JP7047157B2 - Dielectric property measuring jig, dielectric property measuring device and dielectric property measuring method - Google Patents

Description

The present invention relates to a dielectric property measuring jig, a dielectric property measuring device, and a dielectric property measuring method.

Examples of methods for measuring dielectric properties such as the relative permittivity and dielectric tangent of a dielectric include a split-post dielectric (SPDR) resonator method, an empty body resonator method, a fabric perow resonator method, and a disk resonator method. It has been known.

Patent Document 1 describes, as a measuring jig used in the SPDR resonator method, a support portion for holding the SPDR resonator, a holding unit for holding at least two places of the measurement sample, and a measurement sample held by the holding unit. A measuring jig including an adjusting means for adjusting the position of the above is disclosed. According to this measuring jig, highly reproducible measurement becomes possible even when applied to a film-shaped or sheet-shaped measuring sample.

On the other hand, this SPDR resonator method is generally used for measuring dielectric characteristics in the microwave band of about 1 GHz to 20 GHz, but in recent years, efforts have been made to utilize radio waves in the millimeter wave band, which is a region higher in frequency than the microwave band. It's progressing. Therefore, it is required to realize a measuring jig that enables highly reproducible measurement even in the measurement of the dielectric property in the millimeter wave band.

Japanese Unexamined Patent Publication No. 2016-114431

For the measurement of the dielectric property in the millimeter wave band, for example, the disk resonator method is used.
However, in the conventional disk resonator method, it is known that the measurement error may increase depending on the shape of the measurement sample. Therefore, it is required to solve such a problem and enable highly accurate measurement.

An object of the present invention is to provide a dielectric property measuring jig, a dielectric property measuring device, and a dielectric property measuring method capable of measuring a dielectric property with high accuracy.

Such an object is achieved by the present invention of the following (1) to (14).
(1) A measuring jig used to measure the dielectric properties of a sample by the disk resonator method.
A first conductor and a second conductor that face each other and can hold the sample.
With the third conductor provided in the sample,
Of the surface of the first conductor opposite to the sample, the first conductor and the second conductor are provided with respect to an annular region in which the center of the third conductor is located on the inner diameter side in a plan view. A pressing means having a function of applying a load in a direction of bringing the conductors closer to each other and fixing the first conductor and the second conductor.
Dielectric property measuring jig characterized by having.
(2) In a plan view, the distance L from the center of the third conductor to the outer edge of the annular region is 70% or less of the distance from the center of the third conductor to the outer edge of the third conductor. The dielectric property measuring jig according to the above (1).
(3) The above-mentioned (1) or (2), wherein the first conductor is provided at a position corresponding to the center of the third conductor in a plan view and has an antenna insertion hole into which a transmitting antenna is inserted. Dielectric property measuring jig.
(4) The pressing means is
Of the surface of the second conductor opposite to the sample, the first conductor and the second conductor are provided with respect to an annular region in which the center of the third conductor is located on the inner diameter side in a plan view. The dielectric property measuring jig according to any one of (1) to (3) above, which has a function of applying a load in a direction of bringing the conductors closer to each other and fixing the first conductor and the second conductor.
(5) A dielectric property measuring device comprising the dielectric property measuring jig according to any one of (1) to (4) above.
(6) A method for measuring a dielectric property, which comprises measuring the dielectric property of the sample by using the dielectric property measuring jig according to any one of (1) to (4) above.
(7) A measuring jig used to measure the dielectric properties of a sample by the disk resonator method.
A first conductor and a second conductor that face each other and can hold the sample.
With the third conductor provided in the sample,
A first fixing plate provided on the side of the first conductor opposite to the sample side, and
A second fixing plate provided on the side of the second conductor opposite to the sample side, and
A conductor pressurizing means that applies a load in a direction that brings the first conductor and the second conductor closer to each other within the range of the first conductor in the plan view of the first conductor.
Dielectric property measuring jig characterized by having.

(8) The conductor pressurizing means presses a portion of the surface of the first fixing plate opposite to the first conductor side, which corresponds to at least the inside of the first conductor. The dielectric property measuring jig according to (7) above, which includes a fixing plate pressing means for applying a load.

(9) The fixing plate pressing means further
Of the surface of the first fixing plate opposite to the first conductor side, the first contact portion that contacts the first fixing plate at the portion corresponding to the inside of the first conductor. Including,
The dielectric property measuring jig according to (8) above, wherein the load is applied through the first contact portion.

(10) The dielectric property measuring jig according to (8) or (9) above, wherein the fixing plate pressing means is a vise.

(11) The conductor pressurizing means is
It contains a first bolt that penetrates the first fixing plate, contacts the first conductor, and is screwed into the first fixing plate.
The dielectric property measuring jig according to (7) above, wherein the load is applied via the first bolt.

(12) The conductor pressurizing means is
A connecting means for connecting the first fixing plate and the second fixing plate on the outside of the first conductor.
Compared to the separation distance between the surface of the first fixing plate on the first conductor side and the surface of the second fixing plate on the second conductor side inside the first conductor. The separation distance between the surface of the first fixing plate on the first conductor side and the surface of the second fixing plate on the second conductor side on the outside of the first conductor becomes large. With a non-planar structure
Including
The dielectric property measuring jig according to (7) above, wherein the load is applied by bringing the first fixing plate and the second fixing plate closer to each other by the connecting means.

(13) A dielectric property measuring device comprising the dielectric property measuring jig according to any one of (7) to (12) above.

(14) A method for measuring a dielectric property, which comprises measuring the dielectric property of the sample by using the dielectric property measuring jig according to any one of (7) to (12) above.

According to the present invention, the dielectric property can be measured with high accuracy.
Further, according to the present invention, it is possible to obtain a dielectric property measuring jig and a dielectric property measuring device capable of measuring the dielectric property with high accuracy.

It is sectional drawing which shows 1st Embodiment of the dielectric property measuring jig of this invention. It is a top view of the dielectric property measuring jig shown in FIG. It is a modification of the dielectric property measuring jig shown in FIG. It is a modification of the dielectric property measuring jig shown in FIG. It is sectional drawing which shows the 2nd Embodiment of the dielectric property measuring jig of this invention. It is a top view which shows the modification of the dielectric property measuring jig shown in FIG. It is sectional drawing which shows the 3rd Embodiment of the dielectric property measuring jig of this invention. It is a top view which shows the modification of the dielectric property measuring jig shown in FIG. 7. It is sectional drawing which shows the 4th Embodiment of the dielectric property measuring jig of this invention, and is the figure which shows the state which the load is not applied to the conductor. It is a figure which shows the conductor pressurizing means among the dielectric property measuring jigs shown in FIG. It is sectional drawing which shows the 4th Embodiment of the dielectric property measuring jig of this invention, and is the figure which shows the state which the load is applied to the conductor. It is a modification of the dielectric property measuring jig shown in FIG. It is a modification of the dielectric property measuring jig shown in FIG. It is a figure which shows the embodiment of the dielectric property measuring apparatus of this invention. It is sectional drawing which shows an example of the conventional dielectric property measuring jig, and is the figure which shows the state which the load is not applied to the conductor. It is sectional drawing which shows an example of the conventional dielectric property measuring jig, and is the figure which shows the state which a load is applied to a conductor.

