JP7045485B2 - 表面改質導電コーティングを支持するシャッタを含む電位駆動シェード、その製造方法、及びその操作方法 - Google Patents
表面改質導電コーティングを支持するシャッタを含む電位駆動シェード、その製造方法、及びその操作方法 Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims description 132
- 239000011248 coating agent Substances 0.000 title claims description 117
- 238000000034 method Methods 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000463 material Substances 0.000 claims description 99
- 239000000758 substrate Substances 0.000 claims description 98
- 239000002861 polymer material Substances 0.000 claims description 53
- 239000011521 glass Substances 0.000 claims description 48
- 230000006870 function Effects 0.000 claims description 38
- 125000006850 spacer group Chemical group 0.000 claims description 25
- 229910052759 nickel Inorganic materials 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 21
- 239000012212 insulator Substances 0.000 claims description 21
- 229910052804 chromium Inorganic materials 0.000 claims description 20
- 230000002829 reductive effect Effects 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 8
- 229910010282 TiON Inorganic materials 0.000 claims description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 6
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 200
- 239000010408 film Substances 0.000 description 102
- 239000004020 conductor Substances 0.000 description 42
- 229920000642 polymer Polymers 0.000 description 28
- 239000000976 ink Substances 0.000 description 27
- 239000004642 Polyimide Substances 0.000 description 24
- 229920001721 polyimide Polymers 0.000 description 24
- 239000011112 polyethylene naphthalate Substances 0.000 description 22
- 229910052782 aluminium Inorganic materials 0.000 description 21
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 19
- 239000011651 chromium Substances 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 239000010936 titanium Substances 0.000 description 17
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 16
- 229920000307 polymer substrate Polymers 0.000 description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
- 230000005855 radiation Effects 0.000 description 11
- 239000004593 Epoxy Substances 0.000 description 10
- 230000003667 anti-reflective effect Effects 0.000 description 10
- 238000013459 approach Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 10
- 230000009467 reduction Effects 0.000 description 10
- 229910052719 titanium Inorganic materials 0.000 description 10
- 239000004696 Poly ether ether ketone Substances 0.000 description 9
- -1 for example Polymers 0.000 description 9
- 229920002530 polyetherether ketone Polymers 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 239000005020 polyethylene terephthalate Substances 0.000 description 8
- 229920000139 polyethylene terephthalate Polymers 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 238000004040 coloring Methods 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 229910001120 nichrome Inorganic materials 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- 241000446313 Lamella Species 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 5
- 230000009477 glass transition Effects 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 4
- 239000003086 colorant Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000032798 delamination Effects 0.000 description 4
- 238000005553 drilling Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229920005601 base polymer Polymers 0.000 description 3
- 238000005219 brazing Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 229910001026 inconel Inorganic materials 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229920009441 perflouroethylene propylene Polymers 0.000 description 3
