JP6994670B2 - Actuator, mounting head unit and mounting device - Google Patents

Description

The present invention generally relates to an actuator, a mounting head unit and a mounting device, and more particularly to an actuator including a rotary motor and a linear motor, a mounting head unit including the actuator, and a mounting device including the mounting head unit.

Conventionally, an electronic component mounting device including a board positioning unit and a transfer head for transferring and mounting an electronic component provided in the parts feeder to a substrate positioned on the positioning unit is known (for example, Patent Document 1). reference).

The transfer head has a nozzle. A Z-axis motor is mounted on the upper surface of the bracket. The nut, nozzle shaft and nozzle move up and down along the feed screw driven by the Z-axis motor.

A belt is tuned to the output shaft of the θ motor and the pulley mounted on the nozzle shaft. When the θ motor is driven, the nozzle rotates about its axis, thereby correcting the angle of rotation of the electronic component vacuum-sucked to the lower end of the nozzle.

Japanese Unexamined Patent Publication No. 9-246793

In the above-mentioned conventional example, the feed screw driven by the Z-axis motor, the nozzle shaft and the nozzle, and the output shaft of the θ motor are not on the same straight line with each other. If the feed screw driven by the Z-axis motor and the nozzle shaft and nozzle are to be connected on the same straight line, they will be connected by a joint, but there is a problem that the weight of the joint increases. rice field.

The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide an actuator, a mounting head unit, and a mounting device capable of reducing the weight.

In order to solve the above problems, the actuator of one embodiment according to the present invention includes a rotary motor having a rotary mover, a spline member, a linear motor, and an output unit. The spline member reciprocates on the axis with a first member that receives a rotational force from the rotary mover and rotates around one axis, and receives a rotational force from the first member to rotate around the axis. It has a second member that rotates. The linear motor includes a linear mover that receives a rotational force from the second member and rotates around the axis, and a linear stator that gives the linear mover a driving force along the axis direction. Has. The output unit is driven by the rotary motor and the linear motor provided at one end of the linear mover. The linear mover has a permanent magnet, and the linear stator has a coil that causes a magnetic force to act on the permanent magnet. The linear type stator penetrates the linear type stator in the axial direction, and rotates around the axis relative to the linear type stator. The linear type mover and the second member are arranged side by side in the axial direction, and the linear type mover is fixed to the second member and does not move relative to the second member. The two members have a second key groove into which a key fitted in the first key groove formed in the first member is inserted, and the position of the permanent magnet in the axial direction is the position of the second key groove. Overlaps part or all .

In order to solve the above problems, the mounting head unit according to the present invention captures the actuator and the first object mounted on the second object by being fixed to the output unit of the actuator. It is provided with a catching unit.

In order to solve the above problems, the mounting device according to the present invention includes the mounting head unit and a holding device for holding the second object.

One form of the actuator, the mounting head unit, and the mounting device according to the present invention can be reduced in weight.

FIG. 1 is a perspective view showing the appearance of a mounting device (mounting device) according to the first embodiment. FIG. 2A is a perspective view showing a state in which the cover module of the mounting device of the same is removed. FIG. 2B is a schematic enlarged view of region A1 of FIG. 2A. FIG. 3 is a perspective view of the work module as seen from diagonally above. FIG. 4 is a perspective view of the work module as seen from diagonally below. FIG. 5A is a cross-sectional view of a main part when the same work module is cut at a plane orthogonal to the Y-axis direction and passing through an X-axis linear motor stator. FIG. 5B is an enlarged view of a portion centered on the X-axis linear motor in FIG. 5A. FIG. 6A is a cross-sectional view of a main part when the same work module is cut at a plane orthogonal to the X-axis direction and passing through a Y-axis linear motor stator. FIG. 6B is an enlarged view of a portion centered on the Y-axis linear motor in FIG. 6A. FIG. 7 is a perspective view seen from diagonally above the Y-axis moving unit of the same work module. FIG. 8 is a perspective view of the Y-axis moving unit as seen from diagonally below. FIG. 9 is a perspective view seen from diagonally above the X-axis moving unit of the same work module. FIG. 10A is a side view of the actuator, the capture unit, and the bracket of the work module of the same as seen from the positive direction in the X-axis direction. FIG. 10B is a front view of the actuator, the capture unit, and the bracket as seen from the negative direction in the Y-axis direction. FIG. 11A is a cross-sectional view of the actuator cut along a plane orthogonal to the Y-axis direction. FIG. 11B is a cross-sectional view of the actuator cut along a plane orthogonal to the Z-axis direction. FIG. 11C is an enlarged view of a portion centered on the linear motor in FIG. 11A. FIG. 12A is a cross-sectional view of the actuator, the output unit, and the bracket in a raised state when the output unit is cut along a plane orthogonal to the Y-axis direction. FIG. 12B is a cross-sectional view of the actuator, the output unit, and the bracket in a lowered state when the output unit is cut along a plane orthogonal to the Y-axis direction. FIG. 13A is a cross-sectional view of the actuator of the comparative example when cut along a plane orthogonal to the Y-axis direction. FIG. 13B is a cross-sectional view of the actuator cut along a plane orthogonal to the Z-axis direction. FIG. 14A is a cross-sectional view when the actuator and the bracket of the same are cut along a plane orthogonal to the X-axis direction in an raised state. FIG. 14B is a cross-sectional view when the actuator and the bracket of the same are cut in a plane orthogonal to the X-axis direction in a lowered state. FIG. 15A is an enlarged view showing a schematic configuration of a main part of FIG. 14A. FIG. 15B is an enlarged view showing a schematic configuration of a main part of FIG. 14B. FIG. 16A is an enlarged view showing a schematic configuration of a main part of FIG. 12A. 16B is an enlarged view showing a schematic configuration of a main part of FIG. 12B. FIG. 17A is a schematic cross-sectional view of the actuator, the output unit, and the bracket in the raised state of the output unit of the second embodiment when the actuator, the output unit, and the bracket are cut along a plane orthogonal to the Y-axis direction. FIG. 17B is a schematic cross-sectional view when the actuator, the output unit, and the bracket are cut along a plane orthogonal to the Y-axis direction in a state where the output unit is lowered. FIG. 18A is a schematic cross-sectional view of the actuator, the output unit, and the bracket in the raised state of the output unit of the third embodiment when the actuator, the output unit, and the bracket are cut along a plane orthogonal to the Y-axis direction. FIG. 18B is a schematic cross-sectional view when the actuator, the output unit, and the bracket are cut along a plane orthogonal to the Y-axis direction in a state where the output unit is lowered.

(Embodiment 1)
(1) Outline An outline of the manufacturing work apparatus 1 according to the present embodiment will be described with reference to FIGS. 1 to 2B. FIG. 2A is a perspective view of the manufacturing work apparatus 1 in a state where the cover module 14 (see FIG. 1), which will be described later, is removed. FIG. 2B is a schematic enlarged view of region A1 of FIG. 2A. Further, a pipe for circulating cooling water, a cable for supplying electric power, a pipe for supplying pneumatic pressure (including positive pressure and vacuum), and the like are connected to the manufacturing work apparatus 1, but these illustrations are omitted as appropriate. do.

