JP7078366B2 - レーザアブレーションによって微細機械加工されるワークピースの製造のための方法 - Google Patents
レーザアブレーションによって微細機械加工されるワークピースの製造のための方法 Download PDFInfo
- Publication number
- JP7078366B2 JP7078366B2 JP2017170150A JP2017170150A JP7078366B2 JP 7078366 B2 JP7078366 B2 JP 7078366B2 JP 2017170150 A JP2017170150 A JP 2017170150A JP 2017170150 A JP2017170150 A JP 2017170150A JP 7078366 B2 JP7078366 B2 JP 7078366B2
- Authority
- JP
- Japan
- Prior art keywords
- protective layer
- coating liquid
- coating
- layer
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000608 laser ablation Methods 0.000 title description 7
- 239000011241 protective layer Substances 0.000 claims description 180
- 238000000576 coating method Methods 0.000 claims description 100
- 239000011248 coating agent Substances 0.000 claims description 99
- 239000007788 liquid Substances 0.000 claims description 91
- 239000010410 layer Substances 0.000 claims description 87
- 239000002245 particle Substances 0.000 claims description 84
- 238000003754 machining Methods 0.000 claims description 55
- 238000002679 ablation Methods 0.000 claims description 31
- 229910052709 silver Inorganic materials 0.000 claims description 24
- 239000004332 silver Substances 0.000 claims description 24
- 238000001035 drying Methods 0.000 claims description 22
- 239000004922 lacquer Substances 0.000 claims description 21
- 239000002923 metal particle Substances 0.000 claims description 20
- 238000005459 micromachining Methods 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 239000002904 solvent Substances 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 7
- 238000011049 filling Methods 0.000 claims description 6
- 239000011253 protective coating Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 22
- 239000000243 solution Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 18
- 239000012530 fluid Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000000919 ceramic Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 206010040844 Skin exfoliation Diseases 0.000 description 7
- 239000011148 porous material Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000007704 transition Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000009472 formulation Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000027455 binding Effects 0.000 description 4
- 238000009739 binding Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000003745 diagnosis Methods 0.000 description 3
- 238000004299 exfoliation Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000976 ink Substances 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000930 thermomechanical effect Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000009412 basement excavation Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000035618 desquamation Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000007646 gravure printing Methods 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000000699 topical effect Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- -1 acetone Chemical class 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- CKHJYUSOUQDYEN-UHFFFAOYSA-N gallium(3+) Chemical compound [Ga+3] CKHJYUSOUQDYEN-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 235000012907 honey Nutrition 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 208000030208 low-grade fever Diseases 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009527 percussion Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000004590 silicone sealant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007962 solid dispersion Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/009—Working by laser beam, e.g. welding, cutting or boring using a non-absorbing, e.g. transparent, reflective or refractive, layer on the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/224—Anti-weld compositions; Braze stop-off compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
- C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
- B23K2101/35—Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/10—Aluminium or alloys thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/52—Ceramics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Laser Beam Processing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Description
Claims (12)
- レーザ微細機械加工によって微細機械加工されたワークピースの製造のための方法であって、保護層(SS)が前記ワークピース(WS)の表面(OF)に塗布され、前記表面は、前記保護層を貫通するレーザビーム(LS)によって機械加工エリアにおいて機械加工される、レーザ微細機械加工によって微細機械加工されたワークピースの製造のための方法において、
前記保護層(SS)は、フレーク状の金属粒子(PT)が分散される少なくとも部分的に揮発性のキャリア液(TF)を含有するコーティング液(SF)を用いて生成され、
前記コーティング液(SF)は、少なくとも前記機械加工エリア(MA)が保護コーティング液層(SSF)によってカバーされるように前記表面(OF)に対して塗布され、
前記塗布されたコーティングは、前記塗布されるコーティング液のフレーク状の金属粒子(PT)から本質的には構成された又はこれらのフレーク状の金属粒子及びコーティング液に比べて低減されたキャリア液の含有量から本質的には構成された保護層(SS)を形成するような方式で、前記キャリア液(TF)の含有量を低減するために乾燥され、
前記機械加工エリアの機械加工は、前記ワークピース(WS)上に前記保護層を貫通して照射されるレーザビーム(LS)によって実行され、
前記レーザビームによって直接影響を受けるエリアから前記保護層によって熱が放出され、前記保護層(SS)はレーザ機械加工の完了後に前記表面(OF)から取り除かれ、前記保護層(SS)を取り除くために、前記保護層内に残存する前記キャリア液の不揮発性成分若しくは難揮発性成分を溶解する溶剤が用いられる、又は、前記保護層(SS)を取り除くために、前記保護層上に方向づけられたCO 2 ジェットが用いられる、ことを特徴とする方法。 - 最大粒径が10μmの粒子を主に有するコーティング液が用いられることを特徴とする請求項1に記載の方法。
- 前記コーティング液(SF)の組成は、仕上がった前記保護層(SS)内の前記粒子(PT)の充填比が前記保護層の量の50%を超えるように選択され、前記充填比は、好ましくは60%を超えることを特徴とする請求項1又は2に記載の方法。
- 前記コーティング液(SF)は、コーティング剤を伴う又は伴わない金属粒子(PT)を主に又は排他的に含有して用いられることを特徴とする請求項1~3のいずれか1項に記載の方法。
- 導電性ラッカー、とりわけ導電性の銀は、コーティング液(SF)として用いられることを特徴とする請求項1~4のいずれか1項に記載の方法。
- 前記保護層は、50未満μmの有効な保護層の厚み(SD)にて生成されることを特徴とする請求項1~5のいずれか1項に記載の方法。
- レーザ機械加工は、前記保護層(SS)がまだキャリア液の量をなお含有する時間窓の範囲内で前記コーティング剤の乾燥フェーズの間に行なわれることを特徴とする請求項1~6のいずれか1項に記載の方法。
- 前記コーティング液(SF)の塗布において、前記コーティング液は、局所的に限られた方式で前記機械加工エリア(MA)を含有する前記表面(OF)上のコーティングエリアに対して塗布され、前記表面(OF)は、前記コーティングエリアのコーティングされていない外部であることを特徴とする請求項1~7のいずれか1項に記載の方法。
- 周囲圧力の調整によって、前記機械加工の部位の辺りのアブレーションの生成物の空間的分布が影響を受け、好ましくは、主に前記機械加工の部位から2mm~5mmの最大距離にて前記アブレーションの生成物を獲得するように前記周囲圧力が設定されることを特徴とする請求項8に記載の方法。
- 前記コーティング液(SF)の塗布において、前記コーティング液は容積方法で塗布されることを特徴とする請求項1~9のいずれか1項に記載の方法。
- 前記コーティング液(SF)の塗布の前において、中間層(ZS)が前記表面(OF)に塗布され、前記コーティング液が前記中間層に塗布されることを特徴とする請求項1~10のいずれか1項に記載の方法。
- 保護層を生成するコーティング液としての、金属粒子、導電性の銀を含有する導電性ラッカーを使用する、請求項1~11のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16189398.7 | 2016-09-19 | ||
EP16189398.7A EP3296054B1 (de) | 2016-09-19 | 2016-09-19 | Verfahren zur herstellung eines mikrobearbeiteten werkstücks mittels laserabtrag |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018047503A JP2018047503A (ja) | 2018-03-29 |
