JP7076897B2 - Frame containment - Google Patents

Description

The present invention relates to an annular frame or a frame accommodating tool for accommodating a frame unit including the frame.

In the device chip manufacturing process, various processing devices such as a cutting device for dividing a workpiece such as a semiconductor wafer having a plurality of devices formed on the surface and a laser processing device are used. When the workpiece is processed, a frame unit in which the annular frame, the tape, and the workpiece are integrated is formed, and the workpiece is carried into the processing apparatus in the state of the frame unit and processed. Ru. The frame unit is formed, for example, by applying a tape so as to close the opening of the frame, and then attaching the tape to the workpiece inside the opening.

These processing devices include a chuck table that sucks and holds the workpiece, and a clamp arranged on the outer peripheral side of the holding surface of the chuck table. The frame unit carried into the processing apparatus is placed on the holding surface of the chuck table. Then, the processing apparatus grips the frame with the clamp and sucks and holds the workpiece through the tape on the chuck table to process the workpiece held on the chuck table.

In recent years, the workpiece has become larger in size in order to improve the manufacturing efficiency of device chips. Along with this, the annular frame used for forming the frame unit is also prepared in various sizes corresponding to the workpiece. The chuck table of the processing device is replaceable, and a chuck table corresponding to the size of the workpiece is appropriately attached to the processing device. Further, in the processing apparatus, the mounting position of the clamp that grips the frame, the suction position of the transport pad that sucks and conveys the frame, and the like are changed according to the size of the frame.

By the way, in a cutting device that cuts a workpiece, a dress board that makes the cutting edge of a cutting blade used for cutting in a state suitable for cutting, and a pre-cut workpiece that imitates the workpiece are used. These dressboards and pre-cut workpieces are held on the chuck table in the state of a frame unit like the workpiece, and are cut by the cutting unit. Here, as the frame unit, a frame corresponding to the size of a chuck table or the like mounted on the processing apparatus is used.

The dress board or the work for pre-cutting may be used once, then used again after the work piece is processed, and is stored in the vicinity of the processing apparatus in the state of the frame unit. The frame used for the frame unit including the dress board and the work piece for precut and the frame unit are housed and stored in, for example, a cassette (see Patent Document 1) used for accommodating the work piece. To.

Japanese Unexamined Patent Publication No. 2000-91400

A cassette having a size corresponding to the size of the frame or the like is used for accommodating the frame or the frame unit. Therefore, a plurality of cassettes having different sizes are prepared in order to support frames of various sizes and the like. However, it is difficult to secure a large storage area in a limited area such as a device chip manufacturing factory for storing a plurality of cassettes. Further, when accommodating the frame or the like, it is not easy to find a cassette corresponding to the size of the frame or the like from a plurality of cassettes.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a frame accommodating tool capable of accommodating various frames and the like regardless of the size of the frame and the frame unit.

According to the present invention, it is a frame accommodating tool for accommodating an annular frame having an opening in the center, and is a first fixing portion fixed to a mounting table and a first fixed portion erected from the first fixing portion. A first side wall with a side wall, and a second fixing portion fixed to the pedestal at a distance corresponding to the size of the frame to be housed. A second side wall provided with a second side wall erected from the second fixing portion, the first side wall of the first side wall body, and the second side wall. The second side wall of the body is formed with a groove in which the end portion of the frame enters at a corresponding position facing each other when the frame is housed, and the first side wall and the second side wall are formed. A frame accommodating device is provided in which the side wall bodies can stand independently from each other and the distance between the side walls can be set arbitrarily .

Preferably, the groove is formed along the erection direction of the first side wall and the second side wall. Further, preferably, the groove is formed along a direction intersecting the erection direction of the first side wall and the second side wall, and a frame is dropped at the end of the groove. A preventive part is formed. Further, preferably, the first side wall body and the second side wall body can be overlapped. Further, preferably, a weight or a magnet is arranged in the first fixing portion and the second fixing portion. Further, preferably, the first side wall body further has a third fixing portion on a surface adjacent to the bottom portion of the first side wall body in which the first fixing portion is arranged, and the second side wall body. The side wall of the body further has a fourth fixing portion on a surface adjacent to the bottom of the second side wall body on which the second fixing portion is arranged. Alternatively, preferably, the first side wall further has a third fixing portion at a top opposite to the bottom of the first side wall on which the first fixing portion is arranged. The side wall body of 2 further has a fourth fixing portion at the apex opposite to the bottom portion of the second side wall body in which the second fixing portion is arranged.

