JP7017373B2 - Probe and its manufacturing method - Google Patents

Description

The present invention relates to a probe used for measuring the characteristics of an inspected object.

In order to measure the characteristics of an inspected object such as an integrated circuit, a probe that comes into contact with the inspected object is used. The probe has a small-diameter plunger that comes into contact with the object to be inspected and a barrel that is a large-diameter cylindrical portion into which a part of the plunger is inserted, and the inserted portion of the plunger and the barrel are joined to each other. (See, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2011-89918

The plunger and barrel are joined using spot welding or the like. However, in spot welding, there is a problem that the barrel bulges outward due to pressurization. Therefore, it is necessary to widen the distance between the probes in order to prevent the probes from coming into contact with each other, and there is a problem that narrowing the pitch of the arrangement of the probes is hindered.

In view of the above problems, it is an object of the present invention to provide a probe and a method for manufacturing a probe capable of suppressing the barrel from bulging outward when the plunger and the barrel are joined.

According to one aspect of the present invention, a tubular barrel having a tightening region having a tightening region having a smaller outer diameter than the central portion at the end thereof, and the barrel being inserted into the barrel with the tip portion exposed from the open end of the end portion of the barrel. It is equipped with a rod-shaped plunger and is joined to the plunger at least in the region close to the open end of the tightening region with the barrel wound tightly around the plunger in the tightening region reaching the open end. It has a coil spring-shaped spring portion in the center of the barrel with a spiral notch formed through the side surface of the barrel, and extends in the axial direction of the barrel to the tightening region of the open end and the spring portion. A probe is provided in which a slit is formed that connects to a spiral notch .

According to another aspect of the invention, the open end of the end of a tubular barrel having a tightening region at the end that is smaller in outer diameter than the center so that the tip of the plunger is exposed. The step of inserting the plunger from the step, the step of wrapping the tightening area of the barrel around the part inserted inside the barrel of the plunger, and the step of bringing the tightening area into close contact with the periphery of the plunger, and the barrel in the tightening area. Includes a step of joining the barrel to the plunger at least in the region close to the open end of the tightening region while the barrel is wound in close contact with the plunger, and a slit extending axially from the open end of the barrel. A method of manufacturing a probe for joining a barrel to a plunger in the formed tightening region is provided.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a probe and a method for manufacturing a probe capable of suppressing the barrel from bulging outward when the plunger and the barrel are joined.

It is a schematic diagram which shows the structure of the probe which concerns on 1st Embodiment of this invention, FIG. 1 (a) is an overall view, and FIG. 1 (b) is an enlarged view of the area A of FIG. 1 (a). .. It is a flowchart for demonstrating the manufacturing method of the probe which concerns on 1st Embodiment of this invention. It is a schematic cross-sectional view for demonstrating the manufacturing method of the probe of the comparative example. It is a schematic diagram which shows the shape of the probe of the comparative example. It is sectional drawing of the joint part of the barrel and the plunger of the probe which concerns on 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the probe which concerns on the modification of 1st Embodiment of this invention, FIG. 6 (a) is an overall view, FIG. 6 (b) is an enlargement of the area A of FIG. 6 (a). It is a figure. It is a schematic diagram which shows the structure of the probe which concerns on 2nd Embodiment of this invention, FIG. 7 (a) is an overall plan view, FIG. 7 (b) is an overall bottom view, and FIG. 7 (c). ) Is an enlarged view of the area A in FIG. 7 (a). It is a schematic diagram which shows the structure of the probe which concerns on the modification of 2nd Embodiment of this invention, and FIGS. It is a figure. 9 (a) to 9 (d) are enlarged views of the region A of FIGS. 8 (a) to 8 (d), respectively.

Next, an embodiment of the present invention will be described with reference to the drawings. In the description of the drawings below, the same or similar parts are designated by the same or similar reference numerals. However, it should be noted that the drawings are schematic and the ratio of the thickness of each part is different from the actual one. In addition, it goes without saying that parts having different dimensional relationships and ratios are included between the drawings. The embodiments shown below exemplify devices and methods for embodying the technical idea of the present invention, and the embodiments of the present invention describe the materials, shapes, structures, arrangements, etc. of the components as follows. It is not specific to the thing.