Hereinafter, the dielectric property measuring jig, the dielectric property measuring device, and the dielectric property measuring method of the present invention will be described in detail based on the preferred embodiments shown in the accompanying drawings.

[Dielectric property measuring jig]
The dielectric property measuring jig of the present invention is a jig used when measuring the dielectric property of a sample by the disk resonator method. It should be noted that this dielectric property measuring jig is particularly preferably used for measuring the dielectric property when the direction of the electric field is perpendicular to the surface of the flat plate sample at frequencies in the microwave band or millimeter wave band.

Conventionally, such a dielectric property measuring jig has a problem that a measurement error may be large depending on the shape of the sample to be measured. Specifically, when the sample to be measured has a thin plate shape, the measured value of the relative permittivity tends to be smaller than the true value.

FIG. 15 is a cross-sectional view showing an example of a conventional dielectric property measuring jig, and is a diagram showing a state in which no load is applied to the conductor. Further, FIG. 16 is a cross-sectional view showing an example of a conventional dielectric property measuring jig, and is a diagram showing a state in which a load is applied to the conductor.

As shown in FIG. 15, in the conventional dielectric property measuring jig 9, the upper conductor 921 and the lower conductor 922 that face each other and sandwich the samples 101 and 102, and the middle conductor 923 provided between the sample 101 and the sample 102. And an upper fixing plate 931 provided on the upper side of the upper conductor 921, and a lower fixing plate 932 provided on the lower side of the lower conductor 922.

Further, the dielectric property measuring jig 9 shown in FIG. 15 includes a fastening means 94 for fastening the upper fixing plate 931 and the lower fixing plate 932 to each other. The fastening means 94 includes a bar screw 941 that is continuously inserted through the upper fixing plate 931 and the lower fixing plate 932, and nuts 942 that are screwed into both ends of the bar screw 941. By tightening the nuts 942 provided at both ends of the bar screw 941 so as to be close to each other, the above-mentioned upper conductor 921, lower conductor 922, and middle conductor 923 can be fixed to the samples 101 and 102.

Further, the dielectric property measuring jig 9 shown in FIG. 15 is provided so as to penetrate the upper fixing plate 931 and the upper conductor 921, and excites the samples 101 and 102, and the transmitting antenna 951 and the lower fixing plate 932 and the lower conductor 922. It is provided with a receiving antenna 952 which is provided so as to penetrate the sample 101 and 102 and receives an electromagnetic wave transmitted through the samples 101 and 102.

One end of a coaxial cable (not shown) is connected to the transmitting antenna 951. On the other hand, the other end of this coaxial cable is connected to an output port of an electromagnetic wave generating means such as a network analyzer (not shown).

Further, one end of a coaxial cable (not shown) is also connected to the receiving antenna 952. On the other hand, the other end of this coaxial cable is connected to an input port of an electromagnetic wave detecting means such as a network analyzer (not shown).

The electromagnetic wave applied to the transmitting antenna 951 from the electromagnetic wave generating means passes through the samples 101 and 102, is taken out from the receiving antenna 952, and is detected by the electromagnetic wave detecting means. By analyzing the electromagnetic wave detected in this way by an analysis method such as a finite element method or a mode matching method, the dielectric properties such as the relative permittivity and the dielectric loss tangent of the samples 101 and 102 can be obtained.

Here, when measuring the dielectric properties of the samples 101 and 102, as described above, the samples 101 and 102 are sandwiched between the upper conductor 921 and the lower conductor 922 by using the fastening means 94. Further, a middle conductor 923 is interposed between the sample 101 and the sample 102, and acts as an electrode in the sample.

However, as a result of diligent studies by the present inventor, in the conventional dielectric property measuring jig 9, when the upper fixing plate 931 and the lower fixing plate 932 are fastened by the fastening means 94, the upper fixing plate 931 and the lower fixing plate 932 are fastened. It became clear that it causes unintended distortion.

Specifically, as shown in FIG. 16, the portion of the upper fixing plate 931 that is fastened by the fastening means 94 is distorted so as to bend downward. On the other hand, of the lower fixing plate 932, the portion fastened by the fastening means 94 is distorted so as to bend upward.

Further, the upper conductor 921 is curved in an upwardly convex shape due to the distortion of the upper fixing plate 931. On the other hand, due to the strain of the lower fixing plate 932, the lower conductor 922 bends in a downwardly convex shape. When such a curvature occurs, the central portion of the upper conductor 921 rises, and a gap 991 as shown in FIG. 16 is formed between the upper conductor 921 and the sample 101. Further, the central portion of the lower conductor 922 is lowered, and a gap 992 as shown in FIG. 16 is formed between the lower conductor 922 and the sample 102.

Since such gaps 991 and 992 obstruct the application path of the electric field to the samples 101 and 102, the required dielectric properties of the samples 101 and 102 deviate from the true value. That is, the accuracy of the measured dielectric property is reduced.

In view of such a problem, the present inventor has further studied and found that the problem can be solved by adding a conductor pressurizing means for applying a load in a direction in which the upper conductor 921 and the lower conductor 922 are brought closer to each other. The invention was completed.

<First Embodiment>
FIG. 1 is a cross-sectional view showing a first embodiment of the dielectric property measuring jig of the present invention. Further, FIG. 2 is a plan view of the dielectric property measuring jig shown in FIG. In the following description, for convenience of explanation, the upper part in FIG. 1 is referred to as "upper" and the lower part is referred to as "lower". Further, FIG. 1 corresponds to the cross-sectional view taken along the line AA shown in FIG. Further, in FIG. 2, the outer edges of the transparent upper conductor 21 and the middle conductor 23 are shown by broken lines.

The dielectric property measuring jig 1 shown in FIG. 1 has an upper conductor 21 (first conductor) and a lower conductor 22 (second conductor) that are electrode pairs facing each other and sandwich the samples 101 and 102, and the sample 101. The middle conductor 23 (third conductor) provided between the sample 102 and the sample 102 (in the sample), and the upper fixing plate 31 (first fixing) provided on the upper side of the upper conductor 21 (the side opposite to the sample 101 side). It has a lower fixing plate 32 (second fixing plate) provided on the lower side of the lower conductor 22 (the side opposite to the sample 102 side).

Of these, the upper conductor 21, the lower conductor 22, and the middle conductor 23 are plate-shaped or foil-shaped, respectively. In the following description, the field of view of the main surface of the upper conductor 21 from the normal line of the main surface is simply referred to as "planar view".

The plan-viewing shapes of the upper fixing plate 31 and the lower fixing plate 32 are not particularly limited and may be circular, polygonal, or the like, but in the present embodiment, they are quadrangular. Further, the plan-viewing shapes of the upper conductor 21 and the lower conductor 22 are not particularly limited and may be circular, polygonal, or the like, but in the present embodiment, they are quadrangular.

Further, the upper conductor 21 is smaller than the upper fixing plate 31, and the lower conductor 22 is smaller than the lower fixing plate 32. Therefore, in a plan view, the upper fixing plate 31 protrudes outside the upper conductor 21, and the lower fixing plate 32 protrudes outside the lower conductor 22. As a result, by fastening this protruding portion by the fastening means 4 described later, the upper conductor 21, the lower conductor 22 and the middle conductor 23 are sandwiched between the upper fixing plate 31 and the lower fixing plate 32, and the sample is sampled. 101 and 102 can be sandwiched.

