JP7024400B2 - Strain sensor manufacturing equipment, strain sensor manufacturing method and strain sensor inspection method - Google Patents

Description

The present invention relates to an apparatus for manufacturing a strain sensor having a heat flux sensor and an elastically deforming member, a method for manufacturing a strain sensor, and a method for inspecting a strain sensor.

Conventionally, a strain sensor that outputs a sensor signal according to the strain (that is, displacement) of an object has been proposed (see, for example, Patent Document 1). Specifically, this strain sensor is configured by stacking an elastically deformable member that can be elastically deformed and a heat flux sensor that outputs a sensor signal corresponding to the heat flux.

Such a strain sensor is arranged so that the elastically deforming member elastically deforms following the strain of the object. Then, in the strain sensor, when the elastically deformed member is elastically deformed, the elastically deformed member generates heat or absorbs heat, so that the heat flux corresponding to the elastic deformation of the elastically deformed member passes through the heat flux sensor. Therefore, the strain sensor outputs a sensor signal according to the strain of the object.

Japanese Unexamined Patent Publication No. 2017-191302

By the way, in the distortion sensor as described above, the output characteristics are measured as follows, for example. That is, first, a pressing member made of metal or the like is prepared. Then, by pressing the elastically deforming member with the pressing member, an external force is applied to the elastically deforming member to compress the elastically deforming member. As a result, a sensor signal corresponding to the compression of the elastically deforming member is output from the heat flux sensor, and the characteristics at the time of compression are measured based on the sensor signal. Next, by separating the pressing member from the elastically deforming member, the external force applied to the elastically deforming member is released, and the elastically deforming member is restored. As a result, a sensor signal corresponding to the restoration of the elastically deformed member is output from the heat flux sensor, and the characteristics at the time of restoration are measured based on the sensor signal.

Further, in the strain sensor as described above, the durability characteristic is measured by repeatedly performing a step of applying an external force to the elastically deforming member and a step of releasing the applied external force. For example, the durability characteristic is measured by repeatedly performing a step of applying an external force and a step of releasing the applied external force until the sensor signal becomes a value different from the value when the external force is applied for the first time. .. As a result, the durability characteristics of the strain sensor are measured.

However, in the above method for measuring the output characteristics, it is difficult to periodically change the shape of the elastically deforming member, and it is difficult to derive the relationship between the frequency and the sensor signal. Further, in the above-mentioned method for measuring durability characteristics, for example, when the measurement is performed on a plurality of strain sensors, the inspection time becomes significantly longer if the measurement is performed for each strain sensor.

In view of the above points, it is an object of the present invention to provide a strain sensor manufacturing apparatus and a strain sensor manufacturing method capable of obtaining a relationship between a frequency and a sensor signal. Further, in view of the above points, another object of the present invention is to provide a method for inspecting a strain sensor capable of shortening the inspection time in measuring durability characteristics.

In claim 1 for achieving the above object, the elastically deforming member (20) and the heat flux sensor (10) that outputs a sensor signal according to the heat flux due to the deformation of the elastically deforming member are laminated and configured. A sensor holder (strain sensor manufacturing device) for manufacturing a strain sensor (1), which has a cylindrical shape having a hollow portion having a central axis as the first axis (C) and has a strain sensor arranged on an outer wall surface. 250), a fixing member (350) arranged on the outer wall surface side of the sensor holder to press and hold the strain sensor, and a second axis (R) arranged in the hollow portion and along the first axis to rotate. It is provided with a rotating member (310) which is made rotatable. The rotating member is configured such that when the second axis is eccentric with respect to the first axis and rotates, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface. By rotating the member and applying external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface, the elastic deformation member by periodically changing the external force applied to the elastic deformation member of the strain sensor. Is periodically deformed, and a sensor signal corresponding to the deformation of the elastically deforming member is output from the heat flux sensor to measure the characteristics of the strain sensor.

According to this, since the elastically deforming member is periodically deformed, the sensor signal also changes periodically. Therefore, the relationship between the frequency and the sensor signal can be easily obtained.

Further, in claim 7, the strain sensor (1) is configured by stacking the elastically deforming member (20) and the heat flux sensor (10) that outputs a sensor signal according to the heat flux caused by the deformation of the elastically deforming member. ), The heat flux sensor and the elastically deformable member are prepared, the heat flux sensor and the elastically deformable member are laminated to form a strain sensor, and the characteristics of the strain sensor are measured. ,I do. Then, in measuring the characteristics of the strain sensor, a sensor holder (250) having a hollow portion having a central axis as the first axis (C) and a strain sensor arranged on the outer wall surface, and a sensor holder. A fixing member (350) that is arranged on the outer wall surface side of the surface and presses and holds the strain sensor, and a second axis (R) that is arranged in the hollow portion and is rotatable about the second axis (R) along the first axis. When the second axis is eccentric with respect to the first axis and rotates, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface. To prepare a strain sensor manufacturing device to be provided, to arrange the strain sensor in the sensor holder, and to rotate the rotating member to apply an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface. By periodically changing the external force applied to the elastically deformed member of the strain sensor, the elastically deformed member is periodically deformed, and the heat flux sensor outputs a sensor signal according to the deformation of the elastically deformed member to distort the strain. Measuring and performing the output characteristics of the sensor.

According to this, since the elastically deforming member is periodically deformed, the sensor signal also changes periodically. Therefore, it is possible to manufacture a strain sensor in which the relationship between the frequency and the sensor signal is obtained.

Further, in claim 13, the strain sensor (1) is configured by stacking the elastically deforming member (20) and the heat flux sensor (10) that outputs a sensor signal according to the heat flux caused by the deformation of the elastically deforming member. ), The heat flux sensor and the elastically deformable member are prepared, the heat flux sensor and the elastically deformable member are laminated to form a strain sensor, and the characteristics of the strain sensor are inspected. ,I do. Then, by inspecting the characteristics of the strain sensor, a sensor holder (250) having a hollow portion having a central axis as the first axis (C) and a strain sensor arranged on the outer wall surface, and a sensor holder. A fixing member (350) that is arranged on the outer wall surface side of the surface and presses and holds the strain sensor, and a second axis (R) that is arranged in the hollow portion and is rotatable about the second axis (R) along the first axis. When the second axis is eccentric with respect to the first axis and rotates, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface. Prepare an inspection device for the strain sensor to be provided, arrange a plurality of strain sensors in the sensor holder, and apply an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface by rotating the rotating member. By periodically changing the external force applied to the elastically deformed member of the strain sensor, the elastically deformed member is periodically deformed, and the heat flux sensor outputs a sensor signal according to the deformation of the elastically deformed member. By continuing, the time until a sensor signal different from the first sensor signal is output is measured to inspect the durability characteristics of the strain sensor.

According to this, a plurality of strain sensors are arranged in the sensor holder, and an external force can be applied to each strain sensor in order by rotating the rotating member. Therefore, the durability characteristics of a plurality of strain sensors can be measured at the same time. Therefore, it is possible to shorten the inspection time of the durability characteristics for a plurality of strain sensors.

The reference numerals in parentheses in the above and claims indicate the correspondence between the terms described in the claims and the concrete objects exemplifying the terms described in the embodiments described later. ..

