JP7112645B2 - cleaning equipment - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus, and more particularly to a cleaning apparatus in which, for example, a nozzle penetrates inside a tank and a cleaning liquid is sprayed from the nozzle to clean the inner surface of the tank.

2. Description of the Related Art Conventionally, a washing apparatus is known in which a nozzle is inserted into the inside of a tank or the like to wash the inner surface of the tank (for example, Patent Document 1).
Such a conventional cleaning device has a rotating shaft on the drive side, a turning rotating shaft arranged at the lower end of the rotating shaft, and a nozzle attached to the turning rotating shaft. It is configured to interlock the rotating shaft. During cleaning, the rotary shaft is caused to revolve and rotate through the pair of bevel gears by injecting the cleaning liquid from the nozzle and rotating the rotary shaft. As a result, the nozzle is moved along a three-dimensional locus, so that the cleaning liquid is three-dimensionally sprayed onto the inner surface of the tank for cleaning.

Japanese Patent No. 4636956

By the way, in the cleaning device of Patent Document 1, the movement locus of the nozzle that injects the cleaning liquid is determined by the number of teeth of the pair of bevel gears that are combined, so the movement locus of the cleaning liquid is always constant. For this reason, there is a possibility that cleaning effects may differ between portions of the object to be cleaned (tank) that are hit by the cleaning liquid and portions that are not hit by the cleaning liquid, and cleaning leaks may occur in portions that are not hit by the cleaning liquid.
In addition, as the distance from the nozzle increases, the distance between the moving trajectories of the cleaning liquid increases, and the cleaning pressure also decreases, making it difficult to perform sufficient cleaning, and there is a risk of more uneven cleaning and cleaning leaks. In addition, even if the inner surface of the tank is clean except for some areas, if there are areas that are difficult to wash (unwashed areas), a large amount of cleaning liquid is sprayed from the nozzle to clean the areas that are difficult to wash. Since it is necessary to extend the cleaning time or increase the number of cleanings, there is a problem that the cleaning time increases and the amount of cleaning liquid used increases.
Furthermore, when trying to wash various shapes of objects to be cleaned by spraying the cleaning liquid from the nozzle under the same conditions, for example, when cleaning a pan with an open top, the cleaning liquid is also sprayed upward from the nozzle. As a result, the cleaning solution is consumed unnecessarily and the cleaning time is wasted, resulting in a decrease in cleaning efficiency.

In view of the circumstances described above, the present invention provides a rotating shaft rotatably supported, a first liquid passage formed in the rotating shaft, and a shaft rotatable in a direction substantially orthogonal to the rotating shaft. a swivel rotary shaft supported and revolved about the rotary shaft; a second liquid passage provided in the swivel rotary shaft and communicating with the first liquid passage; a nozzle for injecting the cleaning liquid supplied through the first liquid passage and the second liquid passage in a direction intersecting with the rotation axis; A first bevel gear provided on the tube, a second bevel gear provided on the rotating shaft and meshing with the first bevel gear, a first drive source for rotating the rotating shaft, and rotating the outer tube and a control device for controlling the operation of the first drive source and the second drive source,
A cleaning apparatus in which the nozzle is inserted into the interior of the object to be cleaned, and a cleaning liquid is sprayed from the nozzle to clean the inner surface of the object to be cleaned,
The control device operates the first drive source to rotate the rotary shaft to control the revolution of the turning rotary shaft about the rotary shaft, and operates the second drive source to rotate the outer tube. is rotated to rotate the first bevel gear to control the rotation of the turning rotation shaft,
The control device operates the first drive source and the second drive source simultaneously, and controls the rotational speeds of both the drive sources, respectively , thereby changing the movement trajectory of the nozzle when spraying the cleaning liquid. and

According to such a configuration, by controlling the operation of the first drive source and the second drive source by the control device, the nozzle can be operated even if the combination of the number of teeth of the first bevel gear and the second bevel gear is constant. It can be moved in various trajectories. For example, it is possible to inject the cleaning liquid to a specific portion of the inner surface of the object to be cleaned, and to intensively clean that portion. Therefore , it is possible to suppress consumption of the cleaning liquid and electric power. Also, the washing time can be shortened and the object to be washed can be washed efficiently.