The frame accommodating tool according to the present invention can accommodate frames in various states such as a frame included in a frame unit, a frame with tape, and a frame without tape. The frame accommodating tool includes a pair of side wall bodies, and when accommodating the frame, the side wall bodies are oriented so that the grooves face each other, and the frame accommodating tool is placed on a mounting table in a state of being separated by a distance corresponding to the size of the frame. It is fixed. Then, when the end portion of the frame is inserted into each groove, the frame is accommodated in the frame accommodating tool.

The frame accommodating tool can change the distance between the pair of side wall bodies according to the size of the frame to be accommodated, and the frame accommodating tool according to the present invention can accommodate frames of various sizes. Therefore, it is not necessary to prepare a plurality of frame accommodating devices having different sizes corresponding to the sizes of the frames, and it is also necessary to search for a frame accommodating device corresponding to the size of the frame to be accommodated from a plurality of frame accommodating devices. do not have.

Further, the frame accommodating tool according to the present invention can be stored together without separating the pair of side wall bodies when not in use. Therefore, the area required for storage becomes extremely small.

Therefore, the present invention provides a frame accommodating tool capable of accommodating various frames regardless of the size of the frame.

It is a perspective view which shows typically the frame unit. It is a perspective view which shows the state of accommodating a frame unit in a frame accommodating tool schematically. FIG. 3A is a perspective view schematically showing an example of the frame accommodating tool, and FIG. 3B is a perspective view schematically showing the frame accommodating tool when not in use. FIG. 4A is a perspective view schematically showing how the frame unit is housed in the frame accommodating tool, and FIG. 4B is a perspective view schematically showing an example of the frame accommodating tool.

A frame accommodating device according to an aspect of the present invention will be described with reference to the drawings. First, the frame accommodated in the frame accommodating tool according to the present embodiment will be described with reference to FIG. FIG. 1 is a perspective view schematically showing a frame unit 1 including an annular frame 7. The frame unit 1 includes a frame 7, a tape 5, and a dress board 3.

The frame accommodating tool can accommodate frames in various states such as a frame unit 1 including the frame 7, a frame 7 with the tape 5 attached, and a frame 7 without the tape 5. Hereinafter, a case where the frame unit 1 is accommodated in the frame accommodating tool will be described as an example.

In a cutting device provided with a cutting blade for cutting a workpiece such as a semiconductor wafer, adjustment of the cutting edge called dressing is performed so that the cutting blade is appropriately consumed and the cutting blade is in a state suitable for cutting. In the dressing of the cutting blade, a dress board 3 that appropriately consumes the cutting blade is used.

The dress board 3 is carried in and out of the cutting device in the state of the frame unit 1. An annular frame 7 having an opening 7a in the center is prepared, a tape 5 is attached to the frame 7 so as to close the opening 7a, and a dressboard 3 is attached to the tape 5 inside the opening 7a of the frame 7 to form a frame unit. 1 is formed. Since the cutting device is equipped with a chuck table having a size corresponding to the size of the workpiece, the frame unit 1 including the dress board 3 has a frame 7 having a size corresponding to the size of the chuck table. Is used.

While the workpiece is being cut by the cutting device, the dressboard 3 is stored in the state of the frame unit 1 in the vicinity of the cutting device. The frame accommodating tool according to the present embodiment is used for storing the frame unit 1. The frame unit 1 housed in the frame accommodating tool may include a work piece processed by a processing device instead of the dress board 3, a work piece used for pre-cutting, and the like.

Next, the frame accommodating tool 2 according to the present embodiment will be described. FIG. 2 is a perspective view schematically showing how the frame unit 1 is accommodated in the frame accommodating tool 2. As shown in FIG. 2, the frame accommodating tool 2 has a first side wall body 4a and a second side wall body 4b. The frame unit 1 is housed between the pair of side wall bodies 4a and 4b.

