JP6999390B2 - Cleaning equipment and cleaning method - Google Patents

Description

The present invention relates to a cleaning device and a cleaning method. More specifically, the present invention relates to a cleaning device for cleaning spheres and a method for cleaning spheres.

Conventionally, as a method for cleaning a sphere, for example, a method of cleaning the sphere by applying a shock wave to the sphere arranged in the cavitation (first method), a method of arranging the sphere in a disk-shaped cage, and a brush. A method of cleaning the sphere by rubbing the sphere with (second method), a method of cleaning the sphere by rolling the sphere on a sponge (third method), and a method of manually cleaning the sphere using a hand fir tree or a sponge. (Fourth method) is known.

Examples of other sphere cleaning devices and cleaning methods include JP-A-7-100229 (Patent Document 1), JP-A-2003-144889 (Patent Document 2), and JP-A-2006-159888 (Patent Document 3). ) And Japanese Patent Application Laid-Open No. 2012-029850 (Patent Document 4) are conventionally known.

Japanese Unexamined Patent Publication No. 7-100229 Japanese Patent Application Laid-Open No. 2003-144889 Japanese Unexamined Patent Publication No. 2006-159088 Japanese Unexamined Patent Publication No. 2012-029850

However, in the above-mentioned first to fourth methods, the cleanliness of the sphere after washing may be insufficient. According to the cleaning apparatus and cleaning method described in Patent Documents 1 to 4, there is a possibility that the sphere to be cleaned may be damaged during cleaning.

The present invention has been made in view of the above-mentioned problems of the prior art. More specifically, the present invention provides a cleaning device and a cleaning method capable of improving the cleanliness of the sphere to be cleaned after cleaning.

The cleaning device according to one aspect of the present invention is a cleaning device for cleaning a sphere. The cleaning device according to one aspect of the present invention includes a first member having a first surface and a second member having a second surface and arranged so that the second surface faces the first surface. The first member is configured to be rotatable relative to the second member with the first surface and the second surface facing each other. The first surface is provided with a groove having a first end and a second end that is the opposite end of the first end. The sphere is sandwiched between the groove and the second surface. The groove has a spiral shape in a plan view. The groove has a first side wall that is continuous with the first surface and a second side wall that is continuous with the first surface and is arranged so as to face the first side wall. The distance between the first side wall and the second side wall becomes narrower as the distance from the first side wall increases. The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes depending on the distance from the first end on the groove.

According to the cleaning device according to one aspect of the present invention, it is possible to improve the cleanliness of the sphere to be cleaned after cleaning.

In the above cleaning device, the position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove is left and right depending on the distance from the first end on the groove. It may be changing.

In this case, the cleanliness of the sphere to be cleaned after cleaning can be further improved.

In the above cleaning device, the position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes up and down depending on the distance from the first end on the groove. You may be doing it.

In this case, the cleanliness of the sphere to be cleaned after cleaning can be further improved.

In the above cleaning device, the first member may be arranged below the second member. In this case, it is possible to prevent the sphere from being damaged during cleaning.

The cleaning method according to one aspect of the present invention is a cleaning method for cleaning spheres. The cleaning method according to one aspect of the present invention includes a step of preparing a sphere and a step of preparing a cleaning device for cleaning the sphere. The cleaning device includes a first member having a first surface and a second member having a second surface. The second member is arranged so that the second surface faces the first surface. The first surface is provided with a groove having a spiral shape in a plan view. The groove has a first side wall that is continuous with the first surface and a second side wall that is continuous with the first surface and is arranged so as to face the first side wall. The distance between the first side wall and the second side wall becomes narrower as the distance from the first side wall increases. The cleaning method according to one aspect of the present invention includes a step of supplying the sphere to the cleaning device so as to be sandwiched between the groove and the second surface, and a state in which the first surface faces the second surface. A step of cleaning the sphere is further provided by rotating the first member relative to the second member.

According to the cleaning method according to one aspect of the present invention, it is possible to improve the cleanliness of the sphere to be cleaned after cleaning.

In the above cleaning method, the groove may have a first end and a second end which is an end opposite to the first end. In the above cleaning method, the position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes left and right depending on the distance from the first end on the groove. You may be doing it.

