JP7083213B2 - Abrasive mixed liquid polishing device, polishing method using it, and laminated wire mesh filter for abrasive grain separation of abrasive mixed liquid polishing device - Google Patents

Abrasive mixed liquid polishing device, polishing method using it, and laminated wire mesh filter for abrasive grain separation of abrasive mixed liquid polishing device Download PDF

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JP7083213B2
JP7083213B2 JP2017201567A JP2017201567A JP7083213B2 JP 7083213 B2 JP7083213 B2 JP 7083213B2 JP 2017201567 A JP2017201567 A JP 2017201567A JP 2017201567 A JP2017201567 A JP 2017201567A JP 7083213 B2 JP7083213 B2 JP 7083213B2
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mixed liquid
wire mesh
mesh filter
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polishing apparatus
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立雄 小林
篤 金子
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Sanko Gosei Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

本発明は、金属内部、例えば金型等の冷却又は温調等を目的に形成される流路内部を研磨するのに好適な研磨材混合液体研磨装置、それを用いた研磨方法及び研磨材混合液体研磨装置の砥粒分離用積層金網フィルタに関する。 The present invention is an abrasive material mixing liquid polishing apparatus suitable for polishing the inside of a metal, for example, the inside of a flow path formed for the purpose of cooling or temperature control of a mold or the like, a polishing method using the liquid polishing apparatus, and an abrasive material mixing device. The present invention relates to a laminated wire mesh filter for separating abrasive grains in a liquid polishing device.

近年、特許文献1や非特許文献1に示されるように金属の粉末材料に光ビームを照射して得られる焼結層を積層することで、三次元形状を造形する金属光造形の利用が進められている。
この金属光造形で得られる金型ではその焼結層を積層するという造型法に由来して、得られる内側水管内面が粗く、赤錆やスケール堆積による流量不足や詰まりが懸念されるという問題があった。
In recent years, as shown in Patent Document 1 and Non-Patent Document 1, the use of metal stereolithography for forming a three-dimensional shape has been promoted by laminating a sintered layer obtained by irradiating a metal powder material with a light beam. Has been done.
In the mold obtained by this metal stereolithography, there is a problem that the inner surface of the obtained inner water pipe is rough due to the molding method of laminating the sintered layers, and there is a concern that the flow rate is insufficient or clogged due to red rust or scale deposition. rice field.

この問題の解決を目的として特許文献2には金属部材内部に連通して形成された中空部の内面研磨装置であって、連通した中空部の一方の開口部と他方の開口部にそれぞれ連結する一対の、研磨材混合液体の貯留タンクと、当該一対の貯留タンクの内圧を交互に増圧する増圧手段とを有し、研磨材混合液体が前記中空部内部を、往復流入出することで中空部内面が研磨される研磨材混合液体研磨装置を用いて、レーザー光造形にて製作された焼結製の光造形金型内部に連通して形成された3次元形状の中空部に研磨材混合液体を強制流入し、中空部内面を研磨するものであり、前記研磨材混合液体中に混合されている砥粒はアルミナであり、平均粒径が90~350μm,砥粒濃度が2~16vol%の範囲であることを特徴とする光造形金型の研磨材混合液体による研磨方法が開示された。 For the purpose of solving this problem, Patent Document 2 describes an inner surface polishing device for a hollow portion formed in communication with the inside of a metal member, and is connected to one opening and the other opening of the communicated hollow portion, respectively. It has a pair of storage tanks for the abrasive mixed liquid and a pressure increasing means for alternately increasing the internal pressure of the pair of storage tanks, and the abrasive mixed liquid reciprocates in and out of the hollow portion to be hollow. Abrasive mixed liquid polishing device that polishes the inner surface of the part is used to mix the abrasive in the hollow part of the three-dimensional shape formed by communicating with the inside of the sintered optical molding mold manufactured by laser optical molding. The liquid is forcibly flowed in to polish the inner surface of the hollow portion. The abrasive grains mixed in the abrasive mixed liquid are alumina, the average particle size is 90 to 350 μm, and the abrasive grain concentration is 2 to 16 vol%. Disclosed is a method of polishing with an abrasive mixed liquid of an optical molding mold, which is characterized by the above range.

特開2014-31018JP 2014-31018 特許5477739号公報Japanese Patent No. 5477739

Panasonic Technical Journal Vol.62 No.2 Nov.2016Panasonic Technical Journal Vol.62 No.2 Nov.2016

特許文献2に開示された研磨方法では、流体研磨加工時には、貯留タンク内で砥粒と液体とが混合された研磨材混合液体となり、増圧部にも研磨材混合液体が供給される結果、増圧部のシリンダー内面と、ピストンシールが摩耗して増圧シリンダーが故障するという問題があった。
また研磨加工したときに発生した加工金属粉もシリンダー内面やピストンシールに、ダメージを与える問題もある。
本発明は、係る従来技術の問題に鑑み、耐久性が高く工業的に実用化可能な研磨材混合液体研磨装置、それを用いた研磨方法及び研磨材混合液体研磨装置の砥粒分離用積層金網フィルタを提供することを目的とする。
In the polishing method disclosed in Patent Document 2, during the fluid polishing process, the abrasive grains and the liquid are mixed in the storage tank to form an abrasive mixed liquid, and as a result, the abrasive mixed liquid is also supplied to the pressure boosting portion. There was a problem that the inner surface of the cylinder of the booster and the piston seal were worn and the booster cylinder failed.
There is also a problem that the processed metal powder generated during polishing also damages the inner surface of the cylinder and the piston seal.
In view of the problems of the prior art, the present invention has a highly durable and industrially practical abrasive material mixed liquid polishing apparatus, a polishing method using the same, and a laminated wire net for abrasive grain separation of the abrasive material mixed liquid polishing apparatus. The purpose is to provide a filter.