On the other hand, the plan view shape of the middle conductor 23 is not particularly limited, but is circular in the present embodiment.
Further, the middle conductor 23 is smaller than the upper conductor 21 and the lower conductor 22. The center conductor 23 is arranged so as to coincide with the center of the middle conductor 23 on the line connecting the transmitting antenna 51 and the receiving antenna 52, which will be described later.

Further, the dielectric property measuring jig 1 shown in FIG. 1 includes a fastening means 4 for fastening the upper fixing plate 31 and the lower fixing plate 32 to each other. The fastening means 4 includes a bar screw 41 that is continuously inserted through the upper fixing plate 31 and the lower fixing plate 32, and nuts 42 that are screwed into both ends of the bar screw 41. By tightening the nuts 42 provided at both ends of the bar screw 41 so as to be close to each other, the distance between the upper fixing plate 31 and the lower fixing plate 32 is shortened. The lower conductor 22 and the middle conductor 23 can be fixed.

The upper fixing plate 31 is provided with a through hole 311 and the lower fixing plate 32 is provided with a through hole 321. By continuously inserting the bar screw 41 into these through holes 311 and through holes 321, the distance between the upper fixing plate 31 and the lower fixing plate 32 can be regulated together with the nut 42.

The number of the fastening means 4 is not particularly limited, but is preferably 2 or more, and more preferably 3 or more and 16 or less. By fastening at such a plurality of locations, the fastening portions become uniform, so that the distance between the upper fixing plate 31 and the lower fixing plate 32 can be regulated more evenly.

Further, the arrangement of the fastening means 4 is preferably a position on the same circumference when the transmitting antenna 51 is centered in a plan view, and is a position satisfying a rotationally symmetric relationship centered on the transmitting antenna 51. Is more preferable. As a result, the fastening portions become more uniform, so that the distance between the upper fixing plate 31 and the lower fixing plate 32 can be regulated more evenly.

Further, the dielectric property measuring jig 1 shown in FIG. 1 penetrates the transmission antenna 51 provided so as to penetrate the upper fixing plate 31 and the upper conductor 21, and the lower fixing plate 32 and the lower conductor 22, respectively. The receiving antenna 52 provided in the above is provided.

That is, the upper fixing plate 31 shown in FIG. 1 has an antenna insertion hole 312 penetrating the transmitting antenna 51, and the transmitting antenna 51 is inserted into the antenna insertion hole 312. Further, the upper conductor 21 shown in FIG. 1 also has an antenna insertion hole 211 penetrating the transmitting antenna 51, and the transmitting antenna 51 is inserted into the antenna insertion hole 211.

On the other hand, the lower fixing plate 32 shown in FIG. 1 has an antenna insertion hole 322 penetrating the receiving antenna 52, and the receiving antenna 52 is inserted into the antenna insertion hole 322. Further, the lower conductor 22 shown in FIG. 1 also has an antenna insertion hole 221 penetrating the receiving antenna 52, and the receiving antenna 52 is inserted into the antenna insertion hole 221.

The transmitting antenna 51 excites the samples 101 and 102 via the upper conductor 21, and the receiving antenna 52 receives the electromagnetic waves transmitted through the samples 101 and 102 via the lower conductor 22.

The tip of the transmitting antenna 51 may be in contact with the upper surface of the sample 101 or may be separated from the upper surface.

Similarly, the tip of the receiving antenna 52 may be in contact with or away from the lower surface of the sample 102.

One end of a coaxial cable (not shown) is connected to the transmitting antenna 51. On the other hand, the other end of this coaxial cable is connected to an electromagnetic wave generating means (for example, a network analyzer or the like) (not shown).

Further, one end of a coaxial cable (not shown) is also connected to the receiving antenna 52. On the other hand, the other end of this coaxial cable is connected to an electromagnetic wave detecting means (for example, a network analyzer or the like) (not shown).

The electromagnetic wave applied to the upper conductor 21 from the electromagnetic wave generating means passes through the samples 101 and 102, is taken out from the receiving antenna 52, and is detected by the electromagnetic wave detecting means. By analyzing the electromagnetic wave detected in this way by an analysis method such as a finite element method or a mode matching method, the dielectric properties such as the relative permittivity and the dielectric loss tangent of the samples 101 and 102 can be obtained.

Here, the dielectric property measuring jig 1 shown in FIG. 1 includes an upper bolt 61 (first bolt) penetrating the upper fixing plate 31 and a lower bolt 62 (second bolt) penetrating the lower fixing plate 32. , Is equipped. The upper bolt 61 is screwed into the through hole penetrating the upper fixing plate 31, and the lower bolt 62 is screwed into the through hole penetrating the lower fixing plate 32. By projecting the upper bolt 61 downward from the upper fixing plate 31, the upper conductor 21 can be pressed downward. Similarly, by projecting the lower bolt 62 upward from the lower fixing plate 32, the lower conductor 22 can be pressed upward. Such an upper bolt 61 and a lower bolt 62 serve as a conductor pressurizing means 6 for applying a load in a direction in which the upper conductor 21 and the lower conductor 22 are brought closer to each other through them.

That is, the dielectric property measuring jig 1 shown in FIG. 1 has a conductor pressurizing means 6 provided with an upper bolt 61 and a lower bolt 62. According to such a dielectric property measuring jig 1, distortion of the upper conductor 21 and the lower conductor 22 can be suppressed. As a result, it is possible to suppress the formation of gaps, and it is possible to solve the problems of the above-mentioned conventional dielectric property measuring jig 9. That is, according to the dielectric property measuring jig 1, the dielectric properties of the samples 101 and 102 can be measured with high accuracy. Further, if the load is applied by the upper bolt 61 and the lower bolt 62, the load can be applied to the upper conductor 21 and the lower conductor 22 by a simple procedure, so that the efficiency of the measurement work can be improved.

The upper bolt 61 and the lower bolt 62 are provided within the range (inside) of the upper conductor 21 in a plan view. In other words, the point of action of the upper bolt 61 on the upper conductor 21 and the point of action of the lower bolt 62 on the lower conductor 22 are located within the range of the upper conductor 21 in a plan view. Therefore, the conductor pressurizing means 6 can accurately apply a load to the portions where the gaps 991 and 992 are likely to occur in the conventional dielectric property measuring jig 9. As a result, the distortion of the upper conductor 21 and the lower conductor 22 can be suppressed in this portion, and eventually the gaps 991 and 992 can be reliably suppressed.

In addition, "within the range of the upper conductor 21 in a plan view" means that at least a part of the tip surface of the upper bolt 61 or at least a part of the tip surface of the lower bolt 62 is inside the outer edge of the upper conductor 21 in a plan view. Refers to a certain state.

Further, the position where the load is applied by the conductor pressurizing means 6 is preferably within the range of the middle conductor 23 (inside the outer edge) in a plan view. Thereby, the above-mentioned effect can be obtained more reliably.

Further, the positions of the upper bolt 61 and the lower bolt 62 may be different from each other, but are preferably the same. As a result, the method of applying the load becomes uniform, so that the dielectric property can be measured more accurately. The same position means a state in which the position of the tip surface of the upper bolt 61 and the position of the tip surface of the lower bolt 62 overlap in a plan view.

The number of the upper bolt 61 and the lower bolt 62 is not particularly limited, but is preferably 2 or more, and more preferably 3 or more and 16 or less. By applying the load at such a plurality of locations, the method of applying the load becomes more uniform, so that the dielectric property can be measured more accurately.