It is sectional drawing of the strain sensor in 1st Embodiment. It is a top view which shows the structure of the heat flux sensor shown in FIG. It is sectional drawing along the line III-III in FIG. It relates to a manufacturing apparatus for manufacturing a strain sensor. It is a top view of the manufacturing apparatus shown in FIG. It is a top view which shows the sensor holding part. It is sectional drawing along the line VII-VII in FIG. It is a figure which shows the external force which affects the sensor holder when the external force application part is in the 1st position. It is a figure which shows the external force which affects the sensor holder when the external force application part is in the 2nd position. It is a figure which shows the external force which affects the sensor holder when the external force application part is in a 3rd position. It is a figure which shows the external force which affects the sensor holder when the external force application part is in the 4th position. It is a figure which shows the sensor signal output from each strain sensor. It is a figure which shows the relationship between the frequency and the amplitude of a sensor signal. It is a figure which shows the relationship between a frequency and a phase shift of a sensor signal. It is a figure which shows the relationship between the number of repetitions and the amplitude ratio of a sensor signal. It is a figure which shows the relationship between a reference waveform and a sensor signal. It is sectional drawing which shows the rotary shaft including the part located in the sensor holder in another embodiment. It is sectional drawing which shows the rotary shaft including the part located in the sensor holder in another embodiment. It is sectional drawing which shows the rotary shaft including the part located in the sensor holder in another embodiment. It is sectional drawing which shows the rotary shaft including the part located in the sensor holder in another embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each of the following embodiments, the parts that are the same or equal to each other will be described with the same reference numerals.

(First Embodiment)
The first embodiment will be described. First, the configuration of the strain sensor 1 of the present embodiment will be described.

As shown in FIG. 1, the strain sensor 1 has a heat flux sensor 10, an elastic deformation member 20, and a bonding layer 30. As shown in FIGS. 2 and 3, in the heat flux sensor 10, the insulating base material 100, the front surface protection member 110, and the back surface protection member 120 are integrated, and the first and second layers are inside the integrated body. The structure is such that the connecting members 130 and 140 are alternately connected in series. The insulating base material 100, the front surface protection member 110, and the back surface protection member 120 are in the form of a film and are made of a flexible resin material such as a thermoplastic resin. In FIG. 2, the surface protection member 110 is omitted.

The insulating base material 100 is formed with a plurality of first and second via holes 101 and 102 penetrating in the thickness direction thereof. The first and second interlayer connection members 130 and 140 made of different thermoelectric materials such as metals and semiconductors are embedded in the first and second via holes 101 and 102.

A surface conductor pattern 111 is formed on the surface 100a of the insulating base material 100. A back surface conductor pattern 121 is formed on the back surface 100b of the insulating base material 100. The first and second interlayer connection members 130 and 140 are connected in series by the front surface conductor pattern 111 and the back surface conductor pattern 121. That is, in the heat flux sensor 10, one of the first and second interlayer connection members 130 and 140 is configured by the surface conductor pattern 111 arranged on the surface 100a of the insulating base material 100. Further, in the heat flux sensor 10, the other connecting portions of the first and second interlayer connecting members 130 and 140 are configured by the back surface conductor pattern 121 arranged on the back surface 100b of the insulating base material 100.

Then, in the heat flux sensor 10, when the heat flux passes in the thickness direction, a temperature difference occurs between one connection portion of the first and second interlayer connection members 130 and 140 and the other connection portion. As a result, in the heat flux sensor 10, thermoelectromotive force is generated in the first and second interlayer connection members 130 and 140 due to the Zeebeck effect. Therefore, the heat flux sensor 10 outputs this thermoelectromotive force (for example, voltage) as a sensor signal. The heat flux is the amount of heat that crosses a unit area in a unit time, and W / m ² is used as the unit.

In the following, in the heat flux sensor 10, the surface of the front surface protection member 110 opposite to the insulating base material 100 side is referred to as one surface 110a, and the surface of the back surface protection member 120 opposite to the insulating base material 100 side is referred to as the other surface 120a. do.

Further, the heat flux sensor 10 of the present embodiment is configured to output a positive sensor signal when the heat flux passes from the other surface 120a toward the one surface 110a side. That is, the heat flux sensor 10 of the present embodiment is configured to output a negative sensor signal when the heat flux passes from one surface 110a toward the other surface 120a. The above is the configuration of the heat flux sensor 10 in this embodiment.

The elastically deformable member 20 is made of, for example, rubber, a resin, an elastically deformable metal material, or the like, and is made of a material that generates heat when compressed and absorbs heat when stretched. As the elastically deformable metal, for example, solder, aluminum (Al), or the like is adopted.

The heat flux sensor 10 and the elastically deforming member 20 are joined via the joining layer 30. Specifically, the heat flux sensor 10 and the elastically deforming member 20 are joined via the joining layer 30 in a state where the other surface 120a of the heat flux sensor 10 is directed toward the elastically deforming member 20. For the bonding layer 30, for example, an adhesive, double-sided tape, or the like is used.

The above is the configuration of the strain sensor 1 in this embodiment. Next, the operation of the strain sensor 1 will be described. The elastically deformable member 20 generates heat when compressed and absorbs heat when restored. Therefore, when the elastically deforming member 20 is deformed, the heat flux corresponding to the deformation of the elastically deforming member 20 passes through the heat flux sensor 10 in the thickness direction. In the following, the restoration of the elastically deforming member 20 is also referred to as the extension of the elastically deforming member 20.

In the present embodiment, the heat flux sensor 10 is arranged so that the other surface 110b faces the elastically deforming member 20 side. Therefore, when the elastically deforming member 20 is compressed, the elastically deforming member 20 generates heat, so that heat flux is generated in the heat flux sensor 10 from the other surface 110b to the one surface 110a. Therefore, when the elastic deformation member 20 is compressed, the heat flux sensor 10 outputs a sensor signal having a positive value corresponding to the heat flux.

Further, when the elastically deforming member 20 is stretched, the elastically deforming member 20 absorbs heat, so that heat flux is generated from one surface 110a to the other surface 110b in the heat flux sensor 10. Therefore, when the elastic deformation member 20 is stretched, the heat flux sensor 10 outputs a negative sensor signal corresponding to the heat flux.

The elastically deforming member 20 generates heat when compressed, and the temperature rises. However, the size of the heat flux caused by the compression of the elastically deforming member 20 is a temperature change per unit time of the elastically deforming member 20. Is proportional to. That is, the size of the heat flux caused by the compression of the elastically deforming member 20 depends on the compression amount and the deformation speed of the elastically deforming member 20. Then, the heat flux sensor 10 outputs a sensor signal according to the passing heat flux. That is, when the elastic deformation member 20 is compressed, the heat flux sensor 10 outputs a sensor signal based on the amount of compression of the elastic deformation member 20 per unit time. Similarly, when the elastically deforming member 20 is stretched, the heat flux sensor 10 outputs a sensor signal based on the amount of stretching of the elastically deforming member 20 per unit time.

Further, the size of the heat flux increases as the amount of heat generated or absorbed by the elastically deforming member 20 per unit time increases. That is, the size of the heat flux increases as the amount of deformation of the elastically deforming member 20 per unit time increases. Therefore, the magnitude of the force affecting the elastically deforming member 20 is also detected based on the magnitude (that is, the absolute value) of the sensor signal.

However, since the heat flux sensor 10 outputs a sensor signal corresponding to the passing heat flux, the value as the sensor signal becomes 0 if the heat flux does not pass. For example, when the elastically deforming member 20 is compressed, if the compression of the elastically deforming member 20 is continuously maintained, the temperature difference between the elastically deforming member 20 and the portion opposite to the heat flux sensor 10 becomes smaller. The heat flux passing through the heat flux sensor 10 becomes smaller. Finally, the heat flux passing through the heat flux sensor 10 disappears, and the sensor signal becomes 0.

The above is the operation of the strain sensor 1 in this embodiment. Next, a configuration of a strain sensor manufacturing apparatus (hereinafter, also simply referred to as a manufacturing apparatus) 200 for manufacturing the strain sensor 1 will be described.

