JP2019106513A - Laser processing device - Google Patents

Abstract

To reduce the variation of the output of laser light.SOLUTION: A laser processing device includes a condition setting storage part which stores processing conditions set to perform a desired processing to a workpiece, an excitation light source which generates excitation light corresponding to a drive current supplied from the outside, a correspondence relation storage part which stores a correspondence relation between the target output of the laser light set as one of the processing conditions and the drive current to be supplied to the excitation light source in association with the magnitude of a pulse frequency, and an excitation light source drive part which supplies the drive current corresponding to the pulse frequency to the excitation light source on the basis of the target output and pulse frequency which are stored in the condition setting storage part and the correspondence relation stored in the correspondence relation storage part.SELECTED DRAWING: Figure 35

Description

  The technology disclosed herein relates to a laser processing apparatus such as a laser marking apparatus that performs processing by irradiating a workpiece with a laser beam.

  Conventionally, as an apparatus used for laser processing, one provided with a Q switch capable of pulse oscillation of laser light is known (see, for example, Patent Document 1).

  Specifically, the laser device described in Patent Document 1 includes a laser medium (solid laser element) for generating a fundamental wave, and a fundamental wave between a pair of mirrors (resonator mirrors) constituting a resonator. And a wavelength conversion element (nonlinear crystal) for generating harmonics from the fundamental wave.

  In the case of the laser device described in Patent Document 1, when the above-described Q switch is turned on, the oscillation of the laser light is stopped, and the population inversion is formed in the laser medium according to the period of the on state. Promoted (so-called optical pumping). On the other hand, when the Q switch is switched from the on state to the off state, the Q value of the resonator instantaneously increases, and it becomes possible to pulse-oscillate high-power laser light.

  In general, it is also known to use an excitation light source for generating excitation light to excite a laser medium to generate a fundamental wave (see, for example, Patent Document 2).

  Specifically, the harmonic laser oscillator described in Patent Document 2 is configured to include a laser diode (LD) as a pumping light source, and supplying a drive current (LD current) to the laser diode. Thus, excitation light can be generated according to the drive current.

Unexamined-Japanese-Patent No. 2007-273558 JP, 2014-149315, A

  In general, when laser processing is performed, a target output of laser light may be changed in order to adjust, for example, coloring of printing in laser marking, cutting speed in laser cutting, and the like.

  In this case, as a method for achieving the changed target output, it may be considered to adjust the output of the fundamental wave by adjusting the drive current supplied to the excitation light source.

  That is, for example, when the current value of the drive current is reduced, the output of the excitation light generated in the excitation light source is reduced, and the output of the fundamental wave generated in the laser medium is also reduced. This makes it possible to reduce the output of the laser beam generated based on the fundamental wave.

  As described above, since a positive correlation exists between the magnitude of the drive current and the output of the laser light, for example, the target output of the laser light and the excitation light source are supplied to the storage unit such as an HDD. By storing in advance the correspondence relationship with the drive current to be performed, the drive current corresponding to the output desired by the user can be determined using the correspondence relationship.

  By the way, when it is set as the structure provided with Q switch like the laser apparatus described in the said patent document 1, as a control parameter of a laser beam, the frequency | count which switches Q switch on / off per second, ie, per unit time A Q switch frequency (hereinafter also referred to as "pulse frequency") indicating the number of times of pulse oscillation is known.

  However, changing the pulse frequency will increase or decrease the period during which the Q switch is turned on. As a result, since the state of population inversion in the laser medium fluctuates, the number of photons emitted by induction increases or decreases when the excitation light enters the laser medium, and the output of the laser light fluctuates. . Therefore, determining the drive current as described above is not sufficient to set the appropriate output.

  The technique disclosed herein has been made in view of the above point, and its object is to reduce the variation in the output of the laser beam.

  According to a first aspect of the present disclosure, a laser light is generated based on an excitation light generation unit that generates excitation light, and laser light generated based on the excitation light generated by the excitation light generation unit, and a laser light output that emits the laser light And a laser beam scanning unit for scanning the surface of a workpiece with a laser beam emitted from the laser beam output unit, and a processing condition set to perform desired processing on the workpiece Control of the excitation light generation unit, the laser light output unit, and the laser light scanning unit based on processing conditions stored in the condition setting storage unit and the processing conditions stored in the condition setting storage unit; And a control unit that performs processing.

  In the laser processing apparatus according to the first aspect of the present disclosure, the laser light output unit includes a laser medium that generates a fundamental wave based on the excitation light generated by the excitation light generation unit, and the laser medium. A wavelength conversion element that receives a generated fundamental wave and generates a harmonic having a frequency higher than that of the fundamental wave, and a control signal received from the control unit with respect to a pulse frequency set as one of the processing conditions A Q switch for pulse oscillation of the harmonic generated by the wavelength conversion element, and an output mirror for emitting the harmonic oscillated by the Q switch as laser light, The excitation light generation unit includes an excitation light source that generates excitation light according to a drive current supplied from the outside, a target output of laser light set as one of the processing conditions, and A correspondence relationship storage unit that stores a correspondence relationship between the drive current to be supplied to the excitation light source and the magnitude of the pulse frequency, the target output stored in the condition setting storage unit, and the pulse frequency And an excitation light source drive unit for supplying a drive current corresponding to the pulse frequency to the excitation light source based on the correspondence relationship stored in the correspondence relationship storage unit.

According to this configuration, the correspondence relationship storage unit stores the correspondence relationship between the target output of the laser light and the drive current in association with the magnitude of the pulse frequency set as one of the processing conditions. Thus, the drive current suitable for the magnitude of the pulse frequency can be determined, so that the output setting of the laser beam can be appropriately performed, and in turn, the variation in the output of the laser beam can be reduced. Further, according to the laser processing apparatus according to the third aspect of the present disclosure, the wavelength conversion element receives the fundamental wave generated by the laser medium and has a frequency higher than that of the fundamental wave. A first wavelength conversion element generating harmonics, and a second harmonic generated by the first wavelength conversion element is incident, and a third harmonic having a frequency higher than the second harmonic is generated A second wavelength conversion element, and the output mirror emits the third harmonic generated by the second wavelength conversion element as a laser beam.

  Generally, changing the Q switch frequency (the pulse frequency) changes the pulse width of the laser light. Then, the conversion efficiency in the wavelength conversion element also changes, so that the output desired by the user tends to vary.

  In particular, in the case of emitting so-called UV laser light such as the third harmonic, two wavelength conversion elements (first wavelength conversion element, second wavelength conversion element) are used, and such variations are more likely to occur. .

  Therefore, as described above, the configuration capable of reducing the variation in the output of the laser beam is particularly effective in the laser processing apparatus that emits the UV laser beam by the two wavelength conversion elements.

  Further, according to the laser processing apparatus according to the third aspect of the present disclosure, the correspondence relationship storage unit associates a current table in which the target output is associated with the drive current for each of the predetermined different pulse frequencies. It may be stored.

  According to this configuration, unlike the configuration in which the drive current is calculated using, for example, a correction coefficient or a calculation formula, it is sufficient to refer to the current table, and a simpler control mode can be realized.

  Moreover, according to the laser processing apparatus concerning the 4th side of this indication, it has a setting part for setting up the above-mentioned target output and the above-mentioned pulse frequency based on operation by a user, and the above-mentioned excitation light source drive part A drive current may be supplied to the excitation light source based on the target output and the pulse frequency set via the setting unit.

  According to this configuration, usability can be improved by using the setting unit.

  Moreover, according to the laser processing apparatus which concerns on the 5th side surface of this indication, it has a power monitor which detects the output of the laser beam radiate | emitted from the said laser beam output part, The said control part is a detection result by the said power monitor , The correspondence relationship stored in the correspondence relationship storage unit may be calibrated.

  According to this configuration, the control unit can calibrate the correspondence based on the measured value of the laser light output. This is advantageous in setting a more appropriate correspondence and, in turn, reducing variations in the laser light output.

  As described above, according to the above-mentioned laser processing apparatus, it is possible to reduce the variation in the output of the laser beam.

FIG. 1 is a block diagram illustrating a schematic configuration of a laser processing apparatus. FIG. 2 is a perspective view illustrating the appearance of the marker head. FIG. 3 is a perspective view illustrating the appearance of the marker head. FIG. 4 is a view illustrating the internal structure of the marker head. FIG. 5 is a diagram illustrating the configuration of the laser light output unit. FIG. 6 is a diagram illustrating the layout of optical components in the laser light output unit. FIG. 7 is a cross-sectional view illustrating the configuration of the SHG unit. FIG. 8 is a cross-sectional view illustrating the configuration of the THG unit. FIG. 9 is a perspective view illustrating the configuration of the laser beam separation unit. FIG. 10 is a perspective view showing the configuration illustrated in FIG. 9 partially omitted. FIG. 11 is a diagram for explaining the light collection effect. FIG. 12 is a diagram illustrating contamination attached to an optical component. FIG. 13 is a front view illustrating a state in which the exterior cover is removed from the marker head. FIG. 14 is a diagram showing the configuration illustrated in FIG. 13 as viewed obliquely from the front. FIG. 15 is a diagram partially showing the configuration illustrated in FIG. FIG. 16 is a diagram illustrating a state in which the Z chamber cover is removed from the marker head. FIG. 17 is a cross-sectional view illustrating the configuration around the guide light emitting device. FIG. 18 is a view exemplifying a longitudinal cross section of the laser light guiding portion. FIG. 19 is a view showing first to third modified examples of the laser beam guiding portion. FIG. 20 is a view showing a fourth modified example of the laser beam guiding portion. FIG. 21 is a perspective view illustrating the appearance of the laser beam scanning unit. FIG. 22 is a perspective view illustrating the appearance of the laser beam scanning unit. FIG. 23 is a diagram showing the configuration illustrated in FIG. 23 as viewed from below. FIG. 24 is a longitudinal sectional view illustrating the configuration of the X scanner. FIG. 25 is a longitudinal sectional view illustrating the configuration of the Y scanner. FIG. 26 is a view corresponding to FIG. 25 showing a first modified example of the Y scanner. FIG. 27 is a view corresponding to FIG. 25 showing a second modification of the Y scanner. FIG. 28 is a view showing a modified example of the scanner housing. FIG. 29 is a perspective view illustrating the arrangement of the desiccant housing. FIG. 30 is a longitudinal sectional view illustrating the configuration of the storage chamber and the scanner chamber. FIG. 31 is a perspective view illustrating the appearance of the desiccant housing. FIG. 32 is an explanatory view illustrating a sealing structure by the replacement lid. FIG. 33 is a view showing a modification of the replacement lid. FIG. 34 is a view showing a modification of the storage chamber and the scanner chamber. FIG. 35 illustrates the correspondence between the target output and the drive current. FIG. 36 is a flowchart illustrating how to use the current table according to the pulse frequency. FIG. 37 is a flowchart illustrating output adjustment according to the level of the target output. FIG. 38 is a diagram illustrating a configuration related to the power supply of the laser processing apparatus. FIG. 39 is a flowchart illustrating processing relating to the output stop of the laser processing apparatus. FIG. 40 is a view corresponding to FIG. 38 showing a modification of the configuration related to the power supply. FIG. 41 is a view corresponding to FIG. 39 showing a modification of the process related to the output stop.

  Hereinafter, embodiments of the present disclosure will be described based on the drawings. The following description is an example.

  That is, in the present specification, a laser marker is described as an example of a laser processing apparatus, but the technology disclosed herein can be generally used for laser applied devices regardless of the name of the laser processing apparatus.

  Moreover, although printing is described as a representative example of processing in the present specification, the present invention is not limited to printing processing, and can be used in any processing using a laser beam.

<Overall Configuration of Laser Processing Device L>
FIG. 1 is a block diagram illustrating the schematic configuration of the laser processing apparatus L. As shown in FIG. The laser processing apparatus L shown in FIG. 1 performs processing by irradiating the laser beam emitted from the marker head 1 onto the workpiece W as a workpiece and three-dimensionally scanning the surface of the workpiece W. It is a thing.

  In particular, the laser processing apparatus L disclosed herein is configured to be capable of pulsating UV laser light.

  As shown in FIG. 1, the laser processing apparatus L can be configured by a marker controller 100 for controlling various devices and a marker head 1 for emitting laser light, but the marker controller 100 and the marker head One of the 1 can be integrated into the other.

  The marker controller 100 and the marker head 1 are separated in this embodiment, and are electrically connected via electrical wiring, while being optically coupled via an optical fiber cable. When the marker controller 100 and the marker head 1 are integrated, coupling can be performed via a space without using an optical fiber cable.

  Further, an operation terminal (setting unit) 200 for setting various processing conditions such as print settings can be connected to the marker controller 100. The operation terminal 200 stores information such as a display unit 201 for displaying information to the user such as a liquid crystal display, an operation unit 202 such as a keyboard and a mouse that receives operation input by the user, and an HDD and the like. And a storage device 203. The operation terminal 200 can be incorporated into, for example, the marker controller 100 and integrated. In this case, the name of a control unit or the like may be used instead of the "operation terminal", but at least in this embodiment, they are separated from each other.

  When the operation terminal 200 according to this embodiment is used, the user performs an operation input through the operation unit 202 to determine the content of the printing (marking pattern) or an output to be obtained from the laser light (target It is possible to set processing conditions for performing desired processing on the workpiece W, such as output), the scanning speed (scanning speed), and the number of times of pulse oscillation per second (pulse frequency). . The processing conditions set in this manner are output to the marker controller 100 and stored in the condition setting storage unit 102. If necessary, the storage device 203 of the operation terminal 200 may store the processing conditions.

  The processing conditions set in this manner are output to the marker controller 100 and stored in the condition setting storage unit 102.

  In addition to the above-described devices and devices, the laser processing device L may be connected with devices for performing operations and controls, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case is, for example, serial connection such as IEEE1394, RS-232x or RS-422, USB, etc., parallel connection, or electrical or magnetic via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. And optical connection methods can be mentioned. In addition to wired connection, IEEE 802. A wireless LAN such as x, a radio wave such as Bluetooth (registered trademark), an infrared ray, a wireless connection using optical communication, or the like may be used. Furthermore, as a storage medium used for a storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks and the like can be used.

  The laser processing apparatus L can also be a laser processing system in which the marker controller 100, the marker head 1 and the operation terminal 200 are combined with various other units, devices, and devices.

  The hardware configuration of each of the marker controller 100 and the marker head 1 will be described in detail below, and then the configuration related to the control of the marker head 1 by the marker controller 100 will be described.

<Marker controller 100>
The marker controller 100 includes a condition setting storage unit 102 for storing processing conditions, a control unit 101 for controlling the marker head 1 based on the processing conditions, and laser excitation light (excitation light). And an excitation light generation unit 110.

(Condition setting storage unit 102)
The condition setting storage unit 102 stores the processing conditions set via the operation terminal 200, and outputs the stored processing conditions to the control unit 101 as necessary.

  Specifically, the condition setting storage unit 102 is configured using a volatile memory, a non-volatile memory, an HDD, etc., and can temporarily or continuously store information indicating processing conditions. In particular, when the operation terminal 200 is incorporated in the marker controller 100, the storage device 203 can also be configured to double as the condition setting storage unit 102.

(Control unit 101)
The control unit 101 controls the excitation light generation unit 110 of the marker controller 100, the laser light output unit 2, the laser light guide unit, the laser light scanning unit 4 and the like based on the processing conditions stored in the condition setting storage unit 102. The workpiece W is processed by controlling the respective parts forming the head 1.

  Specifically, the control unit 101 includes a processor, a memory, an input / output bus, etc., and is used as a signal indicating information input through the operation terminal 200 or a signal indicating processing conditions read from the condition setting storage unit 102. Based on the generated control signal, the control signal is output to each part of the laser processing apparatus L to control the processing of the workpiece W.

  For example, when processing of the workpiece W is started, the control unit 101 reads the target output stored in the condition setting storage unit 102, and outputs a control signal generated for the target output to the excitation light source drive unit 112. , Control the generation of laser excitation light.