BRIEF DESCRIPTION OF THE DRAWINGS Sectional drawing which shows one Example of this invention. FIG. 2 is an operation explanatory view showing the moving locus of the nozzle of the cleaning device of FIG. 1; FIG. 2 is an operation explanatory view showing the moving locus of the nozzle of the cleaning device of FIG. 1; The front view of the principal part which shows the other Example of this invention. Explanatory drawing of the principal part of FIG. The front view of the principal part which shows the other Example of this invention. Explanatory drawing of the principal part of FIG.

Hereinafter, the present invention will be described with reference to the illustrated embodiments. In FIGS. 1 to 3, reference numeral 1 denotes a cleaning apparatus for cleaning an inner surface 2A of a tank 2 as an object to be cleaned. The cleaning apparatus 1 includes a cleaning unit 4 for ejecting a cleaning liquid W (water) from a nozzle 3 toward an inner surface 2A of a tank 2, and a cover 5 which rotatably supports the cleaning unit 4 and which is provided above the outer peripheral portion. , a first motor 14 that rotates the inner tube 7 , a second motor 16 that rotates the outer tube 15 , and the cover 5 and the cleaning unit 4 supported through the support member 6 . It also has a lifting mechanism 17 that lifts and lowers them when required, and a control device 18 that controls the operation of both the motors 14 and 16 and the lifting mechanism 17 .

Here, first, a general working process for cleaning the tank 2 will be described. When the tank 2 as the object to be cleaned is carried into the cleaning position A, the cleaning unit 4 and the cover 5 are lowered by the required amount by the elevating mechanism 17, so that the cleaning unit 4 is moved into the tank 2. , and the upper end opening 2B of the tank 2 is closed by the lid 5 (see FIG. 2).
In this state, the cleaning liquid W is jetted from the nozzle 3, and the nozzle 3 is revolved around the rotation axis and rotated around the turning rotation axis 8 to move along a three-dimensional movement locus, thereby moving the inner surface of the tank 2. The cleaning liquid W (water) is three-dimensionally sprayed onto 2A to clean the inner surface 2A of the tank 2 (see FIG. 2). The cleaning liquid after cleaning is discharged to the outside from a discharge port (not shown) formed at the bottom of the tank 2 .
After the inner surface 2A of the tank 2 has been cleaned, the lifting mechanism 17 raises the cleaning unit 4 and the cover 5 to their original raised positions, so that the cover 5 is separated from the upper end opening 2B of the tank 2 and the cleaning is completed. The unit 4 is raised to the original position above the opening 2B of the tank 2 and stopped. Thereafter, the tank 2 after cleaning is carried out from the cleaning position A by a carrying-out mechanism (not shown).

As shown in FIG. 1, the cleaning unit 4 includes an outer tube 15 rotatably supported by a support member 6 via a bearing 21, and a shaft rotatably disposed on the inner side of the outer tube 15 via a bearing 22. An inner pipe 7 as a supported rotating shaft, a swiveling rotating shaft 8 horizontally disposed at the position of the lower end of the inner pipe 7 and rotatable, and a nozzle connected to the tip of the swiveling rotating shaft 8. 3 , a bevel gear 11 fitted to the lower end of the outer tube 15 , and a bevel gear 12 fitted to the outer peripheral part of the rotating shaft 8 and meshing with the bevel gear 11 .
The inner tube 7 and the outer tube 15 are supported in the vertical direction so that they can be axially rotated in this state. A box-shaped gear case 23 is arranged below the outer tube 15, and the gear case 23 covers the bevel gears 11 and 12, the rotary shaft 8, and the like. The gear case 23 can rotate relative to the outer tube 15 in the circumferential direction.

A columnar support member 24 is arranged in the center of the gear case 23, and a pair of bearings 25A and 25B allows the rotary shaft 8 to rotate between the lower end of the inner tube 7 and the upper end of the support member 24. and pivotally supported. That is, the rotary shaft 8 is supported at the lower end of the inner tube 7 in a horizontal direction perpendicular to the inner tube 7 so that it can rotate. The tip of the orbiting rotary shaft 8 is liquid-tightly maintained by a seal member 26 and protrudes outside the gear case 23, and the base of the nozzle 3 is connected thereto in the orthogonal direction. In this way, since the nozzle 3 is connected in the direction perpendicular to the axis of the rotating shaft 8, when the rotating shaft 8 rotates, the nozzle 3 rotates (turns) substantially in the vertical plane. It has become so. In this embodiment, a flat nozzle that sprays the cleaning liquid W over a wide area is used as the nozzle 3 . Therefore, the injection port 3A, which is the tip of the nozzle 3, is elongated and straight. In this embodiment, the base of the nozzle 3 is attached to the turning shaft 8 so that the longitudinal direction of the injection port 3A is substantially parallel to the axis of the turning shaft 8 (see FIG. 1).
A bevel gear 12 is fitted to the outer periphery of the orbiting rotary shaft 8 , and this bevel gear 12 meshes with a bevel gear 11 as a sun gear fitted to the outer periphery of the lower end of the outer tube 15 . Therefore, when the inner tube 7 is rotated, the rotary shaft 8 revolves around the inner tube 7 in a predetermined direction. At that time, the bevel gears 11 and 12 mesh with each other so that the rotating shaft 8 rotates (rotates) in a predetermined direction. As a result, the nozzle 3 moves along a three-dimensional locus in a state in which the longitudinal direction of the injection port 3A at the tip is substantially parallel to the axis of the rotating shaft 8 (see FIG. 2). reference).