The frame accommodating tool 2 is arranged and used on a predetermined mounting table (not shown). The mounting table is, for example, a storage shelf placed in the vicinity of the processing device, a surplus area of the base of the processing device, or the like. The first side wall body 4a includes a fixing portion 6a and a side wall 8a erected from the fixing portion 6a, and the second side wall body 4b has a fixing portion 6b and a side wall 8b erected from the fixing portion 6b. Be prepared.

The side wall bodies 4a and 4b are in contact with the mounting table at the fixing portions 6a and 6b. The fixing portions 6a and 6b have a function of stably self-supporting and fixing the side wall bodies 4a and 4b to the mounting table. Inside the fixing portions 6a and 6b, for example, a weight that positions the center of gravity of the side wall bodies 4a and 4b at a low height is arranged.

Grooves 10a and 10b into which the ends of the frame 7 included in the frame unit 1 can enter are formed in the side walls 8a and 8b at positions corresponding to each other. As shown in FIG. 2, the grooves 10a and 10b are formed, for example, along the erection direction of the side walls 8a and 8b.

When accommodating the frame unit 1 in the frame accommodating tool 2, the first side wall body 4a is fixed to the mounting table, and the second side wall body 4b is a distance number corresponding to the size of the frame 7 included in the frame unit 1. It is separated from the side wall body 4a of 1 and fixed to the mounting table. At this time, the pair of side wall bodies 4a and 4b are oriented so that the grooves 10a and 10b face each other. Then, the frame unit 1 is inserted between the pair of side wall bodies 4a and 4b so that the end portions of the frame 7 are inserted into the grooves 10a and 10b, respectively.

When the lower end of the frame 7 reaches the upper surface of the mounting table, the frame unit 1 is supported by the mounting table. At this time, since the end portion of the frame unit 1 has entered the grooves 10a and 10b, the movement in the direction parallel to the upper surface of the mounting table is restricted by the side walls 8a and 8b. In this way, the frame accommodating tool 2 can accommodate the frame unit 1.

Since the frame accommodating tool 2 can arbitrarily set the distance between the pair of side wall bodies 4a and 4b, it can accommodate the frame unit 1 of various sizes. Therefore, it is not necessary to prepare a plurality of frame accommodating devices having different sizes in order to support the frame units 1 having various sizes. The side walls 8a and 8b are formed with grooves 10a and 10b, respectively, as many as the number of frame units 1 to be accommodated in the frame accommodating tool 2.

FIG. 3A is a perspective view schematically showing another example of the frame accommodating tool 2. In the frame accommodating tool 2 shown in FIG. 3A, the fixing portions 6a and 6b of the pair of side wall bodies 4a and 4b include magnets, and the pair of side wall bodies 4a and 4b are fixed to the mounting table by magnetic force. In this case, since no weight is required for the fixing portions 6a and 6b, the frame accommodating tool 2 is relatively small and lightweight.

The frame accommodating tool 2 can be stored by stacking a pair of side wall bodies 4a and 4b when not in use. FIG. 3B is a perspective view schematically showing the frame accommodating tool 2 when not in use. The side wall bodies 4a and 4b can stand on their own by the fixing portions 6a and 6b, and the frame accommodating tool 2 can be stored in a stand-alone state. Therefore, the area required for storing the frame accommodating tool 2 becomes extremely small.

Further, the grooves 10a and 10b formed in the side walls 8a and 8b, respectively, may be formed along a direction intersecting the erection direction of the side walls 8a and 8b. For example, as shown in FIG. 4A, the grooves 10a and 10b may be formed along a direction perpendicular to the erection direction of the side walls 8a and 8b.

In this case, at the time of accommodating the frame unit 1, as shown in FIG. 4A, the frame unit 1 is made to enter the frame accommodating tool 2 from the horizontal direction along the forming direction of the grooves 10a and 10b. Even if the frame fall prevention portion 12 is formed at the end of the grooves 10a and 10b in order to prevent the frame unit 1 that has entered the frame accommodating tool 2 from passing through the grooves 10a and 10b and falling. good.

When the frame fall prevention portion 12 is formed at the ends of the grooves 10a and 10b, when the frame unit 1 is housed in the frame accommodating tool 2, for example, the frame unit 1 is advanced until it hits the frame fall prevention portion 12. The accommodation position can be controlled to a certain position.