JP7078366B2 true JP7078366B2 (ja) | 2022-05-31 |
Family
ID=57121017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017170150A Active JP7078366B2 (ja) | 2016-09-19 | 2017-09-05 | レーザアブレーションによって微細機械加工されるワークピースの製造のための方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20180079030A1 (ja) |
EP (1) | EP3296054B1 (ja) |
JP (1) | JP7078366B2 (ja) |
KR (1) | KR102470523B1 (ja) |
CN (1) | CN107838552A (ja) |
TW (1) | TWI749053B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109909624B (zh) * | 2019-03-14 | 2021-05-11 | 苏州福唐智能科技有限公司 | 一种半导体工件激光切割方法 |
CN110860785A (zh) * | 2019-11-21 | 2020-03-06 | 中国航空制造技术研究院 | 一种用于超快激光去除加工的边缘防护方法 |
CN111318860B (zh) * | 2020-03-27 | 2021-12-31 | 华中科技大学 | 一种陶瓷颗粒增强金属基复合材料加工方法及装置 |
JP7320889B2 (ja) * | 2021-02-26 | 2023-08-04 | 国立大学法人 名古屋工業大学 | レーザ加工方法 |
US20220305584A1 (en) * | 2021-03-24 | 2022-09-29 | Fei Company | In-situ laser redeposition reduction by a controlled gas flow and a system for reducing contamination |
CN114351960B (zh) * | 2021-12-20 | 2023-09-22 | 广东博智林机器人有限公司 | 一种施工方法和墙面施工系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003506218A (ja) | 1999-08-10 | 2003-02-18 | クロマロイ ガス タービン コーポレーション | レーザー溶接又はレーザードリルの間に使用するためのマスキング剤 |
EP1811055A1 (de) | 2006-01-20 | 2007-07-25 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Bauteils mit Löchern |
JP2008290102A (ja) | 2007-05-23 | 2008-12-04 | Sharp Corp | レーザー加工方法、および、それを用いた半導体装置の製造方法 |
WO2014207790A1 (ja) | 2013-06-24 | 2014-12-31 | 株式会社 日立製作所 | レーザ加工部品の製造方法及びレーザ加工方法 |
JP2015131320A (ja) | 2014-01-14 | 2015-07-23 | 株式会社ディスコ | レーザー加工方法 |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4322601A (en) * | 1978-08-14 | 1982-03-30 | Serlin Richard A | Surface alloying method and apparatus using high energy beam |
DE3533145A1 (de) * | 1985-09-17 | 1987-04-23 | Mankiewicz Gebr & Co | Verfahren zur schweissnahtkontrolle und/oder -fuehrung beim lichtbogenschweissen und ein dabei eingesetzter lack |
US5293025A (en) * | 1991-08-01 | 1994-03-08 | E. I. Du Pont De Nemours And Company | Method for forming vias in multilayer circuits |
JPH08187588A (ja) | 1995-01-06 | 1996-07-23 | Sumitomo Heavy Ind Ltd | レーザ加工方法 |
DE19536312C1 (de) * | 1995-09-29 | 1996-05-09 | Mtu Muenchen Gmbh | Verfahren zur Herstellung eines mehrlagig beschichteten Bauteils mit Bohrungen |
JP4078715B2 (ja) * | 1998-06-02 | 2008-04-23 | 三菱瓦斯化学株式会社 | 信頼性に優れたビア孔の形成方法 |
GB2349106A (en) | 1999-04-17 | 2000-10-25 | Rolls Royce Plc | Laser drilling |
DE10140533B4 (de) | 2001-08-17 | 2005-04-28 | Siemens Ag | Verfahren zur Mikrobearbeitung eines Werkstücks mit Laserstrahlung |
DE102006023940B4 (de) | 2006-05-19 | 2009-06-10 | Laser-Laboratorium Göttingen e.V. | Verfahren zur Nanostrukturierung eines Substrats |
JP2007307599A (ja) * | 2006-05-20 | 2007-11-29 | Sumitomo Electric Ind Ltd | スルーホール成形体およびレーザー加工方法 |
JP4903523B2 (ja) | 2006-09-25 | 2012-03-28 | 株式会社ディスコ | ウエーハのレーザー加工方法 |
US20080241425A1 (en) | 2007-03-30 | 2008-10-02 | Matsushita Electric Industrial Co., Ltd. | System and method to reduce redeposition of ablated material |