  Although omitted in FIG. 1, the control unit 101 outputs a control signal generated based on the pulse frequency stored in the condition setting storage unit 102 and a predetermined duty ratio to the Q switch 23 described later. , Control the pulse oscillation of the UV laser light.

(Excitation light generation unit 110)
The excitation light generation unit 110 generates an excitation light source 111 that generates laser excitation light (excitation light) according to the drive current, and an excitation light source drive unit that supplies the drive current to the excitation light source 111 (in FIG. Drive unit] 112, an excitation light focusing unit 113 optically joined to the excitation light source 111, and a table storage unit for determining a drive current to be supplied to the excitation light source 111 (correspondence relationship Storage unit 114). The excitation light source 111 and the excitation light focusing unit 113 are fixed in an excitation casing (not shown) and optically coupled. Although details will be omitted, this excitation casing is made of metal such as copper excellent in thermal conductivity, and can efficiently radiate the excitation light source 111.

  In addition, the excitation light generation unit 110 stores the correspondence between the target output of the UV laser light set as one of the processing conditions described above and the drive power to be supplied to the excitation light source 111. (Correspondence storage unit) is also provided. In this embodiment, the table storage unit 114 is connected to transmit / receive an electrical signal to / from the excitation light source drive unit 112, but may be configured to transmit / receive a signal to / from the control unit 101.

  Hereinafter, each part of the excitation light generation unit 110 will be described in order.

  The excitation light source drive unit 112 supplies drive current to the excitation light source 111 based on the control signal output from the control unit 101. Although the detailed flow will be described later, the excitation light source drive unit 112 supplies the excitation light generation unit 110 by using the target output determined by the control unit 101 and the correspondence stored in the table storage unit 114. Determine the drive current to be done. The excitation light source drive unit 112 is configured to supply the drive current thus determined to the excitation light source 111. When the table storage unit 114 is connected to the control unit 101, the process of determining the driving current may be performed by the control unit 101 instead of the excitation light source drive unit 112.

  The excitation light source 111 is configured to be supplied with a drive current from the excitation light source drive unit 112 and to generate excitation light according to the drive current. The output of the excitation light generated by the excitation light source 111 increases as the drive current increases. Specifically, the excitation light source 111 is configured by a laser diode (LD) or the like, and an LD array or LD bar in which a plurality of LD elements are linearly arranged can be used. When an LD array or an LD bar is used as the excitation light source 111, laser oscillation from each element is output in a line shape and is incident on the excitation light focusing unit 113.

  The excitation light condensing unit 113 is configured to condense the laser output from the excitation light source 111 and to output it as laser excitation light (excitation light). Specifically, the excitation light focusing unit 113 can be configured by a focusing lens or the like, and has an incident surface on which laser oscillation is incident, and an emission surface on which laser excitation light is output. The excitation light focusing unit 113 is optically coupled to the marker head 1 via the above-described optical fiber cable. Therefore, the laser excitation light output from the excitation light condensing part 113 is guided to the marker head 1 through the optical fiber cable.

  The table storage unit 114 is configured to store the correspondence between the target output set as one of the processing conditions and the drive current to be supplied to the excitation light source 111. Specifically, the table storage unit 114 stores a current table storing the correspondence between the target output and the drive current, and the excitation light source drive unit 112 reads the drive current corresponding to the target output. The driving current supplied to the excitation light source 111 is determined.

  Note that, instead of the table storage unit 114, a calculation formula storage unit may be provided that stores a calculation formula that calculates the drive current with the target output as an argument. The calculation formula storage unit and the table storage unit 114 both exemplify the correspondence relationship storage unit in that the correspondence relationship between the target output and the drive current is stored.

  The excitation light generation unit 110 can be an LD unit or an LD module incorporating members such as the excitation light source drive unit 112, the excitation light source 111, the excitation light focusing unit 113, and the table storage unit 114 in advance. In addition, the excitation light emitted from the excitation light generation unit 110 (specifically, the laser excitation light output from the excitation light focusing unit 113) can be non-polarized light, so that the change of the polarization state is There is no need to consider, which is advantageous in design. In particular, with regard to the configuration around the pumping light source 111, the LD unit itself which bundles the light obtained from each of the LD array in which several LD elements are arrayed with an optical fiber and outputs it is equipped with a mechanism Is preferred.

<Marker head 1>
As described above, the laser excitation light generated by the excitation light generator 110 is guided to the marker head 1 through the optical fiber cable. The marker head 1 irradiates the surface of the work W with a laser beam output unit 2 that generates and outputs a UV laser beam based on laser excitation light, and a UV laser beam output from the laser beam output unit 2 A laser beam scanning unit 4 for performing two-dimensional scanning and a laser beam guiding unit 3 forming an optical path from the laser beam output unit 2 to the laser beam scanning unit 4 are provided.

  2 to 3 are perspective views illustrating the appearance of the marker head 1. As shown in FIGS. 2 to 3, the marker head 1 includes a housing 10 for fixing the laser light output unit 2, the laser light guiding unit 3, the laser light scanning unit 4 and the like. The housing 10 has a substantially rectangular external appearance as shown in FIGS. 2 to 3, and a replacement lid for replacing a desiccant Dm described later on one side surface in the short side direction The 18 is removably attached. On the other hand, as shown in FIG. 2, an emission window 19 for emitting UV laser light from the marker head 1 is provided on the lower surface of the housing 10. The configurations of the replacement lid 18 and the exit window 19 will be described later.

  FIG. 4 is a view showing an internal structure of the marker head 1. In the inside of the housing 10, a partition 11 as shown in FIG. 4 is provided (see also FIGS. 21 and 29). The internal space of the housing 10 is partitioned by the partitioning portion 11 into one side and the other side in the longitudinal direction.

  In the following description, the “longitudinal direction of the housing 10” refers to the left and right direction of the paper surface of FIG. 4 and the left side of the paper surface of FIG. It is called "the other side in the longitudinal direction". Similarly, the “short side direction of the case 10” refers to a direction that is straight to the paper surface of FIG. 4 and refers to the front side of the paper surface of FIG. The back side is called "the other side in the short direction".

  Further, in the following description, “longitudinal direction (short side direction) of housing 10” will be simply referred to as “longitudinal direction (short side direction)”, or as shown in FIG. The direction corresponding to may be called "longitudinal direction" or "short direction".

  Further, in the following description, the "vertical direction" is equal to the vertical direction of the paper surface of FIG. Also in the other figures, the direction corresponding to this may be referred to as "vertical direction".

  Specifically, the partition portion 11 is formed in a flat plate shape extending in a direction perpendicular to the longitudinal direction of the housing 10. Further, in the longitudinal direction of the housing 10, the partitioning portion 11 is disposed closer to one side (left side in the drawing of FIG. 4) than the central portion in the same direction. Therefore, the dimension of the space partitioned on one side in the longitudinal direction of the housing 10 is shorter in the longitudinal direction than the space partitioned on the other side by the amount of deviation of the arrangement of the partitions 11 to one side. Hereinafter, the latter space is referred to as a first space S1, and the former space is referred to as a second space S2.

  In this embodiment, the laser light output unit 2 and the laser light scanning unit 4 are fixed inside the first space S1, while the laser light guiding unit 3 is fixed inside the second space S2.

  Specifically, the first space S1 is divided by the substantially flat base plate 12 into one side and the other side in the short direction. The components of the laser light output unit 2 can be mainly disposed in a space on one side in the lateral direction with respect to the base plate 12.

  More specifically, in this embodiment, among the components that constitute the laser light output unit 2, optical components that are required to be hermetically sealed as much as possible, such as the concave lens 28 b and the optical crystal that forms the wavelength conversion element In the accommodation space (specifically, the internal space of the wavelength conversion unit 2B) surrounded by the partition portion 11, the base plate 12, and the like, the accommodation space is accommodated in a sealed state. On the other hand, components which are not necessarily required to be sealed, such as electrical wiring and a heat sink (not shown) are disposed on the other side in the lateral direction across the base plate 12.

  Further, as shown in FIG. 4, the laser beam scanning unit 4 can be disposed on one side in the short direction as in the case of the optical component forming the laser beam output unit 2 (see also FIG. 21). Specifically, the laser beam scanning unit 4 according to this embodiment is adjacent to the above-described partition unit 11 in the longitudinal direction and disposed on the inner bottom surface of the housing 10 in the vertical direction.

  As described above, the laser beam guiding unit 3 is disposed in the second space S2. In this embodiment, among the components constituting the laser beam guiding portion 3, the optical components which are required to be sealed such as the first bend mirror 32 are the Z chamber Sz surrounded by the partition portion 11 and the Z chamber cover 31. Are housed airtightly. On the other hand, components such as the guide light source 35 and the camera 36 which are not required to be sealed are disposed outside the Z chamber Sz.

  Further, the aforementioned optical fiber cable is connected to the rear surface of the housing 10, and this optical fiber cable is connected to the laser light output unit 2 disposed in the first space S1.

  Hereinafter, the configurations of the laser light output unit 2, the laser light guiding unit 3, and the laser light scanning unit 4 will be described in order.

(Laser light output unit 2)
The laser light output unit 2 is configured to generate UV laser light based on the laser excitation light generated by the excitation light generation unit 110 and to emit the UV laser light to the laser light guiding unit 3 .

  FIG. 5 is a view illustrating the configuration of the laser light output unit 2, and FIG. 6 is a view illustrating the layout of optical components in the laser light output unit 2. As shown in FIGS. 5 to 6, the laser light output unit 2 according to this embodiment mainly includes a Q switch accommodating unit 2A capable of pulse oscillation of a fundamental wave generated based on laser excitation light, and a Q switch accommodated. And a wavelength conversion unit 2B for converting the wavelength of the fundamental wave output from the unit 2A.

  In addition, a resonator used for amplification of laser light includes a first reflection mirror (first mirror, reflection mirror) 21 accommodated in the Q switch accommodation section 2A, and a second reflection mirror accommodated in the wavelength conversion section 2B. It can be constituted by the second mirror and the reflection mirror 22. That is, in this embodiment, the resonance optical path for amplifying the laser light is configured from the Q switch accommodation unit 2A to the wavelength conversion unit 2B.

  The Q switch accommodating portion 2A and the wavelength converting portion 2B both have a base plate 12, a side wall 13 erected on the base plate 12, and a lid 14 closing a space surrounded by the base plate 12 and the side wall 13. It is surrounded by In the present embodiment, the lid 14 covers the Q switch accommodating portion 2A separately from the portion covering the wavelength converting portion 2B, but both portions may be integrated. .

  Specifically, the base plate 12 constitutes a support surface for attaching various components described later. The side wall portion 13 is erected straight with respect to the base plate 12 and is formed to laterally surround components attached to the base plate 12. In particular, the side wall portion 13 shown in FIG. 5 is shaped so as to separate the component housed in the Q switch housing portion 2A from the component housed in the wavelength conversion portion 2B. That is, as shown in the figure, the Q switch accommodating portion 2A is partitioned on the other side in the longitudinal direction (right side in FIG. 5), while the wavelength conversion portion 2B is one side in the longitudinal direction (FIG. 5). (Left side of the paper). A portion of the side wall portion 13 erected at a substantially central portion in the longitudinal direction extends substantially in the vertical direction, and is shared by the Q switch accommodation portion 2A and the wavelength conversion portion 2B.

  In this embodiment, as shown in FIG. 5, a space opened toward one side in the short direction is defined by the base plate 12 and the side wall portion 13. The space is closable by a lid 14 (see FIG. 4). The lid portion 14 seals at least the wavelength conversion portion 2B, and in the example shown in FIGS. 4 to 6, the wavelength conversion portion 2B and the Q switch accommodation portion 2A are respectively sealed by separate members. ing.

  In the embodiment shown in FIG. 5, a seal member 20a made of resin or the like is provided at the opening edge of the space surrounded by the base plate 12 and the side wall 13 in order to seal the wavelength conversion unit 2B. The sealing member 20a can be held between the side wall portion 13 and the lid portion 14. By bringing the lid portion 14 into close contact with the sealing member 20a, the internal space of the housing 20 can be sealed. The opening edge of the Q switch housing 2A is also provided with a sealing member 20b for sealing in the same manner.

  The Q switch accommodating portion 2A has an incident portion 24 to which the excitation light generated by the excitation light generating portion 110 can be incident, and can accommodate at least the Q switch 23 and the first reflection mirror 21.

  Specifically, the Q switch accommodation unit 2A according to this embodiment includes an incident unit 24 to which the laser excitation light generated by the excitation light generation unit 110 can be incident, and a laser that generates a fundamental wave based on the laser excitation light. A Q switch 23 for pulsating the fundamental wave generated by the laser medium 25 based on the medium 25 and the control signal input from the marker controller 100, and for reflecting the fundamental wave generated by the laser medium 25. The first reflection mirror 21 is housed in an airtight manner. Among these components, at least the laser medium 25 may be accommodated in either the Q switch accommodation unit 2A or the wavelength conversion unit 2B.

  On the other hand, the wavelength converter 2B includes a transmission window 15 capable of transmitting the fundamental wave generated by the laser medium 25 and an output window 16 capable of emitting the UV laser light generated in the wavelength converter 2B. It has a housing 20 formed. The wavelength conversion unit 2B receives at least the fundamental wave generated by the laser medium 25 and is incident on the internal space surrounded by the housing 20, and the second harmonic having a wavelength higher than the wavelength of the fundamental wave is A first wavelength conversion unit (first wavelength conversion element) 26 to be generated, and a second wavelength conversion unit (second wavelength conversion element) 27 to generate a third harmonic having a wavelength higher than that of the second harmonic; The second reflection mirror 22 for reflecting at least one of the second harmonic and the third harmonic is airtightly accommodated.

  Specifically, in the embodiment shown in FIGS. 4 to 6, the housing 20 is constituted by the above-described base plate 12, the side wall 13, and the lid 14, and the transmission window 15 and the output window 16 are Both are provided on the side wall portion 13.

  As described above, since the Q switch housing portion 2A and the wavelength conversion portion 2B are separated by the side wall portion 13, providing the transmission window portion 15 in the side wall portion 13 enables the first reflection in the Q switch housing portion 2A. A resonator constituted by the mirror 21 and the second reflection mirror 22 in the wavelength conversion unit 2B forms a resonant optical path passing through the transmission window unit 15.

  In addition, the wavelength conversion unit 2B can seal the beam expander 29 and the laser beam separation unit 28 for separating at least the third harmonic from the resonant optical path by the internal space formed by the housing 20.

  In particular, in the example shown in FIG. 6, the laser light output unit 2 is configured as a so-called intra-cavity type laser oscillator. That is, on the way from the first reflection mirror 21 to the second reflection mirror 22, the Q switch 23, the folding mirror 24 b forming the incident part 24, the laser medium 25, the transmission window part 15, and the laser beam separation part A first separator 28a that forms 28, a second wavelength conversion element 27, and a first wavelength conversion element 26 are arranged in order.

  Here, the folding mirror 24 b is disposed so as to merge the optical axis of the excitation light generated by the excitation light generation unit 110 with the optical axis of the resonant light path. Further, the first separator 28 a is arranged to separate the laser light containing at least the third harmonic from the resonant optical path connecting the first reflection mirror 21 and the second reflection mirror 22.

  Hereinafter, the configuration related to the laser light output unit 2 will be described in order.

-First reflection mirror 21-
The first reflection mirror 21 is accommodated in the Q switch accommodation portion 2A, and is configured to reflect at least a fundamental wave. As described above, the first reflection mirror 21 and the second reflection mirror 22 constitute a resonator. In this embodiment, the first reflection mirror 21 is a total reflection mirror that reflects the fundamental wave.

-Second reflection mirror 22-
The second reflection mirror 22 is accommodated in the wavelength conversion unit 2B, and is configured to reflect at least the fundamental wave. The second reflection mirror 22 and the first reflection mirror 21 constitute a resonator. In this embodiment, the second reflection mirror 22 is a total reflection mirror that reflects not only the fundamental wave but also the second harmonic and the third harmonic.

