JP7045014B2 - 積層構造体の製造方法 - Google Patents

積層構造体の製造方法 Download PDF

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JP7045014B2
JP7045014B2 JP2019156145A JP2019156145A JP7045014B2 JP 7045014 B2 JP7045014 B2 JP 7045014B2 JP 2019156145 A JP2019156145 A JP 2019156145A JP 2019156145 A JP2019156145 A JP 2019156145A JP 7045014 B2 JP7045014 B2 JP 7045014B2
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film
oxide film
crystalline oxide
laminated structure
raw material
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JP2021031358A5 (enExample
JP2021031358A (ja
Inventor
武紀 渡部
洋 橋上
崇寛 坂爪
和行 宇野
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Shin Etsu Chemical Co Ltd
Wakayama University
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Shin Etsu Chemical Co Ltd
Wakayama University
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Priority to JP2023100733A priority patent/JP7610229B2/ja
Priority to JP2024150923A priority patent/JP2025001669A/ja
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  • Chemical Vapour Deposition (AREA)
  • Thin Film Transistor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2019156145A 2019-08-28 2019-08-28 積層構造体の製造方法 Active JP7045014B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019156145A JP7045014B2 (ja) 2019-08-28 2019-08-28 積層構造体の製造方法
JP2022033298A JP7306640B2 (ja) 2019-08-28 2022-03-04 結晶性酸化物膜
JP2023100733A JP7610229B2 (ja) 2019-08-28 2023-06-20 積層構造体、半導体装置及び積層構造体の製造方法
JP2024150923A JP2025001669A (ja) 2019-08-28 2024-09-02 積層構造体及び半導体装置

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JP2019156145A JP7045014B2 (ja) 2019-08-28 2019-08-28 積層構造体の製造方法

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JP2021031358A5 JP2021031358A5 (enExample) 2021-07-26
JP7045014B2 true JP7045014B2 (ja) 2022-03-31

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Publication number Priority date Publication date Assignee Title
CN117242554A (zh) 2021-05-04 2023-12-15 信越化学工业株式会社 原料溶液的制造方法、成膜方法及制品批次

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015199649A (ja) 2014-03-31 2015-11-12 株式会社Flosfia 結晶性積層構造体、半導体装置
JP2018203613A (ja) 2014-03-31 2018-12-27 株式会社Flosfia 結晶性酸化物薄膜、半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015199649A (ja) 2014-03-31 2015-11-12 株式会社Flosfia 結晶性積層構造体、半導体装置
JP2018203613A (ja) 2014-03-31 2018-12-27 株式会社Flosfia 結晶性酸化物薄膜、半導体装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
AKAIWA Kazuaki et al.，Japanese Journal of applied Physics，Electrical Conductive Corundum-Structured α-Ga2O3 Thin Film on Sapphire with Tin-Doping Grown by Spray-Assisted Mist Chemical Vapor Deposition，2012年06月14日，51 (2012) 070203，1-3

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