JP7023100B2 - Laser processing equipment - Google Patents

Description

The technique disclosed herein relates to a laser processing device such as a laser marking device that performs processing by irradiating a workpiece with a laser beam.

Conventionally, as a laser processing device, a device that performs processing by irradiating a work piece with UV laser light emitted from a laser oscillator and scanning on the surface of the work piece has been known (for example). , Patent Document 1).

Further, Patent Document 2 discloses a galvano scanner for scanning a laser beam. Specifically, the galvano scanner described in Patent Document 2 is formed by rotatably supporting a scanner mirror (galvano mirror), and the inside of a container for accommodating the scanner mirror is in a state close to a vacuum state. Therefore, the driving speed of the scanner mirror is increased.

Japanese Unexamined Patent Publication No. 2008-242184 Japanese Unexamined Patent Publication No. 2008-015004

By the way, when an attempt is made to scan a UV laser beam, if moisture is present in a room of a scanner chamber composed of a container as described in Patent Document 2, the humidity may cause dew condensation.

Generally, when dew condensation occurs in the scanner room, the laser beam is scattered, which may cause a decrease in the output. Considering that when the frequency of light is high, the refractive index is higher than when the frequency is low, scattering of laser light is considered to be a particular problem in UV laser light.

The technique disclosed herein has been made in view of this point, and an object thereof is to suppress a decrease in laser light output due to dew condensation that may occur in a scanner chamber.

The first aspect of the present disclosure is an excitation light generation unit that generates excitation light, and a laser that generates UV laser light based on the excitation light generated by the excitation light generation unit and emits the UV laser light. The present invention relates to a laser processing apparatus including an optical output unit and a laser light scanning unit that scans UV laser light emitted from the laser light output unit on the surface of a workpiece.

According to the laser processing apparatus according to the first aspect, the laser light scanning unit is the UV laser light in a first direction intersecting the optical axis of the UV laser light on the surface of the work piece. A first scanner mirror for scanning the light, a first drive motor that rotatably supports the first scanner mirror, and an optical axis of the UV laser light intersecting and said on the surface of the workpiece. A second scanner mirror for scanning the UV laser light in a second direction orthogonal to the first direction, a second drive motor that rotatably supports the second scanner mirror, and the first drive. A first holding portion that holds the outer peripheral surface of the motor, a second holding portion that holds the outer peripheral surface of the second drive motor, an incident window portion that can receive UV laser light emitted from the laser light output unit, and an incident window portion. It has an emission window portion for emitting UV laser light incident through the incident window portion to the outside, and is provided by the first holding portion, the second holding portion, the incident window portion, and the emission window portion. The accommodating member for accommodating the first and second scanner mirrors in the enclosed and sealed room of the scanner room is arranged in the room of the scanner room or the room of the accommodating room communicating with the scanner room. It also has a desiccant that can be replaced from the outside.

According to the above configuration, by arranging the desiccant in the room of the scanner room or the room of the accommodation room communicating with the scanner room, moisture is removed from the room of the scanner room, and by extension, the laser caused by dew condensation. It is possible to suppress a decrease in light output.

Further, according to the second aspect of the present disclosure, the accommodating member has a through hole for drying the scanner chamber with the desiccant, and the through hole is the first holding portion and the second. It may be said that the scanner chamber is surrounded by the holding portion, the incident window portion, and the exit window portion.

Here, the through hole may be a communication hole for communicating the scanner room and the storage room, for example, when the desiccant is arranged in the room of the storage room. Alternatively, the through hole may be an entrance / exit for taking in / out the desiccant, for example, when the desiccant is arranged in the room of the scanner room.

According to the above configuration, by providing a through hole on one surface of the accommodating member, the accommodating chamber and the scanner chamber can communicate with each other through the through hole, and the desiccant can be taken in and out through the through hole. It becomes possible. This is advantageous in removing moisture from the inside of the scanner room and, by extension, suppressing a decrease in the output of the laser beam due to dew condensation.

Further, according to the third aspect of the present disclosure, the desiccant is arranged in the room of the storage room, and the storage room and the scanner room communicate with each other through the through hole, and the storage room is communicated with each other. May be configured to replace the desiccant through an opening separate from the through hole.

According to this configuration, it is advantageous in suppressing the decrease in the output of the laser beam.

Further, according to the fourth aspect of the present disclosure, a housing for fixing the laser light output unit and the laser light scanning unit is provided, and the housing can emit UV laser light to the outside. It is also possible that a housing-side emitting portion and a lid portion for opening the accommodation chamber are provided.

According to this configuration, the desiccant can be easily replaced by opening the storage chamber with the lid portion.

Further, according to the fifth aspect of the present disclosure, the accommodation chamber may be partitioned and a housing opened / closed by the lid portion may be provided.

Further, according to the sixth aspect of the present disclosure, one surface of the housing is perforated with a replacement opening leading to the inside of the accommodation chamber, while the lid portion is perforated with the replacement opening. An insertion portion capable of closing the replacement opening is provided, and a sealing member arranged so as to be in close contact with the inner surface of the replacement opening is provided on the outer surface of the insertion portion. It may be.

According to this configuration, it is advantageous in increasing the airtightness of the containment chamber.

Further, according to the seventh aspect of the present disclosure, the housing includes a housing for fixing the laser light output unit and the laser light scanning unit, and a housing for partitioning the storage chamber. It may be configured to be removable from the housing.

According to this configuration, the housing can be attached to and detached from the housing, so that the desiccant can be replaced for each housing.

Further, according to the eighth aspect of the present disclosure, the desiccant is arranged in the room of the scanner chamber, and the scanner chamber communicates with the outside through the through hole, and the scanner chamber communicates with the outside through the through hole. It may be configured to replace the desiccant.

Further, the eighth aspect of the present disclosure is an excitation light generation unit that generates excitation light, and a UV laser light containing ultraviolet light based on the excitation light generated by the excitation light generation unit. The present invention relates to a laser processing apparatus including a laser light output unit that emits UV laser light and a laser light scanning unit that scans UV laser light emitted from the laser light output unit on the surface of a workpiece.

According to the laser processing apparatus according to the eighth aspect, the laser light scanning unit is the UV laser light in a first direction intersecting the optical axis of the UV laser light on the surface of the work piece. A first scanner mirror for scanning the light, a first drive motor that rotatably supports the first scanner mirror, and an optical axis of the UV laser light intersecting and said on the surface of the workpiece. A second scanner mirror for scanning the UV laser light in a second direction orthogonal to the first direction, a second drive motor that rotatably supports the second scanner mirror, and the first drive. A first holding portion that holds the outer peripheral surface of the motor, a second holding portion that holds the outer peripheral surface of the second drive motor, an incident window portion that can receive UV laser light emitted from the laser light output unit, and an incident window portion. It has an emission window portion for emitting UV laser light incident through the incident window portion to the outside, and is provided by the first holding portion, the second holding portion, the incident window portion, and the emission window portion. It has an accommodating member for accommodating the first and second scanner mirrors in a room of the scanner room which is surrounded and sealed, and an externally replaceable desiccant arranged in the room of the scanner room. However, the emission window portion is configured to be openable and closable from the outside.

According to this configuration, by opening the exit window portion from the outside, it is possible to access the inside of the scanner room and replace the desiccant. As a result, it is possible to remove moisture from the inside of the scanner room and, by extension, suppress a decrease in the output of the laser beam due to dew condensation.

As described above, according to the above-mentioned laser processing apparatus, it is possible to remove moisture from the inside of the scanner room and, by extension, suppress a decrease in the output of the laser beam.

FIG. 1 is a block diagram illustrating a schematic configuration of a laser processing apparatus. FIG. 2 is a perspective view illustrating the appearance of the marker head. FIG. 3 is a perspective view illustrating the appearance of the marker head. FIG. 4 is a diagram illustrating the internal structure of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser beam output unit. FIG. 6 is a diagram illustrating the layout of optical components in the laser beam output unit. FIG. 7 is a cross-sectional view illustrating the configuration of the SHG unit. FIG. 8 is a cross-sectional view illustrating the configuration of the THG unit. FIG. 9 is a perspective view illustrating the configuration of the laser light separation unit. FIG. 10 is a perspective view showing the configuration illustrated in FIG. 9 with some omissions. FIG. 11 is a diagram for explaining the light dust collection effect. FIG. 12 is a diagram illustrating the contamination adhering to the optical component. FIG. 13 is a front view illustrating a state in which the exterior cover is removed from the marker head. FIG. 14 is a diagram showing the configuration exemplified in FIG. 13 when viewed from diagonally forward. FIG. 15 is a diagram showing the configuration illustrated in FIG. 13 with some omissions. FIG. 16 is a diagram illustrating a state in which the Z chamber cover is removed from the marker head. FIG. 17 is a cross-sectional view illustrating the configuration around the guide light emitting device. FIG. 18 is a diagram illustrating a vertical cross section of the laser light guide unit. FIG. 19 is a diagram showing first to third modified examples of the laser light guide unit. FIG. 20 is a diagram showing a fourth modification of the laser light guide unit. FIG. 21 is a perspective view illustrating the appearance of the laser beam scanning unit. FIG. 22 is a perspective view illustrating the appearance of the laser beam scanning unit. FIG. 23 is a diagram showing the configuration exemplified in FIG. 23 as viewed from below. FIG. 24 is a vertical sectional view illustrating the configuration of the X scanner. FIG. 25 is a vertical sectional view illustrating the configuration of the Y scanner. FIG. 26 is a diagram corresponding to FIG. 25 showing a first modification of the Y scanner. FIG. 27 is a diagram corresponding to FIG. 25 showing a second modification of the Y scanner. FIG. 28 is a diagram showing a modified example of the scanner housing. FIG. 29 is a perspective view illustrating the arrangement of the desiccant housing. FIG. 30 is a vertical sectional view illustrating the configuration of the accommodation chamber and the scanner chamber. FIG. 31 is a perspective view illustrating the appearance of the desiccant housing. FIG. 32 is an explanatory view illustrating the sealing structure by the replacement lid portion. FIG. 33 is a diagram showing a modified example of the replacement lid portion. FIG. 34 is a diagram showing a modified example of the accommodation chamber and the scanner chamber. FIG. 35 is a diagram illustrating the correspondence between the target output and the drive current. FIG. 36 is a flowchart illustrating the proper use of the current table according to the pulse frequency. FIG. 37 is a flowchart illustrating the output adjustment according to the height of the target output. FIG. 38 is a diagram illustrating a configuration related to a power supply of a laser processing apparatus. FIG. 39 is a flowchart illustrating the processing related to the output stop of the laser processing apparatus. FIG. 40 is a diagram corresponding to FIG. 38 showing a modified example of the configuration related to the power supply. FIG. 41 is a diagram corresponding to FIG. 39 showing a modified example of the process related to the output stop.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following description is an example.

That is, in this specification, the laser marker will be described as an example of the laser processing apparatus, but the technique disclosed here can be generally used for laser application equipment regardless of the name of the laser processing apparatus.

Further, although printing is described as a typical example of processing in this specification, it can be used not only in printing processing but also in any processing processing using laser light.

<Overall configuration of laser processing device L>
FIG. 1 is a block diagram illustrating a schematic configuration of a laser processing apparatus L. The laser processing apparatus L shown in FIG. 1 irradiates the work W as a workpiece by irradiating the laser light emitted from the marker head 1 and performs processing by three-dimensionally scanning on the surface of the work W. It is a thing.

In particular, the laser processing apparatus L disclosed here is configured to be able to oscillate UV laser light in a pulsed manner.

As shown in FIG. 1, the laser processing device L can be configured by a marker controller 100 for controlling various devices and a marker head 1 for emitting laser light, but the marker controller 100 and the marker head One of 1 can be incorporated into the other and integrated.

The marker controller 100 and the marker head 1 are separate bodies in this embodiment, and are electrically connected via electrical wiring, while are optically coupled via an optical fiber cable. When the marker controller 100 and the marker head 1 are integrated, they can be connected via a space without using an optical fiber cable.

Further, an operation terminal (setting unit) 200 for setting various processing conditions such as print settings can be connected to the marker controller 100. The operation terminal 200 stores information such as a display unit 201 for displaying information to the user such as a liquid crystal display, an operation unit 202 for receiving operation input by the user such as a keyboard and a mouse, and an HDD. It comprises a storage device 203 for the purpose. The operation terminal 200 can be integrated into, for example, the marker controller 100. In this case, a name such as a control unit may be used instead of the "operation terminal", but at least in this embodiment, they are separated from each other.

When the operation terminal 200 according to this embodiment is used, the user determines the print content (marking pattern) by inputting the operation via the operation unit 202, and outputs the output (target) required for the laser beam. It is possible to set machining conditions for performing desired machining on the work W, such as output), its scanning speed (scanning speed), and the number of times pulse oscillation is performed per second (pulse frequency). .. The machining conditions set in this way are output to the marker controller 100 and stored in the condition setting storage unit 102. If necessary, the storage device 203 of the operation terminal 200 may store the processing conditions.

The machining conditions set in this way are output to the marker controller 100 and stored in the condition setting storage unit 102.

In addition to the above-mentioned devices and devices, the laser processing device L can also be connected to devices for performing operations and controls, computers for performing other various processes, storage devices, peripheral devices, and the like. The connection in this case is, for example, a serial connection such as IEEE1394, RS-232x, RS-422, or USB, a parallel connection, or an electric or magnetic connection via a network such as 10BASE-T, 100BASE-TX, or 1000BASE-T. A method of connecting objectively and optically can be mentioned. In addition to the wired connection, IEEE802. A wireless LAN such as x, a wireless connection using radio waves such as Bluetooth (registered trademark), infrared rays, optical communication, or the like may be used. Further, as a storage medium used for a storage device for exchanging data, storing various settings, and the like, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks, and the like can be used.

The laser processing device L can also be a laser processing system in which the marker controller 100, the marker head 1, the operation terminal 200, and various other units, devices, and devices are combined.

Hereinafter, the hardware configurations of the marker controller 100 and the marker head 1 will be described in detail, and then the configurations related to the control of the marker head 1 by the marker controller 100 will be described.

<Marker controller 100>
The marker controller 100 includes a condition setting storage unit 102 for storing processing conditions, a control unit 101 for controlling the marker head 1 based on the processing conditions, and a laser excitation light (excitation light). It includes an excitation light generation unit 110.

(Condition setting storage unit 102)
The condition setting storage unit 102 stores the processing conditions set via the operation terminal 200, and outputs the stored processing conditions to the control unit 101 as needed.

Specifically, the condition setting storage unit 102 is configured by using a volatile memory, a non-volatile memory, an HDD, or the like, and can temporarily or continuously store information indicating processing conditions. In particular, when the operation terminal 200 is incorporated in the marker controller 100, the storage device 203 may be configured to also serve as the condition setting storage unit 102.

(Control unit 101)
The control unit 101 includes markers such as the excitation light generation unit 110 of the marker controller 100, the laser light output unit 2, the laser light guide unit, and the laser light scanning unit 4 based on the processing conditions stored in the condition setting storage unit 102. The work W is configured to be machined by controlling each part forming the head 1.

Specifically, the control unit 101 is composed of a processor, a memory, an input / output bus, etc., and is a signal indicating information input via the operation terminal 200 or a signal indicating processing conditions read from the condition setting storage unit 102. A control signal is generated based on the control signal, and the generated control signal is output to each part of the laser processing apparatus L to control the processing of the work W.

For example, when starting the machining of the work W, the control unit 101 reads the target output stored in the condition setting storage unit 102 and outputs the control signal generated for the target output to the excitation light source drive unit 112. , Controls the generation of laser excitation light.

Further, although omitted in FIG. 1, the control unit 101 outputs a control signal generated based on the pulse frequency stored in the condition setting storage unit 102 and a predetermined duty ratio to the Q switch 23 described later. , UV laser light pulse oscillation is controlled.

(Excitation light generation unit 110)
The excitation light generation unit 110 includes an excitation light source 111 that generates laser excitation light (excitation light) according to the drive current, and an excitation light source drive unit that supplies a drive current to the excitation light source 111 (in FIG. 1, “LD”. (Descripted as "drive unit") 112, an excitation light condensing unit 113 optically bonded to the excitation light source 111, and a table storage unit for determining the drive current to be supplied to the excitation light source 111 (correspondence relationship). A storage unit) 114 and. The excitation light source 111 and the excitation light condensing unit 113 are fixed in an excitation casing (not shown) and are optically coupled to each other. Although details are omitted, this excitation casing is made of a metal such as copper having excellent thermal conductivity, and can efficiently dissipate heat from the excitation light source 111.