本発明の研磨材混合液体研磨装置は、金型内部に連通して形成された金型中空部の一方の開口部と他方の開口部にそれぞれ連結する一対の、研磨材混合液体の貯留タンクと、当該一対の貯留タンクの内圧を交互に増圧する液圧発生手段とを有し、研磨材混合液体が前記金型中空部の内側面を、往復流入出することで前記金型中空部内側面が研磨される研磨材混合液体研磨装置において、前記液圧発生手段と前記金型との間の前記研磨材混合液体流路に研磨材混合液体から砥粒を分離する砥粒分離手段が配置されることを特徴とする。 The abrasive mixed liquid polishing apparatus of the present invention includes a pair of abrasive mixed liquid storage tanks connected to one opening and the other opening of the hollow portion of the mold formed in communication with the inside of the mold. It has a hydraulic pressure generating means that alternately increases the internal pressure of the pair of storage tanks, and the abrasive mixed liquid reciprocates in and out of the inner surface of the hollow portion of the mold so that the inner surface of the hollow portion of the mold is formed. In the abrasive mixed liquid polishing apparatus to be polished, an abrasive grain separating means for separating abrasive grains from the abrasive mixed liquid is arranged in the abrasive mixed liquid flow path between the hydraulic pressure generating means and the mold. It is characterized by that.

本発明の研磨材混合液体による研磨方法は、本発明の研磨材混合液体研磨装置を用い、金型内部に連通して形成された中空部に研磨材混合液体を強制流入し、中空部内面を研磨する工程と、前記液圧発生手段と前記金型との間の前記研磨材混合液体流路にて砥粒を分離する工程と、前記一対の貯留タンク内で金属屑を吸着する工程とを有することを特徴とする。 In the polishing method using the polishing material mixed liquid of the present invention, the polishing material mixed liquid is forcibly flowed into the hollow portion formed in communication with the inside of the mold by using the polishing material mixed liquid polishing apparatus of the present invention, and the inner surface of the hollow portion is formed. A step of polishing, a step of separating abrasive grains in the polishing material mixed liquid flow path between the hydraulic pressure generating means and the mold, and a step of adsorbing metal debris in the pair of storage tanks. It is characterized by having.

本発明の研磨材混合液体研磨装置の砥粒分離用積層金網フィルタは、比較的に密な金網フィルタと、比較的に粗な金網フィルタとを積層してなり、前記密な金網フィルタを外側とし、前記粗な金属フィルタを内側として一端を開口部とし、他端を閉止部とした筒状であることを特徴とする。 The laminated wire mesh filter for abrasive grain separation of the abrasive mixed liquid polishing apparatus of the present invention is formed by laminating a relatively dense wire mesh filter and a relatively coarse wire mesh filter, with the dense wire mesh filter as the outside. It is characterized in that it has a tubular shape with the coarse metal filter inside, one end having an opening, and the other end having a closing portion.

本発明の研磨材混合液体研磨装置は耐久性が高く、これを用いた研磨方法は工業的に実用することができる。また本発明の研磨材混合液体研磨装置の砥粒分離用積層金網フィルタは本発明の研磨材混合液体研磨装置及びこれを用いた研磨方法に工業的に実用することができる。 The polishing material mixed liquid polishing apparatus of the present invention has high durability, and a polishing method using the polishing material can be industrially put into practical use. Further, the laminated wire mesh filter for separating abrasive grains of the abrasive material mixed liquid polishing apparatus of the present invention can be industrially put into practical use in the abrasive material mixed liquid polishing apparatus of the present invention and the polishing method using the same.