The inner space of the tubular inner tube 7 forms a liquid passage 7A through which water as the cleaning liquid W flows, and the lower end of the liquid passage 7A always communicates with the liquid passage 8A formed in the turning shaft 8. is doing. A washing liquid passage 27 for feeding the washing liquid W to the nozzle 3 is constituted by the liquid passage 7A and the liquid passage 8A.
The upper end of the inner pipe 7 (the upper end of the liquid passage 11A) is connected to a supply source 33 of the cleaning liquid W via a connector 31 and a conduit 32. As shown in FIG. The operation of the supply source 33 is controlled by the control device 18, and the control device 18 supplies the cleaning liquid W (water) from the supply source 33 through the conduit 32 to the cleaning liquid passage 27 when required. ing. At that time, the cleaning liquid W supplied to the cleaning liquid passage 27 is jetted from the tip of the nozzle 3 .

A gear 34 is attached to the outer peripheral portion of the inner tube 7 exposed above the outer tube 15 , and this gear 34 meshes with a gear 35 fitted to the drive shaft of the first motor 14 . The operation of the first motor 14 is controlled by the control device 18, and when the control device 18 operates the first motor 14, the inner tube 7 is rotated in a predetermined direction through the gears 34 and 35. ing. At that time, as described above, the orbital rotary shaft 8 revolves and the bevel gears 11 and 12 mesh with each other to cause the orbital rotary shaft 8 and the nozzle 3 to rotate. Thereby, the nozzle 3 is moved along a three-dimensional movement locus.

A gear 37 is attached to the outer peripheral portion of the outer tube 15 exposed above the support member 6 , and meshes with a gear 38 fitted to the drive shaft of the second motor 16 . The operation of the second motor 16 is controlled by the control device 18, and when the control device 18 operates the second motor 16, the outer tube 15 rotates in a predetermined direction through the gears 37 and 38. there is At that time, the bevel gears 11 and 12 mesh with each other so that the rotating shaft 8 and the nozzle 3 rotate on their own axes.
Thus, in this embodiment, the outer tube 15 can be independently rotated by the second motor 16 when required, separately from the revolution and rotation of the turning rotary shaft 8 by the first motor 14. As a result, it is possible to change the rotational speed of the rotating shaft 8 during revolution or to stop the rotation.

Furthermore, in this embodiment, the outer tube 15 is provided with a second cleaning liquid passage 41 that is separate from the cleaning liquid passage 27 . More specifically, at least one axial passage 15A is formed in the upper portion of the outer tube 15, thereby forming a second cleaning liquid passage 41. As shown in FIG. The lower end of the axial passage 15A is opened to the outer peripheral surface of the outer tube 15, which is adjacent to the lower side of the support member 6, and an injection port 42 is attached thereto in the horizontal direction. A plurality of axial passages 15A may be formed at predetermined intervals in the circumferential direction of the outer tube 15, and a plurality of injection ports 42 may be attached to the lower ends of the passages 15A.
An upper end portion of the axial passage 15A communicates with an annular groove 15B on the outer peripheral surface, and the annular groove 15B is covered with an annular seal member 43. As shown in FIG. One end of the conduit 44 communicates with the second cleaning liquid passage 41 via the annular seal member 43 and the annular groove 15B. The other end of the conduit 44 is connected to a source 45 which supplies a cleaning liquid W2 different from the cleaning liquid W, for example a foamy detergent, the operation of which is controlled by the controller 18. It's becoming When the control device 18 activates the supply source 45, the cleaning liquid W2 (foam detergent) is supplied to the second cleaning liquid passage 41 through the conduit 44, so that the cleaning liquid is supplied from the plurality of injection ports 42 provided in the outer pipe 15. W2 is jetted outward. In the initial stage of the cleaning operation, the inner surface 2A of the tank 2 can be pre-washed with the cleaning liquid W2, which is a foamy detergent, by injecting the cleaning liquid W2 from the injection port 42 while rotating the outer tube 15 by the second motor 16. It's becoming The cleaning liquid W2 is not limited to detergent, and may be sterilized water, clean water, or the like. Further, the clean water may be sprayed from the injection port 42 and used for rinsing in the latter stage of the cleaning operation, not limited to preliminary cleaning in the initial stage of the cleaning operation.
The cover 5 attached to the support member 6 is formed in a disc shape, and is provided with an annular stopper 5A for preventing liquid leakage and splashing at the outer peripheral portion and its adjacent inner position.