Further, the excitation light generation unit 110 stores the correspondence relationship between the target output of the UV laser light set as one of the above-mentioned processing conditions and the drive power to be supplied to the excitation light source 111. It also has a (correspondence-related storage unit). In this embodiment, the table storage unit 114 is connected so as to send and receive an electric signal to and from the excitation light source driving unit 112, but may be configured to send and receive a signal to and from the control unit 101.

Hereinafter, each part of the excitation light generation part 110 will be described in order.

The excitation light source drive unit 112 supplies a drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although the detailed flow will be described later, the excitation light source drive unit 112 supplies the excitation light source unit 110 to the excitation light generation unit 110 by using the target output determined by the control unit 101 and the correspondence stored in the table storage unit 114. Determine the drive current to be done. The excitation light source driving unit 112 supplies the driving current thus determined to the excitation light source 111. When the table storage unit 114 is connected to the control unit 101, the process of determining the drive current may be performed by the control unit 101 instead of the excitation light source drive unit 112.

The excitation light source 111 is configured so that a drive current is supplied from the excitation light source drive unit 112 and excitation light corresponding to the drive current is generated. The output of the excitation light generated by the excitation light source 111 increases as the drive current increases. Specifically, the excitation light source 111 is composed of a laser diode (LD) or the like, and an LD array or an LD bar in which a plurality of LD elements are linearly arranged can be used. When an LD array or LD bar is used as the excitation light source 111, the laser oscillation from each element is output in a line shape and incident on the excitation light condensing unit 113.

The excitation light condensing unit 113 is configured to condense the laser output from the excitation light source 111 and output it as laser excitation light (excitation light). Specifically, the excitation light condensing unit 113 can be configured by a focusing lens or the like, and has an incident surface on which laser oscillation is incident and an exit surface on which laser excitation light is output. The excitation light condensing unit 113 is optically coupled to the marker head 1 via the above-mentioned optical fiber cable. Therefore, the laser excitation light output from the excitation light condensing unit 113 is guided to the marker head 1 through the optical fiber cable.

The table storage unit 114 is configured to store the correspondence between the target output set as one of the processing conditions and the drive current to be supplied to the excitation light source 111. Specifically, the table storage unit 114 stores a current table that stores the correspondence between the target output and the drive current, and the excitation light source drive unit 112 reads the drive current corresponding to the target output. It is configured to determine the drive current supplied to the excitation light source 111.

In addition, instead of the table storage unit 114, a calculation formula storage unit for storing a calculation formula for calculating the drive current with the target output as an argument may be provided. The calculation formula storage unit and the table storage unit 114 both exemplify the correspondence storage unit in that they store the correspondence between the target output and the drive current.

The excitation light generation unit 110 can be an LD unit or an LD module in which members such as an excitation light source driving unit 112, an excitation light source 111, an excitation light condensing unit 113, and a table storage unit 114 are incorporated in advance. Further, the excitation light emitted from the excitation light generation unit 110 (specifically, the laser excitation light output from the excitation light condensing unit 113) can be unpolarized, thereby changing the polarization state. There is no need to consider it, which is advantageous in terms of design. In particular, regarding the configuration around the excitation light source 111, the LD unit itself that bundles and outputs the light obtained from each LD array in which dozens of LD elements are arranged by an optical fiber is provided with a mechanism for unpolarizing the output light. Is preferable.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generation unit 110 is guided to the marker head 1 through the optical fiber cable. The marker head 1 irradiates the surface of the work W with the laser light output unit 2 that generates and outputs UV laser light based on the laser excitation light and the UV laser light output from the laser light output unit 2. It is configured to include a laser light scanning unit 4 that performs two-dimensional scanning, and a laser light guiding unit 3 that constitutes an optical path from the laser light output unit 2 to the laser light scanning unit 4.

2 to 3 are perspective views illustrating the appearance of the marker head 1. As shown in FIGS. 2 to 3, the marker head 1 includes a housing 10 for fixing a laser light output unit 2, a laser light guide unit 3, a laser light scanning unit 4, and the like. The housing 10 has a substantially rectangular appearance as shown in FIGS. 2 to 3, and on one side surface in the lateral direction thereof is a replacement lid portion for replacing the desiccant Dm described later. 18 is detachably attached. On the other hand, as shown in FIG. 2, an emission window portion 19 for emitting UV laser light from the marker head 1 is provided on the lower surface of the housing 10. The configuration of the replacement lid portion 18 and the exit window portion 19 will be described later.

FIG. 4 is a diagram showing the internal structure of the marker head 1. A partition portion 11 as shown in FIG. 4 is provided inside the housing 10 (see also FIGS. 21 and 29). The internal space of the housing 10 is divided into one side and the other side in the longitudinal direction by the partition portion 11.

In the following description, the "longitudinal direction of the housing 10" refers to the left-right direction of the paper surface in FIG. 4, and the left side of the paper surface in FIG. 4 is referred to as "one side in the longitudinal direction", while the right side of the paper surface in the figure is used. It is called "the other side in the longitudinal direction". Similarly, the "short side direction of the housing 10" refers to a direction perpendicular to the paper surface of FIG. 4, and the front side of the paper surface of FIG. 4 is referred to as "one side in the short side direction", while the paper surface of the same figure. The back side is called "the other side in the short direction".

Further, in the following description, the "longitudinal direction (short side direction) of the housing 10" is simply referred to as "longitudinal direction (short side direction)", and as shown in FIG. 2, these are also used in other drawings. The direction corresponding to the above may be referred to as "longitudinal direction" or "shortward direction".

Further, in the following description, the "vertical direction" is equivalent to the vertical direction of the paper surface in FIG. Also in other figures, the direction corresponding to this may be referred to as "vertical direction".

Specifically, the partition portion 11 is formed in a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10. Further, the partition portion 11 is arranged so as to be closer to one side (left side of the paper surface in FIG. 4) than the central portion in the same direction in the longitudinal direction of the housing 10. Therefore, the space partitioned on one side in the longitudinal direction of the housing 10 has a shorter dimension in the longitudinal direction than the space partitioned on the other side by the amount that the arrangement of the partition portions 11 is biased to one side. Hereinafter, the latter space is referred to as a first space S1, while the former space is referred to as a second space S2.

In this embodiment, the laser light output unit 2 and the laser light scanning unit 4 are fixed inside the first space S1, while the laser light guiding unit 3 is fixed inside the second space S2.

Specifically, the first space S1 is divided into one side and the other side in the lateral direction by a substantially flat plate-shaped base plate 12. The components of the laser beam output unit 2 can be arranged mainly in the space on one side in the lateral direction with respect to the base plate 12.

More specifically, in this embodiment, among the parts constituting the laser beam output unit 2, the optical parts such as the concave lens 28b and the optical crystal forming the wavelength conversion element are required to be sealed as airtightly as possible. , In the accommodation space surrounded by the partition portion 11, the base plate 12, and the like (specifically, the internal space of the wavelength conversion unit 2B), the accommodation space is sealed. On the other hand, parts that are not necessarily required to be sealed, such as electrical wiring and a heat sink (not shown), are arranged on the other side in the lateral direction with the base plate 12 interposed therebetween.

Further, as shown in FIG. 4, the laser beam scanning unit 4 can be arranged on one side in the lateral direction in the same manner as the optical component forming the laser beam output unit 2 (see also FIG. 21). Specifically, the laser light scanning unit 4 according to this embodiment is adjacent to the above-mentioned partition unit 11 in the longitudinal direction and is arranged on the inner bottom surface of the housing 10 in the vertical direction.

As described above, the laser light guide unit 3 is arranged in the second space S2. In this embodiment, among the parts constituting the laser light guide unit 3, the optical parts required to be hermetically sealed, such as the first bend mirror 32, are surrounded by the partition portion 11 and the Z chamber cover 31 in the Z chamber Sz. It is housed in an airtight manner. On the other hand, parts that are not necessarily required to be sealed, such as the guide light source 35 and the camera 36, are arranged outside the Z chamber Sz.

Further, the above-mentioned optical fiber cable is connected to the rear surface of the housing 10, and the optical fiber cable is connected to the laser beam output unit 2 arranged in the first space S1.

Hereinafter, the configurations of the laser light output unit 2, the laser light guide unit 3, and the laser light scanning unit 4 will be described in order.

(Laser light output unit 2)
The laser light output unit 2 is configured to generate UV laser light based on the laser excitation light generated by the excitation light generation unit 110 and to emit the UV laser light to the laser light guide unit 3. ..

FIG. 5 is a diagram illustrating the configuration of the laser beam output unit 2, and FIG. 6 is a diagram illustrating the layout of optical components in the laser beam output unit 2. As shown in FIGS. 5 to 6, the laser light output unit 2 according to the present embodiment mainly includes a Q-switch accommodating unit 2A capable of pulsing a fundamental wave generated based on laser excitation light and a Q-switch accommodating unit 2. The configuration includes a wavelength conversion unit 2B for wavelength conversion of the fundamental wave output from the unit 2A.

The resonators used for amplifying the laser light are the first reflection mirror (first mirror, reflection mirror) 21 housed in the Q-switch accommodating unit 2A and the second reflection mirror (first reflection mirror) housed in the wavelength conversion unit 2B. It can be configured by a second mirror, a reflection mirror) 22 and the like. That is, in this embodiment, the resonance optical path for amplifying the laser beam is configured from the Q-switch accommodating unit 2A to the wavelength conversion unit 2B.

The Q-switch accommodating portion 2A and the wavelength conversion portion 2B both include a base plate 12, a side wall portion 13 erected on the base plate 12, and a lid portion 14 that closes the space surrounded by the base plate 12 and the side wall portion 13. Surrounded by. In the present embodiment, the lid portion 14 is composed of a portion that covers the Q-switch accommodating portion 2A and a portion that covers the wavelength conversion portion 2B, but both portions may be integrally configured. ..

Specifically, the base plate 12 constitutes a support surface for mounting various parts described later. The side wall portion 13 stands upright with respect to the base plate 12, and is formed so as to surround the parts attached to the base plate 12 from the side. In particular, the side wall portion 13 shown in FIG. 5 has a shape that separates the component housed in the Q-switch accommodating portion 2A and the component housed in the wavelength conversion unit 2B from each other. That is, as shown in the figure, the Q-switch accommodating portion 2A is partitioned on the other side in the longitudinal direction (right side of the paper in FIG. 5), while the wavelength conversion portion 2B is on one side in the longitudinal direction (FIG. 5). It is divided on the left side of the page). Of the side wall portions 13, the portion erected in the substantially central portion in the longitudinal direction extends substantially in the vertical direction and is shared by the Q-switch accommodating portion 2A and the wavelength conversion portion 2B.

In this embodiment, as shown in FIG. 5, the base plate 12 and the side wall portion 13 partition a space open toward one side in the lateral direction. The space can be closed by the lid 14 (see FIG. 4). The lid portion 14 is designed to seal at least the wavelength conversion unit 2B, and in the examples shown in FIGS. 4 to 6, the wavelength conversion unit 2B and the Q-switch accommodating unit 2A are sealed by separate members. ing.

In the embodiment shown in FIG. 5, a sealing member 20a made of resin or the like is provided at the opening edge of the space surrounded by the base plate 12 and the side wall portion 13 in order to seal the wavelength conversion unit 2B. The seal member 20a can be sandwiched between the side wall portion 13 and the lid portion 14, and the internal space of the housing 20 can be sealed by bringing the lid portion 14 into close contact with the seal member 20a. Similarly, a sealing member 20b for sealing is provided on the opening edge of the Q-switch accommodating portion 2A.

The Q-switch accommodating unit 2A has an incident unit 24 to which the excitation light generated by the excitation light generation unit 110 can be incident, and can accommodate at least the Q-switch 23 and the first reflection mirror 21.

Specifically, the Q-switch accommodating unit 2A according to this embodiment includes an incident unit 24 to which the laser excitation light generated by the excitation light generation unit 110 can be incident, and a laser that generates a fundamental wave based on the laser excitation light. A Q-switch 23 that pulse-oscillates a fundamental wave generated by the laser medium 25 based on the medium 25 and a control signal input from the marker controller 100, and a Q-switch 23 for reflecting the fundamental wave generated by the laser medium 25. The first reflection mirror 21 and the first reflection mirror 21 are housed in an airtight manner. Of these components, at least the laser medium 25 may be accommodated in either the Q-switch accommodating unit 2A or the wavelength conversion unit 2B.

On the other hand, the wavelength conversion unit 2B includes a transmission window unit 15 capable of transmitting the fundamental wave generated by the laser medium 25 and an output window unit 16 capable of emitting UV laser light generated by the wavelength conversion unit 2B. It has a formed housing 20. The wavelength conversion unit 2B receives at least the fundamental wave generated by the laser medium 25 by the internal space surrounded by the housing 20, and also causes the second harmonic having a wavelength higher than the wavelength of the fundamental wave. The first wavelength conversion unit (first wavelength conversion element) 26 to be generated, the second wavelength conversion unit (second wavelength conversion element) 27 to generate the third harmonic wave having a wavelength higher than the second harmonic wave, and the second wavelength conversion unit (second wavelength conversion element) 27. A second reflection mirror 22 for reflecting at least one of the second harmonic and the third harmonic is housed in an airtight manner.

Specifically, in the embodiment shown in FIGS. 4 to 6, the housing 20 is composed of the above-mentioned base plate 12, the side wall portion 13, and the lid portion 14, and the transmission window portion 15 and the output window portion 16 are formed. Both are provided on the side wall portion 13.

As described above, since the Q-switch accommodating portion 2A and the wavelength conversion portion 2B are separated by the side wall portion 13, the first reflection in the Q-switch accommodating portion 2A is provided by providing the transmission window portion 15 on the side wall portion 13. The resonator composed of the mirror 21 and the second reflection mirror 22 in the wavelength conversion unit 2B forms a resonance optical path that passes through the transmission window portion 15.

Further, the wavelength conversion unit 2B can also seal the laser light separation unit 28 for separating at least the third harmonic from the resonance optical path and the beam expander 29 by the internal space formed by the housing 20.

In particular, in the example shown in FIG. 6, the laser light output unit 2 is configured as a so-called intracavity type laser oscillator. That is, on the way from the first reflection mirror 21 to the second reflection mirror 22, the Q switch 23, the folded mirror 24b forming the incident portion 24, the laser medium 25, the transmission window portion 15, and the laser light separation portion are used. The first separator 28a forming 28, the second wavelength conversion element 27, and the first wavelength conversion element 26 are arranged in order.

Here, the folded mirror 24b is arranged so that the optical axis of the excitation light generated by the excitation light generation unit 110 and the optical axis of the resonance optical path merge. Further, the first separator 28a is arranged so as to separate the laser beam including at least the third harmonic from the resonance optical path connecting the first reflection mirror 21 and the second reflection mirror 22.

Hereinafter, the configurations related to the laser beam output unit 2 will be described in order.

-First reflection mirror 21-
The first reflection mirror 21 is housed in the Q-switch accommodating portion 2A, and is configured to reflect at least the fundamental wave. As described above, the first reflection mirror 21 constitutes a resonator together with the second reflection mirror 22. In this embodiment, the first reflection mirror 21 is a total reflection mirror that reflects the fundamental wave.

-Second reflection mirror 22-
The second reflection mirror 22 is housed in the wavelength conversion unit 2B, and is configured to reflect at least the fundamental wave. The second reflection mirror 22 constitutes a resonator together with the first reflection mirror 21. In this embodiment, the second reflection mirror 22 is a total reflection mirror that reflects not only the fundamental wave but also the second harmonic and the third harmonic.

-Q switch 23-
The Q-switch 23 is housed in the Q-switch accommodating portion 2A, and is configured to oscillate a fundamental wave generated by the laser medium 25 in a pulsed manner. Specifically, the Q-switch 23 is arranged so as to be located on the optical axis of the resonance optical path, and is interposed between the laser medium 25 and the first reflection mirror 21. By using the Q-switch 23, continuous oscillation can be changed to high-speed repetitive pulse oscillation with a high peak output value (peak value). Further, a Q-switch control circuit that generates an RF signal applied to the Q-switch 23 is connected to the Q-switch 23. The laser light output unit 2 amplifies the laser light composed of photons stimulated and emitted from the laser medium 25 by multiple reflection between the first reflection mirror 21 and the second reflection mirror 22, and the laser light separation unit 28. The laser beam is output via.