The manufacturing apparatus 200 of the present embodiment includes a support base 210 as shown in FIGS. 4 and 5. The support base 210 has a first support portion 211, a second support portion 212, a support column 213, and the like. In the present embodiment, the first support portion 211 and the second support portion 212 are made of a metal such as stainless steel. The first support portion 211 and the second support portion 212 have a substantially rectangular flat plate shape and have substantially the same size, and through holes are formed in the vicinity of the corner portions, respectively. Then, the first support portion 211 and the second support portion 212 are integrated in a state of being separated by a predetermined distance by inserting the support column 213 into each through hole and fixing the support column 213 by the nut 214. .. Further, the second support portion 212 is formed with a through hole 215 in a portion on the inner edge side. In the following, the surface of the second support portion 212 on the side opposite to the surface of the first support portion 211 will be referred to as one surface 212a, and the surface of the second support portion 212 on the side of the first support portion 211 will be referred to as the other surface 212b. ..

The second support portion 212 has a cylindrical shape having a hollow portion made of a metal such as stainless steel, and a bearing holder 220 having a flange portion 221 formed on one end side is fixed to the second support portion 212. Specifically, in the bearing holder 220, the flange portion 221 is fixed to one surface 212a of the second support portion 212 by the screw portion 222 so that the other end side protrudes from the other surface 212b side of the second support portion 212. Has been done.

In FIG. 4, the upper portion of the bearing holder 220 on the paper surface is one end, and the lower portion of the bearing holder 220 on the paper surface is the other end. Further, one end of each member described later is a portion on the upper side of the paper surface of each member in FIG. 4, and the other end of each member described later is a lower side of the paper surface of each member in FIG. It's a part.

A first bearing 231 and a second bearing 232 that rotatably support a rotary shaft 310, which will be described later, are fixed to the bearing holder 220. Further, in the bearing holder 220, a collar 233 is arranged between the first bearing 231 and the second bearing 232. In the first bearing 231 and the second bearing 232, the first bearing 231 is arranged on the other end side of the bearing holder 220, and the second bearing 232 is arranged on one end side of the bearing holder 220.

In the present embodiment, the first bearing 231 and the second bearing 232 are configured by using ball bearings including inner rings 231a, 232a, outer rings 231b, 232b, rolling elements 231c, 232c and the like, respectively. It is preferable that at least one of the first bearing 231 and the second bearing 232 is composed of an angular bearing in order to prevent the rotary shaft 310, which will be described later, from coming off in the axial direction. In this embodiment, as will be described later, the sensor holder 250 is arranged on the bearing holder 220, and the strain sensor 1 is arranged on the sensor holder 250. Then, when measuring the characteristics of the strain sensor 1, an external force is applied to the strain sensor 1 or the applied external force is released by rotating the rotating shaft 310. Therefore, it is preferable that the angular bearing is arranged on the side close to the strain sensor 1, and in the present embodiment, the second bearing 232 is composed of an angular bearing mounted back-to-back. Further, the first bearing 231 is composed of a deep groove bearing.

The collar 233 is an annular member made of a metal such as stainless steel, and its inner diameter is substantially equal to the diameter of the rotary shaft 310 described later. The collar 233 is arranged on the bearing holder 220 so as to be in contact with the inner ring 231a of the first bearing 231 and the inner ring 232a of the second bearing 232, respectively.

An intermediate collar 240 is arranged on one end of the bearing holder 220. A sensor holder 250 is arranged on the intermediate collar 240. The sensor holder 250 is made of a metal such as stainless steel, has a hollow portion, and is a cylindrical member having a central axis as the first axis C. The other end of the sensor holder 250 is arranged so as to face the sensor holder 250 side.

A first bearing 261 and a second bearing 262 that rotatably support the rotary shaft 310, which will be described later, are fixed to the sensor holder 250. Further, in the sensor holder 250, a collar 263 is arranged between the first bearing 261 and the second bearing 262. In this embodiment, the first bearing 261 and the second bearing 262 correspond to mechanical bearings.

The first bearing 261 and the second bearing 262 are configured by using ball bearings including inner rings 261a and 262a, outer rings 261b and 262b, and rolling elements 261c and 262c, respectively, and are referred to as deep groove bearings in the present embodiment. .. In the first bearing 261 and the second bearing 262, the first bearing 261 is arranged on the other end side of the sensor holder 250, and the second bearing 262 is arranged on one end side of the sensor holder 250.

The intermediate collar 240 has the same configuration as the collar 233 so as to abut with the inner ring 232a of the second bearing 232 provided in the bearing holder 220 and the inner ring 261a of the first bearing 261 provided in the sensor holder 250, respectively. Have been placed. Further, the collar 263 has the same configuration as the collar 233, and the sensor holder 250 is in contact with the inner ring 261a of the first bearing 261 and the inner ring 262a of the second bearing 262 provided in the sensor holder 250, respectively. Have been placed.

Further, the sensor holder 250 is formed with a recess 251 on the outer wall surface. In the present embodiment, the bottom surface of the recess 251 has a substantially rectangular shape corresponding to the planar shape of the mounting plate 271 described later, and four recesses 251 are formed. Specifically, the recesses 251 are formed at equal intervals in the circumferential direction with respect to the first axis C of the sensor holder 250. Each recess 251 is formed with an insertion hole 251a on the bottom surface into which a mounting screw 274, which will be described later, can be inserted.

Then, in each recess 251 of the sensor holder 250, a sensor holding portion 270 in which the strain sensor 1 is held is arranged. As shown in FIGS. 6 and 7, the sensor holding portion 270 has one side 271a and the other side 271b, and has a mounting plate 271 having a substantially rectangular shape in a plane. The mounting plate 271 is formed with a recess 271c on one surface 271a. Further, in the mounting plate 271, an insertion hole 271d is formed on one surface 271a, and a through hole 271e is formed so as to penetrate between the one surface 271a and the other surface 271b and into which the mounting screw 274 described later can be inserted. There is.

A backing plate 272 is fixed to one surface 271a of the mounting plate 271 so as to face the bottom surface of the recess 271c. Specifically, the backing plate 272 has a substantially rectangular shape having a one surface 272a and another surface 272b, and a through hole 272c penetrating between the one surface 272a and the other surface 272b is formed. The backing plate 272 is arranged on one surface 271a of the mounting plate 271 so that the through hole 272c communicates with the insertion hole 271d of the mounting plate 271, and the assembly screw 273 is inserted into the insertion hole 271d via the through hole 272c. It is fixed by being screwed together. The backing plate 272 has a smaller planar shape than the mounting plate 271, and is fixed to the mounting plate 271 so that the portion of the one surface 271a of the mounting plate 271 where the through hole 271e is formed is exposed.

The strain sensor 1 is held between the bottom surface of the recess 271c in the mounting plate 271 and the other surface 272b of the backing plate 272. Specifically, the strain sensor 1 is arranged and held so that the elastic deformation member 20 abuts on the backing plate 272 and the heat flux sensor 10 abuts on the mounting plate 271.

The above is the configuration of the sensor holding unit 270 in this embodiment. Then, the sensor holding portion 270 is fixed to each recess 251 of the sensor holder 250 as shown in FIGS. 4 and 5. Specifically, the sensor holding portion 270 is fixed to the sensor holder 250 by inserting the mounting screw 274 into the insertion hole 251a of the sensor holder 250 through the through hole 271e of the mounting plate 271 and screw-coupling the sensor holder 250. .. More specifically, in the sensor holding portion 270, the mounting plate 271 is directed toward the sensor holder 250 and is fixed to the sensor holder 250. That is, the sensor holding portion 270 is fixed to the sensor holder 250 with the backing plate 272 facing toward the inner wall surface side of the holding block 340 described later.