- 229920001155 polypropylene Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910001055 inconels 600 Inorganic materials 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010421 standard material Substances 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 230000006750 UV protection Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000003490 calendering Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000000224 chemical solution deposition Methods 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229920000891 common polymer Polymers 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001000 nickel titanium Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004224 protection Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 235000014347 soups Nutrition 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000002211 ultraviolet spectrum Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/663—Elements for spacing panes
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/673—Assembling the units
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B9/26—Lamellar or like blinds, e.g. venetian blinds
- E06B9/264—Combinations of lamellar blinds with roller shutters, screen windows, windows, or double panes; Lamellar blinds with special devices
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B9/40—Roller blinds
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B9/40—Roller blinds
- E06B9/42—Parts or details of roller blinds, e.g. suspension devices, blind boxes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/19—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B2009/2417—Light path control; means to control reflection
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B2009/2423—Combinations of at least two screens
- E06B2009/2447—Parallel screens
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B2009/2464—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds featuring transparency control by applying voltage, e.g. LCD, electrochromic panels
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B9/00—Screening or protective devices for wall or similar openings, with or without operating or securing mechanisms; Closures of similar construction
- E06B9/24—Screens or other constructions affording protection against light, especially against sunshine; Similar screens for privacy or appearance; Slat blinds
- E06B9/26—Lamellar or like blinds, e.g. venetian blinds
- E06B9/264—Combinations of lamellar blinds with roller shutters, screen windows, windows, or double panes; Lamellar blinds with special devices
- E06B2009/2643—Screens between double windows
-
- E—FIXED CONSTRUCTIONS
- E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
- E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
- E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
- E06B3/66—Units comprising two or more parallel glass or like panes permanently secured together
- E06B3/67—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light
- E06B3/6715—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light
- E06B3/6722—Units comprising two or more parallel glass or like panes permanently secured together characterised by additional arrangements or devices for heat or sound insulation or for controlled passage of light specially adapted for increased thermal insulation or for controlled passage of light with adjustable passage of light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Description
Claims (32)
- 絶縁ガラス(IG)ユニットであって、
それぞれが内部主表面及び外部主表面を有する第1及び第2の基材であって、前記第1の基材の前記内部主表面が、前記第2の基材の前記内部主表面に面している、第1及び第2の基材と、
前記第1及び第2の基材を互いに対して実質的に平行に離間した関係に維持し、それらの間に間隙を画定するためのスペーサシステムと、
前記第1の基材と前記第2の基材との間に介在する動的に制御可能なシェードであって、
前記第1の基材の前記内部主表面上に直接又は間接的に設けられた第1導電膜と、
前記第1導電膜上に直接又は間接的に設けられた誘電体膜又は絶縁体膜と、
第2導電膜及び反射低減コーティングを支持するポリマー材料を含むシャッタであって、前記第2導電膜が、その第1及び第2の主表面に対応する第1及び第2の側面を有し、前記反射低減コーティングが、前記第2導電膜の前記第1の側面上に形成されており、前記ポリマー材料は、シャッタ閉位置として機能するように伸長可能であり、且つシャッタ開位置として機能するように後退可能である、シャッタと、を含むシェードと、を備え、
前記第1導電膜及び第2導電膜は、前記シャッタ開位置と前記シャッタ閉位置との間で前記ポリマー材料を相応に駆動するために電位差を選択的に設定するように制御可能な電源に電気的に接続可能であり、
前記第2導電膜は、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第2の側面から生じてその上に入射する400~700nmの波長範囲内の光の少なくとも85%を反射するように形成され、
前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第1の側面から生じてその上に入射する400~700nmの波長範囲内の光の平均50%以下が反射されるように形成されている、絶縁ガラス(IG)ユニット。 - 前記第2導電膜は、Alを含む層である、請求項1に記載のIGユニット。