That is, if the Q-switch 23 is turned on, the laser beam incident on the Q-switch 23 is deflected and separated from the resonance optical path. In this case, as a result of restricting the multiple reflection of the laser beam, the generation of the population inversion is promoted in the laser medium 25 described later.

Then, when the Q-switch 23 is turned on for a predetermined period and then switched to the off state, the laser beam is amplified by multiple reflections. In this case, a high-power laser beam oscillates in a pulse.

In this way, by periodically switching the Q-switch 23 on and off, high-speed repetitive pulse oscillation as described above can be performed. Examples of the control amount for controlling such pulse oscillation include a duty ratio related to the ratio between the period in which the Q-switch 23 is turned on (on time) and the period in which the Q switch 23 is turned off (off time). .. When this duty ratio is large, the period for turning on the Q-switch 23 is longer than when it is small. In this case, the generation of the population inversion is promoted, and the output value of the pulse oscillation (for example, the pulse energy of the laser beam) becomes large. Another control amount for controlling pulse oscillation is the Q-switch frequency, which indicates the frequency with which the Q-switch repeats on / off. By increasing the Q-switch frequency, the number of pulse oscillations emitted per unit time will increase.

-Incident part 24-
An excitation light generation unit 110 or an extending optical fiber cable is connected to the incident unit 24. That is, one end of the optical fiber cable is connected to the excitation light condensing portion 113, while the other end is connected to the incident portion 24 housed in the Q-switch accommodating portion 2A. The laser excitation light incident from the incident portion 24 reaches the laser medium 25.

Here, in the examples shown in FIGS. 5 to 6, a condensing unit 24a and a folded mirror 24b are interposed between the incident unit 24 and the laser medium 25. The light collecting unit 24a is composed of a set of two optical lenses, and is adapted to collect the incident laser excitation light propagating through the optical fiber cable and guide it to the folded mirror 24b.

On the other hand, the folded mirror 24b is configured as a so-called half mirror, and the laser light (specifically, the laser excitation light) propagating in the direction from the incident portion 24 to the laser medium 25 via the condensing portion 24a. Is transmitted, but the laser beam (specifically, the fundamental wave) propagating in the opposite direction is totally reflected. The laser light totally reflected by the folded mirror passes through the Q switch 23 (specifically, the Q switch 23 turned off) and reaches the first reflection mirror 21 as described later.

-Laser medium 25-
The laser medium 25 is a laser medium capable of forming a population inversion, and is configured to perform stimulated emission corresponding to the incident laser excitation light when the laser excitation light is incident on the medium. The wavelength of photons emitted by stimulated emission (so-called basic wavelength) increases or decreases depending on the configuration of the laser medium 25, but in this example, it is in the infrared region of about 1 μm.

In this embodiment, a rod-shaped Nd: YVO ₄ (yttrium vanadate) was used as the laser medium 25. Laser excitation light is incident from one end surface of the rod-shaped laser medium 25, and laser light having a fundamental wavelength (so-called fundamental wave) is emitted from the other end surface (one-way excitation by so-called end pumping). method). In this example, the fundamental wavelength is set to 1064 nm. On the other hand, the wavelength of the laser excitation light is set near the center wavelength of the absorption spectrum of Nd: YVO ₄ in order to promote stimulated emission. However, the present invention is not limited to this example, and as another laser medium, for example, YAG, YLF, GdVO ₄ or the like doped with rare earths can be used. Various solid-state laser media can be used depending on the application of the laser processing apparatus L.

Further, it is also possible to combine a solid-state laser medium with a wavelength conversion element to convert the wavelength of the output laser light to an arbitrary wavelength. In that case, unlike FIG. 6, the laser medium 25 may be accommodated in the wavelength conversion unit 2B. Further, a so-called fiber laser, which uses a fiber as an oscillator instead of the bulk as a solid-state laser medium, may be used.

Furthermore, the marker head 1 is not limited to the solid-state laser, and a gas laser using a gas such as CO ₂ , helium-neon, argon, or nitrogen as a medium may be used. For example, when a carbon dioxide laser is used, the laser medium is filled with carbon dioxide (CO ₂ ), has a built-in electrode, and excites carbon dioxide based on a print signal input from a laser control device. As a result, the laser is oscillated.

Furthermore, as the excitation method using the solid-state laser medium, the laser light output unit 2 uses a two-way excitation method in which excitation light is irradiated from the front and rear end faces of the solid-state laser medium instead of the above-mentioned one-way excitation method. You can also do it.

-First wavelength conversion element 26-
The first wavelength conversion element 26 is a nonlinear optical crystal capable of generating a second harmonic, and when a fundamental wave is incident, the frequency of the fundamental wave is doubled and emitted as a second harmonic (. Second Harmonic Generation: SHG). That is, the wavelength of the laser light generated when the fundamental wave is incident on the first wavelength conversion element 26 is in the visible light region of around 500 nm. In particular, in this embodiment, the wavelength of the second harmonic is set to 532 nm.

Generally, the conversion efficiency of the fundamental wave by the first wavelength conversion element 26 is less than 100%. Therefore, at least a part of the fundamental wave incident on the first wavelength conversion element 26 is emitted without being converted by the first wavelength conversion element 26. Therefore, when the fundamental wave is incident on the first wavelength conversion element 26, the laser beam including the fundamental wave and the second harmonic is emitted.

In this embodiment, LBO (LiB ₃ O ₃ ) was used as the first wavelength conversion element 26. However, not limited to this example, as the first wavelength conversion element 26, KTP (KTiPO ₄ ), an organic nonlinear optical material, and other inorganic nonlinear optical materials such as KN (KNbO ₃ ), KAP (KAsPO ₄ ), and BBO ( β-BaB ₂ O ₄ ), LBO (LiB ₃ O ₅ ), and a bulk type polarization inversion element (LiNbO ₃ (Periodically Polled Lithium Niobate: PPLN), LiTaO ₃ , etc.) may be used. Further, a semiconductor laser for an excitation light source of a laser by up-conversion using a fluoride fiber doped with rare earths such as Ho, Er, Tm, Sm, and Nd can also be used. As described above, various types of optical materials can be used in the present embodiment.

-Second wavelength conversion element 27-
The second wavelength conversion element 27 is a non-linear optical crystal capable of generating the third harmonic, and when the fundamental wave and the second harmonic are incident (particularly, the propagation directions of the fundamental wave and the second harmonic are different). (When they are equal), it is configured to be converted into a third harmonic having a frequency three times that of the fundamental wave and emitted (Third Harmonic Generation: THG). That is, the wavelength of the laser beam generated when the fundamental wave and the second harmonic are incident on the second wavelength conversion element 27 is in the ultraviolet region of around 350 nm (specifically, the visible light region and the ultraviolet region). Near the boundary with). In particular, in this embodiment, the wavelength of the third harmonic is set to 355 nm.

Generally, the conversion efficiency of the fundamental wave by the second wavelength conversion element 27 is less than 100%. Therefore, at least a part of each of the fundamental wave and the second harmonic wave incident on the second wavelength conversion element 27 is emitted without being converted by the second wavelength conversion element 27. Therefore, when the fundamental wave and the second harmonic are incident on the second wavelength conversion element 27, the laser beam in which the fundamental wave, the second harmonic, and the third harmonic are mixed is emitted.

In this embodiment, LBO (LiB ₃ O ₃ ) was used as the second wavelength conversion element 27. However, the present invention is not limited to this example, and various types of optical materials such as KTP (KTiPO ₄ ), organic nonlinear optical materials, and other inorganic nonlinear optical materials can be used as the first wavelength conversion element 26.

-Laser light separator 28-
The laser light separation unit 28 is housed in the wavelength conversion unit 2B, and is configured to separate the third harmonic from the resonance optical path of the laser light and emit it from the laser light output unit 2.

As shown in FIGS. 5 to 6, the laser light separation unit 28 in this embodiment is composed of a plurality of optical components, and is for extracting the second and third harmonics from the laser light by the laser light separation unit 28. The first separator (output mirror) 28a of the above, the concave lens 28b for adjusting the beam diameter of the laser beam composed of the second and third harmonics, and the second separator (reflection) for extracting the third harmonic from the laser beam. The configuration may include a mirror) 28c and a damping section 28d for dampening an unnecessary second harmonic (see also FIG. 9).

The first separator 28a is a so-called beam splitter, and is configured to transmit a fundamental wave while reflecting a second harmonic and a third harmonic. The first separator 28a is arranged so as to intersect the optical axis of the resonance optical path connecting the first reflection mirror 21 and the second reflection mirror 22, and has a posture inclined by approximately 45 degrees with respect to the optical axis. Has been done.

The concave lens 28b is configured to increase the beam diameter of the transmitted laser light by transmitting the laser light reflected by the first separator 28a, that is, the laser light separated from the resonance optical path. In this configuration example, the concave lens 28b is interposed between the first separator 28a and the second separator 28c, but is not limited to such an arrangement. For example, it may be arranged so that the laser beam after passing through the second separator 28c passes through.

The second separator 28c is a beam splitter similar to the first separator 28a, and is configured to transmit the second harmonic while reflecting the third harmonic. The second separator 28c is arranged so as to intersect the optical axis of the laser beam that has passed through the concave lens 28b, and is in a posture inclined by approximately 45 degrees with respect to the optical axis.

The attenuation unit 28d is configured to attenuate the laser beam transmitted through the second separator 28c, that is, the second harmonic generation. In this configuration example, the attenuation unit 28d attenuates the second harmonic generation by multiple reflections.

-Beam expander 29-
The beam expander 29 is composed of a plurality of optical lenses, and is suitable for incident on the third harmonic reflected by the second separator 28c and incident on the Z scanner 33 described later. It is configured to adjust the beam diameter of.

Further, in this configuration example, the second separator 28c, the two optical lenses forming the beam expander 29, and the output window portion 16 of the housing 20 are formed by the third harmonic reflected by the second separator 28c. They are arranged in this order on the optical path. These components are arranged slightly above the housing 10 in the vertical direction.

Although details are omitted, a beam sampler for separating a part of the laser beam is arranged between the beam expander 29 and the output window portion 16. A power monitor for detecting the output of the laser beam is provided downstream of the beam sampler, and the detection signal is output to the control unit 101 of the marker controller 100.

If it is not necessary to expand the beam diameter of the laser beam, the beam expander 29 may be omitted.

(Laser resonance)
As shown in FIGS. 5 to 6, the laser excitation light incident from the incident portion 24 passes through the folded mirror 24b in the Q-switch accommodating portion 2A and is incident on one end surface of the laser medium 25. Then, the fundamental wave emitted based on the laser excitation light passes through the transmission window unit 15 and is incident on the wavelength conversion unit 2B.

Subsequently, the fundamental wave incident on the wavelength conversion unit 2B passes through the first separator 28a, passes through the second wavelength conversion element 27, and is incident on the first wavelength conversion element 26. In the first wavelength conversion element 26, a part of the fundamental wave is converted into the second harmonic. Therefore, the first wavelength conversion element 26 emits a laser beam in which a fundamental wave and a second harmonic are mixed. The laser beam is totally reflected by the second reflection mirror and follows the optical path up to this point in the opposite direction.

Then, the laser beam incident on the first wavelength conversion element 26 again is incident on the second wavelength conversion element 27 after the second harmonic is generated again in the first wavelength conversion element 26. In the second wavelength conversion element 27, a part of the fundamental wave and the second harmonic is converted into the third harmonic. Therefore, the second wavelength conversion element 27 emits a laser beam in which the fundamental wave, the second harmonic, and the third harmonic are mixed. When the laser beam reaches the first separator 28a, the second harmonic and the third harmonic are reflected by the first separator 28a and separated from the resonant optical path, while the fundamental wave passes through the first separator 28a. To the transparent window portion 15.

Here, the second and third harmonics separated by the first separator 28a pass through the concave lens 28b and then reach the second separator 28c. The second separator 28c transmits the second harmonic and guides it to the attenuation portion 28d, while reflecting the third harmonic and guiding it to the beam expander 29. The third harmonic guided to the beam expander 29 is emitted as UV laser light through the output window portion 16 after the beam diameter is adjusted.

On the other hand, the fundamental wave that has passed through the first separator 28a and reached the transmission window portion 15 passes through the transmission window portion 15 and then reaches the folded mirror 24b via the laser medium 25. As described above, the folded mirror 24b reflects the fundamental wave propagated in this way and guides it to the Q-switch 23. The fundamental wave guided to the Q-switch 23 is deflected and separated from the resonant optical path when the Q-switch 23 is in the ON state. As described above, in this case, a continuous wave (CW) having zero output or extremely low output oscillates.

On the other hand, when the Q switch 23 is in the off state, it passes through the Q switch 23 and reaches the first reflection mirror 21. The fundamental wave reflected by the first reflection mirror 21 passes through the Q switch 23 again, is reflected by the folded mirror 24b, and is incident on the laser medium 25. The fundamental wave incident on the laser medium 25 will be incident on the wavelength conversion unit 2B again.

By repeating such a process, the laser beam is amplified as a result of multiple reflections of the fundamental wave between the first reflection mirror 21 and the second reflection mirror 22, which is in phase with the on / off control of the Q switch 23. In addition, the high-power UV laser will intermittently pulse oscillate.

(Structure related to temperature control of optical components)
By the way, in order to secure the conversion efficiency of the laser light by the first wavelength conversion element 26 and the second wavelength conversion element 27, it is required to appropriately control the temperature of the laser light.

Therefore, the laser light output unit 2 receives the first and second wavelength conversion elements 26, 27 based on the control signal input from the marker controller 100 so that the first and second wavelength conversion elements 26, 27 are maintained at a predetermined target temperature. It is provided with an element-side temperature control unit that adjusts the temperature of the wavelength conversion elements 26 and 27.

Specifically, the element-side temperature control unit includes a first temperature control unit 5 capable of adjusting the temperature of the first wavelength conversion element 26 and a second temperature control unit 6 capable of adjusting the temperature of the second wavelength conversion element 27. , Consists of. Both the first temperature control unit 5 and the second temperature control unit 6 are arranged outside the housing 20 (that is, outside the internal space surrounded by the housing 20).

The first temperature control unit 5 and the second temperature control unit 6 are configured to be controlled independently of each other. That is, each of the first temperature control unit 5 and the second temperature control unit 6 is individually provided with a member for adjusting the temperature, such as a Pelche element, and a separate control signal (Pelche) is provided for such a member. When an element is used, a current (control current) can be sent.

In particular, in this embodiment, the first wavelength conversion element 26 and the first temperature control unit 5 are unitized, while the second wavelength conversion element 27 and the second temperature control unit 6 are unitized. .. In the following description, the former is referred to as "SHG unit", while the latter is referred to as "THG unit".

Further, the temperature of the laser light separation unit 28 is adjusted from the viewpoint of reducing the temperature difference between the first and second wavelength conversion elements 26 and 27 and the first and second separators 28a and 28c in the laser light separation unit 28. It is also required.

Therefore, the laser light output unit 2 is set within a predetermined temperature range defined according to the target temperatures of the first and second wavelength conversion elements 26 and 27 based on the control signal input from the marker controller 100. The laser light separation unit 28 includes an output mirror temperature control unit 7 that adjusts the temperature of at least the first separator 28a.

Specifically, in this embodiment, the output mirror temperature control unit 7 collectively adjusts the temperatures of the first separator 28a, the concave lens 28b, and the second separator 28c among the optical components constituting the laser beam separation unit 28. It is configured in. In addition, these temperatures may be adjusted individually.

In particular, in this embodiment, the laser light separation unit 28 and the output mirror temperature control unit 7 are unitized. In the following description, this unit will be referred to as a "laser light separation unit".

Hereinafter, the configurations of the SHG unit, the THG unit, and the laser light separation unit will be described in order.

