JP7001373B2 - Liquid discharge head and its manufacturing method - Google Patents

Liquid discharge head and its manufacturing method Download PDF

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JP7001373B2
JP7001373B2 JP2017117996A JP2017117996A JP7001373B2 JP 7001373 B2 JP7001373 B2 JP 7001373B2 JP 2017117996 A JP2017117996 A JP 2017117996A JP 2017117996 A JP2017117996 A JP 2017117996A JP 7001373 B2 JP7001373 B2 JP 7001373B2
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wiring board
electric wiring
electric
pad
discharge head
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JP2019001072A (en
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新平 大▲高▼
知広 高橋
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Canon Inc
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本発明は、液体を吐出する液体吐出ヘッドとその製造方法に関する。 The present invention relates to a liquid discharge head that discharges a liquid and a method for manufacturing the same.

画像記録等を行うために液体を吐出する液体吐出ヘッドには、エネルギー発生素子に対向する位置に吐出口が配置され、エネルギー発生素子が発生したエネルギーによって液体を吐出口から外部に吐出するものがある。このような液体吐出ヘッドは、サイドシューター型の液体吐出ヘッドと呼ばれる。この液体吐出ヘッドは、一般的に、エネルギー発生素子を備えた素子基板と、電気配線を備えた電気配線基板と、素子基板および電気配線基板を支持する支持部材と、支持部材から離れて位置する内部基板と、を有している。電気配線基板は、一端部が素子基板に接続され、他端部が内部基板に接続されている。従って、液体吐出ヘッド本体から液体吐出ヘッドの内部基板に伝達された電力や電気信号は、内部基板から電気配線基板を介して素子基板のエネルギー発生素子に伝達される。 The liquid discharge head that discharges liquid for image recording, etc. has a discharge port located at a position facing the energy generating element, and discharges the liquid from the discharge port to the outside by the energy generated by the energy generating element. be. Such a liquid discharge head is called a side shooter type liquid discharge head. The liquid discharge head is generally located away from the element substrate with the energy generating element, the electrical wiring board with the electrical wiring, the support member supporting the element substrate and the electrical wiring board, and the support member. It has an internal board. One end of the electrical wiring board is connected to the element board, and the other end is connected to the internal board. Therefore, the electric power and the electric signal transmitted from the main body of the liquid discharge head to the internal substrate of the liquid discharge head are transmitted from the internal substrate to the energy generating element of the element substrate via the electric wiring board.

電気配線基板と内部基板とは、一般的に、異方性導電性フィルムやワイヤーボンディングによって電気的に接続されている。電気配線基板と内部基板とを異方性導電性フィルムによって電気的に接続する場合には、電気配線基板の電気パッドと内部基板の電気パッドの位置を合わせた状態で、両電気パッドの間に異方性導電性フィルムを配置して一括して圧着する。電気配線基板と内部基板とをワイヤーボンディングによって電気的に接続する場合には、例えば内部基板の上に電気配線基板を接合した状態でそれぞれの電気パッド同士をボンディングワイヤーによって接続する。 The electrical wiring board and the internal board are generally electrically connected by an anisotropic conductive film or wire bonding. When the electrical wiring board and the internal substrate are electrically connected by an anisotropic conductive film, the electrical pad of the electrical wiring board and the electrical pad of the internal substrate should be aligned between the two electrical pads. An anisotropic conductive film is placed and crimped together. When the electric wiring board and the internal board are electrically connected by wire bonding, for example, the electric pads are connected to each other by a bonding wire in a state where the electric wiring board is bonded on the internal board.

電気配線基板と内部基板との電気接続部は、電気的短絡や腐食等の防止のために、液体に触れないように絶縁保護する必要がある。一般的な絶縁保護方法として、特許文献1に記載されているように電気接続部とその周囲に硬化可能な液状の封止樹脂を塗布して硬化させ、電気接続部を封止樹脂中に埋包する方法がある。ここで用いられる液状の封止樹脂としては、熱硬化性、UV硬化性、または湿気硬化性を有する、エポキシ樹脂、アクリル樹脂、ウレタン樹脂、シリコン樹脂等が挙げられる。これらの封止樹脂によって、異方性導電性フィルムやワイヤーボンディングによる電気接続部を埋包することにより、記録液からの絶縁保護が達成される。確実な絶縁保護のためには、電気接続部だけでなくその周囲に広く封止樹脂を塗布することが好ましい。すなわち、電気接続部に液体等が浸入する経路になる可能性のある部分を封止樹脂で封止しないと、電気接続部への記録液等の浸入を十分に防止できない。 The electrical connection between the electrical wiring board and the internal substrate needs to be insulated and protected so that it does not come into contact with liquid in order to prevent electrical short circuits and corrosion. As a general insulation protection method, as described in Patent Document 1, a curable liquid sealing resin is applied to and around the electrical connection portion and cured, and the electrical connection portion is embedded in the sealing resin. There is a way to wrap it. Examples of the liquid sealing resin used here include epoxy resin, acrylic resin, urethane resin, silicon resin and the like having thermosetting property, UV curing property, and moisture curing property. Insulation protection from the recording liquid is achieved by embedding the electrical connection portion by the anisotropic conductive film or wire bonding with these sealing resins. For reliable insulation protection, it is preferable to widely apply the sealing resin not only to the electrical connection portion but also to the periphery thereof. That is, unless the portion where the liquid or the like may enter the electrical connection portion is sealed with the sealing resin, the recording liquid or the like cannot be sufficiently prevented from entering the electrical connection portion.

特開2007-313831号公報Japanese Unexamined Patent Publication No. 2007-313831

電気接続部だけではなくその周囲にも広く封止樹脂を塗布するためには、電気配線基板と内部基板とを電気的に接続した状態で、それらを様々な姿勢に回転させながら封止樹脂を塗布する必要がある。しかし、接続された状態の電気配線基板および内部基板の姿勢を変えながら塗布を行うことは容易ではない。また、封止樹脂の塗布に要する時間が長く、液体吐出ヘッドのリードタイムが長くなる。さらに、電気配線基板および内部基板を回転させるために複雑な機構が必要であり、液体吐出ヘッドの製造コストが高くなる。 In order to apply the sealing resin not only to the electrical connection part but also to the surrounding area, the sealing resin is applied while the electrical wiring board and the internal board are electrically connected and rotated in various postures. Need to be applied. However, it is not easy to apply the coating while changing the postures of the electric wiring board and the internal board in the connected state. In addition, the time required for applying the sealing resin is long, and the lead time of the liquid discharge head is long. Further, a complicated mechanism is required to rotate the electric wiring board and the internal board, which increases the manufacturing cost of the liquid discharge head.

そこで本発明の目的は、低コストかつ短時間の簡単な方法で封止樹脂の塗布を行うことができ、電気接続部の絶縁保護の信頼性が高い液体吐出ヘッドとその製造方法を提供することにある。 Therefore, an object of the present invention is to provide a liquid discharge head which can apply a sealing resin by a simple method at low cost and in a short time and has high reliability of insulation protection of an electrical connection portion and a method for manufacturing the same. It is in.

本発明の液体吐出ヘッドは、第1の電気配線基板と、液体を吐出する吐出口を有し第1の電気配線基板の一端部と電気的に接続されている素子基板と、第1の電気配線基板の他端部と電気的に接続されている第2の電気配線基板と、を有し、第1の電気配線基板の他端部と第2の電気配線基板とは接着部材を介して接合されており、接着部材は、第2の電気配線基板の板面に直交する方向に見て、第1の電気配線基板の第2の電気配線基板との接合部分の端部よりも外側にはみ出して位置する端部を含む平面形状を有し、第2の電気配線基板の、第1の電気配線基板との接合部分を備える面に電気パッドが形成され、第1の電気配線基板の、第2の電気配線基板に対向する面と反対側の面に電気パッドが形成されており、第2の電気配線基板の電気パッドと第1の電気配線基板の電気パッドとが電気的に接続されており、第2の電気配線基板の板面に直交する方向に見て、第1の電気配線基板の電気パッドが形成された領域と第2の電気配線基板との間に接着部材が位置する。 The liquid discharge head of the present invention includes a first electric wiring board, an element board having a discharge port for discharging liquid and electrically connected to one end of the first electric wiring board, and first electricity. It has a second electrical wiring board that is electrically connected to the other end of the wiring board, and the other end of the first electrical wiring board and the second electrical wiring board are connected to each other via an adhesive member. The adhesive member is joined, and the adhesive member is outward from the end of the joint portion of the first electric wiring board with the second electric wiring board when viewed in a direction orthogonal to the plate surface of the second electric wiring board. An electric pad is formed on the surface of the second electric wiring board having a joint portion with the first electric wiring board, which has a planar shape including an end portion located so as to protrude from the first electric wiring board. An electric pad is formed on a surface opposite to the surface facing the second electric wiring board, and the electric pad of the second electric wiring board and the electric pad of the first electric wiring board are electrically connected to each other. The adhesive member is located between the region where the electric pad of the first electric wiring board is formed and the second electric wiring board when viewed in a direction orthogonal to the plate surface of the second electric wiring board. ..

本発明によると、低コストかつ短時間の簡単な方法で封止樹脂の塗布を行うことができ、電気接続部の絶縁保護の信頼性が高い液体吐出ヘッドが実現する。 According to the present invention, the sealing resin can be applied by a simple method at low cost and in a short time, and a liquid discharge head having high reliability of insulation protection of the electrical connection portion is realized.

本発明の第1の実施形態の液体吐出ヘッドの要部の斜視図および平面図である。It is a perspective view and the plan view of the main part of the liquid discharge head of 1st Embodiment of this invention. 図1に示す液体吐出ヘッドの電気配線基板と内部基板の接合部分の周辺の平面図および断面図と、比較例の断面図である。FIG. 1 is a plan view and a cross-sectional view of the periphery of the joint portion between the electrical wiring board and the internal board of the liquid discharge head shown in FIG. 1, and is a cross-sectional view of a comparative example. 図1に示す液体吐出ヘッドの製造方法の一部を示す斜視図である。It is a perspective view which shows a part of the manufacturing method of the liquid discharge head shown in FIG. 第2の実施形態の電気配線基板と内部基板の接合部分の周辺の断面図である。It is sectional drawing around the joint part of the electric wiring board and the internal board of 2nd Embodiment. 第3の実施形態の電気配線基板と内部基板の接合部分の周辺の平面図である。It is a top view around the joint portion of the electric wiring board and the internal board of 3rd Embodiment. 第4の実施形態の液体吐出ヘッドの要部の斜視図および電気配線基板と内部基板の接合部分の周辺の平面図と、その変形例の平面図である。It is a perspective view of the main part of the liquid discharge head of 4th Embodiment, the plan view of the periphery of the joint part of the electric wiring board and the internal board, and the plan view of the modified example thereof.

以下、本発明の実施の形態について図面を用いて説明する。
[第1の実施形態]
図1(a)は本発明に係る液体吐出ヘッドの要部を示す斜視図であり、図1(b)はその平面図である。図2(a)は図1(b)の電気配線基板と内部基板の接合部分および電気接続部の周辺の平面図である。図2(b)は図2(a)に示す電気接続部を封止樹脂で覆った状態を示す平面図である。図2(c)は図2(a)のA-A線断面図である。図2(d)は図2(c)に示す構成と対比するための比較例の断面図である。
図1(a),1(b)に示すように、本実施形態の液体吐出ヘッドは、素子基板(液体吐出チップ)101と、電気配線基板(第1の電気配線基板)102と、支持部材103と、他の基板である内部基板(第2の電気配線基板)105を有している。素子基板101は、記録液(液体インク)等の液体を吐出するための吐出口101aと、図示しないが吐出口に連通する圧力室内に配置されたエネルギー発生素子(例えば発熱素子や圧電素子など)を備えている。支持部材103は、素子基板101と電気配線基板102の一端部を支持している。内部基板105は、支持部材103から離れた位置に配置されている。電気配線基板102は、一端部が素子基板101に接続され、他端部が内部基板105に電気的に接続された電気配線(図示せず)を有している。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1A is a perspective view showing a main part of the liquid discharge head according to the present invention, and FIG. 1B is a plan view thereof. FIG. 2A is a plan view of the periphery of the joint portion between the electrical wiring board and the internal substrate and the electrical connection portion of FIG. 1B. FIG. 2B is a plan view showing a state in which the electrical connection portion shown in FIG. 2A is covered with a sealing resin. FIG. 2 (c) is a cross-sectional view taken along the line AA of FIG. 2 (a). FIG. 2D is a cross-sectional view of a comparative example for comparison with the configuration shown in FIG. 2C.
As shown in FIGS. 1 (a) and 1 (b), the liquid discharge head of the present embodiment includes an element substrate (liquid discharge chip) 101, an electric wiring board (first electric wiring board) 102, and a support member. It has 103 and an internal board (second electrical wiring board) 105 which is another board. The element substrate 101 includes a discharge port 101a for discharging a liquid such as a recording liquid (liquid ink) and an energy generating element (for example, a heat generating element, a piezoelectric element, etc.) arranged in a pressure chamber communicating with the discharge port (not shown). It is equipped with. The support member 103 supports one end of the element substrate 101 and the electrical wiring board 102. The internal substrate 105 is arranged at a position away from the support member 103. The electrical wiring board 102 has an electrical wiring (not shown) having one end connected to the element substrate 101 and the other end electrically connected to the internal substrate 105.

この液体吐出ヘッドにおいて、素子基板101と電気配線基板102の一端部とは支持部材103上に接合されている。図1(a)に示す例では、素子基板101と電気配線基板102の一端部とは、図示しないがワイヤーボンディング等によって電気的に接続され、その上方から封止樹脂104によって覆われている。また、電気配線基板102の他端部は内部基板105に接合されている。図1(b)に示す例では、電気配線基板102の他端部の電気パッド107がボンディングワイヤー108によって内部基板105の電気パッド112と電気的に接続されている。ただし、素子基板101と電気配線基板102の電気的な接続方法や、内部基板105と電気配線基板102の電気的接続方法は、ワイヤーボンディングに限られない。フライングリードや異方導電性フィルムや異方導電性ペースト等を用いる公知の接続方法を採用してこれらを電気的に接続してもよい。 In this liquid discharge head, one end of the element substrate 101 and the electric wiring board 102 is joined on the support member 103. In the example shown in FIG. 1A, one end of the element substrate 101 and the electric wiring board 102 is electrically connected by wire bonding or the like (not shown), and is covered with a sealing resin 104 from above. Further, the other end of the electrical wiring board 102 is joined to the internal board 105. In the example shown in FIG. 1 (b), the electric pad 107 at the other end of the electric wiring board 102 is electrically connected to the electric pad 112 of the internal board 105 by the bonding wire 108. However, the method of electrically connecting the element substrate 101 and the electrical wiring board 102 and the method of electrically connecting the internal substrate 105 and the electrical wiring board 102 are not limited to wire bonding. A known connection method using a flying lead, an anisotropic conductive film, an anisotropic conductive paste, or the like may be adopted to electrically connect them.

電気配線基板102と素子基板101の電気接続部と、電気配線基板102と内部基板105の電気接続部は、記録液や空気中の水分(湿気)等に対して絶縁保護する必要がある。一般的には、これらの電気接続部は、硬化可能な液状の封止樹脂が塗布されて固化されることで絶縁保護されている。図1(a),1(b)には、電気配線基板102と素子基板101の電気接続部を保護する封止樹脂104と、電気配線基板102と内部基板105の電気接続部を保護する封止樹脂109を示している。ただし、後述する本発明の特徴の1つである電気配線基板102と内部基板105の接合部分周辺の構成を図示するために、図1(b)において封止樹脂109は2点鎖線で輪郭のみが示されている。電気接続部を覆う封止樹脂104,109としては、エポキシ樹脂、アクリル樹脂、エポキシアクリレート樹脂、イミド樹脂、アミド樹脂等が挙げられる。それらの封止樹脂104,109の硬化方法は、硬化剤を混合する2液混合硬化、加熱による熱硬化、紫外線照射によるUV硬化等のいずれであってもよく、封止樹脂104,109の特性に合わせて多岐にわたる硬化方法が採用可能である。特に好ましく一般的に使用される液状の封止樹脂は、熱硬化型のエポキシ樹脂である。 The electrical connection between the electrical wiring board 102 and the element board 101, and the electrical connection between the electrical wiring board 102 and the internal board 105 need to be insulated and protected against the recording liquid, moisture (humidity) in the air, and the like. Generally, these electrical connections are insulated and protected by being coated with a curable liquid sealing resin and solidified. 1A and 1B show a sealing resin 104 that protects the electrical connection between the electrical wiring board 102 and the element substrate 101, and a seal that protects the electrical connection between the electrical wiring board 102 and the internal substrate 105. The stop resin 109 is shown. However, in order to illustrate the configuration around the joint portion between the electrical wiring board 102 and the internal board 105, which is one of the features of the present invention described later, in FIG. 1B, the sealing resin 109 is a two-dot chain line and has only a contour. It is shown. Examples of the sealing resins 104 and 109 covering the electrical connection portion include epoxy resin, acrylic resin, epoxy acrylate resin, imide resin, and amide resin. The curing method of the sealing resins 104 and 109 may be any of two-component mixed curing in which a curing agent is mixed, thermosetting by heating, UV curing by ultraviolet irradiation, and the like, and the characteristics of the sealing resins 104 and 109. A wide variety of curing methods can be adopted according to the situation. A particularly preferable and generally used liquid sealing resin is a thermosetting epoxy resin.

電気配線基板102の一端部と素子基板101とは、接着剤(図示せず)によって支持部材103上にそれぞれ接着されている。一方、電気配線基板102の他端部は、接着部材の一例である接着フィルム106によって内部基板105に接合されている。接着フィルム106としては、硬化可能な樹脂組成物からなるフィルムや、塑性変形により接着力を発揮するフィルムなどが挙げられる。具体的には、エポキシ樹脂、イミド樹脂、アミド樹脂、アクリル樹脂、ウレタン樹脂などを含む樹脂組成物からなる接着フィルム106が使用可能である。接着フィルム106は、粘着性を初めから有しているものや、加熱されて粘着性を発現するタイプのものがある。接着フィルム106の取り扱いやすさを考慮すると、常温では粘着性をもたず、加熱されることで粘着性を発揮するタイプのフィルムが使い勝手が良い。電気配線基板102と内部基板105の接合方法としては、接着フィルム106の他に、接着剤や両面テープを用いる方法も考えられる。これらの接合方法の中では、接合工程の容易さを考慮すると、接着フィルムや両面テープによる接合が簡便である。このうち、両面テープは一般に市販されており安価であるが、耐インク性に劣るものが多い。特に液体吐出ヘッドにおいては吐出液(例えば記録用の液体インク)に対する耐性を求められるので、市販の両面テープよりも、加熱により粘着性を発揮するタイプの接着フィルム106を用いることが好ましい場合が多い。
一例として、本実施形態の液体吐出ヘッドでは、電気配線基板102の他端部が、エポキシ樹脂を含む樹脂組成物からなる接着フィルム106を介して内部基板105に接合されている。この接着フィルム106は常温では粘着性を有さず、加熱および加圧することにより粘着性を発揮して被着体に接着し、さらに加熱することで接着力が強固になる。具体的な接着フィルム106の例としては、日東電工株式会社製のFB-ML80やFB-ML4(いずれも商品名)などが挙げられ、本実施形態ではFB-ML4が用いられている。
One end of the electric wiring board 102 and the element board 101 are adhered to each other on the support member 103 with an adhesive (not shown). On the other hand, the other end of the electrical wiring board 102 is bonded to the internal board 105 by an adhesive film 106 which is an example of an adhesive member. Examples of the adhesive film 106 include a film made of a curable resin composition and a film that exerts an adhesive force by plastic deformation. Specifically, an adhesive film 106 made of a resin composition containing an epoxy resin, an imide resin, an amide resin, an acrylic resin, a urethane resin, or the like can be used. The adhesive film 106 may have adhesiveness from the beginning or may be heated to develop adhesiveness. Considering the ease of handling of the adhesive film 106, a film of a type that does not have adhesiveness at room temperature and exhibits adhesiveness when heated is convenient. As a method of joining the electric wiring board 102 and the internal board 105, a method of using an adhesive or double-sided tape in addition to the adhesive film 106 can be considered. Among these joining methods, joining with an adhesive film or double-sided tape is convenient in consideration of the ease of the joining process. Of these, double-sided tape is generally commercially available and inexpensive, but many of them are inferior in ink resistance. In particular, since the liquid ejection head is required to have resistance to the ejected liquid (for example, liquid ink for recording), it is often preferable to use an adhesive film 106 of a type that exhibits adhesiveness by heating rather than a commercially available double-sided tape. ..
As an example, in the liquid discharge head of the present embodiment, the other end of the electric wiring board 102 is bonded to the inner board 105 via an adhesive film 106 made of a resin composition containing an epoxy resin. The adhesive film 106 does not have adhesiveness at room temperature, and exhibits adhesiveness when heated and pressurized to adhere to the adherend, and further heated to strengthen the adhesive force. Specific examples of the adhesive film 106 include FB-ML80 and FB-ML4 (both are trade names) manufactured by Nitto Denko KK, and FB-ML4 is used in this embodiment.

このように、本実施形態では、接着フィルム106が電気配線基板102と内部基板105との間に介在し、電気配線基板102と内部基板105を接合させている。そして、接着フィルム106は、内部基板105の板面(主面)に直交する方向(Z方向)に見て(平面的に見て)、電気配線基板102の内部基板105との接合部分の端部よりも外側にはみ出して位置する端部を含む平面形状を有している。具体的には、幅方向(X方向)において、接着フィルム106の両端部106a,106bが、電気配線基板102の内部基板105との接合部分の両端部102a,102bよりも外側にそれぞれはみ出して位置している。すなわち、内部基板105の板面に直交する方向に見て、電気配線基板102の幅方向の長さよりも、接着フィルム106の幅方向の長さが大きい。ここで言う幅方向とは、電気配線基板102の中央部から内部基板105との接合部分に向かって延びる方向(便宜上「電気配線基板102の延びる方向(Y方向)」と言う)に直交する方向である。幅方向は図1(b),2(a)の左右方向である。電気配線基板102の延びる方向は図1(b),2(a)の上下方向である。また、電気配線基板102の延びる方向において、電気配線基板102の内部基板105との接合部分の先端部102cは、接着フィルム106の端部から離れた中間部内に位置しており、すなわち端部106cよりも内側に位置している。 As described above, in the present embodiment, the adhesive film 106 is interposed between the electric wiring board 102 and the internal board 105 to bond the electric wiring board 102 and the internal board 105. Then, the adhesive film 106 is viewed in a direction (Z direction) orthogonal to the plate surface (main surface) of the internal substrate 105 (viewed in a plane), and the end of the joint portion of the electrical wiring board 102 with the internal substrate 105. It has a planar shape including an end portion located outside the portion. Specifically, in the width direction (X direction), both end portions 106a and 106b of the adhesive film 106 protrude outward from both end portions 102a and 102b of the joint portion of the electrical wiring board 102 with the internal substrate 105. is doing. That is, when viewed in the direction orthogonal to the plate surface of the internal substrate 105, the length in the width direction of the adhesive film 106 is larger than the length in the width direction of the electrical wiring substrate 102. The width direction referred to here is a direction orthogonal to a direction extending from the central portion of the electric wiring board 102 toward the joint portion with the internal board 105 (for convenience, referred to as "the extending direction (Y direction) of the electric wiring board 102"). Is. The width direction is the left-right direction of FIGS. 1 (b) and 2 (a). The extending direction of the electric wiring board 102 is the vertical direction shown in FIGS. 1 (b) and 2 (a). Further, in the extending direction of the electrical wiring board 102, the tip portion 102c of the joint portion of the electrical wiring board 102 with the internal substrate 105 is located in the intermediate portion away from the end portion of the adhesive film 106, that is, the end portion 106c. It is located inside.

このように接着フィルム106が配置されているため、接着フィルム106は、電気配線基板102によって完全には覆われていない。接着フィルム106の端部106a~106cは、電気配線基板102の内部基板105に接合される部分の3つの端部(幅方向の両端部102a,102bと接合部側の端部102c)より外側にそれぞれはみ出している。このようにして電気配線基板102が接着フィルム106を介して内部基板105に接合された状態で、電気配線基板102の電気パッド107と内部基板105の電気パッド112とがボンディングワイヤー108によって接続されている。そして、この電気接続部は、図2(b)に示すように封止樹脂109によって覆われている。板面に直交する方向(Z方向)に見て、電気配線基板102の電気パッド107が形成された領域と内部基板105との間に接着フィルム106が位置する。 Since the adhesive film 106 is arranged in this way, the adhesive film 106 is not completely covered by the electric wiring board 102. The ends 106a to 106c of the adhesive film 106 are outside the three ends (the end portions 102a and 102b in the width direction and the end portions 102c on the joint portion side) of the portion joined to the inner substrate 105 of the electrical wiring board 102. Each is sticking out. In this way, with the electrical wiring board 102 bonded to the internal substrate 105 via the adhesive film 106, the electrical pad 107 of the electrical wiring board 102 and the electrical pad 112 of the internal substrate 105 are connected by the bonding wire 108. There is. The electrical connection portion is covered with the sealing resin 109 as shown in FIG. 2 (b). The adhesive film 106 is located between the region where the electric pad 107 of the electric wiring board 102 is formed and the internal board 105 when viewed in the direction orthogonal to the plate surface (Z direction).

このような接着フィルム106および封止樹脂109を用いることで、記録液等の液体の電気接続部への浸入を防ぎ、電気接続部を効果的に絶縁保護することができる。この点について以下に詳細に説明する。
図1(a),1(b),2(a)に示すように、本実施形態では、平面的に見て、接着フィルム106の一部(図2(a)のD部分およびE部分)が電気配線基板102の端部より外側にはみ出している。この構成によると、図2(a)のA-A線断面図である図2(c)から明らかなように、液体が浸入できる空隙が存在しない。すなわち、電気配線基板102と内部基板105との間に液体が保持されるスペースがない。従って、電気配線基板102と内部基板105の接合部分(電気接続部分)に液体が回り込む可能性は低い。
By using such an adhesive film 106 and a sealing resin 109, it is possible to prevent liquids such as recording liquid from entering the electrical connection portion and effectively insulate and protect the electrical connection portion. This point will be described in detail below.
As shown in FIGS. 1 (a), 1 (b), and 2 (a), in the present embodiment, a part of the adhesive film 106 (the D portion and the E portion of FIG. 2 (a)) is viewed in a plan view. Projects out of the end of the electrical wiring board 102. According to this configuration, as is clear from FIG. 2 (c), which is a cross-sectional view taken along the line AA of FIG. 2 (a), there are no voids through which the liquid can enter. That is, there is no space between the electrical wiring board 102 and the internal board 105 to hold the liquid. Therefore, it is unlikely that the liquid will sneak into the joint portion (electrical connection portion) between the electrical wiring board 102 and the internal substrate 105.

ここで、図2(d)に示すように、接着フィルム106の端部が電気配線基板102の端部より外側にはみ出さず、電気配線基板102の端部の内側に位置している比較例について検討する。この比較例では、接着フィルム106の外側において電気配線基板102と内部基板105との間に空隙Bが生じる。一般的な封止樹脂では、粘度や流動性の関係で、狭い空隙B内にあまり浸入できなかったり、空隙Bを完全に埋めてしまうほどの十分な量の封止樹脂が空隙B内に浸入できなかったりする場合がある。そのような場合には、空隙Bは、封止樹脂109を塗布した後にも塞がれずに残る可能性がある。そうすると、例えば図2(b)のC部分に相当する位置(封止樹脂109の外縁部)で、液体が電気配線基板102の裏面を伝って空隙Bに導かれる。そして空隙Bに溜まった液体が、電気配線基板102と内部基板105の電気接続部に到達する可能性がある。具体的には、液体が、電気配線基板102の電気パッド107や、内部基板105の電気パッド112や、電気パッド107,112の間を延びるボンディングワイヤー108に接触し、電気的短絡や腐食を生じさせるおそれがある。これに対し、本実施形態では、図2(a),2(c)に示すように接着フィルム106の端部が電気配線基板102の端部より外側にはみ出しているため、電気配線基板102と内部基板105の間に空隙Bは存在せず、液体が浸入して溜まることはない。従って、液体が、封止樹脂109に覆われた電気配線基板102と内部基板105との電気接続部に到達して電気的短絡等の不具合を生じさせる可能性が低い。
このように、本実施形態では、接着フィルム106の端部が電気配線基板102の端部より外側にはみ出している。それにより、封止樹脂109の内部への液体の浸入による電気配線基板102と内部基板105の電気的短絡等の不具合を抑え、絶縁保護の信頼性の高い液体吐出ヘッドが得られる。
Here, as shown in FIG. 2D, a comparative example in which the end portion of the adhesive film 106 does not protrude outside the end portion of the electrical wiring board 102 and is located inside the end portion of the electrical wiring board 102. To consider. In this comparative example, a gap B is formed between the electric wiring board 102 and the internal board 105 on the outside of the adhesive film 106. With a general sealing resin, due to the viscosity and fluidity, a sufficient amount of sealing resin that cannot penetrate into the narrow void B or completely fills the void B penetrates into the void B. It may not be possible. In such a case, the void B may remain unclosed even after the sealing resin 109 is applied. Then, for example, at the position corresponding to the portion C in FIG. 2B (the outer edge portion of the sealing resin 109), the liquid is guided to the gap B along the back surface of the electric wiring board 102. Then, the liquid accumulated in the gap B may reach the electrical connection portion between the electrical wiring board 102 and the internal substrate 105. Specifically, the liquid comes into contact with the electric pad 107 of the electric wiring board 102, the electric pad 112 of the internal board 105, and the bonding wire 108 extending between the electric pads 107 and 112, causing an electric short circuit or corrosion. There is a risk of causing it. On the other hand, in the present embodiment, as shown in FIGS. 2 (a) and 2 (c), the end portion of the adhesive film 106 protrudes outside the end portion of the electric wiring board 102, so that the electric wiring board 102 There is no void B between the internal substrates 105, and the liquid does not infiltrate and accumulate. Therefore, it is unlikely that the liquid will reach the electrical connection portion between the electrical wiring board 102 covered with the sealing resin 109 and the internal substrate 105 to cause a problem such as an electrical short circuit.
As described above, in the present embodiment, the end portion of the adhesive film 106 protrudes outside the end portion of the electrical wiring board 102. As a result, defects such as an electrical short circuit between the electric wiring board 102 and the internal board 105 due to the infiltration of the liquid into the sealing resin 109 are suppressed, and a highly reliable liquid discharge head for insulation protection can be obtained.

本実施形態の液体吐出ヘッドの製造方法において、接着フィルム106を用いて電気配線基板102を内部基板105に接合する工程について、図3(a)~3(c)の斜視図を参照して説明する。まず、図3(a)に示すように、切断もしくは打ち抜き加工によって所定の寸法に形成された接着フィルム106を、内部基板105の所定の位置に載置する。接着フィルム106の上方(内部基板105と接していない面に対向する位置)に、樹脂からなるセパレーターフィルム113を用意しておく。次に、加熱ツール114をセパレーターフィルム113の上方から下降させて、セパレーターフィルム113および接着フィルム106を加熱するとともに、内部基板105に向けて加圧する。それにより、接着フィルム106が内部基板105に固着(熱圧着)する。この時、セパレーターフィルム113が、加熱ツール114と接着フィルム106との接着を防止する。 In the method for manufacturing a liquid discharge head of the present embodiment, a step of joining the electrical wiring board 102 to the internal board 105 using the adhesive film 106 will be described with reference to the perspective views of FIGS. 3 (a) to 3 (c). do. First, as shown in FIG. 3A, the adhesive film 106 formed to a predetermined size by cutting or punching is placed at a predetermined position on the inner substrate 105. A separator film 113 made of resin is prepared above the adhesive film 106 (position facing the surface not in contact with the internal substrate 105). Next, the heating tool 114 is lowered from above the separator film 113 to heat the separator film 113 and the adhesive film 106 and pressurize the inner substrate 105. As a result, the adhesive film 106 is fixed (thermocompression bonded) to the internal substrate 105. At this time, the separator film 113 prevents the heating tool 114 and the adhesive film 106 from adhering to each other.

図3(b)に示すように、セパレーターフィルム113を除去して、接着フィルム106の上に電気配線基板102を載置する。そして、加熱ツール114を電気配線基板102の上方から下降させて、電気配線基板102を加熱するとともに、接着フィルム106および内部基板105に向けて加圧する。それにより、電気配線基板102が接着フィルム106に熱圧着する。このようにして、接着フィルム106を介して電気配線基板102と内部基板105が接合される。前述したように、本実施形態では、接着フィルム106の端部106a~106cが、電気接続部であるワイヤーボンディング108の下部にある電気配線基板102の端部102a~102cより外側にはみ出している。それにより、電気配線基板102と内部基板105の接合に寄与する接着フィルム106の接着面積が大きいので、十分な接着力を得ることができる。
内部基板105の、接着フィルム106の外側の位置に電気パッド112が形成されている。そして、電気配線基板102の、内部基板105に対向する面と反対側の面に電気パッド107が形成されている。内部基板105と電気配線基板102が接合された後に、図3(c)に示すように、電気配線基板102の電気パッド107と内部基板105の電気パッド112をボンディングワイヤー108によって電気的に接続する。
As shown in FIG. 3B, the separator film 113 is removed, and the electrical wiring board 102 is placed on the adhesive film 106. Then, the heating tool 114 is lowered from above the electric wiring board 102 to heat the electric wiring board 102 and pressurize the adhesive film 106 and the internal board 105. As a result, the electrical wiring board 102 is thermocompression bonded to the adhesive film 106. In this way, the electrical wiring board 102 and the internal board 105 are joined via the adhesive film 106. As described above, in the present embodiment, the ends 106a to 106c of the adhesive film 106 protrude outward from the ends 102a to 102c of the electrical wiring board 102 below the wire bonding 108 which is the electrical connection portion. As a result, the adhesive area of the adhesive film 106 that contributes to the bonding between the electrical wiring substrate 102 and the internal substrate 105 is large, so that sufficient adhesive strength can be obtained.
An electric pad 112 is formed on the inner substrate 105 at a position outside the adhesive film 106. An electric pad 107 is formed on the surface of the electric wiring board 102 opposite to the surface facing the internal board 105. After the internal board 105 and the electric wiring board 102 are joined, as shown in FIG. 3C, the electric pad 107 of the electric wiring board 102 and the electric pad 112 of the internal board 105 are electrically connected by the bonding wire 108. ..

次に、電気接続部であるワイヤーボンディング108や電気パッド107を絶縁保護するために、図2(b)に示すように、硬化可能な液状の封止樹脂109を電気接続部の上方から塗布して電気接続部を被覆する。この時に、液状の封止樹脂109を、電気配線基板102の端部より外側にはみ出した接着フィルム106の全体を被覆するように塗布する。このように塗布することで、電気接続部を記録液等から効果的に絶縁保護できる。このようにして、電気接続部を含む電気配線基板102および内部基板105の上に塗布した封止樹脂109を硬化させる。
一方、詳述しないが、図1(a),1(b)に示すように、電気配線基板102の、内部基板105との接合部と反対側の端部を、図示しない接着剤を用いて支持部材103の上に固定する。また、多数の吐出口101aを有する素子基板101を、図示しない接着剤を用いて、支持部材103上の電気配線基板102の端部に近い位置に固定する。そして、図示しないがワイヤーボンディング等によって電気配線基板102と素子基板101とを電気的に接続する。さらに、この電気接続部を覆うように、硬化可能な液状の封止樹脂104を電気接続部の上方から塗布して硬化させる。
Next, in order to insulate and protect the wire bonding 108 and the electric pad 107, which are the electrical connection portions, a curable liquid sealing resin 109 is applied from above the electrical connection portion as shown in FIG. 2 (b). Cover the electrical connection. At this time, the liquid sealing resin 109 is applied so as to cover the entire adhesive film 106 protruding outward from the end portion of the electric wiring board 102. By applying in this way, the electrical connection portion can be effectively insulated and protected from the recording liquid or the like. In this way, the sealing resin 109 applied onto the electrical wiring board 102 including the electrical connection portion and the internal substrate 105 is cured.
On the other hand, although not described in detail, as shown in FIGS. 1 (a) and 1 (b), the end of the electrical wiring board 102 on the opposite side to the joint with the internal board 105 is provided with an adhesive (not shown). It is fixed on the support member 103. Further, the element substrate 101 having a large number of ejection ports 101a is fixed at a position close to the end portion of the electric wiring board 102 on the support member 103 by using an adhesive (not shown). Then, although not shown, the electric wiring board 102 and the element board 101 are electrically connected by wire bonding or the like. Further, a curable liquid sealing resin 104 is applied from above the electrical connection portion and cured so as to cover the electrical connection portion.

以上説明したように、電気配線基板102の端部を内部基板105に電気的に接続するとともに、その反対側の端部を素子基板101に電気的に接続する。このようにして、本実施形態の液体吐出ヘッドを形成することができる。なお、前述した電気配線基板102の端部を内部基板105に電気的に接続する工程と、その反対側の端部を素子基板101に電気的に接続する工程は、どちらの工程を先に行っても構わない。 As described above, the end portion of the electrical wiring board 102 is electrically connected to the internal substrate 105, and the end portion on the opposite side thereof is electrically connected to the element substrate 101. In this way, the liquid discharge head of the present embodiment can be formed. In addition, in the above-mentioned step of electrically connecting the end portion of the electric wiring board 102 to the internal substrate 105 and the step of electrically connecting the end portion on the opposite side to the element substrate 101, which step is performed first. It doesn't matter.

[第2の実施形態]
本発明の第2の実施形態では、電気配線基板102と内部基板105の接合に用いられる接着フィルム106が、液状の封止樹脂に溶解する材料からなる。具体的には、接着フィルム106として、日立化成株式会社製の熱接着フィルムであるDF470(商品名)を用いている。また、封止樹脂109として、パナソニック株式会社製のエポキシ樹脂組成からなる流動性液状封止樹脂であるCV5300(商品名)を用いる。ここで選択した接着フィルム106と封止樹脂109は双方の極性が近いため、液状の封止樹脂109を熱硬化させる加熱時に接着フィルム106が液状の封止樹脂109に溶解して、硬化した封止樹脂109の中に接着フィルム106が取り込まれる。このように接着フィルム106が溶解して液状の封止樹脂109の中に取り込まれた状態で硬化すると、図4に示すように、接着フィルム106と封止樹脂109の間の界面が無くなって一体化し、より信頼性の高い接着を行うことができる。本実施形態では、接着フィルム106と封止樹脂109を構成する材料を前述したように選択することを除いては、第1の実施形態と同様な構成および方法を採用する。
[Second Embodiment]
In the second embodiment of the present invention, the adhesive film 106 used for joining the electrical wiring substrate 102 and the internal substrate 105 is made of a material that dissolves in a liquid sealing resin. Specifically, DF470 (trade name), which is a heat-adhesive film manufactured by Hitachi Kasei Co., Ltd., is used as the adhesive film 106. Further, as the sealing resin 109, CV5300 (trade name), which is a fluid liquid sealing resin having an epoxy resin composition manufactured by Panasonic Corporation, is used. Since the adhesive film 106 and the sealing resin 109 selected here have similar polarities, the adhesive film 106 is dissolved in the liquid sealing resin 109 during heating when the liquid sealing resin 109 is thermally cured, and the cured sealing is performed. The adhesive film 106 is incorporated into the waterproof resin 109. When the adhesive film 106 is melted and cured in a state of being incorporated into the liquid sealing resin 109 in this way, as shown in FIG. 4, the interface between the adhesive film 106 and the sealing resin 109 disappears and is integrated. It is possible to perform more reliable adhesion. In the present embodiment, the same configuration and method as in the first embodiment are adopted except that the materials constituting the adhesive film 106 and the sealing resin 109 are selected as described above.

[第3の実施形態]
本発明の第3の実施形態は、接着フィルム106の加工寸法の誤差や貼付位置のずれを生じた場合でも電気接続部の絶縁保護が達成できるような構成を採用している。具体的には、本実施形態では、第1の実施形態と同様な封止樹脂109と、図5の平面図に示す低粘度の封止樹脂(別の封止樹脂)110とを併用している。封止樹脂110は内部基板105と封止樹脂109との間に配されている。図1(b)と同様に、図5において封止樹脂109は2点鎖線で輪郭のみが示されている。その技術的意義について以下に説明する。
図2(a)に示されている電気配線基板102の端部周辺の部分E等において、接着フィルム106の加工寸法の誤差や貼付位置のずれ等によって、電気配線基板102の端部より外側に接着フィルム106の端部がはみ出さないことが考えられる。接着フィルム106の端部が電気配線基板102の端部よりも外側にはみ出さない場合には、図2(d)に示す状態と同様に、液体が溜まり得る空隙Bが生じ、電気接続部の絶縁保護の信頼性が低くなる。そこで、本実施形態では、電気配線基板102の端部周辺の部分E(図2(a)参照)に、図5に示す低粘度の封止樹脂110を塗布して、図2(d)に示されているような空隙Bが生じたとしてもその空隙Bに低粘度の封止樹脂110を充填させる。この封止樹脂110は低粘度であるため毛細管力によって濡れ広がり易く、空隙B内に充填し易い。低粘度の封止樹脂110が空隙B内に充填されることによって、例えば図2(b)のC部分に相当する位置(封止樹脂109の外縁部)で液体が電気配線基板102の裏面を伝って封止樹脂109の内側に浸入することが抑えられる。すなわち、接着フィルム106の側方から電気接続部に通じる液体の経路を低粘度の封止樹脂110によって遮断して封止できる。なお、本実施形態における低粘度の封止樹脂110の粘度は0.1~100Pa・sであり、より好ましくは、1~80Pa・s程度である。一例としては、粘度10Pa・sのエポキシ樹脂系封止樹脂が用いられる。このようにして、図5に示す低粘度の封止樹脂110を電気配線基板102の端部周辺に塗布した後は、第1の実施形態と同様に、電気接続部を含む電気配線基板102と内部基板105の上に液状の封止樹脂109を塗布して硬化させる。本実施形態は、低粘度の封止樹脂110を用いること以外の構成および方法に関しては、第1の実施形態と同様である。
[Third Embodiment]
The third embodiment of the present invention employs a configuration in which the insulation protection of the electrical connection portion can be achieved even when an error in the processing dimensions of the adhesive film 106 or a deviation in the attachment position occurs. Specifically, in the present embodiment, the same sealing resin 109 as in the first embodiment and the low-viscosity sealing resin (another sealing resin) 110 shown in the plan view of FIG. 5 are used in combination. There is. The sealing resin 110 is arranged between the inner substrate 105 and the sealing resin 109. Similar to FIG. 1 (b), in FIG. 5, only the outline of the sealing resin 109 is shown by a two-dot chain line. Its technical significance will be described below.
In the portion E or the like around the end of the electric wiring board 102 shown in FIG. 2A, due to an error in the processing dimensions of the adhesive film 106, a deviation in the sticking position, or the like, the portion E or the like is outside the end of the electric wiring board 102. It is conceivable that the end portion of the adhesive film 106 does not protrude. When the end portion of the adhesive film 106 does not protrude outside the end portion of the electrical wiring board 102, a gap B in which liquid can be collected is formed as in the state shown in FIG. 2 (d), and the electrical connection portion is formed. The reliability of insulation protection is low. Therefore, in the present embodiment, the low-viscosity sealing resin 110 shown in FIG. 5 is applied to the portion E (see FIG. 2A) around the end of the electrical wiring board 102, and FIG. 2D is shown. Even if the void B as shown is generated, the void B is filled with the low-viscosity sealing resin 110. Since the sealing resin 110 has a low viscosity, it easily gets wet and spreads due to the capillary force, and easily fills the void B. By filling the void B with the low-viscosity sealing resin 110, for example, the liquid presses the back surface of the electric wiring substrate 102 at the position corresponding to the C portion in FIG. 2B (the outer edge of the sealing resin 109). It is suppressed from penetrating into the inside of the sealing resin 109. That is, the liquid path leading from the side of the adhesive film 106 to the electrical connection portion can be blocked by the low-viscosity sealing resin 110 for sealing. The viscosity of the low-viscosity sealing resin 110 in the present embodiment is 0.1 to 100 Pa · s, more preferably about 1 to 80 Pa · s. As an example, an epoxy resin-based encapsulating resin having a viscosity of 10 Pa · s is used. In this way, after the low-viscosity sealing resin 110 shown in FIG. 5 is applied around the end portion of the electrical wiring board 102, the electrical wiring board 102 including the electrical connection portion is used as in the first embodiment. A liquid sealing resin 109 is applied onto the inner substrate 105 and cured. This embodiment is the same as that of the first embodiment except that the sealing resin 110 having a low viscosity is used.

[第4の実施形態]
本実施形態の液体吐出ヘッドは、複数の素子基板(液体吐出チップ)101を有する構成である。例えば、図6(a)の斜視図に示すように、6つの素子基板101が、第1の実施形態の素子基板101と同様に接着剤によって支持部材103の上にそれぞれ接合されている。さらに、それぞれの支持部材103は接着剤によってヘッドの筐体の一部(ベースブロック)111に接合されている。また、一端部が各支持部材103上に支持されて各素子基板101と接続されている電気配線基板102のそれぞれの他端部が、1つの長尺の内部基板105に接合されている。この内部基板105への電気配線基板102の接合は、第1の実施形態と同様に接着フィルム106を用いて行なわれている。
[Fourth Embodiment]
The liquid discharge head of the present embodiment has a configuration having a plurality of element substrates (liquid discharge chips) 101. For example, as shown in the perspective view of FIG. 6A, the six element substrates 101 are bonded to the support member 103 by an adhesive in the same manner as the element substrate 101 of the first embodiment. Further, each support member 103 is joined to a part (base block) 111 of the housing of the head by an adhesive. Further, the other end of each of the electrical wiring boards 102 whose one end is supported on each support member 103 and connected to each element board 101 is joined to one long internal board 105. The bonding of the electric wiring board 102 to the internal board 105 is performed by using the adhesive film 106 as in the first embodiment.

図6(b)は、本実施形態における、電気配線基板102と内部基板105の接合部分の拡大平面図である。図6(b)に示すように、電気配線基板102は第1の実施形態と同様に接着フィルム106によって内部基板105に接合されている。ただし、電気配線基板102の延びる方向の接合部側端部の周辺の部分Fにおいて、接着フィルム106の端部が電気配線基板102の端部より外側にはみ出していない。これは、電気配線基板102を内部基板105上に圧着する際に、接着フィルム106が内部基板105の電気パッド112の上まで拡がることを防止するためである。この点について説明すると、第1の実施形態のように接着フィルム106の端部が電気配線基板102の端部より外側にはみ出していると、電気配線基板102の十分な接着力を得ることができる。しかし、接着フィルム106の材質や熱圧着時の条件によっては、熱圧着時に接着フィルム106が軟化して、電気配線基板102の表面に過剰に拡がって内部基板105の電気パッド112の一部を覆い、電気的接続の信頼性を損なう可能性がある。そこで、本実施形態では電気配線基板102の延びる方向において、接着フィルム106の接合部側端部106cの位置が電気配線基板102の端部102cの位置と一致するように、接着フィルム106を配置している。ただし、接着フィルム106は、ワイヤーボンディングを行う電気配線基板102の電気パッド107の下部には必ず存在するようにしている。電気パッド107の下部に接着フィルム106が存在しないと、電気パッド107の下方に隙間が生じてワイヤーボンディングを良好に実施できないおそれがあるからである。なお、電気配線基板102の延びる方向において、接着フィルム106の接合部側端部106cが電気配線基板102の端部102cよりも内側に位置するように、接着フィルム106を配置してもよい。
複数の電気配線基板102を1つの内部基板105に接合した後に、第1の実施形態と同様に、電気接続部を含む電気配線基板102および内部基板105と接着フィルム106の端部の上に、硬化可能な液状の封止樹脂109を塗布して硬化させる。こうして、6つの素子基板101を有する本実施形態の液体吐出ヘッドを作製する。
FIG. 6B is an enlarged plan view of a joint portion between the electrical wiring board 102 and the internal board 105 in the present embodiment. As shown in FIG. 6B, the electrical wiring board 102 is bonded to the internal board 105 by the adhesive film 106 as in the first embodiment. However, in the portion F around the joint portion side end portion in the extending direction of the electric wiring board 102, the end portion of the adhesive film 106 does not protrude outside the end portion of the electric wiring board 102. This is to prevent the adhesive film 106 from spreading over the electric pad 112 of the internal board 105 when the electric wiring board 102 is crimped onto the internal board 105. Explaining this point, if the end portion of the adhesive film 106 protrudes outside the end portion of the electric wiring board 102 as in the first embodiment, sufficient adhesive force of the electric wiring board 102 can be obtained. .. However, depending on the material of the adhesive film 106 and the conditions at the time of thermocompression bonding, the adhesive film 106 softens during thermocompression bonding and spreads excessively on the surface of the electric wiring board 102 to cover a part of the electric pad 112 of the internal board 105. , May compromise the reliability of the electrical connection. Therefore, in the present embodiment, the adhesive film 106 is arranged so that the position of the joint portion side end portion 106c of the adhesive film 106 coincides with the position of the end portion 102c of the electric wiring board 102 in the extending direction of the electric wiring board 102. ing. However, the adhesive film 106 is always present at the lower part of the electric pad 107 of the electric wiring board 102 for wire bonding. This is because if the adhesive film 106 is not present in the lower part of the electric pad 107, a gap may be formed in the lower part of the electric pad 107 and wire bonding may not be performed satisfactorily. The adhesive film 106 may be arranged so that the joint-side end 106c of the adhesive film 106 is located inside the end 102c of the electric wiring board 102 in the extending direction of the electric wiring board 102.
After joining the plurality of electrical wiring boards 102 to one internal substrate 105, as in the first embodiment, on the electrical wiring board 102 including the electrical connection portion and the end portion of the internal substrate 105 and the adhesive film 106, A curable liquid sealing resin 109 is applied and cured. In this way, the liquid discharge head of the present embodiment having the six element substrates 101 is manufactured.

なお、図6(c)に示す本実施形態の変形例では、封止樹脂109の塗布は、部分Gのように接着フィルム106の端部を露出させるように行っている。このように封止樹脂109を塗布することで、封止樹脂109の使用量を抑制することが可能である。接着フィルム106が十分に接着力を有していれば、このように接着フィルム106の一部が露出していても問題はない。 In the modified example of the present embodiment shown in FIG. 6C, the sealing resin 109 is applied so as to expose the end portion of the adhesive film 106 as in the portion G. By applying the sealing resin 109 in this way, it is possible to suppress the amount of the sealing resin 109 used. As long as the adhesive film 106 has sufficient adhesive strength, there is no problem even if a part of the adhesive film 106 is exposed in this way.

本実施形態のように、複数の液体吐出チップ101を有する液体記録ヘッドにおいて、1枚の内部基板105に複数の電気配線基板102を接合する際の電気的接続方法としては、ワイヤーボンディングが適している。もちろん、ILB(Inner Lead Bonding)やOLB(Outer Lead Bonding)やACF(異方導電性フィルム)による電気的接続も可能である。ただし、複数の電気配線基板102を1枚の内部基板105に接続すると、各電気配線基板102の電気パッド107と内部基板105の電気パッド112の位置関係のずれが大きくなるおそれがある。電気パッド107と電気パッド112の位置が大きくずれている場合には、ILBやOLBによって両電気パッドを電気接続することが不可能となってしまうことがある。それに対し、ワイヤーボンディングによる電気的接続の場合には、電気パッド107と電気パッド112の多少の位置のずれを許容できるため、特に複数の電気配線基板102を1枚の内部基板105に接合する構成において好適である。 In a liquid recording head having a plurality of liquid discharge chips 101 as in the present embodiment, wire bonding is suitable as an electrical connection method for joining a plurality of electrical wiring boards 102 to one internal substrate 105. There is. Of course, electrical connection by ILB (Inner Lead Bonding), OLB (Outer Lead Bonding), or ACF (anisotropic conductive film) is also possible. However, when a plurality of electric wiring boards 102 are connected to one internal board 105, there is a possibility that the positional relationship between the electric pads 107 of each electric wiring board 102 and the electric pads 112 of the internal board 105 becomes large. If the positions of the electric pad 107 and the electric pad 112 are significantly deviated from each other, it may be impossible to electrically connect both electric pads by ILB or OLB. On the other hand, in the case of electrical connection by wire bonding, since it is possible to allow a slight positional deviation between the electric pad 107 and the electric pad 112, a configuration in which a plurality of electric wiring boards 102 are bonded to one internal board 105 in particular. Is suitable for.

以上説明した通り、本発明によると、電気配線基板102と内部基板105との電気接続部に、吐出液等の液体が浸入する危険性を低下させ、電気的短絡等の不具合の発生を抑えることができる。この効果は、内部基板105の板面に直交する方向に見て、接着フィルム106の端部が、電気配線基板102の内部基板105との接合部分の端部よりも外側にはみ出して位置することによって実現する。ただし、接着フィルム106の端部の全てが、電気配線基板102の内部基板105との接合部分の端部よりも外側にはみ出している構成に限られない。接着フィルム106の端部のうちの一部が、電気配線基板102の内部基板105との接合部分の端部よりも外側にはみ出している構成であってもある程度の効果が得られる。
なお、前述した第1~4の実施形態のそれぞれの構成を任意に組み合わせることも可能である。
As described above, according to the present invention, the risk of liquid such as a discharge liquid infiltrating into the electrical connection portion between the electrical wiring board 102 and the internal substrate 105 is reduced, and the occurrence of defects such as an electrical short circuit is suppressed. Can be done. This effect is that the end portion of the adhesive film 106 protrudes outside the end portion of the joint portion of the electrical wiring board 102 with the internal substrate 105 when viewed in a direction orthogonal to the plate surface of the internal substrate 105. Realized by. However, the configuration is not limited to the configuration in which all the ends of the adhesive film 106 protrude outside the end of the joint portion of the electrical wiring board 102 with the internal substrate 105. A certain effect can be obtained even if a part of the end portion of the adhesive film 106 protrudes outside the end portion of the joint portion of the electrical wiring board 102 with the internal substrate 105.
It is also possible to arbitrarily combine the respective configurations of the above-mentioned first to fourth embodiments.

101 素子基板(液体吐出チップ)
102 電気配線基板
103 支持部材
104 封止樹脂
105 内部基板
106 接着フィルム(接着部材)
107 電気パッド(電気接続部)
108 ボンディングワイヤー(電気接続部)
109 封止樹脂
110 低粘度の封止樹脂
112 電気パッド(電気接続部)
101 Element substrate (liquid ejection chip)
102 Electrical wiring board 103 Support member 104 Encapsulating resin 105 Internal board 106 Adhesive film (adhesive member)
107 Electric pad (electrical connection)
108 Bonding wire (electrical connection)
109 Encapsulating resin 110 Low-viscosity encapsulating resin 112 Electric pad (electrical connection)

Claims (18)