The frame accommodating tool 2 according to the present embodiment includes a pair of side wall bodies 4a, 4b having side walls 8a, 8b in which grooves 10a, 10b are formed, and accommodates the frame unit 1 between the pair of side wall bodies 4a, 4b. can. Since the distance between the side wall bodies 4a and 4b can be set to an arbitrary value, the frame unit 1 of various sizes can be accommodated.

In the above embodiment, the case where the fixing portions 6a and 6b are formed on the bottom portions of the side wall bodies 4a and 4b, respectively, has been described. However, the frame accommodating tool 2 according to one aspect of the present invention is not limited to this. For example, the side wall bodies 4a and 4b may further include fixing portions 6a and 6b in addition to the bottom portion.

FIG. 4B is a perspective view schematically showing an example of the frame accommodating tool 2. In the example shown in FIG. 4B, the side wall bodies 4a and 4b are further provided with fixing portions 6a and 6b on the surface adjacent to the bottom portion. In this case, the two fixing portions 6a and 6b can be used properly in the respective side wall bodies 4a and 4b, and the frame unit 1 accommodated in the frame accommodating tool 2 by changing the fixing portions 6a and 6b in contact with the mounting table. You can change the approach direction.

Further, each of the side wall bodies 4a and 4b may further have fixed portions 6a and 6b on the top portion opposite to the bottom portion. In this case, since the pair of side wall bodies 4a and 4b are the same member, only one type of side wall body is required to be prepared.

In the above embodiment, the grooves 10a and 10b formed in the side walls 8a and 8b have been described as examples of a case where the grooves 10a and 10b are along the erection direction of the side walls 8a and 8b and a case where the grooves 10a and 10b are along the direction perpendicular to the erection direction. However, one aspect of the present invention is not limited to this.

For example, the grooves 10a and 10b may be formed along a direction in which the side walls 8a and 8b are inclined at a predetermined angle from the erection direction to the vertical direction. In this case, when the frame accommodating tool 2 is subjected to vibration, an unexpected impact, or the like, the frame unit 1 is prevented from popping out from the frame accommodating tool 2 due to the gravity applied to the frame unit 1.

In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

1 Frame unit 3 Dressboard 5 Tape 7 Frame 7a Opening 2 Frame accommodating equipment 4a, 4b Side wall body 6a, 6b Fixed part 8a, 8b Side wall 10a, 10b Groove 12 Fall prevention part

Claims (7)

A frame accommodating tool for accommodating an annular frame with an opening in the center.
A first side wall body provided with a first fixing portion fixed to a mounting table and a first side wall erected from the first fixing portion.
A distance corresponding to the size of the frame to be accommodated A second fixing portion fixed to the mounting table in a state of being separated from the first side wall body, and a second fixed portion erected from the second fixing portion. With a side wall and a second side wall body comprising.
The end of the frame enters the first side wall of the first side wall and the second side wall of the second side wall at corresponding positions facing each other when the frame is housed. Each groove is formed ,
The frame accommodating tool , wherein the first side wall body and the second side wall body can stand independently from each other and can arbitrarily set a distance from each other . The frame accommodating tool according to claim 1, wherein the groove is formed along an erection direction of the first side wall and the second side wall. The groove is formed along a direction intersecting the erection direction of the first side wall and the second side wall.
The frame accommodating tool according to claim 1, wherein a fall prevention portion of the frame is formed at the end of the groove. The frame accommodating device according to any one of claims 1 to 3, wherein the first side wall body and the second side wall body can be stacked. The frame accommodating tool according to any one of claims 1 to 4, wherein a weight or a magnet is arranged in the first fixing portion and the second fixing portion. The first side wall further has a third fixing portion on a surface adjacent to the bottom of the first side wall body on which the first fixing portion is arranged.
The second side wall body is claimed from claim 1, wherein the second side wall body further has a fourth fixing part on a surface adjacent to the bottom portion of the second side wall body on which the second fixing part is arranged. Item 5. The frame accommodating tool according to any one of items 5. The first side wall further has a third fixing portion on the apex opposite to the bottom of the first side wall body on which the first fixing portion is arranged.
1. The frame accommodating device according to any one of claims 3, 4, and 5.

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