The manufacturing work apparatus 1 is used for manufacturing various products such as electronic devices, automobiles, clothing, groceries, pharmaceuticals and crafts in facilities such as factories, laboratories, offices, stores and educational facilities. Used for work. The "work" as used in the present disclosure includes various work on a work object performed in the manufacture of a product, and includes, for example, work such as mounting, painting, printing, pressing, cutting, welding, and photographing. The "working object" referred to in the present disclosure is an object that is subjected to work such as processing by the manufacturing work apparatus 1, and is, for example, in the case of work in which the first object is mounted on the second object. , The second object is the work object.

In the present embodiment, the manufacturing work device 1 is used for manufacturing an electronic device in a factory, and is a mounting device for mounting a first object on a second object (working object). The case will be described. A general electronic device has various circuit blocks such as a power supply circuit and a control circuit, for example. In manufacturing these circuit blocks, as an example, a soldering step, a mounting step, and a soldering step are performed in this order. In the solder application process, cream-like solder is applied (or printed) to the substrate (printed wiring board). In the mounting process, components (electronic components) are mounted (mounted) on the board. In the soldering step, for example, the cream-like solder is melted and soldered by heating the substrate in which the parts are mounted in a reflow oven. In the mounting process, the manufacturing work apparatus 1 (mounting apparatus) attaches the component P1 (see FIG. 2B) which is the first object to the substrate B1 (see FIG. 2A) which is the second object (working object). Work to implement. In this embodiment, as an example, a case where the manufacturing work apparatus 1 is used for mounting the component P1 by the surface mount technology (SMT) will be described. However, the present invention is not limited to this example, and the manufacturing work apparatus 1 may be used for mounting the component P1 by the insertion mounting technology (IMT: Insertion Mount Technology).

The manufacturing work apparatus 1 according to the present embodiment includes a control module 11, a holding module 12, and a work module 13. The holding module 12 holds the work object. The work module 13 executes work on the work object. The control module 11 has a function of controlling the holding module 12 and the working module 13. That is, the manufacturing work apparatus 1 includes at least three modules including a control module 11, a holding module 12, and a work module 13, which are modularized according to functions. Each of at least three modules included in the manufacturing work apparatus 1 is appropriately selected from a plurality of types of modules having different functions according to the functions required for the manufacturing work apparatus 1.

In the present embodiment, since the manufacturing work apparatus 1 performs the mounting work of the component P1 on the substrate B1 which is the work object, the holding module 12 has a function of holding the substrate B1. More specifically, the holding module 12 conveys the substrate B1, which is the second object, from the outside of the manufacturing work apparatus 1 to the internal space of the manufacturing work apparatus 1, and the substrate B1 for which the work is completed is transferred to the manufacturing work apparatus 1. It is a transport device for transporting from the internal space of the above to the outside of the manufacturing work device 1. The holding module 12 holds the board B1 in the internal space of the manufacturing work apparatus 1 at least during the work on the board B1 (mounting of the component P1). That is, the holding module 12 is a holding device that holds the substrate B1 which is the second object. Further, the work module 13 executes the work of mounting the component P1 on the board B1. That is, the work module 13 captures the component P1 which is the first object, moves the captured component P1 onto the substrate B1, and releases the component P1 on the substrate B1 (releases the capture), whereby the substrate B1 It is a pick-and-place device that mounts (mounts) the component P1 on the surface.

In the present embodiment, the control module 11 functions as a master of the manufacturing work apparatus 1 and controls other modules (holding module 12 and work module 13) as slaves. As will be described in detail later, the control module 11 has a communication unit and a common interface. The communication unit communicates with each of the holding module 12 and the working module 13. The common interface powers both the holding module 12 and the working module 13. The term "power" as used in the present disclosure means the energy required for the operation of the holding module 12 and the working module 13, and means electric power (including alternating current and direct current), pneumatic pressure (including positive pressure and vacuum), and hydraulic pressure. And water pressure etc. are included. That is, in a module having an electric motor (motor), at least electric power, which is energy for driving the electric motor, is used as power. The control module 11 controls the holding module 12 and the working module 13 by communicating with the holding module 12 and the working module 13 at the communication unit and supplying power to the holding module 12 and the working module 13 from the common interface.

Further, the manufacturing work apparatus 1 according to the present embodiment further includes a cover module 14, a supply module 15, and a signal light 16 (see FIG. 1) in addition to the control module 11, the holding module 12, and the work module 13. In the present embodiment, the control module 11 is at the bottom, and the holding module 12, the working module 13, and the cover module 14 are combined with the control module 11 so as to be stacked in this order on the control module 11. The supply module 15 is housed in a recess 17 formed across the control module 11 and the holding module 12.

The cover module 14 will be described in detail later, but the cover module 14 is a terminal module that is the most downstream in the power supply path among a plurality of modules connected in series with the control module 11. The supply module 15 supplies the first object (part P1) to the work module 13. That is, the work module 13 receives the supply of the component P1 from the supply module 15, and mounts the component P1 on the substrate B1 held by the holding module 12. The signal lamp 16 is attached to the cover module 14. The signal lamp 16 visualizes the operating state of the manufacturing work device 1 by changing the display mode (for example, the emission color) according to the operating state of the manufacturing work device 1.

(2) Details Hereinafter, the manufacturing work apparatus 1 according to the present embodiment will be described in more detail with reference to FIGS. 1 to 2.

In the following, the internal space of the manufacturing work apparatus 1 is defined as the "X-axis direction" in which the substrate B1 which is the work object is conveyed, and the direction orthogonal to the X-axis direction in the horizontal plane is defined as the "Y-axis direction". The direction along the direction will be described as "Z-axis direction". That is, the X-axis direction, the Y-axis direction, and the Z-axis direction are directions orthogonal to each other. Further, when distinguishing between the positive direction in the Z-axis direction and the negative direction, the positive direction in the Z-axis direction is "upward" and the negative direction in the Z-axis direction is based on the direction of the arrow shown in FIG. The orientation is described as "downward". Similarly, when distinguishing between the positive direction in the X-axis direction and the negative direction, the positive direction in the X-axis direction will be described as "right" and the negative direction in the X-axis direction will be described as "left". .. Similarly, when distinguishing between the positive direction in the Y-axis direction and the negative direction, the positive direction in the Y-axis direction will be described as "rear" and the negative direction in the Y-axis direction will be described as "forward". The arrows indicating "X-axis direction", "Y-axis direction", and "Z-axis direction" in the drawings are shown for the sake of explanation only and are not accompanied by substance. However, these directions do not mean to limit the direction when the manufacturing work device 1 is used. For example, the manufacturing work device 1 is used in a state where the X-axis direction and the Y-axis direction are slightly inclined with respect to the horizontal plane. You may.

As described above, the manufacturing work apparatus 1 according to the present embodiment includes a control module 11, a holding module 12, a work module 13, a cover module 14, a supply module 15, and a signal lamp 16.

In the control module 11, the holding module 12, the working module 13, and the cover module 14, the holding module 12, the working module 13, and the cover module 14 are stacked in this order in the Z-axis direction, with the control module 11 at the bottom. A recess 17 is formed on the front surface of the control module 11 and the holding module 12 so as to straddle the control module 11 and the holding module 12. The recess 17 is open forward. The supply module 15 is housed in the recess 17. The signal lamp 16 is fixed to the front surface of the work module 13 and the cover module 14 so as to straddle the work module 13 and the cover module 14.