- 前記反射低減コーティングが、Ni、Cr、及び/又はTiを含む層を含む、請求項1又は2に記載のIGユニット。
- 前記反射低減コーティングが、NiCrOxを含む層を含む、請求項1~3のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、厚さ30~60nmである、請求項1~4のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されるとき、前記第2導電膜の前記第1の側面から生じてその上に入射する光が、400~700nmの波長範囲にわたって20パーセント以下の点で変化する割合で反射されるように形成されている、請求項1~5のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、Ni、Cr、及び/又はTiを含む層の間に挟まれたAlを含む層を含む、請求項1~6のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、Ni、Cr、及び/又はTiの酸化物を含む層の間に挟まれたAlを含む層を含む、請求項1~7のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第1の側面から生じてその上に入射する400~700nmの波長範囲内の光の平均15%以下が反射されるように形成されている、請求項1~8のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、炭素を含む層を含む、請求項1~9のいずれか一項に記載のIGユニット。
- 前記炭素を含む層が、アーク堆積堆積炭素を含む層である、請求項10に記載のIGユニット。
- 前記炭素を含む層が、非晶質炭素を含む層である、請求項10又は11に記載のIGユニット。
- 前記炭素を含む層が、四面体非晶質炭素(Ta-C)を含む層である、請求項10~12のいずれか一項に記載のIGユニット。
- 前記炭素を含む層が、厚さ35~55nmである、請求項10~13のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第1の側面から生じてその上に入射する400~700nmの波長範囲内の光の平均20%以下が反射されるように形成されている、請求項10~14のいずれか一項に記載のIGユニット。
- 第3導電膜が、前記第2導電膜及び第3導電膜が前記反射低減コーティングを挟むように、前記第2導電膜の反対側の前記反射低減コーティングの上に配置されている、請求項1~15のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、Ni、Cr、及び/又はTiを含む、請求項1~16のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、Ni及び/又はCrの酸化物を含む、請求項1~17のいずれか一項に記載のIGユニット。
- 前記反射低減コーティングが、TiN又はTiONを含む、請求項1~18のいずれか一項に記載のIGユニット。
- 前記第2導電膜及び第3導電膜がそれぞれAlを含む、請求項16に記載のIGユニット。
- 絶縁ガラス(IG)ユニットの製造方法であって、
それぞれが内部主表面及び外部主表面を有する、第1及び第2の基材を提供する工程と、
前記第1の基材の前記内部主表面上に直接又は間接的に第1導電膜を形成する工程と、
第1導電膜上に直接又は間接的に誘電体膜又は絶縁体膜を提供する工程と、
前記誘電体又は絶縁体膜に隣接して、第2導電膜及び反射低減コーティングを支持するポリマー材料を含むシャッタを配置する工程であって、前記第2導電膜が、その第1及び第2の主表面に対応する第1及び第2の側面を有し、前記反射低減コーティングが、前記第2導電膜の前記第1の面上に形成され、使用中の前記ポリマー材料が、シャッタ閉位置として機能するように伸長可能であり、且つシャッタ開位置として機能するように後退可能である、工程と、
前記第1導電膜及び第2導電膜を電源に電気的に接続する工程であって、前記第1導電膜、誘電体膜又は絶縁体膜、及びシャッタが、前記電源と関連して制御可能な動的シェードを少なくとも部分的に形成して、電位差を選択的に設定し、それに応じて、前記シャッタ開位置と前記シャッタ閉鎖位置との間で前記ポリマー材料を駆動する、工程と、
前記第1及び第2の基材を、前記IGユニットを作製する際に、前記第1及び第2の基材の前記内面が互いに対向するように、前記第1及び第2の基材を互いに実質的に平行に離間させた関係でスペーサシステムに関連して互いに接続する工程であって、前記第1及び第2の基材の間に間隙が画定され、前記間隙内の前記第1の基材と前記第2の基材との間に前記動的シェードが介在する、工程と、を含み、
前記第2導電膜は、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第2の側面から生じてその上に入射する可視光の少なくとも85%を反射するように形成され、
前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第1の側面から生じてその上に入射する可視光の平均30%以下が反射されるように形成される、絶縁ガラス(IG)ユニットの製造方法。 - 前記反射低減コーティングが、Ni、Cr、及び/又はTiを含む層を含む、請求項21に記載の方法。
- 前記反射低減コーティングが、Ni、Cr、及び/又はTiの酸化物を含む層の間に挟まれたAlを含む層を含む、請求項21又は22に記載の方法。
- 前記反射低減コーティングが、炭素を含む層を含む、請求項21に記載の方法。
- 第3導電膜が、前記第2導電膜及び第3の導電膜が前記反射低減コーティングを挟むように、前記第2導電膜の反対側の前記反射低減コーティングの上に配置される、請求項21~24のいずれか一項に記載の方法。
- 前記反射低減コーティングが、Ni及び/又はCrの酸化物、TiN及びTiONのうちの少なくとも1つを含む層を含む、請求項25に記載の方法。
- 前記第2導電膜及び第3導電膜がそれぞれAlを含む、請求項25又は26に記載の方法。
- 絶縁ガラス(IG)ユニットの製造方法であって、
それぞれが内部主表面及び外部主表面を有する、第1及び第2の基材を有する工程であって、前記第1の基材の前記内部主表面が、前記第2の基材の前記内部主表面に面しており、
前記第1の基材の前記内部主表面上に直接又は間接的に第1導電膜が形成され、前記第1導電膜上に直接又は間接的に誘電体膜又は絶縁体膜が設けられ、
前記誘電体又は絶縁体膜に隣接してシャッタが配置され、前記シャッタが、第2導電膜及び反射低減コーティングを支持するポリマー材料を含み、前記第2導電膜が、その第1及び第2の主表面に対応する第1及び第2の側面を有し、前記反射低減コーティングが、前記第2導電膜の前記第1の面上に形成され、使用中の前記ポリマー材料が、シャッタ閉位置として機能するように伸長可能であり、且つシャッタ開位置として機能するように後退可能であり、
前記第1及び第2導電膜が電源に電気的に接続可能であり、前記第1導電膜、誘電体膜又は絶縁体膜、及びシャッタが、前記電源と関連して制御可能な動的シェードを少なくとも部分的に形成して、電位差を選択的に設定し、それに応じて、前記シャッタ開位置と前記シャッタ閉位置との間で前記ポリマー材料を駆動する、工程と、
前記第1及び第2の基材を、前記IGユニットを作製する際に、前記第1及び第2の基材の前記内面が互いに対向するように、前記第1及び第2の基材を互いに実質的に平行に離間させた関係でスペーサシステムに関連して互いに接続する工程であって、前記第1及び第2の基材の間に間隙が画定され、前記間隙内の前記第1の基材と前記第2の基材との間に前記動的シェードが介在する、工程と、を含み、
前記第2導電膜は、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第2の側面から生じてその上に入射する可視光の少なくとも85%を反射するように形成され、
前記反射低減コーティングは、前記ポリマー材料が前記シャッタ閉位置のために伸長されたときに、前記第2導電膜の前記第1の側面から生じてその上に入射する可視光の平均30%以下が反射されるように形成される、絶縁ガラス(IG)ユニットの製造方法。 - 第3導電膜が、前記第2導電膜及び第3の導電膜が前記反射低減コーティングを挟むように、前記第2導電膜の反対側の前記反射低減コーティングの上に配置される、請求項28に記載の方法。
- 前記反射低減コーティングが、Ni及び/又はCrの酸化物、TiN及びTiONのうちの少なくとも1つを含む層を含む、請求項28又は29に記載の方法。
- 前記第2導電膜及び第3導電膜がそれぞれAlを含む、請求項29に記載の方法。
- 絶縁ガラス(IG)ユニット内で動的シェードを操作する方法であって、
請求項28~31のいずれか一項に記載の方法に従って作製されたIGユニットを有する工程と、
前記シャッタ開位置と前記シャッタ閉位置との間で前記ポリマー材料を移動させるために、前記電源を選択的に作動させる工程と、を含む、方法。
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