-SHG unit-
FIG. 7 is a cross-sectional view illustrating the configuration of the SHG unit. As shown in the figure, this SHG unit has a pelche base 51 supported on a base plate 12 and a crystal holding member 53 supported by the pelche base 51 via a plurality of positioning pins (not shown). It is composed of a first wavelength conversion element 26 mounted on the crystal holding member 53 and a crystal pressing member 54 for fixing the first wavelength conversion element 26 to the crystal holding member 53. The first temperature control unit 5 is sandwiched between the Pelche base 51 and the crystal holding member 53. Further, the harness 56 connected to the first temperature control portion 5 is connected from the outside of the housing 20 via the through holes 51a and 12a provided in the Pelche base 51 and the base plate 12.

In the description related to the SHG unit, "top" corresponds to "top" on the paper of FIG. 7. The upper side here is equal to the above-mentioned one side in the lateral direction.

The Pelche base 51 is formed in a rectangular plate shape, and is fixed on the base plate 12 by screws or the like. A first temperature control unit 5 composed of a Pelche element is placed on the upper surface of the Pelche base 51. The plurality of positioning pins described above are also inserted in the upper surface of the Pelche base 51, and the crystal holding member 53 is supported via these positioning pins.

By using the support structure via the positioning pin in this way, the contact area between the Pelche base 51 and the crystal holding member 53 is reduced, which is advantageous in suppressing heat transfer between the two members.

The crystal holding member 53 is formed in a plate shape having a size smaller than that of the pelche base 51, and is fixed to the pelche base 51 via a positioning pin. A resin-made sealing member 57 such as an O-ring is sandwiched between the lower surface of the crystal holding member 53 and the upper surface of the Pelche base 51. Although details are omitted, the seal member 57 may be shaped so as to surround the first temperature control portion 5 from the side.

The space surrounded by the lower surface of the crystal holding member 53, the upper surface of the Pelche base 51, and the sealing member 57 is connected to the outside of the housing 20 through the through hole 12a provided in the base plate 12 and is surrounded by the housing 20. The space is airtightly isolated by sandwiching the seal member 57.

The first temperature control unit 5 is arranged in such an isolated space. Specifically, the first temperature control unit 5 according to the present embodiment is composed of a substantially thin plate-shaped Pelche element, and is sandwiched between the upper surface of the Pelche base 51 and the crystal holding member 53. A harness 56 for supplying an electric current to the Pelche element is connected to the side portion of the first temperature control unit 5. As described above, the harness 56 is extended to the outside through the through hole 12a of the base plate 12.

Further, a temperature sensor 58 for detecting the temperature of the first temperature control unit 5 is inserted in the crystal holding member 53. The temperature sensor 58 is formed in a substantially rod shape, and is inserted upward from the lower surface of the crystal holding member 53. Although details are omitted, the wiring for outputting the detection signal by the temperature sensor 58 is extended to the outside through the through hole 12a of the base plate 12 like the harness 56 connected to the first temperature control unit 5. It has been.

Further, the crystal holding member 53 has a cross-sectional shape in which a substantially L-shape is inverted left and right, and the first wavelength conversion element 26 is placed on the upper surface near the corner portion of the L-shape.

The crystal pressing member 54 is fixed to the upper surface of the crystal holding member 53, and holds the first wavelength conversion element 26 together with the crystal holding member 53.

When a current is supplied to the first temperature control section 5, the first temperature control section 5 (specifically, the surface of the first temperature control section 5 on the crystal holding member 53 side) changes according to the magnitude of the current. I have a fever. The heat is transferred to the first wavelength conversion element 26 via the crystal holding member 53. Then, the first wavelength conversion element 26 is adjusted so as to maintain a predetermined target temperature T1. The target temperature T1 can be appropriately changed depending on the design of the optical system and the like, but in this embodiment, it is set within the range of 50-100 ° C.

Further, the space in which the first temperature control unit 5, the harness 56 connected to the first temperature control unit 5, and the temperature sensor 58 are housed is hermetically isolated from the space surrounded by the housing 20. ing. Even if the synthetic resin or the like is vaporized in these parts to generate impurities, it is possible to prevent such impurities from entering the space surrounded by the housing 20, that is, the inside of the wavelength conversion unit 2B. .. This is advantageous in suppressing the adhesion of impurities to various optical components such as the first wavelength conversion element 26 and the first separator 28a.

-THG unit-
FIG. 8 is a cross-sectional view illustrating the configuration of the THG unit. The THG unit is configured in substantially the same manner as the SHG unit except for a part of the configuration. That is, as shown in FIG. 8, the THG unit is mounted on the pelche base 61 supported on the base plate 12, the crystal holding member 63 supported on the pelche base 61, and the crystal holding member 63. It is composed of a second wavelength conversion element 27 placed and a crystal pressing member 64 for fixing the second wavelength conversion element 27 to the crystal holding member 63. Here, the second temperature control unit 6 is sandwiched between the Pelche base 61 and the crystal holding member 63. Further, the harness 66 connected to the second temperature control portion 6 is connected from the outside of the housing 20 via the through hole 61a provided in the Pelche base 61.

The second temperature control unit 6 is arranged in such an isolated space. Specifically, the second temperature control unit 6 according to the present embodiment is composed of a substantially thin plate-shaped Pelche element, and is sandwiched between the upper surface of the Pelche base 61 and the crystal holding member 63. A harness 66 for supplying an electric current to the Pelche element is connected to the side portion of the second temperature control unit 6. The harness 66 is extended to the outside through a through hole 61a provided in the Pelche base 61.

Further, a resin sealing member 67 such as an O-ring is sandwiched between the lower surface of the crystal holding member 63 and the upper surface of the Pelche base 61. Similar to the seal member 57 in the SHG unit, the seal member 67 can be shaped so as to surround the second temperature control portion 6 from the side.

Further, a temperature sensor 68 for detecting the temperature of the second temperature control unit 6 is inserted in the crystal holding member 63. Although details are omitted, the wiring for outputting the detection signal by the temperature sensor 68 goes to the outside through the through hole 61a of the Pelche base 61 like the harness 66 connected to the second temperature control unit 6. It is being fed out.

When a current is supplied to the second temperature control section 6, the second temperature control section 6 (specifically, the surface of the second temperature control section 6 on the crystal holding member 63 side) changes according to the magnitude of the current. I have a fever. The heat is transferred to the second wavelength conversion element 27 via the crystal holding member 63. Then, the second wavelength conversion element 27 is adjusted so as to maintain a predetermined target temperature T2. The target temperature T2 can be appropriately changed according to the design of the optical system and the like, but in this embodiment, it is set to be substantially the same as the target temperature T1 of the first wavelength conversion element 26.

Further, the space in which the second temperature control unit 6, the harness 66 connected to the second temperature control unit 6, and the temperature sensor 68 are housed is hermetically isolated from the space surrounded by the housing 20. ing. Even if the synthetic resin or the like is vaporized in these parts to generate impurities, it is possible to prevent such impurities from entering the space surrounded by the housing 20, that is, the inside of the wavelength conversion unit 2B. .. This is advantageous in suppressing the adhesion of impurities to various optical components such as the second wavelength conversion element 27 and the first separator 28a.

-Laser light separation unit-
FIG. 9 is a perspective view illustrating the configuration of the laser light separation unit, and FIG. 10 is a perspective view showing the configuration exemplified in FIG. 9 with some omissions. The laser light separation unit shown in FIGS. 9 to 10 includes a separator base (base plate) 71 extending substantially parallel to the base plate 12, and the separator base 71 provides the above-mentioned first separator 28a, concave lens 28b, and first. 2 The separator 28c and the damping portion 28d are supported.

The separator base 71 shown in FIGS. 9 to 10 is formed in a substantially rectangular plate shape extending along the vertical direction of the housing 10, and is housed in the internal space surrounded by the housing 20. The separator base 71 is integrally provided with respect to an inner wall 13a that partitions the internal space surrounded by the housing 20, and extends from the inner wall 13a toward the inside of the internal space.

That is, as described above, the internal space of the housing 20 is partitioned by the base plate 12, the side wall portion 13, and the lid portion 14. The separator base 71 is arranged inside the corner portion where the inner wall 13a of the side wall portion 13 and the other inner wall 13b orthogonal to the inner wall 13a intersect, and while maintaining a posture substantially parallel to the base plate 12. It extends from the inner wall 13a in a direction substantially perpendicular to the plane and substantially parallel to the other inner wall 13b.

Further, at one end of the separator base 71 in the longitudinal direction, a first connection portion 71a integrated with one inner wall 13a of the housing 20 is provided. As can be seen from FIGS. 9 to 10, the first connection portion 71a extends in the longitudinal direction of the separator base 71 and can support the first separator 28a, the concave lens 28b, the second separator 28c, and the attenuation portion 28d. It is formed narrower than the part to be.

On the other hand, at the other end of the separator base 71 in the longitudinal direction, a second connecting portion 71b integrated with the other inner wall 13b of the housing 20 is provided. As can be seen from FIGS. 9 to 10, the second connecting portion 71b extends in the lateral direction of the separator base 71, and is formed to be narrower than the first connecting portion 71a.

As described above, the separator base 71 is configured to be integrally supported with the inner walls 13a and 13b constituting the housing 20 by providing the connecting portions 71a and 71b at one end and the other end in the longitudinal direction. ..

Further, a plurality of cylindrical and plurality of positioning pins are interposed between the separator base 71 and the base plate 12. By interposing a positioning pin, it is possible to suppress thermal coupling between the separator base 71 and the base plate 12.

As shown in FIG. 10, the separator base 71 is provided with a first insertion hole (insertion hole) 72 into which the output mirror temperature control portion 7 can be inserted. The first insertion hole 72 extends in a narrow hole shape along the longitudinal direction of the separator base 71, and opens on the outer surface of the side wall portion 13 via the first connection portion 71a. The output mirror temperature control portion 7 is formed in a rod shape and is inserted through the opening thereof. The end portion of the first insertion hole 72 extends to the vicinity of the other end portion of the separator base 71, while the start end portion thereof leads to the external space of the housing 20.

In this embodiment, the output mirror temperature control unit 7 is composed of a heating wire such as a nichrome wire, is inserted into the first insertion hole 72, and generates heat according to a current supplied from the outside. It has become like.

Further, as shown in FIG. 10, the separator base 71 is also provided with a second insertion hole 73 into which the temperature sensor 75 can be inserted. Like the first insertion hole 72, the second insertion hole 73 extends in a small hole shape along the longitudinal direction of the separator base 71, and opens on the outer surface of the side wall portion 13 via the first connection portion 71a. is doing. The end portion of the second insertion hole 73 extends to substantially the central portion in the longitudinal direction of the separator base 71, while the start end portion thereof leads to the external space of the housing 20.

In this embodiment, the temperature sensor 75 is formed in an elongated rod shape, is inserted into the second insertion hole 73, and outputs a detection signal indicating the detection result.

When a current is supplied to the output mirror temperature control unit 7, the output mirror temperature control unit 7 generates heat according to the magnitude of the current. The heat is transferred to the first separator 28a, the concave lens 28b, the second separator 28c and the attenuation portion 28d via the separator base 71. Then, the temperature of each optical component is adjusted so as to fall within the predetermined temperature range T3.

Here, the temperature range T3 that is the control target in the output mirror temperature control unit 7 is defined according to the target temperatures T1 and T2 in the first and second temperature control units 5 and 6. When the target temperatures T1 and T2 are the same, the temperature range T3 may be preferably in the range of ± 10 ° C, more preferably ± 5 ° C with respect to the target temperature T1.

<Suppression of laser light output reduction (laser light output unit 2)>
Generally, from the viewpoint of suppressing a decrease in the output of laser light, it is required to prevent impurities from adhering to various optical components. As shown in FIGS. 11 to 12, such impurities are collected in the laser beam by the so-called photodust collection effect, and are impurities (contaminated) with respect to the optical components arranged on the optical axis of the laser beam. May adhere and solidify. As a result, transmission loss and reflection loss of laser light occur, which may result in a decrease in output.

On the other hand, in this embodiment, as shown in FIGS. 5 to 6, the first and second wavelength conversion elements 26 and 27 are accommodated separately from the Q-switch accommodating portion 2A accommodating the Q-switch 23. The wavelength conversion unit 2B is provided, and the resonator for amplifying the laser beam is configured by the first reflection mirror 21 housed in the Q-switch accommodating unit 2A and the second reflection mirror 22 housed in the wavelength conversion unit 2B. did. Since the wavelength conversion unit 2B has an internal space independent of the Q-switch accommodating unit 2A and can airtightly seal the first and second wavelength conversion elements 26 and 27, it is tentatively generated in the Q-switch 23. Even if the impurities are released into the air inside the housing 10, it is possible to prevent them from adhering to the first and second wavelength conversion elements 26 and 27. As a result, it is possible to suppress a decrease in the output of the laser beam.

Further, as shown in FIG. 9, not only the temperatures of the first and second wavelength conversion elements 26 and 27 can be adjusted, but also the temperature of the first separator 28a as an output mirror can be adjusted. By defining the target temperature range T3 of the first separator 28a according to the target temperatures T1 and T2 of the first and second wavelength conversion elements 26 and 27, the wavelength conversion elements 26 and 27 and the first separator are defined. The temperature difference between 28a and 28a can be reduced. As a result, it is possible to suppress the adhesion of impurities to the first separator 2-a, and by extension, it is possible to suppress a decrease in the output of the laser beam.

-Example of modification related to suppression of output decrease-
In the above embodiment, the first separator 28a as an output mirror and the first and second reflection mirrors 21 and 22 are configured as separate optical components, but the configuration is not limited to that. For example, one of the first and second reflection mirrors 21 and 22 may be a half mirror that transmits the third harmonic.

Further, the configuration of the resonator is not limited to the intracavity type (a method in which the wavelength conversion element is arranged inside the resonator). For example, when the first reflection mirror 21 is arranged in the wavelength conversion unit 2B, it can be configured as an extra cavity type (a method in which the wavelength conversion element is arranged outside the resonator).

(Modification example of configuration related to temperature control of optical components)
In this embodiment, the configuration including the first and second temperature control units 5 and 6 and the output mirror temperature control unit 7 has been illustrated, but the configuration is not limited to this. For example, the laser light output unit 2 adjusts the temperature of the beam expander 29 so as to fall within the predetermined temperature range T4 defined according to the target temperature T1 based on the control signal from the control unit 101. It may be provided with a temperature control unit. The temperature range T4 here may be preferably in a range of ± 10 ° C., more preferably ± 5 ° C. with respect to the target temperature T1, similarly to the temperature range T3 related to the output mirror temperature control unit 7.

(Laser light guide 3)
The laser light guide unit 3 is configured to form an optical path for guiding the laser light (UV laser light) emitted from the laser light output unit 2 to the laser light scanning unit 4 by bending the laser light (UV laser light).

FIG. 13 is a front view illustrating a state in which the front side exterior cover 17 (see FIGS. 2 to 4) is removed from the marker head 1, and FIG. 14 is a front view illustrating the configuration illustrated in FIG. 13 from an oblique front. FIG. 15 is a diagram showing a configuration illustrated in FIG. 13 with a part omitted. 16 is a diagram illustrating a state in which the Z chamber cover 31 is removed from the marker head 1, and FIG. 17 is a cross-sectional view illustrating a configuration around a guide light source (guide light emitting device) 35. FIG. 18 is a diagram illustrating a vertical cross section of the laser light guide unit 3.

The laser beam guide unit 3 includes optical components such as the first and second bend mirrors 32 and 34, and a Z chamber (sealed space) Sz for sealing the Z scanner 33 and the like. The Z chamber Sz is composed of the partition portion 11 described above and the Z chamber cover 31 shown in FIGS. 13 to 15, and wavelength conversion in the laser light output unit 2 via the output window unit 16 described above. It is optically coupled to the portion 2B.

Specifically, the Z chamber cover 31 is formed in a shallow box shape that opens toward the partition portion 11, and by being brought into close contact with the partition portion 11, the first bend mirror 32, the Z scanner 33, and the second bend mirror are brought into close contact with each other. The shape is such that parts such as 34, which should avoid the adhesion of impurities, are surrounded together with the partition portion 11.

Further, a transmission window portion for transmitting predetermined light is provided on the side wall portion of the Z chamber cover 31, and an optical path of UV laser light emitted from the laser light output portion 2 is provided inside the Z chamber Sz. And an optical component arranged so as to intersect the optical path of the transmitted light transmitted through the transmitted window portion are provided.