JP2009176983A (ja) * | 2008-01-25 | 2009-08-06 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
US20090242526A1 (en) * | 2008-03-26 | 2009-10-01 | Electro Scientific Industries, Inc. | Laser micromachining through a protective member |
US20100078418A1 (en) * | 2008-09-26 | 2010-04-01 | Electro Scientific Industries, Inc. | Method of laser micro-machining stainless steel with high cosmetic quality |
US20100078416A1 (en) * | 2008-09-26 | 2010-04-01 | Electro Scientific Industries | Method of laser micro-machining stainless steel with high cosmetic quality |
KR20110120139A (ko) * | 2010-04-28 | 2011-11-03 | 한국기계연구원 | 레이저를 이용한 패턴 형성 방법 |
KR20130129392A (ko) * | 2010-11-22 | 2013-11-28 | 도와 일렉트로닉스 가부시키가이샤 | 접합재료, 접합체, 및 접합방법 |
US20150275687A1 (en) * | 2011-01-13 | 2015-10-01 | Siemens Energy, Inc. | Localized repair of superalloy component |
US9352419B2 (en) * | 2011-01-13 | 2016-05-31 | Siemens Energy, Inc. | Laser re-melt repair of superalloys using flux |
US20130316183A1 (en) * | 2011-01-13 | 2013-11-28 | Anand A. Kulkarni, JR. | Localized repair of superalloy component |
US8703581B2 (en) * | 2011-06-15 | 2014-04-22 | Applied Materials, Inc. | Water soluble mask for substrate dicing by laser and plasma etch |
US9849512B2 (en) * | 2011-07-01 | 2017-12-26 | Attostat, Inc. | Method and apparatus for production of uniformly sized nanoparticles |
WO2013074752A1 (en) * | 2011-11-16 | 2013-05-23 | Applied Materials, Inc | Laser scribing systems, apparatus, and methods |
JP5881464B2 (ja) * | 2012-02-27 | 2016-03-09 | 株式会社ディスコ | ウェーハのレーザー加工方法 |
CN103781627B (zh) * | 2012-03-06 | 2015-11-25 | 新日铁住金株式会社 | 电阻焊焊接性、耐蚀性和成形性优异的汽车用涂装金属板 |
US20140021187A1 (en) * | 2012-07-19 | 2014-01-23 | Lincoln Global, Inc. | Hot-wire consumable to provide weld with increased wear resistance |
JP2014086612A (ja) | 2012-10-25 | 2014-05-12 | Disco Abrasive Syst Ltd | レーザー加工方法 |
JP2016508069A (ja) * | 2012-11-29 | 2016-03-17 | コーニング インコーポレイテッド | 基板をレーザー穿孔するための犠牲カバー層およびその方法 |
US9393644B2 (en) * | 2013-01-31 | 2016-07-19 | Siemens Energy, Inc. | Cladding of alloys using flux and metal powder cored feed material |
US20150165563A1 (en) * | 2013-12-17 | 2015-06-18 | Corning Incorporated | Stacked transparent material cutting with ultrafast laser beam optics, disruptive layers and other layers |
EP2918371A1 (en) * | 2014-03-11 | 2015-09-16 | Heraeus Precious Metals North America Conshohocken LLC | Solderable conductive polymer thick film composition |
US20190345615A1 (en) * | 2018-05-14 | 2019-11-14 | Polskie Zaklady Lotnicze SP. Z.O.O. | Laser deposition processes for coating articles |
-
2016
- 2016-09-19 EP EP16189398.7A patent/EP3296054B1/de active Active
-
2017
- 2017-08-30 TW TW106129451A patent/TWI749053B/zh active
- 2017-09-05 JP JP2017170150A patent/JP7078366B2/ja active Active
- 2017-09-18 US US15/707,097 patent/US20180079030A1/en not_active Abandoned
- 2017-09-18 KR KR1020170119463A patent/KR102470523B1/ko active IP Right Grant
- 2017-09-19 CN CN201710847300.7A patent/CN107838552A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003506218A (ja) | 1999-08-10 | 2003-02-18 | クロマロイ ガス タービン コーポレーション | レーザー溶接又はレーザードリルの間に使用するためのマスキング剤 |