In the present embodiment, the sensor holding portion 270 is arranged in each recess 251 of the sensor holder 250. Therefore, in the following, as shown in FIG. 5, the strain sensor 1 provided in the sensor holding portion 270 on the right side of the paper surface in FIG. 5 is also referred to as a first sensor 1a, and is provided in the sensor holding portion 270 on the lower side of the paper surface. The strain sensor 1 is also referred to as a second sensor 1b. Further, in the following, the strain sensor 1 provided in the sensor holding portion 270 on the left side of the paper surface is also referred to as a third sensor 1c, and the strain sensor 1 provided in the sensor holding portion 270 on the upper side of the paper surface is also referred to as a fourth sensor 1d.

A motor support portion 280 is fixed to the other end side of the bearing holder 220. The motor support portion 280 has a lower support portion 281, an upper support portion 282, a support column 283, and the like. In the present embodiment, the lower support portion 281 and the upper support portion 282 are made of a metal such as stainless steel. The lower support portion 281 and the upper support portion 282 are flat plates having a substantially rectangular shape in a plane and have substantially the same size, and through holes are formed in the vicinity of the corner portions, respectively. The lower support portion 281 and the upper support portion 282 are integrated in a state of being separated by a predetermined distance by inserting a support column 283 into each through hole and fixing the support column 283 with a nut 284.

Further, through holes 281a and 282a are formed in the lower support portion 281 and the upper support portion 282 at positions corresponding to the hollow portions of the bearing holder 220, respectively. In the motor support portion 280, the upper support portion 282 is fixed to the other end side of the bearing holder 220 by a screw portion 285.

A motor 290 is fixed to the lower support portion 281 by a screw portion 292 so that the drive shaft 291 is located between the lower support portion 281 and the upper support portion 282. The motor 290 is electrically connected to the motor controller 300 via wiring or the like (not shown), and functions as an actuator that generates rotational power by operating according to a control signal which is an electric signal from the motor controller 300.

The motor controller 300 is arranged on the first support unit 211 and is connected to the control unit 370 described later. Then, the motor controller 300 outputs a control signal based on the drive control signal input from the control unit 370, which will be described later, to the motor 290.

A driven shaft 311 of the rotating shaft 310 is connected to the drive shaft 291 of the motor 290 via a coupling 320. Specifically, the coupling 320 has a cylindrical shape having a hollow portion made of a metal such as stainless steel. The motor 290 and the rotary shaft 310 are inserted into the hollow portion of the coupling 320 from opposite directions so that the drive shaft 291 of the motor 290 and the driven shaft 311 of the rotary shaft 310 are located on the same axis. As a result, the rotary shaft 310 follows the rotation of the motor 290 and rotates along the second axis R along the first axis C. In this embodiment, the rotating shaft 310 corresponds to a rotating member.

Further, the rotary shaft 310 is inserted into the bearing holder 220 and the sensor holder 250 so that one end thereof protrudes from the sensor holder 250. The rotary shaft 310 is rotatably supported by bearings 231, 232, 261 and 262 provided on the holders 220 and 250. Further, a nut 330 is provided on one end side of the rotary shaft 310 so as to press the inner ring 262a of the second bearing 262 provided in the sensor holder 250 toward the bearing holder 220. As a result, the sensor holder 250 is pressed and fixed to the bearing holder 220 side. In FIG. 5, the nut 330 is omitted.

Here, in the rotary shaft 310 of the present embodiment, a key groove 312 along the axial direction of the rotary shaft 310 is formed in a portion of the outer wall surface located inside the sensor holder 250. The key groove 312 is provided with an external force applying portion 313 that projects from the outer wall surface around the rotating shaft 310 and abuts on the first bearing 261 and the second bearing 262 provided in the sensor holder 250. That is, the rotary shaft 310 is provided with an external force applying portion 313 that applies an external force to the sensor holder 250 via the first bearing 261 and the second bearing 262.

Therefore, when the rotary shaft 310 rotates, the second axis R rotates as a rotation axis, but the second axis R is eccentric from the first axis C. Therefore, when the rotary shaft 310 rotates, the portion of the inner wall surface of the sensor holder 250 to which an external force is applied from the rotary shaft 310 moves in the circumferential direction with the rotation of the rotary shaft 310. In other words, when the rotary shaft 310 rotates, the sensor holder 250 is sequentially applied with an external force from the rotary shaft 310 along the circumferential direction of the sensor holder 250. Then, when the rotary shaft 310 rotates, the sensor holder 250 releases the external force applied in order along the circumferential direction of the sensor holder 250. In this embodiment, the external force applying portion 313 is made of an elastically deforming member such as rubber or resin.

Further, a cylindrical holding block 340, which is made of a metal member such as stainless steel and has a hollow portion, is attached to the second support portion 212 via a screw portion 341. Specifically, the holding block 340 is attached to one side 212a side of the second support portion 212 so that the sensor holder 250 and the like are housed in the hollow portion.

The holding block 340 is formed with a through hole 342 in which a thread groove is formed at a position corresponding to the sensor holding portion 270. More specifically, the through hole 342 is formed at a position corresponding to the backing plate 272 in the sensor holding portion 270.

A fixing member 350 having a threaded groove is inserted into the through hole 342 from the outer wall surface side of the holding block 340. In the present embodiment, the fixing member 350 has a bolt 351 in which a thread groove is formed and a nut 352. The bolt 351 is inserted from the outer wall surface side of the holding block 340, and the nut 352 is arranged so as to abut on the outer wall surface. Further, the bolt 351 is arranged so that the tip end side abuts on the backing plate 272 and presses the sensor holding portion 270. That is, the bolt 351 is arranged so as to press and hold the strain sensor 1. As a result, the sensor holder 250 is prevented from being displaced in the radial direction.

Further, in the present embodiment, the fixing member 350 is configured to have a bolt 351 and can be displaced by adjusting the tightening condition with respect to the through hole 342. That is, the fixing member 350 can adjust the pressing force on the backing plate 272. In other words, the fixing member 350 is configured to be able to adjust the pressing force on the strain sensor 1.

Further, as shown in FIG. 5, the outer wall surface of the sensor holder 250 corresponds to the amount of eccentricity of the second axis R with respect to the first axis C (hereinafter, also simply referred to as the amount of eccentricity of the rotating shaft 310). An eccentricity detection unit 360 that outputs a detection signal is provided. The eccentricity detection unit 360 is composed of, for example, a digital gauge or the like.

Further, as shown in FIGS. 4 and 5, the manufacturing apparatus 200 is connected to the heat flux sensor 10, the motor controller 300, the eccentricity detection unit 360, and the like in each strain sensor 1 via wiring. It is equipped with 370.

The control unit 370 includes a CPU (abbreviation of Central Processing Unit), RAM (abbreviation of Random Access Memory), ROM (abbreviation of Read Only Memory), flash memory, and the like. Then, the control unit 370 executes the program stored in the ROM and the flash memory by the CPU, and uses the RAM as a work area at the time of execution. The control unit 370 realizes the function described in the program by the operation of such a CPU. The RAM, ROM, and flash memory are non-transitional substantive storage media.

In the present embodiment, the control unit 370 is connected to an operation input unit (not shown). Then, when the operator executes an operation of driving the motor 290 with respect to the operation input unit, the control unit 370 outputs a drive control signal for driving the motor 290 to the motor controller 300 at a rotation speed corresponding to the operator's operation. do. The operation input unit is composed of, for example, a touch panel or the like.