The position of the upper bolt 61 is not particularly limited and may be any position, but as an example, as shown in FIG. 2, it is preferably on the circumference centered on the transmitting antenna 51, and the upper bolts 61 are adjacent to each other. It is more preferable that the distances between the bolts 61 are set to be the same. For example, in the case of FIG. 2, eight upper bolts 61 are arranged at equal intervals on the circumference centered on the transmitting antenna 51. By arranging in this way, the way of applying the load becomes more even.

Similarly, the position of the lower bolt 62 is not particularly limited and may be any position, but is set in the same manner as the position of the upper bolt 61 as an example.

It should be noted that the above-mentioned concepts of the terms "on the circumference" and "equally spaced" are concepts that allow a positional deviation of about a manufacturing error of the dielectric property measuring jig 1, respectively.

Further, the upper bolt 61 and the lower bolt 62 shown in FIGS. 1 and 2 are so-called hexagon bolts, but the type of bolt is not limited to this and may be any bolt.

Further, these bolts may be replaced by other components having similar functions, such as locking mechanisms such as clamps. Further, in that case, only one of the upper bolt 61 and the lower bolt 62 may be replaced, or both may be replaced.
Further, either one of the upper bolt 61 and the lower bolt 62 may be omitted.

The constituent materials of the upper fixing plate 31 and the lower fixing plate 32 are not particularly limited as long as they are materials having sufficient mechanical strength, but for example, stainless steel, heat-resistant steel, tool steel, and alloy steel for machine structure. Examples thereof include Fe-based alloys such as, Cu-based alloys such as brass, metal materials such as aluminum alloys, and ceramic materials such as alumina and zirconia. Further, the constituent material of the upper fixing plate 31 and the constituent material of the lower fixing plate 32 may be different from each other, but it is preferable that they are the same as each other.

The constituent materials of the upper conductor 21, the lower conductor 22, and the middle conductor 23 are not particularly limited as long as they are materials having sufficient conductivity, but for example, copper alone or a copper alloy, aluminum alone or an aluminum alloy, or a silver alloy. , Nickel alloy and the like. The simple substance of copper is particularly suitable for the measurement of the samples 101 and 102 having a small dielectric loss tangent. Further, aluminum alloys and nickel alloys are suitable for measurement of samples 101 and 102 under high temperature and humidification. In addition, a composite material in which a film (plating film or the like) of the above-mentioned conductive material is formed on the surface of the insulating base material may be used.

Further, the constituent materials of the upper conductor 21, the constituent material of the lower conductor 22, and the constituent materials of the middle conductor 23 may be different from each other, but are preferably the same.

Further, the constituent materials of the upper bolt 61 and the lower bolt 62 are not particularly limited as long as they are materials having sufficient mechanical strength, respectively, but from the materials listed as the constituent materials of the upper fixing plate 31 and the lower fixing plate 32, for example. It is selected as appropriate.

Further, the above-mentioned fastening means 4 may be provided as needed. For example, when the upper fixing plate 31 has a sufficient mass and the upper conductor 21 or the like can be fixed by its own weight, or by means other than bolts. It may be omitted if it can be fixed. Further, the fastening means 4 is not limited to the means using the bar screw 41 and the nut 42 described above, and may be replaced by, for example, a locking mechanism such as a clamp, a binding means using an elastic material such as rubber or a spring, or the like. good.

The shapes of the samples 101 and 102 are not particularly limited, but are, for example, flat plates.
The materials constituting the samples 101 and 102 are also not particularly limited, and examples thereof include resin materials, ceramic materials, glass materials, and composite materials containing these.

Further, FIG. 3 is a modification of the dielectric property measuring jig shown in FIG. In FIG. 3, the outer edges of the transparent upper conductor 21 and the middle conductor 23 are shown by broken lines.

The dielectric property measuring jig 1 shown in FIG. 3 is the same as the dielectric property measuring jig 1 shown in FIG. 2, except that the number of upper bolts 61 is different.

That is, in the upper bolt 61 shown in FIG. 3, four upper bolts 61 are arranged at equal intervals on the circumference centered on the transmitting antenna 51. Further, each upper bolt 61 shown in FIG. 3 is provided at a position where the separation distance from the rod screw 41 at the nearest position and the separation distance from the rod screw 41 adjacent to the rod screw 41 are the same. ing. In other words, each upper bolt 61 shown in FIG. 3 is located on the perpendicular bisector of two adjacent bar screws 41, 41. By satisfying such a positional relationship, the balance between the position where the load is applied by the fastening means 4 and the position where the load is applied by the conductor pressurizing means 6 is optimized. That is, since the height (thickness) of the gaps 991 and 992 may be reduced to some extent by fastening with the fastening means 4, the balance between the action and the action by the conductor pressurizing means 6 is optimized. Will be done. As a result, the load is applied more evenly, and the dielectric property can be measured more accurately.
The lower bolt 62 is also arranged in the same manner as the upper bolt 61.

Further, the above-mentioned concepts of the terms "on the circumference", "equally spaced", and "on the perpendicular bisector" are concepts that allow a positional deviation of about a manufacturing error of the dielectric property measuring jig 1, respectively.

Further, FIG. 4 is also a modification of the dielectric property measuring jig shown in FIG. In FIG. 4, the outer edges of the transparent upper conductor 21 and the middle conductor 23 are shown by broken lines.

The dielectric property measuring jig 1 shown in FIG. 4 is the same as the dielectric property measuring jig 1 shown in FIG. 2, except that the number and arrangement of the upper bolts 61 are different.

That is, in the dielectric property measuring jig 1 shown in FIG. 4, the upper bolt 61 is provided so that the arrangement density becomes higher as the position closer to the transmitting antenna 51. More specifically, at a position close to the transmitting antenna 51, six upper bolts 61 arranged at equal intervals on the circumference centered on the transmitting antenna 51 are provided. Further, at positions outside these six upper bolts 61, three upper bolts 61 arranged at equal intervals on the circumference centered on the transmitting antenna 51 are provided. As a result, in FIG. 4, a total of nine upper bolts 61 are provided.

It can be said that such an arrangement pattern of the upper bolt 61 is a pattern in which the arrangement density of the upper bolt 61 becomes higher as it gets closer to the transmitting antenna 51. By adopting such an arrangement pattern, a larger load can be applied as it is closer to the transmitting antenna 51. As a result, the load is applied more evenly, and the dielectric property can be measured more accurately.

The lower bolt 62 may be arranged in the same manner as the upper bolt 61, or may be arranged differently.

Further, the above-mentioned concepts of the terms "on the circumference" and "equally spaced" are concepts that allow a positional deviation of about a manufacturing error of the dielectric property measuring jig 1, respectively.

<Second Embodiment>
Next, a second embodiment of the dielectric property measuring jig of the present invention will be described.

FIG. 5 is a cross-sectional view showing a second embodiment of the dielectric property measuring jig of the present invention. In the following description, for convenience of explanation, the upper part in FIG. 5 is referred to as "upper" and the lower part is referred to as "lower".

Hereinafter, the second embodiment will be described, but in the following description, the differences from the above-described embodiments will be mainly described, and the description thereof will be omitted for the same matters. In FIG. 5, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The dielectric property measuring jig 1 shown in FIG. 5 is the same as the dielectric property measuring jig 1 shown in FIG. 1, except that the configuration of the conductor pressurizing means 6 is different.

