JP7065742B2 - X-ray inspection equipment - Google Patents

Description

The present invention relates to an X-ray inspection apparatus.

The X-ray inspection apparatus inspects the inspected object by irradiating the inspected object carried into the inspection space with X-rays and processing an X-ray image based on the density data output from the X-ray detector. A shielding curtain is provided in the inspection space and in the carry-in opening of the inspection space to prevent X-rays from leaking to the outside. The shielding curtain is formed into a plurality of strips by rubber or the like kneaded with a shielding substance such as lead. Therefore, when the lightweight object to be inspected pushes away the shielding curtain and tries to enter the inspection space, the reaction force received from the shielding curtain causes catching, falling, posture change, and the like.

Therefore, Patent Document 1 proposes an X-ray inspection apparatus capable of setting an opening through which an inspected object passes to an arbitrary shape according to the outer shape of the inspected object. The opening is provided with a shielding gate composed of a pair of first shielding materials that can be moved in the horizontal direction and a second shielding material that can be opened and closed in the vertical direction. This eliminates the need for a shielding curtain.

Japanese Unexamined Patent Publication No. 2018-77091

However, in the X-ray inspection apparatus of Patent Document 1, the shape of the opening can be set according to the object to be inspected to pass through, but the equipment cost increases due to the installation of the shielding gate having a complicated structure. Further, since the shape of the opening of the shield gate is determined according to the object to be inspected to pass through, the shield gate may not be used if the shape of the object to be inspected is not constant. Therefore, there is a demand for an X-ray inspection device to realize a stable inspection with an inexpensive configuration.

The present invention has been made in view of the above circumstances, and an object of the present invention is to enable stable inspection of a lightweight object to be inspected without being caught by a shielding curtain, falling, or changing its posture. The purpose is to provide an X-ray inspection apparatus capable of performing.

Next, the means for solving the above problems will be described with reference to the drawings corresponding to the embodiments.
The X-ray inspection device 1 according to claim 1 of the present invention transmits an X-ray generator that irradiates an inspected object W carried into an inspection space 3 by a transport means 5 with X-rays and the inspected object W. An X-ray detector that detects X-rays and outputs concentration data according to the amount of transmission, and a shielding curtain 8 that prevents X-rays emitted by the X-ray generator from leaking to the outside of the inspection space 3. In the X-ray inspection apparatus 1 for inspecting the inspected object W by processing an X-ray image based on the density data output from the X-ray detector.
Positioning for forming a gap 12 of a predetermined distance from the inspected object W by pushing away the shielding curtain 8 in place of the inspected object W at least on the downstream side in the transport direction of the inspected object W. The repelling member 9 is provided on the inner side surface 9a, and the repelling member 9 is carried into the inspection space 3 together with the repelling member 9. It is characterized by including an image processing unit for performing an inspection by setting a mask so that the edge portion of the inspection X-ray image corresponding to 9 is outside the inspection target area.

In this X-ray inspection device 1, the push-out member 9 is placed and conveyed together with the object W to be inspected on the conveying surface S. Since the push-out member 9 is located on the downstream side in the transport direction, it pushes away a predetermined number of strip pieces 14 of the shielding curtain 8 instead of the inspected object W. The push-out member 9 has a maximum frictional force that cannot be pushed back against the lead-containing shielding curtain 8. The push-out member 9 is formed, for example, having a sufficient mass to obtain this maximum frictional force. As a result, the object W to be inspected is conveyed into the inspection space 3 without being pushed back with respect to the conveying surface S, tipping over, or changing its posture. The X-ray generator irradiates the inspected object W that has passed through the shielding curtain 8 and entered the inspection space 3 by the push-out member 9. The X-ray detector detects the density data of the X-ray-irradiated object W and the repelling member 9 according to the amount of transmitted X-rays. At this time, in the X-ray inspection apparatus 1, the image processing unit sets a mask for the edge portion of the inspection X-ray image corresponding to the repelling member 9 as outside the inspection target area and performs inspection. As a result, the X-ray inspection device 1 does not detect the repelling member 9 as a foreign substance.
Further, in the X-ray inspection device 1, the push-out member 9 has a positioning member 11. The positioning member 11 is provided on the inner side surface 9a of the push-out member 9, and forms a gap 12 at a predetermined distance between the inner side surface 9a of the push-out member 9 and the object W to be inspected. In the X-ray inspection device 1, since the positioning member 11 is provided, the inner side surface 9a of the push-out member has a predetermined distance and is separated from the inspected object W. This makes it possible to relax the mask area setting accuracy when setting the mask area 13 according to the repelling member 9.

