JP7038621B2 - 位置測定装置および位置測定方法 - Google Patents

位置測定装置および位置測定方法 Download PDF

Info

Publication number
JP7038621B2
JP7038621B2 JP2018136764A JP2018136764A JP7038621B2 JP 7038621 B2 JP7038621 B2 JP 7038621B2 JP 2018136764 A JP2018136764 A JP 2018136764A JP 2018136764 A JP2018136764 A JP 2018136764A JP 7038621 B2 JP7038621 B2 JP 7038621B2
Authority
JP
Japan
Prior art keywords
light
straight line
emitted
incident
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018136764A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020012785A5 (https=
JP2020012785A (ja
Inventor
吉平 杉田
健治 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2018136764A priority Critical patent/JP7038621B2/ja
Priority to US16/516,481 priority patent/US11513194B2/en
Publication of JP2020012785A publication Critical patent/JP2020012785A/ja
Publication of JP2020012785A5 publication Critical patent/JP2020012785A5/ja
Application granted granted Critical
Publication of JP7038621B2 publication Critical patent/JP7038621B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2018136764A 2018-07-20 2018-07-20 位置測定装置および位置測定方法 Active JP7038621B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018136764A JP7038621B2 (ja) 2018-07-20 2018-07-20 位置測定装置および位置測定方法
US16/516,481 US11513194B2 (en) 2018-07-20 2019-07-19 Ranging apparatus and method using the ranging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018136764A JP7038621B2 (ja) 2018-07-20 2018-07-20 位置測定装置および位置測定方法

Publications (3)

Publication Number Publication Date
JP2020012785A JP2020012785A (ja) 2020-01-23
JP2020012785A5 JP2020012785A5 (https=) 2021-03-25
JP7038621B2 true JP7038621B2 (ja) 2022-03-18

Family

ID=69162386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018136764A Active JP7038621B2 (ja) 2018-07-20 2018-07-20 位置測定装置および位置測定方法

Country Status (2)

Country Link
US (1) US11513194B2 (https=)
JP (1) JP7038621B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7038621B2 (ja) * 2018-07-20 2022-03-18 東京エレクトロン株式会社 位置測定装置および位置測定方法
EP3948340B1 (en) 2019-03-29 2025-06-18 Aurora Operations, Inc. Switchable coherent pixel array for frequency modulated continuous wave light detection and ranging
JP7675525B2 (ja) * 2021-01-29 2025-05-13 東京エレクトロン株式会社 測定用治具
WO2022174229A1 (en) * 2021-02-09 2022-08-18 Joby Aero, Inc. Aircraft propulsion unit
US12199666B1 (en) * 2024-02-02 2025-01-14 Wireless Photonics Llc Optical antenna apparatus for free-space optical communication

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070298522A1 (en) 2006-06-26 2007-12-27 Tevet Pct Ltd. Method and apparatus for process control with in-die metrology
JP2015052537A (ja) 2013-09-06 2015-03-19 キヤノン株式会社 計測装置
JP2018054500A (ja) 2016-09-29 2018-04-05 東京エレクトロン株式会社 位置検出システム及び処理装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611919A (en) * 1984-03-09 1986-09-16 Tegal Corporation Process monitor and method thereof
US4969200A (en) * 1988-03-25 1990-11-06 Texas Instruments Incorporated Target autoalignment for pattern inspector or writer
US5364187A (en) * 1993-03-08 1994-11-15 Micron Semiconductor, Inc. System for repeatable temperature measurement using surface reflectivity
US6782337B2 (en) * 2000-09-20 2004-08-24 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension an a presence of defects on a specimen
JP2002195819A (ja) * 2000-12-27 2002-07-10 Nikon Corp 形状測定方法、形状測定装置、露光方法、露光装置、及びデバイス製造方法
JP4842175B2 (ja) * 2007-03-07 2011-12-21 東京エレクトロン株式会社 温度測定装置及び温度測定方法
JP6180909B2 (ja) * 2013-12-06 2017-08-16 東京エレクトロン株式会社 距離を求める方法、静電チャックを除電する方法、及び、処理装置
JP6656200B2 (ja) * 2017-04-12 2020-03-04 東京エレクトロン株式会社 位置検出システム及び処理装置
JP6948873B2 (ja) * 2017-07-31 2021-10-13 東京エレクトロン株式会社 測定器を較正する方法、及び、ケース
JP7038621B2 (ja) * 2018-07-20 2022-03-18 東京エレクトロン株式会社 位置測定装置および位置測定方法
JP7270509B2 (ja) * 2019-09-06 2023-05-10 東京エレクトロン株式会社 処理装置を検査するシステム及び方法
TWI895404B (zh) * 2020-05-14 2025-09-01 日商東京威力科創股份有限公司 校正方法及校正系統

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070298522A1 (en) 2006-06-26 2007-12-27 Tevet Pct Ltd. Method and apparatus for process control with in-die metrology
JP2015052537A (ja) 2013-09-06 2015-03-19 キヤノン株式会社 計測装置
JP2018054500A (ja) 2016-09-29 2018-04-05 東京エレクトロン株式会社 位置検出システム及び処理装置

Also Published As

Publication number Publication date
US20200025884A1 (en) 2020-01-23
US11513194B2 (en) 2022-11-29
JP2020012785A (ja) 2020-01-23

Similar Documents

Publication Publication Date Title
JP7038621B2 (ja) 位置測定装置および位置測定方法
TWI820327B (zh) 用於原位光學腔室表面及處理感應器的光學感應器系統、方法及光學感應陣列
TWI836157B (zh) 光學感測器系統、光學感測器及電漿處理腔室
US8986494B2 (en) Plasma processing apparatus and temperature measuring method and apparatus used therein
US9459159B2 (en) Heat-flux measuring method, substrate processing system, and heat-flux measuring member
US11841278B2 (en) Temperature measurement sensor, temperature measurement system, and temperature measurement method
JP2002122480A (ja) 温度測定方法および装置、並びにプラズマ処理装置
US10748749B1 (en) Plasma monitoring apparatus, and plasma processing apparatus including the same
KR20180082185A (ko) 종료점 검출 방법 및 그 장치
US20240331989A1 (en) Mini spectrometer sensor for in-line, on-tool, distributed deposition or spectrum monitoring
TW202436845A (zh) 用於半導體製程之光譜監測之改良光接達
JP2024137691A (ja) 温度を測定するシステム及び方法
JP2013053921A (ja) エリプソメータ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210204

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210204

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20211228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220111

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220121

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220208

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220308

R150 Certificate of patent or registration of utility model

Ref document number: 7038621

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250