JP7091165B2 - Long body support device and long body support method - Google Patents

Description

The present invention relates to a long body support device and a long body support method.

Conventionally, there is known a support device in which a support object in which a long body is wound around an outer peripheral surface of a hollow tube is supported by a support means, and information arranged inside the hollow tube is read by a reading means (a support device). For example, see Patent Document 1).

Republished WO2004 / 014733

However, in the conventional support device as described in Patent Document 1, the information location portion provided with the barcode (information) and the imaging unit of the barcode reader (imaging means) face each other. There is an inconvenience that the image pickup means cannot read the information unless the information is positioned.

An object of the present invention is to provide a long body support device and a long body support method capable of reading information without positioning the information location portion and the image pickup unit of the imaging means so as to face each other. It is in.

The present invention has adopted the configuration described in the claims.

According to the present invention, regardless of the position of the information about the long body in the inner peripheral direction of the hollow tube, the entire inner peripheral surface of the hollow tube is collectively imaged and the information is read. Information can be read without positioning them so that the image pickup unit and the image pickup unit of the image pickup means face each other.
Further, if the moving means is provided, the information can be magnified and imaged by moving the image pickup unit of the image pickup means to the vicinity of the information location portion, and the reading means can easily read the information.
Further, if the reading means includes the image correction means, it is possible to prevent the captured image from being deformed and the image pickup means from being unable to read the information.

(A) to (C) are explanatory views of the long body support device which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, when viewed from the front direction of FIG. 1 (A) parallel to the Y axis, when the direction is shown, "up" is the arrow direction of the Z axis and "down" is the opposite. The direction, "left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y-axis, and "rear" is the opposite direction.

The sheet sticking device 10 as a processing device using the long body support device of the present invention is an adhesive sheet to a long body support device 20 and a semiconductor wafer as an adherend (hereinafter, also simply referred to as “wafer”) WF. A sticking means 30 that presses and sticks an AS, a wafer transporting means 40 that supports and transports a wafer WF, and a control means such as a personal computer or a sequencer that controls the overall or partial operation of the sheet sticking device 10. The 50 is provided with a notification means 60 such as a monitor, a panel, an indicator light, and a sounding device that outputs a determination result of the control means 50.

The long body support device 20 includes a support means 21 for supporting the support object SJ in which the original fabric RS as a long body is wound around the outer peripheral surface HP1 of the hollow tube HP, and the inner peripheral surface of the hollow tube HP. The HP 2 is provided with a reading means 22 for reading a predetermined information BC.

In the case of the present embodiment, as the raw fabric RS, an adhesive sheet AS having a predetermined shape is temporarily attached to one surface of the strip-shaped release sheet RL at a predetermined interval.
Further, the information BC includes, for example, information that can identify the original fabric RS such as the type, material, product name, code, and dimensions of the adhesive sheet AS and the release sheet RL, and various information related to the original fabric RS such as a bar code and a QR code. (Registered trademark), characters, figures, or a combination thereof are displayed on the surface of the label RA and affixed to the inner peripheral surface HP2 of the hollow tube HP.

The support means 21 includes a pair of support rollers 21B each supported by a frame 36 constituting the attachment means 30 by the rotary bearing portion 21A, and is configured to support the support object SJ from below.

The reading means 22 collectively captures the entire circumference of the inner peripheral surface HP2 of the hollow tube HP to form a captured image, and the camera 22A as an imaging means for reading the information BC in the captured image, and the captured image. An image correction means 22B that corrects the captured image so that the camera 22A can read a certain information BC, and a moving means that moves the camera 22A in the extending direction (front-back direction) of the hollow tube HP and directly as a driving device. It is equipped with a dynamic motor 22C.
The cameras 22A include first and second cameras 22A1 and 22A2, and the cameras 22A1 and 22A2 have angles of view θ1 and θ2 in which the imaging regions overlap inside the hollow tube HP. The camera 22A processes the image of the overlapping region AM in which the imaging regions of the cameras 22A1 and 22A2 overlap, thereby collectively imaging the entire circumference of the inner peripheral surface HP2 to form an captured image.

The sticking means 30 presses and sticks the guide roller 31 for guiding the original fabric RS, the peeling plate 32 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL with the peeling edge 32A, and the adhesive sheet AS against the wafer WF. A pressing roller 33 as a pressing means, a driving roller 34 driven by a rotating motor 34A as a driving device, and sandwiching the release sheet RL between the pinch rollers 34B, and a pinch roller 34B driven by a driving device (not shown). It includes a recovery roller 35 that constantly applies a predetermined tension to the release sheet RL existing between them to recover the peeling sheet RL, and a frame 36 that directly or indirectly supports each of the above-mentioned members constituting the sticking means 30. ..