The X-ray inspection apparatus 1 according to claim 2 of the present invention is the X-ray inspection apparatus according to claim 1, wherein the push-out member 9 has a frame structure in which the upper and lower sides are open. ..

In this X-ray inspection device 1, the push-out member 9 is formed with a frame structure in which the upper and lower sides are open. The push-out member 9 can be, for example, a square cylinder or a cylinder whose axis is perpendicular to the transport surface S. Even in this case, the push-out member 9 is formed to have a sufficient mass, for example, to obtain the maximum frictional force. As a result, the repelling member 9 of the frame structure can repel the shielding curtain 8 instead of the object W to be inspected. Further, since the push-out member 9 surrounds the inspected object W placed on the transport surface S, it is possible to block the strip piece 14 that tends to come into contact with the side portion of the inspected object W after bending.

The X-ray inspection apparatus 1 according to claim 3 of the present invention is the X-ray inspection apparatus 1 according to claim 1 or 2 , and is a plate material of the repelling member 9 located on the downstream side in the transport direction of the object W to be inspected. Reference numeral 10 is made of stainless steel .

In this X-ray inspection device 1, since the plate material 10 of the push-out member 9 is made of stainless steel, it is composed of a sufficient mass, so that it is not pushed back against the shielding curtain 8 and the inspected object W is not pushed back. Instead, the shielding curtain 8 can be pushed away.

According to the X-ray inspection apparatus according to claim 1 according to the present invention, even if the object to be inspected is lightweight, the repelling member is masked without being caught by the shielding curtain, falling, or changing its posture. By doing so, only the object to be inspected can be inspected, and stable inspection can be made possible.
Further, according to this X-ray inspection device, it is possible to reliably prevent the object to be inspected from approaching or coming into contact with the repelling member and masking a part of the object to be inspected together with the repelling member.

According to the X-ray inspection apparatus according to claim 2 of the present invention, it is possible to prevent the shielding curtain from bending not only on the downstream side in the transport direction but also from the side and coming into contact with the object to be inspected.

According to the X-ray inspection apparatus according to claim 3 according to the present invention, since the plate material of the repelling member is made of stainless steel, it is composed of a sufficient mass, whereby it is pushed back against the shielding curtain. It is convenient for repeated use.

It is a perspective view which looked at the appearance of the X-ray inspection apparatus which concerns on embodiment from diagonally above on the upstream side in the transport direction. It is a perspective view of the push-out member shown in FIG. It is a top view which shows the object to be inspected on the transport surface surrounded by the push-out member at the time of transport. (A) is a side view of the inspected object and the repelling member before reaching the shielding curtain, and (b) is a side view of the inspected object and the repelling member on the way through the shielding curtain. It is a schematic diagram which shows the mask area set around the object to be inspected. It is a side view of the push-out member which concerns on the modification which is configured in the side view L-shape. It is a side view of the push-out member which concerns on the modification which has a resin bottom plate.

Hereinafter, embodiments according to the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of the appearance of the X-ray inspection apparatus 1 according to the embodiment as viewed from diagonally above on the upstream side in the transport direction.
The X-ray inspection apparatus 1 according to the present embodiment includes a housing 2 as an apparatus main body. The housing 2 is a frame to which each part of the device is attached, and is also a structure for partitioning an inspection space 3 which is a shielding space in which X-rays are prevented from leaking to the outside. Further, the housing 2 is provided with a carry-in entrance 4 for carrying the inspected object W into the internal inspection space 3 and a carry-out port (not shown) for carrying out the inspected object W from the internal inspection space 3. The carry-in entrance 4 and the carry-out exit are in communication with each other.