In the manufacturing work apparatus 1, as shown in FIG. 2A, the cover module 14 can be physically separated (removed) from the work module 13. The example of FIG. 2A shows a state in which the cover module 14 is removed together with the signal lamp 16. Further, the control module 11, the holding module 12, the working module 13, and the supply module 15 are physically separable. That is, the manufacturing work apparatus 1 is configured by combining a plurality of (five here) modules of a physically separable control module 11, a holding module 12, a work module 13, a cover module 14, and a supply module 15. Has been done. These plurality of modules are connected to each other by fasteners such as screws.

As shown in FIG. 1, the manufacturing work apparatus 1 can handle the plurality of modules as one integrated apparatus in a state where the plurality of modules are combined. In this state, the manufacturing work apparatus 1 has a substantially cubic shape, for example, when the dimensions in the three axial directions of the X-axis direction, the Y-axis direction, and the Z-axis direction are substantially the same. As an example, the size of this cube is set to a size of 500 mm or more and 1000 mm or less on one side, and more preferably a size of about 600 mm on one side. With such dimensions, it can be used as a tabletop-mounted device, and can be easily installed in facilities other than factories, such as laboratories, offices, stores, and educational facilities. Further, when viewed from the manufacturing work apparatus 1, for example, another apparatus can be arranged in an empty space generated above.

The manufacturing work apparatus 1 is configured to be bidirectionally communicable between the control module 11 and each of the holding module 12, the work module 13, and the supply module 15. As a result, a plurality of physically separable modules can cooperate with each other and operate as one manufacturing work apparatus 1. Further, the manufacturing work device 1 is configured so that the control module 11 can communicate with various equipment or communication terminals other than the manufacturing work device 1.

Further, the manufacturing work apparatus 1 is connected to the power source, the positive pressure source, and the vacuum source, which are the power supply sources, by the control module 11. That is, the manufacturing work apparatus 1 is configured to once acquire the power of each part by the control module 11 and distribute the power from the control module 11 to modules other than the control module 11.

Here, in the present embodiment, the holding module 12 and the working module 13 are connected in series to the control module 11 with respect to the power supply path from the common interface of the control module 11. That is, when focusing on the power supply path, the holding module 12 and the working module 13 are connected in series with respect to the control module 11. Therefore, the power from the control module 11 is directly supplied to the holding module 12, and is supplied to the working module 13 through the holding module 12.

According to the above configuration, since the control module 11 has a common interface, power can be supplied from the control module 11 to various modules as long as the holding module 12 and the working module 13 are compatible with the common interface. Moreover, since the control module 11 includes a communication unit that communicates with each of the holding module 12 and the work module 13, any holding module 12 and a work module 13 having a communication function with the communication unit can be combined. Therefore, in the manufacturing work apparatus 1 according to the present embodiment, it is possible to combine various holding modules 12 and work modules 13 with the control module 11.

For example, if it is a common interface that can supply both electric power and pneumatic pressure as power, either the holding module 12 or the working module 13 that operates by electric power and the holding module 12 or the working module 13 that operates by pneumatic pressure Can be combined. That is, even when the holding module 12 and the working module 13 that operate only with electric power are connected, the control module 11 has a common interface corresponding to both electric power and pneumatic pressure, so that the holding module 12 and the working module 13 can be powered. Can be supplied. Further, the control module 11 can be combined with the holding module 12 and the working module 13 that operate only by pneumatic pressure.

As a result, the holding module 12 and the working module 13 to be combined with the control module 11 can be selected from the various holding modules 12 and the working module 13, and the contents and quality of the work that can be performed in the manufacturing work apparatus 1 can be selected. It can be easily changed. That is, by changing the holding module 12 or the work module 13 to be combined with the control module 11, it is possible to easily change the content and quality of the work that can be performed as the manufacturing work device 1.

Next, the work module 13 will be described. In the following description, the manufacturing operation device 1 will be described as the mounting device 1.

As shown in FIGS. 3 and 4, the work module 13 has a work module frame 20. The work module frame 20 has a lower frame 200 whose sides are rectangular along the X-axis direction or the Y-axis direction. The lower frame 200 has a pair of X-axis beam portions 222 and a pair of Y-axis beam portions 252. A pair of X-axis beam portions 222 are located at the front end and the rear end of the lower frame 200. A pair of Y-axis beam portions 252 are located at the right end and the left end of the lower frame 200. The upper X-axis beam unit 221 is located above each X-axis beam unit 222. The upper Y-axis beam unit 251 is located above each Y-axis beam unit 252. At both ends of the X-axis beam unit 221 and the X-axis beam unit 222 in the X-axis direction, the X-axis beam unit 221 and the X-axis beam unit 222 are connected by a connecting piece 23. The X-axis beam 21 is configured by the X-axis beam unit 221 and the X-axis beam unit 222 and the connecting piece 23. The Y-axis beam 24 is configured by the Y-axis beam unit 251 and the Y-axis beam unit 252 and the connecting piece 23. The connecting piece 23 is shared by the X-axis beam 21 and the Y-axis beam 24.

The X-axis beam 21 and the Y-axis beam 24 constitute a work module frame 20 having a predetermined bending rigidity. As shown in FIG. 2A, a cover 26 is attached to the work module frame 20. The work module frame 20 and the cover 26 constitute a housing 130 of the work module 13.

As shown in FIGS. 3 and 4, the work module 13 has a Y-axis moving device 3 and an X-axis moving device 4. The Y-axis moving device 3 has a Y-axis linear motor 31, which is a so-called cylindrical linear motor.

The Y-axis linear motor 31 has a Y-axis linear motor stator 32 and a Y-axis linear motor mover 35. As shown in FIG. 5A, the Y-axis linear motor stator 32 has an outer cylinder 321 whose axial direction (longitudinal direction) is parallel to the Y-axis direction, and a winding core 322 made of a tubular member. As shown in FIG. 6A, the winding core 322 is arranged inside the outer cylinder 321 so that the axial direction is parallel to the Y-axis direction. A coil 33, which will be described later, is wound around the surface of the winding core 322, and the coil 33 is held by the winding core 322. Both ends of the outer cylinder 321 in the axial direction are fixed to the work module frame 20. The winding core 322 penetrates the work module frame 20 in the axial direction and is fixed to the work module frame 20.

The Y-axis linear motor stator 32 further has a flow path for passing the refrigerant inside the winding core 322 which is a cylindrical member. That is, the internal space 34 of the winding core 322 serves as a flow path for the refrigerant (for example, cooling water). A pipe joint 323 is attached to the axial end of the winding core 322. A water supply pipe made of a hose or the like is connected to the pipe joint 323, and the refrigerant is passed through the internal space 34. The cooling section is composed of the internal space 34, the pipe joint 323, and the hose. The coil 33, which is a heat generating source, is cooled by the refrigerant passing through the internal space 34. Even when the refrigerant does not pass through the internal space 34, the heat of the coil 33 is dissipated to, for example, the internal space 34 through the winding core 322, so that the cooling effect of the coil 33 can be obtained.

The Y-axis linear motor stator 32 is provided at both ends of the work module frame 20 in the X-axis direction. That is, the Y-axis moving device 3 has two Y-axis linear motors 31.

The Y-axis linear motor stator 32 has a coil 33. As shown in FIG. 6B, the coil 33 is composed of a plurality of unit coils 331 arranged in the Y-axis direction. As an example, three sets of unit coils 331 of U phase, V phase, and W phase are regarded as one set, and a plurality of sets of unit coils 331 are arranged in the Y-axis direction. Each unit coil 331 is wound around the winding core 322 about the Y axis. The coil 33 is housed in the outer cylinder 321 together with the winding core 322 in a state of being wound around the winding core 322.