That is, the conductor pressurizing means 6 shown in FIG. 5 has an upper pressurizing body 63 (first contacting portion) that abuts on the upper surface of the upper fixing plate 31 and a lower pressurizing body that abuts on the lower surface of the lower fixing plate 32. 64 (second contact portion) and 64 (second contact portion) are provided. In other words, the upper pressurizing body 63 and the lower pressurizing body 64 shown in FIG. 5 have a cylindrical shape, respectively, and replace the upper bolt 61 and the lower bolt 62 shown in FIG.

The upper pressurizing body 63 has a function of applying a load to a portion of the upper surface of the upper fixing plate 31 (the surface opposite to the upper conductor 21 side) corresponding to the inside of the upper conductor 21. Specifically, the lowering portion 71 is in contact with the upper surface of the upper pressurizing body 63, and the lowering portion 71 is moved downward by a load generation mechanism (not shown) (see the arrow in FIG. 5). The pressurizing body 63 is pushed down. As a result, a load can be applied to the upper fixing plate 31 via the upper pressurizing body 63.

On the other hand, the lower pressurizing body 64 has a function of applying a load to a portion of the lower surface of the lower fixing plate 32 (the surface opposite to the lower conductor 22 side) corresponding to the inside of the upper conductor 21. Specifically, the stage 72 is in contact with the lower surface of the lower pressurizing body 64, and the stage 72 is fixed. Therefore, when the descending portion 71 descends as described above, the distance between the descending portion 71 and the stage 72 is shortened, and the upper conductor 21 and the lower conductor 22 pass through the upper pressurizing body 63 and the lower pressurizing body 64. Can be loaded in a direction that brings them closer to each other.

That is, the fixing plate pressing means for applying a load in the direction in which the upper conductor 21 and the lower conductor 22 are brought closer to each other is configured by the descent portion 71 and the stage 72 described above.

The upper pressurizing body 63 (first contact portion) shown in FIG. 5 has a cylindrical shape as described above, and the transmitting antenna 51 is inserted inside the cylinder. As a result, the load can be evenly applied to the upper surface of the upper fixing plate 31 without interfering with the transmitting antenna 51.

As described above, in the present embodiment, the upper conductor 21 is formed by pressing at least the portion of the upper surface of the upper fixing plate 31 (the surface opposite to the upper conductor 21 side) corresponding to the inside of the upper conductor 21. It is provided with a fixing plate pressing means for applying a load in a direction in which the lower conductor 22 and the lower conductor 22 are brought closer to each other.

According to such a fixing plate pressing means, distortion of the upper conductor 21 and the lower conductor 22 can be suppressed. As a result, it is possible to suppress the formation of gaps, and it is possible to measure the dielectric properties with higher accuracy. Further, since the effect can be obtained by simply pressing the upper surface of the upper fixing plate 31 while supporting the lower fixing plate 32, it is useful from the viewpoint of simplification of the structure and ease of work.

Further, the fixing plate pressing means according to the present embodiment further includes an upper pressurizing body 63 (first contact portion), and is configured to apply a load through the upper pressurizing body 63 (first contact portion). By using the upper pressurizing body 63 which can come into contact with the upper surface of the upper fixing plate 31 so as to apply a load to the portion corresponding to the inside of the upper conductor 21, the load is applied more evenly to the upper fixing plate 31. be able to. Therefore, the distribution of the pressure applied to the samples 101 and 102 becomes uniform, and the dielectric property can be measured with higher accuracy.

On the other hand, the lower pressurizing body 64 (second contact portion) shown in FIG. 5 also has a cylindrical shape as described above, and the receiving antenna 52 is inserted inside the cylinder. As a result, the load can be evenly applied to the lower surface of the lower fixing plate 32 without interfering with the receiving antenna 52.

The constituent materials of the upper pressurizing body 63 and the lower pressurizing body 64 are not particularly limited as long as they are materials having sufficient mechanical strength, but for example, stainless steel, heat-resistant steel, tool steel, and alloys for machine structure. Examples thereof include Fe-based alloys such as steel, Cu-based alloys such as brass, metal materials such as aluminum alloys, and ceramic materials such as alumina and zirconia. Further, the constituent material of the upper pressurizing body 63 and the constituent material of the lower pressurizing body 64 may be different from each other or may be the same.

Further, the shapes of the upper pressurizing body 63 and the lower pressurizing body 64 are not limited to the cylindrical shape, and may be any shape as long as the load can be applied within the range of the upper conductor 21. Further, the upper pressurizing body 63 and the lower pressurizing body 64 may each be an aggregate of a plurality of members.

Further, the fastening means 4 according to the present embodiment may be provided as needed, and is omitted when, for example, the above-mentioned fixing plate pressing means also has the function of the fastening means 4 (the function of fixing the upper conductor 21 or the like). May be done.

Further, in the above case, the upper fixing plate 31 and the lower fixing plate 32 may be omitted in addition to the fastening means 4.

Further, FIG. 6 is also a plan view showing a modified example of the dielectric property measuring jig shown in FIG. In FIG. 6, the outer edges of the upper conductor 21 and the middle conductor 23 to be seen through are shown by broken lines, and dots are attached to the upper pressurizing body 63.

The upper pressurizing body 63 shown in FIG. 6 is located closer to the transmitting antenna 51 than the upper pressurizing body 63 shown in FIG. That is, the upper pressurizing body 63 shown in FIG. 6 has an inner diameter and an outer diameter smaller than those of the upper pressurizing body 63 shown in FIG. Therefore, in the upper pressurizing body 63 shown in FIG. 6, a larger load can be applied in a region closer to the transmitting antenna 51 side. As a result, the load is applied more evenly, and the dielectric property can be measured more accurately.

In this case, it is preferable to make the distance from the center of the transmitting antenna 51 as close as possible. Specifically, the distance L from the center of the transmitting antenna 51 to the outer edge of the upper pressurizing body 63 is up to the outer edge of the middle conductor 23. It is preferably 70% or less, and more preferably 50% or less of the distance.

The lower surface of the upper pressurizing body 63 may be parallel to or non-parallel to the upper surface of the upper fixing plate 31.

Further, the shape of the lower pressurizing body 64 may be the same as or different from the shape of the upper pressurizing body 63.
The same effect as that of the first embodiment can be obtained by such a second embodiment.

<Third Embodiment>
Next, a third embodiment of the dielectric property measuring jig of the present invention will be described.

FIG. 7 is a cross-sectional view showing a third embodiment of the dielectric property measuring jig of the present invention. In the following description, for convenience of explanation, the upper part in FIG. 7 is referred to as "upper" and the lower part is referred to as "lower".

Hereinafter, the third embodiment will be described, but in the following description, the differences from the above-described embodiments will be mainly described, and the description of the same matters will be omitted. In FIG. 7, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The dielectric property measuring jig 1 shown in FIG. 7 is the same as the dielectric property measuring jig 1 shown in FIG. 1, except that the configuration of the conductor pressurizing means 6 is different.

That is, the conductor pressurizing means 6 shown in FIG. 7 includes a fixing plate pressing means for pressing the upper surface of the upper fixing plate 31 as in the above embodiment, but the fixing plate pressing means is a vise shown in FIG. 66.