本発明の実施の形態の研磨材混合液体研磨装置の模式図。The schematic diagram of the abrasive material mixed liquid polishing apparatus of embodiment of this invention. 図1に示す研磨材混合液体研磨装置の部分拡大図。A partially enlarged view of the abrasive material mixed liquid polishing apparatus shown in FIG. 1. 本発明の実施の形態の研磨材混合液体研磨装置の部品の斜視写真。A perspective photograph of a component of an abrasive mixed liquid polishing apparatus according to an embodiment of the present invention. 本発明の実施の形態の研磨材混合液体研磨装置の部品の側面写真。The side view photograph of the part of the abrasive material mixed liquid polishing apparatus of embodiment of this invention. 本発明の実施の形態の研磨材混合液体研磨装置の部品の他の側面写真。A photograph of another side view of a component of the abrasive mixed liquid polishing apparatus according to the embodiment of the present invention. 本発明の実施の形態の研磨材混合液体研磨装置の部品の別の側面写真。Another side photograph of the component of the abrasive mixed liquid polishing apparatus of embodiment of this invention. 本発明の実施の形態の研磨材混合液体研磨装置の部品に用いられる部材の側面写真Photograph of a side view of a member used for a component of an abrasive mixed liquid polishing apparatus according to an embodiment of the present invention. 図7に示される部材の他側面写真。A photograph of the other side of the member shown in FIG. 7. 本発明の他の実施の形態の研磨材混合液体研磨装置の模式図。The schematic diagram of the abrasive material mixed liquid polishing apparatus of another embodiment of this invention. 本発明のさらに他の実施の形態の研磨材混合液体研磨装置の部分模式図。FIG. 3 is a partial schematic diagram of an abrasive mixed liquid polishing apparatus according to still another embodiment of the present invention.

以下に本発明の実施の形態について説明する。
図1、図2に示す様に本実施の形態の研磨材混合液体研磨装置1は、金型内部に連通して形成された金型中空部2の一方の開口部2aと他方の開口部2bにそれぞれ連結する一対の、研磨材混合液体の貯留タンク3と、この一対の貯留タンク3の内圧を交互に増圧する液圧発生手段4とを有する。この液圧発生手段4は本実施の形態では両ロッド油圧シリンダ4aとこの両ロッド油圧シリンダ4aによって駆動されるピストン4b、パッキン4b-1を配設した液圧発生シリンダ4cとによって構成されるが、エアー圧、電動等液圧を発生することができればこれに限らない。
Hereinafter, embodiments of the present invention will be described.
As shown in FIGS. 1 and 2, in the abrasive material mixed liquid polishing apparatus 1 of the present embodiment, one opening 2a and the other opening 2b of the hollow portion 2 of the mold are formed so as to communicate with each other inside the mold. It has a pair of storage tanks 3 for mixed liquids of abrasives, and a hydraulic pressure generating means 4 for alternately increasing the internal pressure of the pair of storage tanks 3. In the present embodiment, the hydraulic pressure generating means 4 is composed of both rod hydraulic cylinders 4a, a piston 4b driven by both rod hydraulic cylinders 4a, and a hydraulic pressure generating cylinder 4c provided with packing 4b-1. It is not limited to this as long as it can generate hydraulic pressure such as air pressure and electric power.

ステンレス製の一対の貯留タンク3のベース(図示せず)は鉄枠とされており、その鉄枠に貯留タンク3が載置される。また一対の貯留タンク3それぞれにはその内側に研磨材混合液体流通パイプ5が貯留タンク3それぞれの底部3a近傍まで先端を延設する態様で設けられ、その各先端5aは斜めにカットされている。
なお図2に示す様に貯留タンク3それぞれの底部3aはテーパ部3bによって逆台形状にされてなる。
The base (not shown) of the pair of stainless steel storage tanks 3 is an iron frame, and the storage tank 3 is placed on the iron frame. Further, each of the pair of storage tanks 3 is provided with an abrasive mixed liquid flow pipe 5 inside the storage tank 3 so as to extend the tip to the vicinity of the bottom 3a of each of the storage tanks 3, and each tip 5a is cut diagonally. ..
As shown in FIG. 2, the bottom portion 3a of each of the storage tanks 3 is formed into an inverted trapezoidal shape by the tapered portion 3b.

この一対の貯留タンク3それぞれにはアルミナである砥粒6が収納され、この砥粒6は貯留タンク3の逆台形状にされてなる底部3a近傍に貯留される。なお、砥粒6の材質には特に制限はなく、コスト、性状等の観点から適宜選択される。
ただし、砥粒6の平均粒径は研磨の対象となる金型中空部2の穴径の1/8~1/12とするのが研磨の効率と、得られる金型中空部2内側面2cの表面平滑度の観点から望ましい。1/8を超える場合には金型中空部2における砥粒6の詰まりが生じやすくなり、一方1/12未満の場合には研磨の効率が低下する。
Abrasive grains 6 which are alumina are stored in each of the pair of storage tanks 3, and the abrasive grains 6 are stored in the vicinity of the bottom portion 3a formed in an inverted trapezoidal shape of the storage tank 3. The material of the abrasive grains 6 is not particularly limited, and is appropriately selected from the viewpoint of cost, properties, and the like.
However, it is the efficiency of polishing that the average particle size of the abrasive grains 6 is 1/8 to 1/12 of the hole diameter of the hollow mold portion 2 to be polished, and the inner side surface 2c of the hollow mold portion 2 obtained. It is desirable from the viewpoint of surface smoothness. If it exceeds 1/8, the abrasive grains 6 in the hollow portion 2 of the mold are likely to be clogged, while if it is less than 1/12, the polishing efficiency is lowered.