In the above configuration, when the tank 2 is brought into the cleaning position A with the cleaning unit 4 and the cover 5 stopped at the upper end position, the lifting mechanism 17 lowers the cover 5 together with the cleaning unit 4. . As a result, the nozzle 3 and the like of the cleaning unit 4 are inserted into the tank 2, and the lid 5 closes the top opening 2B of the tank 2 (FIG. 2).
After that, the operation of both motors 14 and 16 and supply sources 33 and 45 is controlled by the control device 18 as follows, so that the inner surface 2A of the tank 2 is cleaned.
In this embodiment, before cleaning the inner surface 2A by spraying the cleaning liquid W (water) from the nozzle 3, the cleaning liquid W2, which is a foamy detergent, is sprayed onto the inner surface 2A of the tank 2 for pre-washing. That is, first, the supply source 45 of the cleaning liquid W2 is actuated, and the second motor 16 is also actuated. Therefore, the foamy cleaning liquid W2 is supplied to the cleaning liquid passage 41 of the outer tube 15 through the conduit 44, and the outer tube 15 is axially rotated (see FIG. 1). Therefore, each injection port 42 ejecting the cleaning liquid W2 is also revolved to eject the foamy cleaning liquid W2 onto the inner surface 2A of the tank 2. As shown in FIG. At this time, since the supply source 33 is not operated, the rotating shaft 8 and the nozzle 3 are also rotated through the bevel gears 11 and 12 as the outer tube 15 rotates. not.
In this manner, the inner surface of the tank 2 is pre-washed by spraying the cleaning liquid W2 from the injection port 42 onto the inner surface 2A while rotating the outer tube 15 for a predetermined time.

After pre-cleaning is performed for a predetermined time, main cleaning using the nozzle 3 is performed next. That is, first, the operation of the second motor 16 and the operation of the supply source 45 are stopped, so that the rotation of the outer tube 15 is stopped and the injection of the cleaning liquid W2 from the injection port 42 is stopped.
Then, the drive motor 14 is activated and the supply source 33 is activated, so that the cleaning liquid W (water) is supplied to the cleaning liquid passage 27 through the conduit 32 and the cleaning liquid W is jetted from the nozzle 3 . In addition, since the inner tube 7 rotates, the rotary shaft 8 revolves and rotates via the bevel gears 11 and 12 (see FIG. 2). Therefore, since the nozzle 3 is moved along a three-dimensional locus, the cleaning liquid W is sprayed over the entire inner surface 2A of the tank 2 (see FIG. 2). As a result, the inner surface 2A of the tank 2 is cleaned with the cleaning liquid W (water). The cleaning liquid W sprayed from the nozzle 3 to the tank 2 after cleaning is discharged to the outside from a drain port (not shown) formed at the bottom of the tank 2 .