On the other hand, on the outside of the Z chamber Sz, there is a guide light source (guide light emitting device) 35 capable of emitting a guide light for visualizing the scanning position of the UV laser light, and a camera (imaging device) for imaging the work W. ) 36 and both are arranged. The guide light source 35 emits guide light toward the transmission window portion (first transmission window portion 31c), while the camera 36 captures the work W via the transmission window portion (second transmission window portion 31d). It is designed to receive the light of. That is, the camera 36 is arranged by the second bend mirror 34 so that its image pickup axis (light receiving axis) is coaxial with the optical axis of the UV laser light.

Hereinafter, the configurations related to the laser beam guide unit 3 will be described in order.

-Guide light source 35-
The guide light source 35 is arranged outside the Z chamber Sz, and emits guide light toward the first transmission window portion 31c that can form the transmission window portion. The first transmission window portion 31c is arranged at substantially the same height as the output window portion 16 and the first bend mirror 32, and is located slightly above the central portion in the vertical direction of the housing 10.

As shown in FIG. 15 and the like, the guide light source 35 is arranged at substantially the same height as the first transmission window portion 31c, and emits guide light toward the inside of the housing 10 in the lateral direction. The optical axis of the guide light intersects both the first transmission window portion 31c and the first bend mirror 32.

Therefore, when the guide light is emitted from the guide light source 35 in order to visualize the scanning position of the UV laser light, the guide light reaches the first transmission window portion 31c. The first transmission window portion 31c transmits the guide light and guides the guide light to the first bend mirror 32 as transmitted light. The optical path formed by the transmitted light passes through the first bend mirror 32 and then joins the optical path of the UV laser light reflected by the first bend mirror 32.

Although details are omitted, the circuit board connected to the guide light source 35 is also arranged outside the Z chamber Sz like the guide light source 35.

-First bend mirror 32-
In this embodiment, the first bend mirror 32 capable of constituting the optical component (first optical component) is arranged inside the Z chamber Sz, and as shown in FIGS. 16 to 17, the first mirror 32a And the second mirror 32b.

Of these, the first mirror 32a transmits one of the guide light emitted from the guide light source 35 and the UV laser light output from the laser light output unit 2, and reflects the other. , Each optical path is configured to intersect each other.

Specifically, the first mirror 32a is configured as a so-called half mirror, and while transmitting the guide light emitted from the guide light source 35 and passing through the first transmission window portion 31c from one side, the output window portion 16 A posture in which the UV laser light incident through the mirror (particularly, the UV laser light propagating toward the front side in the front-rear direction as the first direction) is reflected by the other surface on the opposite side to the one surface through which the guide light is transmitted. It is fixed at.

As a result, the optical path of the guide light transmitted through the first mirror 32a and the optical path of the UV laser light reflected by the first mirror 32a merge, and both reach the second mirror 32b.

On the other hand, the second mirror 32b is configured to bend the optical path of the UV laser light so that the optical path is along a second direction (in this example, substantially equal to the vertical direction) substantially orthogonal to the first direction. Has been done.

The UV laser light and the guide light bent by the second mirror 32b propagate downward (specifically, downward in the vertical direction of the housing 10) to the second bend mirror 34 via the Z scanner 33. To reach.

-Z Scanner 33-
Inside the Z chamber Sz, a focal length adjusting mechanism for adjusting the focal length of the UV laser beam output from the laser beam output unit 2 can be arranged. As such a focus adjustment mechanism, in this embodiment, a Z scanner 33 as shown in FIGS. 16 and 18 is provided.

Specifically, the Z scanner 33 is provided in the middle of the optical path from the first bend mirror 32 to the second bend mirror 34 (specifically, near the central portion in the vertical direction of the housing 10), and UV laser light is provided. The focal length of the can be adjusted.

Since the optical path from the first bend mirror 32 to the second bend mirror 34 also propagates the guide light emitted from the guide light source 35, the UV laser light is emitted by operating the Z scanner 33. Not only that, the focal length of the guide light can also be adjusted.

-Camera 36-
The camera 36 is arranged outside the Z chamber Sz like the guide light source 35, and receives the light transmitted through the second transmission window portion 31d that can form the transmission window portion. As shown in FIG. 18, the second transmission window portion 31d is arranged at substantially the same height as the second bend mirror 34, and is located slightly below the central portion in the vertical direction of the housing 10.

As shown in FIGS. 13 to 15, the camera 36 is arranged at substantially the same height as the second transmission window portion 31d, and as described above, receives the light transmitted through the second transmission window portion 31d. .. Specifically, the light is reflected light incident on the laser light guiding unit 3 from the laser light scanning unit 4, propagates toward the front side in the longitudinal direction of the housing 10, and is the second bend mirror 34 and the second. The transmission window portion 31d is sequentially transmitted. After that, it is reflected by the folding mirror 37 for a camera, and the reflected light propagates toward the other side in the lateral direction of the housing 10 to reach the camera 36. The optical axis of this reflected light intersects both the second transmission window portion 31d and the second bend mirror 34.

That is, for example, when the reflected light reflected at the printing point of the work W passes through the second bend mirror 34 and reaches the second transmitting window portion 31d, the second transmitting window portion 31d transmits the reflected light. Then, it is guided to the folded mirror 37 for a camera as transmitted light. The optical path formed by the transmitted light passes through the second bend mirror 34 and intersects the optical path of the UV laser light and the guide light reflected by the second bend mirror 34.

Although details are omitted, the circuit board connected to the camera 36 is also arranged outside the Z chamber Sz like the camera 36.

-Second bend mirror 34-
In this embodiment, the second bend mirror 34 capable of forming the optical component (second optical component) is arranged inside the Z chamber Sz like the first bend mirror 32, and the light received by the camera 36 is received. And the UV laser light output from the laser light output unit 2, one of them is transmitted and the other is reflected so that the respective optical paths intersect each other.

Specifically, the second bend mirror 34 is configured as a so-called half mirror, and while transmitting the light received by the camera 36, the UV laser light reflected by the first bend mirror 32 and passed through the Z scanner 33. And is configured to reflect guide light.

As a result, as described above, the optical path of the light transmitted through the second bend mirror 34 intersects with the optical path of the UV laser light and the guide light reflected by the second bend mirror 34.

Further, the second bend mirror 34 in this embodiment is adapted to direct the optical path to the rear side in the front-rear direction by bending the optical path bent by the first bend mirror 32 again.

Specifically, as shown in FIGS. 16 and 18, the second bend mirror 34 is fixed in a posture in which its reflecting surface is directed diagonally upward and backward, and from the front to the rear as it goes downward from the upper end thereof. It is tilted toward. Therefore, when the laser beam propagating from the upper side to the lower side is reflected by the second bend mirror 34, the propagating direction is directed to the rear.

The UV laser light and the guide light merged in the second bend mirror 34 propagate toward the rear in this way, so that the second space S2 to the second space S2 passes through the downstream window portion 11b provided in the partition portion 11. It is incident on 1 space S1. Then, it reaches from the laser light guide unit 3 to the laser light scanning unit 4.

-Drying agent Dm-
Further, as shown in FIG. 18, a storage chamber Sdz is provided inside the Z chamber Sz, and a desiccant is stored in the storage chamber Sdz. Although details are omitted, this storage chamber Sdz communicates with the Z chamber Sz, and moisture can be removed from the Z chamber Sz by the desiccant contained in the storage chamber Sdz.

<Suppression of laser light output reduction (laser light guide 2)>
As shown in FIGS. 13 and 16, optical components such as the first and second bend mirrors 32 and 34, which are concerned about transmission loss and reflection loss of laser light, are housed in the airtight Z chamber Sz. The guide light source 35 and the camera 36, which may generate impurities, are arranged outside the Z chamber Sz. With such a configuration, even if impurities are generated in the guide light source 35 and the camera 36, it is possible to suppress the adhesion to the optical components. This makes it possible to suppress a decrease in the output of the laser beam.

Further, in general, the so-called photodust collection effect becomes more remarkable as the wavelength of the laser beam becomes shorter. When the light dust collection effect becomes remarkable, there is a further concern about the adhesion of impurities to the optical components. Considering this, application to a device capable of emitting UV laser light, such as the laser processing device L disclosed here, is particularly effective in suppressing a decrease in the output of the laser light.

(Modification example of laser light guide unit 3)
Further, in the above embodiment, the first bend mirror 32, the Z scanner 33, and the second bend mirrors 32, 34 are arranged in the room of the Z room Sz, while the guide light source 35 and the camera 36 are arranged outside the room of the Z room Sz. However, it is not limited to this configuration.

FIG. 19 is a diagram showing first to third modified examples of the laser light guide unit 3. As shown in the figure, the Z scanner 33 may be omitted (first modification), the guide light source 35 may be omitted (second modification), or the camera 36 may be omitted (third modification). May be good.

Further, the configuration of the optical path in the laser light guide unit 3 can be changed as appropriate. FIG. 20 is a diagram showing a fourth modification of the laser light guide unit 3. As shown in the figure, the first and second bend mirrors 34 transmit the laser light emitted from the laser light output unit 2, the light emitted from the guide light source 35, and the light received by the camera 36. May be configured to reflect. Further, in this fourth modification, for example, the guide light source 35 and the first bend mirror 32 may be omitted, or the camera 36 and the second bend mirror 34 may be omitted.

(Laser light scanning unit 4)
The laser light scanning unit 4 is configured to two-dimensionally scan the laser light (UV laser light) emitted from the laser light output unit 2 and guided by the laser light guiding unit 3 on the surface of the work W. There is.

21 to 22 are perspective views illustrating the appearance of the laser beam scanning unit 4, and FIG. 23 is a diagram showing the configuration exemplified in FIG. 22 as viewed from below. Further, FIG. 24 is a vertical sectional view illustrating the configuration of the X scanner 8, and FIG. 25 is a vertical sectional view illustrating the configuration of the Y scanner 9.

In the examples shown in FIGS. 21 to 25, the laser light scanning unit 4 is configured as a so-called two-axis (X-axis, Y-axis) type galvano scanner. That is, the laser light scanning unit 4 includes an X scanner 8 for scanning the laser beam in the X direction, a Y scanner 9 for scanning the laser beam in the Y direction, and a first scanner mirror for the X scanner 8. Scanner housing (accommodation member) 40 for accommodating both the (hereinafter simply referred to as "X mirror") 81 and the second scanner mirror (hereinafter simply referred to as "Y mirror") 91 for the Y scanner 9. And, it consists of.

Here, the scanner housing 40 and the inner bottom surface of the housing 10 constitute a scanner chamber Sxy for accommodating the X mirror 81 and the Y mirror 91. The scanner chamber Sxy passes through an incident window portion 41 provided on one side of the scanner housing 40 with respect to the downstream end portion (specifically, the above-mentioned downstream side window portion 11b) of the laser light guide portion 3. Optically coupled. The scanner chamber Sxy is also optically coupled to the exit window portion 19 provided at the bottom of the housing 10 and thus to the space outside the housing 10 via the opening 43 provided at the bottom of the scanner housing 40. is doing.

Therefore, as shown by the black arrow in FIG. 23, when the UV laser light is incident from the incident window portion 41 into the room of the scanner room Sxy, the UV laser light is reflected by the X mirror 81 and the Y mirror 91 ( In this example, after being reflected by the X mirror 81, it is reflected by the Y mirror 91), and then the light is emitted from the opening 43 to the outside of the scanner chamber Sxy.

At that time, by operating the X mirror 81 and the Y mirror 91 to adjust the angle formed by each mirror and the UV laser beam, for example, the UV laser beam can be two-dimensionally scanned on the surface of the work W. It will be possible.

Further, in order to maintain the reflectance of the laser beam by the X mirror 81 and the Y mirror 91, it is required to maintain the airtightness of the scanner chamber Sxy so that impurities do not enter the chamber.

Further, in order to suppress the scattering of UV laser light caused by dew condensation, it is also required to remove moisture from the scanner chamber Sxy.

Therefore, the laser light scanning unit 4 according to this embodiment is described above by elaborating the support structure of the X scanner 8 and the Y scanner 9 and arranging the desiccant Dm in or outside the scanner chamber Sxy. It is configured to meet such demands.

Hereinafter, the configuration related to the laser light scanning unit 4 will be described with a focus on the correspondence with the above requirements.

-Scanner housing 40-
In this embodiment, the scanner housing 40 has a substantially cubic box shape, and as shown in FIGS. 4 and 21, in the first space S1, the lower surface of the housing 10 and the partition portion 11 are formed. It can be placed around the corners where it intersects. Each surface of the scanner housing 40 is configured to exert various functions for holding the X scanner 8 and emitting UV laser light.

That is, the upper surface of the scanner housing 40 constitutes a first holding portion (holding portion) 40a having an opening into which the first drive motor 82 forming the X scanner 8 can be inserted, and the first holding portion 40a thereof is formed. The outer peripheral surface of the inserted first drive motor 82 is held (see FIG. 24).

On the other hand, the rear surface of the scanner housing 40 constitutes a second holding portion (holding portion) 40b having an opening into which the second drive motor 92 forming the Y scanner 9 can be inserted, and the second holding portion 40b thereof is formed. The outer peripheral surface of the inserted galvano motor 92 is held.

Further, the front surface of the scanner housing 40 (one surface on the left side of the paper surface in FIG. 22) constitutes the above-mentioned incident window portion 41, and the laser light emitted from the laser light output unit 2 and passed through the laser light guide unit 3. Can be incident on the scanner room Sxy.

Further, the lower surface of the scanner housing 40 has the above-mentioned opening 43. The opening 43 includes an opening (emission portion on the housing side) 19a provided at the bottom of the housing 10 and a transmissive member 19b fitted in the opening 19a and capable of transmitting laser light, and an exit window portion. 19 is configured (see FIGS. 24 to 25). The exit window portion 19 can emit the UV laser light incident through the incident window portion 41 to the outside of the housing 10.

The scanner chamber Sxy, which is formed inside the scanner housing 40, is surrounded and sealed by the first holding portion 40a, the second holding portion 40b, the incident window portion 41, and the exit window portion 19, and is enclosed in the chamber. Can accommodate the above-mentioned X mirror 81 and Y mirror 91.

Further, of the other two surfaces forming the scanner housing 40, one surface on the front side of the paper surface in FIG. 22 constitutes the drying penetration portion 42. The drying through portion 42 has a through hole 42a for drying the scanner chamber Sxy with the desiccant Dm, and has a first holding portion 40a, a second holding portion 40b, an incident window portion 41, and an exit window portion 19. It surrounds and seals the scanner room Sxy.

Although the details will be described later, the desiccant Dm disclosed here can be arranged in the room of the scanner room Sxy or in the room of the storage room Sd communicating with the scanner room Sxy as described in detail below.

-X Scanner 8-
The X scanner 8 can rotate the X mirror 81 for scanning the UV laser light in the X direction (first direction) intersecting the optical axis of the UV laser light on the surface of the work W, and the X mirror 81. It comprises a first drive motor 82 that supports it, and a motor holding member 83 that holds the first drive motor 82 by abutting on a part of the outer peripheral surface of the first drive motor 82.

The X mirror 81 is configured as a so-called galvano mirror, and as shown in FIG. 23, it reflects the UV laser light incident from the incident window portion 41 and guides it to the Y mirror 91.

Specifically, the X mirror 81 is a substantially rectangular plate-shaped total reflection mirror, and is housed in the scanner chamber Sxy in a state of being supported by the mirror base 82e. The X mirror 81 operates integrally with the mirror base 82e and, by extension, the rotor 82a of the first drive motor 82, and can rotate around a predetermined rotation axis Ox.

The first drive motor 82 is a galvano motor composed of a DC motor, and is configured to be rotatable around the rotating shaft Ox, and supports the X mirror 81 at one end in the rotating shaft Ox direction, and the rotor 82a thereof. It has a motor case 82b for accommodating the rotor 82b, and bearings 82c and 82d interposed between the rotor 82a and the motor case 82b for axially supporting the rotor 82a with respect to the motor case 82b.