The wafer transfer means 40 includes a linear motor 41 as a drive device and a table 42 supported by a slider 41A of the linear motor 41 and having a support surface 42A which is supported by a decompression means such as a decompression pump or a vacuum ejector and can be sucked and held. I have.

The operation of the above sheet pasting device 10 will be described.
First, the user of the sheet affixing device 10 (hereinafter, simply referred to as "user") operates the sheet affixing device 10 in the state shown by the solid line in FIG. 1 (A) in which each member is arranged at the initial position. The signal of automatic operation is input via an operation means (not shown) such as a panel or a personal computer. Next, as shown in FIG. 1 (B), the user places the hollow tube HP on the support roller 21B, and then pulls out the original fabric RS to show the original fabric RS in FIG. 1 (A). Set to. After that, when the reading means 22 is arranged to face the inner peripheral surface HP2 of the hollow tube HP, the reading means 22 drives the camera 22A to take an image of the inside of the inner peripheral surface HP2 to form an image, and the image is taken. The information BC provided on the inner peripheral surface HP2 of the hollow tube HP in the image is read, and the read information BC is output to the control means 50. At this time, the first and second cameras 22A1 and 22A2 capture the respective imaging regions, and the camera 22A processes the image of the overlapping region AM to collectively capture the entire circumference of the inner peripheral surface HP2 and capture the captured image. To form.

Next, the control means 50 identifies the original fabric RS based on the input information BC, and the original fabric RS is a qualified original fabric or ineligible for use in the sheet pasting device 10. It is determined whether it is the original fabric, and the determination result is output to the notification means 60. Here, when the control means 50 determines that the original fabric RS placed on the support roller 21B is an unqualified original fabric based on the input information BC, the control means 50 via the notification means 60. The user is notified to that effect, and an interlock is applied so that the sheet sticking device 10 does not operate. Then, when the user recognizes that the original fabric RS placed on the support roller 21B is an unsuitable original fabric via the notification means 60, the set original fabric RS is wound around the hollow tube HP and the support roller is used. The support object SJ placed on the support roller 21B is removed from the support roller 21B. Next, in the same manner as described above, another support object SJ is placed on the support roller 21B, the original fabric RS is set, and then the original is placed on the support roller 21B based on the input information BC. When the control means 50 determines that the anti-RS is a qualified original fabric, the control means 50 notifies the user via the notification means 60 and releases the interlock of the sheet sticking device 10.

After that, the sticking means 30 drives the rotary motor 34A to feed the original fabric RS, and as shown by the solid line in FIG. 1, the tip portion of the leading adhesive sheet AS in the feeding direction is a predetermined amount at the peeling edge 32A of the peeling plate 32. When peeled off, the drive of the rotary motor 34A is stopped. Next, when a user or a transfer means (not shown) such as an articulated robot or a belt conveyor places the wafer WF at a predetermined position on the table 42, the wafer transfer means 40 drives a decompression means (not shown) and the support surface 42A. The adsorption and holding of the wafer WF at the above are started. Then, the wafer transport means 40 drives the linear motor 41 to move the table 42 to the left, and when the table 42 reaches a predetermined position, the sticking means 30 drives the rotary motor 34A to move the table 42. The original fabric RS is delivered according to the speed. As a result, as shown by the alternate long and short dash line in FIG. 1 (A), the adhesive sheet AS is peeled from the release sheet RL by the release plate 32, pressed against the wafer WF by the pressing roller 33, and attached to the next adhesive sheet AS. Is peeled by a predetermined amount at the peeling edge 32A of the peeling plate 32, the sticking means 30 stops driving the rotary motor 34A.

After that, when the table 42 reaches a predetermined position on the left side of the pressing roller 33 as shown by the alternate long and short dash line in FIG. 1 (A), the wafer transport means 40 stops driving the linear motor 41 and is not shown. The drive of the decompression means is stopped, and the adsorption and holding of the wafer WF on the support surface 42A is released. Next, when the user or a transfer means (not shown) conveys the wafer WF to which the adhesive sheet AS is attached to the next step, the wafer transfer means 40 drives the linear motor 41 to return the table 42 to the initial position, and thereafter, the above. The same operation is repeated.

According to the above embodiment, regardless of the position of the information BC regarding the original fabric RS in the inner peripheral direction of the hollow tube HP, the camera 22A collectively covers the entire inner peripheral surface HP2 of the hollow tube HP. Since the information BC is read by taking an image, the information BC can be read without positioning the information location portion and the image pickup portion of the camera 22A so as to face each other.