In this case, the cleanliness of the sphere to be cleaned after cleaning can be further improved.

In the above cleaning method, the groove may have a first end and a second end which is an end opposite to the first end. In the above cleaning method, the position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes up and down depending on the distance from the first end on the groove. You may be doing it.

In this case, the cleanliness of the sphere to be cleaned after cleaning can be further improved.

In the above cleaning method, the first member may be arranged below the second member. In this case, it is possible to prevent the sphere from being damaged during cleaning.

According to the cleaning device and the cleaning method according to one aspect of the present invention, it is possible to improve the cleanliness of the sphere to be cleaned after cleaning.

It is a perspective view of the cleaning apparatus which concerns on 1st Embodiment. It is a top view of the cleaning apparatus which concerns on 1st Embodiment. It is sectional drawing in the section III-III of FIG. It is sectional drawing in the IV-IV cross section of FIG. It is a process drawing which shows the cleaning method which concerns on 1st Embodiment. It is a schematic diagram which shows the rotation state of the sphere 5 when the sphere 5 is located in the vicinity of the first end 11a of the groove 11. It is a schematic diagram which shows the rotation state of the sphere 5 when the sphere 5 is located between the 1st end 11a and the 2nd end 11b of the groove 11. It is a schematic diagram which shows the rotation state of the sphere 5 when the sphere 5 is located near the 2nd end 11b of the groove 11. It is a top view of the cleaning apparatus which concerns on 2nd Embodiment. It is sectional drawing in the XX cross section of FIG. 9 is a cross-sectional view taken along the line XI-XI of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts shall be given the same reference number, and the description thereof shall not be repeated.

In the following, the lower direction means the direction along the direction of gravity, and the upper side means the opposite direction to the lower side. In the following, left and right means a direction orthogonal to the direction of gravity.

(First Embodiment)
The configuration of the cleaning device according to the first embodiment will be described below. FIG. 1 is a perspective view of the cleaning device according to the first embodiment. FIG. 2 is a top view of the cleaning device according to the first embodiment. FIG. 3 is a cross-sectional view taken along the line III-III of FIG. FIG. 4 is a cross-sectional view taken along the IV-IV cross section of FIG. In addition, in FIG. 2, in order to clarify the planar shape of the first member 1, the illustration of the second member 2 is omitted.

The cleaning device according to the first embodiment has a first member 1 and a second member 2. The first member 1 has a first surface 1a. The second member 2 has a second surface 2a. The first member 1 is preferably arranged below the second member 2. The second member 2 is arranged so that the second surface 2a faces the first surface 1a.

The first member 1 has a circular shape in a plan view (viewed from a direction orthogonal to the first surface 1a). The second member 2 has a circular shape in a plan view (viewed from a direction orthogonal to the second surface 2a). The diameter of the first member 1 in the plan view may be the same as or different from the diameter of the second member 2 in the plan view. The center of the first member 1 in the plan view may be the same as or different from the center in the plan view of the second member 2.

The first member 1 is configured to be rotatable relative to the second member 2 in a state where the first surface 1a and the second surface 2a face each other. More specifically, the rotating shaft 3 is attached to the first member 1. The rotating shaft 3 is attached to a surface of the first member 1 opposite to the first surface 1a. The rotation axis 3 is attached so that the central axis is orthogonal to the first surface 1a. A rotating shaft 4 is attached to the second member 2. The rotation shaft 4 is attached to a surface of the second member 2 opposite to the second surface 2a so that the central axis is orthogonal to the second surface 2a.

By rotating the rotating shaft 3 around the central axis and rotating the rotating shaft 4 around the central axis in the direction opposite to the rotating shaft 3, the first member 1 faces the first surface 1a and the second surface 2a. In this state, it can rotate relative to the second member 2. By rotating either one of the rotating shaft 3 and the rotating shaft 4 around the central axis and fixing the other of the rotating shaft 3 and the rotating shaft 4, the first surface 1a and the second surface 2a face each other. In this state, the first member 1 can rotate relative to the second member 2.