-Q switch 23-
The Q switch 23 is accommodated in the Q switch accommodating portion 2A, and is configured to pulse-oscillate the fundamental wave generated by the laser medium 25. Specifically, the Q switch 23 is disposed on the optical axis of the resonant optical path, and is interposed between the laser medium 25 and the first reflection mirror 21. By using the Q switch 23, it is possible to change continuous oscillation to high-speed repetitive pulse oscillation having a high peak output value (peak value). The Q switch 23 is connected to a Q switch control circuit that generates an RF signal applied to the Q switch 23. The laser light output unit 2 amplifies the laser light composed of photons emitted by stimulated emission from the laser medium 25 by multiple reflection between the first reflection mirror 21 and the second reflection mirror 22, thereby the laser light separation unit 28. Output laser light.

  That is, if the Q switch 23 is temporarily turned on, the laser light incident on the Q switch 23 is deflected and separated from the resonant optical path. In this case, as a result of regulating the multiple reflection of the laser light, generation of a population inversion is promoted in the laser medium 25 described later.

  When the Q switch 23 is turned on for a predetermined period and then switched off, the laser light is amplified by multiple reflection. In this case, high-power laser light is pulsed.

  Thus, the above-mentioned high-speed repetitive pulse oscillation can be performed by periodically switching the on / off of the Q switch 23. As a control amount for controlling such pulse oscillation, for example, a duty ratio related to a ratio of a period during which the Q switch 23 is turned on (on time) and a period during which the Q switch 23 is turned off (off time) can be mentioned. . When the duty ratio is large, the period during which the Q switch 23 is on is longer than when the duty ratio is small. In this case, generation of population inversion is promoted, and an output value of pulse oscillation (for example, pulse energy of laser light) becomes large. Also, as another control amount for controlling pulse oscillation, there is a Q switch frequency that indicates the frequency at which the Q switch repeats on and off. By increasing the Q switch frequency, the number of pulse oscillations emitted per unit time is increased.

-Incident part 24-
An optical fiber cable extending from the excitation light generation unit 110 is connected to the incident unit 24. That is, one end of this optical fiber cable is connected to the excitation light focusing part 113, while the other end is connected to the incident part 24 housed in the Q switch housing 2A. The laser excitation light incident from the incident part 24 is to reach the laser medium 25.

  Here, in the example shown in FIGS. 5 to 6, the light collecting portion 24 a and the turning mirror 24 b are interposed between the incident portion 24 and the laser medium 25. The condensing part 24a is comprised by a set of 2 optical lenses, condenses the laser excitation light which propagated and entered the optical fiber cable, and guides it to the folding mirror 24b.

  On the other hand, the folding mirror 24 b is configured as a so-called half mirror, and the laser light (specifically, the laser excitation light) propagating in the direction from the incident part 24 through the light collecting part 24 a to the laser medium 25 Is transmitted, while the laser light (specifically, the fundamental wave) propagating in the opposite direction is totally reflected. The laser light totally reflected by the turning mirror passes through the Q switch 23 (specifically, the Q switch 23 turned off) to reach the first reflection mirror 21 as described later.

-Laser medium 25-
The laser medium 25 is a laser medium capable of forming a population inversion, and is configured to perform stimulated emission corresponding to the incident laser excitation light when the laser excitation light is incident on the medium. Although the wavelength (so-called fundamental wavelength) of the photon emitted by the stimulated emission increases or decreases according to the configuration of the laser medium 25, it is in the infrared region around 1 μm in this example.

In this embodiment, rod-shaped Nd: YVO ₄ (yttrium vanadate) is used as the laser medium 25. Laser excitation light is incident from one end face of the rod-shaped laser medium 25, and laser light having a fundamental wavelength (so-called fundamental wave) is emitted from the other end face (one direction excitation by so-called end pumping) method). In this example, the fundamental wavelength is set to 1064 nm. On the other hand, the wavelength of the laser excitation light is set near the central wavelength of the absorption spectrum of Nd: YVO ₄ to promote stimulated emission. However, not limited to this example, as another of the laser medium, for example, YAG rare earth-doped, can be used YLF, a GdVO ₄ or the like. Various solid-state laser media can be used depending on the application of the laser processing apparatus L.

  In addition, the wavelength conversion element may be combined with the solid laser medium to convert the wavelength of the output laser light into an arbitrary wavelength. In that case, unlike FIG. 6, the laser medium 25 may be accommodated in the wavelength conversion unit 2B. Also, a so-called fiber laser may be used in which a fiber is used as an oscillator instead of a bulk as a solid laser medium.

Furthermore, the marker head 1 is not limited to a solid-state laser, and may use a gas laser that also uses a gas such as CO ₂ , helium-neon, argon, or nitrogen as a medium. For example, a laser medium in the case of using a carbon dioxide gas laser is filled with carbon dioxide gas (CO ₂ ) inside, has an electrode built-in, and excites carbon dioxide gas based on the print signal input from the laser control device Thus, the laser is oscillated.

  Furthermore, as an excitation method using a solid laser medium, the laser light output unit 2 uses a two-direction excitation method in which excitation light is irradiated from each end face before and after the solid laser medium, instead of the above-mentioned one direction excitation method. It can also be done.

-First wavelength conversion element 26-
The first wavelength conversion element 26 is a non-linear optical crystal capable of generating a second harmonic, and when the fundamental wave is incident, the frequency of the fundamental wave is doubled and emitted as a second harmonic ( It is configured as Second Harmonic Generation (SHG). That is, the wavelength of the laser light generated when the fundamental wave is made incident on the first wavelength conversion element 26 is in the visible light range of about 500 nm. In particular, in the present embodiment, the wavelength of the second harmonic is set to 532 nm.

  In general, the conversion efficiency of the fundamental wave by the first wavelength conversion element 26 is less than 100%. Therefore, at least a part of the fundamental wave that has entered the first wavelength conversion element 26 is emitted without being converted by the first wavelength conversion element 26. Therefore, when the fundamental wave is made incident on the first wavelength conversion element 26, laser light including the fundamental wave and the second harmonic is emitted.

In this embodiment, LBO (LiB ₃ O ₃ ) is used as the first wavelength conversion element 26. However, the present invention is not limited to this example, and as the first wavelength conversion element 26, KTP (KTiPO ₄ ), organic nonlinear optical materials, or other inorganic nonlinear optical materials such as KN (KNbO ₃ ), KAP (KAsPO ₄ ), BBO ( _{β-BaB 2 O 4),} LBO (LiB 3 O 5) and the bulk type polarization inversion element _{(LiNbO 3 (Periodically Polled Lithium Niobate} : PPLN), may be used LiTaO _3, etc.). In addition, it is also possible to use a semiconductor laser as a pumping light source of a laser by upconversion using a fluoride fiber doped with a rare earth such as Ho, Er, Tm, Sm, or Nd. Thus, various types of optical materials can be utilized in this embodiment.

-Second wavelength conversion element 27-
The second wavelength conversion element 27 is a non-linear optical crystal capable of generating the third harmonic, and when the fundamental wave and the second harmonic are incident (in particular, the propagation direction of the fundamental and the second harmonic is (When equal), it is configured to be converted to a third harmonic having a frequency three times that of the fundamental wave and emitted (Third Harmonic Generation: THG). That is, the wavelength of the laser light generated when the fundamental wave and the second harmonic are incident on the second wavelength conversion element 27 is in the ultraviolet region around 350 nm (specifically, the visible light region and the ultraviolet region Near the border with In particular, in the present embodiment, the wavelength of the third harmonic is set to 355 nm.

  In general, the conversion efficiency of the fundamental wave by the second wavelength conversion element 27 is less than 100%. Therefore, at least a part of each of the fundamental wave and the second harmonic incident on the second wavelength conversion element 27 is emitted without being converted by the second wavelength conversion element 27. Therefore, when the fundamental wave and the second harmonic wave are input to the second wavelength conversion element 27, laser light in which the fundamental wave, the second harmonic wave and the third harmonic wave are mixed is emitted.

In this embodiment, LBO (LiB ₃ O ₃ ) is used as the second wavelength conversion element 27. However, not limited to this example, various types of optical materials such as KTP (KTiPO ₄ ), organic nonlinear optical materials, and other inorganic nonlinear optical materials can be used as the first wavelength conversion element 26.

-Laser beam separation unit 28-
The laser beam separation unit 28 is accommodated in the wavelength conversion unit 2B, and is configured to separate the third harmonic from the resonance optical path of the laser beam and to emit the third harmonic wave from the laser beam output unit 2.

  As shown in FIGS. 5 to 6, the laser beam separation unit 28 in this embodiment is configured of a plurality of optical components, and is for extracting the second and third harmonics from the laser beam. First separator (output mirror) 28a, a concave lens 28b for adjusting the beam diameter of the laser beam consisting of the second and third harmonics, and a second separator (reflection for extracting the third harmonic wave from the laser beam A mirror 28c and an attenuator 28d for attenuating the unnecessary second harmonic can be included (see also FIG. 9).

  The first separator 28a is a so-called beam splitter and is configured to transmit the fundamental wave while reflecting the second harmonic and the third harmonic. The first separator 28 a is disposed to intersect the optical axis of the resonant optical path connecting the first reflection mirror 21 and the second reflection mirror 22, and has a posture inclined approximately 45 degrees with respect to the optical axis. It is done.

  The concave lens 28 b is configured to expand the beam diameter of the transmitted laser beam by transmitting the laser beam reflected by the first separator 28 a, that is, the laser beam separated from the resonant optical path. In this configuration example, although the concave lens 28b is interposed between the first separator 28a and the second separator 28c, it is not limited to such an arrangement. For example, the laser beam after passing through the second separator 28c may be disposed to pass through.

  The second separator 28c is a beam splitter similar to the first separator 28a, and is configured to transmit the second harmonic while reflecting the third harmonic. The second separator 28c is disposed to intersect the optical axis of the laser beam having passed through the concave lens 28b, and is inclined at approximately 45 degrees with respect to the optical axis.

  The attenuation unit 28 d is configured to attenuate the laser light transmitted through the second separator 28 c, that is, the second harmonic. In this configuration example, the attenuation unit 28d attenuates the second harmonic by multiple reflection.

-Beam expander 29-
The beam expander 29 is composed of a plurality of optical lenses, and is configured to make the third harmonic reflected by the second separator 28 c incident and to be suitable for incident on the Z scanner 33 described later, It is configured to adjust the beam diameter of

  In this configuration example, the second separator 28c, the two optical lenses forming the beam expander 29, and the output window 16 of the housing 20 are formed by the third harmonic reflected by the second separator 28c. The light paths are arranged in this order. These components are disposed slightly above the housing 10 in the vertical direction.

  Although not described in detail, a beam sampler for separating a part of the laser beam is disposed between the beam expander 29 and the output window section 16. A power monitor for detecting the output of the laser beam is provided downstream of the beam sampler, and the detection signal is output to the control unit 101 of the marker controller 100.

  The beam expander 29 can be omitted if it is not necessary to expand the beam diameter of the laser beam.

(Laser resonance)
As shown in FIGS. 5 to 6, the laser excitation light incident from the incident portion 24 is transmitted through the folding mirror 24b and incident on one end surface of the laser medium 25 in the Q switch housing portion 2A. Then, the fundamental wave emitted based on the laser excitation light passes through the transmission window portion 15 and enters the wavelength conversion portion 2B.

  Subsequently, the fundamental wave that has entered the wavelength conversion unit 2B passes through the first separator 28a, passes through the second wavelength conversion element 27, and enters the first wavelength conversion element 26. In the first wavelength conversion element 26, a part of the fundamental wave is converted to the second harmonic. Therefore, the first wavelength conversion element 26 emits laser light in which the fundamental wave and the second harmonic are mixed. The laser light is totally reflected at the second reflection mirror to reverse the light path up to here.

  Then, the laser light that has entered the first wavelength conversion element 26 again enters the second wavelength conversion element 27 after the second harmonic is generated again in the first wavelength conversion element 26. In the second wavelength conversion element 27, part of the fundamental wave and the second harmonic is converted into the third harmonic. Therefore, the second wavelength conversion element 27 emits a laser beam in which the fundamental wave, the second harmonic and the third harmonic are mixed. When the laser light reaches the first separator 28a, the second harmonic and the third harmonic are reflected by the first separator 28a and separated from the resonant optical path, while the fundamental wave passes through the first separator 28a. Leading to the transmission window portion 15.

  Here, the second and third harmonics separated by the first separator 28a pass through the concave lens 28b and then reach the second separator 28c. The second separator 28 c transmits the second harmonic and guides the second harmonic to the attenuator 28 d, and reflects the third harmonic and guides the third harmonic to the beam expander 29. The third harmonic guided to the beam expander 29 has its beam diameter adjusted, and is emitted as UV laser light through the output window section 16.

  On the other hand, the fundamental wave that has passed through the first separator 28 a and reached the transmission window 15 passes through the transmission window 15 and then reaches the folding mirror 24 b via the laser medium 25. As described above, the folding mirror 24 b reflects the fundamental wave thus propagated and guides it to the Q switch 23. The fundamental wave guided to the Q switch 23 is deflected and separated from the resonant light path when the Q switch 23 is in the on state. As described above, in this case, an output zero or a very low output continuous wave (CW) will oscillate.

  On the other hand, when the Q switch 23 is in the off state, it passes through the Q switch 23 and reaches the first reflection mirror 21. The fundamental wave reflected by the first reflection mirror 21 passes through the Q switch 23 again, and is then reflected by the turning mirror 24 b and enters the laser medium 25. The fundamental wave that has entered the laser medium 25 enters the wavelength conversion unit 2B again.

  By repeating such a process, as a result of multiple reflection of the fundamental wave between the first reflection mirror 21 and the second reflection mirror 22, the laser light is amplified, and the on / off control of the Q switch 23 is performed. Thus, the high power UV laser will be pulsed intermittently.

(Configuration related to temperature control of optical components)
By the way, in order to secure the conversion efficiency of the laser light by the first wavelength conversion element 26 and the second wavelength conversion element 27, it is required to control the temperature appropriately.

  Therefore, the laser light output unit 2 sets the first and second wavelength conversion elements 26 and 27 at the predetermined target temperature based on the control signal input from the marker controller 100. An element-side temperature control unit for adjusting the temperature of the wavelength conversion elements 26 and 27 is provided.

  Specifically, the element-side temperature control unit includes a first temperature control unit 5 capable of adjusting the temperature of the first wavelength conversion element 26, and a second temperature control unit 6 capable of adjusting the temperature of the second wavelength conversion element 27. And. The first temperature control unit 5 and the second temperature control unit 6 are both disposed outside the housing 20 (that is, outside the internal space surrounded by the housing 20).

  The first temperature control unit 5 and the second temperature control unit 6 are configured to be controlled independently of each other. That is, in each of the first temperature control unit 5 and the second temperature control unit 6, members for adjusting the temperature, such as Peltier elements, are individually provided, and separate control signals (Peltier When an element is used, current (control current) can be sent.

  In particular, in this embodiment, the first wavelength conversion element 26 and the first temperature control unit 5 are unitized, while the second wavelength conversion element 27 and the second temperature adjustment unit 6 are unitized. . In the following description, the former is referred to as "SHG unit", while the latter is referred to as "THG unit".

  Further, the temperature of the laser beam separation unit 28 is adjusted from the viewpoint of reducing the temperature difference between the first and second wavelength conversion elements 26 and 27 and the first and second separators 28 a and 28 c in the laser beam separation unit 28. It is also required.

  Therefore, based on the control signal input from the marker controller 100, the laser light output unit 2 falls within a predetermined temperature range defined according to the target temperature of the first and second wavelength conversion elements 26 and 27. The laser beam separation unit 28 is provided with an output mirror temperature control unit 7 that adjusts the temperature of at least the first separator 28a.

  Specifically, in this embodiment, the output mirror temperature control unit 7 collectively adjusts the temperatures of the first separator 28a, the concave lens 28b, and the second separator 28c among the optical components constituting the laser beam separation unit 28. Is configured. Note that these temperatures may be adjusted individually.

  In particular, in this embodiment, the laser beam separation unit 28 and the output mirror temperature control unit 7 are unitized. In the following description, this unit is referred to as a "laser beam separation unit".