The Y-axis linear motor mover 35 has a permanent magnet 36 on which a magnetic force acts between the coil 33 and the coil 33 in a state where an exciting current is passed. The permanent magnet 36 has a cylindrical shape with the Y-axis direction as the axial direction. The permanent magnet 36 is composed of a plurality of unit permanent magnets 361 arranged in the Y-axis direction. Each unit permanent magnet 361 has a cylindrical shape with the Y-axis direction as the axial direction. The unit permanent magnet 361 has S poles or N poles at both ends in the Y-axis direction, respectively. The unit permanent magnets 361 adjacent to each other in the Y-axis direction are arranged so that the poles (S pole or N pole) at the ends adjacent to each other are the same pole.

As shown in FIG. 3, the Y-axis linear motor stator 35 is placed on the Y-axis linear motor stator 32 so as to surround the Y-axis linear motor stator 32 around the Y-axis. The length of the Y-axis linear motor mover 35 in the Y-axis direction is shorter than the length of the Y-axis linear motor stator 32 in the Y-axis direction. The Y-axis linear motor mover 35 can move straight in the Y-axis direction along the Y-axis linear motor stator 32. The permanent magnet 36 receives the magnetic flux generated by the coil 33 in which the exciting current of the Y-axis linear motor stator 32 is passed, so that the Y-axis linear motor mover 35 is driven to move linearly in the Y-axis direction. Force is generated.

The Y-axis linear motor mover 35 is housed in a Y-axis moving unit 50, which will be described later.

The Y-axis moving device 3 has a Y-axis linear guide 37. As shown in FIG. 5A, the Y-axis linear guide 37 is a so-called LM guide (registered trademark) having a Y-axis linear guide rail 38 and a Y-axis linear guide slider 39. The Y-axis linear guide rail 38 is fixed to the upper surface of the X-axis beam portion 222 of the work module frame 20 so that the longitudinal direction is parallel to the Y-axis direction. The Y-axis linear guide rails 38 are provided at both ends of the work module frame 20 in the X-axis direction. That is, the Y-axis moving device 3 has two Y-axis linear guides 37.

The shape of the Y-axis linear guide rail 38 in the cross section orthogonal to the Y-axis direction is constant regardless of the position in the X-axis direction, and the width (length in the X-axis direction) of the intermediate portion 382 in the vertical direction is that of the intermediate portion 382. It is shorter than the width of the upper portion 381.

The Y-axis linear guide slider 39 is fitted to the Y-axis linear guide rail 38. In the cross section orthogonal to the Y-axis direction, the shape of the Y-axis linear guide slider 39 corresponds to the shape of the Y-axis linear guide rail 38 described above, and the Y-axis linear guide slider 39 and the Y-axis linear guide rail 38 are It is fitted with almost no gap. As described above, since the width of the intermediate portion 382 in the cross section orthogonal to the Y-axis direction of the Y-axis linear guide rail 38 is shorter than the width of the upper portion 381 of the intermediate portion 382, the Y-axis linear guide slider 39 is Y. It does not fall upward from the shaft linear guide rail 38.

In the first embodiment, the Y-axis moving device 3 is configured by the Y-axis linear motor 31 and the Y-axis linear guide 37.

The Y-axis linear guide 37 is separated from the Y-axis linear motor 31. In particular, the Y-axis linear guide rail 38 is separated from the Y-axis linear motor stator 32. That is, the Y-axis linear motor mover 35 is located around the Y-axis linear motor stator 32. Therefore, the Y-axis linear guide rail 38 is positioned away from the Y-axis linear motor stator 32 in order to avoid interference with the Y-axis linear motor mover 35. The Y-axis linear motor 31 has a coil 33 which is a heat generation source. By separating the Y-axis linear guide 37 from the Y-axis linear motor 31, the Y-axis linear guide 37 is less likely to be affected by the heat generated by the coil 33. As a result, dimensional changes due to thermal expansion or contraction of the Y-axis linear guide 37 are suppressed.

As shown in FIG. 3, the Y-axis moving frame 51 (described later) constituting the Y-axis moving unit 50 is fixed to the Y-axis linear guide slider 39. As shown in FIGS. 7 and 8, the Y-axis moving unit 50 has a Y-axis linear motor mover 35 and moves linearly in the Y-axis direction. That is, the Y-axis movement unit 50 is guided by the Y-axis linear guide 37 so that the movement in the Y-axis direction becomes linear, and the Y-axis linear motor 31 obtains a driving force for linear movement in the Y-axis direction. ..

The Y-axis moving unit 50 has a Y-axis moving frame 51 having a rectangular shape in a plan view. The Y-axis moving frame 51 has a Y-axis beam 52 whose longitudinal direction is the Y-axis direction. The Y-axis beam 52 has a Y-axis beam portion 521 and a Y-axis mover casing 350 located below the Y-axis beam portion 521 and fixed to the Y-axis beam portion 521. The Y-axis mover casing 350 accommodates the permanent magnet 36 of the Y-axis linear motor mover 35, and constitutes the Y-axis linear motor mover 35 together with the permanent magnet 36. The Y-axis beam 52 is provided at both ends of the Y-axis moving frame 51 in the X-axis direction. That is, the Y-axis moving frame 51 has two Y-axis beams 52.

The Y-axis moving frame 51 has an X-axis beam 53 whose longitudinal direction is the X-axis direction. The X-axis beam 53 is composed of an X-axis beam unit 531. The X-axis beam 53 is provided at both ends of the Y-axis moving unit 50 in the Y-axis direction. That is, the Y-axis moving frame 51 has two X-axis beams 53.

The Y-axis moving unit 50 has an X-axis moving device 4. The X-axis moving device 4 is fixed to the Y-axis moving frame 51. The Y-axis moving unit 50 is composed of an X-axis moving device 4, a Y-axis moving frame 51, and a Y-axis linear guide slider 39.

The X-axis moving device 4 has an X-axis linear motor 41 including a so-called cylindrical linear motor. The X-axis linear motor 41 includes an X-axis linear motor stator 42 and an X-axis linear motor mover 45. As shown in FIG. 5A, the X-axis linear motor stator 42 has an outer cylinder 421 whose axial direction (longitudinal direction) is parallel to the X-axis direction, and a winding core 422 made of a tubular member. The winding core 422 is arranged inside the outer cylinder 421, and the axial direction is parallel to the X-axis direction. A coil 43, which will be described later, is wound around the surface of the winding core 422, and the coil 43 is held by the winding core 422. Both ends of the outer cylinder 421 in the axial direction are fixed to the Y-axis moving frame 51. The winding core 422 penetrates the Y-axis moving frame 51 in the axial direction and is fixed to the Y-axis moving frame 51.

The X-axis linear motor stator 42 further has a flow path for passing the refrigerant inside the winding core 422 which is a cylindrical member. That is, the internal space 44 of the winding core 422 serves as a passage for the refrigerant (for example, cooling water). A pipe joint 423 is attached to the axial end of the winding core 422. A water supply pipe made of a hose or the like is connected to the pipe joint 423, and the refrigerant is passed through the internal space 44. The cooling section is composed of the internal space 44, the pipe joint 423 and the hose. The coil 43, which is a heat generating source, is cooled by the refrigerant passing through the internal space 44. Even when the refrigerant does not pass through the internal space 44, the heat of the coil 43 is dissipated to, for example, the internal space 44 through the winding core 422, so that the cooling effect of the coil 43 can be obtained.