Further, the control unit 370 is connected to a display unit (not shown), and a predetermined result is displayed on the display unit. Specifically, the control unit 370 derives the eccentricity amount of the rotary shaft 310 based on the detection signal input from the eccentricity amount detection unit 360, and displays it on the display unit. The control unit 370 can also derive the magnitude of the external force applied to the strain sensor 1 from the rotary shaft 310 by deriving the amount of eccentricity of the rotary shaft 310. That is, the control unit 370 can also derive the compression amount per unit time of the elastic deformation member 20 of the strain sensor 1 by deriving the eccentric amount of the rotating shaft 310. Further, when the sensor signal is input from each heat flux sensor 10, the control unit 370 displays the characteristics based on the sensor signal. Further, in the present embodiment, the control unit 370 can also compare the reference waveform with the sensor signal to execute the abnormality determination, and when the abnormality determination is executed, the result is displayed on the display unit.

The above is the basic configuration of the manufacturing apparatus 200 in this embodiment. Next, a method of manufacturing the strain sensor 1 using the manufacturing apparatus 200 will be described.

First, the heat flux sensor 10 and the elastic deformation member 20 constituting the strain sensor 1 are prepared. Then, the other surface 120a of the heat flux sensor 10 and the elastically deforming member 20 are joined via the joining layer 30.

Next, the characteristics of the strain sensor 1 are measured using the manufacturing apparatus 200. In this embodiment, four sensor holding units 270 holding the strain sensor 1 are prepared. Next, the four sensor holding portions 270 are arranged in the recesses 251 of the sensor holder 250, respectively.

Then, the rotary shaft 310 is rotated by rotating the motor 290. As a result, since the detection signal is input from the eccentricity detection unit 360, the control unit 370 derives the eccentricity amount of the rotating shaft 310 based on the detection signal. The step of deriving the eccentricity amount may be performed before the sensor holding portion 270 is arranged on the sensor holder 250.

Subsequently, the rotation shaft 310 is rotated to inspect the characteristics of the strain sensor 1. First, the state of each strain sensor 1 when the rotary shaft 310 is rotated will be described with reference to FIGS. 8A to 8D.

In the following, an example of rotating the rotating shaft 310 clockwise with the second axis R as the axis of rotation when viewed from one side 212a of the second support portion 212 will be described. Further, in the following, the case where the external force applying unit 313 faces the first sensor 1a with the sensor holder 250 interposed therebetween is also referred to as the external force applying unit 313 being in the first position. Hereinafter, the case where the external force applying unit 313 faces the second sensor 1b with the sensor holder 250 interposed therebetween is also referred to as the case where the external force applying unit 313 is in the second position. Hereinafter, the case where the external force application unit 313 faces the third sensor 1c with the sensor holder 250 sandwiched therein is also referred to as the case where the external force application unit 313 is in the third position. Hereinafter, the case where the external force application unit 313 faces the fourth sensor 1d with the sensor holder 250 sandwiched therein is also referred to as the case where the external force application unit 313 is in the fourth position. Further, in the following, the compression of the elastically deforming member 20 in the first sensor 1a is also referred to as simply being compressed by the first sensor 1a, and the compression of the elastically deforming member 20 in the second sensor 1b is simply referred to by the second sensor 1b. Also called compression. Further, in the following, the compression of the elastically deforming member 20 in the third sensor 1c is also referred to as simply being compressed by the third sensor 1c, and the compression of the elastically deforming member 20 in the fourth sensor 1d is simply referred to by the fourth sensor 1d. Also called compression. 8A to 8D are plan views showing the sensor holder 250, the rotary shaft 310, and the like, but the nut 330, the eccentricity detection unit 360, and the like are omitted.

As shown in FIG. 8A, when the rotary shaft 310 rotates and the external force application unit 313 is in the first position, the external force application unit 313 and the first sensor 1a of the first bearing 261 and the second bearing 262 Contact the corresponding position. Therefore, an external force F1 from the third sensor 1c side to the first sensor 1a side is applied to the sensor holder 250 via the first bearing 261 and the second bearing 262. At this time, since each fixing member 350 is in contact with each sensor holding portion 270, the first sensor 1a is not displaced. Therefore, the first sensor 1a is compressed and the third sensor 1c is decompressed. Further, the second sensor 1b starts to compress, and the fourth sensor 1d starts to expand.

Next, as shown in FIG. 8B, when the rotary shaft 310 rotates and the external force applying portion 313 is in the second position, the external force applying portion 313 is the second of the first bearing 261 and the second bearing 262. It comes into contact with the position corresponding to the sensor 1b. Therefore, an external force F2 from the fourth sensor 1d side to the second sensor 1b side is applied to the sensor holder 250 via the first bearing 261 and the second bearing 262. At this time, since each fixing member 350 is in contact with each sensor holding portion 270, the second sensor 1b is not displaced. Therefore, the second sensor 1b is compressed and the fourth sensor 1d is decompressed. Further, the third sensor 1c starts to compress, and the first sensor 1a starts to expand.

Subsequently, as shown in FIG. 8C, when the rotary shaft 310 rotates and the external force application unit 313 is in the third position, the external force application unit 313 is the third of the first bearing 261 and the second bearing 262. It comes into contact with the position corresponding to the sensor 1c. Therefore, an external force F3 from the first sensor 1a side to the third sensor 1c side is applied to the sensor holder 250 via the first bearing 261 and the second bearing 262. At this time, since each fixing member 350 is in contact with each sensor holding portion 270, the third sensor 1c is not displaced. Therefore, the third sensor 1c is compressed and the first sensor 1a is decompressed. Further, the 4th sensor 1d starts to compress, and the 2nd sensor 1b starts to expand.

Further, as shown in FIG. 8D, when the rotary shaft 310 rotates and the external force application unit 313 is in the fourth position, the external force application unit 313 is the fourth sensor of the first bearing 261 and the second bearing 262. It comes into contact with the position corresponding to 1d. Therefore, an external force F4 from the second sensor 1b side to the fourth sensor 1d side is applied to the sensor holder 250 via the first bearing 261 and the second bearing 262. At this time, since each fixing member 350 is in contact with each sensor holding portion 270, the fourth sensor 1d is not displaced. Therefore, the fourth sensor 1d is compressed and the second sensor 1b is decompressed. Further, the first sensor 1a starts to compress, and the third sensor 1c starts to expand.

Then, by repeatedly rotating the rotary shaft 310, the first to fourth sensors 1a to 1d are repeatedly applied with an external force and the applied external force is released. That is, the elastically deforming members 20 of the first to fourth sensors 1a to 1d are periodically deformed. Therefore, as shown in FIG. 9, the sensor signals output from the first to fourth sensors 1a to 1d have waveforms shifted by 1/4 period.

In FIG. 9, the sensor signal output from the first sensor 1a is used as the first sensor signal, and the sensor signal output from the second sensor 1b is used as the second sensor signal. Similarly, in FIG. 9, the sensor signal output from the third sensor 1c is used as the third sensor signal, and the sensor signal output from the fourth sensor 1d is used as the fourth sensor signal. Further, FIG. 9 shows an example in which the amplitude of each sensor signal is different. This is because the pressing force applied to each of the sensors 1a to 1d from the fixing member 350 varies. Therefore, when the amplitudes of the respective sensor signals are different in this way, the sensor signals having the same amplitude are output from the sensors 1a to 1d by adjusting the pressing force of the fixing member 350 based on the sensor signals. Adjust so that.

From the above, the output characteristics of the rotation speed of the motor 290 and the amplitude of the sensor signal are measured. That is, since the frequency is derived from the rotation speed of the motor 290, the output characteristics of the frequency and the amplitude of the sensor signal are measured. Further, the output characteristics of the rotation speed of the motor 290 and the phase shift of the sensor signal are measured. That is, since the frequency is derived from the rotation speed of the motor 290, the output characteristics of the frequency and the phase shift of the sensor signal are measured. Therefore, by changing the rotation speed of the motor 290, it is possible to obtain the relationship between each frequency and the amplitude of the sensor signal in the current eccentricity amount, and the relationship between each frequency and the phase shift of the sensor signal.