  Hereinafter, the configurations of the SHG unit, the THG unit, and the laser beam separation unit will be described in order.

-SHG unit-
FIG. 7 is a cross-sectional view illustrating the configuration of the SHG unit. As shown in the figure, the SHG unit includes a Peltier base 51 supported on the base plate 12 and a crystal holding member 53 supported on the Peltier base 51 via a plurality of positioning pins (not shown). The first wavelength conversion element 26 mounted on the crystal holding member 53 and the crystal pressing member 54 for fixing the first wavelength conversion element 26 to the crystal holding member 53 are configured. The first temperature control unit 5 is held between the Peltier base 51 and the crystal holding member 53. Further, the harness 56 connected to the first temperature adjustment unit 5 is connected from the outside of the housing 20 via the peltier base 51 and the through holes 51 a and 12 a provided in the base plate 12.

  In the description related to the SHG unit, "upper" corresponds to "upper" on the sheet of FIG. The upper side here is equal to one side in the above-mentioned lateral direction.

  The peltier base 51 is formed in a rectangular plate shape, and is fixed on the base plate 12 by a screw or the like. On the upper surface of the Peltier base 51, a first temperature control unit 5 made of a Peltier element is mounted. The above-mentioned plurality of positioning pins are also inserted in the upper surface of the Peltier base 51, and the crystal holding member 53 is supported via the positioning pins.

  The use of the support structure via the positioning pins in this way is advantageous in reducing the contact area between the Peltier base 51 and the crystal holding member 53 and, consequently, suppressing the heat transfer between the two members.

  The crystal holding member 53 is formed in a plate shape smaller in size than the Peltier base 51, and is fixed to the Peltier base 51 via a positioning pin. Between the lower surface of the crystal holding member 53 and the upper surface of the peltier base 51, a sealing member 57 made of resin such as an O-ring is held. Although details will be omitted, the seal member 57 can be shaped so as to surround the first temperature control unit 5 from the side.

  A space surrounded by the lower surface of the crystal holding member 53, the upper surface of the peltier base 51, and the seal member 57 communicates with the outside of the housing 20 through the through hole 12a provided in the base plate 12 and is surrounded by the housing 20. The space is separated in an airtight manner by holding the sealing member 57.

  The first temperature control unit 5 is disposed in the space thus isolated. Specifically, the first temperature control unit 5 according to the present embodiment is formed of a substantially thin plate-like Peltier element, and is held between the upper surface of the Peltier base 51 and the crystal holding member 53. A harness 56 for supplying current to the Peltier device is connected to the side of the first temperature control unit 5. The harness 56 is extended outside through the through hole 12 a of the base plate 12 as described above.

  Further, a temperature sensor 58 for detecting the temperature of the first temperature control unit 5 is inserted in the crystal holding member 53. The temperature sensor 58 is formed in a substantially rod shape, and is inserted upward from the lower surface of the crystal holding member 53. Although the details will be omitted, the wires for outputting the detection signal from the temperature sensor 58 are drawn out through the through holes 12 a of the base plate 12 in the same manner as the harness 56 connected to the first temperature control unit 5. It is done.

  The crystal holding member 53 has a cross-sectional shape in which the substantially L-shape is inverted to the left and right, and the first wavelength conversion element 26 is placed on the upper surface near the corner of the L-shape.

  The crystal holding member 54 is fixed to the upper surface of the crystal holding member 53, and holds the first wavelength conversion element 26 together with the crystal holding member 53.

  When a current is supplied to the first temperature control unit 5, the first temperature control unit 5 (specifically, the surface on the side of the crystal holding member 53 in the first temperature control unit 5) responds to the magnitude of the current. Heat up. The heat is transferred to the first wavelength conversion element 26 via the crystal holding member 53. Then, the first wavelength conversion element 26 is temperature-controlled so as to maintain a predetermined target temperature T1. The target temperature T1 can be appropriately changed in accordance with the design of the optical system and the like, but in this embodiment, it is set within the range of 50 to 100.degree.

  Also, the first temperature control unit 5, the harness 56 connected to the first temperature control unit 5, and the space in which the temperature sensor 58 is housed are airtightly isolated from the space surrounded by the housing 20. ing. Even if synthetic resin or the like is vaporized in these parts and impurities are generated, it is possible to suppress such impurities from entering the space surrounded by the housing 20, that is, the inside of the wavelength conversion portion 2B. . This is advantageous in suppressing the adhesion of impurities to various optical components such as the first wavelength conversion element 26 and the first separator 28a.

-THG unit-
FIG. 8 is a cross-sectional view illustrating the configuration of the THG unit. The THG unit is configured substantially the same as the SHG unit except in part. That is, as shown in FIG. 8, the THG unit is mounted on Peltier base 61 supported on base plate 12, crystal holding member 63 supported with respect to Peltier base 61, and crystal holding member 63. A second wavelength conversion element 27 is disposed, and a crystal pressing member 64 for fixing the second wavelength conversion element 27 to the crystal holding member 63. Here, the second temperature control unit 6 is held between the Peltier base 61 and the crystal holding member 63. The harness 66 connected to the second temperature adjustment unit 6 is connected from the outside of the housing 20 via a through hole 61 a provided in the peltier base 61.

  The second temperature control unit 6 is disposed in the space thus isolated. Specifically, the second temperature control unit 6 according to the present embodiment is formed of a substantially thin plate-like Peltier element, and is held between the upper surface of the Peltier base 61 and the crystal holding member 63. A harness 66 for supplying current to the Peltier device is connected to the side of the second temperature control unit 6. The harness 66 is drawn out through a through hole 61 a provided in the peltier base 61.

  Further, a sealing member 67 made of resin, such as an O-ring, is held between the lower surface of the crystal holding member 63 and the upper surface of the peltier base 61. Similar to the seal member 57 in the SHG unit, the seal member 67 can be shaped so as to surround the second temperature control unit 6 from the side.

  Further, a temperature sensor 68 for detecting the temperature of the second temperature control unit 6 is inserted in the crystal holding member 63. Although details are omitted, the wiring for outputting the detection signal by the temperature sensor 68 is, like the harness 66 connected to the second temperature control unit 6, to the outside through the through hole 61 a of the peltier base 61. It is being fed out.

  When a current is supplied to the second temperature control unit 6, the second temperature control unit 6 (specifically, the surface on the side of the crystal holding member 63 in the second temperature control unit 6) responds to the magnitude of the current. Heat up. The heat is transmitted to the second wavelength conversion element 27 via the crystal holding member 63. Then, the second wavelength conversion element 27 is temperature-controlled so as to maintain a predetermined target temperature T2. The target temperature T2 can be appropriately changed in accordance with the design of the optical system and the like, but in this embodiment, it is set to be substantially the same as the target temperature T1 of the first wavelength conversion element 26.

  Further, the second temperature control unit 6, the harness 66 connected to the second temperature control unit 6, and the space in which the temperature sensor 68 is accommodated are airtightly isolated from the space surrounded by the housing 20. ing. Even if synthetic resin or the like is vaporized in these parts and impurities are generated, it is possible to suppress such impurities from entering the space surrounded by the housing 20, that is, the inside of the wavelength conversion portion 2B. . This is advantageous in suppressing the adhesion of impurities to various optical components such as the second wavelength conversion element 27 and the first separator 28a.

-Laser beam separation unit-
FIG. 9 is a perspective view illustrating the configuration of the laser beam separation unit, and FIG. 10 is a perspective view partially showing the configuration illustrated in FIG. The laser beam separation unit shown in FIGS. 9 to 10 includes a separator base (base plate) 71 extending substantially in parallel to the base plate 12, and the separator base 71 enables the first separator 28a described above, the concave lens 28b, The two separators 28c and the damping part 28d are supported.

  The separator base 71 shown in FIGS. 9 to 10 is formed in a substantially rectangular plate shape extending along the vertical direction of the housing 10, and is accommodated in an internal space surrounded by the housing 20. The separator base 71 is integrally provided to one inner wall 13a that defines the inner space surrounded by the housing 20, and extends inwardly from the inner wall 13a.

  That is, as described above, the internal space of the housing 20 is partitioned by the base plate 12, the side wall portion 13, and the lid portion 14. The separator base 71 is disposed inside a corner where one inner wall 13a of the side wall portion 13 intersects with the other inner wall 13b orthogonal to the one inner wall 13a, and maintains a posture approximately parallel to the base plate 12 It extends substantially straight from the one inner wall 13a and in a direction substantially parallel to the other inner wall 13b.

  Further, a first connection portion 71 a integrated with one inner wall 13 a of the housing 20 is provided at one end in the longitudinal direction of the separator base 71. As can be seen from FIGS. 9 to 10, the first connection portion 71a is extended in the longitudinal direction of the separator base 71, and can support the first separator 28a, the concave lens 28b, the second separator 28c, and the damping portion 28d. It is formed narrower than the target site.

  On the other hand, the other end of the separator base 71 in the longitudinal direction is provided with a second connection portion 71 b integrated with the other inner wall 13 b of the housing 20. As can be seen from FIGS. 9 to 10, the second connection portion 71b is extended in the lateral direction of the separator base 71, and is formed narrower than the first connection portion 71a.

  Thus, the separator base 71 is configured to be integrally supported with respect to the inner walls 13a and 13b constituting the housing 20 by providing the connection portions 71a and 71b at one end and the other end in the longitudinal direction. .

  A plurality of cylindrical positioning pins are interposed between the separator base 71 and the base plate 12. By interposing the positioning pins, it is possible to suppress the thermal coupling between the separator base 71 and the base plate 12.

  Then, as shown in FIG. 10, the separator base 71 is provided with a first insertion hole (insertion hole) 72 which allows the output mirror temperature control unit 7 to be inserted. The first insertion hole 72 extends in the shape of a narrow hole along the longitudinal direction of the separator base 71, and opens at the outer surface of the side wall portion 13 via the first connection portion 71a. The output mirror temperature control unit 7 is formed in a rod shape, and is inserted from the opening. The end of the first insertion hole 72 extends to the vicinity of the other end of the separator base 71, while the beginning of the first insertion hole 72 communicates with the external space of the housing 20.

  In this embodiment, the output mirror temperature control unit 7 is formed of a heating wire including a nichrome wire, and is inserted into the first insertion hole 72 and generates heat according to the current supplied from the outside. It is supposed to be.

  Furthermore, as shown in FIG. 10, the separator base 71 is also provided with a second insertion hole 73 which allows the temperature sensor 75 to be inserted. Similar to the first insertion hole 72, the second insertion hole 73 extends in the shape of a narrow hole along the longitudinal direction of the separator base 71, and opens at the outer surface of the side wall portion 13 via the first connection portion 71a. doing. The end portion of the second insertion hole 73 extends to a substantially central portion in the longitudinal direction of the separator base 71, while the start end portion communicates with the external space of the housing 20.

  In this embodiment, the temperature sensor 75 is formed in an elongated rod shape, is inserted into the second insertion hole 73, and outputs a detection signal indicating the detection result.

  When a current is supplied to the output mirror temperature control unit 7, the output mirror temperature control unit 7 generates heat according to the magnitude of the current. The heat is transmitted to the first separator 28a, the concave lens 28b, the second separator 28c, and the attenuation portion 28d through the separator base 71. Then, each optical component is temperature-controlled so as to fall within a predetermined temperature range T3.

  Here, a temperature range T3 which is a control target in the output mirror temperature control unit 7 is defined in accordance with the target temperatures T1 and T2 in the first and second temperature control units 5 and 6. When the target temperatures T1 and T2 are the same, the temperature range T3 is preferably ± 10 ° C., more preferably ± 5 ° C. with respect to the target temperature T1.

<Suppressing Output Deterioration of Laser Light (Laser Light Output Unit 2)>
Generally, from the viewpoint of suppressing the decrease in output of laser light, it is required to prevent impurities from adhering to various optical components. As shown in FIG. 11 to FIG. 12, such impurities are concentrated to the laser light by the so-called light collecting effect, and the impurities (contamination) with respect to the optical component disposed on the optical axis of the laser light. May adhere and condense. As a result, transmission loss and reflection loss of laser light may occur, and as a result, the output may be reduced.

  On the other hand, in this embodiment, as shown in FIG. 5 to FIG. 6, the first and second wavelength conversion elements 26 and 27 are accommodated separately from the Q switch accommodation portion 2A which accommodates the Q switch 23. And a first reflection mirror 21 housed in the Q switch housing 2A and a second reflection mirror 22 housed in the wavelength converter 2B to constitute a resonator for amplifying the laser light. did. The wavelength conversion unit 2B has an internal space independent of the Q switch accommodation unit 2A and can seal the first and second wavelength conversion elements 26 and 27 in an airtight manner, so it temporarily occurs in the Q switch 23. Even if the impurities are released into the air inside the housing 10, they can be prevented from adhering to the first and second wavelength conversion elements 26, 27. As a result, it is possible to suppress the decrease in the output of the laser beam.

  Further, as shown in FIG. 9, not only the temperatures of the first and second wavelength conversion elements 26 and 27 can be adjusted, but also the temperature of the first separator 28a as an output mirror can be adjusted. By defining the temperature range T3 targeted by the first separator 28a according to the target temperatures T1 and T2 of the first and second wavelength conversion elements 26 and 27, each wavelength conversion element 26 and 27 and the first separator The temperature difference between 28 a and 28 a can be reduced. As a result, it is possible to suppress the adhesion of impurities to the first separator 2-a, and in turn, it is possible to suppress the reduction in the output of the laser beam.

-Modification related to suppression of output drop-
In the embodiment, although the first separator 28a as the output mirror and the first and second reflection mirrors 21 and 22 are configured as separate optical components, the present invention is not limited to this configuration. For example, one of the first and second reflecting mirrors 21 and 22 may be a half mirror that transmits the third harmonic.

  Further, the configuration of the resonator is not limited to that of the intra-cavity type (a method of arranging the wavelength conversion element inside the resonator). For example, when the first reflection mirror 21 is disposed in the wavelength conversion unit 2B, it may be configured as an extra cavity type (type in which the wavelength conversion element is disposed outside the resonator).

(Modification of configuration related to temperature control of optical components)
In this embodiment, the configuration including the first and second temperature control units 5 and 6 and the output mirror temperature control unit 7 is illustrated, but the present invention is not limited to this configuration. For example, the laser light output unit 2 adjusts the temperature of the beam expander 29 based on the control signal from the control unit 101 so as to fall within a predetermined temperature range T4 defined according to the target temperature T1. A temperature control unit may be provided. The temperature range T4 here is preferably ± 10 ° C., more preferably ± 5 ° C. with respect to the target temperature T1, as in the temperature range T3 associated with the output mirror temperature control unit 7.

(Laser light guide 3)
The laser beam guiding unit 3 is configured to bend the laser beam (UV laser beam) emitted from the laser beam output unit 2 to form an optical path for guiding the laser beam to the laser beam scanning unit 4.

  FIG. 13 is a front view illustrating a state in which the front exterior cover 17 (see FIGS. 2 to 4) is removed from the marker head 1, and FIG. 14 shows the configuration illustrated in FIG. FIG. 15 is a diagram showing the configuration illustrated in FIG. 13 with a part thereof omitted. And FIG. 16 is a figure which illustrates the state which removed the Z chamber cover 31 from the marker head 1, FIG. 17 is a cross-sectional view which illustrates the structure of a guide light source (guide light output apparatus) periphery, FIG. 18 is a view exemplifying a longitudinal cross section of the laser light guiding unit 3.

  The laser beam guiding unit 3 includes optical parts including the first and second bend mirrors 32 and 34, and a Z chamber (a sealed space) Sz for sealing the Z scanner 33 and the like. The Z chamber Sz is composed of the partition 11 described above and the Z chamber cover 31 shown in FIGS. 13 to 15, and the wavelength conversion in the laser light output unit 2 is achieved through the output window 16 described above. It is optically coupled to the part 2B.

  Specifically, the Z chamber cover 31 is formed in the shape of a shallow box opened toward the partition portion 11, and by bringing the Z chamber cover 31 into close contact with the partition portion 11, the first bend mirror 32, the Z scanner 33, and the second bend mirror It is made to surround parts which should avoid adhesion of impurities, such as 34, with partition 11. As shown in FIG.