A groove 11 is provided on the first surface 1a of the first member 1. The groove 11 has a first end 11a and a second end 11b. The second end 11b is the opposite end of the first end 11a of the groove 11. The first end 11a is preferably located near the center of the first surface 1a. The second end 11b reaches the outer circumference of the first surface 1a.

The groove 11 is provided in a spiral shape in a plan view (viewed from a direction orthogonal to the first surface 1a). The spiral shape means a shape in which the distance between the groove 11 and the center of the first member 1 in a plan view increases as the distance from the first end 11a on the groove 11 increases. The spiral shape is, for example, an algebraic spiral (Archimedes spiral) or a logarithmic spiral (Bernouy spiral). The spiral shape does not have to be mathematically regularly formed. The spiral shape does not have to be composed of curves.

The direction of rotation of the spiral shape of the groove 11 may be clockwise or counterclockwise in a plan view (viewed from a direction orthogonal to the first surface 1a).

The groove 11 has a first side wall 11c and a second side wall 11d. The groove 11 may further have a bottom wall 11e. The first side wall 11c and the second side wall 11d are connected to the first surface 1a. The bottom wall 11e is connected to the first side wall 11c and the second side wall 11d.

The first side wall 11c and the second side wall 11d face each other at a distance from each other in a cross-sectional view perpendicular to the extending direction of the groove 11. The shape of the groove 11 in the cross-sectional view perpendicular to the extending direction of the groove 11 is V-shaped. That is, in the cross-sectional view perpendicular to the extending direction of the groove 11, the distance between the first side wall 11c and the second side wall 11d becomes narrower as the distance from the first surface 1a increases.

In a cross-sectional view perpendicular to the extending direction of the groove 11, the extension line of the first side wall 11c and the extension line of the second side wall 11d intersect at the position C. The position C changes according to the distance from the first end 11a on the groove 11. From another point of view, the cross-sectional shape of the groove 11 in the cross section perpendicular to the extending direction changes according to the distance from the first end 11a on the groove 11. Specifically, the position C changes in the left-right direction according to the distance from the first end 11a on the groove 11. From another point of view, the angle φ formed by the intermediate line ML of the first side wall 11c and the second side wall 11d and the first surface 1a changes according to the distance from the first end 11a on the groove 11. is doing. The angle φ at the first end 11a is φ1, and the angle φ at the second end 11b is φ2. The first side wall 11c and the second side wall 11d form an angle θ.

When the groove 11 does not have the bottom wall 11e, the first side wall 11c and the second side wall 11d are connected to each other at the end opposite to the side connected to the first surface 1a.

The second member 2 is provided with a hole 2b. The hole 2b is provided from the second surface 2a toward the surface opposite to the second surface 2a. The hole 2b penetrates the second member 2. The hole 2b is provided at a position facing the first end 11a of the groove 11. From the hole 2b, the sphere 5 to be cleaned is supplied between the first surface 1a and the second surface 2a. More specifically, the sphere 5 to be cleaned is supplied between the groove 11 and the second surface 2a. After cleaning, the sphere 5 to be cleaned is discharged to the outside from the second end 11b of the groove 11. The sphere 5 is, for example, a metal sphere such as a steel sphere used for a bearing or a ceramic sphere such as a silicon nitride sphere.

For the first member 1, for example, a metal material, a resin material, or the like is used. The resin material used for the first member 1 is, for example, polyvinyl chloride (PVC). The second member 2 has, for example, a first layer 21 and a second layer 22. The first layer 21 constitutes the second surface 2a. The second layer 22 is arranged on a surface opposite to the side constituting the second surface 2a of the first layer 21. A cloth such as a non-woven fabric is used for the first layer 21. The first layer 21 is impregnated with a cleaning liquid for cleaning the sphere 5. White kerosene or the like is used as the cleaning liquid. A porous elastic member such as a sponge is used for the second layer 22.

The cleaning method according to the first embodiment will be described below. FIG. 5 is a process diagram showing a cleaning method according to the first embodiment. As shown in FIG. 5, the cleaning method according to the first embodiment includes a first step S1, a second step S2, a third step S3, and a fourth step S4.

In the first step S1, the sphere 5 is prepared. The sphere 5 prepared in the first step S1 is in a state after finishing the polishing process. This polishing process is performed using, for example, abrasive grains and a water-based or oil-based coolant. Therefore, abrasive grains or a coolant may adhere to the surface of the sphere 5 in the first step S1.

In the second step S2, the cleaning device is prepared. The second step S2 is performed in parallel with the first step S1. This cleaning device is the cleaning device according to the first embodiment described above.

After the first step S1 and the second step S2 are performed, the third step S3 is performed. In the third step S3, the sphere 5 prepared in the first step S1 is supplied into the cleaning device prepared in the second step S2. More specifically, the sphere 5 prepared in the first step S1 is supplied to the hole 2b. As a result, the sphere 5 prepared in the first step S1 is in a state of being sandwiched between the groove 11 and the second surface 2a.

When a plurality of spheres 5 are continuously washed, each sphere 5 is supplied into the washing device at a predetermined interval in order to avoid collision between the spheres 5 and each other. This predetermined interval is, for example, 0.5 seconds.

After the third step S3 is performed, the fourth step S4 is performed. In the fourth step S4, the sphere 5 is washed. More specifically, in the fourth step S4, the first member 1 has the first surface 1a and the second surface 2a facing each other, and the sphere 5 is sandwiched between the groove 11 and the second surface 2a. In this state, it is rotated relative to the second member 2. As a result, the sphere 5 is transferred in the groove 11 from the first end 11a side to the second end 11b side. At this time, the sphere 5 causes differential slip between the sphere 5 and the second surface 2a, the first side wall 11c, and the second side wall 11d. The surface of the sphere 5 is washed by rubbing the surface of the sphere 5 against the second surface 2a, the first side wall 11c, and the second side wall 11d by this differential sliding.

FIG. 6 is a schematic view showing the rotation state of the sphere 5 when the sphere 5 is located in the vicinity of the first end 11a of the groove 11. FIG. 7 is a schematic view showing the rotation state of the sphere 5 when the sphere 5 is located between the first end 11a and the second end 11b of the groove 11. FIG. 8 is a schematic diagram showing the rotation state of the sphere 5 when the sphere 5 is located near the second end 11b of the groove 11. As shown in FIG. 6, when the sphere 5 is located in the vicinity of the first end 11a of the groove 11 of the groove 11, the rotation axis P of the sphere 5 is substantially orthogonal to the second surface 2a.

The sphere 5 receives frictional force from the first side wall 11c and the second side wall 11d when being transferred from the first end 11a side to the second end 11b side in the groove 11. As shown in FIGS. 7 and 8, the rotation axis P of the sphere 5 is transferred from the 11a side to the second end 11b side in the groove 11 due to this frictional force, and thus has a second surface. It tilts so that it is almost horizontal to 2a.

As described above, since the second end 11b of the groove 11 reaches the outer peripheral surface of the first member 1, after the fourth step S4 is completed, the sphere 5 is cleaned from the second end 11b of the groove 11. It is discharged to the outside of.

The effects of the cleaning device and the cleaning method according to the first embodiment will be described below. In the cleaning device according to the first embodiment, the grooves 11 are provided in a spiral shape. Further, as described above, the rotation axis P of the sphere 5 transferred in the groove 11 changes due to the frictional force received from the first side wall 11c and the second side wall 11d. The direction in which this frictional force acts on the sphere 5 is determined by the inclination of the first side wall 11c and the second side wall 11d. As described above, since the position C changes in the left-right direction according to the distance from the first end 11a on the groove 11, the inclination of the first side wall 11c and the second side wall 11d and the sphere 5 are the first side wall 11c and the second side wall. The frictional force received from the side wall 11d changes according to the distance from the first end 11a.

As a result, the inclination of the rotation axis P of the sphere 5 changes as it is transferred from the first end 11a side to the second end 11b side in the groove 11. Therefore, the surface of the sphere 5 is evenly rubbed against the second surface 2a, the first side wall 11c, and the second side wall 11d.