第1の電気配線基板と、液体を吐出する吐出口を有し前記第1の電気配線基板の一端部と電気的に接続されている素子基板と、前記第1の電気配線基板の他端部と電気的に接続されている第2の電気配線基板と、を有し、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とは接着部材を介して接合されており、
前記接着部材は、前記第2の電気配線基板の板面に直交する方向に見て、前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部よりも外側にはみ出して位置する端部を含む平面形状を有し
前記第2の電気配線基板の、前記第1の電気配線基板との接合部分を備える面に電気パッドが形成され、前記第1の電気配線基板の、前記第2の電気配線基板に対向する面と反対側の面に電気パッドが形成されており、前記第2の電気配線基板の前記電気パッドと前記第1の電気配線基板の前記電気パッドとが電気的に接続されており、
前記第2の電気配線基板の板面に直交する方向に見て、前記第1の電気配線基板の前記電気パッドが形成された領域と前記第2の電気配線基板との間に前記接着部材が位置する、液体吐出ヘッド。
A first electric wiring board, an element board having a discharge port for discharging liquid and electrically connected to one end of the first electric wiring board, and the other end of the first electric wiring board. With a second electrical wiring board, which is electrically connected to
The other end of the first electric wiring board and the second electric wiring board are joined via an adhesive member.
The adhesive member protrudes outward from the end of the joint portion of the first electric wiring board with the second electric wiring board when viewed in a direction orthogonal to the plate surface of the second electric wiring board. Has a planar shape that includes the edges that are located
An electric pad is formed on the surface of the second electric wiring board having a joint portion with the first electric wiring board, and the surface of the first electric wiring board facing the second electric wiring board. An electric pad is formed on the surface opposite to the electric pad, and the electric pad of the second electric wiring board and the electric pad of the first electric wiring board are electrically connected to each other.
When viewed in a direction orthogonal to the plate surface of the second electric wiring board, the adhesive member is formed between the region of the first electric wiring board on which the electric pad is formed and the second electric wiring board. Located , liquid discharge head.
第1の電気配線基板と、液体を吐出する吐出口を有し前記第1の電気配線基板の一端部と電気的に接続されている素子基板と、前記第1の電気配線基板の他端部と電気的に接続されている第2の電気配線基板と、を有し、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とは接着部材を介して接合されており、
前記接着部材は、前記第2の電気配線基板の板面に直交する方向に見て、前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部よりも外側にはみ出して位置する端部を含む平面形状を有し、
前記第2の電気配線基板の、前記第1の電気配線基板との接合部分を備える面に電気パッドが形成され、前記第1の電気配線基板の、前記第2の電気配線基板に対向する面と反対側の面に電気パッドが形成されており、前記第2の電気配線基板の前記電気パッドと前記第1の電気配線基板の前記電気パッドとが電気的に接続されており、
前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部より外側に位置する前記接着部材の端部と、前記第2の電気配線基板の前記電気パッドと前記第1の電気配線基板の前記電気パッドとの電気接続部と、を覆う封止樹脂をさらに有する、液体吐出ヘッド。
A first electric wiring board, an element board having a discharge port for discharging liquid and electrically connected to one end of the first electric wiring board, and the other end of the first electric wiring board. With a second electrical wiring board, which is electrically connected to
The other end of the first electric wiring board and the second electric wiring board are joined via an adhesive member.
The adhesive member protrudes outward from the end of the joint portion of the first electric wiring board with the second electric wiring board when viewed in a direction orthogonal to the plate surface of the second electric wiring board. Has a planar shape that includes the edges that are located
An electric pad is formed on the surface of the second electric wiring board having a joint portion with the first electric wiring board, and the surface of the first electric wiring board facing the second electric wiring board. An electric pad is formed on the surface opposite to the electric pad, and the electric pad of the second electric wiring board and the electric pad of the first electric wiring board are electrically connected to each other.
The end of the adhesive member located outside the end of the joint portion of the first electric wiring board with the second electric wiring board, the electric pad of the second electric wiring board, and the first. A liquid discharge head further comprising a sealing resin covering the electrical connection portion of the electrical wiring board with the electrical pad.
前記第1の電気配線基板の、中央部から前記第2の電気配線基板との接合部に向かって延びる方向に直交する幅方向において、前記接着部材の両端部が、前記第1の電気配線基板の前記第2の電気配線基板との接合部分の両端部よりも外側にそれぞれはみ出して位置している、請求項1または2に記載の液体吐出ヘッド。 In the width direction orthogonal to the direction extending from the central portion of the first electrical wiring board toward the joint with the second electrical wiring board, both ends of the adhesive member are the first electrical wiring board. The liquid discharge head according to claim 1 or 2 , which is located so as to protrude outward from both ends of the joint portion with the second electric wiring board. 前記第1の電気配線基板の、中央部から前記第2の電気配線基板との接合部に向かって延びる方向において、前記接着部材の端部の位置が前記第1の電気配線基板の先端部の位置と一致するか、または前記第1の電気配線基板の前記先端部よりも内側にある、請求項1から3のいずれか1項に記載の液体吐出ヘッド。 The position of the end of the adhesive member is the tip of the first electrical wiring board in the direction extending from the central portion of the first electrical wiring board toward the joint with the second electrical wiring board. The liquid discharge head according to any one of claims 1 to 3, which coincides with the position or is inside the tip portion of the first electrical wiring board . 前記第2の電気配線基板の前記電気パッドと前記第1の電気配線基板の前記電気パッドとはワイヤーボンディングによって電気的に接続されている、請求項1からのいずれか1項に記載の液体吐出ヘッド。 The liquid according to any one of claims 1 to 4, wherein the electric pad of the second electric wiring board and the electric pad of the first electric wiring board are electrically connected by wire bonding. Discharge head. 前記第2の電気配線基板の板面に直交する方向に見て、前記第1の電気配線基板の前記電気パッドが形成された領域と前記第2の電気配線基板との間に前記接着部材が位置する、請求項に記載の液体吐出ヘッド。 When viewed in a direction orthogonal to the plate surface of the second electric wiring board, the adhesive member is formed between the region of the first electric wiring board on which the electric pad is formed and the second electric wiring board. The liquid discharge head according to claim 2 , which is located. 前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部のうち、外側に前記接着部材の一部がはみ出していない部分に、別の封止樹脂が設けられている、請求項2または6に記載の液体吐出ヘッド。 Another sealing resin is provided at a portion of the end portion of the joint portion of the first electric wiring board with the second electric wiring board, in which a part of the adhesive member does not protrude to the outside. , The liquid discharge head according to claim 2 or 6 . 前記別の封止樹脂は前記封止樹脂よりも粘度が低い、請求項に記載の液体吐出ヘッド。 The liquid discharge head according to claim 7 , wherein the other sealing resin has a lower viscosity than the sealing resin. 前記別の封止樹脂の粘度が0.1~100Pa・sである、請求項またはに記載の液体吐出ヘッド。 The liquid discharge head according to claim 7 or 8 , wherein the viscosity of the other sealing resin is 0.1 to 100 Pa · s. 前記接着部材は前記封止樹脂中に溶け込んで一体化する、請求項2、6からのいずれか1項に記載の液体吐出ヘッド。 The liquid discharge head according to any one of claims 2, 6 to 9 , wherein the adhesive member melts into the sealing resin and is integrated. 前記接着部材は加熱により粘着性を発現する接着フィルムである、請求項1から10のいずれか1項に記載の液体吐出ヘッド。 The liquid discharge head according to any one of claims 1 to 10 , wherein the adhesive member is an adhesive film that develops adhesiveness by heating. 前記第1の電気配線基板と前記素子基板との電気接続部を覆う封止樹脂をさらに有する、請求項1から11のいずれか1項に記載の液体吐出ヘッド。 The liquid discharge head according to any one of claims 1 to 11 , further comprising a sealing resin that covers an electric connection portion between the first electric wiring board and the element board. 第1の電気配線基板と、液体を吐出する吐出口を有し前記第1の電気配線基板の一端部と電気的に接続されている素子基板と、前記第1の電気配線基板の他端部と電気的に接続されている第2の電気配線基板と、を有する液体吐出ヘッドの製造方法であって、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接着部材を介して接合するステップと、
前記第2の電気配線基板の、前記第1の電気配線基板との接合部分を備える面に形成された電気パッドと、前記第1の電気配線基板の、前記第2の電気配線基板に対向する面と反対側の面に形成された電気パッドとを電気的に接続して、前記第1の電気配線基板と前記第2の電気配線基板とを電気的に接続するステップと、を含み、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接合するステップでは、前記第2の電気配線基板の板面に直交する方向に見て前記接着部材の一部が前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部よりも外側にはみ出して位置し、前記第2の電気配線基板の板面に直交する方向に見て前記第1の電気配線基板の前記電気パッドが形成された領域と前記第2の電気配線基板との間に前記接着部材が位置するように、前記第1の電気配線基板と前記第2の電気配線基板とを接合する、液体吐出ヘッドの製造方法。
A first electric wiring board, an element board having a discharge port for discharging liquid and electrically connected to one end of the first electric wiring board, and the other end of the first electric wiring board. A method of manufacturing a liquid discharge head having a second electrical wiring board electrically connected to and.
A step of joining the other end of the first electric wiring board and the second electric wiring board via an adhesive member,
The electric pad formed on the surface of the second electric wiring board having a joint portion with the first electric wiring board and the second electric wiring board of the first electric wiring board face each other. It comprises a step of electrically connecting an electric pad formed on a surface opposite to the surface and electrically connecting the first electric wiring board and the second electric wiring board.
In the step of joining the other end of the first electric wiring board and the second electric wiring board, a part of the adhesive member when viewed in a direction orthogonal to the plate surface of the second electric wiring board. Is located so as to protrude outside the end of the joint portion of the first electric wiring board with the second electric wiring board , and is viewed in a direction orthogonal to the plate surface of the second electric wiring board. The first electric wiring board and the second electric wiring so that the adhesive member is located between the region where the electric pad is formed and the second electric wiring board of the first electric wiring board. A method for manufacturing a liquid discharge head that joins a substrate.
第1の電気配線基板と、液体を吐出する吐出口を有し前記第1の電気配線基板の一端部と電気的に接続されている素子基板と、前記第1の電気配線基板の他端部と電気的に接続されている第2の電気配線基板と、を有する液体吐出ヘッドの製造方法であって、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接着部材を介して接合するステップと、
前記第2の電気配線基板の、前記第1の電気配線基板との接合部分を備える面に形成された電気パッドと、前記第1の電気配線基板の、前記第2の電気配線基板に対向する面と反対側の面に形成された電気パッドとを電気的に接続して、前記第1の電気配線基板と前記第2の電気配線基板とを電気的に接続するステップと、を含み、
前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接合するステップでは、前記第2の電気配線基板の板面に直交する方向に見て、前記接着部材の一部が前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部よりも外側にはみ出して位置するように、前記第1の電気配線基板と前記第2の電気配線基板とを接合し、
前記第1の電気配線基板の前記第2の電気配線基板との接合部分の端部より外側に位置する前記接着部材の端部と、前記第2の電気配線基板の前記電気パッドと前記第1の電気配線基板の前記電気パッドとの電気接続部とを覆うように、液状の封止樹脂を塗布し、その後に硬化させるステップをさらに含む、液体吐出ヘッドの製造方法。
A first electric wiring board, an element board having a discharge port for discharging liquid and electrically connected to one end of the first electric wiring board, and the other end of the first electric wiring board. A method of manufacturing a liquid discharge head having a second electrical wiring board electrically connected to and.
A step of joining the other end of the first electric wiring board and the second electric wiring board via an adhesive member,
The electric pad formed on the surface of the second electric wiring board having a joint portion with the first electric wiring board and the second electric wiring board of the first electric wiring board face each other. It comprises a step of electrically connecting an electric pad formed on a surface opposite to the surface and electrically connecting the first electric wiring board and the second electric wiring board.
In the step of joining the other end of the first electric wiring board and the second electric wiring board, one of the adhesive members is viewed in a direction orthogonal to the plate surface of the second electric wiring board. The first electric wiring board and the second electric wiring board so that the portion protrudes outside the end portion of the joint portion of the first electric wiring board with the second electric wiring board. Join with
The end of the adhesive member located outside the end of the joint portion of the first electric wiring board with the second electric wiring board , the electric pad of the second electric wiring board, and the first. A method for manufacturing a liquid discharge head, further comprising a step of applying a liquid sealing resin so as to cover an electric connection portion of the electric wiring board with the electric pad , and then curing the liquid.
前記第1の電気配線基板を前記素子基板に電気的に接続するステップをさらに含む請求項13または14に記載の液体吐出ヘッドの製造方法。 The method for manufacturing a liquid discharge head according to claim 13 , further comprising a step of electrically connecting the first electric wiring board to the element board. 前記第1の電気配線基板と前記素子基板との電気接続部を覆うように、液状の封止樹脂を塗布し、その後に硬化させるステップをさらに含む、請求項15に記載の液体吐出ヘッドの製造方法。 The production of the liquid discharge head according to claim 15 , further comprising a step of applying a liquid sealing resin so as to cover the electrical connection portion between the first electric wiring board and the element board, and then curing the liquid. Method. 前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接合するステップでは、前記第1の電気配線基板の、中央部から前記第2の電気配線基板との接合部に向かって延びる方向に直交する幅方向において、前記接着部材の両端部が、前記第1の電気配線基板の前記第2の電気配線基板との接合部分の両端部よりも外側にそれぞれはみ出して位置するように、前記第1の電気配線基板と前記第2の電気配線基板とを接合する、請求項13から16のいずれか1項に記載の液体吐出ヘッドの製造方法。In the step of joining the other end of the first electric wiring board and the second electric wiring board, the joining portion of the first electric wiring board from the central portion to the second electric wiring board. In the width direction orthogonal to the direction extending toward, both ends of the adhesive member protrude outward from both ends of the joint portion of the first electric wiring board with the second electric wiring board. The method for manufacturing a liquid discharge head according to any one of claims 13 to 16, wherein the first electric wiring board and the second electric wiring board are joined to each other. 前記第1の電気配線基板の前記他端部と前記第2の電気配線基板とを接合するステップでは、前記第1の電気配線基板の、中央部から前記第2の電気配線基板との接合部に向かって延びる方向において、前記接着部材の端部の位置が前記第1の電気配線基板の先端部の位置と一致するか、または前記第1の電気配線基板の前記先端部よりも内側にあるように、前記第1の電気配線基板と前記第2の電気配線基板とを接合する、請求項13から17のいずれか1項に記載の液体吐出ヘッドの製造方法。In the step of joining the other end of the first electric wiring board and the second electric wiring board, the joining portion of the first electric wiring board from the central portion to the second electric wiring board. The position of the end portion of the adhesive member coincides with the position of the tip portion of the first electric wiring board in the direction extending toward, or is inside the tip portion of the first electric wiring board. The method for manufacturing a liquid discharge head according to any one of claims 13 to 17, wherein the first electric wiring board and the second electric wiring board are joined as described above.
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