The vise 66 is a tool that sandwiches and fixes an object between two caps 661 and 662. According to such a vise 66, a load can be applied between the upper surface of the upper fixing plate 31 and the lower surface of the lower fixing plate 32 even though it is one member (tool), and by extension, the upper surface. A load can be applied in the direction in which the conductor 21 and the lower conductor 22 are brought closer to each other. Therefore, the work of applying the load can be performed more easily, and the efficiency of the measurement work can be improved.

The number of vices 66 included in the dielectric property measuring jig 1 is not particularly limited, but is preferably 2 or more, and more preferably 3 or more and 16 or less. By applying the load at such a plurality of locations, the method of applying the load becomes more uniform, so that the dielectric property can be measured more accurately.

The arrangement of the base 661 of the vise 66 is not particularly limited, but is provided at the same position as the upper bolt 61 of the first embodiment, for example. Similarly, the arrangement of the base 662 of the vise 66 is not particularly limited, but is provided at the same position as the lower bolt 62 of the first embodiment, for example.

The vise 66 includes screws, springs, and the like as a principle for generating a force for sandwiching an object, but these principles are not particularly limited.

Further, the vise 66 may be replaced with another tool that sandwiches and fixes the object.
Further, the fastening means 4 according to the present embodiment may be provided as needed, and is omitted when, for example, the above-mentioned fixing plate pressing means also has the function of the fastening means 4 (the function of fixing the upper conductor 21 or the like). May be done.

Further, in the above case, the upper fixing plate 31 and the lower fixing plate 32 may be omitted in addition to the fastening means 4.

Further, FIG. 8 is also a plan view showing a modified example of the dielectric property measuring jig shown in FIG. 7. In FIG. 8, the outer edges of the upper conductor 21 and the middle conductor 23 to be seen through are shown by broken lines, and dots are attached to the base 661 of the vise 66.

The base 661 shown in FIG. 8 is located closer to the transmitting antenna 51 than the base 661 shown in FIG. 7. That is, the base 661 shown in FIG. 8 has a different shape of the load application surface from the base 661 shown in FIG. 7. Specifically, the load application surface of the base 661 shown in FIG. 8 forms an isosceles triangle whose width is wider as it is closer to the transmitting antenna 51. In other words, the load application surface of the base 661 shown in FIG. 8 has a shape in which the index becomes larger as it is closer to the transmitting antenna 51 when the length of the virtual circumferences centered on the transmitting antenna 51 is used as an index. Is doing.

In the base 661 having such a shape, a larger load can be applied in a region closer to the transmitting antenna 51 side. As a result, the load is applied more evenly, and the dielectric property can be measured more accurately.

In this case, the shape of the base 661 is not limited to the isosceles triangle shown in the figure, and may be, for example, a shape in which the sides of the isosceles triangle are curved, a fan shape, or the like.

The shape of the base 662 may be the same as or different from the shape of the base 661.
The same effect as that of the first embodiment can be obtained by such a third embodiment.

<Fourth Embodiment>
Next, a fourth embodiment of the dielectric property measuring jig of the present invention will be described.

FIG. 9 is a cross-sectional view showing a fourth embodiment of the dielectric property measuring jig of the present invention, showing a state in which no load is applied to the conductor. Further, FIG. 10 is a diagram showing a conductor pressurizing means among the dielectric property measuring jigs shown in FIG. Further, FIG. 11 is a cross-sectional view showing a fourth embodiment of the dielectric property measuring jig of the present invention, showing a state in which a load is applied to the conductor. In the following description, for convenience of explanation, the upper part in FIGS. 9 to 11 is referred to as "upper" and the lower part is referred to as "lower".

Hereinafter, the fourth embodiment will be described, but in the following description, the differences from the above-described embodiments will be mainly described, and the description of the same matters will be omitted. In FIGS. 9 to 11, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The dielectric property measuring jig 1 shown in FIGS. 9 to 11 is the same as the dielectric property measuring jig 1 shown in FIG. 1, except that the configuration of the conductor pressurizing means 6 is different.

That is, the conductor pressurizing means 6 shown in FIGS. 9 and 10 is convex downward with the fastening means 4 (connecting means) for fastening the upper fixing plate 31 and the lower fixing plate 32 on the outside of the upper conductor 21 in a plan view. A non-planar structure including a lower surface 310 of an upper fixing plate 31 (first fixing plate) having the shape of the above and an upper surface 320 of the lower fixing plate 32 (second fixing plate) having an upward convex shape. Includes. Since the lower surface 310 of the upper fixing plate 31 and the upper surface 320 of the lower fixing plate 32 have partially different separation distances from each other, the difference in the separation distances ensures that the target portion is secured. Loads can be applied.

Specifically, of the upper fixing plate 31, the lower surface 310 located on the upper conductor 21 (first conductor) side has a downwardly convex shape. What is this "downwardly convex shape"? , Refers to a non-planar surface in which the central portion in a plan view is located at the lowest position and gradually shifts upward toward the outer edge portion. The non-planar surface may be a discontinuous surface in which surfaces having different inclinations are connected to each other, or a curved surface in which the inclination changes continuously.

Further, of the lower fixing plate 32, the upper surface 320 located on the lower conductor 22 (second conductor) side has an upward convex shape, and this "upward convex shape" is a plan view. It is a non-planar surface where the central part is located at the uppermost part and gradually displaces downward toward the outer edge part. The non-planar surface may be a discontinuous surface in which surfaces having different inclinations are connected to each other, or a curved surface in which the inclination changes continuously.

When the lower surface 310 of the upper fixing plate 31 and the upper surface 320 of the lower fixing plate 32 face each other, the distance between these surfaces is partially different. That is, the lower surface 310 of the upper fixing plate 31 and the lower fixing plate 32 on the outside of the upper conductor 21 are compared with the distance S1 between the lower surface 310 of the upper fixing plate 31 and the upper surface 320 of the lower fixing plate 32 inside the upper conductor 21. The distance S2 from the upper surface 320 of the above surface is large (see FIG. 10).

Such a non-planar structure can reliably apply a load to the inside of the upper conductor 21. That is, the lower surface 310 of the upper fixing plate 31 and the upper surface 320 of the lower fixing plate 32 shown in FIG. 9 show the state before being fastened by the fastening means 4, but the lower surface 310 and the upper surface 320 in this state are fastened. It is preset to a shape that takes into account the distortion that accompanies it. That is, based on the fact that the upper fixing plate 31 and the lower fixing plate 32 are distorted by the fastening of the fastening means 4, the amount of distortion is added so that the lower surface 310 and the upper surface 320 after the distortion are flat as shown in FIG. The lower surface 310 and the upper surface 320 are preset in the formed shape. Therefore, it is possible to prevent a gap from being formed between the samples 101 and 102 and the conductor as in the conventional case, and to prevent the measured value of the dielectric property from significantly deviating from the true value.

The lower surface 310 and the upper surface 320 after being distorted by fastening do not necessarily have to be flat. For example, the amount of displacement is set to be relatively small (for example, the curvature of the curved surface becomes small), but the above-mentioned non-planar surface is still maintained even after being distorted by fastening (for example, the curved surface is still curved after fastening). May be.

The separation distance S2 is preferably about 100.01 to 105% of the separation distance S1, and more preferably about 100.05 to 103%. As a result, the upper conductor 21 and the lower conductor 22 can be more reliably fixed while suppressing the distortion of the upper conductor 21 and the lower conductor 22 even if they are fastened by the fastening means 4.