In the cleaning device according to the first embodiment, since the cross-sectional shape of the groove 11 is V-shaped, the surface of the sphere 5 has three points of the second surface 2a, the first side wall 11c, and the second side wall 11d. Contact. For example, when the cross-sectional shape of the groove 11 is rectangular, the surface of the sphere 5 contacts only two points, the bottom wall of the groove 11 and the second surface 2a. Therefore, according to the cleaning device and the cleaning method according to the first embodiment, the surface of the sphere 5 to be cleaned can be cleaned more uniformly and efficiently.

Table 1 shows the results of the cleaning test in the cleaning apparatus according to the first embodiment. The conditions of the cleaning test are as shown in Table 2.

In Table 1, "OK" means that no foreign matter of 50 μm or more is detected from the surface of the sphere 5 as a result of measurement using a laser inspection machine, and “NG” means measurement using a laser inspection machine. As a result, it means that one or more foreign substances having a size of 50 μm or more are detected from the surface of the sphere 5.

As shown in Table 1, in the comparative example, there are spheres 5 that are “NG” even after being washed twice, and it is necessary to wash three times in order for all the spheres 5 to be “OK”. did. On the other hand, in Example 1, all the spheres 5 were already "OK" at the stage where the washing was performed once. From such test results, it has been clarified experimentally that the surface of the sphere 5 to be cleaned can be cleaned more uniformly and efficiently according to the cleaning device and the cleaning device according to the first embodiment. ..

Further, according to the cleaning device according to the first embodiment, it is experimentally clear that the cleaning device can be miniaturized because the sphere 5 can be sufficiently cleaned even if the distance for transferring the sphere 5 is short. Was made.

As described above, abrasive grains may remain on the surface of the sphere 5 at the stage where the first step S1 is completed. The abrasive grains can damage the surface of the sphere 5 by being bitten between the surface of the sphere 5 and the second surface 2a, the first side wall 11c and the second side wall 11d after once separating from the surface of the sphere 5. There is sex.

In the cleaning device according to the first embodiment, when the first member 1 is arranged below the second member 2, the abrasive grains separated from the surface of the sphere 5 are below the sphere 5 due to the influence of gravity. It tends to collect at the bottom of the located groove 11. Therefore, the possibility that the abrasive grains once separated from the surface of the sphere 5 are bitten between the surface of the sphere 5 and the second surface 2a, the first side wall 11c, and the second side wall 11d is reduced. Therefore, in this case, it is possible to prevent the surface of the sphere 5 to be cleaned from being scratched.

(Second Embodiment)
The second embodiment will be described below. In the following, the points different from those of the first embodiment will be mainly described, and duplicate explanations will not be repeated.

The cleaning device according to the second embodiment has a first member 1 having a first surface 1a and a second member having a second surface 2a and arranged so that the second surface 2a faces the first surface 1a. Has 2 and. The first member 1 is configured to rotate relative to the second member 2 with the first surface 1a and the second surface 2a facing each other.

FIG. 9 is a top view of the cleaning device according to the second embodiment. FIG. 10 is a cross-sectional view taken along the line XX of FIG. FIG. 11 is a cross-sectional view taken along the line XI-XI of FIG. In FIG. 9, in order to clarify the planar shape of the second member 2, the illustration of the first member 1 is omitted. As shown in FIG. 9, the first surface 1a is provided with a spiral groove 11 in a plan view. As shown in FIGS. 10 and 11, the groove 11 has a first side wall 11c and a second side wall 11d. The position C changes according to the distance from the first end 11a on the groove 11. The configuration of the cleaning device according to the second embodiment is common to the configuration of the cleaning device according to the first embodiment in these points.

In the cleaning device according to the second embodiment, the position C also changes in the vertical direction according to the distance from the first end 11a on the groove 11. That is, the angle θ formed by the first side wall 11c and the second side wall 11d also changes according to the distance from the first end 11a on the groove 11. In this respect, the configuration of the cleaning device according to the second embodiment is different from the configuration of the cleaning device according to the first embodiment.

The cleaning method according to the second embodiment includes a first step S1, a second step S2, a third step S3, and a fourth step S4. The cleaning method according to the second embodiment is common to the cleaning device according to the first embodiment, except that the cleaning device prepared in the second step S2 is the cleaning device according to the second embodiment. There is.