  In addition, a transmission window for transmitting predetermined light is provided on the side wall of the Z chamber cover 31, and an optical path of UV laser light emitted from the laser light output unit 2 inside the Z chamber Sz. And an optical component disposed so as to cross the optical path of the transmitted light transmitted through the transmission window.

  On the other hand, a guide light source (guide light emitting device) 35 capable of emitting guide light for visualizing the scanning position of the UV laser light and a camera (imaging device for imaging the work W) outside the Z chamber Sz ) 36 are both provided. The guide light source 35 emits guide light toward the transmission window (first transmission window 31c), while the camera 36 captures an image of the workpiece W through the transmission window (second transmission window 31d). Light is received. That is, the camera 36 is disposed by the second bend mirror 34 so that the imaging axis (light receiving axis) thereof is coaxial with the optical axis of the UV laser light.

  Hereinafter, the configuration related to the laser beam guiding unit 3 will be described in order.

-Guide light source 35-
The guide light source 35 is disposed outside the Z chamber Sz, and emits guide light toward the first transmission window 31 c which can constitute the transmission window. The first transmission window portion 31 c is disposed at substantially the same height as the output window portion 16 and the first bend mirror 32, and is located slightly above the vertical center of the housing 10.

  As shown in FIG. 15 and the like, the guide light source 35 is disposed at substantially the same height as the first transmission window 31c, and emits guide light inward in the short direction of the housing 10. The optical axis of the guide light intersects both the first transmission window 31 c and the first bend mirror 32.

  Therefore, when the guide light is emitted from the guide light source 35 in order to visualize the scanning position of the UV laser light, the guide light reaches the first transmission window 31 c. The first transmission window portion 31 c transmits the guide light and guides the guide light to the first bend mirror 32 as transmission light. The optical path formed by the transmitted light is adapted to be merged with the optical path of the UV laser light reflected by the first bend mirror 32 by transmitting through the first bend mirror 32.

  Although not described in detail, a circuit board connected to the guide light source 35 is also disposed outside the Z chamber Sz, similarly to the guide light source 35.

-1st bend mirror 32-
In this embodiment, the first bend mirror 32, which can configure an optical component (first optical component), is disposed inside the Z chamber Sz, and as shown in FIGS. 16 to 17, the first mirror 32a. And a second mirror 32b.

  Among these, the first mirror 32 a transmits one of the guide light emitted from the guide light source 35 and the UV laser light output from the laser light output unit 2 and reflects the other. , Each light path is configured to cross each other.

  Specifically, the first mirror 32a is configured as a so-called half mirror, and transmits the guide light emitted from the guide light source 35 and having passed through the first transmission window 31c from one side, while the output window 16 Posture in which UV laser light (especially, UV laser light propagated toward the front side in the front-rear direction as the first direction) incident through the light source is reflected by the other surface on the opposite side to the one surface transmitting the guide light It is fixed by.

  As a result, the optical path of the guide light transmitted through the first mirror 32a and the optical path of the UV laser light reflected by the first mirror 32a merge, and both of them reach the second mirror 32b.

  On the other hand, the second mirror 32b is configured to bend the optical path of the UV laser light so that the optical path is along a second direction (approximately equal to the vertical direction in this example) substantially orthogonal to the first direction. It is done.

  The UV laser light and the guide light bent by the second mirror 32 b propagate downward (specifically, downward in the vertical direction of the housing 10) and pass through the Z scanner 33 to the second bend mirror 34. Through.

-Z scanner 33-
A focus adjustment mechanism that adjusts the focal length of the UV laser light output from the laser light output unit 2 can be disposed inside the Z chamber Sz. As such a focus adjustment mechanism, in this embodiment, a Z scanner 33 as shown in FIGS. 16 and 18 is provided.

  Specifically, the Z scanner 33 is provided in the middle of the optical path from the first bend mirror 32 to the second bend mirror 34 (specifically, near the central portion in the vertical direction of the housing 10), and the UV laser light is The focal length of the lens can be adjusted.

  Since the optical path from the first bend mirror 32 to the second bend mirror 34 is also adapted to propagate the guide light emitted from the guide light source 35, the UV scanner light is operated by operating the Z scanner 33. Not only that, but also the focal length of the guide light can be adjusted together.

-Camera 36-
The camera 36 is disposed outside the Z chamber Sz in the same manner as the guide light source 35, and receives light transmitted through the second transmission window 31d which can form the transmission window. As shown in FIG. 18, the second transmission window 31 d is disposed at substantially the same height as the second bend mirror 34, and is located slightly lower than the vertically central portion of the housing 10.

  The camera 36 is disposed at substantially the same height as the second transmission window 31d as shown in FIGS. 13 to 15 and receives light transmitted through the second transmission window 31d as described above. . Specifically, the light is the reflected light that has entered the laser light guiding unit 3 from the laser light scanning unit 4, and propagates toward the front side in the longitudinal direction of the housing 10 to form the second bend mirror 34 and the second bend mirror 34. The light is transmitted through the transmission window 31d in order. Thereafter, the light is reflected by the camera folding mirror 37, and the reflected light propagates toward the other side in the short direction of the housing 10 and reaches the camera 36. The optical axis of this reflected light intersects both the second transmission window 31 d and the second bend mirror 34.

  That is, for example, when the reflected light reflected at the printing point of the work W passes through the second bend mirror 34 and reaches the second transmission window 31d, the second transmission window 31d transmits the reflected light. It is led to the camera turning mirror 37 as transmitted light. The optical path formed by the transmitted light is adapted to intersect the optical path of the UV laser light and the guide light reflected by the second bend mirror 34 by transmitting through the second bend mirror 34.

  Although not described in detail, a circuit board connected to the camera 36 is also disposed outside the Z chamber Sz in the same manner as the camera 36.

-Second bend mirror 34-
In this embodiment, the second bend mirror 34 capable of forming an optical component (second optical component) is disposed inside the Z chamber Sz, similarly to the first bend mirror 32, and the light received by the camera 36 is received. And one of the UV laser light output from the laser light output unit 2 is transmitted and the other is reflected to make the respective optical paths cross each other.

  Specifically, the second bend mirror 34 is configured as a so-called half mirror, and transmits the light received by the camera 36 while transmitting the UV laser light reflected by the first bend mirror 32 and passed through the Z scanner 33. And guide light is configured to be reflected.

  Thus, as described above, the optical path of the light transmitted through the second bend mirror 34 and the optical paths of the UV laser light and the guide light reflected by the second bend mirror 34 intersect.

  Furthermore, the second bend mirror 34 in this embodiment bends the light path bent by the first bend mirror 32 again to direct the light path to the rear side in the front-rear direction.

  Specifically, as shown in FIG. 16 and FIG. 18 etc., the second bend mirror 34 is fixed in a posture in which its reflecting surface is directed obliquely upward and backward, and from the upper end toward the downward direction, It is inclined to go with. Therefore, when the laser beam propagated downward from above is reflected by the second bend mirror 34, the propagation direction is directed backward.

  The UV laser light and the guide light merged in the second bend mirror 34 propagate from the second space S2 through the downstream side window portion 11b provided in the partition portion 11 by propagating backward as described above. It injects into 1 space S1. As a result, the laser beam guiding unit 3 leads to the laser beam scanning unit 4.

-Desiccant Dm-
Further, as shown in FIG. 18, a storage chamber Sdz is provided inside the Z chamber Sz, and a desiccant is stored in the storage chamber Sdz. Although details are omitted, the storage chamber Sdz communicates with the Z chamber Sz, and the desiccant contained in the storage chamber Sdz can remove moisture from the Z chamber Sz.

<Suppressing Output Decrease of Laser Light (Laser Light Guide Part 2)>
As shown in FIGS. 13 and 16, etc., optical components for which transmission loss or reflection loss of laser light is a concern, such as the first and second bend mirrors 32, 34, are accommodated in the airtight Z chamber Sz. The guide light source 35 and the camera 36 which are concerned about the generation of impurities are disposed outside the Z chamber Sz. With such a configuration, even if impurities are generated in the guide light source 35 and the camera 36, it is possible to suppress adhesion to the optical component. Thus, it is possible to suppress the decrease in the output of the laser beam.

  In general, the so-called light collecting effect becomes more remarkable as the wavelength of the laser light becomes shorter. When the light collection effect becomes significant, the adhesion of impurities to the optical component is even more concerned. When this is taken into consideration, application to a device capable of emitting UV laser light, such as the laser processing device L disclosed herein, is particularly effective in suppressing the decrease in the laser light output.

(Modification of laser light guiding unit 3)
In the embodiment, the first bend mirror 32, the Z scanner 33, and the second bend mirrors 32 and 34 are disposed in the Z chamber Sz, and the guide light source 35 and the camera 36 are disposed outside the Z chamber Sz. Although it was comprised, it is not restricted to this structure.

  FIG. 19 is a view showing first to third modified examples of the laser beam guiding portion 3. As shown in the figure, the Z scanner 33 is omitted (first modification), the guide light source 35 is omitted (second modification), and the camera 36 is omitted (third modification). It is also good.

  Further, the configuration of the light path in the laser light guiding unit 3 can also be changed as appropriate. FIG. 20 is a view showing a fourth modified example of the laser beam guiding portion 3. As shown in the figure, the first and second bend mirrors 34 transmit the laser light emitted from the laser light output unit 2, and also the light emitted from the guide light source 35 or the light received by the camera 36. May be configured to reflect light. Furthermore, in the fourth modification, for example, the guide light source 35 and the first bend mirror 32 can be omitted, or the camera 36 and the second bend mirror 34 can be omitted.

(Laser beam scanning unit 4)
The laser beam scanning unit 4 is configured to two-dimensionally scan the laser beam (UV laser beam) emitted from the laser beam output unit 2 and guided by the laser beam guiding unit 3 on the surface of the work W There is.

  21 to 22 are perspective views illustrating the appearance of the laser beam scanning unit 4, and FIG. 23 is a diagram showing the configuration illustrated in FIG. 22 as viewed from below. FIG. 24 is a longitudinal cross-sectional view illustrating the configuration of the X scanner 8, and FIG. 25 is a longitudinal cross-sectional view illustrating the configuration of the Y scanner 9.

  In the example shown in FIGS. 21 to 25, the laser beam scanning unit 4 is configured as a so-called two-axis (X-axis, Y-axis) galvano scanner. That is, the laser beam scanning unit 4 includes an X scanner 8 for scanning the laser beam in the X direction, a Y scanner 9 for scanning the laser beam in the Y direction, and a first scanner mirror for the X scanner 8 Hereinafter, a scanner housing (accommodating member) 40 for accommodating both of “X mirror” 81 and a second scanner mirror (hereinafter simply referred to as “Y mirror”) 91 for Y scanner 9 And.

  Here, a scanner room Sxy for accommodating the X mirror 81 and the Y mirror 91 is configured by the scanner housing 40 and the inner bottom surface of the housing 10. The scanner room Sxy is connected to the downstream end of the laser light guide 3 (specifically, the above-described downstream side window 11b) through the incident window 41 provided on one side of the scanner housing 40. Optically coupled. The scanner room Sxy is also optically coupled to the exit window 19 provided at the bottom of the housing 10 and thus to the space outside the housing 10 via the opening 43 provided at the bottom of the scanner housing 40. doing.

  Accordingly, as shown by the black arrows in FIG. 23, when the UV laser light is incident from the entrance window 41 into the room of the scanner room Sxy, the UV laser light is reflected by the X mirror 81 and the Y mirror 91 ( In this example, after being reflected by the X mirror 81, the light is reflected by the Y mirror 91), and the light is emitted from the opening 43 to the outside of the scanner room Sxy.

  At that time, by operating the X mirror 81 and the Y mirror 91 to adjust the angle formed by each mirror and the UV laser light, for example, two-dimensional scanning of the UV laser light on the surface of the work W It becomes possible.

  Further, in order to maintain the reflectance of the laser light by the X mirror 81 and the Y mirror 91, it is required to maintain the airtightness of the scanner room Sxy so that impurities do not enter the room.

  In addition, in order to suppress the scattering of UV laser light caused by condensation, it is also required to remove moisture from the scanner room Sxy.

  Therefore, the laser beam scanning unit 4 according to this embodiment is devised by devising the support structure of the X scanner 8 and the Y scanner 9 or arranging the desiccant Dm inside or outside the scanner room Sxy. To meet such requirements.

  Hereinafter, the configuration related to the laser beam scanning unit 4 will be described focusing on the correspondence with the request.

-Scanner housing 40-
In this embodiment, the scanner housing 40 has a substantially cubic box shape, and as shown in FIGS. 4 and 21 and the like, the lower surface of the housing 10 and the partition portion 11 are formed in the first space S1. It is possible to arrange around the corner where it crosses. Each surface of the scanner housing 40 is configured to exhibit various functions in order to hold the X scanner 8 and emit UV laser light.

  That is, the upper surface of the scanner housing 40 constitutes a first holding portion (holding portion) 40a having an opening into which the first drive motor 82 forming the X scanner 8 can be inserted, and the first holding portion 40a The outer peripheral surface of the inserted first drive motor 82 is held (see FIG. 24).

  On the other hand, the rear surface of the scanner housing 40 constitutes a second holding portion (holding portion) 40 b having an opening into which the second drive motor 92 forming the Y scanner 9 can be inserted. The second holding portion 40 b The outer peripheral surface of the inserted galvano motor 92 is held.

  The front surface of the scanner housing 40 (one surface on the left side of the drawing in FIG. 22) constitutes the above-described incident window 41, and the laser light emitted from the laser light output unit 2 and passed through the laser light guiding unit 3 Can be incident into the scanner room Sxy.

  Further, the lower surface of the scanner housing 40 has the opening 43 described above. The opening 43 together with an opening (housing side emission part) 19a provided at the bottom of the housing 10 and a transmissive member 19b capable of transmitting the laser light fitted in the opening 19a 19 (see FIGS. 24 to 25). The emission window portion 19 can emit the UV laser light incident through the incident window portion 41 to the outside of the housing 10.

  The scanner room Sxy formed inside the scanner housing 40 is surrounded and sealed by the first holding unit 40a, the second holding unit 40b, the incident window 41, and the outgoing window 19, and the inside of the chamber is sealed. Can accommodate the aforementioned X mirror 81 and Y mirror 91.

  Further, among the other two surfaces forming the scanner housing 40, one surface on the front side in the drawing of FIG. 22 constitutes the drying through portion. The drying through portion 42 has a through hole 42a for drying the scanner room Sxy with the desiccant Dm, and the first holding portion 40a, the second holding portion 40b, the incident window portion 41, and the outgoing window portion 19. Together with the scanner room Sxy.

  Although the details will be described later, the desiccant Dm disclosed herein can be disposed in the interior of the scanner chamber Sxy or in the interior of the storage chamber Sd in communication with the scanner chamber Sxy as described in detail below.

-X scanner 8-
The X scanner 8 can turn the X mirror 81 for scanning the UV laser light in the X direction (first direction) intersecting the optical axis of the UV laser light on the surface of the work W and the X mirror 81 It comprises a first drive motor 82 to be supported, and a motor holding member 83 to hold the first drive motor 82 by coming into contact with a part of the outer peripheral surface of the first drive motor 82.

  The X mirror 81 is configured as a so-called galvano mirror, and as shown in FIG. 23, the UV laser light incident from the entrance window 41 is reflected and guided to the Y mirror 91.

  Specifically, the X mirror 81 is a substantially rectangular plate-shaped total reflection mirror, and is accommodated in the scanner room Sxy in a state of being supported by the mirror base 82e. The X mirror 81 is designed to operate integrally with the mirror base 82e and thus the rotor 82a of the first drive motor 82, and can rotate around a predetermined rotation axis Ox.

  The first drive motor 82 is a galvano motor composed of a direct current motor and is configured to be rotatable around the rotation axis Ox, and has a rotor 82a that supports the X mirror 81 at one end in the rotation axis Ox direction, and the rotor 82a And a bearing 82c, 82d interposed between the rotor 82a and the motor case 82b for supporting the rotor 82a with respect to the motor case 82b.