If the separation distance S2 is less than the lower limit, the upper conductor 21 and the lower conductor 22 may be distorted due to the distortion of the upper fixing plate 31 and the lower fixing plate 32 depending on the rigidity of the upper fixing plate 31 and the lower fixing plate 32. As a result, the accuracy of the measured values may decrease. On the other hand, if the separation distance S2 exceeds the upper limit value, the fastening by the fastening means 4 tends to be unstable, so that the fixing of the upper conductor 21 and the lower conductor 22 may become unstable and the accuracy of the measured value may decrease. be.

From the above, the conductor pressurizing means 6 according to the present embodiment is the same as the first to third embodiments by devising the shapes of the lower surface 310 of the upper fixing plate 31 and the upper surface 320 of the lower fixing plate 32. It works. Therefore, the dielectric property measuring jig 1 having a simpler structure and easy to handle can be obtained. Therefore, it is possible to improve the efficiency of the measurement work while reducing the cost of the dielectric property measuring jig 1.

Here, FIGS. 12 and 13 are modification examples of the dielectric property measuring jig 1 shown in FIG. 9, respectively.
The dielectric property measuring jig 1 shown in FIG. 12 further includes a spacer 81 that regulates the separation distance between the upper fixing plate 31 and the lower fixing plate 32.

By providing such a spacer 81, it is possible to prevent the separation distance between the upper fixing plate 31 and the lower fixing plate 32 from being unnecessarily narrowed when fastened by the fastening means 4. As a result, unintended distortion of the upper fixing plate 31 and the lower fixing plate 32 is prevented, and a gap is created between the sample 101 and the central portion of the upper conductor 21 and between the sample 102 and the central portion of the lower conductor 22. Is suppressed. As a result, it is possible to prevent the measured value of the dielectric property from significantly deviating from the true value.

The arrangement of the spacer 81 is not particularly limited, but is preferably outside the upper conductor 21 in a plan view. As a result, it is possible to regulate the distortion of the portion that is easily distorted with the fastening of the fastening means 4, so that the above-mentioned effect can be enjoyed more reliably.

The shape of the spacer 81 is also not particularly limited, but is a cylindrical shape in the present embodiment. This makes it possible to arrange the spacer 81 so that the bar screw 41 included in the fastening means 4 is inserted, for example. As a result, the spacer 81 can be easily prevented from being displaced, and its function can be reliably exerted. In addition, the dielectric property measuring jig 1 including the spacer 81 can be easily assembled.

The constituent material of the spacer 81 is not particularly limited as long as it is a material having sufficient rigidity, but for example, Fe-based alloys such as stainless steel, heat-resistant steel, tool steel, and machine structural alloy steel, and Cu-based alloys such as brass. Examples thereof include metal materials such as alloys and aluminum alloys, and ceramic materials such as alumina and zirconia.

The length of the spacer 81 is not particularly limited, but is set to be shorter than the total thickness when the five members of the lower conductor 22, the sample 102, the middle conductor 23, the sample 101, and the upper conductor 21 are stacked. It is preferable to be done. Specifically, the length of the spacer 81 is preferably about 95 to 99.999% of the total thickness of the five members, and more preferably about 97 to 99.99%. By setting the length of the spacer 81 in such a range, the space required for the fastening means 4 to exert its fastening function is secured, while the distortion of the upper fixing plate 31 and the lower fixing plate 32 due to the fastening is caused. It is possible to prevent the amount from becoming too large and causing the above-mentioned gap. As a result, even a non-skilled person can easily perform work for enabling highly accurate measurement while applying an appropriate load.

Further, the dielectric property measuring jig 1 shown in FIG. 13 further includes an adjusting plate 82 that regulates the separation distance between the spacer 81 and the upper fixing plate 31. The adjusting plate 82 is provided so that it can be easily selected between a mounted state inserted between the upper fixing plate 31 and the lower fixing plate 32 and a non-mounted state not inserted. The regulation length of the separation distance between the upper fixing plate 31 and the lower fixing plate 32 can be easily adjusted depending on whether the adjusting plate 82 is attached or not. Therefore, the regulation length can be easily optimized according to the thickness of the samples 101 and 102, and the dielectric property can be measured with high accuracy even when the samples 101 and 102 are frequently replaced.

In FIG. 13, the adjusting plate 82 is inserted between the spacer 81 and the upper fixing plate 31, but the insertion position is not particularly limited, and even between the spacer 81 and the lower fixing plate 32. It may be either or both.

The shape of the adjusting plate 82 is not particularly limited, but is flat in the present embodiment. As a result, the above-mentioned mounting state can be obtained only by inserting the adjusting plate 82 between the spacer 81 and the upper fixing plate 31, and then the above-mentioned non-mounting state can be obtained by simply pulling out the adjusting plate 82. be able to.

The height of the gap into which the adjusting plate 82 is inserted is appropriately set according to the length of the spacer 81, but is preferably 1/50 or less of the length of the spacer 81, and is 1/10000 or more. It is more preferably / 30 or less. By setting the height of the gap within the above range, the space required for the fastening means 4 to exert its fastening function is secured, while the amount of distortion of the upper fixing plate 31 and the lower fixing plate 32 due to fastening is secured. It is possible to suppress the occurrence of the above-mentioned problems due to the fact that the size becomes too large. As a result, even a non-skilled person can easily perform work for enabling highly accurate measurement while applying an appropriate load. Further, since the thickness of the samples 101 and 102 that can be handled can be increased by the amount of this gap, the dielectric property measuring jig 1 can support high-precision measurement of the samples 101 and 102 of various thicknesses. It will be something like that.

The gap into which the adjusting plate 82 is inserted means the total of the gap between the spacer 81 and the upper fixing plate 31 and the gap between the spacer 81 and the lower fixing plate 32.
The same effect as that of the first embodiment can be obtained by such a fourth embodiment.

[Dielectric characteristic measuring device]
Next, an embodiment of the dielectric property measuring device of the present invention will be described.

The dielectric property measuring device according to the present embodiment includes the dielectric property measuring jig according to the above-described embodiment.

FIG. 14 is a diagram showing an embodiment of the dielectric property measuring device of the present invention. In FIG. 14, the same reference numerals are given to the same configurations as those in the above-described embodiment.

The dielectric property measuring device 10 shown in FIG. 14 includes a dielectric property measuring jig 1, a network analyzer 11, and a personal computer 12. The dielectric property measuring jig 1 and the network analyzer 11 are electrically connected to each other via a coaxial cable or the like. Further, the network analyzer 11 and the personal computer 12 can communicate with each other.

The network analyzer 11 can output an electromagnetic wave from its output port to the dielectric characteristic measuring jig 1.

In the dielectric property measuring jig 1, the electromagnetic wave in a predetermined mode is excited in response to the input of the electromagnetic wave. The electromagnetic wave excited in this way is input to the input port of the network analyzer 11 and detected.

The network analyzer 11 is configured to acquire data such as resonance frequency, insertion loss, and full width at half maximum by digitally processing the detected electromagnetic wave, and output these data to the personal computer 12.

In the personal computer 12, the relative permittivity and dielectric loss tangent of the samples 101 and 102 are based on these data, the initial conditions for the samples 101 and 102, the initial conditions for the dielectric property measuring jig 1, and the environmental conditions such as temperature and humidity. Etc. are calculated.