Further, by continuing to maintain the rotation of the motor 290, an external force is repeatedly applied to each of the sensors 1a to 1d to release the external force, so that the durability characteristic of the strain sensor 1 at the rotation speed is also measured. That is, the durability characteristic of the strain sensor 1 at a predetermined frequency is measured. The durability characteristic is measured, for example, by repeatedly applying and releasing an external force until a sensor signal having an amplitude different from that of the first sensor signal is output.

After that, the size of the external force applying portion 313 arranged in the key groove 312 is changed, and the amount of eccentricity of the rotating shaft 310 is changed. Then, by executing the above steps, the relationship between each frequency and the amplitude of the sensor signal at different eccentricities and the relationship between each frequency and the phase shift of the sensor signal can be obtained. In addition, durability characteristics with different eccentricities can be obtained.

That is, in the present embodiment, by changing the rotation speed of the motor 290 and changing the eccentricity amount of the rotating shaft 310, as shown in FIG. 10, each frequency and each sensor signal at each eccentricity amount Output characteristics with amplitude can be measured. Similarly, by changing the rotation speed of the motor 290 and the eccentricity amount of the rotating shaft 310, as shown in FIG. 11, the phase shift of each frequency and each sensor signal at each eccentricity amount Output characteristics can be measured. Then, as shown in FIG. 12, by changing the amount of eccentricity of the rotating shaft 310, the durability characteristics at each amount of eccentricity can be measured.

It should be noted that FIGS. 10 to 12 schematically show the results when the eccentricity amount of the rotary shaft 310 is changed to the first to third eccentricity amounts. However, as for the first to third eccentric amounts in FIGS. 10 to 12, the first eccentric amount is the smallest and the third eccentric amount is the largest. That is, in FIGS. 10 to 12, the influence of the external force on the first to fourth sensors 1a to 1d is the smallest when the first eccentricity amount is applied, and the first to fourth sensors 1a are the smallest when the third eccentricity amount is applied. The result shows that the influence of the external force on ~ 1d is the largest.

Further, in FIG. 10, the amplitude of the sensor signal increases to a predetermined frequency and then decreases because the frequency is too large and the elastic deformation member 20 cannot be restored in time. Similarly, in FIG. 11, the reason why the phase shift of the sensor signal occurs from the predetermined frequency is that the elastic deformation member 20 cannot be restored in time because the frequency is too large. That is, in the present embodiment, the maximum amplitude in the strain sensor 1 and the limit frequency at which the phase shift does not occur are also measured.

As described above, the output characteristics and durability characteristics of the strain sensor 1 are measured. Further, in the manufacturing apparatus 200 of the present embodiment, it is possible to determine the abnormality of the strain sensor 1. For example, as shown in FIG. 13, the control unit 370 may compare the reference waveform DP as the determination parameter with the amplitude of the sensor signal to determine the abnormality of the strain sensor 1. In this case, the control unit 370 may determine that it is normal, for example, when the deviation of the sensor signal with respect to the reference waveform DP is less than several tens of percent. Further, the control unit 370 may determine that the sensor signal is normal when it belongs to the range of 3σ of the reference waveform.

Although not particularly shown, the control unit 370 can also compare another reference waveform with the phase shift of the sensor signal to determine the abnormality of the strain sensor 1. Further, the reference waveform DP is derived by performing the same process as the measurement of the output characteristics for the plurality of strain sensors 1 and averaging the sensor signals obtained from the strain sensors 1 before performing the characteristic inspection. Will be done. That is, the reference waveform DP is created in advance using a strain sensor 1 different from the strain sensor 1 that performs the characteristic inspection. Then, the control unit 370 can also perform an abnormality determination using the reference waveform DP while performing output characteristics.

As described above, in the present embodiment, an external force is applied to the strain sensor 1 or the applied external force is released by rotating the rotary shaft 310. Therefore, the elastically deforming member 20 is periodically deformed because the applied external force changes periodically. Therefore, the output characteristics of the frequency and the sensor signal in the strain sensor 1 can be easily measured.

Further, a plurality of strain sensors 1 are arranged on the sensor holder 250, and the durability characteristics are measured by rotating the rotating shaft 310. Therefore, the durability characteristics of the plurality of strain sensors 1 can be measured at the same time. Therefore, it is possible to shorten the inspection time for the durability characteristics of the plurality of strain sensors 1.

Further, in the present embodiment, the sensor holder 250 is arranged with a plurality of strain sensors 1 at equal intervals along the circumferential direction of the first axis C. Therefore, when the rotary shaft 310 is rotated, it is possible to suppress the variation of the external force applied to each strain sensor 1.

Further, the fixing member 350 is provided in a displaceable state in the holding block 340. Therefore, by displacing the fixing member 350, the pressing force from the fixing member 350 to the strain sensor 1 can be easily adjusted.

Further, in the present embodiment, the control unit 370 can also derive the reference waveform DP and perform the abnormality determination. Therefore, the reliability of the strain sensor 1 can be improved.

(Other embodiments)
The present invention is not limited to the above-described embodiment, and can be appropriately modified within the scope of the claims.

For example, in the first embodiment, in the heat flux sensor 10, the insulating base material 100, the front surface protecting member 110, and the back surface protecting member 120 may each be made of a flexible insulating material other than the resin material. Further, the heat flux sensor 10 may be made of an insulating material in which the insulating base material 100, the front surface protecting member 110, and the back surface protecting member 120 do not have flexibility. Further, the heat flux sensor 10 may be configured not to have the front surface protection member 110 and the back surface protection member 120. Further, the heat flux sensor 10 may have a configuration different from the above configuration as long as it detects the heat flux.

Further, in the above embodiment, an example in which a voltage is used as a characteristic has been described, but for example, a characteristic obtained by converting a voltage into a current may be derived.

Further, in the first embodiment, when the abnormality is determined, it may be compared with the threshold value instead of the reference waveform DP. For example, if the sensor signal is less than a predetermined threshold value at a predetermined frequency, it may be determined that the strain sensor 1 has an abnormality. In this case, the threshold value corresponds to the determination parameter.

Further, in the first embodiment, the external force application unit 313 does not have to be made of rubber, resin, or the like, and can apply an external force to the sensor holder 250 via the first bearing 261 and the second bearing 262. All you need is.

For example, as shown in FIG. 14A, the external force applying portion 314 may be configured by arranging a leaf spring in the keyway 312. Further, as shown in FIG. 13B, the external force applying portion 315 may be configured such that the backing plate 315a is arranged in the keyway 312 via the spring 315b. Further, as shown in FIG. 13C, the external force application portion 316 may be configured by fixing the backing plate 316a to the key groove 312 by the screw portion 316b.

Further, in the first embodiment, if the rotary shaft 310 is configured to sequentially apply external force to the inner wall surface of the sensor holder 250 along the circumferential direction of the inner wall surface when rotating, the external force application unit 313. May not be provided. That is, the rotary shaft 310 may not be provided with an external force applying portion as long as the second axis R is configured to be eccentric with respect to the first axis C. For example, as shown in FIG. 14D, the rotary shaft 310 has a one-sided stepped shape in which the diameter of the portion arranged in the hollow portion of the sensor holder 250 is smaller than the diameter of the portion not arranged in the hollow portion of the sensor holder 250. It may have been done. Even with such a configuration, the rotary shaft 310 is in a state where the second axis R is eccentric with respect to the first axis C, so that the same effect as described above can be obtained.

Then, in the first embodiment, when the durability characteristic is not measured, only one strain sensor 1 may be arranged in the sensor holder 250. Further, in the first embodiment, the number of strain sensors 1 arranged in the sensor holder 250 can be appropriately changed, and may be two, three, or five or more. ..