本実施の形態の研磨材混合液体研磨装置1では液圧発生手段4と金型中空部2との間の研磨材混合液体流路7に研磨材混合液体から砥粒を分離する砥粒分離手段8が配置される。
この砥粒分離手段8は貯留タンク3内に収納される積層金網フィルタとすることができ、この積層金網フィルタは液圧発生手段4からの液体流路7の貯留タンク3内開口部7aに装着される。
この積層金網フィルタは例えば5層積層金網フィルタとすることができその最外側の金網フィルタの開口径は40μm程度とされる。またその最外側の金網フィルタに積層される内側の金網フィルタはそれよりも目の粗い、開口径の大きなものとする。本実施の形態では最外側の金網フィルタの内側に最外側の金網フィルタよりも目の粗い、開口径の大きな金網フィルタを3層積層し、さらにその内側にそれよりも目の粗い、開口径の大きな金網フィルタを積層して全体として5層積層金網フィルタとする。その様にした積層金網フィルタは研磨材である砥粒分離の過程で目詰まりはする。しかし係る目詰まりは超音波洗浄で解消することができ、再生使用が可能となる。実施の態様によっては、内側に向かって徐々に開口径の大きな金網フィルタを積層する様にしても良い。
In the abrasive mixed liquid polishing apparatus 1 of the present embodiment, the abrasive grain separating means for separating the abrasive grains from the abrasive mixed liquid in the abrasive mixed liquid flow path 7 between the hydraulic pressure generating means 4 and the mold hollow portion 2. 8 is arranged.
The abrasive grain separating means 8 can be a laminated wire mesh filter housed in the storage tank 3, and the laminated wire mesh filter is attached to the opening 7a in the storage tank 3 of the liquid flow path 7 from the hydraulic pressure generating means 4. Will be done.
This laminated wire mesh filter can be, for example, a 5-layer laminated wire mesh filter, and the opening diameter of the outermost wire mesh filter is about 40 μm. Further, the inner wire mesh filter laminated on the outermost wire mesh filter has a coarser mesh and a larger opening diameter. In the present embodiment, three layers of a wire mesh filter having a coarser mesh size and a larger opening diameter than the outermost wire mesh filter are laminated inside the outermost wire mesh filter, and further inside the wire mesh filter having a coarser mesh size and an opening diameter. Large wire mesh filters are laminated to form a 5-layer laminated wire mesh filter as a whole. Such a laminated wire mesh filter is clogged in the process of separating abrasive grains which are abrasives. However, the clogging can be cleared by ultrasonic cleaning, and it can be regenerated. Depending on the embodiment, wire mesh filters having a large opening diameter may be gradually laminated inward.

一方、積層金網フィルタを使用しないで例えばポーラスフィルタを用いる場合には同様に砥粒分離の過程で目詰まりを生じ、しかも係る目詰まりは超音波洗浄でも解消することができず、ポーラスフィルタを使い捨てにする必要が有りコスト高の原因となる。
また以上のようにして得られた本実施の形態の積層金網フィルタは5Mpaの耐圧を有しており、耐圧が1Mpa程度のポーラスフィルタより耐圧性に優れており研磨材混合液体による研磨方法に必要な研磨材混合液体の流動圧を確保することができ、様々な径の金型中空部2内側面2cを研磨することができる。
なお、積層金網フィルタの積層数は本実施の形態の5層金網フィルタに限定されず、必要となる研磨材混合液体の流動圧等に応じて実験的に適宜決定することができる。
On the other hand, when a porous filter is used without using a laminated wire mesh filter, for example, clogging occurs in the process of abrasive grain separation, and the clogging cannot be cleared by ultrasonic cleaning, so that the porous filter is disposable. It is necessary to make it a cause of high cost.
Further, the laminated wire mesh filter of the present embodiment obtained as described above has a withstand voltage of 5 Mpa, and is superior in withstand voltage to a porous filter having a withstand voltage of about 1 Mpa, which is necessary for a polishing method using an abrasive mixed liquid. It is possible to secure the flow pressure of the mixed liquid of the abrasive material, and it is possible to polish the inner side surface 2c of the mold hollow portion 2 having various diameters.
The number of laminated wire mesh filters is not limited to the five-layer wire mesh filter of the present embodiment, and can be appropriately determined experimentally according to the required flow pressure of the abrasive mixed liquid and the like.

図3、図4は本実施の形態の研磨材混合液体研磨装置1で用いた5層金網フィルタの外観写真であり、図5の外観写真に示される一端の開口部と図6の外観写真に示される他端の閉止部とを有する円筒状に形成されてなる。
係る5層金網フィルタは図7に示す様に最外側の金網フィルタの内側に最外側の金網フィルタよりも目の粗い、開口径の大きな金網フィルタを3層積層し、さらにその内側にそれよりも目の粗い、開口径の大きな金網フィルタを積層して全体として5層積層金網フィルタとし、図8に示す開口径が最も大きな金網フィルタが内側表面となるように円筒状に巻回してなる。
3 and 4 are external photographs of the five-layer wire mesh filter used in the abrasive mixed liquid polishing apparatus 1 of the present embodiment, and are shown in the opening at one end shown in the external photograph of FIG. 5 and the external photograph of FIG. It is formed in a cylindrical shape having a closing portion at the other end shown.
As shown in FIG. 7, the five-layer wire mesh filter has three layers of a wire mesh filter having a coarser mesh than the outermost wire mesh filter and a larger opening diameter inside the outermost wire mesh filter, and further inside the wire mesh filter. A wire mesh filter having a coarse mesh and a large opening diameter is laminated to form a five-layer laminated wire mesh filter as a whole, and the wire mesh filter having the largest opening diameter shown in FIG. 8 is wound in a cylindrical shape so as to be on the inner surface.