In the cleaning device according to the second embodiment, the position C changes not only in the left-right direction but also in the up-down direction according to the distance from the first end 11a on the groove 11. Therefore, in the cleaning device and the cleaning method according to the second embodiment, the inclinations of the first side wall 11c and the second side wall 11d can be changed more greatly. As a result, in the cleaning device and the cleaning method according to the second embodiment, it is possible to further promote the change of the rotation axis P accompanying the transfer of the sphere 5 from the first end 11a side to the second end 11b side.

Therefore, according to the cleaning device and the cleaning method according to the second embodiment, the surface of the sphere 5 to be cleaned can be cleaned more uniformly and efficiently.

Although the embodiment of the present invention has been described above, it is possible to modify the above-described embodiment in various ways. Moreover, the scope of the present invention is not limited to the above-described embodiment. The scope of the present invention is indicated by the scope of claims and is intended to include all modifications within the meaning and scope equivalent to the scope of claims.

Each of the above embodiments is particularly advantageously applied to a sphere cleaning device and cleaning method.

1 1st member, 1a 1st surface, 11 groove, 11a 1st end, 11b 2nd end, 11c 1st side wall, 11d 2nd side wall, 11e bottom wall, 2 2nd member, 2a 2nd surface, 2b hole, 21 1st layer, 22 2nd layer, 3,4 rotation axis, 5 sphere, C1 position, ML intermediate line, P rotation axis, S1 1st process, S2 2nd process, S3 3rd process, S4 4th process, θ, φ, φ1, φ2 angles.

Claims (8)

A cleaning device for cleaning spheres,
The first member having the first surface and
It has a second surface, and includes a second member arranged so that the second surface faces the first surface.
The first member is configured to be rotatable relative to the second member in a state where the first surface and the second surface face each other.
The first surface is provided with a groove having a first end and a second end which is an end opposite to the first end.
The sphere is sandwiched between the groove and the second surface.
The groove has a spiral shape in a plan view and has a spiral shape.
The groove has a first side wall connected to the first surface and a second side wall connected to the first surface and arranged to face the first side wall.
The distance between the first side wall and the second side wall becomes narrower as the distance from the first side wall increases.
The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes according to the distance from the first end on the groove.
A cleaning device in which the angle formed by the first side wall and the second side wall in a cross section orthogonal to the extending direction of the groove changes depending on the distance from the first end on the groove . The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes left and right depending on the distance from the first end on the groove. , The cleaning apparatus according to claim 1. The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes up and down depending on the distance from the first end on the groove. , The cleaning apparatus according to claim 1. The cleaning device according to any one of claims 1 to 3, wherein the first member is arranged below the second member. It is a cleaning method for cleaning spheres.
The process of preparing the sphere and
A step of preparing a cleaning device for cleaning the sphere is provided.
The cleaning device is
The first member having the first surface and
It has a second surface, and includes a second member arranged so that the second surface faces the first surface.
A groove having a spiral shape in a plan view is provided on the first surface.
The groove has a first side wall connected to the first surface and a second side wall connected to the first surface and arranged to face the first side wall.
The distance between the first side wall and the second side wall becomes narrower as the distance from the first side wall increases.
The cleaning method includes a step of supplying the sphere to the cleaning device so as to be sandwiched between the groove and the second surface.
A step of cleaning the sphere by rotating the first member relative to the second member while the first surface faces the second surface is provided.
A cleaning method in which the angle formed by the first side wall and the second side wall in a cross section orthogonal to the extending direction of the groove changes depending on the distance from the first end on the groove . The groove has a first end and a second end that is the end opposite to the first end.
The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes left and right depending on the distance from the first end on the groove. , The cleaning method according to claim 5. The groove has a first end and a second end that is the end opposite to the first end.
The position where the extension line of the first side wall and the extension line of the second side wall intersect in the cross section orthogonal to the extending direction of the groove changes up and down depending on the distance from the first end on the groove. , The cleaning method according to claim 5. The cleaning method according to any one of claims 5 to 7, wherein the first member is arranged below the second member.

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