Further, in the first embodiment, the strain sensors 1 may not be arranged at equal intervals along the circumferential direction of the outer wall surface of the sensor holder 250. Further, in the first embodiment, the fixing member 350 does not have a function of adjusting the pressing force on the sensor holding portion 270, and may simply press and hold the sensor holding portion 270. .. Even in such a manufacturing apparatus 200, the output characteristics and durability characteristics of the frequency and the sensor signal can be measured by rotating the rotating shaft 310.

Further, in the first embodiment, if the sensor holder 250 is configured such that the frictional force with the rotating shaft 310 becomes small when the inner wall surface comes into contact with the rotating shaft 310, the first bearing 261 and the first bearing 250 are used. The two bearings 262 may not be provided.

Further, in the first embodiment, the control unit 370 does not have to perform the abnormality determination. That is, the control unit 370 may measure only at least one of the output characteristic and the durability characteristic.

Further, in the first embodiment, the first bearing 231 and the second bearing 232 may both be composed of an angular bearing or both may be composed of a deep groove bearing.

(summary)
According to the first aspect shown in part or all of the above-described embodiment, the elastically deformable member and the heat flux sensor that outputs a sensor signal corresponding to the heat flux due to the deformation of the elastically deformable member are laminated. The strain sensor manufacturing apparatus for manufacturing the strain sensor is provided with the following configuration. That is, it has a cylindrical shape having a hollow portion with the central axis as the first axis, and is arranged on the outer wall surface side of the sensor holder and the sensor holder where the strain sensor is arranged on the outer wall surface, and presses and holds the strain sensor. It is provided with a fixing member. Further, the strain sensor manufacturing apparatus includes a rotating member that is arranged in the hollow portion and is rotatable about the second axis along the first axis. The rotating member is configured such that when the second axis is eccentric with respect to the first axis and rotates, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface. The strain sensor manufacturing apparatus periodically applies an external force to the elastically deforming member of the strain sensor by rotating the rotating member and applying an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface. The elastically deforming member is periodically deformed by changing to. Then, the strain sensor manufacturing apparatus outputs a sensor signal corresponding to the deformation of the elastically deforming member from the heat flux sensor to measure the characteristics of the strain sensor.

According to the second aspect, the strain sensor manufacturing apparatus is arranged on the inner wall surface of the sensor holder and has a mechanical bearing that rotatably supports the rotating member, and when the rotating member is rotated, the mechanical bearing is provided. An external force is applied to the inner wall surface of the sensor holder via the above. According to this, when the rotating member rotates, it is possible to easily realize a configuration in which an external force is applied from the rotating member to the sensor holder while reducing the frictional force with the rotating member.

According to the third aspect, the rotating member is provided with an external force applying portion for applying an external force to the sensor holder, and the second axis is eccentric from the first axis by the external force applying portion. According to this, the external force can be easily applied to the sensor holder by the external force application unit.

According to the fourth aspect, the strain sensor manufacturing apparatus has a holding block arranged on the outer wall surface side of the sensor holder. The fixing member is provided in a displaceable state in the holding block. According to this, the pressing force on the strain sensor can be easily adjusted by displacing the fixing member.

According to the fifth aspect, the sensor holder has a plurality of recesses on the outer wall surface on which the strain sensor is arranged. The plurality of recesses are formed at equal intervals in the circumferential direction with respect to the first axis. According to this, when the strain sensor is arranged in each recess, it is possible to suppress the variation of the external force applied to each strain sensor when the rotating member is rotated.

According to the sixth aspect, the strain sensor manufacturing apparatus has a control unit connected to the heat flux sensor and to which a sensor signal is input. Then, the control unit derives a determination parameter based on the plurality of sensor signals, and when the sensor signal is input after deriving the determination parameter, the control unit compares the determination parameter with the sensor signal and makes an abnormality determination. According to this, a highly reliable strain sensor can be manufactured.

According to the seventh aspect, it is a method for manufacturing a strain sensor in which an elastically deforming member and a heat flux sensor that outputs a sensor signal corresponding to the heat flux due to the deformation of the elastically deforming member are laminated. Perform the following steps. That is, the heat flux and the elastically deforming member are prepared, the heat flux sensor and the elastically deforming member are laminated to form a strain sensor, and the characteristics of the strain sensor are measured. Then, in measuring the characteristics of the strain sensor, the next strain sensor manufacturing device is prepared. That is, the strain sensor manufacturing apparatus has a cylindrical shape having a hollow portion with the central axis as the first axis, and is arranged on the sensor holder on which the strain sensor is arranged on the outer wall surface and on the outer wall surface side of the sensor holder to distort. It is equipped with a fixing member that presses and holds the sensor. The strain sensor manufacturing device is arranged in the hollow portion and can rotate with the second axis along the first axis as the rotation axis, and when the second axis is eccentric with respect to the first axis and rotates, the sensor holder The inner wall surface is provided with a rotating member configured to sequentially apply an external force along the circumferential direction of the inner wall surface. Then, in measuring the characteristics of the strain sensor, the strain sensor is arranged in the sensor holder. Further, in measuring the characteristics of the strain sensor, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface by rotating the rotating member, so that the elastic deformation member of the strain sensor is applied. The elastically deformable member is periodically deformed by periodically changing the external force. Then, in measuring the characteristics of the strain sensor, the output characteristics of the strain sensor are measured by outputting a sensor signal corresponding to the deformation of the elastically deforming member from the heat flux sensor.

Eighth, according to the eighth viewpoint, by arranging the strain sensors, a plurality of strain sensors are arranged on the outer wall surface of the sensor holder at equal intervals along the circumferential direction with respect to the first axis. According to this, it is possible to suppress the variation of the external force applied to each strain sensor when the rotating member is rotated.

According to the ninth aspect, in measuring the output characteristic of the strain sensor, the output characteristic regarding the frequency based on the rotation speed of the rotating member and the amplitude of the sensor signal is measured by changing the rotation speed of the rotating member. do. By changing the rotation speed of the rotating member in this way, the relationship between the frequency and the amplitude of the sensor signal can be easily measured.

According to the tenth viewpoint, in measuring the output characteristics of the strain sensor, by changing the rotation speed of the rotating member, the output characteristics regarding the frequency based on the rotation speed of the rotating member and the phase shift of the sensor signal can be obtained. Measure. By changing the rotation speed of the rotating member in this way, the relationship between the frequency and the amplitude of the sensor signal can be easily measured.

According to the eleventh viewpoint, in measuring the output characteristic of the strain sensor, the amount of eccentricity of the second axis with respect to the first axis is changed, and the rotating member is rotated by at least two different amounts of eccentricity. By changing the eccentricity amount in this way, it is possible to obtain the characteristics of the frequency and the sensor signal at different eccentricity amounts.

According to the twelfth aspect, in measuring the characteristics of the strain sensor, after measuring the output characteristics of the strain sensor, the sensor signal and the determination parameter are compared to perform an abnormality determination. According to this, a highly reliable strain sensor can be manufactured.