また本実施の形態の研磨材混合液体研磨装置1では図1、図2に示す様に一対の貯留タンク3内に金属屑吸着手段9が配置される。この金属屑吸着手段9によって金型中空部2内側面2cを研磨することによって不可避的に発生する金属屑10が吸着される。
この金属屑吸着手段9としては例えば強力永久磁石を用いることができ、市販の表面がメッキにより防蝕されたネオジム-鉄-ボロン系永久磁石を用いても良い。図2(a)に示す様に貯留タンク3の底部3aには砥粒6が収納されており、砥粒6の上に金属屑吸着手段9を載置する。
Further, in the abrasive material mixed liquid polishing apparatus 1 of the present embodiment, the metal scrap adsorption means 9 is arranged in the pair of storage tanks 3 as shown in FIGS. 1 and 2. The metal debris 10 inevitably generated by polishing the inner side surface 2c of the mold hollow portion 2 by the metal debris adsorbing means 9 is adsorbed.
As the metal scrap adsorption means 9, for example, a strong permanent magnet can be used, and a commercially available neodymium-iron-boron permanent magnet whose surface is corrosion-proof by plating may be used. As shown in FIG. 2A, the abrasive grains 6 are housed in the bottom 3a of the storage tank 3, and the metal scrap adsorption means 9 is placed on the abrasive grains 6.

なおその際、金属屑吸着手段9として市販の表面がメッキにより防蝕された高さの低い扁平な円筒形状のネオジム-鉄-ボロン系永久磁石(磁束密度0.2テスラ)を用いる場合には、図2(b)に示す様に円筒形状の曲面状にされた外周側を接地部分として載置しても貯留タンク3のベース(図示せず)は鉄枠とされており、鉄枠と金属屑吸着手段9とによって貯留タンク3底部3aを強力な磁力によって挟持する態様で係る設置状態が維持される。この様に金属屑吸着手段9を設置した場合には、金属屑吸着手段9の曲面状にされた外周側上を覆う砥粒6は少量であり、研磨過程において砥粒6の混合液体流通パイプ5への流入が妨げられることはない。 At that time, when a commercially available neodymium-iron-boron permanent magnet (magnetic flux density 0.2 tesla) having a low and flat cylindrical shape whose surface is corroded by plating is used as the metal scrap adsorption means 9. As shown in FIG. 2B, the base (not shown) of the storage tank 3 is an iron frame even if the outer peripheral side having a cylindrical curved shape is placed as a grounding portion, and the iron frame and the metal are used. The installation state is maintained in such a manner that the bottom 3a of the storage tank 3 is sandwiched by the dust suction means 9 by a strong magnetic force. When the metal debris adsorbing means 9 is installed in this way, the amount of abrasive grains 6 covering the curved outer peripheral side of the metal debris adsorbing means 9 is small, and the mixed liquid flow pipe of the abrasive grains 6 is used in the polishing process. The inflow to 5 is not hindered.

一方、図2(c)に示す様に円筒形状の平面側を接地部分として設置した場合には、金属屑吸着手段9上を覆う砥粒6は多量となり、金属屑吸着手段9に吸着された金属屑10との相互作用が働き、砥粒6の混合液体流通パイプ5への流入が妨げられることが現象的に確認されている。 On the other hand, when the cylindrical flat side is installed as the ground contact portion as shown in FIG. 2 (c), the amount of abrasive grains 6 covering the metal scrap adsorbing means 9 becomes large and is adsorbed by the metal debris adsorbing means 9. It has been phenomenologically confirmed that the interaction with the metal scrap 10 works and the inflow of the abrasive grains 6 into the mixed liquid flow pipe 5 is hindered.

なお、図2(d)、(e)に示す様に磁束密度0.2テスラの永久磁石を10枚積層して2テスラの磁束密度が得られるようにして用いることもできる。その場合にも図2(d)に示す様に円筒形状の曲面状にされた外周側を接地部分として載置した場合には、金属屑吸着手段9上を覆う砥粒6は少量であり、研磨過程において砥粒6の混合液体流通パイプ5への流入が妨げられることはない。一方、図2(e)に示す様に円筒形状の平面側を接地部分として設置した場合には、金属屑吸着手段9上を覆う砥粒6は多量となり、金属屑吸着手段9に吸着された金属屑10との相互作用が働き、砥粒6の混合液体流通パイプ5への流入が妨げられる。 As shown in FIGS. 2 (d) and 2 (e), 10 permanent magnets having a magnetic flux density of 0.2 tesla can be laminated to obtain a magnetic flux density of 2 tesla. Even in that case, when the outer peripheral side having a cylindrical curved surface is placed as the grounding portion as shown in FIG. 2D, the amount of abrasive grains 6 covering the metal scrap adsorbing means 9 is small. In the polishing process, the inflow of the abrasive grains 6 into the mixed liquid flow pipe 5 is not hindered. On the other hand, when the flat side of the cylinder shape is installed as the ground contact portion as shown in FIG. 2 (e), the amount of abrasive grains 6 covering the metal scrap adsorbing means 9 becomes large and is adsorbed by the metal scrap adsorbing means 9. The interaction with the metal scrap 10 works to prevent the abrasive grains 6 from flowing into the mixed liquid flow pipe 5.