Inside the housing 2, a conveyor 5 is arranged as a transport means for transporting the inspected object W between the carry-in inlet 4, the inspection space 3, and the carry-out port.

The conveyor 5 of the X-ray inspection apparatus 1 conveys the inspected object W from the left front side to the right back side in FIG. The object W to be inspected is carried into the conveyor 5 of the X-ray inspection device 1 so as to indicate the transport direction by the arrow A1 in FIG. 1 at the one adjacent portion of the X-ray inspection device 1 corresponding to the upstream side in the transport direction. It is equipped with a carry-in conveyor 6 as a transport means. The carry-in conveyor 6 is continuous with the production line of the inspected object W and the like, and the manufactured product is carried into the X-ray inspection apparatus 1 as the inspected object W.

Further, on the other adjacent portion of the X-ray inspection device 1 which is on the downstream side of the conveyor 5 in the transport direction, an object to be inspected from the conveyor 5 of the X-ray inspection device 1 as shown by an arrow A2 in FIG. It is provided with a carry-out conveyor 7 as a transport means for carrying out W. The carry-out conveyor 7 is continuous with the processing line of the inspected object W after inspection, and in this processing line or the like, the inspected object W to be inspected is sorted according to the inspection result and conveyed to the corresponding post-process. .. In this embodiment, the object W to be inspected is positioned at the center in the width direction of the carry-in conveyor 6 and is carried into the X-ray inspection device 1 at predetermined intervals.

Although not shown, an X-ray generator is arranged downward in the housing 2 shown in FIG. 1 above the inspection space 3. The X-ray generator irradiates the inspected object W carried into the inspection space W by the carry-in conveyor 6 and the conveyor 5 with X-rays.

Further, although not shown, an X-ray detector is arranged inside the housing 2 shown in FIG. 1 at a position below the inspection space 3 and below the object W to be conveyed by the conveyor 5. ing. The X-ray detector detects X-rays transmitted through the object W to be inspected and outputs density data according to the amount of transmission. In the X-ray inspection device 1, the control unit (not shown) makes a determination based on the detection result based on the concentration data output from the X-ray detector. That is, the control unit determines whether or not there is an abnormality such as whether or not the inspected object W contains a foreign substance.

The inspection space 3 inside the housing 2 is opened to the outside in front of and behind the transport direction of the object W to be inspected by the two openings of the carry-in inlet 4 and the carry-out port. Each of these two openings is provided with a shielding curtain 8 that shields X-rays. The shielding curtain 8 prevents the X-rays emitted by the X-ray generator from leaking to the outside of the inspection space 3. In the X-ray inspection apparatus 1, the X-rays leaking from the inspection space 3 to the outside through the carry-in inlet 4 and the carry-out outlet are reduced as much as possible by the shielding curtain 8. That is, the X-ray inspection device 1 has the necessary shielding performance with respect to the outside. In addition, in FIG. 1, only the shielding curtain 8 on the carry-in entrance 4 side is shown, and the shielding curtain 8 on the carry-out exit side is not shown.

FIG. 2 is a perspective view of the push-out member 9 shown in FIG.
In the X-ray inspection apparatus 1, instead of the object W to be inspected, the repelling member 9 that repels the shielding curtain 8 is thrown in from above with the repelling portion of the repelling member 9 on the downstream side, and the inspected object W and the object W are inserted in front of the carry-in entrance. It is designed to be united. Although a detailed description of the mechanism is omitted, for example, at the position of the conveyor installed in the front stage of the X-ray inspection device 1, a person such as a worker manually puts the conveyor into the conveyor and combines them into the rear stage of the X-ray inspection device 1. Collect by hand such as a worker at the position of the installed conveyor. The push-out member 9 has a role as a movement prevention member on the transport surface S of the object W to be inspected. The push-out member 9 is carried into and out of the inspection space 3 together with the object W to be inspected. A plurality of push-out members 9 having a shape corresponding to the object W to be inspected can be arranged. Further, the push-out member 9 can be used repeatedly. The push-out member 9 may be combined with or collected from the inspected object W by using a robot arm or the like.