As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described primarily with respect to a particular embodiment, the shape, with respect to the embodiments described above, without departing from the scope of the technical idea and object of the present invention. Those skilled in the art can make various modifications in terms of material, quantity, and other detailed configurations. Further, the description limiting the shape, material, etc. disclosed above is merely an example for facilitating the understanding of the present invention, and does not limit the present invention. Therefore, those shapes, materials, etc. The description by the name of the member excluding a part or all of the limitation such as is included in the present invention.

For example, the support means 21 may adopt a belt that supports the support object SJ from below in place of or in combination with the support roller 21B.
The reading means 22 may drive the linear motion motor 22C to move the position of the image pickup unit of the camera 22A, and as shown in FIG. 1C, move the image pickup unit of the camera 22A to the vicinity of the information location portion. By doing so, the information BC can be magnified and imaged, and the reading means 22 can easily read the information BC.
The reading means 22 may be provided on the outside of the hollow tube HP.
The camera 22A may not process the image in the overlapping region AM, and the reading means 22 may read the information BC from the captured image in which the image in the overlapping region AM is not processed.
The image correction means 22B is adopted when, for example, a correction member such as a lens or a prism, a computer or a program built in the image pickup means can be exemplified, and the information BC in the image pickup means cannot be read by the image pickup means. It may not be adopted if the image pickup means can read the information BC in the captured image without image correction, or the correction member may be provided separately from the camera 22A.

The sticking means 30 may be arranged upside down or placed horizontally so that the adhesive sheet AS is attached to the lower surface or the side surface of the wafer WF, or the strip-shaped adhesive sheet is strip-shaped. When an original fabric made of a strip-shaped adhesive sheet temporarily attached to the release sheet RL or a strip-shaped adhesive sheet not temporarily attached to the release sheet RL is adopted, the strip-shaped adhesive sheet is cut into a predetermined shape by a cutting means. An adhesive sheet AS may be formed and the adhesive sheet AS may be attached.
The component of the sticking means 30 may be supported by a support different from the frame 36.

The wafer transport means 40 may fix the position of the table 42, or move the long body support device 20 and the sticking means 30 while moving the table 42 to stick the adhesive sheet AS to the wafer WF. , It is not necessary when the wafer WF is moved by another device with respect to the sheet sticking device 10.

The sheet pasting device 10 may not be provided with at least one of the wafer transporting means 40, the controlling means 50, and the notifying means 60.
For example, when the control means 50 determines that the original fabric RS placed on the support roller 21B is an unqualified original fabric based on the input information BC, the sheet sticking device 10 is the control means 50. Does not have to notify the user via the notification means 60, does not have to interlock the sheet sticking device 10, and is placed on the support roller 21B based on the input information BC. When the control means 50 determines that the placed original fabric RS is a qualified original fabric, the control means 50 does not have to notify the user via the notification means 60.
The hollow tube HP is not limited to a cylindrical shape, but may be an elliptical tube shape, a polygonal tube shape, a paper, a resin, a metal, or the like, and is not limited at all.
The information BC may be directly printed, described, or engraved on the inner peripheral surface HP2 of the hollow tube HP, may be provided at a plurality of locations on the inner peripheral surface HP2, or may be provided at a plurality of locations on the inner peripheral surface HP2. Lot number of anti-RS, length using original fabric RS, remaining length of original fabric RS, quality guarantee deadline of adhesive sheet AS, remaining number of adhesive sheet AS before and after the start of feeding, of the adhesive sheet AS fed out Number of sheets, recommended feeding speed that can optimally feed the adhesive sheet AS, recommended sticking tension, recommended pressing force, sticking temperature, etc. that can optimally stick the adhesive sheet AS, sticking conditions of the adhesive sheet AS, adhesive sheet AS, etc. The contact information of the consultation counter for the original fabric RS may be used, and the sheet pasting device 10 may display the information on a display means (notification means 60) such as a monitor or a panel, or may be a reading means 22. The control means 50 may control each drive device based on the content of the information BC read by, for example, the rotation speed of the rotation motor 34A or the linear motor based on the recommended feeding speed of the adhesive sheet AS. 41 controls the moving speed at which the table 42 is moved, and based on the recommended pushing pressure, controls the raising and lowering amount of a linear motion motor (not shown) that raises and lowers the pressing roller 33, the torque applied to the output shaft, and the like, and pushes. The pressure may be controlled or the temperature of the heating means may be controlled.
The long body is an adhesive sheet raw fabric in which a plurality of adhesive sheets AS are temporarily attached to a strip-shaped release sheet RL at predetermined intervals, a strip-shaped adhesive sheet composed of a base material and an adhesive layer, a single layer or a multi-layer. In addition to paper, it may be an electric wire, a wire, a thread, a cloth, a rope, a hose, a steel plate, a resin plate, or the like, and is not limited in any way.
Examples of the processing device using the long body support device of the present invention include a winding device for winding the raw fabric RS, an inspection device for inspecting the raw fabric RS, and a cutting device for cutting the raw fabric RS to a predetermined length. The stripping device for peeling the protective sheet as the adhesive sheet AS from the wafer WF by using the raw fabric RS is not limited in any way, and the long body support device of the present invention uses the original fabric RS in those devices. It can be used as a support shaft on the feeding side or a support shaft on the winding side of the original fabric RS.
The long body support device of the present invention can be used alone without being combined with other mechanisms or other members to form a processing device.