研磨材混合液体には金型中空部2の防錆を目的として水に防錆剤を0.5%加えており、これが同時に金属屑吸着手段9である強力永久磁石の防錆剤となる。また、液圧発生手段4である液圧発生シリンダ4cに配設したピストン4bを水で使うとパッキン4b-1が摩耗する。したがってこれを防止するため水に潤滑剤3%が加えられている。 0.5% of a rust preventive is added to water for the purpose of preventing rust on the hollow portion 2 of the mold in the abrasive mixed liquid, and at the same time, this becomes a rust preventive for a strong permanent magnet which is a metal scrap adsorbing means 9. Further, when the piston 4b arranged in the hydraulic pressure generating cylinder 4c, which is the hydraulic pressure generating means 4, is used with water, the packing 4b-1 is worn. Therefore, to prevent this, 3% of lubricant is added to the water.

以上の本実施の形態の研磨材混合液体研磨装置1を用い、本発明の研磨材混合液体による研磨方法によれば次のようにして金型中空部2内側面2cの研磨を行う。
金型中空部2の一方の開口部2aと他方の開口部2bのそれぞれに連結した一対の貯留タンク3の一方を増圧し、研磨材混合液体を金型中空部2の流路内に強制流入させ、強制流入された研磨材混合液体は他方の貯留タンク3に戻される。その様に一対の貯留タンク3を交互に増圧することで金型中空部2の流路内を研磨材混合液体が往復流入出して、金型中空部2内側面2cが砥粒6によって研磨される。
Using the above-mentioned polishing material mixed liquid polishing apparatus 1 of the present embodiment, the inner side surface 2c of the mold hollow portion 2 is polished as follows according to the polishing method using the polishing material mixed liquid of the present invention.
One of the pair of storage tanks 3 connected to each of the one opening 2a and the other opening 2b of the mold hollow portion 2 is increased in pressure, and the abrasive mixed liquid is forcibly flowed into the flow path of the mold hollow portion 2. The abrasive mixed liquid that has been forcibly flowed in is returned to the other storage tank 3. By alternately increasing the pressure of the pair of storage tanks 3 in this way, the abrasive mixed liquid reciprocates in and out of the flow path of the mold hollow portion 2, and the inner side surface 2c of the mold hollow portion 2 is polished by the abrasive grains 6. To.

以上の過程で液圧発生側の貯留タンク3の底部3a近傍に貯留された砥粒6は液圧発生に伴い液圧発生側の貯留タンク3の底部3a近傍まで先端を延設する態様で設けられた混合液体流通パイプ5の斜めにカットされている先端5aから効率よく混合液体流通パイプ5を介して金型中空部2の流路内に流入し、金型中空部2内側面2cを研磨する。 In the above process, the abrasive grains 6 stored in the vicinity of the bottom 3a of the storage tank 3 on the hydraulic pressure generation side are provided so as to extend the tip to the vicinity of the bottom 3a of the storage tank 3 on the hydraulic pressure generation side as the hydraulic pressure is generated. The diagonally cut tip 5a of the mixed liquid flow pipe 5 efficiently flows into the flow path of the mold hollow portion 2 through the mixed liquid flow pipe 5, and the inner side surface 2c of the mold hollow portion 2 is polished. do.

一方、減圧側の貯留タンク3内には減圧側の貯留タンク3に取り付けられた混合液体流通パイプ5を介して金型中空部2を通過した研磨材混合液体が流入する。さらに減圧側の貯留タンク3に流入した研磨材混合液体は砥粒分離手段8及び減圧側の液体流路7を介して減圧側の液圧発生シリンダ4cに流入する。
その際、研磨材混合液体中の砥粒6は砥粒分離手段8によって分離され、砥粒分離手段8に連通する減圧側の液体流路7及び減圧側の液圧発生シリンダ4cに流入することはない。
また金型中空部2内側面2cを研磨することによって不可避的に発生する金属屑10は研磨材混合液と共に減圧側の貯留タンク3内に流入し、貯留タンク3内を沈降して金属屑吸着手段9によって吸着される。
On the other hand, the abrasive mixed liquid that has passed through the mold hollow portion 2 flows into the storage tank 3 on the decompression side via the mixing liquid flow pipe 5 attached to the storage tank 3 on the decompression side. Further, the abrasive mixed liquid that has flowed into the storage tank 3 on the decompression side flows into the hydraulic pressure generating cylinder 4c on the decompression side via the abrasive grain separating means 8 and the liquid flow path 7 on the decompression side.
At that time, the abrasive grains 6 in the abrasive mixed liquid are separated by the abrasive grain separating means 8 and flow into the liquid flow path 7 on the reduced pressure side and the hydraulic pressure generating cylinder 4c on the reduced pressure side communicating with the abrasive grain separating means 8. There is no.
Further, the metal scraps 10 inevitably generated by polishing the inner side surface 2c of the mold hollow portion 2 flow into the storage tank 3 on the decompression side together with the abrasive mixed liquid, settle in the storage tank 3, and adsorb the metal scraps. It is adsorbed by means 9.