The push-out member 9 may have, for example, a frame structure in which the upper and lower parts are open. In the illustrated example, the push-out member 9 is formed by a square frame. The push-out member 9 has a maximum frictional force that cannot be pushed back against the lead-containing shielding curtain 8. The push-out member 9 is formed, for example, having a sufficient mass to obtain this maximum frictional force. Therefore, in the push-out member 9, the four-sided frame portion can be formed of, for example, a plate material 10 made of stainless steel.

FIG. 3 is a plan view showing an object W to be inspected on the transport surface S surrounded by the push-out member 9 during transport.
The push-out member 9 has a positioning member 11. The positioning member 11 is fixed to the inner side surface 9a of the push-out member 9 and, in the present embodiment, at the center position of the lower edge of each plate member 10. The positioning member 11 forms a gap 12 at a predetermined distance between the object to be inspected W arranged inside the push-out member 9 and the inner side surface 9a. That is, the positioning member 11 is provided so that the plate material 10 and the inspected object W do not come into contact with each other in order to keep a distance from the inspected object W. The positioning member 11 can be formed, for example, in the form of a block made of resin. Since the positioning member 11 is made of resin, it is less likely to be shadowed by X-rays.

The positioning member 11 can be omitted if the object W to be inspected is sufficiently smaller than the push-out member 9. That is, the positioning member 11 may be configured to be detachable with respect to the push-out member 9.

The X-ray inspection apparatus 1 has an image processing unit (not shown) that inspects the object W to be inspected by setting a mask on the edge portion corresponding to the repelling member 9 in the X-ray image as outside the inspection target area. Be prepared. The image processing unit determines by image processing so that the push-out member 9 surrounding the inspected object W is not erroneously recognized as a foreign substance during the defective product determination process due to the inclusion of foreign matter. The defect detection unit (not shown) does not detect the push-out member 9 as a foreign substance. This defect detection unit is one of the functions related to image processing in the image processing unit.

Although not shown, the defect detection unit includes a mask area setting unit, an inspected object extraction unit, and a defect determination unit. In the mask area setting unit, a mask area 13 (see FIG. 5) having a predetermined range at the coordinate axis position of the repelling member 9 on the X-ray transmission image of the object W to be inspected is set.

The mask region 13 is set with a predetermined range on a predetermined coordinate axis position of the inspected object W with the inspected object W as a reference. The image of the object W to be inspected is developed with the signal input timing of the start trigger whose tip obstructs the position detector (not shown) during transportation as a reference position. The mask area 13 is also set with a predetermined range on the coordinate axis position set in synchronization with the signal input of the start trigger, based on the reference position of the X-ray transmission image of the object W to be inspected. ..

The inspected object extraction unit extracts an X-ray transmission image of the inspected object W excluding the mask area 13 as an extracted image for determining a foreign substance inside the inspected object W. The push-out member 9 that is not subject to inspection is located in the mask region 13, and the push-out member 9 is not included in this extracted image. As a result, foreign matter is detected only inside the object W to be inspected by the above processing based on the amount of X-ray transmittance in the extracted image.

Further, regarding the setting of the mask area 13 described above, the mask area 13 may be set from the density of the X-ray image. For example, in an X-ray image based on density data output with the amount of X-rays detected by the X-ray detector as shading, the inspected object W and the portion of the repelling member 9 are the background around the repelling member 9. The image becomes darker with a higher density than the portion, and the image of the repelling member 9 located outside the object W becomes a higher density image. From these differences in density, an inspection X-ray image excluding the background portion is extracted, and the edge portion of the inspection X-ray image corresponding to the repelling member 9 is obtained from this inspection X-ray image, and this edge portion is used as a mask region. Set as 13.