As shown in FIGS. 1 (a) to 1 (b), the probe according to the first embodiment of the present invention has a tube-shaped barrel 10 and its tip is exposed from the open end of the end of the barrel 10. A rod-shaped plunger 20 inserted into the barrel 10 in a state is provided. The barrel 10 has a tightening region 11 at the end where the plunger 20 is inserted, which has a smaller outer diameter than the central portion. Then, the barrel 10 is joined to the plunger 20 in a state of being tightly wound around the plunger 20 in the tightening region 11 reaching the opening end.

In the probe according to the first embodiment, the tightening region 11 has a coil shape in which a spiral notch penetrating the side surface of the barrel 10 is formed.

The barrel 10 and the plunger 20 are joined at least in a region close to the open end of the tightening region 11. In the probes shown in FIGS. 1 (a) to 1 (b), the first joint portion 31 located on the side of the open end of the tightening region 11 and the second joint portion 32 located on the side of the central portion The barrel 10 is joined to the plunger 20 at two points.

Hereinafter, a method for manufacturing a probe according to the first embodiment will be described with reference to the flowchart shown in FIG. The probe manufacturing method described below is an example, and can be realized by various other manufacturing methods including this modification.

First, in step S1, a tube-shaped barrel 10 having a tightening region 11 whose outer diameter is smaller than the central portion at the end and a rod-shaped plunger 20 having an outer diameter smaller than the inner diameter of the barrel 10 are prepared.

Next, in step S2, the plunger 20 is inserted into the barrel 10 so that the tip of the plunger 20 is exposed from the open end of the end of the barrel 10. Then, in step S3, the tightening region 11 of the barrel 10 is wound around the portion inserted into the barrel 10 of the plunger 20, and the tightening region 11 is brought into close contact with the periphery of the plunger.

For example, the tightening region 11 of the barrel 10 is tightened so as to squeeze. As a result, in the tightening region 11, the inner wall surface of the barrel 10 comes into close contact with the periphery of the plunger 20.

Then, in step S4, the barrel 10 is joined to the plunger 20 in the tightening region 11. At this time, the barrel 10 is joined to the plunger 20 at least in a region close to the opening end of the tightening region 11. As described above, the probe according to the embodiment is completed.

The barrel 10 is joined to the plunger 20 by spot welding, for example. However, in the case of the probe of the comparative example in which the barrel does not have the tightening region 11, the following problems occur in the joining by spot welding.

In spot welding, as shown in FIG. 3, a current is passed while the barrel 110 and the plunger 120 are pressurized (pressed) in the direction of the arrow by the welding electrode 100. As a result, resistance heat is generated on the contact surface between the barrel 110 and the plunger 120. This thermal resistance causes the metal to melt and solidify inside the barrel 110 and the plunger 120, and the barrel 110 and the plunger 120 are welded to each other. By the press at this time, in the probe of the comparative example, as shown in FIG. 4, a bulge is generated on the surface of the barrel 110 due to the shape change.

When the surface of the probe bulges as shown in FIG. 4, it is necessary to widen the distance between the probes in order to prevent the probes from coming into contact with each other. Therefore, the narrowing of the pitch of the probe arrangement is hindered.

On the other hand, in the probe according to the embodiment, the tightening region 11 of the barrel 10 is wound around the portion inserted into the barrel 10 of the plunger 20, and the tightening region 11 is in close contact with the periphery of the plunger 20. .. That is, as shown in FIG. 5, the barrel 10 and the plunger 20 are in contact with each other without a gap in the cross section perpendicular to the axial direction of the probe in the tightening region 11.

Therefore, even if the tightening region 11 of the barrel 10 is joined to the plunger 20 by spot welding, the surface of the barrel 10 does not swell because there is no gap between the plunger 20 and the barrel 10.

By the way, when the tightening region 11 of the barrel 10 is tightened and brought into close contact with the plunger 20, there is a possibility that the tightening may be loosened if there is only one joint. Therefore, it is preferable to join the barrel 10 to the plunger 20 at two positions, the first joint portion 31 and the second joint portion 32, at both ends of the tightening region 11. As a result, loosening of the tightening can be suppressed.