This calculation is performed by a known analysis method such as the finite element method or the mode matching method (for example, disclosed in JP-A-2004-177234).

According to the dielectric property measuring device 10 as described above, the dielectric properties of the samples 101 and 102 can be measured with high accuracy.

The dielectric property measuring device 10 is particularly useful in that it can measure the characteristics in the direction perpendicular to the surface of the samples 101 and 102 with high accuracy in the high frequency band of millimeter wave (30 to 300 GHz). It is expected that such millimeter-wave bands will be increasingly applied to sensing applications such as millimeter-wave radar, high-speed communication, communication applications such as large-capacity communication, and security applications such as millimeter-wave cameras. In the development of devices used for such applications, a dielectric material having high performance even in the millimeter wave band is required, and when evaluating the dielectric property of the dielectric material with high accuracy, the dielectric property measurement is performed. The jig 1 and the dielectric property measuring device 10 are useful.

[Dielectric property measurement method]
Next, an embodiment of the dielectric property measuring method of the present invention will be described.

The dielectric property measuring method according to the present embodiment is a method for measuring the dielectric property using the dielectric property measuring jig according to the above-described embodiment.

Specifically, a step of inputting an electromagnetic wave from the output port of the network analyzer 11 to the samples 101 and 102 attached to the dielectric property measuring jig 1, and a network analyzer using the electromagnetic wave output from the dielectric property measuring jig 1. It includes a step of inputting to the input port of 11, a step of outputting the detected electromagnetic wave data to the personal computer 12, and a step of calculating the dielectric property based on the electromagnetic wave data, initial conditions, and the like.

According to the dielectric property measuring method as described above, even for the thin plate-shaped samples 101 and 102, the dielectric property can be measured with high accuracy.

Although the present invention has been described above based on the illustrated embodiments, the present invention is not limited thereto.

For example, the dielectric property measuring jig and the dielectric property measuring device of the present invention may have any element added to the embodiment, or another element in which the element of the embodiment has the same function. It may be replaced with.

Further, the method for measuring the dielectric property of the present invention may be a method in which an arbitrary target step is added to the above-described embodiment.

Next, specific examples of the present invention will be described.
1. 1. Measurement of the dielectric property of the sample (Example 1)
The dielectric property of the sample at a frequency of 13 GHz was measured using the dielectric property measuring jig shown in FIG. The conditions of the jig and the sample are as follows.

<Conditions for dielectric property measuring jig>
・ Upper conductor and lower conductor Constituent material: Copper alone Thickness: 6 mm
Size: 100 mm x 100 mm (square)

・ Medium conductor constituent material: Copper alone Thickness: 0.02 mm
Size: Diameter 30 mm (perfect circle)

・ Hexagon bolt Component material: Stainless steel Tip surface diameter: 5 mm

・ Fastening means Tightening torque: 8N ・ m

<Sample conditions>
Form: Resin film Thickness: 111 μm
Size: 50 mm x 50 mm (square)

(Example 2)
The dielectric property of the sample was measured using the dielectric property measuring jig shown in FIG. In addition, only the conditions different from the jig used in Example 1 are described below.

<Conditions for dielectric property measuring jig>
・ Upper pressurizing body and lower pressurizing body Component material: Brass Shape: Cylindrical size: Outer diameter 20 mm

(Example 3)
The dielectric property of the sample was measured using the dielectric property measuring jig shown in FIG. 7. In addition, only the conditions different from the jig used in Example 1 are described below.

<Conditions for dielectric property measuring jig>
・ Vise base shape: Round base size: Diameter 10 mm
Number of vices: 4

(Example 4)
The dielectric property of the sample was measured using the dielectric property measuring jig shown in FIG. In addition, only the conditions different from the jig used in Example 1 are described below.

<Conditions for dielectric property measuring jig>
Ratio of separation distance S2 to separation distance S1: 100.5%

(Comparative example)
The dielectric property of the sample was measured using the dielectric property measuring jig shown in FIG. In addition, only the conditions different from the jig used in Example 1 are described below.

<Conditions for dielectric property measuring jig>
No hexagon bolt (conductor pressurizing means)

(Reference example)
The dielectric properties of the sample were measured by the empty body resonator method.

2. 2. Measurement Results The relative permittivity (dielectric property) measured by each measurement method of each example, comparative example and reference example was compared.

As a result, the relative permittivity measured by each measuring method of each Example and Reference Example was within the range of 3.79 ± 0.01.
On the other hand, the relative permittivity measured by the measuring method of the comparative example was 3.38.

From the above, it was confirmed that according to the present invention, even a thin plate sample such as a film can measure the dielectric property with high accuracy.

1 Dielectric property measuring jig 4 Fastening means 6 Conductor pressurizing means 9 Dielectric property measuring jig 10 Dielectric property measuring device 11 Network analyzer 12 Personal computer 21 Upper conductor 22 Lower conductor 23 Middle conductor 31 Upper fixing plate 32 Lower fixing plate 41 Rod Screw 42 Nut 51 Transmitting antenna 52 Receiving antenna 61 Upper bolt 62 Lower bolt 63 Upper pressurizing body 64 Lower pressurizing body 660,000 force 71 Lowering part 72 Stage 81 Spacer 82 Adjusting plate 94 Fastening means 101 Sample 102 Sample 211 Antenna insertion hole 221 Antenna insertion hole 310 Bottom surface 311 Through hole 312 Antenna insertion hole 320 Top surface 321 Through hole 322 Antenna insertion hole 661 Base 662 Base 921 Upper conductor 922 Lower conductor 923 Middle conductor 931 Upper fixing plate 932 Lower fixing plate 941 Bar screw 942 Nut 951 Transmitting antenna 952 Receiving antenna 991 Gap 992 Gap S1 Separation distance S2 Separation distance

Claims (6)

A measuring jig used to measure the dielectric properties of a sample by the disk resonator method.
A first conductor and a second conductor that face each other and can hold the sample.
With the third conductor provided in the sample,
Of the surface of the first conductor opposite to the sample, the first conductor and the second conductor are provided with respect to an annular region in which the center of the third conductor is located on the inner diameter side in a plan view. A pressing means having a function of applying a load in a direction of bringing the conductors closer to each other and fixing the first conductor and the second conductor.
Dielectric property measuring jig characterized by having. The claim that the distance L from the center of the third conductor to the outer edge of the annular region in a plan view is 70% or less of the distance from the center of the third conductor to the outer edge of the third conductor. The dielectric property measuring jig according to 1. The dielectric property measuring jig according to claim 1 or 2, wherein the first conductor is provided at a position corresponding to the center of the third conductor in a plan view and includes an antenna insertion hole into which a transmitting antenna is inserted. The pressing means is
Of the surface of the second conductor opposite to the sample, the first conductor and the second conductor are provided with respect to an annular region in which the center of the third conductor is located on the inner diameter side in a plan view. The dielectric property measuring jig according to any one of claims 1 to 3, which has a function of applying a load in a direction of bringing the conductors closer to each other and fixing the first conductor and the second conductor. A dielectric characteristic measuring apparatus comprising the dielectric characteristic measuring jig according to any one of claims 1 to 4. A method for measuring a dielectric property, which comprises measuring the dielectric property of the sample by using the dielectric property measuring jig according to any one of claims 1 to 4.

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