Next, the operation of the above configuration will be described.
In the X-ray inspection apparatus 1 according to the present embodiment, the object W to be inspected is carried into the inspection space 3 by the conveyors 5 and 6 which are transport means. The inspection space 3 is prevented from leaking X-rays by the housing 2. The housing 2 is provided with a carry-in entrance 4 for carrying in the inspected object W and a carry-out outlet for carrying out the inspected object W. A shielding curtain 8 for preventing X-rays from leaking to the outside is attached to the carry-in entrance 4 and the carry-out port.

The shielding curtain 8 is formed by having a plurality of strip pieces 14 made of rubber or the like kneaded with a shielding substance such as lead. One of the short sides of the plurality of strip pieces 14 is linearly fixed to the upper edges of the carry-in entrance 4 and the carry-out port. The other short side of each strip piece 14 hangs close to the transport surface S of the transport means. The plurality of strip pieces 14 are arranged in a plane shape in the width direction of the transport surface S with the adjacent strip pieces 14 via slits at a distance that can sufficiently suppress the leakage of X-rays. Therefore, a predetermined number of strip pieces 14 corresponding to the width direction of the inspected object W are pushed away by the inspected object W to be conveyed.

FIG. 4A is a side view of the inspected object W and the repelling member 9 before reaching the shielding curtain 8, and FIG. 4B is a side view of the inspected object W and the repelling member 9 on the way through the shielding curtain 8. ..
The strip piece 14 to be pushed away is bent and pushed away by being pressed by the object W to be conveyed from the hanging state shown in FIG. 4A due to the action of gravity. When the repelling member 9 is not used, the object W to be inspected can repel the shielding curtain 8 when the maximum frictional force is larger than the repelling force.

On the other hand, when the maximum frictional force is smaller than the repelling force, the lightweight inspected object W is pushed back by the reaction force received from the shielding curtain 8. Therefore, the lightweight inspected object W, which cannot generate the necessary pushing force, is caught, falls, or changes its posture.
In the present specification, the "lightweight inspected object" means an inspected object W that cannot generate a necessary retreating force on the shielding curtain 8. Further, "catch" is a state in which the inspected object W that hits the strip piece 14 is pushed back and a part of the inspected object W is in sliding contact with the relatively moving transport surface S, or is lifted from the transport surface S by push back. I say a state that makes me sick.

Therefore, in the X-ray inspection device 1, the repelling member 9 shown in FIG. 4A is placed on the transport surface S together with the object W to be inspected. As shown in FIG. 4B, the push-out member 9 pushes out a predetermined number of strip pieces 14 of the shielding curtain 8 instead of the inspected object W. The push-out member 9 has a maximum frictional force that cannot be pushed back against the lead-containing shielding curtain 8. The push-out member 9 is formed, for example, having a sufficient mass to obtain this maximum frictional force.

Further, the push-out member 9 can be formed to have an outer shape (height and width) larger than the outer shape (contour) of the tip surface of the object W to be inspected facing the shielding curtain 8. Therefore, when the pushing member 9 pushes away the shielding curtain 8, the object W to be inspected does not come into contact with the shielding curtain 8 which is caught, falls, or changes its posture. As a result, the lightweight object W to be inspected can stably pass through the carry-in entrance 4, and is carried into the inspection space 3.

The tip frame surface of the push-out member 9 may be smaller than the outer shape (contour) of the tip surface of the object W to be inspected as long as it can surround the outside of the object W to be inspected. Examples of the shape of the push-out member 9 include a triangular cylinder and a boat shape having an acute-angled side on the downstream side in the transport direction. With such a shape, the strip piece 14 is squeezed to the left and right.