In the probes shown in FIGS. 1A to 1B, the tightening region 11 has a coil shape in which a spiral notch is formed. Therefore, it is easy to wind the barrel 10 around the plunger 20 by tightening the tightening region 11.

Further, as shown in FIG. 1 (b), the outer diameter D1 on the side close to the opening end of the tightening region 11 may be smaller than the outer diameter D2 on the side close to the central portion of the tightening region 11. good. That is, the outer diameter of the barrel 10 is gradually reduced toward the end of the opening. As a result, the tightening region 11 of the barrel 10 can be easily wound around the plunger 20.

In measurement using a probe, in general, one end of the probe is brought into contact with the object to be inspected, and the other end of the probe is placed on a printed circuit board or the like and connected to a measuring device (hereinafter, "" Contact with "land"). Therefore, a conductive material is used for the barrel 10 and the plunger 20. For example, a Ni material or the like is used for the barrel 10, and an AgPdCu material or the like is used for the plunger 20.

The probe according to the embodiment has a coil spring-shaped spring portion in which a spiral notch penetrating the side surface of the barrel 10 is formed in the central portion of the barrel 10. As a result, the barrel 10 can be expanded and contracted in the axial direction. Therefore, the probe can be brought into contact with the inspected object or the land with appropriate pressing.

As described above, according to the probe according to the first embodiment, even if the barrel 10 and the plunger 20 are welded, it is possible to prevent the barrel 10 from bulging outward. Since the probe does not bulge, it is possible to narrow the pitch of the probe arrangement.

<Modification example>
In the probe according to the modified example of the first embodiment shown in FIGS. 6 (a) to 6 (b), a spiral notch in the tightening region 11 of the barrel 10 is formed from the open end. Therefore, it is easier to wind the tightening region 11 around the plunger 20 than the probes shown in FIGS. 1 (a) to 1 (b).

The barrel 10 is joined to the plunger 20 with one end of the coil shape as the first joint 31 and the other end as the second joint 32. In the probe according to this modification, the entire tightening region 11 can be easily brought into close contact with the plunger 20.

(Second embodiment)
In the probe according to the second embodiment, as shown in FIGS. 7 (a) to 7 (c), a slit 12 extending in the axial direction of the barrel 10 is formed between the open end of the barrel 10 and the spring portion. Has a slitted area. The region where the slit 12 is formed is the tightening region 11. That is, the tightening region 11 is not a coil shape but a region in which a slit is formed, which is different from FIGS. 1 (a) and 1 (b). Other configurations are the same as those in the first embodiment.

The slit 12 is connected to the end of the opening and the spiral notch of the spring portion. As shown in FIG. 7B, the first joint portion 31 and the second joint portion 32 are set on the surface opposite to the surface on which the slit 12 is formed.

The tightening region 11 in which the slit 12 is formed is easily deformed. Therefore, it is easy to wind the tightening region 11 around the plunger 20. Others are substantially the same as those in the first embodiment, and duplicate description is omitted.

<Modification example>
In the probe according to the modification of the second embodiment shown in FIGS. 8 (a) to 8 (d) and FIGS. 9 (a) to 9 (d), the probe is located on the central side of the tightening region 11. The opening 13 is formed in the barrel 10. The slit 12 extending in the axial direction of the barrel 10 is formed so as to be connected to the opening end and the opening 13. The opening end and the central portion are partially connected by a connection region 14 that bridges the opening 13 in the axial direction of the barrel 10.

In the probe according to this modification, the tightening region 11 is more easily deformed by forming the opening 13 connected to the slit 12 in the barrel 10. The outer diameter of the connection region 14 on the side of the opening end is smaller than the outer diameter of the connection region 14 on the side of the central portion. That is, the outer diameter of the barrel 10 gradually decreases toward the open end in a part of the tightening region 11. This makes it easier to wind the tightening region 11 of the barrel 10 around the plunger 20.

(Other embodiments)
Although the invention has been described by embodiment as described above, the statements and drawings that form part of this disclosure should not be understood to limit the invention. This disclosure will reveal to those skilled in the art various alternative embodiments, examples and operational techniques.