The rotor 82a is configured to rotate by receiving an electric current, and extends in a substantially columnar shape along the rotation axis Ox. One end portion (tip on the scanner chamber Sxy side) in the rotation axis Ox direction protrudes from the motor case 82b and extends to the inside of the scanner chamber Sxy, and is inserted into a substantially cylindrical mirror base portion 82e. On the other hand, the other end portion (the tip on the anti-scanner chamber Sxy side) located on the opposite side to the one end portion is immersed in the inside of the motor case 82b.

The motor case 82b is formed in a substantially cylindrical shape extending in the rotation axis Ox direction and having both ends open in the same direction, and the rotor 82a can be inserted inside the motor case 82b. The tip (open end) of the motor case 82b is inserted into the first holding portion 40a of the scanner housing 40. As a result, the portion of the outer peripheral surface of the motor case 82b inserted into the first holding portion 40a is held by the first holding portion 40a.

Further, the opening end of the motor case 82b on the side opposite to the portion inserted into the first holding portion 40a has a substantially collar-shaped diameter. The portion whose diameter has been expanded in this way is covered with a cap-shaped scanner cover 84 together with the circuit board 85 in a state where the circuit board 85 for the first drive motor 82 is placed.

The bearings 82c and 82d are arranged between the outer peripheral surface of the rotor 82a and the inner peripheral surface of the motor case 82b, and support both ends of the rotor 82a in the longitudinal direction.

The motor holding member 83 is formed in a substantially cylindrical shape extending in the rotation axis Ox direction and having both ends open in the same direction, and the motor case 82b can be inserted inside the motor holding member 83. One open end of the motor holding member 83 can be attached and fixed to the first holding portion 40a of the scanner housing 40 from above.

When the motor holding member 83 is fixed to the first holding portion 40a, the inner peripheral surface of the opening of the first holding portion 40a and the inner peripheral surface of the motor holding member 83 are substantially integrated, and the accommodation space of the motor case 82b becomes available. It is partitioned. When the motor case 82b is inserted from above with respect to the accommodation space, the portion of the motor case 82b whose diameter is expanded in a substantially collar shape abuts on the motor holding member 83 from above to prevent the motor case 82b from coming off. At this time, the outer peripheral surface near the tip of the motor case 82b is inserted into the opening of the first holding portion 40a and is held by the opening, while the outer peripheral surface is located on the anti-X mirror 81 side of the tip. The surface is in contact with the inner peripheral surface of the motor holding member 83. That is, the first holding portion 40a holds the outer peripheral surface located on the X mirror 81 side with respect to the portion in contact with the motor holding member 83.

The scanner cover 84 is formed in a bottomed cylindrical shape, and the tip of the motor holding member 83 on the anti-X mirror 81 side is inserted. The storage space of the circuit board 85 is divided by the scanner cover 84 and the motor case 82b.

The circuit board 85 constitutes an electric circuit for rotationally driving the first drive motor 82, and is fixed to the end face of the motor case 82b on the side where the diameter is expanded in a substantially collar shape. Two harnesses 89 are connected to the circuit board 85 and are extended to the outside through an opening provided in the scanner cover 84 (see FIG. 22). Although not shown, a member for hermetically sealing the inside of the scanner cover 84, such as a resin sealing member, is provided on the peripheral edge of the opening for feeding out the harness 89.

A first seal member (seal member) 86 that regulates the inflow of air into the scanner chamber Sxy is provided on a portion of the outer peripheral surface of the first drive motor 82 that is held by the first holding portion 40a. There is.

Specifically, the first seal member 86 is made of a resin O-ring, and is arranged so as to surround the outer peripheral surface of the portion of the outer peripheral surface of the motor case 82b inserted into the opening of the first holding portion 40a. There is. With such an arrangement, the first seal member 86 is sandwiched between the inner peripheral surface of the opening of the first holding portion 40a and the outer peripheral surface of the motor case 82b.

On the other hand, apart from such a first seal member 86, a second seal member (second seal member) 87 that regulates the inflow of air through a gap between the outer peripheral surface of the rotor 82a and the inner peripheral surface of the motor case 82b. Is provided. The second seal member 87 according to this embodiment is provided on the outer peripheral surface of the first drive motor 82 at a portion inserted into the scanner cover 84.

Specifically, the second seal member 87 is made of a resin O-ring like the first seal member 86, and surrounds the outer peripheral surface of the outer peripheral surface of the motor case 82b, which has a substantially collar-shaped diameter. Is located in. With such an arrangement, the second seal member 87 is sandwiched between the inner peripheral surface near the opening of the scanner cover 84 and the outer peripheral surface of the motor case 82b.

-Y Scanner 9-
The Y scanner 9 can rotate the Y mirror 91 for scanning the UV laser beam in the Y direction (second direction) intersecting the optical axis of the UV laser beam and the Y mirror 91 on the surface of the work W. The second drive motor 92 is provided with a second drive motor 92, and a motor holding member 93 for holding the second drive motor 92 by abutting on a part of the outer peripheral surface of the second drive motor 92.

The Y mirror 91 is configured as a so-called galvano mirror, and as shown in FIG. 23, it reflects the UV laser light reflected by the Y mirror 91 and guides it to the exit window portion 19.

Specifically, the Y mirror 91 is a substantially rectangular plate-shaped total reflection mirror, and is housed in the scanner chamber Sxy in a state of being supported by the mirror base 92e. The Y mirror 91 operates integrally with the mirror base 92e and, by extension, the rotor 92a of the second drive motor 92, and can rotate around a predetermined rotation axis Oy.

The second drive motor 92 is a galvano motor composed of a DC motor, and is configured to be rotatable around the rotating shaft Oy, and supports the Y mirror 91 at one end in the direction of the rotating shaft Oy, and the rotor 92a thereof. It has a motor case 92b for accommodating the rotor 92b, and bearings 92c and 92d interposed between the rotor 92a and the motor case 92b for axially supporting the rotor 92a with respect to the motor case 92b.

The rotor 92a is configured to rotate by receiving an electric current, and extends in a substantially columnar shape along the rotation axis Oy. One end portion in the direction of the rotation axis Oy (the tip on the scanner chamber Sxy side in FIG. 23) protrudes from the motor case 92b and extends to the inside of the scanner chamber Sxy, and is inserted into a substantially cylindrical mirror base 92e. On the other hand, the other end portion (the tip on the anti-scanner chamber Sixy side in FIG. 25) located on the opposite side to the one end portion is immersed in the inside of the motor case 92b.

The motor case 92b extends in the direction of the rotation axis Oy and is formed in a substantially cylindrical shape with both ends open in the same direction, and the rotor 92a can be inserted inside the motor case 92b. The tip (open end) of the motor case 92b is inserted into the second holding portion 40b of the scanner housing 40. As a result, the portion of the outer peripheral surface of the motor case 92b inserted into the second holding portion 40b is held by the second holding portion 40b.

Further, the opening end of the motor case 92b on the side opposite to the portion inserted into the second holding portion 40b has a substantially collar-shaped diameter. The expanded portion is covered with a cap-shaped scanner cover 94 together with the circuit board 95 in a state where the circuit board 95 for the second drive motor 92 is attached.

The bearings 92c and 92d are arranged between the outer peripheral surface of the rotor 92a and the inner peripheral surface of the motor case 92b, and support both ends of the rotor 92a in the longitudinal direction.

The motor holding member 93 is formed in a substantially cylindrical shape extending in the rotation axis Oy direction and having both ends open in the same direction, and the motor case 92b can be inserted inside the motor holding member 93. One open end of the motor holding member 83 can be attached and fixed from the side to the second holding portion 40b of the scanner housing 40.

When the motor holding member 93 is fixed to the second holding portion 40b, the inner peripheral surface of the opening of the second holding portion 40b and the inner peripheral surface of the motor holding member 93 are substantially integrated, and the accommodation space of the motor case 92b becomes available. It is partitioned. When the motor case 92b is inserted from the side into the accommodation space, the portion of the motor case 92b whose diameter is expanded in a substantially collar shape abuts on the motor holding member 93 from the side to prevent it from coming off. At this time, the outer peripheral surface near the tip of the motor case 92b is inserted into the opening of the second holding portion 40b and is held by the opening, while the outer peripheral surface is located on the anti-Y mirror 91 side of the tip. The surface is in contact with the inner peripheral surface of the motor holding member 93. That is, the second holding portion 40b holds the outer peripheral surface located on the Y mirror 91 side with respect to the portion abutting against the motor holding member 93.

The scanner cover 94 is formed in a bottomed cylindrical shape, and the tip of the motor holding member 93 on the anti-Y mirror 91 side is inserted. The storage space of the circuit board 95 is divided by the scanner cover 94 and the motor case 92b.

The circuit board 95 constitutes an electric circuit for rotationally driving the second drive motor 92, and is fixed to the end face on the side of the motor case 92b whose diameter is expanded in a substantially collar shape. Two harnesses 99 are connected to the circuit board 95 and are extended to the outside through an opening provided in the scanner cover 94 (see FIG. 22). Although not shown, a member for hermetically sealing the inside of the scanner cover 94, such as a resin sealing member, is provided on the peripheral edge of the opening for feeding out the harness 99.

Then, on the outer peripheral surface of the second drive motor 92, the portion held by the second holding portion 40b is a first seal member (seal) that regulates the inflow of air into the scanner chamber Sxy, similarly to the X scanner 8. Member) 96 is provided.

Specifically, the first seal member 96 for the Y scanner 9 is generally configured in the same manner as the first seal member 86 for the X scanner 8. That is, the first seal member 96 for the Y scanner 9 is made of a resin O-ring and surrounds the outer peripheral surface of the outer peripheral surface of the motor case 92b, which is inserted into the opening of the second holding portion 40b. Have been placed. With such an arrangement, the first seal member 96 is sandwiched between the inner peripheral surface of the opening of the second holding portion 40b and the outer peripheral surface of the motor case 92b.

On the other hand, apart from the first seal member 96, the second seal member (second seal member) 97 that regulates the inflow of air through the gap between the outer peripheral surface of the rotor 92a and the inner peripheral surface of the motor case 92b 97. Is provided. The second seal member 97 according to this embodiment is provided on the outer peripheral surface of the second drive motor 92 at a portion inserted into the scanner cover 94.

Specifically, the second seal member 97 is made of a resin O-ring like the first seal member 96, and surrounds the outer peripheral surface of the outer peripheral surface of the motor case 92b, which has a substantially collar-shaped diameter. Is located in. With such an arrangement, the second seal member 97 is sandwiched between the inner peripheral surface near the opening of the scanner cover 94 and the outer peripheral surface of the motor case 92b.

<Suppression of laser light output reduction (laser light scanning unit 4)>
As shown in FIGS. 24 to 25, a slight gap may occur in the portions of the outer peripheral surfaces of the first and second drive motors 82 and 92 that are held by the first and second holding portions 40a and 40b. .. Therefore, as shown by arrows F1 to F4 in FIGS. 24 to 25, impurities may invade the scanner chamber Sxy through such a gap.

However, according to the above configuration, by providing the first and second seal members 86, 87, 96, 97 in such a portion, the X mirror 81 and the Y mirror 91 can be provided without using a special component such as a vacuum bearing. Impurities can be prevented from entering the scanner chamber Sxy, which is a space for rotating the bearing. This makes it possible to suppress a decrease in the output of the laser beam while suppressing the manufacturing cost.

-A variant of the galvano scanner-
In the above embodiment, the configuration in which the first seal member 86, 96 and the second seal member 87, 97 are provided in each of the X scanner 8 and the Y scanner 9 has been described, but the configuration of each seal member is as follows. It can be transformed.

Hereinafter, a modification of the Y scanner will be described, but the modification disclosed here can also be applied to the X scanner.

FIG. 26 is a diagram corresponding to FIG. 25 showing a first modification of the Y scanner. As in the Y scanner 9'shown in FIG. 26, the gap between the second holding portion 40b and the motor case 92b can be sealed with the resin as the first sealing member 96'.

FIG. 27 is a diagram corresponding to FIG. 25 showing a second modification of the Y scanner. As in the Y scanner 9'shown in FIG. 27, the gap between the rotor 92a and the motor case 92b may be sealed with a resin as a second sealing member without providing a scanner cover.

Further, in the above embodiment, the configuration in which both the X scanner 8 and the Y scanner 9 are attached to the scanner housing 40 has been described, but at least the above-mentioned first seal members 86, 96 and the second seal member 87, The use of 97 is not limited to such a configuration.

For example, at least one of the X scanner 8 and the Y scanner 9 may be attached to the scanner housing 40, and the first seal member may be applied to one of them.

-Modification example of scanner room Sxy-
In the above embodiment, the scanner chamber Sxy was surrounded by the first holding portion 40a, the second holding portion 40b, the incident window portion 41, the exit window portion 19, and the drying penetration portion 42. Here, the exit window portion 19 is an opening 43 provided on the lower surface of the scanner housing 40, an opening 19a provided on the bottom of the housing 10, and a transmissive member 19b fitted in the opening 19a. It was configured by, but is not limited to this configuration.

FIG. 28 is a diagram showing a modified example of the scanner housing. As shown in FIG. 28, the emission window portion 19 may be configured by fitting the transmissive member 43a into the opening 43 of the scanner housing 40.

-Accommodation room Sd-
As described above, the desiccant Dm that can be exchanged from the outside can be arranged in the scanner chamber Sxy or the storage chamber Sd that communicates with the scanner chamber Sxy. In the embodiment illustrated below, the case where the storage chamber Sd is configured outside the scanner chamber Sxy will be described, but as in the modification described later, a space for arranging the desiccant Dm inside the scanner chamber Sxy ( Hereinafter, such a space may be designated by the reference numeral "Sd'").

FIG. 29 is a perspective view illustrating the arrangement of the desiccant housing 45, and FIG. 30 is a vertical sectional view illustrating the configuration of the storage chamber Sd and the scanner chamber Sxy. Further, FIG. 31 is a perspective view illustrating the appearance of the desiccant housing 45, and FIG. 32 is an explanatory view illustrating the sealing structure by the replacement lid portion 18.

In this configuration example, the accommodation chamber Sd and the scanner chamber Sxy are adjacent to each other in the housing 10, and communicate with the scanner chamber Sxy through the through hole 42a in the drying penetration portion 42 described above. The storage chamber Sd is configured to replace the desiccant Dm through an opening (replacement opening 45c described later) separate from the through hole 42a, and is opened by the replacement lid portion 18. ing.

That is, as shown in FIG. 30, the scanner chamber Sxy is interposed between the left side surface of the housing 10 (the left side surface of the paper surface in FIG. 30) and the base plate 12, and the storage chamber Sd is such a scanner chamber Sxy. And the left side surface of the housing 10.

Specifically, the storage chamber Sd is partitioned by a desiccant housing 45 capable of accommodating the desiccant Dm. The desiccant housing 45 is formed in a rectangular shallow box shape, and is arranged at a corner portion where the lower surface of the housing 10 and the partition portion 11 intersect in the first space S1.

A through hole 45b as shown in FIG. 30 is opened on the rear surface of the desiccant housing 45 (the other surface in the lateral direction). When both the desiccant housing 45 and the scanner housing 40 are fixed to the housing 10, the through hole 45b and the through hole 42a of the scanner housing 40 are connected to each other to form a storage chamber Sd. Communication with the scanner room Sxy comes to be made.

A filter 42b is attached to the through hole 42a of the scanner housing 40, and it is possible to prevent impurities generated from the desiccant Dm from entering the scanner chamber Sxy from the storage chamber Sd.

Further, as shown in FIG. 22, the drying through portion 42 of the scanner housing 40 has a seal member 42c configured to cover the periphery of the through hole 42a, and the through hole 42a of the scanner housing 40 has a seal member 42c. And the gap between the desiccant housing 45 and the through hole 45b can be sealed.

On the other hand, the front surface of the desiccant housing 45 is hermetically sealed by a replacement lid 18 as shown in FIG. 32. Specifically, a replacement opening 45c leading to the inside of the storage chamber Sd is perforated on the front surface of the desiccant housing 45 (one side surface in the lateral direction). The replacement opening 45c is an opening having a substantially circular cross section, and a part of the inner peripheral surface (inner surface) thereof is threaded into a female screw shape.