FIG. 5 is a schematic diagram showing a mask region 13 set around the object W to be inspected.
The X-ray generator irradiates the inspected object W that has passed through the shielding curtain 8 and entered the inspection space 3 by the push-out member 9. For the X-ray-irradiated object W, the density data corresponding to the amount of transmitted X-rays is detected by the X-ray detector. The X-ray inspection apparatus 1 processes an X-ray image based on this density data to inspect the inspected object W.

At this time, in the X-ray inspection device 1, the image processing unit sets a mask on the edge portion corresponding to the push-out member 9 as a outside of the inspection target area and performs inspection. The image processing unit sets a mask area 13 in a predetermined range shown in FIG. 5 at a coordinate axis position corresponding to the push-out member 9, and prevents the push-out member 9 detected in the mask area 13 from being recognized as a foreign substance. As a result, the X-ray inspection device 1 detects the push-out member 9 as a foreign substance, and avoids erroneous determination, subsequent malfunction, and transition to a foreign substance detection state in which the device cannot be operated.

The lightweight inspected object W that has been inspected is stably passed through the carry-out port by the push-out member 9 pushing away the shielding curtain 8 on the carry-out port side, and the inspection is completed.

Then, in this X-ray inspection device 1, the push-out member 9 is formed with a frame structure in which the upper and lower parts are opened. The push-out member 9 can be, for example, a square cylinder, a cylinder, or the like whose axis is perpendicular to the transport surface S. Further, the push-out member 9 can be a pyramid cylinder or a conical cylinder having a large open area on the transport surface S side. The push-out member 9 is not limited to these shapes. As long as the frame structure is open at the top and bottom, it may be irregular.

For example, the push-out member 9 formed of a square cylinder (that is, a square frame) has an outer shape (height and width) larger than the outer shape (contour) of the tip surface of the object W facing the shielding curtain 8 as described above. Has a tip frame surface. Even in this case, the push-out member 9 is formed to have a sufficient mass, for example, to obtain the maximum frictional force.
As a result, the repelling member 9 of the frame structure can repel the shielding curtain 8 instead of the object W to be inspected. Further, since the push-out member 9 surrounds the inspected object W placed on the transport surface S, it is possible to block the strip piece 14 that tends to come into contact with the side portion of the inspected object W after bending. As a result, it is possible to prevent the shielding curtain 8 from bending and coming into contact with the inspected object W not only from the downstream side in the transport direction but also from the side.

Further, in the X-ray inspection device 1, the push-out member 9 has a positioning member 11. The positioning member 11 is provided on the inner side surface 9a of the push-out member, and forms a gap 12 at a predetermined distance between the inner side surface 9a and the object W to be inspected. When the push-out member 9 is, for example, a square frame, a total of four positioning members 11 are provided, one on each inner side surface 9a. If the inner surface surface 9a has a similar shape to the object to be inspected W in a plan view, the gaps 12 between each inner surface surface 9a and the object to be inspected W are evenly spaced. The push-out member 9 and the object W to be inspected do not have to have similar figures. In this case, each positioning member 11 may be set as a different shape.

In the X-ray inspection device 1, since the positioning member 11 is provided, the inner side surface 9a of the push-out member 9 has a predetermined distance and is separated from the inspected object W. As a result, according to the push-out member 9 provided with the positioning member 11, the inspected object W is arranged away from the inner side surface 9a, and the inspected object W is also masked and image-processed during the masking process. There is no. Further, since the inspected object W is positioned and conveyed away from the repelling member 9 to be masked, only the inspected object W can be reliably inspected. Further, by securing the gap 12, it is possible to relax the mask area setting accuracy when setting the mask area 13 according to the push-out member 9.

As a result, according to the repelling member 9 including the positioning member 11, the inspected object W approaches or comes into contact with the repelling member 9, and a part of the inspected object W is masked together with the repelling member 9. Can be reliably prevented.