According to the thirteenth viewpoint, it is an inspection method of a strain sensor configured by stacking an elastically deforming member and a heat flux sensor that outputs a sensor signal corresponding to the heat flux caused by the deformation of the elastically deforming member. Perform the following steps. That is, the heat flux and the elastically deforming member are prepared, the heat flux sensor and the elastically deforming member are laminated to form a strain sensor, and the characteristics of the strain sensor are inspected. Then, by inspecting the characteristics of the strain sensor, the next strain sensor manufacturing device is prepared. That is, the strain sensor manufacturing apparatus has a cylindrical shape having a hollow portion with the central axis as the first axis, and is arranged on the sensor holder on which the strain sensor is arranged on the outer wall surface and on the outer wall surface side of the sensor holder to distort. It is equipped with a fixing member that presses and holds the sensor. The strain sensor manufacturing device is arranged in the hollow portion and can rotate with the second axis along the first axis as the rotation axis, and when the second axis is eccentric with respect to the first axis and rotates, the sensor holder The inner wall surface is provided with a rotating member configured to sequentially apply an external force along the circumferential direction of the inner wall surface. Then, in order to inspect the characteristics of the strain sensor, a plurality of strain sensors are arranged in the sensor holder. Further, in inspecting the characteristics of the strain sensor, an external force is applied to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface by rotating the rotating member, so that the elastic deformation member of the strain sensor is applied. The elastically deformable member is periodically deformed by periodically changing the external force. Then, in inspecting the characteristics of the strain sensor, a sensor signal corresponding to the deformation of the elastically deforming member is output from the heat flux sensor to inspect the durability characteristics of the strain sensor.

1 Strain sensor 10 Heat flux sensor 20 Elastic deformation member 250 Sensor holder 310 Rotating member 350 Fixing member

Claims (13)

A strain sensor for manufacturing a strain sensor (1) in which an elastic deformation member (20) and a heat flux sensor (10) that outputs a sensor signal corresponding to the heat flux due to deformation of the elastic deformation member are laminated. It is a manufacturing equipment of
A sensor holder (250) having a hollow portion with a central axis as the first axis (C) and having the strain sensor arranged on an outer wall surface, and a sensor holder (250).
A fixing member (350) arranged on the outer wall surface side of the sensor holder and pressing and holding the strain sensor, and
A rotating member (310), which is arranged in the hollow portion and is rotatable about a second axis (R) along the first axis, is provided.
The rotating member is configured such that when the second axis is eccentric with respect to the first axis and rotates, an external force is sequentially applied to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface. ,
By rotating the rotating member and applying an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface, the external force applied to the elastically deforming member of the strain sensor is periodically changed. A strain sensor manufacturing apparatus that periodically deforms the elastically deformed member, outputs the sensor signal corresponding to the deformation of the elastically deformed member from the heat flux sensor, and measures the characteristics of the strain sensor. It has mechanical bearings (261, 262) that are arranged on the inner wall surface of the sensor holder and rotatably support the rotating member.
The strain sensor manufacturing apparatus according to claim 1, wherein when the rotating member is rotated, an external force is applied to the inner wall surface of the sensor holder via the mechanical bearing. The rotating member is provided with an external force applying portion (313 to 316) for applying an external force to the sensor holder, and the second axis is eccentric from the first axis by the external force applying portion. The strain sensor manufacturing apparatus according to claim 1 or 2. It has a holding block (340) arranged on the outer wall surface side of the sensor holder, and has.
The strain sensor manufacturing apparatus according to any one of claims 1 to 3, wherein the fixing member is provided in a displaceable state in the holding block. The sensor holder has a plurality of recesses (251) on the outer wall surface on which the strain sensor is arranged.
The strain sensor manufacturing apparatus according to any one of claims 1 to 4, wherein the plurality of recesses are formed at equal intervals in the circumferential direction with respect to the first axis. It has a control unit (370) connected to the heat flux sensor and to which the sensor signal is input.
The control unit derives a determination parameter (DP) based on the plurality of sensor signals, and when the sensor signal is input after deriving the determination parameter, the determination parameter is compared with the sensor signal. The strain sensor manufacturing apparatus according to any one of claims 1 to 5, wherein an abnormality determination is performed. A method for manufacturing a strain sensor (1), which is formed by stacking an elastically deforming member (20) and a heat flux sensor (10) that outputs a sensor signal corresponding to the heat flux caused by the deformation of the elastically deforming member. hand,
To prepare the heat flux sensor and the elastic deformation member,
By stacking the heat flux sensor and the elastic deformation member to form the strain sensor,
By measuring the characteristics of the strain sensor,
By measuring the characteristics of the strain sensor,
A sensor holder (250) having a hollow portion with a central axis as the first axis (C) and having the strain sensor arranged on an outer wall surface, and a sensor holder (250).
A fixing member (350) arranged on the outer wall surface side of the sensor holder and pressing and holding the strain sensor, and
Arranged in the hollow portion, the second axis (R) along the first axis can be rotated as a rotation axis, and when the second axis is eccentric with respect to the first axis and rotates, the said. To prepare a strain sensor manufacturing device including a rotating member (310) configured to sequentially apply an external force to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface.
Placing the strain sensor in the sensor holder and
By rotating the rotating member and applying an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface, the external force applied to the elastically deforming member of the strain sensor is periodically changed. As a result, the elastically deformed member is periodically deformed, and the sensor signal corresponding to the deformation of the elastically deformed member is output from the heat flux sensor to measure the output characteristics of the strain sensor. Manufacturing method. The method for manufacturing a strain sensor according to claim 7, wherein by arranging the strain sensors, a plurality of the strain sensors are arranged at equal intervals along the circumferential direction with respect to the first axis on the outer wall surface of the sensor holder. In claim 7, by measuring the output characteristic of the strain sensor, the output characteristic relating to the frequency based on the rotation speed of the rotating member and the amplitude of the sensor signal is measured by changing the rotation speed of the rotating member. Alternatively, the method for manufacturing a strain sensor according to 8. By measuring the output characteristics of the strain sensor, the output characteristics relating to the frequency based on the rotation speed of the rotating member and the phase shift of the sensor signal are measured by changing the rotation speed of the rotating member. The method for manufacturing a strain sensor according to any one of 7 to 9. Claims 7 to 10 are performed by measuring the output characteristics of the strain sensor by changing the amount of eccentricity of the second axis with respect to the first axis and rotating the rotating member with at least two different amounts of eccentricity. The method for manufacturing a strain sensor according to any one of the above. In measuring the characteristics of the strain sensor, any one of claims 7 to 11 for measuring the output characteristics of the strain sensor and then comparing the sensor signal with the determination parameter (DP) to determine an abnormality. The method for manufacturing a strain sensor according to one. It is an inspection method of a strain sensor (1) configured by stacking an elastically deforming member (20) and a heat flux sensor (10) that outputs a sensor signal corresponding to the heat flux caused by the deformation of the elastically deforming member. hand,
To prepare the heat flux sensor and the elastic deformation member,
By stacking the heat flux sensor and the elastic deformation member to form the strain sensor,
By inspecting the characteristics of the strain sensor,
By inspecting the characteristics of the strain sensor,
A sensor holder (250) having a hollow portion with a central axis as the first axis (C) and having the strain sensor arranged on an outer wall surface, and a sensor holder (250).
A fixing member (350) arranged on the outer wall surface side of the sensor holder and pressing and holding the strain sensor, and
Arranged in the hollow portion, the second axis (R) along the first axis can be rotated as a rotation axis, and when the second axis is eccentric with respect to the first axis and rotates, the said. To prepare a strain sensor inspection device including a rotating member (310) configured to sequentially apply an external force to the inner wall surface of the sensor holder along the circumferential direction of the inner wall surface.
By arranging the plurality of the strain sensors in the sensor holder,
By rotating the rotating member and applying an external force to the inner wall surface of the sensor holder in order along the circumferential direction of the inner wall surface, the external force applied to the elastically deforming member of the strain sensor is periodically changed. By periodically deforming the elastically deforming member and continuously outputting the sensor signal corresponding to the deformation of the elastically deforming member from the heat flux sensor, the sensor signal different from the first sensor signal is output. A method for inspecting a strain sensor by measuring the time until the strain sensor is used and inspecting the durability characteristics of the strain sensor.

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