Then, the replacement lid portion 18 has an insertion portion 18a capable of closing the replacement opening portion 45c by inserting the replacement lid portion 18 into the replacement opening portion 45c. Specifically, the insertion portion 18a is formed in a substantially cylindrical shape, and a part of the outer peripheral surface (outer surface) thereof is formed so as to be screwed to the threaded portion in the replacement opening 45c. A seal member 18b is provided on the outer surface of the insertion portion 18a located on the tip end side in the insertion direction (see the arrow Di in FIG. 32) with respect to the screwable portion.

Here, the seal member 18b is made of a resin O-ring and is fitted into a circumferential groove provided on the outer surface of the insertion portion 18a, and the replacement lid portion 18 is removed from the replacement opening 45c. In that case, the diameter is slightly larger than the inner diameter of the replacement opening 45c. Therefore, when the insertion portion 18a of the replacement lid portion 18 is inserted into the replacement opening 45c, the seal member 18b is outwardly orthogonal to the insertion direction Di (see the black arrow in FIG. 32). By swelling toward, it comes into close contact with the inner surface of the replacement opening 45c.

The desiccant Dm is made by packing a substance that can adsorb moisture in the air, such as silica gel and lime, and not only removes moisture from the room of the storage room Sd, but also removes moisture from the room of the storage room Sd, and also of the scanner room Sxy through the drying penetration portion 42. Moisture can also be removed from the room. Further, when the moisture removing performance of the desiccant Dm deteriorates as a result of using the desiccant for a predetermined period of time, the desiccant Dm can be replaced from the outside by removing the replacement lid portion 18.

<Suppression of laser light output reduction due to dew condensation>
As shown in FIG. 22, by forming one surface of the scanner housing 40 as a through hole 42 for drying, the accommodation chamber Sd and the scanner chamber Sxy can be communicated with each other through the through hole 42a, or through the through hole 42a. It is possible to put in and take out the desiccant Dm. This makes it possible to remove moisture from the scanner chamber Sxy and, by extension, suppress a decrease in the output of the laser beam due to dew condensation.

-Modifications related to the storage of desiccant Dm-
In the above-described embodiment, the configuration in which the storage chamber Sd is provided outside the scanner room Sxy and the desiccant Dm is stored in the storage room Sd has been described. In this embodiment, the drying penetration portion 42 surrounding the scanner chamber Sxy is provided to communicate the scanner chamber Sxy and the storage chamber Sd, but the configuration of the storage chamber Sd and the drying penetration portion 42 is different. , Not limited to this.

For example, a space corresponding to the accommodation chamber Sd may be provided in the scanner chamber Sxy. In this case, the through hole 42a in the drying through portion 42 functions as an entrance / exit for exchanging the desiccant Dm.

Further, even when the storage chamber Sd is provided outside the scanner room Sxy, the storage method of the desiccant Dm can be appropriately changed by, for example, devising the structure of the replacement lid portion.

FIG. 33 is a diagram showing a modified example of the replacement lid portion 18'. As shown in FIG. 33, the replacement lid portion 18'itself may be used as a desiccant housing for partitioning the storage chamber Sd. In this case, the desiccant Dm can be attached to and detached from the housing together with the replacement lid portion 18'.

Further, any one of the first holding portion 40a, the second holding portion 40b, the incident window portion 41, and the exit window portion 19 configured to surround the scanner chamber Sxy may be used as the drying penetration portion.

FIG. 34 is a diagram showing a modified example around the scanner chamber Sxy. As shown in FIG. 34, a space Sd'corresponding to a storage chamber may be provided in the scanner chamber Sxy, and the exit window portion 19 may be configured to be openable and closable from the outside.

<Control of the marker head 1 by the marker controller 100>
Hereinafter, among the controls of the marker head 1 by the marker controller 100, the control related to the output adjustment of the laser beam and the control performed when the laser processing apparatus L is stopped will be described in order.

(Output adjustment according to pulse frequency)
Generally, when laser processing is performed, the target output of laser light may be changed in order to adjust, for example, the color development of printing in laser marking, the cutting speed in laser cutting, and the like.

In this case, as a method for achieving the changed target output, it is conceivable to adjust the output of the fundamental wave by adjusting the drive current supplied to the excitation light source 111.

That is, for example, when the current value of the drive current is reduced, the output of the excitation light generated by the excitation light source 111 is reduced, and the output of the fundamental wave generated by the laser medium 25 is also reduced. This makes it possible to reduce the output of the laser beam generated based on the fundamental wave.

In this way, since there is a positive correlation between the magnitude of the drive current and the output of the laser beam, the target output of the laser beam and the excitation light source 111, as in the table storage unit 114 described above, can be reached. By storing in advance the correspondence with the drive current to be supplied, it is possible to determine the drive current corresponding to the output desired by the user by using the correspondence.

By the way, in the case of the configuration provided with the Q switch 23 as in the laser light output unit 2 according to this embodiment, the control parameter of the laser light is the number of times the Q switch 23 is switched on and off per second, that is, the unit time. There is a Q-switched frequency (the above-mentioned pulse frequency) indicating the number of times a pulse is oscillated.

However, if the Q-switch frequency is changed, the period during which the Q-switch 23 is turned on will increase or decrease. As a result, the state of the population inversion in the laser medium 25 fluctuates, so that the number of photons induced and emitted when the excitation light is incident on the laser medium 25 increases or decreases, and the output of the laser light fluctuates. become. Therefore, simply determining the drive current as described above is not sufficient to set an appropriate output.

In addition, in general, the relationship between the output of the laser beam and the Q-switch frequency changes according to the specifications of the excitation light source 111, the state of the optical components, etc., so that the output due to the Q-switch frequency There are individual differences in fluctuations for each laser processing device.

Therefore, the correspondence storage unit according to this embodiment not only stores the correspondence between the target output of the laser beam and the drive current to be supplied to the excitation light source 111, but also stores the correspondence between the target output and the pulse frequency. Remember in relation to the size of.

Then, the excitation light source drive unit 112 pumps a drive current corresponding to the pulse frequency based on the target output and the pulse frequency stored in the condition setting storage unit 102 and the correspondence relationship stored in the correspondence storage unit. Supply to 111.

In particular, when the table storage unit 114 is used as the correspondence storage unit as in the configuration example shown in FIG. 1, the table storage unit 114 is a current in which the target output and the drive current are linked for each different pulse frequency. The table can be memorized.

In this case, when the user sets both the target output and the pulse frequency as the processing conditions by operating through the operation terminal 200 as the setting unit, the settings are stored in the condition setting storage unit 102. To. Then, when the excitation light source driving unit 112 receives a control signal for each of the target output and the pulse frequency when the laser processing device L is operated, the current table related to the pulse frequency set as the processing condition is received from the table storage unit 114. Is read, and the drive current is determined based on the correspondence between the target output and the drive current.

The number of pulse frequencies when "the current table is stored for each different pulse frequency" may be at least two or more. In this case, the pulse frequencies other than those associated with the current table and stored can be complemented by using the current table related to the pulse frequencies associated with the correspondence.

Further, the control unit 101 may calibrate the correspondence stored in the table storage unit 114 based on the detection result by the power monitor described above. For example, when the target output set as the machining condition is smaller than the measured value of the output detected by the power monitor, the drive current corresponding to the target output is increased. Such calibration may be performed every time the laser processing apparatus L is started, or may be performed at predetermined intervals.

(Specific example of proper use of current table)
FIG. 35 is a diagram illustrating the correspondence between the target output and the drive current, and FIG. 36 is a flowchart illustrating the proper use of the current table according to the pulse frequency. In the example shown in FIG. 35, the percentage is used as the unit of the target output, but it is not limited to this. For example, the electric power (watt) of the laser beam may be used directly.

As shown in FIG. 35, two types of current tables are stored in the table storage unit 114 according to this embodiment. Specifically, the current table is stored with pulse frequencies associated with each of 40 kHz and 100 kHz. As can be seen from FIG. 35, the drive current (LD current) is larger when the pulse frequency is high than when it is low.

As shown in FIG. 36, for example, when the laser processing apparatus L is started to process the work W, the control unit 101 sets a marking pattern via the operation terminal 200, and a target as processing conditions. The print data including the output and the pulse frequency is read (step S101). Of the print data read at this time, the data related to the processing conditions are input from the control unit 101 to the excitation light source drive unit 112.

After that, when the focus is controlled by the Z scanner 33 (step S102), the excitation light source driving unit 112 determines whether or not the pulse frequency set as one of the processing conditions is 40 kHz or less (step S103). Here, when the pulse frequency is 40 kHz or less, the excitation light source drive unit 112 reads the current table stored in association with 40 kHz from the table storage unit 114, and sets the target output of the laser beam as one of the processing conditions. Based on this, the drive current to be supplied to the excitation light source 111 is determined (step S104).

After that, the excitation light source drive unit 112 supplies the drive current determined in step S104 to the excitation light source 111 (step S105). Further, in parallel with the step shown in step S105, the control unit 101 controls the Q switch 23 on and off by outputting the control signal generated based on the pulse frequency read in step S101 to the Q switch 23. .. Further, the control unit 101 controls the X scanner 8 and the Y scanner 9 to execute a two-dimensional scan so as to realize the marking pattern read in step S101.

The processes shown in steps S105 to S107 are shown to be executed in order for convenience, but as described above, the processes are performed in parallel.

On the other hand, when it is determined in step S103 that the pulse frequency exceeds 40 kHz, this time, it is determined whether or not the pulse frequency is 100 kHz or more (step S108). Here, when the pulse frequency is 100 kHz or more, the excitation light source drive unit 112 reads the current table stored in association with 100 kHz from the table storage unit 114, and sets the target output of the laser beam as one of the processing conditions. Based on this, the drive current to be supplied to the excitation light source 111 is determined (step S109). Then, the process proceeds to the above-mentioned steps S105 to S107, and the processing related to each step is executed.

Further, when it is determined in step S109 that the pulse frequency is less than 100 kHz, that is, when it is determined that the pulse frequency is higher than 40 kHz but less than 100 kHz, the excitation light source driving unit 112 is associated with the current stored in 40 kHz. The table and the current table stored in association with 100 kHz are read from the table storage unit 114, and the contents of each current table are complemented to determine the drive current to be supplied to the excitation light source 111 (step S110). .. Then, the process proceeds to the above-mentioned steps S105 to S107, and the processing related to each step is executed.

Specifically, when the process proceeds to step S109, the excitation light source drive unit 112 is determined based on the drive current determined based on the current table stored in association with 40 kHz and the current table stored in association with 100 kHz. The drive current is interpolated by, for example, a linear function relating the pulse frequency and the drive current, and based on the linear function thus obtained and the pulse frequency set as one of the processing conditions. Determine the drive current.

As described above, the table storage unit 114 as the correspondence storage unit stores the correspondence between the target output of the laser beam and the drive current in relation to the magnitude of the pulse frequency set as one of the processing conditions. do. As a result, the drive current suitable for the magnitude of the pulse frequency can be determined, so that the output setting of the laser beam can be appropriately executed, and the variation in the output of the laser beam can be reduced. ..

(Modification example of output adjustment according to pulse frequency)
When, instead of the table storage unit 114, a calculation formula storage unit for storing a calculation formula for calculating the drive current with the target output as an argument is provided as the correspondence storage unit, for example, the target output and the drive current As a further argument, the correspondence with the pulse frequency may be included in the calculation formula associated with.

(Output adjustment according to the height of the target output)
As described above, when the output of the laser beam is changed through the drive current, if the target output becomes too low, the drive current corresponding to the output becomes excessively small and may become unstable. In this case, the output of the laser beam may also become unstable, so there is room for improvement in the output setting on the low output side.

On the other hand, as is known, a method of changing the output of the laser beam by adjusting the duty ratio of the Q-switch 23 is also conceivable.

That is, for example, when the due du ratio is reduced, the output of the pulse wave oscillated from the laser medium 25 as the fundamental wave is reduced by the amount of the period in which the Q switch 23 is turned on is shortened as described above. This makes it possible to reduce the output of the laser beam generated based on the fundamental wave.

Therefore, when the output of the laser beam is changed through the duty ratio, it is possible to reduce the output of the laser beam while keeping the drive current sufficiently large so as not to cause instability.

However, if the duty ratio of the Q-switch 23 is adjusted while keeping the drive current large, the output setting on the low output side is improved, but this time, the output setting on the high output side becomes difficult. I understood.

That is, if the duty ratio is set large in order to increase the output of the laser beam, the period during which the Q-switch 23 is turned on becomes longer, and the period during which the laser beam is continuously oscillated becomes longer. Then, the first wavelength conversion element 26 and the second wavelength conversion element 27 will generate heat. Combined with this and the increase in the output of the fundamental wave due to keeping the drive current large, the wavelength conversion element overheats, and due to the influence of the thermal lens etc., the output immediately after pulse oscillation is not good. Laser characteristics may deteriorate, such as becoming stable.

Therefore, the control unit 101 according to this embodiment uses different methods for changing the output of the laser beam according to the height of the target output.

Specifically, when the target output exceeds a predetermined threshold value, the control unit 101 changes the drive current supplied to the excitation light source 111 via the excitation light generation unit 110 from the laser light output unit 2. While controlling the output of the emitted laser light, when the target output is equal to or less than the threshold value, the duty ratio is maintained via the laser light output unit 2 while keeping the drive current supplied to the excitation light source 111 substantially constant. By changing the above, the output of the laser beam emitted from the laser beam output unit 2 is controlled.

Further, as a method of changing the duty ratio, a table in which the target output and the duty ratio are associated may be used, or a calculation formula for calculating the duty ratio with the target output and the pulse frequency as arguments may be used.

As can be seen from the description "keeping the drive current substantially constant", it is not necessary to keep the drive current constant even when the target output is equal to or less than the threshold value. Temporarily, the target output may be kept within the range when the target output is increased or decreased by about 10 to 20% with respect to the threshold value. For example, when the threshold value of the target output is set to 60%, the drive current may be set when the target output is 50% to 70%.

This control mode can be used in combination with the output adjustment according to the pulse frequency described above, and one of the control modes can also be used.

(Specific example of output adjustment according to the height of the target output)
As described above, the table storage unit 114 according to this embodiment stores two types of current tables according to the pulse frequency. As shown in FIG. 35, these current tables are designed to properly use output adjustment through the drive current and output adjustment through the duty ratio with a threshold value of 60% for the target output as a boundary.

Specifically, when the target output exceeds 60%, the drive current monotonically increases as the target output increases. On the other hand, when the target output is 60% or less, the drive current is substantially constant with respect to the height of the target output. In this case, the drive current when the target output is 60% is used. In the latter case, the duty ratio decreases monotonically as the target output decreases.

Here, FIG. 37 is a flowchart illustrating the proper use of the output adjustment method according to the target output. For the sake of simplicity, the proper use of the current table according to the pulse frequency is omitted in FIG. 37, but as can be seen from FIG. 35, the proper use according to the pulse frequency is also performed at the same time.

As shown in FIG. 37, for example, when the laser processing apparatus L is started to process the work W, the control unit 101 sets a marking pattern via the operation terminal 200, and a target as processing conditions. The print data including the output and the pulse frequency is read (step S201). Of the print data read at this time, the data related to the processing conditions are input from the control unit 101 to the excitation light source drive unit 112.

After that, it is determined whether or not the target output set as one of the machining conditions exceeds 60% (step S202). Here, when the target output exceeds 60%, the excitation light source drive unit 112 reads the current table corresponding to the target output from the table storage unit 114 (step S203), and determines the drive current according to the current table. (Step S204). Then, while maintaining the duty ratio at the minimum value (step S205), the same processing as that shown in FIG. 36 is executed to perform printing processing (steps S206 to S208).

The processes shown in steps S206 to S208 are shown to be executed in order for convenience, but as described above, the processes are performed in parallel.

On the other hand, when it is determined in step S202 that the target output is 60% or less, the excitation light source driving unit 112 stores the current table corresponding to the case where the target output is 60% regardless of the height of the target output. Along with reading from the unit 114 (step S209), the drive current is determined according to the current table (step S210). Then, the duty ratio is changed according to the target output (step S211), and the same processing as the flow shown in FIG. 36 is executed to perform printing processing (steps S206 to S208).

In this way, when the target output is relatively high, the output of the laser beam is changed through the drive current, while when the target output is relatively low, the output of the laser beam is changed through the duty ratio instead of the drive current.

By switching the means for changing the laser beam output according to the high and low of the target output, it is possible to stabilize the laser beam output on the low output side while not deteriorating the laser characteristics on the high output side. .. This makes it possible to appropriately change the output of the laser beam without deteriorating the laser characteristics.