  The rotor 82a is configured to rotate by receiving an electric current, and extends in a substantially cylindrical shape along the rotation axis Ox. One end (the tip on the scanner chamber Sxy side) in the rotational axis Ox direction protrudes from the motor case 82b and extends to the interior of the scanner chamber Sxy, and is inserted into the substantially cylindrical mirror base 82e. On the other hand, the other end (the end on the side opposite to the scanner chamber Sxy) located on the opposite side to the one end is embedded in the motor case 82b.

  The motor case 82b is formed in a substantially cylindrical shape that extends in the direction of the rotation axis Ox and is open at both ends in the same direction, and the rotor 82a can be inserted therein. The front end (open end) of the motor case 82 b is inserted into the first holding portion 40 a of the scanner housing 40. As a result, the portion of the outer peripheral surface of the motor case 82b inserted into the first holding portion 40a is held by the first holding portion 40a.

  Further, the open end of the motor case 82b opposite to the portion inserted into the first holding portion 40a is expanded in a substantially bowl shape. The portion thus expanded in diameter is covered by a cap-like scanner cover 84 together with the circuit board 85 in a state where the circuit board 85 for the first drive motor 82 is placed.

  The bearings 82c and 82d are disposed between the outer peripheral surface of the rotor 82a and the inner peripheral surface of the motor case 82b, and support both ends in the longitudinal direction of the rotor 82a.

  The motor holding member 83 is formed in a substantially cylindrical shape extending in the direction of the rotation axis Ox and having both ends open in the same direction, and the motor case 82b can be inserted therein. One open end of the motor holding member 83 can be attached and fixed to the first holding portion 40 a of the scanner housing 40 from above.

  When the motor holding member 83 is fixed to the first holding portion 40a, the inner circumferential surface of the opening of the first holding portion 40a and the inner circumferential surface of the motor holding member 83 are substantially integrated, and the housing space of the motor case 82b is It is divided. When the motor case 82b is inserted into the housing space from above, a portion of the motor case 82b expanded in a substantially bowl shape abuts against the motor holding member 83 from the top to become a retainer. At this time, the outer peripheral surface of the motor case 82b in the vicinity of the front end is inserted into the opening of the first holding portion 40a and is held by the opening, while the outer periphery located closer to the anti-X mirror 81 than the front end The surface is in contact with the inner circumferential surface of the motor holding member 83. That is, the first holding portion 40 a is configured to hold the outer circumferential surface located closer to the X mirror 81 than the portion in contact with the motor holding member 83.

  The scanner cover 84 is formed in a cylindrical shape with a bottom, and the tip of the motor holding member 83 on the side opposite to the X mirror 81 is inserted. The housing space of the circuit board 85 is divided by the scanner cover 84 and the motor case 82b.

  The circuit board 85 constitutes an electric circuit for rotationally driving the first drive motor 82, and is fixed to the end face of the motor case 82b in which the diameter is enlarged in a substantially bowl shape. Two harnesses 89 are connected to the circuit board 85 and are drawn out through an opening provided in the scanner cover 84 (see FIG. 22). Although not shown, a member for sealing the inside of the scanner cover 84 in an airtight manner, such as a resin sealing member, is provided at the periphery of the opening for feeding the harness 89.

  A first seal member (seal member) 86 for restricting the inflow of air into the scanner chamber Sxy is provided at a portion of the outer peripheral surface of the first drive motor 82 held by the first holding portion 40a. There is.

  Specifically, the first seal member 86 is formed of an O-ring made of resin, and is disposed so as to surround the outer peripheral surface of a portion of the outer peripheral surface of the motor case 82b inserted in the opening of the first holding portion 40a. There is. With such an arrangement, the first seal member 86 is held between the inner peripheral surface of the opening of the first holding portion 40a and the outer peripheral surface of the motor case 82b.

  On the other hand, in addition to the first seal member 86, a second seal member (second seal member) 87 that restricts the inflow of air through the gap between the outer peripheral surface of the rotor 82a and the inner peripheral surface of the motor case 82b. Is provided. The second seal member 87 according to this embodiment is provided on a portion of the outer peripheral surface of the first drive motor 82 that is inserted into the scanner cover 84.

  Specifically, the second seal member 87 is formed of an O-ring made of resin in the same manner as the first seal member 86, and surrounds the outer peripheral surface of the portion of the outer peripheral surface of the motor case 82b which is enlarged in a substantially bowl shape Is located in With this arrangement, the second seal member 87 is held between the inner peripheral surface near the opening of the scanner cover 84 and the outer peripheral surface of the motor case 82b.

-Y scanner 9-
The Y scanner 9 is capable of rotating the Y mirror 91 and Y mirror 91 for scanning the UV laser beam in the Y direction (second direction) intersecting the optical axis of the UV laser beam on the surface of the work W And a motor holding member 93 for holding the second drive motor 92 by coming into contact with a part of the outer peripheral surface of the second drive motor 92.

  The Y mirror 91 is configured as a so-called galvano mirror, and as shown in FIG. 23, the UV laser light reflected by the Y mirror 91 is reflected to be guided to the emission window portion 19.

  Specifically, the Y mirror 91 is a substantially rectangular plate-shaped total reflection mirror, and is accommodated in the scanner chamber Sxy in a state of being supported by the mirror base 92e. The Y mirror 91 is designed to operate integrally with the mirror base 92e and thus the rotor 92a of the second drive motor 92, and can rotate around a predetermined rotation axis Oy.

  The second drive motor 92 is a galvano motor composed of a direct current motor, and is configured to be rotatable around the rotation axis Oy, and supports the Y mirror 91 at one end in the rotation axis Oy direction, and the rotor 92a , And bearings 92c and 92d interposed between the rotor 92a and the motor case 92b for supporting the rotor 92a with respect to the motor case 92b.

  The rotor 92a is configured to rotate by receiving an electric current, and is extended in a substantially cylindrical shape along the rotation axis Oy. One end in the rotational axis Oy direction (the end on the scanner chamber Sxy side in FIG. 23) protrudes from the motor case 92b and extends into the chamber of the scanner chamber Sxy, and is inserted into the substantially cylindrical mirror base 92e. On the other hand, the other end (the end on the side opposite to the scanner chamber Sxy in FIG. 25) located on the opposite side to the one end is embedded in the motor case 92b.

  The motor case 92b is formed in a substantially cylindrical shape that extends in the direction of the rotation axis Oy and in which both ends in the same direction are open, and the rotor 92a can be inserted therein. The front end (open end) of the motor case 92 b is inserted into the second holding portion 40 b of the scanner housing 40. As a result, a portion of the outer peripheral surface of the motor case 92b which is inserted into the second holding portion 40b is held by the second holding portion 40b.

  Further, the open end of the motor case 92b opposite to the portion inserted into the second holding portion 40b is expanded in a substantially bowl shape. The portion thus expanded in diameter is covered by a cap-like scanner cover 94 together with the circuit board 95 with the circuit board 95 for the second drive motor 92 attached.

  The bearings 92c and 92d are disposed between the outer peripheral surface of the rotor 92a and the inner peripheral surface of the motor case 92b, and support both ends in the longitudinal direction of the rotor 92a.

  The motor holding member 93 is formed in a substantially cylindrical shape extending in the direction of the rotation axis Oy and having both ends opened in the same direction, and the motor case 92b can be inserted therein. One open end of the motor holding member 83 can be attached and fixed to the second holding portion 40 b of the scanner housing 40 from the side.

  When the motor holding member 93 is fixed to the second holding portion 40b, the inner circumferential surface of the opening of the second holding portion 40b and the inner circumferential surface of the motor holding member 93 are substantially integrated, and the housing space of the motor case 92b is It is divided. When the motor case 92b is inserted into the housing space from the side, the portion of the motor case 92b expanded in a substantially bowl shape abuts against the motor holding member 93 from the side and becomes a retaining member. At this time, the outer peripheral surface of the motor case 92b in the vicinity of the tip is inserted into the opening of the second holding portion 40b and is held by the opening, while the outer periphery located closer to the non-Y mirror 91 than the tip. The surface is in contact with the inner circumferential surface of the motor holding member 93. That is, the second holding portion 40 b is configured to hold the outer peripheral surface located closer to the Y mirror 91 than the portion in contact with the motor holding member 93.

  The scanner cover 94 is formed in a cylindrical shape with a bottom, and the tip of the motor holding member 93 on the side opposite to the Y mirror 91 is inserted. The housing space of the circuit board 95 is partitioned by the scanner cover 94 and the motor case 92 b.

  The circuit board 95 constitutes an electric circuit for rotationally driving the second drive motor 92, and is fixed to the end face of the motor case 92b on which the diameter is enlarged in a substantially bowl shape. Two harnesses 99 are connected to the circuit board 95 and are drawn out through an opening provided in the scanner cover 94 (see FIG. 22). Although not shown, a member for sealing the inside of the scanner cover 94 in an airtight manner, such as a resin sealing member, is provided at the periphery of the opening for feeding out the harness 99.

  A portion of the outer peripheral surface of the second drive motor 92 held by the second holding portion 40b is a first seal member (seal (seal) for restricting the inflow of air into the scanner chamber Sxy as in the X scanner 8. A member 96 is provided.

  Specifically, the first seal member 96 for the Y scanner 9 is generally configured in the same manner as the first seal member 86 for the X scanner 8. That is, the first seal member 96 for the Y scanner 9 is formed of an O-ring made of resin, and surrounds the outer peripheral surface of a portion of the outer peripheral surface of the motor case 92b inserted in the opening of the second holding portion 40b. It is arranged. With this arrangement, the first seal member 96 is held between the inner peripheral surface of the opening of the second holding portion 40b and the outer peripheral surface of the motor case 92b.

  On the other hand, separately from the first seal member 96, a second seal member (second seal member) 97 that restricts the inflow of air via the gap between the outer peripheral surface of the rotor 92a and the inner peripheral surface of the motor case 92b. Is provided. The second seal member 97 according to this embodiment is provided at a portion of the outer peripheral surface of the second drive motor 92 that is inserted into the scanner cover 94.

  Specifically, the second seal member 97 is formed of an O-ring made of resin in the same manner as the first seal member 96, and surrounds the outer peripheral surface of the portion of the outer peripheral surface of the motor case 92b which is enlarged in a substantially bowl shape. Is located in With such an arrangement, the second seal member 97 is held between the inner peripheral surface near the opening of the scanner cover 94 and the outer peripheral surface of the motor case 92b.

<Suppressing Output Decrease of Laser Light (Laser Light Scanning Unit 4)>
As shown in FIG. 24 to FIG. 25, a slight gap may occur in the portion of the outer peripheral surface of the first and second drive motors 82 and 92 held by the first and second holding portions 40 a and 40 b. . Therefore, as shown by arrows F1 to F4 in FIG. 24 to FIG. 25, there is a possibility that an impurity may intrude into the scanner room Sxy from such a gap.

  However, according to the above configuration, by providing the first and second seal members 86, 87, 96, 97 at such a portion, the X mirror 81 and the Y mirror 91 can be used without using special parts such as a vacuum bearing. The impurity can be prevented from invading the scanner chamber Sxy, which is a space for rotating the As a result, it is possible to suppress the decrease in the output of the laser beam while suppressing the manufacturing cost.

-Modification of galvano scanner-
In the above embodiment, the configuration in which the first seal members 86 and 96 and the second seal members 87 and 97 are provided for each of the X scanner 8 and the Y scanner 9 has been described. The configuration of each seal member is as follows. It can be deformed.

  Hereinafter, although the modification of Y scanner is described, the modification disclosed here can also be applied to X scanner.

  FIG. 26 is a view corresponding to FIG. 25 showing a first modified example of the Y scanner. Like Y scanner 9 'shown in FIG. 26, the clearance gap between the 2nd holding | maintenance part 40b and motor case 92b can be sealed by resin as 1st sealing member 96'.

  FIG. 27 is a view corresponding to FIG. 25 showing a second modification of the Y scanner. As in the Y scanner 9 'shown in FIG. 27, the gap between the rotor 92a and the motor case 92b may be sealed by a resin as a second seal member without providing a scanner cover.

  In the first embodiment, the configuration in which both the X scanner 8 and the Y scanner 9 are attached to the scanner housing 40 is described in the first embodiment, but at least the first seal members 86 and 96 and the second seal member 87, The use of the configuration 97 is not limited to such a configuration.

  For example, at least one of the X scanner 8 and the Y scanner 9 may be attached to the scanner housing 40, and the first seal member may be applied to one of them.

-Modification of scanner room Sxy-
In the embodiment, the scanner room Sxy is surrounded by the first holding unit 40a, the second holding unit 40b, the entrance window 41, the exit window 19, and the drying penetration 42. Here, the emission window 19 includes an opening 43 provided on the lower surface of the scanner housing 40, an opening 19a provided on the bottom of the housing 10, and a transmissive member 19b fitted in the opening 19a. However, the present invention is not limited to this configuration.

  FIG. 28 is a view showing a modified example of the scanner housing. As shown in FIG. 28, the emission window 19 may be configured by fitting the transmissive member 43 a into the opening 43 of the scanner housing 40.

-Containment room Sd-
As described above, the desiccant Dm which can be replaced from the outside can be disposed in the scanner room Sxy or the storage room Sd in communication with the scanner room Sxy. In the embodiment illustrated below, although the case where accommodation room Sd is constituted outside the scanner room Sxy is explained, the space for arranging desiccant Dm inside scanner room Sxy like the modification mentioned below (( Hereinafter, such spaces may be denoted by the symbol "Sd '".

  FIG. 29 is a perspective view illustrating the arrangement of the desiccant housing 45, and FIG. 30 is a vertical cross-sectional view illustrating the configuration of the storage chamber Sd and the scanner chamber Sxy. Further, FIG. 31 is a perspective view illustrating the appearance of the desiccant housing 45, and FIG. 32 is an explanatory view illustrating a sealing structure by the replacement lid 18.

  In this configuration example, the storage room Sd and the scanner room Sxy are adjacent to each other in the housing 10, and communicate with the scanner room Sxy through the through holes 42a in the above-described drying through part 42. The storage chamber Sd is configured to exchange the desiccant Dm through an opening (an exchange opening 45c described later) separate from the through hole 42a, and is opened by the exchange lid 18 ing.

  That is, as shown in FIG. 30, the scanner room Sxy intervenes between the left side (the side on the left side of the paper in FIG. 30) of the housing 10 and the base plate 12, and the storage room Sd is the scanner room Sxy. And the left side of the housing 10.

  Specifically, the storage space Sd is partitioned by a desiccant housing 45 capable of containing the desiccant Dm. The desiccant housing 45 is formed in a rectangular shallow box shape, and is disposed at a corner where the lower surface of the housing 10 intersects with the partition 11 in the first space S1.

  In the rear surface of the desiccant housing 45 (the surface on the other side in the short direction), a through hole 45 b as shown in FIG. 30 is opened. In the state where both the desiccant housing 45 and the scanner housing 40 are fixed to the housing 10, the through hole 45b and the through hole 42a of the scanner housing 40 are connected to each other, and the storage chamber Sd and The scanner chamber Sxy comes into communication.

  A filter 42b is attached to the through hole 42a of the scanner housing 40, so that it is possible to suppress an impurity generated from the desiccant Dm from entering the scanner room Sxy from the accommodation room Sd.

  Further, as shown in FIG. 22, the drying through portion 42 of the scanner housing 40 has a seal member 42 c configured to cover the periphery of the through hole 42 a, and the through hole 42 a of the scanner housing 40. And the through hole 45 b of the desiccant housing 45 can be sealed.

  On the other hand, the front surface of the desiccant housing 45 is openably sealed by a replacement lid 18 as shown in FIG. Specifically, on the front surface (the surface on one side in the short direction) of the desiccant housing 45, a replacement opening 45c communicating to the inside of the storage chamber Sd is bored. The replacement opening 45c is a substantially circular opening, and a part of the inner peripheral surface (inner surface) is threaded in a female thread shape.