In this manner, the inner surface 2A of the tank 2 is cleaned by being sprayed with the cleaning liquid W, but the entire inner surface 2A to be cleaned may not be sufficiently cleaned. Specifically, the upper and lower corners of the inner surface 2A of the tank 2 and specific portions in the vertical direction may not be sufficiently cleaned only by spraying the cleaning liquid W from the nozzles 3 as described above.
Therefore, in this embodiment, after this, the cleaning liquid W is intensively sprayed onto the desired portions of the inner surface of the tank 2 to carry out finish cleaning. Specifically, while the supply source 33 and the first motor 14 continue to operate, the second motor 16 is operated at a required number of revolutions. Then, since the outer tube 15 is rotated via the gears 37 and 38, the rotation of the bevel gear 12 is suppressed by the rotation of the bevel gear 11.
Then, as indicated by the solid line in FIG. 3, the nozzle 3 is maintained in a state inclined at a predetermined angle, that is, the rotation of the nozzle 3 is stopped and the nozzle 3 revolves in that state. As a result, the cleaning liquid W is sprayed from the nozzle 3, which is kept inclined at a predetermined angle, toward a predetermined position on the inner surface 2A, and the part is intensively washed (see FIG. 3).
In this manner, the number of rotations of the second motor 16 is appropriately changed at predetermined time intervals, and the turning rotary shaft 8 is turned and then stopped, whereby the nozzle 3 is stopped at different tilt angles a plurality of times. is realized, and the cleaning liquid W is intensively injected from the nozzle 3 inclined at each inclination angle to a plurality of locations on the inner surface 2A (see the imaginary line in FIG. 3). As a result, it is possible to selectively finish wash a plurality of locations on the inner surface 2A of the tank 2 that are difficult to wash.
Thus, when the inner surface 2 of the tank 2 has been cleaned, the motors 14, 16 and the supply source 33 are deactivated.

As described above, according to this embodiment, by controlling the operation of the first motor 14 and the second motor 16 by the control device 18, even if the combination of the number of teeth of the bevel gears 11 and 12 is constant, The nozzle 3 can be moved in various movement trajectories.
For example, as a specific example other than the one described above, when only the second motor 16 is operated while the first motor 14 is stopped, the nozzle 3 does not revolve but rotates on the spot. Thereby, the corners of the inner surface 2A of the tank 2 and the like can be intensively cleaned with the cleaning liquid W. As shown in FIG. Especially when the shape of the tank 2, which is the object to be cleaned, is rectangular, it is easy to leave unwashed corners, but the revolution is stopped at the position where the nozzle 3 is directed to this corner, and the tank is rotated on the spot. Thus, corners can be effectively cleaned.
As another example, by gradually changing the number of revolutions of the second motor 16 from the state in which both motors 14 and 16 are operated, the movement trajectory of the nozzle 3 can be made dense. Furthermore, by gradually changing the rotation speed of the second motor 16 while both motors 14 and 16 are in operation, the inclination angle of the nozzle 3 is gradually changed, thereby moving the nozzle 3 along a spiral locus. is also possible. Particularly, in the case of an object to be cleaned such as a pan with an open top surface, it is possible to efficiently clean the object because the top surface does not need to be washed in vain.
According to this embodiment, it is possible to inject the cleaning liquid W intensively toward a specific portion of the inner surface 2A of the tank 2 that is difficult to clean. As a result, it is possible to prevent the occurrence of unwashed areas or washing omissions in specific areas after the washing operation is completed, and in addition, the washing time can be shortened. In addition, it is possible to provide the cleaning apparatus 1 capable of efficiently cleaning the tank 2 by suppressing the consumption of the cleaning liquid W (water) and the consumption of electricity of the power supply.

4 to 7 show other embodiments of the present invention. In the above-described embodiment, the nozzle 3 is attached to the rotating shaft 8 so that the longitudinal direction of the injection port 3A at the tip of the nozzle 3 is substantially parallel to the axis of the rotating shaft 8. As shown in FIG. 7, the nozzle 3 may be attached to the swivel rotary shaft 8 with the longitudinal direction of the injection port 3A tilted about 45° with respect to the axis of the swivel rotary shaft 8. As shown in FIG. 4 and 5 show a state in which the nozzle 3 is rotated around the rotation axis 8 without revolving. It rotates in a state inclined at 45° with respect to the axis.
6 and 7 show a state in which the nozzle 3 is revolved without being rotated. In this case, the longitudinal direction of the injection port 3A of the nozzle 3 is 45° with respect to the axis of the rotating shaft 8. It is designed to revolve in an inclined state.
That is, in any of the cases in which the nozzle 3 is rotated without revolving, in which the nozzle 3 is rotated while revolving, or in which the nozzle 3 is revolved without rotating, a wide cleaning liquid W is applied. can be jetted.
In particular, as shown in FIGS. 6 and 7, the longitudinal direction of the injection port 3A is inclined by about 45° with respect to the axis of the rotating shaft 8, and the nozzle 3 is attached to the rotating shaft 8, so that the nozzle 3 rotates. This is effective because it is possible to make the injection target area of the cleaning liquid W injected from the injection port 3A of the nozzle 3 larger than in the above-described embodiment when the nozzle 3 is caused to revolve without being rotated. Specifically, the cleaning liquid W can be sprayed over a wide area, targeting the periphery of the upper and lower corners of the tank 2 where dirt is difficult to remove, and the periphery of the liquid surface where dirt tends to accumulate. Further, not only when the nozzle 3 is revolved without rotating on its own axis, but also when the wide cleaning liquid W can be constantly jetted to the inner surface 2A of the tank 2, the longitudinal direction of the jet port 3A coincides with the axis of the revolving rotary shaft 8. Various movement trajectories of the nozzle 3 can be adopted compared to the above-described embodiment in which the trajectories are substantially parallel, and the inner surface 2A of the tank 2 can be washed efficiently. The angle at which the injection port 3A is inclined with respect to the axis of the turning shaft 8 is not limited to 45°, and may be in the range of 30° to 60°.
The angle at which the injection port 3A of the nozzle 3 is inclined with respect to the axis of the rotary shaft 8 may be changed according to the shape of the object to be washed and the state of contamination.
Further, the cross-sectional shape of the nozzle 3 may be an elliptical shape or other shape as long as it can spray the cleaning liquid W over a wide width.