For example, although the above shows the configuration in which the plunger 20 is inserted into one end of the barrel 10, the plunger 20 may be inserted into the open ends at both ends of the barrel 10. That is, the structure may be such that the tip of one plunger 20 is in contact with the object to be inspected and the tip of the other plunger 20 is in contact with the land.

Further, although an example of joining the barrel 10 and the plunger 20 at two locations of the first joint portion 31 and the second joint portion 32 is shown, the barrel 10 and the plunger 20 may be joined at three or more locations. .. Alternatively, if there is no risk of loosening the tightening region 11, the barrel 10 and the plunger 20 may be joined at one point.

Although the embodiment of the probe having the spring portion formed on the barrel 10 has been described, the present invention can be applied to the probe in which the spring portion is not formed.

As described above, it goes without saying that the present invention includes various embodiments not described here. Therefore, the technical scope of the present invention is defined only by the matters specifying the invention relating to the reasonable claims from the above description.

10 ... Barrel 11 ... Tightening area 12 ... Slit 13 ... Opening 14 ... Connection area 20 ... Plunger 31 ... First joint 32 ... Second joint

Claims (11)

A tube-shaped barrel with a tightening area at the end that has a smaller outer diameter than the center,
A rod-shaped plunger inserted into the barrel with the tip exposed from the open end of the end of the barrel is provided.
In the tightening region reaching the open end, the barrel is tightly wound around the plunger and joined to the plunger at least in a region close to the open end of the tightening region.
The central portion of the barrel has a coil spring-shaped spring portion having a spiral notch formed through the side surface of the barrel.
A slit extending in the axial direction of the barrel and connecting to the spiral notch of the open end and the spring portion is formed in the tightening region.
A probe characterized by that. A tube-shaped barrel with a tightening area at the end that has a smaller outer diameter than the center,
With a rod-shaped plunger inserted into the barrel with the tip exposed from the open end of the end of the barrel.
Equipped with
In the tightening region reaching the open end, the barrel is tightly wound around the plunger and joined to the plunger at least in a region close to the open end of the tightening region.
An opening located on the side of the central portion of the tightening region and a slit extending in the axial direction of the barrel and connecting to the opening end and the opening are formed.
It has a connection region in which the opening is bridged in the axial direction of the barrel to partially connect the opening end and the central portion.
A probe characterized by that. The probe according to claim 2 , wherein the central portion of the barrel has a coil spring-shaped spring portion having a spiral notch formed through a side surface of the barrel. The probe according to any one of claims 1 to 3, wherein the outer diameter of the barrel gradually decreases toward the open end in at least a part of the tightening region. The barrel is joined to the plunger at two points, a first joint located on the side of the open end of the tightening region and a second joint located on the side of the central portion. The probe according to claim 4 . The probe according to any one of claims 1 to 5 , wherein the barrel is joined to the plunger by welding. A step of inserting the plunger from the open end of the end of a tube-shaped barrel having a tightening area at the end having a smaller outer diameter than the center so that the tip of the plunger is exposed. ,
A step of winding the tightening area of the barrel around a portion of the plunger inserted into the barrel to bring the tightening area into close contact with the periphery of the plunger.
Including the step of joining the barrel to the plunger at least in a region close to the opening end of the tightening region in a state where the barrel is tightly wound around the plunger in the tightening region. fruit,
A method for manufacturing a probe, which comprises joining the barrel to the plunger in the tightening region where a slit extending in the axial direction of the barrel is formed from the open end . The method for manufacturing a probe according to claim 7 , wherein the barrel has a coil spring-shaped spring portion having a spiral notch formed through the side surface of the barrel in the central portion. The method for manufacturing a probe according to any one of claims 7 to 8 , wherein the outer diameter of the barrel gradually decreases toward the open end in at least a part of the tightening region. The barrel is joined to the plunger at two points, a first joint located on the side of the opening end of the tightening region and a second joint located on the side of the central portion. 9. The method for manufacturing a probe according to claim 9 . The method for manufacturing a probe according to any one of claims 7 to 10 , wherein the barrel is joined to the plunger by spot welding.

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