EP1811055A1 (de) | 2006-01-20 | 2007-07-25 | Siemens Aktiengesellschaft | Verfahren zur Herstellung eines Bauteils mit Löchern |
JP2008290102A (ja) | 2007-05-23 | 2008-12-04 | Sharp Corp | レーザー加工方法、および、それを用いた半導体装置の製造方法 |
WO2014207790A1 (ja) | 2013-06-24 | 2014-12-31 | 株式会社 日立製作所 | レーザ加工部品の製造方法及びレーザ加工方法 |
JP2015131320A (ja) | 2014-01-14 | 2015-07-23 | 株式会社ディスコ | レーザー加工方法 |
Also Published As
Publication number | Publication date |
---|---|
EP3296054A1 (de) | 2018-03-21 |
US20180079030A1 (en) | 2018-03-22 |
JP2018047503A (ja) | 2018-03-29 |
CN107838552A (zh) | 2018-03-27 |
TW201815507A (zh) | 2018-05-01 |
KR20180031589A (ko) | 2018-03-28 |
TWI749053B (zh) | 2021-12-11 |
KR102470523B1 (ko) | 2022-11-23 |
EP3296054B1 (de) | 2020-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7078366B2 (ja) | レーザアブレーションによって微細機械加工されるワークピースの製造のための方法 | |
Vercillo et al. | Design rules for laser‐treated icephobic metallic surfaces for aeronautic applications | |
US8728589B2 (en) | Laser decal transfer of electronic materials | |
JP5740305B2 (ja) | 高い表装面品質を有するステンレススチールのレーザ微細加工方法 | |
IL258026B2 (en) | Control of surface properties in 3D printed structures | |
JP5731400B2 (ja) | 少なくとも一つの電気伝導性フィルムを基板上へ蒸着させる方法 | |
Hauschwitz et al. | Hydrophilic to ultrahydrophobic transition of Al 7075 by affordable ns fiber laser and vacuum processing | |
JP2018532613A (ja) | 付加製造方法及び装置 | |
IL247946B (en) | Metallization using direct writing with a pulsed laser | |
EP2799180A2 (de) | Verfahren und Vorrichtung zur Oberflächenstrukturierung eines Maschinenelementes | |
Kolasinski et al. | Plume and nanoparticle formation during laser ablation | |
TW201944868A (zh) | 配線修正裝置及配線修正方法 | |
Efimov et al. | Study of aerosol jet printing with dry nanoparticles synthesized by spark discharge | |
JP2010230518A (ja) | 薄片試料作製方法 | |
CN111683770B (zh) | 用于产生和烧结细微线条和图案的方法和装置 | |
CN106414813A (zh) | 局部修复受损隔热层的方法 | |
Das et al. | Femtosecond pulsed laser damage characteristics of 7% Y 2 O 3-ZrO 2 thermal barrier coating | |
RU2449048C2 (ru) | Способ лазерно-плазменного напыления покрытий | |
López et al. | Droplet-Assisted Laser Cleaning of Contaminated Surfaces | |
Perrie et al. | Characterization of ultrafast microstructuring of alumina (Al2O3) | |
Dajnowski et al. | The practical use of lasers in removing deteriorated Incralac coatings from large bronze monuments | |
JP4505269B2 (ja) | 電子回路基板の配線補修方法 | |
Gupta et al. | Plume and Nanoparticle Formation During Laser Ablation | |
Wu et al. | Laser processing of printed copper interconnects on polymer substrates | |
Hoey et al. | Advances in aerosol direct-write technology for fine line applications |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200721 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210624 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210713 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20211013 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211223 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220419 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220519 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7078366 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |