JP6969929B2 - Probe and its manufacturing method - Google Patents

Description

The present invention relates to a probe used for measuring the characteristics of an inspected object.

In order to measure the characteristics of an inspected object such as an integrated circuit without separating it from the wafer, a probe that comes into contact with the inspected object is used. The probe has a small-diameter plunger that comes into contact with the object to be inspected and a barrel that is a large-diameter cylindrical portion into which a part of the plunger is inserted, and the inserted portion of the plunger and the barrel are joined to each other. (See, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2011-89918

The plunger and barrel are joined using spot welding or the like. However, in spot welding, there is a problem that the barrel bulges outward due to pressurization. Therefore, it is necessary to widen the distance between the probes in order to prevent the probes from coming into contact with each other, and there is a problem that narrowing the pitch of the arrangement of the probes is hindered.

In view of the above problems, it is an object of the present invention to provide a probe and a method for manufacturing a probe capable of suppressing the barrel from bulging outward when the plunger and the barrel are joined.

According to one aspect of the invention, it comprises a rod-shaped plunger with a tip and an insertion portion and a tube-shaped barrel with an open end into which the insertion portion is inserted, the barrel having a plurality of slits. The plurality of slits are formed so as to be separated from the opening end, and at least a pair of joints facing each other through the space inside the barrel are on both sides of the joint portion parallel to the axial direction of any one of the slits. A probe is provided in which the inserts and joints are welded together in the space inside the barrel, defined in the area where the faces meet , and the barrel is recessed towards the plunger at the joint.

According to another aspect of the invention, the insert of a rod-shaped plunger with a tip and insert is inserted from the open end of a tubular barrel with a plurality of slits formed spaced apart from the open end. the method comprising, a junction of at least a pair of barrel facing through the space inside the barrels, the plurality of areas in contact are parallel side surfaces in the axial direction of the barrel of the joint to one of the slits of the slit defined, while pressing the insertion portion of the joint portion, barrel manufacturing method of a probe comprising the steps of joining by welding an insert and junction to be recessed toward the plunger is provided at the junction NS.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a probe and a method for manufacturing a probe capable of suppressing the barrel from bulging outward when the plunger and the barrel are joined.

It is a schematic plan view which shows the structure of the probe which concerns on embodiment of this invention. It is a schematic cross-sectional view which shows the structure of the probe which concerns on embodiment of this invention. It is a schematic diagram which shows the example which held the probe which concerns on embodiment of this invention. It is a schematic diagram for demonstrating the manufacturing method of the probe which concerns on embodiment of this invention. It is a schematic cross-sectional view which shows the joined state of the plunger and the barrel of the probe which concerns on embodiment of this invention. It is a schematic side view which shows the structure of the probe which concerns on embodiment of this invention. It is a schematic cross-sectional view for demonstrating the manufacturing method of the probe of the comparative example. It is a schematic diagram which shows the shape of the probe of the comparative example. It is a schematic diagram which shows the structure of the probe which concerns on the 1st modification of embodiment of this invention. 9 is a cross-sectional view taken along the XX direction of FIG. It is a schematic diagram for demonstrating the manufacturing method of the probe which concerns on 1st modification of embodiment of this invention (the 1). It is a schematic diagram for demonstrating the manufacturing method of the probe which concerns on 1st modification of embodiment of this invention (the 2). It is a schematic diagram which shows the structure of the probe which concerns on the 2nd modification of embodiment of this invention. It is sectional drawing along the XIV-XIV direction of FIG. It is a schematic side view which shows the other structure of the probe which concerns on the 2nd modification of embodiment of this invention. It is a schematic diagram for demonstrating the manufacturing method of the probe which concerns on the 2nd modification of embodiment of this invention. It is a schematic diagram for demonstrating another manufacturing method of the probe which concerns on the 2nd modification of embodiment of this invention. It is a schematic diagram which shows the structure of the barrel of the probe which concerns on the 3rd modification of the Embodiment of this invention, and FIG. 18 (b) shows an example in which the joint portion extends in the direction perpendicular to the axial direction of the barrel. FIG. 19A is a schematic view showing another configuration of the barrel of the probe according to the third modification of the embodiment of the present invention, and FIG. 19A shows an example in which the slits shown in FIG. 18A are arranged. 19 (b) shows an example in which the slits shown in FIG. 18 (b) are arranged. FIG. 20A is a schematic view showing another configuration of the barrel of the probe according to the third modification of the embodiment of the present invention, FIG. 20A shows an example in which the slit is L-shaped, and FIGS. 20B and 20B. FIG. 20 (c) shows an example in which the slit has a “dogleg” shape. FIG. 21 (a) is a schematic view showing another configuration of the barrel of the probe according to the third modification of the embodiment of the present invention, and FIG. 21 (a) shows an example in which the slits shown in FIG. 20 (a) are arranged. 21 (b) shows an example in which the slits shown in FIG. 20 (b) are arranged. It is a schematic diagram which shows the structure of the barrel of the probe which concerns on 4th modification of the Embodiment of this invention, FIG. An example of multiple is shown. It is a schematic diagram for demonstrating the manufacturing method of the probe which concerns on other embodiment of this invention. It is a schematic diagram for demonstrating another manufacturing method of the probe which concerns on other embodiment of this invention.

Next, an embodiment of the present invention will be described with reference to the drawings. In the description of the drawings below, the same or similar parts are designated by the same or similar reference numerals. However, it should be noted that the drawings are schematic and the ratio of the thickness of each part is different from the actual one. In addition, it goes without saying that parts having different dimensional relationships and ratios are included between the drawings. The embodiments shown below exemplify devices and methods for embodying the technical idea of the present invention, and the embodiments of the present invention describe the materials, shapes, structures, arrangements, etc. of the components as follows. It is not specific to the thing.

As shown in FIG. 1, the probe 1 according to the embodiment of the present invention is formed at a distance from a rod-shaped plunger 11 having a tip portion 111 and an insertion portion 112 and an opening end into which the insertion portion 112 is inserted. It comprises a tube-shaped barrel 12 having a plurality of slits 121. In the barrel 12, the joint portion 201 is defined in a region that is easily deformed by an external force because it is close to the slit.

As shown in FIG. 2, a joint portion 202 paired with the joint portion 201 is defined on the lower surface of the barrel 12 so as to face the joint portion 201 defined on the upper surface of the barrel 12 shown in FIG. That is, at least a pair of joints facing each other through the space inside the tube shape are defined in the barrel 12. In the following, the joints defined in the barrel 12 are collectively referred to as “joint 20”. As shown in FIG. 2, the insertion portion 112 of the plunger 11 inserted inside the barrel 12 and the joint portion 20 defined in the barrel 12 are joined.

The slit 121 shown in FIGS. 1 and 2 has a linear shape extending along the axial direction of the barrel 12. A joint portion 20 is defined between two adjacent slits 121. Therefore, the joint portion 20 is easily deformed when an external force is applied.

The width S of the slit 121 and the distance W between the two slits 121 sandwiching the joint portion 20 are appropriately set so that the joint portion 20 is easily deformed by an external force according to the material and outer diameter of the barrel 12. For example, when the diameter D of the probe 1 is 105 μm, the width S of the slit 121 is about 5 μm to 70 μm, and the distance W between the slits 121 is about 5 μm to 90 μm. The maximum value of the width S is determined by the distance W of the slits 121. The above dimensions are not arc dimensions but parallel dimensions. The length L of the slit is about 5 to 700 μm. The distance from the slit 121 to the open end of the barrel 12 is, for example, about 50 μm.

When the diameter D of the probe 1 is 95 μm, the width S of the slit 121 is about 5 μm to 65 μm, and the distance W between the slits 121 is about 5 μm to 90 μm. When the diameter of the probe 1 is 70 μm, the width S of the slit 121 is about 5 μm to 45 μm, and the distance W between the slits 121 is about 5 μm to 70 μm. When the diameter of the probe 1 is 60 μm, the width S of the slit 121 is about 5 μm to 40 μm, and the distance W between the slits 121 is about 5 μm to 50 μm. The length L of the slit 121 is about 5 to 700 μm.

As shown in FIG. 1, both ends of the barrel 12 are provided with open ends, one plunger 11 is inserted into one open end, and the other plunger 11 is inserted into the other open end. .. The probe 1 is used, for example, when determining the electrical characteristics of an inspected object. In this case, the tip 111 of one of the plungers 11 comes into contact with the object to be inspected. The tip 111 of the other plunger 11 comes into contact with a terminal such as a wiring board, and is electrically connected to a measuring device such as a tester via the wiring board.

Therefore, a conductive material is used for the plunger 11 and the barrel 12. For example, AgPdCu material or the like is used for the plunger 11, and Ni material or the like is used for the barrel 12.

As shown in FIG. 1, a spiral notch penetrating the side surface of the barrel 12 is formed, and a part of the barrel 12 is spring-shaped. As a result, the barrel 12 can be expanded and contracted in the axial direction. Therefore, the plunger 11 can be brought into contact with the inspected body or the wiring board by appropriate pressing. No notch is formed in the region where the plunger 11 is not arranged inside.

The probe 1 is held by the probe head 2, for example, as shown in FIG. The number of probes 1 required for the measurement of the object to be inspected is arranged so as to penetrate the probe head 2. The plunger 11 exposed from one main surface of the probe head 2 comes into contact with the inspected object. The plunger 11 exposed from the other main surface of the probe head 2 is electrically connected to the measuring device.

Hereinafter, an example of a method for manufacturing the probe 1 for joining the plunger 11 and the barrel 12 by spot welding will be described.

A plunger 11 and a barrel 12 made of a conductive material are prepared. As described above, at least a pair of joints 20 facing each other through the space inside the barrel 12 are defined in the barrel 12 in a region that is easily deformed by an external force due to being close to the slit 121.

Then, the insertion portion 112 of the plunger 11 is inserted into the inside of the barrel 12 from the open end. Next, while pressing the joint portion 201 and the joint portion 202 of the barrel 12 against the insertion portion 112 of the plunger 11, the joint portion 112 and the joint portion are formed so that the barrel 12 has a concave shape toward the plunger 11 at the joint portion 20. 20 are joined.

That is, as shown in FIG. 4, the barrel 12 and the plunger 11 are pressed (pressed) in the direction of the arrow by the first electrode 101 and the second electrode 102 arranged along the diameter direction of the barrel 12. A current is passed between them. That is, a current is passed between the joint portion 201 and the joint portion 202 in a state where the joint portion 201 and the joint portion 202 facing each other are pressed against the plunger 11 via the space inside the barrel 12. As a result, resistance heat is generated on the contact surface between the plunger 11 and the barrel 12. This thermal resistance causes the metal to melt and solidify inside the plunger 11 and the barrel 12, and the plunger 11 and the barrel 12 are joined to each other. A slit 121 close to the joint 201 and a slit 121 close to the joint 202 are arranged in parallel with the virtual line connecting the first electrode 101 and the second electrode 102 in contact with the joint 20.

By the above spot welding, as shown in FIG. 5, the inner wall surface of the barrel 12 is joined to the surface of the plunger 11 at the joint portion 20. Since the pair of joints 20 are defined on the side surface of the barrel 12, the joint 201 and the joint 202 are connected via the plunger 11 when the insertion portion 112 of the plunger 11 is inserted inside the barrel 12. Opposing.

By joining the plunger 11 and the barrel 12 while pressing the joint portion 20 defined in the easily deformable region against the insertion portion 112, the barrel 12 is directed toward the plunger 11 at the joint portion 20 as shown in FIG. It becomes a dented shape. Note that FIG. 6 is a side view of the probe 1 shown so that the joint portion 20 is located on the upper surface and the lower surface. Since deformation due to pressurization is concentrated on the joint portion 20, barrels other than the joint portion 20 are used. The shape of 12 is maintained in the state before the plunger 11 and the barrel 12 are joined.

On the other hand, FIG. 7 shows a comparative example in which the barrel 12A having no slit 121 and the plunger 11 are spot welded. In the comparative example, the plunger 11 and the barrel 12A are joined by passing an electric current while pressurizing the plunger 11 and the barrel 12A by the first electrode 101 and the second electrode 102 in the direction of the arrow. As shown in FIG. 8, the pressurization at this time causes a bulge on the surface of the barrel 12A due to the shape change.

When the surface of the probe bulges, it is necessary to widen the distance between the probes in order to prevent the probes from coming into contact with each other. Therefore, the narrowing of the pitch of the probe arrangement is hindered.

On the other hand, in the probe 1 shown in FIG. 1, a slit 121 is formed on the side surface of the barrel 12 in the vicinity of the joint portion 20 of the barrel 12 to be spot welded to the plunger 11. That is, a region that easily deforms when an external force is applied is defined in the barrel 12 as the joint portion 20. By intentionally forming the joint portion 20 so as to be recessed when joined in this way, as shown in FIG. 6, a probe 1 having a shape in which the side surface of the barrel 12 is recessed at the joint portion 20 is obtained. Be done.

As described above, according to the probe 1 according to the embodiment of the present invention, only a predetermined portion of the barrel 12 is deformed so as to be recessed inward, so that the surface of the barrel 12 other than the joint portion 20 bulges outward. Is suppressed. That is, the outer diameter of the joint portion 20 and the outer diameter of the barrel 12 other than the joint portion 20 are not larger than before the plunger 11 and the barrel 12 are joined. Therefore, it is possible to narrow the pitch of the arrangement of the probe 1.

<First modification>
In the barrel 12 of the probe 1 according to the first modification shown in FIGS. 9 and 10, a pair of joints composed of a pair of joints 20 facing each other through the space inside the barrel 12 is in the axial direction of the barrel 12. Multiple definitions are made along the circumferential direction perpendicular to.

As shown in FIG. 10, the joint portion 201a and the joint portion 202a defined in the barrel 12 form a joint portion pair. Then, the joint portion 201b and the joint portion 202b form a joint portion pair, the joint portion 201c and the joint portion 202c form a joint portion pair, and the joint portion 201d and the joint portion 202d form a joint portion pair. Hereinafter, the joint portion 201a, the joint portion 201b, the joint portion 201c, and the joint portion 201d are collectively referred to as a “first joint portion group”. Further, the joint portion 202a, the joint portion 202b, the joint portion 202c, and the joint portion 202d are collectively referred to as a "second joint portion group".

11 to 12 show an example in which the barrel 12 of the probe 1 and the plunger 11 according to the first modification are joined by spot welding. First, as shown in FIG. 11, the insertion portion 112 of the plunger 11 is inserted into the inside of the barrel 12 from the open end of the barrel 12 in which a plurality of joint pairs are defined.

Next, as shown in FIG. 12, the first electrode 101 composed of a plurality of parts having an arc-shaped contact surface is brought into contact with the first joint group. Similarly, the second electrode 102 composed of a plurality of parts having an arc-shaped contact surface is brought into contact with the second joint group. The protrusions provided on the contact surfaces at the ends of the parts of the first electrode 101 and the second electrode 102 come into contact with the joint portion 20. As shown in FIG. 12, the protrusions of the two parts come into contact with each of the joints 20. Then, while pressurizing the barrel 12 by the first electrode 101 and the second electrode 102 so as to press the first joint group and the second joint group against the plunger 11, a current is applied between the barrel 12 and the plunger 11. Shed. As a result, the plunger 11 and the barrel 12 are joined. After that, the first electrode 101 and the second electrode 102 are separated from the barrel 12.

According to the above joining method, when joining the plunger 11 and the barrel 12, the joining portions 20 included in each of the joining portion pairs are simultaneously pressed against the insertion portion 112. Therefore, the swelling of the barrel 12 can be suppressed at a plurality of locations at the same time. It is not always necessary to apply an electric current to all the joint pairs to spot weld the plunger 11 and the barrel 12. That is, the plunger 11 and the barrel 12 may be spot-welded by passing an electric current only to a part of a plurality of joint pairs, for example, a pair of joints. A plurality of pairs of joints may be spot welded to the insertion portion 112 at the same time.

Further, according to the configuration of the barrel 12 shown in FIG. 12, when joining the plunger 11 and the barrel 12, the step of aligning the first electrode 101 and the second electrode 102 with the barrel 12 can be simplified. .. For example, when a set of the first electrode 101 and the second electrode 102 is used and the pair of joints is a set, the barrel 12 is rotated about the axis of rotation in the axial direction to rotate the joint 20 and the first. It is necessary to align the electrode 101 and the second electrode 102. However, in the barrel 12 shown in FIG. 12, since it is sufficient that any one of the plurality of joint pairs faces the first electrode 101 and the second electrode 102, the step of rotating the barrel 12 can be omitted. Therefore, the manufacturing process of the probe 1 can be shortened.

<Second modification>
In the barrel 12 shown in FIG. 13, two slits 121 having a joint portion 20 defined between them are connected by a connecting portion 122 that divides the joint portion 20.

When spot welding the plunger 11 and the barrel 12 shown in FIG. 13, a current is passed between the barrel 12 and the plunger 11 while pressing the joint portion 20 divided by the connecting portion 122 against the surface of the plunger 11. .. That is, as shown in FIG. 14, the joint portion 20 of the barrel 12 and the plunger 11 are spot welded on both sides of the connecting portion 122.

In the barrel 12 of the modified example shown in FIG. 13, the joint portion 20 is more easily deformed than the barrel 12 shown in FIG. Therefore, it is possible to further suppress the joint portion 20 of the barrel 12 from bulging outward.

As in the modified example described with reference to FIG. 9, a plurality of joint pairs are defined along the circumferential direction of the barrel 12 as shown in FIG. 15 by using the slit 121 having the shape shown in FIG. You may. At this time, as shown in FIG. 16, only the pair of joints of the barrel 12 may be pressed against the plunger 11 by using the first electrode 101 and the second electrode 102 for spot welding. In that case, only a pair of joints is joined to the plunger 11.

Alternatively, as shown in FIG. 17, a plurality of joint pairs of the barrel 12 are connected to the plunger 11 by using the first electrode 101a and the second electrode 102a, and the first electrode 101b and the second electrode 102b, respectively. It may be pressed against and spot welded. In that case, a plurality of joint pairs are joined to the plunger 11. According to the joining method shown in FIG. 17, the swelling of the barrel 12 can be suppressed at a plurality of points at the same time.

<Third modification example>
In the above, an example is shown in which the joint portion 20 of the barrel 12 is sandwiched by the linear slit 121. However, the shape of the slit 121 for providing the joint portion 20 that is easily deformed by an external force is not limited to the linear shape.

For example, as shown in FIGS. 18 (a) and 18 (b), a “U” shaped slit 121 may be formed in the barrel 12. That is, the joint portion 20 is defined in a tongue piece-shaped region surrounded on three sides by the slit 121.

The barrel 12 shown in FIG. 18A is an example in which the tongue piece-shaped region in which the joint portion 20 is defined extends along the axial direction of the barrel 12. The barrel 12 shown in FIG. 18B is an example in which the tongue piece-shaped region extends in the circumferential direction perpendicular to the axial direction of the barrel 12. Further, in FIGS. 19 (a) and 19 (b), a plurality of “U-shaped” slits 121 shown in FIGS. 18 (a) and 18 (b) are provided along the circumferential direction of the barrel 12. An arrayed example is shown.

Further, as shown in FIGS. 20A to 20C, a slit 121 having a bent portion may be used, and the joint portion 20 may be defined in a region close to the bent portion of the slit 121.

In the example shown in FIG. 20 (a), the slit 121 has an L-shape. The L-shaped corner portion is a portion that is easily deformed by an external force. Therefore, as shown in FIG. 20A, the joint portion 20 is defined so as to be close to the corner portion of the L-shape.

Further, in the example shown in FIG. 20 (b), the slit 121 has a "dogleg" shape, and the joint portion 20 is defined so as to be close to the bent portion of the "dogleg". In the example shown in FIG. 20 (c), the slit 121 has a configuration in which two "dogleg" shapes are arranged side by side, and the joint portion 20 is defined in the middle of the slits 121 of the "dogleg".

21 (a) and 21 (b) show an example of a barrel 12 in which a plurality of slits 121 having a bent portion are formed along the circumferential direction. FIG. 21A is an example in which a plurality of L-shaped slits 121 are arranged in the circumferential direction of the barrel 12. FIG. 21B is an example in which a plurality of “dogleg” shaped slits 121 are arranged in the circumferential direction of the barrel 12.

<Fourth modification>
In the barrel 12 shown in FIG. 22A, a plurality of rectangular slits 121 are arranged apart from each other along the axial direction of the barrel 12. A joint portion 20 is defined in the middle of the arranged slits 121. Also in this case, when the plunger 11 and the barrel 12 are joined, the joint portion 20 is dented and the barrel 12 is prevented from bulging outward. FIG. 22B shows an example in which a plurality of sets of slits 121 arranged along the axial direction are formed along the circumferential direction of the barrel 12.

Note that FIGS. 22 (a) and 22 (b) show an example in which the slit 121 has a rectangular shape. However, the shape of the slit 121 is not limited to a rectangular shape, and may be, for example, an L-shaped shape or a “dogleg” shape.

(Other embodiments)
Although the invention has been described by embodiment as described above, the statements and drawings that form part of this disclosure should not be understood to limit the invention. This disclosure will reveal to those skilled in the art various alternative embodiments, examples and operational techniques.

For example, although the case where the cross-sectional shape of the probe 1 is circular is shown above, the cross-sectional shape may be a polygonal shape such as a quadrangle.

Further, even when the plunger 11 and the barrel 12 are joined while being crimped by a joining method other than spot welding, the barrel 12 can be prevented from bulging outward by applying the present invention.

Further, in the manufacture of the probe 1 according to the first modification shown in FIGS. 9 and 10, unlike the electrode divided into a plurality of parts having a protrusion as shown in FIG. 12, FIG. 23 shows. The integrated arcuate first electrode 101 and the second electrode 102 shown may be used. The joint portion 20 sandwiched between the slits 121 is pressed against the plunger 11 even if the outer periphery of the barrel 12 is pressed by the first electrode 101 and the second electrode 102 shown in FIG. 23. Alternatively, as shown in FIG. 24, each of the individual joints 20 included in the first joint group and the second joint group is pressurized by the first electrodes 101a to 101d and the second electrodes 102a to 102d. A current may be passed while flowing.

As described above, it goes without saying that the present invention includes various embodiments not described here. Therefore, the technical scope of the present invention is defined only by the matters specifying the invention relating to the reasonable claims from the above description.

1 ... Probe 11 ... Plunger 12 ... Barrel 20 ... Joint 111 ... Tip 112 ... Insertion 121 ... Slit

Claims (11)

A rod-shaped plunger with a tip and an insertion part,
It comprises a tube-shaped barrel with an open end into which the insertion portion is inserted.
The barrel has a plurality of slits, the plurality of slits are formed apart from the opening end, and at least a pair of joints facing each other through a space inside the barrel is one of the plurality of slits. It is defined as a region where both sides of the joint, which are parallel to the axial direction of the barrel, touch the slit of the joint.
The insertion portion and the joint portion are joined by welding in the space inside the barrel.
A probe characterized in that the barrel has a shape recessed toward the plunger at the joint. The probe according to claim 1, wherein a plurality of joint portions including the pair of joint portions are defined along a circumferential direction perpendicular to the axial direction of the barrel. The probe according to claim 1 or 2, wherein the slit has a linear shape extending along the axial direction of the barrel, and the joint portion is defined between two adjacent slits. The probe according to claim 3, wherein the two slits having the joint defined between them are connected by a connecting portion that divides the joint. The probe according to claim 1 or 2, wherein the slit has a U-shape, and the joint is defined in a region surrounded on three sides by the slit. The probe according to claim 1 or 2, wherein the slit has a bent portion, and the joint portion is defined in a region close to the bent portion. The first or second aspect of the present invention, wherein the plurality of slits are arranged adjacent to each other along the axial direction of the barrel, and the joint portion is defined in the middle of the arranged plurality of slits. probe. It is characterized in that the opening ends are provided at both ends of the barrel, one plunger is inserted into one of the opening ends, and the other plunger is inserted into the other opening end. The probe according to any one of claims 1 to 7. A step of inserting the insertion portion of a rod-shaped plunger having a tip portion and an insertion portion from the opening end of a tube-shaped barrel having a plurality of slits formed apart from the opening end .
Region the junction of at least one pair of said barrel opposed through an internal space of the previous SL barrel, parallel side surfaces in the axial direction of the barrel of the joint to one of the slits of the plurality of slits is in contact The step of joining the insertion portion and the joint portion by welding so that the barrel has a concave shape toward the plunger at the joint portion while pressing the joint portion against the insertion portion. A method for manufacturing a probe, which comprises. The method for manufacturing a probe according to claim 9, wherein the insertion portion and the joint portion are joined by spot welding in which an electric current is passed between the pair of the joint portions while being pressed against the plunger. .. The insertion portion of the plunger is inserted from the opening end of the barrel in which a plurality of joint portions consisting of the pair of the joint portions are defined along a circumferential direction perpendicular to the axial direction of the barrel.
The method for manufacturing a probe according to claim 9 or 10, wherein the joint portion included in each of the plurality of joint portion pairs is simultaneously pressed against the insertion portion.

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