図9は本発明の他の実施の形態の研磨材混合液体研磨装置21を示す。本実施の形態では先の実施の形態の貯留タンク3が金型中空部2と液体流路7によって接続される第一の貯留タンク22と、この第一の貯留タンク22と液体流路7によって接続されると共に液圧発生手段4と液体流路7によって接続される第二の貯留タンク23とよりなり、この第二の貯留タンク23内に砥粒分離手段8が収納される。
この実施の形態の研磨材混合液体研磨装置21によれば、砥粒6が貯留される第一の貯留タンク22よりも砥粒6の濃度が軽減される第二の貯留タンク23内に砥粒分離手段8が収納される結果、砥粒分離手段8の早期の目詰まりを防止することができ、研磨材混合液体による研磨方法のサイクルタイムを向上することができる。
FIG. 9 shows the abrasive material mixed liquid polishing apparatus 21 of another embodiment of the present invention. In the present embodiment, the storage tank 3 of the previous embodiment is connected to the mold hollow portion 2 by the liquid flow path 7, and the first storage tank 22 and the liquid flow path 7 are used. It is composed of a second storage tank 23 that is connected and is connected to the hydraulic pressure generating means 4 and the liquid flow path 7, and the abrasive grain separating means 8 is housed in the second storage tank 23.
According to the abrasive mixed liquid polishing apparatus 21 of this embodiment, the abrasive grains are contained in the second storage tank 23 in which the concentration of the abrasive grains 6 is reduced as compared with the first storage tank 22 in which the abrasive grains 6 are stored. As a result of accommodating the separating means 8, early clogging of the abrasive grain separating means 8 can be prevented, and the cycle time of the polishing method using the abrasive mixed liquid can be improved.

図10は本発明の他の実施の形態の研磨材混合液体研磨装置31を示す。本実施の形態では先の実施の形態の貯留タンク3内に複数の砥粒分離手段8が収納され、液圧発生シリンダ4cからの液体流路7がこれに応じて複数とされる。これによって実質的に液体流路7を径を大きくすることができ、研磨材混合液体を金型中空部2の流路内に強制流入させる流動圧を高くすることができる。理想的には液体流路7はその径を実質的に太くし、金型中空部2近傍で細くするのが研磨効率の向上に有効となる。 FIG. 10 shows the abrasive material mixed liquid polishing apparatus 31 of another embodiment of the present invention. In the present embodiment, a plurality of abrasive grain separating means 8 are housed in the storage tank 3 of the previous embodiment, and the number of liquid flow paths 7 from the hydraulic pressure generating cylinder 4c is increased accordingly. As a result, the diameter of the liquid flow path 7 can be substantially increased, and the flow pressure for forcibly flowing the abrasive mixed liquid into the flow path of the mold hollow portion 2 can be increased. Ideally, the diameter of the liquid flow path 7 should be substantially increased, and the diameter thereof should be reduced in the vicinity of the hollow portion 2 of the mold, which is effective in improving the polishing efficiency.

1・・・研磨材混合液体研磨装置、2・・・金型中空部、3・・・貯留タンク、6・・・砥粒、5・・・混合液体流通パイプ、8・・・砥粒分離手段、9・・・金属屑吸着手段。 1 ... Abrasive mixed liquid polishing device, 2 ... Mold hollow part, 3 ... Storage tank, 6 ... Abrasive grains, 5 ... Mixed liquid flow pipe, 8 ... Abrasive grain separation Means, 9 ... Metal scrap adsorption means.

Claims (9)

金型内部に連通して形成された金型中空部の一方の開口部と他方の開口部に連結する一対の研磨材混合液体の貯留タンクと、当該一対の貯留タンクの内圧を交互に増圧する液圧発生手段とを有し、研磨材混合液体が前記金型中空部の内側面を、往復流入出することで前記金型中空部内側面が研磨される研磨材混合液体研磨装置において、前記一対の貯留タンクそれぞれの内側に研磨材混合液体流通パイプと前記研磨材混合液体から砥粒を分離する積層金網フィルタとが配置され、前記研磨材混合液体流通パイプは前記貯留タンクの底部近傍まで先端を延設する態様で前記貯留タンク内の一の開口部に装着されると共に前記積層金網フィルタは前記貯留タンク内の他の開口部に装着されることを特徴とする研磨材混合液体研磨装置。 A pair of abrasive mixed liquid storage tanks connected to one opening and the other opening of the mold hollow portion formed in communication with the inside of the mold, and the internal pressure of the pair of storage tanks are alternately increased. In a polishing material mixed liquid polishing apparatus having a hydraulic pressure generating means and in which the inner surface of the hollow portion of the mold is polished by the reciprocating inflow and outflow of the mixed liquid of the abrasive material from the inner surface of the hollow portion of the mold, the pair. An abrasive mixed liquid flow pipe and a laminated wire mesh filter that separates abrasive grains from the abrasive mixed liquid are arranged inside each of the storage tanks of the above, and the tip of the abrasive mixed liquid flow pipe extends to the vicinity of the bottom of the storage tank. An abrasive mixed liquid polishing apparatus, which is attached to one opening in the storage tank in an extended manner and the laminated wire mesh filter is attached to another opening in the storage tank. 前記一対の貯留タンクは鉄枠に載置されると共にその内側に強力永久磁石が配置される請求項1記載の研磨材混合液体研磨装置。 The abrasive material mixed liquid polishing apparatus according to claim 1, wherein the pair of storage tanks are placed on an iron frame and a strong permanent magnet is arranged inside the storage tank. 前記研磨材混合液体流通パイプの前記貯留タンクの底部近傍まで延設される先端は斜めにカットされてなる請求項1記載の研磨材混合液体研磨装置。 The abrasive material mixed liquid polishing apparatus according to claim 1, wherein the tip extending to the vicinity of the bottom of the storage tank of the abrasive material mixed liquid flow pipe is cut diagonally. 前記積層金網フィルタは比較的に密な金網フィルタと、比較的に粗な金網フィルタとを積層してなり、前記密な金網フィルタを外側とし、前記粗な金属フィルタを内側として一端を開口部とし、他端を閉止部とした筒状であることを特徴とする請求項1記載の研磨材混合液体研磨装置。 The laminated wire mesh filter is formed by laminating a relatively dense wire mesh filter and a relatively coarse wire mesh filter, with the dense wire mesh filter on the outside and the coarse metal filter on the inside and one end as an opening. The abrasive material mixed liquid polishing apparatus according to claim 1, further comprising a tubular shape having the other end as a closing portion. 前記密な金網フィルタよりも粗であり、前記粗な金網フィルタよりも密な金網フィルタを前記比較的に密な金網フィルタと前記比較的に粗な金網フィルタとの間に介在させて積層してなる請求項4記載の研磨材混合液体研磨装置。 A wire mesh filter that is coarser than the dense wire mesh filter and denser than the coarse wire mesh filter is laminated between the relatively dense wire mesh filter and the relatively coarse wire mesh filter. The abrasive material mixed liquid polishing apparatus according to claim 4. 前記研磨材混合液体は水に防錆剤を加え、さらに潤滑剤が加えられてなる請求項1~請求項5のいずれか一に記載の研磨材混合液体研磨装置。 The abrasive mixed liquid polishing apparatus according to any one of claims 1 to 5, wherein the abrasive mixed liquid is obtained by adding a rust preventive to water and further adding a lubricant. 前記貯留タンクが前記金型中空部と液体流路によって接続される第一の貯留タンクと、この第一の貯留タンクと液体流路によって接続されると共に前記液圧発生手段と液体流路によって接続される第二の貯留タンクとよりなり、この第二の貯留タンク内に前記積層金網フィルタが収納される請求項1~請求項6のいずれか一に記載の研磨材混合液体研磨装置。 The storage tank is connected to a first storage tank connected to the mold hollow portion by a liquid flow path, and is connected to the first storage tank by a liquid flow path and is connected to the hydraulic pressure generating means by a liquid flow path. The abrasive material mixed liquid polishing apparatus according to any one of claims 1 to 6, wherein the laminated wire mesh filter is housed in the second storage tank. 請求項1~請求項7のいずれか一に記載の研磨材混合液体研磨装置に適用され、比較的に密な金網フィルタと、比較的に粗な金網フィルタとを積層してなり、前記密な金網フィルタを外側とし、前記粗な金属フィルタを内側として一端を開口部とし、他端を閉止部とした筒状であることを特徴とする研磨材混合液体研磨装置の砥粒分離用積層金網フィルタ。 It is applied to the abrasive material mixed liquid polishing apparatus according to any one of claims 1 to 7, and is formed by laminating a relatively dense wire mesh filter and a relatively coarse wire mesh filter, wherein the dense wire mesh filter is formed. A laminated wire mesh filter for abrasive grain separation of an abrasive mixed liquid polishing apparatus characterized in that the wire mesh filter is on the outside, the coarse metal filter is on the inside, one end is an opening, and the other end is a closing portion. .. 前記密な金網フィルタよりも粗であり、前記粗な金網フィルタよりも密な金網フィルタを前記比較的に密な金網フィルタと前記比較的に粗な金網フィルタとの間に介在させて積層してなる請求項8記載の研磨材混合液体研磨装置の砥粒分離用積層金網フィルタ。 A wire mesh filter that is coarser than the dense wire mesh filter and denser than the coarse wire mesh filter is laminated between the relatively dense wire mesh filter and the relatively coarse wire mesh filter. The laminated wire mesh filter for separating abrasive grains of the abrasive material mixed liquid polishing apparatus according to claim 8.
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