The X-axis linear motor stator 42 is provided at both ends of the Y-axis moving unit 50 in the Y-axis direction. That is, the Y-axis moving unit 50 has two X-axis linear motors 41.

The X-axis linear motor stator 42 has a coil 43. As shown in FIG. 5B, the coil 43 is composed of a plurality of unit coils 431 arranged in the X-axis direction. As an example, three sets of unit coils 431 of U phase, V phase, and W phase are regarded as one set, and a plurality of sets of unit coils 431 are arranged in the X-axis direction. Each unit coil 431 is wound around a winding core 422 around the X axis. The coil 43 is housed in the outer cylinder 421 together with the winding core 422 in a state of being wound around the winding core 422.

The X-axis linear motor mover 45 has a permanent magnet 46 on which a magnetic force acts between the coil 43 and the coil 43 in a state where an exciting current is passed. The permanent magnet 46 has a cylindrical shape with the X-axis direction as the axial direction. The permanent magnet 46 is composed of a plurality of unit permanent magnets 461 arranged in the X-axis direction. Each unit permanent magnet 461 has a cylindrical shape with the X-axis direction as the axial direction. The unit permanent magnet 461 has S poles or N poles at both ends in the X-axis direction, respectively. The unit permanent magnets 461 adjacent to each other in the X-axis direction are arranged so that the poles (S pole or N pole) at the ends adjacent to each other are the same pole. The permanent magnet 46 is housed in the X-axis mover casing 450.

As shown in FIG. 7, the X-axis linear motor stator 45 is placed on the X-axis linear motor stator 42 so as to surround the X-axis of the X-axis linear motor stator 42. The length of the X-axis linear motor mover 45 in the X-axis direction is shorter than the length of the X-axis linear motor stator 42 in the X-axis direction. The X-axis linear motor mover 45 can move straight in the X-axis direction along the X-axis linear motor stator 42. The permanent magnet 46 receives the magnetic flux generated by the coil 43 in which the exciting current of the X-axis linear motor stator 42 is passed, so that the X-axis linear motor mover 45 is driven to move linearly in the X-axis direction. Force is generated.

The X-axis moving device 4 has an X-axis linear guide 47. The X-axis linear guide 47 is a so-called LM guide (registered trademark) having an X-axis linear guide rail 48 and an X-axis linear guide slider 49. The X-axis linear guide rail 48 is fixed to the upper surface of the X-axis beam portion 531 of the Y-axis moving frame 51 so that the longitudinal direction is parallel to the X-axis direction. The X-axis linear guide rails 48 are provided at both ends of the Y-axis moving frame 51 in the Y-axis direction. That is, the X-axis moving device 4 has two X-axis linear guides 47.

As shown in FIG. 7, the shape of the X-axis linear guide rail 48 in the cross section orthogonal to the X-axis direction is constant regardless of the position in the Y-axis direction, and the width (length in the Y-axis direction) of the intermediate portion 482 in the vertical direction is constant. ) Is shorter than the width of the upper portion 481 of the intermediate portion 482.

The X-axis linear guide slider 49 is fitted to the X-axis linear guide rail 48. In the cross section orthogonal to the X-axis direction, the shape of the X-axis linear guide slider 49 corresponds to the shape of the X-axis linear guide rail 48 described above, and the X-axis linear guide slider 49 and the X-axis linear guide rail 48 are It is fitted with almost no gap. As described above, since the width of the intermediate portion 482 in the cross section orthogonal to the X-axis direction of the X-axis linear guide rail 48 is shorter than the width of the upper portion 481 of the intermediate portion 482, the X-axis linear guide slider 49 is X. Do not fall upward from the shaft linear guide rail 48. In the present embodiment, the X-axis moving device 4 is configured by the X-axis linear motor 41 and the X-axis linear guide 47.

The X-axis linear guide 47 is separated from the X-axis linear motor 41. In particular, the X-axis linear guide rail 48 is separated from the X-axis linear motor stator 42. That is, the X-axis linear motor mover 45 is located around the X-axis linear motor stator 42. Therefore, the X-axis linear guide rail 48 is positioned away from the X-axis linear motor stator 42 in order to avoid interference with the X-axis linear motor mover 45. The X-axis linear motor 41 has a coil 44 which is a heat generation source. By separating the X-axis linear guide 47 from the X-axis linear motor 41, the X-axis linear guide 47 is less likely to be affected by the heat generated by the coil 43. As a result, dimensional changes due to thermal expansion or contraction of the X-axis linear guide 37 are suppressed.

In this embodiment, the mounting head unit 56 is fixed to the X-axis linear guide slider 49. As shown in FIG. 7, the X-axis moving unit 55 is configured by the mounting head unit 56 and the X-axis linear motor mover 45. The mounting head unit 56 moves linearly in the X-axis direction together with the X-axis linear motor mover 45. That is, the mounting head unit 56 is guided by the X-axis linear guide 47 so that the movement in the X-axis direction becomes linear, and the X-axis linear motor 41 obtains a driving force for linear movement in the X-axis direction.

As shown in FIG. 9, the mounting head unit 56 has a mounting head frame 57 having a rectangular shape in a plan view. The mounting head frame 57 has a plate 571 fixed to each of the two X-axis mover casings 450, and a plate 572 connecting the two plates 571. A bracket 573 for fixing the actuator 6 and the catching unit 7, which will be described later, is fixed to the plate 571. The mounting head frame 57 is composed of the plate 571, the plate 572, and the bracket 573.

As shown in FIGS. 10A and 10B, a capture unit 70 that holds the first object (part P1) is fixed to the mounting head frame 57 via the actuator 6. The capture unit 70 is, for example, a suction nozzle. The capture unit 70 can switch between a capture state in which the component P1 is captured (held) and a release state in which the component P1 is released (released from capture). However, the capturing unit 70 is not limited to the suction nozzle, and may be configured to capture (hold) the component P1 by sandwiching (picking) it, for example, like a robot hand. The actuator 6 moves the capture unit 70 straight in the Z-axis direction. Further, the actuator 6 rotationally moves the capturing portion 70 in the rotational direction (hereinafter referred to as “θ direction”) about the axis along the Z-axis direction. The X-axis moving device 4 moves the mounting head unit 56 in a straight line in the X-axis direction. The Y-axis moving device 3 moves the mounting head unit 56 in a straight line in the Y-axis direction. The Y-axis moving device 3 and the X-axis moving device 4 can move the capturing unit 70 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction.

As shown in FIG. 11A, the actuator 6 includes a rotary motor 61, a spline member 62, a linear motor 65, and an output unit 68.

The rotary motor 61 has a rotary mover 612 that rotates around one axis 600 parallel to the Z-axis direction, and a rotary stator 611 that rotates the rotary mover 612 around the axis 600. As such a rotary motor 61, a so-called servo motor, a stepping motor, or the like is preferably used.

As shown in FIGS. 12A and 12B, the rotary stator 611 is fixed to the bracket 573 constituting the mounting head frame 57. One end (upper end) of the rotary mover 612 in the axis 600 direction is housed in the rotary stator 611. The other end (lower end) of the rotary mover 612 in the axis 600 direction is located outside the rotary stator 611. The rotary motor 61 is a so-called non-penetrating rotary motor 61.

As shown in FIG. 11A, the upper end portion of the first coupling 601 is connected to the lower end portion of the rotary mover 612. The axis of the first coupling 601 coincides with the axis 600 of the rotary mover 612. The lower end of the first coupling 601 is connected to the upper end of the second coupling 602 via the third coupling 603. The axis of the second coupling 602 coincides with the axis of the first coupling 601 (axis 600).

The spline member 62 has a first member 63 and a second member 64. The first member 63 receives a rotational force from the rotary mover 612 and rotates around the axis 600. The second member 64 overlaps a part of the first member 63 in the axis 600 direction in the radial direction. The second member 64 moves straight on the axis 600 and receives a rotational force from the first member 63 to rotate around the axis 600.

In the present embodiment, the first member 63 is composed of a tubular member whose longitudinal direction is the axis 600 direction. The outer peripheral surface of the first member 63 is fixed to the inner peripheral surface of the outer cylinder member 631, and the first member 63 and the outer cylinder member 631 are integrated. The axis of the first member 63 coincides with the axis 600.

The lower end of the second coupling 602 is connected to the upper end of the outer cylinder member 631. The axis of the second coupling 602 coincides with the axis of the outer cylinder member 631 (axis 600).

The inner member of the first bearing 604 is fixed to the outer peripheral surface of the second coupling 602. The outer member of the first bearing 604 is fixed to the bracket 573 (see FIG. 12A). As a result, the second coupling 602 can rotate around the axis 600, and the second coupling 602 is supported by the bracket 573 via the first bearing 604.

The upper end of the fourth coupling 605 is connected to the lower end of the outer cylinder member 631. The axis of the fourth coupling 605 coincides with the axis of the outer cylinder member 631 (axis 600).

An inner member of the second bearing 606 is fixed to the outer peripheral surface of the fourth coupling 605. The outer member of the second bearing 606 is fixed to the bracket 573 (see FIG. 12A). As a result, the fourth coupling 605 can rotate around the axis 600, and the fourth coupling 605 is supported by the bracket 573 via the first bearing 604.

As a result, the weights of the second coupling 602, the outer cylinder member 631, the first member 63, and the fourth coupling 605 are applied to the bracket 573 via the first bearing 604 and the second bearing 606. That is, the first member 63 is supported by the bracket 573.

The second member 64 is composed of a shaft member inserted into the internal space of the first member 63 with the axis 600 direction as the longitudinal direction. As shown in FIG. 11B, a first key groove 632 along the axis 600 direction is formed in a part of the inner peripheral surface of the first member 63 in the circumferential direction around the axis 600. The first key groove 632 may be formed over the entire length of the first member 63 in the axis 600 direction, or may be formed in a part of the first member 63 in the axis 600 direction. A second key groove 641 along the axis 600 direction is formed in a part of the peripheral surface of the second member 64 in the circumferential direction around the axis 600. The second key groove 641 may be formed over the entire length of the second member 64 in the axis 600 direction, or may be formed in a part of the second member 64 in the axis 600 direction. The key 633 is fitted and fixed in the first key groove 632. The tip of the key 642 projects from the outer peripheral surface of the second member 64.

As shown in FIG. 11A, the second member 64 is inserted inside the first member 63 along the axis 600 direction. At this time, the tip end portion of the key 642 protruding from the outer peripheral surface of the second member 64 is accommodated in the first key groove 632. Here, the dimension of the second key groove 641 in the Z-axis direction (axis 600 direction) is at least larger than the dimension of the key 642 in the Z-axis direction. As a result, the second member 64 is restricted from rotating relative to the first member 63 around the axis 600 of the second member 64. Further, the second member 64 can move straight in the axis 600 direction with respect to the first member 63.

A flange 643 is fixed to the upper end of the second member 64. The diameter centered on the axis 600 in the flange 643 is larger than the diameter centered on the axis 600 in the first member 63.

The linear motor 65 has a linear mover 66 and a linear stator 67. The linear type mover 66 receives a rotational force from the second member 64 and rotates around the axis 600. The linear stator 67 applies a driving force to the linear mover 66 along the axis 600 direction.

As shown in FIG. 11C, the linear stator 67 has an outer cylinder 671 whose longitudinal direction is the axis 600 direction, and a cylindrical winding core 672. The winding core 672 is arranged inside the outer cylinder 671, and the axial direction is parallel to the axial 600 direction. A coil 673, which will be described later, is wound around the surface of the winding core 672, and the coil 673 is held by the winding core 672. The outer cylinder 671 and the winding core 672 are fixed to the bracket 573 (see FIG. 12A). The internal space of the winding core 672 becomes a passage for the linear type mover 66. The linear stator 67 has a coil 673. The coil 673 is composed of a plurality of unit coils 674 wound around the winding core 672. As an example, three sets of unit coils 674 of U phase, V phase, and W phase are regarded as one set, and a plurality of sets of unit coils 674 are arranged in the Y-axis direction. The coil 673 is housed in the outer cylinder 671 in a state of being wound around the winding core 672.

The linear type mover 66 is a shaft member inserted into the internal space of the linear type stator 67. The linear type stator 66 penetrates the linear type stator 67 in the axis 600 direction. The linear type mover 66 has an outer cylinder 661 whose longitudinal direction is the axis 600 direction. Inside the outer cylinder 661, there is a permanent magnet 662 on which a magnetic force acts with the coil 673 of the linear stator 67. The permanent magnet 662 fits inside the outer cylinder 661. The permanent magnet 662 is configured by arranging a plurality of unit permanent magnets 663 in the direction of the axis 600. The unit permanent magnets 663 adjacent to each other in the direction of the axis 600 are arranged so that the poles (S pole or N pole) at the ends adjacent to each other are the same pole.

As shown in FIG. 11A, the first guide portion 675 is fixed to the upper end portion of the linear stator 67. The first guide portion 675 guides the linear mover 66 so that the linear mover 66 does not come into contact with the inner surface of the linear stator 67. A second guide portion 676 is fixed to the lower end portion of the linear type stator 67. The second guide portion 676 guides the linear type stator 66 so that the linear type stator 66 does not come into contact with the inner surface of the linear type stator 67. The axis of the linear mover 66 coincides with the axis 600.

The linear type mover 66 is integrated with the second member 64 and moves in the axis 600 direction. Here, the fact that the linear type mover 66 and the second member 64 are integrated means that the linear type mover 66 is fixed to the second member 64 and does not move relative to the second member 64. , Means that the diameter of the linear mover 66 and the diameter of the second member 64 are the same. It should be noted that the diameter of the linear type mover 66 and the diameter of the second member 64 do not have to be exactly the same, and it is sufficient that they can be regarded as the same in practice.

The linear type mover 66 and the second member 64 may be seamlessly formed by the same member. Further, the linear type mover 66 made of another member and the second member 64 may be connected by welding, adhesion, bolting or the like.

A flange 643 larger than the diameter of the first member 63 is formed at the upper end of the second member 64. Even if the second member 64 moves downward, the flange 643 comes into contact with the upper end portion of the first member 63, so that the second member 64 does not move further downward. Therefore, it is possible to prevent the second member 64 from falling from the first member 63.