Next, a modified example of the above configuration will be described.
FIG. 6 is a side view of the push-out member 9A according to a modified example having an L-shaped side view.
The push-out member 9A may have an L-shaped side view in which the bottom plate 15 is made of a resin material such as acrylic resin and the plate material 10 is erected only on the downstream side in the transport direction. The object W to be inspected is placed on the bottom plate 15. Further, the bottom plate 15 is provided with a positioning member 11. For example, when the bottom plate 15 is a quadrangle, the positioning member 11 is provided at a total of four locations, that is, the inner side surface 9a of the plate material 10 and the surface of the central portion of each side.

According to the push-out member 9A according to this modification, the shape can be simplified. Then, according to the push-out member 9A, the bottom plates 15 can be accommodated in a small space by stacking the bottom plates 15 in a multi-stage manner in a direction in which the plate members 10 are arranged in parallel. Further, since the push-out member 9A does not have a pair of side plate portions sandwiching the object W to be inspected, it is possible to suppress the deterioration of the inspection accuracy by making it difficult for the X-rays to be attenuated by the X-ray irradiation from the side.

FIG. 7 is a side view of the repelling member 9B according to the modified example having the bottom plate 15 made of resin.
The push-out member 9B may be formed in a square frame shape having a bottom plate 15. In this case, the bottom plate 15 is made of a resin such as an acrylic resin through which X-rays pass. The surrounding frame structure can be made of stainless steel. Therefore, it can be said that the push-out member 9B is a tray or a deep tray of the plate material 10 whose bottom plate 15 is made of acrylic resin and whose side portion is made of stainless steel.

Although not shown, in the case of a lateral irradiation X-ray inspection device, the bottom plate 15 and the plate material 10 on the downstream side in the transport direction are indispensable. In this case, the plate material 10 on the downstream side in the transport direction is made of a stainless steel plate as described above, and the pair of side plates are made of resin, so that X-rays can be transmitted.

Similarly, although not shown, the push-out member has a bottom plate 15, a plate material 10 is erected only on the downstream side in the transport direction, and a triangular side plate, that is, a rib plate, which supports the plate material 10 on the upstream side in the transport direction. A pair of shaped side plates may be provided. According to the push-out member provided with the pair of side plates that support the plate material 10, the strength against the reaction force received from the shielding curtain 8 can be ensured, and the durability can be enhanced.

Therefore, according to the X-ray inspection apparatus 1 according to the present embodiment, even a lightweight inspected object W can be inspected stably without being caught by the shielding curtain 8, falling, or changing its posture. Can be done.

1 ... X-ray inspection device 3 ... Inspection space 5 ... Conveyor means (conveyor)
8 ... Shielding curtain 9 ... Push-out member 9a ... Inner surface 11 ... Positioning member 12 ... Gap W ... Inspected object

Claims (3)

An X-ray generator that irradiates an inspected object (W) carried into the inspection space (3) by the transport means (5) and an X-ray that passes through the inspected object are detected according to the amount of transmission. The X-ray detector is provided with an X-ray detector that outputs the density data and a shielding curtain (8) that prevents the X-rays emitted by the X-ray generator from leaking to the outside of the inspection space. In the X-ray inspection apparatus (1) which processes the X-ray image based on the density data output from and inspects the inspected object.
A positioning member (positioning member) located at least on the downstream side in the transport direction of the object to be inspected to push away the shielding curtain in place of the object to be inspected and to form a gap (12) of a predetermined distance from the object to be inspected. The push-out member (9) provided on the inner side surface (9a) and the object to be inspected are carried into the inspection space together, and the inspection X-ray image including the push-out member is obtained by the push-out member. An X-ray inspection apparatus comprising an image processing unit for performing an inspection by setting a mask so that the edge portion of the inspection X-ray image corresponding to the member is outside the inspection target area. The X-ray inspection apparatus according to claim 1, wherein the push-out member has a frame structure in which the upper and lower parts are open. The X-ray inspection apparatus according to claim 1 or 2 , wherein the plate material (10) of the push-out member located on the downstream side in the transport direction of the object to be inspected is made of stainless steel .

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