  The replacement lid 18 has an insertion portion 18a that can close the replacement opening 45c by being inserted into the replacement opening 45c. Specifically, the insertion portion 18a is formed in a substantially cylindrical shape, and a part of the outer peripheral surface (outer surface) is formed to be screwed with the threaded portion in the replacement opening 45c. A seal member 18b is provided on the outer surface of a portion of the insertion portion 18a located on the tip end side in the insertion direction (see the arrow Di in FIG. 32) with respect to the screwable portion.

  Here, the sealing member 18b is made of a resin O-ring, and is fitted in a circumferential groove provided on the outer surface of the insertion portion 18a, and the state in which the replacement lid 18 is removed from the replacement opening 45c. The diameter is slightly larger than the inner diameter of the replacement opening 45c. Therefore, when the insertion portion 18a of the replacement lid 18 is inserted into the replacement opening 45c, the seal member 18b is orthogonal to the insertion direction Di (see the black arrow in FIG. 32). By swelling toward the end, the inner surface of the replacement opening 45c is in close contact with the inner surface.

  The desiccant Dm is formed by bagging a substance capable of adsorbing moisture in the air, such as silica gel and lime, and not only removes moisture from the storage chamber Sd, but also the scanner chamber Sxy Moisture can also be removed from the room. Moreover, as a result of using for a predetermined period, when the moisture removal performance by the desiccant Dm is lowered, the desiccant Dm can be replaced from the outside by removing the replacement lid 18.

<Suppressing Output Decrease of Laser Light Due to Condensation>
As shown in FIG. 22, by forming one surface of the scanner housing 40 as the drying through portion 42, the storage chamber Sd and the scanner chamber Sxy are communicated with each other through the through hole 42a, or through the through hole 42a. It becomes possible to put in and out the desiccant Dm. As a result, it is possible to remove the moisture from the inside of the scanner room Sxy and, consequently, to suppress the reduction in the laser light output caused by the condensation.

-Modification related to storage of desiccant Dm-
In the embodiment described above, the storage room Sd is provided outside the scanner room Sxy, and the desiccant Dm is stored in the room of the storage room Sd. In this embodiment, the drying through portion 42 surrounding the scanner chamber Sxy is provided to connect the scanner chamber Sxy and the storage chamber Sd, but the configuration of the storage chamber Sd and the drying through portion 42 is Not limited to this.

  For example, a space corresponding to the storage room Sd may be provided in the scanner room Sxy. In this case, the through hole 42a in the drying through portion 42 functions as an inlet / outlet for replacing the desiccant Dm.

  Further, even in the case where the storage room Sd is provided outside the scanner room Sxy, the storage method of the desiccant Dm can be appropriately changed by devising the structure of the replacement lid, for example.

  FIG. 33 is a view showing a modification of the replacement lid 18 '. As shown in FIG. 33, the replacement lid 18 'itself may be used as a desiccant housing (housing) for partitioning the storage chamber Sd. In this case, the desiccant Dm can be attached to and detached from the casing together with the replacement lid 18 '.

  In addition, any one of the first holding unit 40a, the second holding unit 40b, the incident window 41, and the exit window 19 configured to surround the scanner room Sxy may be used as the drying penetration unit.

  FIG. 34 is a view showing a modification around the scanner room Sxy. As shown in FIG. 34, a space Sd 'corresponding to the storage chamber may be provided in the scanner chamber Sxy, and the emission window 19 may be configured to be opened and closed from the outside.

<Control of Marker Head 1 by Marker Controller 100>
Hereinafter, among the control of the marker head 1 by the marker controller 100, the control related to the output adjustment of the laser beam and the control performed when the laser processing apparatus L is stopped will be described in order.

(Output adjustment according to pulse frequency)
In general, when laser processing is performed, a target output of laser light may be changed in order to adjust, for example, coloring of printing in laser marking, cutting speed in laser cutting, and the like.

  In this case, it is conceivable to adjust the output of the fundamental wave by adjusting the drive current supplied to the excitation light source 111 as a method for achieving the changed target output.

  That is, for example, when the current value of the drive current is reduced, the output of the excitation light generated in the excitation light source 111 is reduced, and the output of the fundamental wave generated in the laser medium 25 is also reduced. This makes it possible to reduce the output of the laser beam generated based on the fundamental wave.

  As described above, since there is a positive correlation between the magnitude of the drive current and the output of the laser beam, the target output of the laser beam and the excitation light source 111 are obtained as in the table storage unit 114 described above. By storing in advance the correspondence with the drive current to be supplied, it is possible to determine the drive current corresponding to the output desired by the user using the correspondence.

  When the Q switch 23 is provided as in the laser light output unit 2 according to this embodiment, the control parameter of the laser light is the number of times the Q switch 23 is switched on and off per second, that is, unit time There is a Q switch frequency (the above-mentioned pulse frequency) indicating the number of times of pulse oscillation.

  However, changing the Q switch frequency will increase or decrease the period during which the Q switch 23 is turned on. As a result, the state of population inversion in the laser medium 25 fluctuates, so that the number of stimulated emission photons increases / decreases when the excitation light enters the laser medium 25 and the output of the laser light fluctuates. become. Therefore, determining the drive current as described above is not sufficient to set the appropriate output.

  In addition, in general, the relationship between the output of the laser light and the Q switch frequency changes depending on the specifications of the excitation light source 111, the state of the optical component, etc. The variation has individual differences among the laser processing devices.

  Therefore, the correspondence relationship storage unit according to this embodiment not only stores only the correspondence relationship between the target output of the laser light and the drive current to be supplied to the excitation light source 111, but also corresponds to the pulse frequency. Store in association with the size of.

  Then, based on the target output and the pulse frequency stored in the condition setting storage unit 102 and the correspondence relationship stored in the correspondence relationship storage unit, the excitation light source drive unit 112 excites the drive current corresponding to the pulse frequency. Supply to 111.

  In particular, when the table storage unit 114 is used as the correspondence relationship storage unit as in the configuration example shown in FIG. 1, the table storage unit 114 is a current that links the target output and the drive current for each different pulse frequency. Tables can be stored.

  In this case, when the user sets both the target output and the pulse frequency as the processing conditions by operating through the operation terminal 200 as the setting unit, the setting is stored in the condition setting storage unit 102. Ru. Then, when the laser light processing apparatus L operates, when the excitation light source drive unit 112 receives control signals for each of the target output and the pulse frequency, the current table related to the pulse frequency set as the processing condition from the table storage unit 114. To determine the drive current based on the correspondence between the target output and the drive current.

  The number of pulse frequencies may be at least two or more when "the current table is stored for each different pulse frequency". In this case, pulse frequencies other than those stored in association with the current table can be complemented using the current table associated with the pulse frequency associated with the correspondence.

  Also, the control unit 101 may calibrate the correspondence relationship stored in the table storage unit 114 based on the detection result of the power monitor described above. For example, when the target output set as the processing condition is smaller than the measured value of the output detected by the power monitor, the drive current corresponding to the target output is increased. Such calibration may be performed each time the laser processing apparatus L is activated, or may be performed at predetermined intervals.

(Specific example of proper use of current table)
FIG. 35 is a diagram illustrating the correspondence between the target output and the drive current, and FIG. 36 is a flowchart illustrating the proper use of the current table according to the pulse frequency. In the example shown in FIG. 35, although the percentage is used as the unit of the target output, it is not limited thereto. For example, the power (watts) of laser light may be used directly.

  As shown in FIG. 35, two current tables are stored in the table storage unit 114 according to this embodiment. Specifically, the current table is stored with the pulse frequency associated with each of 40 kHz and 100 kHz. As can be seen from FIG. 35, the drive current (LD current) is larger when the pulse frequency is high than when it is low.

  As shown in FIG. 36, for example, when the laser processing apparatus L is activated to process the workpiece W, the control unit 101 sets a marking pattern set via the operation terminal 200 and a target as a processing condition. Print data including an output and a pulse frequency is read (step S101). Among the print data read at this time, data relating to processing conditions is input from the control unit 101 to the excitation light source drive unit 112.

  Thereafter, when the focus control by the Z scanner 33 is performed (step S102), the excitation light source drive unit 112 determines whether the pulse frequency set as one of the processing conditions is 40 kHz or less (step S103). Here, when the pulse frequency is 40 kHz or less, the excitation light source drive unit 112 reads the current table stored in association with 40 kHz from the table storage unit 114 and sets the target output of the laser light set as one processing condition. Based on this, the drive current to be supplied to the excitation light source 111 is determined (step S104).

  Thereafter, the excitation light source drive unit 112 supplies the drive current determined in step S104 to the excitation light source 111 (step S105). Also, in parallel with the process shown in step S105, the control unit 101 controls the Q switch 23 on and off by outputting the control signal generated based on the pulse frequency read in step S101 to the Q switch 23. . Further, the control unit 101 controls the X scanner 8 and the Y scanner 9 to execute two-dimensional scanning so as to realize the marking pattern read in step S101.

  The processes shown in steps S105 to S107 are illustrated as being performed in order for the sake of convenience, but as described above, each process is performed in parallel.

  On the other hand, if it is determined in step S103 that the pulse frequency exceeds 40 kHz, then it is determined whether the pulse frequency is 100 kHz or more (step S108). Here, when the pulse frequency is 100 kHz or more, the excitation light source drive unit 112 reads the current table stored in association with 100 kHz from the table storage unit 114 and sets the target output of the laser light set as one processing condition. Based on this, the drive current to be supplied to the excitation light source 111 is determined (step S109). Then, the process proceeds to step S105 to step S107 described above, and the process according to each step is performed.

  When it is determined in step S109 that the pulse frequency is less than 100 kHz, that is, when it is determined that the pulse frequency is more than 40 kHz but less than 100 kHz, the excitation light source drive unit 112 stores the current stored in association with 40 kHz. The table and the current table stored in association with 100 kHz are read from the table storage unit 114, and the contents of each current table are complemented to determine the drive current to be supplied to the excitation light source 111 (step S110). . Then, the process proceeds to step S105 to step S107 described above, and the process according to each step is performed.

  Specifically, when the process proceeds to step S109, the excitation light source drive unit 112 determines the drive current determined based on the current table stored in association with 40 kHz and the current table stored in association with 100 kHz. The drive current is interpolated with, for example, a linear function that associates the pulse frequency with the drive current, and based on the linear function thus obtained and the pulse frequency set as one of the processing conditions Determine the drive current.

  Thus, the table storage unit 114 as the correspondence relationship storage unit stores the correspondence relationship between the target output of the laser beam and the drive current in association with the magnitude of the pulse frequency set as one of the processing conditions. Do. Thus, the drive current suitable for the magnitude of the pulse frequency can be determined, so that the output setting of the laser beam can be appropriately performed, and in turn, the variation in the output of the laser beam can be reduced. .

(Modification of output adjustment according to pulse frequency)
In the example shown in FIG. 35, when the target output is 60% or less, the drive current is configured to be constant as described later, from the viewpoint different from the purpose of suppressing the variation of the laser light output. However, in order to simply reduce the variation in the output, the following modification may be used.

  Table 1 shows modifications when the correspondence between the target output of the laser light and the drive current is stored in association with the magnitude of the pulse frequency (Q switch frequency). Specifically, the unit of the numbers in Table 1 is amperes. As shown in Table 1, the drive current may not be constant even when the target output is 60% or less, and the drive current may be monotonously decreased as the target output decreases. Also, the degree of decrease at that time may be made different for each pulse frequency. In the example shown in Table 1, when the pulse frequency is small, the drive current is sharply reduced as compared to when the pulse frequency is large.

  In the case where a calculation formula storage unit for storing a calculation formula that calculates a drive current with the target output as an argument is provided instead of the table storage unit 114, for example, It is sufficient to include the correspondence with the pulse frequency as a further argument to the calculation formula in which is associated.

(Output adjustment according to the target output level)
As described above, when the output of the laser beam is changed through the drive current, if the target output is too low, the drive current corresponding to the output may become excessively small and become unstable. In this case, the output of the laser light may also be unstable, so there is room for improvement in the output setting on the low output side.

  On the other hand, as well known, a method of changing the output of laser light by adjusting the duty ratio of the Q switch 23 is also conceivable.

  That is, for example, when the duty ratio is reduced, the output of the pulse wave oscillated as the fundamental wave from the laser medium 25 is reduced by the shortening of the period during which the Q switch 23 is turned on as described above. This makes it possible to reduce the output of the laser beam generated based on the fundamental wave.

  Therefore, when the output of the laser beam is changed through the duty ratio, the output of the laser beam can be lowered while the driving current is set sufficiently large so as not to cause the destabilization.

  However, when the duty ratio of the Q switch 23 is adjusted while keeping the drive current large, the output setting on the low output side is improved, but this time it becomes difficult to set the output on the high output side. I understand.

  That is, when the duty ratio is set large to increase the output of the laser beam, the period during which the Q switch 23 is turned on is extended, and the period during which the laser beam is continuously oscillated is extended. Then, the first wavelength conversion element 26 and the second wavelength conversion element 27 generate heat. Together with the increase of the output of the fundamental wave by keeping the drive current large, the wavelength conversion element overheats, and the output immediately after the pulse oscillation is not good due to the influence of the thermal lens etc. The laser characteristics may be degraded, such as becoming stable.

  Therefore, the control unit 101 according to this embodiment is configured to use a method for changing the laser light output according to the level of the target output.

  Specifically, when the target output exceeds the predetermined threshold value, the control unit 101 changes the drive current supplied to the excitation light source 111 via the excitation light generation unit 110 so that the laser light output unit 2 While controlling the output of the emitted laser beam, when the target output is less than the threshold value, the duty ratio via the laser beam output unit 2 is maintained while keeping the drive current supplied to the excitation light source 111 substantially constant. Is controlled to control the output of the laser beam emitted from the laser beam output unit 2.

  Further, as a method of changing the duty ratio, a table in which the target output and the duty ratio are associated may be used, or a calculation formula in which the duty ratio is calculated using the target output and the pulse frequency as arguments may be used.

  As can be seen from the description “while keeping the drive current substantially constant”, it is not necessary to keep the drive current constant even when the target output is less than or equal to the threshold. Temporarily, the target output may be within the range when it is increased or decreased by about one to twenty percent with respect to the threshold value. For example, when the threshold of the target output is set to 60%, the drive current when the target output is 50% to 70% may be set.

  This control mode can be used together with the above-mentioned output adjustment according to the pulse frequency, and it is also possible to use any one control mode.

(Specific example of output adjustment according to the target output level)
As described above, the table storage unit 114 according to this embodiment stores two current tables according to the pulse frequency. As shown in FIG. 35, these current tables are designed to selectively use the output adjustment through the drive current and the output adjustment through the duty ratio at the threshold of 60% which is the threshold for the target output.

  Specifically, when the target output exceeds 60%, the drive current also monotonously increases as the target output increases. On the other hand, when the target output is 60% or less, the drive current is substantially constant with respect to the level of the target output. In this case, the drive current when the target output is 60% is used. In the latter case, the duty ratio monotonously decreases as the target output decreases.

  Here, FIG. 37 is a flowchart illustrating the proper use of the output adjustment method according to the target output. Although the use of the current table according to the pulse frequency is omitted in FIG. 37 for the sake of simplicity, as can be seen from FIG. 35, the use according to the pulse frequency is simultaneously performed.

  As shown in FIG. 37, when, for example, the laser processing apparatus L is activated to process the workpiece W, the control unit 101 sets a marking pattern set via the operation terminal 200 and a target as a processing condition. Print data including an output and a pulse frequency is read (step S201). Among the print data read at this time, data relating to processing conditions is input from the control unit 101 to the excitation light source drive unit 112.

  Thereafter, it is determined whether the target output set as one of the processing conditions exceeds 60% (step S202). Here, when the target output exceeds 60%, the excitation light source drive unit 112 reads the current table corresponding to the target output from the table storage unit 114 (step S203) and determines the drive current according to the current table (Step S204). Then, while maintaining the duty ratio at the minimum value (step S205), the same processing as the flow shown in FIG. 36 is executed to perform print processing (step S206 to step S208).

  In addition, although the process shown to step S206-step S208 is illustrated so that it may be performed in order for convenience, as mentioned above, each process is performed in parallel.

  On the other hand, if it is determined in step S202 that the target output is 60% or less, the excitation light source drive unit 112 stores the current table corresponding to the target output of 60% regardless of the target output level. At the same time as reading from the unit 114 (step S209), the drive current is determined according to the current table (step S210). Then, the duty ratio is changed according to the target output (step S211), and the same processing as the flow shown in FIG. 36 is executed to perform print processing (step S206 to step S208).

  As described above, when the target output is relatively high, the output of the laser beam is changed through the drive current, and when the target output is relatively low, the output of the laser beam is changed not through the drive current but through the duty ratio.

  By switching the means for changing the output of the laser light in accordance with the level of the target output, it is possible to stabilize the output of the laser light on the low output side while preventing the laser characteristics from deteriorating on the high output side. . This makes it possible to appropriately change the output of the laser beam without degrading the laser characteristics.

(Configuration related to output stop of laser processing device L)
FIG. 38 is a block diagram illustrating the configuration around the power supply of the laser processing apparatus L. In the components shown in FIG. 38, the same components as those described above are denoted by the same reference numerals. The description of such components will be omitted as appropriate.

  As shown in FIG. 38, the laser processing apparatus L includes a power supply for supplying power to the excitation light generation unit 110, the laser light output unit 2, and the control unit 101, and a power supply monitoring unit for monitoring the power supply ( On the sheet of FIG. 38, “voltage monitoring unit” 123 is provided.

  Specifically, the laser processing apparatus L includes a first power supply unit (power supply) 124 capable of supplying power to the laser light output unit 2 and the control unit 101. The first power supply unit 124 is configured by a so-called AC / DC power supply.

  Similarly, the laser processing apparatus L includes a second power supply unit (power supply) 125 capable of supplying power to the excitation light generation unit 110. Like the first power supply unit 124, the second power supply unit 125 is configured of a general AC / DC power supply.

  The power supply to the first power supply unit 124 and the second power supply unit 125 is turned on and off by the main switch 121 and the key switch 122. Specifically, the main switch 121 is connected to the key switch 122 and the first power supply unit 124, and is provided to perform system activation other than the excitation light generation unit 110. When the main switch 121 is turned on, power can be supplied to the first temperature control unit 5, the second temperature control unit 6, and the control unit 101.

  Further, the key switch 122 is provided to reliably stop the emission of the laser beam, and the on / off of the key switch 122 and the on / off of the emission of the laser beam are linked. Specifically, when the key switch 122 is turned off, the electric circuit from the second power supply unit 125 to the excitation light generation unit 110 is cut off to reliably stop the generation of the laser excitation light and hence the emission of the laser light. Can. On the other hand, when the key switch 122 is turned on, the electric circuit from the second power supply unit 125 to the excitation light generation unit 110 is conducted, and generation of laser excitation light and emission of laser light are permitted.

  The laser processing apparatus L also includes a power monitoring unit 123 that monitors at least the second power supply unit 125 in order to perform control described later. In this embodiment, the power supply monitoring unit 123 is configured to monitor the second power supply unit 125 by measuring at least the supply voltage to the second power supply unit 125. Note that, instead of this configuration, the power supply monitoring unit 123 may monitor only the supply voltage to the first power supply unit 124. Alternatively, instead of the supply voltage to the first power supply unit 124 or the second power supply unit 125, the voltage supplied from the first power supply unit 124 or the second power supply unit 125 may be monitored.

  Although details are omitted, the laser light output unit 2 is of the intra-cavity type as described above. In addition, the temperatures of the first and second wavelength conversion elements 26 and 27 are adjusted by the first and second temperature adjustment units (temperature adjustment units) 5 and 6, respectively.

  By the way, in such a laser processing apparatus L, when power supply to the apparatus L is stopped due to, for example, a power failure or shutdown, the generation of excitation light by the excitation light generation unit 110 and the temperature of the wavelength conversion elements 26 and 27 The adjustment stops in accordance with the amount of charge remaining in the power supply capacitor or the like. When the generation of the excitation light by the excitation light generator 110 is stopped, the generation of the fundamental wave by the laser medium 25 is stopped. So far, the generation of the fundamental wave and the temperature control of the wavelength conversion elements 26 and 27 are stopped in random order.

  Here, in the case of the extra cavity type configuration, the fundamental wave generated in the resonator is always output outside the resonator. Therefore, even if the generation of the fundamental wave is stopped after the temperature adjustment of the wavelength conversion elements 26 and 27 is stopped, the energy of the laser beam including the fundamental wave is not stored inside the resonator. There is.

  However, in the case of the intra-cavity type configuration as in the embodiment disclosed herein, by arranging the wavelength conversion element between the pair of mirrors, the wavelength conversion element is positioned inside the resonator. Become. In such a configuration, harmonics generated by the wavelength conversion element are output to the outside of the resonator by the half mirror (for example, the first separator 28a described above) as long as the above-mentioned temperature control is sufficiently functioning. It will be done.

  However, in such an intra-cavity type configuration, if the temperature adjustment of the wavelength conversion element is stopped before the generation of the fundamental wave is stopped, the generated fundamental wave is not sufficiently wavelength-converted, and the resonator is The energy of the laser beam may be stored inside the Such a situation is undesirable to ensure that the various optical components placed in the resonator are not damaged.

  Therefore, when the control unit 101 according to the present embodiment determines that the power supply to the first and second power supply units 124 and 125 is stopped based on the monitoring result by the power supply monitoring unit 123, the first and second It is configured to control at least one of the excitation light generation unit 110 and the Q switch 23 such that the generation of the fundamental wave is suppressed while the temperature adjustment by the temperature adjustment units 5 and 6 is continued.

  Specifically, when the power supplied to each of the first and second power supply units 124 and 125 falls below a predetermined threshold, the control unit 101 supplies power to the first and second power supply units 124 and 125. Judge that supply will be stopped. Here, the control unit 101 may make the determination based on the magnitude of the power, or may make the determination based on a physical quantity related to the power, such as a voltage.

  Then, when the control unit 101 determines that the power supply to the first and second power supply units 124 and 125 is stopped, the power supply to the excitation light generation unit 110, in particular, the excitation light source from the excitation light source drive unit 112 By stopping the supply of the drive current to 111, the generation of the laser excitation light is stopped. As a result, the generation of the fundamental wave based on the laser excitation light is stopped, and the incidence of the fundamental wave to the first and second wavelength conversion elements 26 and 27 is also stopped.

(Specific example of processing related to output stop of laser processing apparatus L)
FIG. 39 is a flowchart illustrating processing relating to the output stop of the laser processing apparatus L. As shown in FIG. 39, during the operation of the laser processing apparatus L, the power supply monitoring unit 123 checks the power supply to the second power supply unit 125 as an external power supply. The voltage of the power supplied to each is checked (steps S301 and S302).

  Then, the control unit 101 determines whether the voltage checked by the power supply monitoring unit 123 is less than a predetermined threshold (prescribed value) (step S303), and if the voltage is equal to or more than the threshold, step S302. Return to. That is, as long as the voltage equal to or higher than the threshold value is secured, the control unit 101 repeats the processes shown in step S302 and step S303.

  Here, when the main switch 121 is turned off or the voltage falls below the threshold as a result of the power supply to the first or second power supply unit 124, 125 being cut intentionally or unintentionally, the control unit The process proceeds from step S303 to step S304, where the excitation light generation unit 110 stops the power supply from the excitation light source drive unit 112 to the excitation light source 111. Thereby, the generation of the laser excitation light is stopped in the excitation light source 111, and the generation of the fundamental wave is also stopped in the laser medium 25 (step S305). After that, the temperature control by the first and second temperature control units 5 and 6 naturally stops according to the amount of charge remaining in the capacitor etc (step S306), and the laser processing apparatus L shuts down (step S306). S307).

  Thus, the control unit 101 suppresses the generation of the fundamental wave while the temperature control by the temperature control units 5 and 6 continues. Since the temperature control by the temperature control units 5 and 6 is continued, generation of harmonics is still prompted. Therefore, when the power supply is stopped, the fundamental wave that has been generated while being suppressed is smoothly converted to harmonics, so that the energy of the laser light is not stored. it can. This makes it possible to prevent damage to the optical component.

(Modification related to the output stop of laser processing device L)
In the embodiment, the power supply monitoring unit 123 is configured to monitor the first and second power supply units 124 and 125 by measuring the voltage supplied to each of the first and second power supply units 124 and 125. Although it has been done, it is not limited to such a configuration.

  For example, the power supply monitoring unit 123 may be configured such that an electrical connection state between the second power supply unit 125 and the excitation light generation unit 110 or the first power supply unit 124 and the control unit 101 or the laser light output unit 2. It may be determined that the power supply to the first and second power supply units 125 is stopped when it is determined that any of the connections is disconnected, while monitoring the electrical connection state between them.

  In this case, for example, when the electrical connection between the second power supply unit 125 and the excitation light generation unit 110 is interrupted as a result of switching the key switch 122 from the on state to the off state, the power supply monitoring unit 123 It may be configured to input a predetermined electrical signal. In this case, when the electric signal is input, the power supply monitoring unit 123 can determine that the power supply by the second power supply unit 125 has been stopped.

  Moreover, the structure which provides the 1st and 2nd power supply part 124,125 is not essential. For example, as in the modification shown in FIG. 40, the control unit 101, the excitation light generation unit 110, and the laser light output unit 2 may be controlled by one power supply unit 126.

  Moreover, when the input power supply to the laser processing apparatus L is DC input, it is not necessary to provide a power supply inside the laser processing apparatus L as in the first and second power supply units 124 and 125. In this case, an external DC input may be monitored by the power supply monitoring unit 123.

  Further, in the embodiment, the control unit 101 is configured to stop the generation of the fundamental wave by the laser medium 25 by stopping the power supply to the excitation light generation unit 110, but such a configuration It is not limited.

  For example, when the control unit 101 determines that the power supply by the second power supply unit 125 is stopped, the temperature control by the first and second temperature adjustment units 5 and 6 is continued, and the Q switch 23 is turned on. The generation of the fundamental wave may be suppressed by holding the switch in the off state. In this case, at least the pulse-oscillated fundamental wave does not enter the first and second wavelength conversion elements 26 and 27. In this case, instead of step S304 in FIG. 37, control related to the Q switch 23 may be stopped as shown in step S404 in FIG. In addition, the stop of the pulse oscillation by the Q switch 23 and the stop of the power supply to the excitation light generation unit 110 may be performed simultaneously.

  Further, in order to realize the processing related to the output stop of the laser light, the configuration in which the first wavelength conversion element 26 and the second wavelength conversion element 27 are provided is not essential. For example, only one wavelength conversion element may be provided, or three or more wavelength conversion elements may be provided.

  Further, the Q switch 23 is not essential in order to realize the process related to the output stop of the laser light. The above configuration can also be applied to a device that does not have the Q switch 23 and can only continuously oscillate laser light.

  As described above, the present disclosure can be applied to laser markers and the like.

DESCRIPTION OF SYMBOLS 1 Marker head 10 Case 15 Transmission window part 16 Output window part 18 Lid part for exchange (lid part)
19 exit window 19a opening (housing side exit)
Reference Signs List 2 laser light output unit 20 housing 2A Q switch accommodation unit 2B wavelength conversion unit 21 first reflection mirror (first mirror, reflection mirror)
22 Second reflection mirror (second mirror, reflection mirror)
23 Q switch 24 incident portion 25 laser medium 26 first wavelength conversion element (wavelength conversion element)
27 Second wavelength converter (wavelength converter)
28a 1st separator (output mirror)
28b concave lens 28c second separator (reflection mirror)
29 Beam Expander 3 Laser Beam Guide 31 Z Chamber Cover (Sealing Member)
31c 1st transmission window (transmission window)
31d Second transmission window (transmission window)
32 1st bend mirror (optical parts)
33 Z Scanner (Focus)
34 2nd bend mirror (optical parts)
35 Guide light source (guide light emitting device)
36 Camera (imaging device)
4 Laser beam scanning unit 40 Scanner housing (housing member)
40a first holder (holder)
40b Second holding unit (holding unit)
41 entrance window 42 drying through part 42a through hole 5 first temperature control part (element temperature control part)
6 Second temperature control unit (element temperature control unit)
7 output mirror temperature control unit 71 base plate 72 first insertion hole (insertion hole)
81 X mirror (1st scanner mirror, scanner mirror)
82 1st drive motor (drive motor)
82a rotor 82b motor case 83 motor holding member 86 first seal member (seal member)
87 Second seal member (second seal member)
91 Y mirror (2nd scanner mirror, scanner mirror)
92 Second drive motor (drive motor)
92a rotor 92b motor case 93 motor holding member 96 first seal member (seal member)
97 Second seal member (second seal member)
100 marker controller 101 control unit 102 condition setting storage unit 110 excitation light generation unit 111 excitation light source 112 excitation light source drive unit 114 table storage unit (correspondence storage unit)
123 power supply monitoring unit 124 first power supply unit (power supply)
125 2nd power supply unit (power supply)
126 Power supply unit (power supply)
Dm Drying material L Laser processing device Sz Z room (closed space)
Sxy scanner room Sd storage room W work (workpiece)

Claims (5)

An excitation light generation unit that generates excitation light;
A laser light output unit that generates laser light based on the excitation light generated by the excitation light generation unit, and emits the laser light;
A laser beam scanning unit configured to scan a laser beam emitted from the laser beam output unit on a surface of a workpiece;
A condition setting storage unit that stores processing conditions set to perform desired processing on the workpiece;
A control unit that processes the workpiece by controlling the excitation light generation unit, the laser light output unit, and the laser light scanning unit based on the processing conditions stored in the condition setting storage unit; A laser processing apparatus comprising
The laser light output unit is
A laser medium that generates a fundamental wave based on the excitation light generated by the excitation light generation unit;
A wavelength conversion element that receives a fundamental wave generated by the laser medium and generates a harmonic having a frequency higher than that of the fundamental wave;
A Q switch that pulse-oscillates harmonics generated by the wavelength conversion element based on a control signal received from the control unit with respect to a pulse frequency set as one of the processing conditions;
And an output mirror for emitting a harmonic wave pulse-oscillated by the Q switch as a laser beam,
The excitation light generation unit
An excitation light source that generates excitation light according to an externally supplied drive current;
A correspondence relationship storage unit that stores correspondence relationships between target outputs of laser light set as one of the processing conditions and drive currents to be supplied to the excitation light source in association with the magnitudes of the pulse frequencies; ,
A drive current corresponding to the pulse frequency is supplied to the excitation light source based on the target output and the pulse frequency stored in the condition setting storage unit and the correspondence relationship stored in the correspondence relationship storage unit. An excitation light source drive part, The laser processing apparatus characterized by the above-mentioned. In the laser processing apparatus according to claim 1,
The wavelength conversion element is
A first wavelength conversion element which receives a fundamental wave generated by the laser medium and generates a second harmonic having a frequency higher than that of the fundamental wave;
And a second wavelength conversion element that receives a second harmonic generated by the first wavelength conversion element and generates a third harmonic having a frequency higher than that of the second harmonic.
The said output mirror radiate | emits the 3rd harmonic generated by the said 2nd wavelength conversion element as a laser beam, The laser processing apparatus characterized by the above-mentioned. The laser processing apparatus according to claim 1 or 2
The correspondence processing storage unit stores a current table in which the target output and the drive current are associated with each other for each of the predetermined different pulse frequencies. The laser processing apparatus according to any one of claims 1 to 3.
A setting unit configured to set the target output and the pulse frequency based on an operation by a user;
The said excitation light source drive part supplies a drive current to the said excitation light source based on the said target output and the said pulse frequency which were set via the said setting part, The laser processing apparatus characterized by the above-mentioned. The laser processing apparatus according to any one of claims 1 to 4.
A power monitor for detecting an output of the laser beam emitted from the laser beam output unit;
The said control part calibrates the correspondence memorize | stored in the said correspondence memory | storage part based on the detection result by the said power monitor, The laser processing apparatus characterized by the above-mentioned.