Further, an elastic member 69 that applies a force to the linear type mover 66 is provided in the upward direction (positive direction in the Z-axis direction) in the axis 600 direction of the linear type mover 66. The elastic member 69 is a coil spring in which the wire rod is wound around the axis 600, and is arranged so as to be wound around the second member 64 between the upper end portion of the first member 63 and the flange 643. As described above, the flange 643 of the second member 64 prevents the second member 64 from falling from the first member 63. However, if the second member 64 and the linear type mover 66 move downward due to their own weight during a power failure or the like, the catching portion 70 may come into contact with the substrate B1 or the component P1 mounted on the substrate B1. Even if the second member 64 and the linear type mover 66 move downward due to their own weight, the elastic member 69 is compressed, and the second member 64 and the linear type mover 66 receive an upward force from the elastic member 69. , The second member 64 and the linear type mover 66 move upward. As a result, in the event of a power failure or the like, the second member 64 and the linear type mover 66 are prevented from moving downward due to their own weight, and the capture unit 70 is prevented from coming into contact with the substrate B1 or the component P1 mounted on the substrate B1. To.

The output unit 68 is integrated with the linear type mover 66. The second member 64, the linear type mover 66, and the output unit 68 are integrated to form the output unit unit 680. However, the linear type mover 66 and the output unit 68 may be formed as separate members, and the linear type mover 66 and the output unit 68 may be integrally fixed. The output unit 68 is driven by a rotary motor 61 and a linear motor 65.

As shown in FIG. 12A, the third guide portion 607 that guides the movement of the output portion 68 in the axis 600 direction is fixed to the bracket 573.

The first embodiment has been described above. In the first embodiment, the rotary motor 61, the spline member 62, the linear motor 65, and the output unit 68 are arranged on the axis 600. That is, the size in the cross section orthogonal to the axis 600 direction of the actuator 6 can be small.

Therefore, as shown in FIG. 10A, when arranging a plurality of actuators 6, the pitch 71 of the actuators 6 can be set to a relatively short pitch, for example, 12 mm. As shown in FIGS. 1 and 2, feeder cassettes 154 are often arranged in the X-axis direction at a pitch of 12 mm. In such a case, the pitch 71 of the actuator 6 and the capture unit 70 can be adjusted to the pitch of the feeder cassette 154. Many actuators 6 and capture units 70 can be arranged in a small space.

Further, in the first embodiment, not only the linear type mover 66 and the second member 64 are arranged in the direction of the axis 600, but also the linear type mover 66 and the second member 64 are integrated.

Here, a comparative example will be described with reference to FIGS. 13A to 14B. In the comparative example, the upper end portion of the linear type mover 66 is connected to the lower end portion of the second member 64. The fifth coupling 608 is fitted into the lower end portion of the second member 64 and the upper end portion of the linear type mover 66, and the second member 64 and the linear type mover 66 are connected to each other.

Compared with this comparative example, in the first embodiment shown in FIGS. 11A to 12B, the fifth coupling 608 provided from the linear type mover 66 to the second member 64 becomes unnecessary, and therefore the weight of the fifth coupling 608 is not required. The weight of the output unit 680 can be reduced by that amount.

Further, in the comparative example, as shown in FIGS. 14A and 15A, the fifth coupling 608 into which the lower end portion of the second member 64 is fitted corresponds to the lower end surface of the fourth coupling 605. Therefore, the entry of the lower end portion of the second member 64 into the fourth coupling 605 is restricted. Further, as shown in FIGS. 14B and 15B, the fifth coupling 608 into which the upper end portion of the linear type stator 66 is fitted hits the upper end surface of the linear type stator 67. Therefore, the entry of the upper end portion of the linear type mover 66 into the linear type stator 67 is restricted. Therefore, of the linear type mover 66 and the second member 64, the portion where the fifth coupling 608 is located in the axis 600 direction (vertical direction) is in the fourth coupling 605 and in the linear type stator 67. It will be a part that cannot enter either. As shown in FIG. 15B, the distance between the fourth coupling 605 and the linear stator 67 in the axis 600 direction is obtained by adding the length H1 of the fifth coupling 608 in the axis 600 direction to the stroke S1 of the output unit 680. The minimum length is required.

On the other hand, in the first embodiment, as shown in FIGS. 11A, 12A and 12B, the fifth coupling 608 is not provided. Therefore, as shown in FIG. 16A, when the output unit 680 is raised, the lower end portion of the second member 64 can enter the fourth coupling 605. Further, as shown in FIG. 16B, when the output unit 680 is lowered, the upper end portion of the linear type stator 66 can enter the linear type stator 67. The distance between the fourth coupling 605 and the linear stator 67 in the axis 600 direction is the stroke S1 of the output unit 680. Therefore, as compared with the first embodiment, the length H1 of the fifth coupling 608 in the axis 600 direction and the length of the linear type mover 66 and the second member 64 in the axis 600 direction can be shortened.

Next, the second embodiment will be described with reference to FIGS. 17A and 17B. The mounting device 1 of the second embodiment has most of the same configuration as the mounting device 1 of the first embodiment. Therefore, the description that overlaps with the first embodiment will be omitted as appropriate.

In the first embodiment, the fourth coupling 605 is located between the first member 63 of the spline member 62 and the linear stator 67, but in the second embodiment, the first member 63 and the linear stator 67 Nothing is located between.

In the output unit 680, the second key groove 641 is formed from the vicinity of the upper end portion to the lower end portion of the second member 64, and the permanent magnet 662 is formed from the vicinity of the lower end portion to the upper end portion of the linear type mover 66. Is located.

As shown in FIG. 17A, when the output unit 680 rises to the upper limit position of the movable range, the lower end edge of the second member 64 is positioned at the same position as the lower end edge of the first member 63 in the Z-axis direction.

Further, as shown in FIG. 17B, when the output unit 680 descends to the lower limit position of the movable range, the upper end edge of the linear type mover 66 (lower end edge of the second member 64) becomes the linear type stator 67 in the Z-axis direction. It is located at the same position as the upper edge of.

In this case, the distance between the first member 63 and the linear stator 67 in the axis 600 direction requires at least one stroke S1 of the output unit 680. In the second embodiment, as compared with the first embodiment, the distance between the first member 63 and the linear stator 67 in the axis 600 direction is the length of the fourth coupling 605 in the axis 600 direction of the fifth coupling 608. The length H1 is added, so it can be shortened.

Next, the third embodiment will be described with reference to FIGS. 18A and 18B. The mounting device 1 of the third embodiment has most of the same configuration as the mounting device 1 of the second embodiment. Therefore, the description that overlaps with the second embodiment will be omitted as appropriate.

In the second embodiment, the distance between the first member 63 and the linear stator 67 in the axis 600 direction is the stroke S1 of the output unit 680. In the third embodiment, the distance between the first member 63 and the linear stator 67 in the axis 600 direction is 0.

As shown in FIG. 18A, the permanent magnet 662 provided in the linear type mover 66 extends from the inside of the linear type mover 66 to the position of the second key groove 641 of the second member 64 in the axis 600 direction. There is. The portion where the permanent magnet 662 and the second keyway 641 overlap in the axis 600 direction of the linear type stator 66 and the second member 64 enters both the inside of the linear type stator 67 and the inside of the first member 63. obtain. By setting the length of the portion where the permanent magnet 662 and the second keyway 641 overlap in the axis 600 direction to be equal to or longer than the length of the stroke S1 of the output unit 680, the first member 63 and the linear stator 67 can be formed. The interval in the axis 600 direction can be set to 0.

As a result, the length of the actuator 6 in the axis 600 direction can be shortened.

Next, modifications of the first to third embodiments will be described.

The Y-axis linear motor 31 does not have to be a cylindrical linear motor. That is, it may be a cylindrical linear motor that is not a cylinder. Further, it does not have to be a tubular linear motor, and may be, for example, a so-called planar linear motor.

