JP7091131B2 - 電磁波検出装置及び情報取得システム - Google Patents
電磁波検出装置及び情報取得システム Download PDFInfo
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- G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
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- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Studio Devices (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
デジタルマイクロミラーデバイス(DMD:Digital Mirror Device)等を用いた二次結像光学系は、入射光をDMD上に結像する第1のレンズと、DMDからの反射光を結像してセンサ上に結像する第2のレンズとを備えうる。DMDの特性によって、入射光と反射光とがなす角度は、比較的小さくなりうる。入射光と反射光とがなす角度が小さい場合、反射光が第1のレンズによって遮られやすい。反射光が遮られることによって、反射光のケラレが発生しうる。反射光のケラレは、反射光を結像して得られる画像における光量を減少させうるとともに、画角毎の光量変化を生じさせうる。また、入射光と反射光とがなす角度が小さい場合、第1及び第2のレンズの大きさ又は位置が制約されうる。仮に、これらの問題を避けるために第1のレンズのバックフォーカスが長くされる場合、光学系が大きくなったり、レンズの結像性能が悪化したり、広角化されにくくなったりする。図1に示されるような、本開示の一実施形態に係る電磁波検出装置1は、DMDからの反射光の進行方向を制御することによって、第1のレンズのバックフォーカスを長くせずに、センサに入射する光量を確保しうるとともに、画角毎の光量変化を低減しうる。第1のレンズのバックフォーカスが長くされないことによって、光学系が小型化及び広角化されうるとともに、光学系の結像性能が向上しうる。
sin(CA1)=μ/α (1)
sin(CA2)=γ/β (2)
sin(CA3)=δ/β (3)
sin(CA4)=δ/γ (4)
実施形態1と実施形態2とで同じ符号を付す要素はそれぞれ、同一又は類似に構成されてよい。電磁波は、複数のセンサで検出されうる。この場合、複数のセンサにおける検出軸が異なる場合、画像等として検出した結果の座標系がセンサ毎に異なりうる。各センサにおける検出結果の座標系の差異の低減が求められる。検出結果の座標系の差異は、補正によって低減されにくい。また、座標系の補正そのものが不可能でありうる。図9に示されるような、本開示の一実施形態に係る電磁波検出装置1は、第2進行部20に入射する電磁波を分離する構成を備えることによって、複数のセンサにおける検出結果の座標系の差異を低減しうる。
sin(CA5)=ε/α (5)
2 制御装置
10 第1進行部
11 基準面
12(12a、12b) 画素
20 第2進行部
20a、20b 第1プリズム、第2プリズム
21~26 第1面~第6面
30 進行軸
30a 光束
31 第1結像部
32 第2結像部
40 第1検出部
41 第1検出面
50 第2検出部
51 第2検出面
60 制御部
62 放射部
64 走査部
66 検出対象
70 中間層
71 スペーサー
80 分離部
100 情報取得システム
Claims (6)
- 基準面と、前記基準面に沿って位置する複数の画素とを有し、前記基準面に入射した電磁波を前記画素毎に特定の方向へ進行させる第1進行部と、
入射した電磁波を検出する第1検出部と、
入射した電磁波を検出する第2検出部と、
入射した電磁波の一部を前記第1進行部へ進行させ、他の部分を前記第2検出部へ進行させる第3面を有する第2進行部と、
を備え、
前記第3面は、前記第1進行部から進行する電磁波を前記第1検出部へ進行させる、
電磁波検出装置。 - 前記第1進行部は、複数の前記画素毎に、入射する電磁波を所定方向に進行させる第1状態と、前記所定方向と異なる方向に進行させる第2状態に遷移可能であり、
前記第3面は、前記第1状態の前記画素から入射する電磁波を前記第1検出部へ進行させ、前記第2状態の前記画素から入射する電磁波を前記第1検出部へ進行させない、
請求項1に記載の電磁波検出装置。 - 前記第3面は、前記第2状態の前記画素から入射する電磁波を射出することで、前記第1検出部へ進行させない、請求項2に記載の電磁波検出装置。
- 前記第3面には、検出対象に照射されて反射した電磁波が入射する、請求項1又は2に記載の電磁波検出装置。
- 前記第3面は、入射する電磁波を、波長に基づいて前記一部を前記第1進行部へ進行させ、前記他の部分を前記第2検出部へ進行させる、請求項2に記載の電磁波検出装置。
- 前記第2進行部は、前記第3面と交差し、前記基準面に対向する第1面と、前記第2検出部に対向する第2面とを有する、請求項1又は2に記載の電磁波検出装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2018090178A JP7091131B2 (ja) | 2018-05-08 | 2018-05-08 | 電磁波検出装置及び情報取得システム |
CN201980025227.2A CN111954842B (zh) | 2018-05-08 | 2019-04-17 | 电磁波检测装置以及信息获取系统 |
EP19800278.4A EP3792677A4 (en) | 2018-05-08 | 2019-04-17 | ELECTROMAGNETIC WAVE DETECTION DEVICE AND INFORMATION ACQUISITION SYSTEM |
US17/047,118 US20210148752A1 (en) | 2018-05-08 | 2019-04-17 | Electromagnetic wave detection apparatus and information acquisition system |
CN202310807779.7A CN116841036A (zh) | 2018-05-08 | 2019-04-17 | 电磁波检测装置 |
PCT/JP2019/016477 WO2019216140A1 (ja) | 2018-05-08 | 2019-04-17 | 電磁波検出装置及び情報取得システム |
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EP (1) | EP3792677A4 (ja) |
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JP2022012504A (ja) * | 2020-07-01 | 2022-01-17 | 京セラ株式会社 | 測定装置 |
Citations (4)
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JP2013150146A (ja) | 2012-01-19 | 2013-08-01 | Lampserve Corp | 空間分割装置及び該空間分割装置を用いた受光装置 |
JP2013535931A (ja) | 2010-08-11 | 2013-09-12 | インビュー・テクノロジー・コーポレイション | 圧縮撮像装置の画像取得時間の減少 |
US20150378023A1 (en) | 2013-02-13 | 2015-12-31 | Universitat Politecnica De Catalunya | System and method for scanning a surface and computer program implementing the method |
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CN111954842A (zh) | 2020-11-17 |
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