(Configuration related to output stop of laser processing device L)
FIG. 38 is a block diagram illustrating the configuration around the power supply of the laser processing apparatus L. Of the components shown in FIG. 38, the same components as those described so far are designated by the same reference numerals. The description of such components will be omitted as appropriate.

As shown in FIG. 38, the laser processing apparatus L includes a power supply for supplying electric power to the excitation light generation unit 110, the laser light output unit 2, and the control unit 101, and a power supply monitoring unit (power supply monitoring unit) for monitoring the power supply. On the paper of FIG. 38, it is described as “voltage monitoring unit”) 123.

Specifically, the laser processing apparatus L includes a first power supply unit (power supply) 124 capable of supplying electric power to the laser light output unit 2 and the control unit 101. The first power supply unit 124 is composed of a so-called AC / DC power supply.

Similarly, the laser processing apparatus L includes a second power supply unit (power supply) 125 capable of supplying electric power to the excitation light generation unit 110. Like the first power supply unit 124, the second power supply unit 125 is composed of a general AC / DC power supply.

The power supply to the first power supply unit 124 and the second power supply unit 125 is turned on and off by the main switch 121 and the key switch 122. Specifically, the main switch 121 is connected to the key switch 122 and the first power supply unit 124, and is provided to start the system other than the excitation light generation unit 110. When the main switch 121 is turned on, electric power can be supplied to the first temperature control unit 5, the second temperature control unit 6, and the control unit 101.

Further, the key switch 122 is provided to surely stop the emission of the laser light, and the on / off of the key switch 122 and the on / off of the emission of the laser light are interlocked with each other. Specifically, when the key switch 122 is turned off, the electric circuit from the second power supply unit 125 to the excitation light generation unit 110 is cut off, and the generation of the laser excitation light and the emission of the laser light are surely stopped. Can be done. On the other hand, when the key switch 122 is turned on, the electric circuit from the second power supply unit 125 to the excitation light generation unit 110 is conducted, and the generation of the laser excitation light and the emission of the laser light are permitted.

Further, in order to perform the control described later, the laser processing apparatus L includes a power supply monitoring unit 123 that monitors at least the second power supply unit 125. In this embodiment, the power supply monitoring unit 123 is configured to monitor the second power supply unit 125 by measuring at least the supply voltage to the second power supply unit 125. Instead of this configuration, the power supply monitoring unit 123 may monitor only the supply voltage to the first power supply unit 124. Alternatively, the voltage supplied from the first power supply unit 124 or the second power supply unit 125 may be monitored instead of the supply voltage to the first power supply unit 124 or the second power supply unit 125.

Further, although details are omitted, the laser light output unit 2 is of the intra-cavity type as described above. Further, the temperatures of the first and second wavelength conversion elements 26 and 27 are adjusted by the first and second temperature control units (temperature control units) 5 and 6, respectively.

By the way, in such a laser processing apparatus L, when the power supply to the apparatus L is stopped due to, for example, a power failure or shutdown, the excitation light generation unit 110 generates excitation light and the wavelength conversion elements 26 and 27 are heated. The tuning stops according to the amount of charge remaining in the capacitor for the power supply or the like. When the generation of the excitation light by the excitation light generation unit 110 is stopped, the generation of the fundamental wave by the laser medium 25 is stopped. Until now, the generation of the fundamental wave and the temperature control of the wavelength conversion elements 26 and 27 have been stopped in no particular order.

Here, in the case of the extra cavity type configuration, the fundamental wave generated in the resonator is always output to the outside of the resonator. Therefore, even if the generation of the fundamental wave is stopped after the temperature control of the wavelength conversion elements 26 and 27 is stopped, the energy of the laser beam including the fundamental wave is not accumulated inside the resonator. There is.

However, in the case of the intra-cavity type configuration as in the embodiment disclosed here, by arranging the wavelength conversion element between the pair of mirrors, the wavelength conversion element is located inside the resonator. Become. In such a configuration, the harmonics generated by the wavelength conversion element are output to the outside of the resonator by the half mirror (for example, the first separator 28a described above) as long as the temperature control described above is sufficiently functioning. Will be split.

However, in such an intracavity type configuration, if the temperature control of the wavelength conversion element is stopped before the generation of the fundamental wave is stopped, the generated fundamental wave is not sufficiently wavelength-converted and the resonator is The energy of the laser beam may be accumulated inside the. It is not desirable to fall into such a situation to ensure that the various optics located within the cavity are not damaged.

Therefore, when the control unit 101 according to this embodiment determines that the power supply to the first and second power supply units 124 and 125 is stopped based on the monitoring result by the power supply monitoring unit 123, the first and second power supply units 101 are stopped. It is configured to control at least one of the excitation light generation unit 110 and the Q switch 23 so that the generation of the fundamental wave is suppressed while the temperature control by the temperature control units 5 and 6 is continued.

Specifically, when the power supplied to each of the first and second power supply units 124 and 125 falls below a predetermined threshold value, the control unit 101 powers the first and second power supply units 124 and 125. Judge that supply will be stopped. Here, the control unit 101 may make a determination based on the magnitude of the electric power, or may make a determination based on a physical quantity related to the electric power such as a voltage.

Then, when the control unit 101 determines that the power supply to the first and second power supply units 124 and 125 is stopped, the power supply to the excitation light generation unit 110, particularly the excitation light source from the excitation light source drive unit 112. By stopping the supply of the drive current to the 111, the generation of the laser excitation light is stopped. As a result, the generation of the fundamental wave based on the laser excitation light is stopped, so that the incident of the fundamental wave on the first and second wavelength conversion elements 26 and 27 is also stopped.

(Specific example of processing related to output stop of laser processing device L)
FIG. 39 is a flowchart illustrating the processing related to the output stop of the laser processing apparatus L. As shown in FIG. 39, during the operation of the laser processing apparatus L, the power supply monitoring unit 123 of the first and second power supply units 124, 125 in order to check the power supply to the second power supply unit 125 as an external power source. The voltage of the electric power supplied to each is checked (steps S301 and S302).

Then, the control unit 101 determines whether or not the voltage checked by the power supply monitoring unit 123 is less than a predetermined threshold value (specified value) (step S303), and if the voltage is equal to or higher than the threshold value, step S302. Return to. That is, as long as the voltage equal to or higher than the threshold value is secured, the control unit 101 repeats the processes shown in steps S302 and S303.

Here, when the voltage falls below the threshold value as a result of turning off the main switch 121 or intentionally or unintentionally cutting off the power supply to the first or second power supply units 124, 125, the control unit 101 proceeds from step S303 to step S304, and stops the power supply from the excitation light source driving unit 112 to the excitation light source 111 in the excitation light generation unit 110. As a result, the generation of the laser excitation light is stopped in the excitation light source 111, and the generation of the fundamental wave is also stopped in the laser medium 25 (step S305). After that, the temperature control by the first and second temperature control units 5 and 6 is naturally stopped according to the amount of electric charge remaining in the capacitor or the like (step S306), and the laser processing apparatus L is shut down (step). S307).

In this way, the control unit 101 suppresses the generation of the fundamental wave while the temperature control by the temperature control units 5 and 6 continues. Since the temperature control by the temperature control units 5 and 6 is continued, the generation of harmonics remains promoted. Therefore, when the power supply is stopped, the fundamental wave that is generated while being suppressed is smoothly converted into harmonics, so it is necessary to prevent the energy of the laser beam from accumulating. can. This makes it possible to prevent the optical components from being damaged.

(Modification example related to output stop of laser processing device L)
In the above embodiment, the power supply monitoring unit 123 is configured to monitor the first and second power supply units 124, 125, respectively, by measuring the supply voltage to each of the first and second power supply units 124, 125. However, it is not limited to such a configuration.

For example, the power supply monitoring unit 123 has an electrical connection state between the second power supply unit 125 and the excitation light generation unit 110, or the first power supply unit 124 and the control unit 101 or the laser light output unit 2. While monitoring the electrical connection state between them, it may be determined that the power supply to the first and second power supply units 125 is stopped when it is determined that any of the connections is cut off.

In this case, for example, when the electrical connection between the second power supply unit 125 and the excitation light generation unit 110 is cut off as a result of switching the key switch 122 from the on state to the off state, the power supply monitoring unit 123 It may be configured to input a predetermined electric signal to. In this case, the power supply monitoring unit 123 can determine that the power supply by the second power supply unit 125 is stopped when such an electric signal is input.

Further, the configuration in which the first and second power supply units 124 and 125 are provided is not essential. For example, as in the modification shown in FIG. 40, one power supply unit 126 may be configured to control the control unit 101, the excitation light generation unit 110, and the laser light output unit 2.

Further, when the input power supply to the laser processing apparatus L is a DC input, it is not necessary to provide a power supply inside the laser processing apparatus L as in the first and second power supply units 124 and 125. In this case, the DC input from the outside may be monitored by the power supply monitoring unit 123.

Further, in the above-described embodiment, the control unit 101 is configured to stop the generation of the fundamental wave by the laser medium 25 by stopping the power supply to the excitation light generation unit 110. Not limited.

For example, when the control unit 101 determines that the power supply by the second power supply unit 125 is stopped, the Q switch 23 is set in a state where the temperature control by the first and second temperature control units 5 and 6 is continued. The generation of the fundamental wave may be suppressed by keeping it in the off state. In this case, at least the pulse-oscillated fundamental wave is not incident on the first and second wavelength conversion elements 26 and 27. In this case, instead of step S304 in FIG. 37, as shown in step S404 in FIG. 41, the control related to the Q-switch 23 may be stopped. Further, the pulse oscillation by the Q switch 23 may be stopped and the power supply to the excitation light generation unit 110 may be stopped at the same time.

Further, in order to realize the processing related to the stop of the output of the laser beam, the configuration in which the first wavelength conversion element 26 and the second wavelength conversion element 27 are provided is not indispensable. For example, only one wavelength conversion element may be provided, or three or more wavelength conversion elements may be provided.

Further, the Q switch 23 is not indispensable for realizing the processing related to the stop of the output of the laser beam. The above configuration can also be applied to a device that does not have a Q-switch 23 and can only continuously oscillate a laser beam.

As described above, the present disclosure can be applied to laser markers and the like.

1 Marker head 10 Housing 15 Transparent window 16 Output window 18 Replacement lid (cover)
19 Exit window 19a Opening (outlet on the housing side)
2 Laser light output unit 20 Housing 2A Q-switch accommodation unit 2B Wavelength conversion unit 21 First reflection mirror (first mirror, reflection mirror)
22 Second reflection mirror (second mirror, reflection mirror)
23 Q-switch 24 Incident part 25 Laser medium 26 First wavelength conversion element (wavelength conversion element)
27 Second wavelength conversion element (wavelength conversion element)
28a First separator (output mirror)
28b Concave lens 28c Second separator (reflection mirror)
29 Beam expander 3 Laser light guide 31 Z chamber cover (sealing member)
31c First transparent window (transparent window)
31d 2nd transparent window (transparent window)
32 1st bend mirror (optical component)
33 Z Scanner (Focus)
34 Second bend mirror (optical component)
35 Guided light source (guide light emitting device)
36 Camera (imaging device)
4 Laser light scanning unit 40 Scanner housing (accommodating member)
40a First holding part (holding part)
40b Second holding part (holding part)
41 Incident window 42 Drying penetration 42a Through hole 5 First temperature control part (element temperature control part)
6 Second temperature control section (element temperature control section)
7 Output mirror temperature control part 71 Base plate 72 First insertion hole (insertion hole)
81 X Mirror (1st Scanner Mirror, Scanner Mirror)
82 First drive motor (drive motor)
82a Rotor 82b Motor case 83 Motor holding member 86 First seal member (seal member)
87 Second seal member (second seal member)
91 Y mirror (second scanner mirror, scanner mirror)
92 Second drive motor (drive motor)
92a Rotor 92b Motor case 93 Motor holding member 96 First seal member (seal member)
97 Second seal member (second seal member)
100 Marker controller 101 Control unit 102 Condition setting storage unit 110 Excitation light generation unit 111 Excitation light source 112 Excitation light source drive unit 114 Table storage unit (correspondence relationship storage unit)
123 Power supply monitoring unit 124 1st power supply unit (power supply)
125 Second power supply unit (power supply)
126 Power supply (power supply)
Dm Drying Material L Laser Machining Equipment Sz Z Room (Sealed Space)
Sxy Scanner Room Sd Storage Room W Work (Workpiece)

Claims (6)

An excitation light generator that generates excitation light,
A laser light output unit that generates UV laser light based on the excitation light generated by the excitation light generation unit and emits the UV laser light.
A laser processing apparatus including a laser light scanning unit that scans UV laser light emitted from the laser light output unit on the surface of a workpiece.
The laser light scanning unit is
A first scanner mirror for scanning the UV laser beam in a first direction intersecting the optical axis of the UV laser beam on the surface of the workpiece.
A first drive motor that rotatably supports the first scanner mirror,
A second scanner mirror for scanning the UV laser beam in a second direction intersecting the optical axis of the UV laser beam and orthogonal to the first direction on the surface of the workpiece.
A second drive motor that rotatably supports the second scanner mirror,
The first holding portion that holds the outer peripheral surface of the first drive motor so as to surround it, the second holding portion that holds the second holding portion so as to surround the outer peripheral surface of the second drive motor, and the UV laser light emitted from the laser light output portion. The first holding portion, the second holding portion, and the like having an incident window portion capable of being incident and an exit window portion for emitting UV laser light incident through the incident window portion to the outside. A first housing in which the first and second scanner mirrors are housed in a room of a scanner room surrounded by the incident window portion and the exit window portion , and a through hole for drying the scanner chamber is formed. ,
A second housing in which a storage chamber communicating with the scanner chamber is partitioned outside the first housing and an opening for access from the outside is formed, and a second housing.
A laser processing apparatus which is arranged in the room of the accommodation chamber and has a desiccant which can be exchanged from the outside through the opening . In the laser processing apparatus according to claim 1 ,
A housing for fixing the laser light output unit and the laser light scanning unit is provided.
The housing is provided with a housing-side emitting portion that allows UV laser light to be emitted to the outside, and a lid portion for opening the accommodation chamber through the opening . Laser processing equipment. In the laser processing apparatus according to claim 2 ,
The second housing is opened and closed by the lid portion.
A laser processing device characterized by this. In the laser processing apparatus according to claim 3 ,
One surface of the second housing is perforated with a replacement opening leading to the interior of the containment chamber, while the other is perforated.
The lid portion is provided with an insertion portion capable of closing the replacement opening by inserting it into the replacement opening.
A laser processing apparatus characterized in that a sealing member arranged so as to be in close contact with the inner surface of the replacement opening is provided on the outer surface of the insertion portion. In the laser processing apparatus according to claim 1 ,
A housing for fixing the laser light output unit and the laser light scanning unit is provided.
The second housing is a laser processing device characterized in that it is configured to be detachable from the housing. An excitation light generator that generates excitation light,
A laser light output unit that generates UV laser light based on the excitation light generated by the excitation light generation unit and emits the UV laser light.
A laser processing apparatus including a laser light scanning unit that scans UV laser light emitted from the laser light output unit on the surface of a workpiece.
The laser light scanning unit is
A first scanner mirror for scanning the UV laser beam in a first direction intersecting the optical axis of the UV laser beam on the surface of the workpiece.
A first drive motor that rotatably supports the first scanner mirror,
A second scanner mirror for scanning the UV laser beam in a second direction intersecting the optical axis of the UV laser beam and orthogonal to the first direction on the surface of the workpiece.
A second drive motor that rotatably supports the second scanner mirror,
A first holding portion that holds the outer peripheral surface of the first drive motor, a second holding portion that holds the outer peripheral surface of the second drive motor, and an incident window on which UV laser light emitted from the laser light output portion can be incident. A unit and an exit window portion for emitting UV laser light incident through the incident window portion to the outside, and the first holding portion, the second holding portion, the incident window portion, and the above. A housing member that houses the first and second scanner mirrors in a scanner room that is surrounded and sealed by the exit window.
It has a desiccant that can be exchanged from the outside, which is arranged in the scanner room.
The laser processing device is characterized in that the emission window portion is configured to be openable and closable from the outside.

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