 is a value smaller than D42, and the lower end 32c of the cutting blade 32 is arranged above FIG. 12(B).

In this state, the chuck table 10 is fed (see FIG. 6) to relatively move the cutting blade 32 and the dresser board 13 along the length of the groove 13c. As a result, of the second side surface 32b side of the cutting blade 32, a region located below the surface 13a of the dresser board 13 cuts into the second side wall 13k, and the second side wall 13k side of the dresser board 13 cuts. be done. At this time, the width of the region of the cutting blade 32 that is cut into the dresser board 13 (cutting width) is D23.

As described above, in the first cutting step and the second cutting step, by performing a plurality of cutting operations with different heights of the cutting blade 32, the number of times of cutting increases toward the lower side of the cutting blade 32. , slopes can be easily formed in the side surfaces 32a and 32b.

The distance from the lower end 32c of the cutting blade 32 to the surface 13a of the dresser board 13 is appropriately set so that both side surfaces of the cutting blade 32 are inclined as desired. 11 and 12 each show an example in which the distance from the lower end 32c of the cutting blade 32 to the surface 13a of the dresser board 13 is changed twice, but the number of changes in the distance can be freely set.

In addition, the structures, methods, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention.

2 Cutting Device 4 Base 6 Cover 6a Side 8 Cutting Means 10 Chuck Table 10a Holding Surface 12 Cassette Table 14 Cassette 16 Monitor 18 Spindle Housing 20 Spindle 22 Blade Mount 24 Boss 26 Fixed Flange 28 Nut 30 Male Thread 32 Cutting Blade 32a One Side side (first side)
32b other side (second side)
32c Lower end 34 Detachable flange 36 Fixing nut 38 Dicing tape 40 Frame 42 Clamp 44 Wheel cover 46 Pipe 48 Nozzle 11 Workpiece 13 Dresser board 13a Front surface 13b Back surface 13c Groove 13d One side wall (first side wall)
13e other side wall (second side wall)
13f end 13g one side wall (first side wall)
13h one side wall (first side wall)
13i one side wall (first side wall)
13j other side wall (second side wall)
13k other side wall (second side wall)

Claims (3)

Using a cutting device comprising a chuck table for holding a workpiece, and a cutting means having a cutting blade for cutting the workpiece held by the chuck table, the tip of the cutting blade is A method for shaping a cutting blade that forms an inclination on the side surface of
a holding step of holding the dresser board by the chuck table;
a groove forming step of forming a linear groove in the dresser board by cutting the cutting blade into the dresser board held on the chuck table ;
The cutting blade is positioned so that one side of the tip of the cutting blade cuts into one of the side walls of the dresser board exposed inside the groove, and the cutting blade and the dresser board are arranged along the length of the groove. a first cutting step of cutting one side wall side of the cutting blade into one side wall side of the dresser board by relatively moving the cutting blade along the longitudinal direction;
The cutting blade is positioned so that the other side of the tip of the cutting blade cuts into the other side wall side of the dresser board exposed inside the groove, and the cutting blade and the dresser board are arranged along the length of the groove. a second cutting step of cutting the other side surface side of the cutting blade into the other side wall side of the dresser board by relatively moving along the width direction;
By the first cutting step and the second cutting step, one side surface and the other side of the tip portion of the cutting blade are cut so that the tip portion of the cutting blade tapers outward in the radial direction of the cutting blade. A method of shaping a cutting blade, characterized by forming a slope on the side surface of the. 2. The method of shaping a cutting blade according to claim 1, wherein said first cutting step and said second cutting step are alternately performed. After the first cutting step is continuously performed a plurality of times to form an inclination on one side surface of the tip of the cutting blade, the second cutting step is continuously performed a plurality of times, and the cutting blade 2. The method of shaping a cutting blade according to claim 1, wherein the slope is formed on the other side surface of the tip of the blade.

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