Although the outer tube 15 is provided with the second cleaning liquid passage 41 in the above embodiment, it may be omitted.
In the above-described embodiment, the nozzle 3 is inserted into the tank 2 from above, and the nozzle 3 revolves and rotates in this state. The nozzle 3 may be inserted into the object to be washed from the side or from below for washing.

1. Cleaning device 2. Tank (object to be cleaned)
2A inner surface 3 nozzle 7 inner tube (rotating shaft) 8 turning rotating shaft 11 bevel gear 12 bevel gear 14 first motor (first drive source) 15 outer tube 16 second motor (second Drive source) 18.. Control device 27.. Washing liquid passage W.. Washing liquid

Claims (6)

a rotating shaft supported to be axially rotatable; a first liquid passage formed in the rotating shaft; a second liquid passage provided on the rotating shaft and communicating with the first liquid passage; and a second liquid passage provided on the rotating shaft and communicating with the first liquid passage and the second liquid passage. an outer tube surrounding the rotating shaft and supported so as to be axially rotatable; and a first bevel gear provided on the outer tube. a second bevel gear provided on the orbiting rotary shaft and meshing with the first bevel gear; a first drive source for rotating the rotary shaft; a second drive source for rotating the outer tube; A control device that controls the operation of the drive source and the second drive source,
A cleaning apparatus in which the nozzle is inserted into the interior of the object to be cleaned, and a cleaning liquid is sprayed from the nozzle to clean the inner surface of the object to be cleaned,
The control device operates the first drive source to rotate the rotary shaft to control the revolution of the turning rotary shaft about the rotary shaft, and operates the second drive source to rotate the outer tube. is rotated to rotate the first bevel gear to control the rotation of the turning rotation shaft,
The control device operates the first drive source and the second drive source simultaneously, and controls the rotational speeds of both the drive sources, respectively , thereby changing the movement trajectory of the nozzle when spraying the cleaning liquid. cleaning equipment. 3. The control device is characterized in that the control device can stop the rotation of the turning shaft by controlling the rotational speed of both the driving sources, and allow the nozzle to revolve in a state where the rotation of the nozzle is stopped. 1. The cleaning device according to 1. The control device controls the number of rotations of the two drive sources to gradually change the rotation of the rotary shaft, thereby gradually changing the direction of inclination of the nozzle while revolving the nozzle. 2. A cleaning device according to claim 1, characterized in that it can be moved in a spiral locus. 2. The cleaning apparatus according to claim 1, wherein the control device operates the second drive source in a state where the operation of the first drive source is stopped so that the nozzle rotates without revolving. . A separate cleaning liquid passage for feeding a cleaning liquid different from the cleaning liquid is formed in the outer tube, and an injection port is provided at a predetermined position of the outer tube for injecting the cleaning liquid supplied to the cleaning liquid passage toward the object to be cleaned. 5. The cleaning apparatus according to any one of claims 1 to 4, wherein is formed. The nozzle has a flat tip injection port, and the longitudinal direction of the injection port is tilted 30° to 60° with respect to the axis of the rotation shaft. 6. The cleaning device according to any one of claims 1 to 5, wherein a cleaning device is provided.

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