Further, the materials, types, shapes, etc. of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When the heat-sensitive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing an appropriate heating means such as a coil heater or a heating side such as a heat pipe to heat the adhesive sheet AS. Further, such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a sheet having an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, and the like. It may be a so-called double-sided adhesive sheet having three or more layers, or a so-called double-sided adhesive sheet capable of peeling the base sheet from the adhesive layer, and the double-sided adhesive sheet may be a single-layer or multi-layer intermediate layer. It may be a single layer or a multi-layer without an intermediate layer. The adherend includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood plates or resin plates. Any form of member, article, or the like can also be targeted. It should be noted that the adhesive sheet AS can be read in a functional and versatile manner, and for example, any label for information description, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. can be used. Any sheet, film, tape, etc. of any shape can be attached to any adherend as described above.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the supporting means may be within the technical range in light of the common general technical knowledge at the time of filing, as long as it can support the supporting object in which a long body is wound around the outer peripheral surface of the hollow tube. There is no limitation (the description of other means and processes is omitted).
Further, the drive equipment in the above embodiment includes electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, and an articulated robot, and actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to being able to be adopted, it is also possible to adopt a combination thereof directly or indirectly (some overlap with those exemplified in the embodiments).
In the above embodiment, when the rollers are adopted, a drive device for rotationally driving each roller may be provided, or the surface of each roller may be made of a member capable of elastic deformation such as rubber or resin. However, each roller may be composed of a member that does not elastically deform, or if a pressing means such as a pressing roller or a pressing head or a pressing member is adopted, the rollers may be replaced with or used in combination with those exemplified above. , A pressing member made of a round bar, a blade material, rubber, resin, a sponge, etc. may be adopted, or a configuration of pressing by blowing air such as air or gas may be adopted, or a pressing means or pressing member may be pressed. The portion may be made of a member that can be elastically deformed such as rubber or resin, or may be made of a member that is not elastically deformed. It may be composed of a round bar, a roller, etc., or if a support member such as a support (holding) means or a support (holding) member is supported or held, a mechanical chuck, a chuck cylinder, etc. A structure may be adopted in which the supported member is supported (held) by a gripping means, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, a driving device, or the like, or a cutting means or a cutting blade is adopted. In the case, instead of or in combination with those exemplified above, a cutting member such as a cutter blade, a laser cutter, an ion beam, thermal power, heat, hydraulic pressure, heating wire, spraying of gas or liquid, etc. may be adopted, or as appropriate. The cutting member may be moved to cut by combining various driving devices.

20 Long body support device 21 Support means 22 Reading means 22A Camera (imaging means)
22B Image correction means 22C Linear motor (mode of transportation)
BC Information HP Hollow pipe HP1 Outer peripheral surface HP2 Inner peripheral surface RS Original fabric (long body)
SJ support object

Claims (4)

A support means for supporting a support object in which a long body is wound around the outer peripheral surface of the hollow tube,
A reading means for reading predetermined information provided on the inner peripheral surface of the hollow tube is provided.
The reading means is characterized by comprising an imaging means for collectively capturing the entire inner peripheral surface of the hollow tube to form an image to be captured and reading the information in the captured image. Body support device. The long body support device according to claim 1, wherein the reading means includes an image correction means for correcting the captured image so that the image pickup means can read the information in the captured image. .. The long body support device according to claim 1 or 2, wherein the reading means includes a moving means for moving the image pickup means in the extending direction of the hollow tube. A support process for supporting an object to be supported by winding a long body around the outer peripheral surface of the hollow tube,
A reading step of reading predetermined information provided on the inner peripheral surface of the hollow tube is carried out.
The reading step is a long body support method, characterized in that the entire inner peripheral surface of the hollow tube is collectively imaged to form an image to be captured, and the information in the captured image is read.

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