Water (cooling water) is preferably used as the refrigerant to be passed through the internal space 34 of the winding core 322, but a liquid other than water may be used.

The Y-axis linear guide 37 is not limited to the LM guide (registered trademark) as described above, and may be any mechanism that can guide the movement of the Y-axis linear motor mover 35 as a linear movement.

In the first to third embodiments, the Y-axis moving device 3 has the Y-axis linear motor 31 and the Y-axis linear guide 37, but the Y-axis linear guide 37 may not be provided. Further, the Y-axis moving device 3 may include a configuration other than the Y-axis linear motor 31 and the Y-axis linear guide 37.

The X-axis linear motor 41 does not have to be a cylindrical linear motor. That is, the X-axis linear motor 41 may be a cylindrical linear motor that is not a cylinder. Further, the X-axis linear motor 41 does not have to be a tubular linear motor, and may be, for example, a so-called planar linear motor.

Water is preferably used as the refrigerant to be passed through the internal space 44 of the winding core 422, but a liquid other than water may be used.

The X-axis linear guide 47 is not limited to the LM guide (registered trademark) as described above, and may be any mechanism that can guide the movement of the X-axis linear motor mover 45 as a linear movement.

In the first to third embodiments, the X-axis moving device 4 has the X-axis linear motor 41 and the X-axis linear guide 47, but the X-axis linear guide 47 may not be provided. Further, the X-axis moving device 4 may include a configuration other than the X-axis linear motor 41 and the X-axis linear guide 47.

The rotary motor 61 does not have to be a so-called servo motor or a stepping motor, and is not particularly limited.

In the first to third embodiments, the rotary mover 612 of the rotary motor 61 is connected to the first member 63 of the spline member 62 via the first coupling 601 and the second coupling 602 and the third coupling 603. Was there. The rotary mover 612 of the rotary motor 61 may be connected to the first member 63 via only the first coupling 601 or only the second coupling 602. The rotary mover 612 of the rotary motor 61 may be directly connected to the first member 63.

A so-called ball spline may be used as the spline member 62.

Further, one of the Y-axis linear motor 31 and the X-axis linear motor 41 may not be a linear motor, but a mechanism having a rotary motor and a ball screw may be used instead.

As is clear from the above-described first to third embodiments and modifications thereof, the actuator 6 of the first aspect includes a rotary motor 61 having a rotary mover 612, a spline member 62, and a linear motor 65. And an output unit 68. The spline member 62 reciprocates on the axis 600 and receives a rotational force from the first member 63 and the first member 63 that receives a rotational force from the rotary mover 612 and rotates around one axis 600. It has a second member 64 that rotates around. The linear motor 65 includes a linear mover 66 that receives a rotational force from a second member 64 and rotates around an axis 600, and a linear stator 67 that gives a driving force to the linear mover 66 along the axis 600 direction. And have. The output unit 68 is driven by a rotary motor 61 and a linear motor 65 provided at one end of the linear mover 66. The linear mover 66 has a permanent magnet 662, and the linear stator 67 has a coil that causes a magnetic force to act on the permanent magnet 662. The linear type stator 66 penetrates the linear type stator 67 in the direction of the axis 600, and rotates about the axis 600 relative to the linear type stator 67. The linear type mover 66 and the second member 64 are arranged side by side in the axis 600 direction, and the linear type mover 66 and the second member 64 are integrated.

According to the first aspect, the coupling becomes unnecessary, and the weight of the actuator 6 can be reduced.

The second aspect is realized by the combination with the first aspect. In the second aspect, the second member 64 has a second keyway 641. In the second key groove 641, a key 633 fitted into the first key groove 632 formed in the first member 63 is inserted. In the second member 64, the position of the permanent magnet 662 in the direction of the axis 600 overlaps a part or all of the position of the second key groove 641.

According to the second aspect, in the axis 600 direction of the linear type mover 66 and the second member 64, the portion where the permanent magnet 662 and the second keyway 641 overlap is in the linear type stator 67 and the first member 63. You can enter either inside or inside. As a result, the length of the actuator 6 in the axis 600 direction can be shortened.

In the third aspect, it is realized by the combination with the first or second aspect. In the third aspect, the linear type mover 66 is a non-magnetic material.

According to the third aspect, the magnetic linear type mover 66 is prevented from entering the first member 63 of the spline member 62.

The fourth aspect is realized by the combination with the first to third aspects. In the fourth aspect, a third guide unit 607 that guides the movement of the linear type mover 66 or the output unit 68 in the axis 600 direction is provided.

According to the fourth aspect, it is possible to prevent the magnetic flux from the linear type mover 66 or the linear type stator 67 from acting on the linear type mover 66 itself, and the design of the magnetic circuit becomes easy.

In the fifth aspect, it is realized by the combination with any one of the first to fourth aspects. In the fifth aspect, the mounting head unit 56 includes an actuator 6 and a capturing unit 70 that is fixed to the output unit 68 of the actuator 6 and captures the first object mounted on the second object.

According to the fifth aspect, in the mounting head unit 56, the coupling becomes unnecessary, and the weight of the actuator 6 can be reduced.

In the sixth aspect, it is realized by the combination with any one of the fifth aspects. In the sixth aspect, the mounting device 1 includes a mounting head unit 56 and a holding device for holding the second object.

According to the sixth aspect, in the mounting device 1, the coupling becomes unnecessary, and the weight of the actuator 6 can be reduced.

Although the actuator 6 and the mounting device 1 according to one or more embodiments have been described above based on the embodiment, the actuator and the mounting device according to the present disclosure are not limited to this embodiment. As long as it does not deviate from the gist of the present disclosure, the configuration in which various modifications conceived by those skilled in the art are applied to the present embodiment may also be included in the scope of the present disclosure.

1 Mounting device 12 Holding module (holding device)
56 Mounting head unit 6 Actuator 600 Axis line 61 Rotating motor 611 Rotating stator 612 Rotary stator 62 Spline member 63 First member 64 Second member 65 Linear motor 66 Linear mover 662 Permanent magnet 67 Linear stator 673 Coil 677 Permanent magnet 68 Output part 70 Capture part B1 Board P1 Parts

Claims (6)

A rotary motor with a rotary mover and
A first member that receives a rotational force from the rotary mover and rotates around one axis, and a second member that reciprocates on the axis and receives a rotational force from the first member to rotate around the axis. And, with a spline member,
A linear motor having a linear mover that receives a rotational force from the second member and rotates around the axis, and a linear stator that gives the linear mover a driving force along the axis direction. ,
An output unit provided at one end of the linear type mover and driven by the rotary type motor and the linear type motor.
Equipped with
The linear mover has a permanent magnet, and the linear stator has a coil that exerts a magnetic force on the permanent magnet.
The linear type stator penetrates the linear type stator in the axial direction, and rotates around the axis relative to the linear type stator.
The linear type mover and the second member are arranged side by side in the axial direction, and the linear type mover is fixed to the second member and does not move relative to the second member.
The second member has a second key groove into which a key fitted in the first key groove formed in the first member is inserted, and the position of the permanent magnet in the axial direction is the position of the second key groove. An actuator that overlaps part or all of the position . The actuator according to claim 1 , wherein the diameter of the linear mover and the diameter of the second member are the same . The actuator according to claim 1 or 2, wherein the portion of the linear mover other than the permanent magnet is a non-magnetic material. The actuator according to any one of claims 1 to 3, further comprising a linear type mover or a guide portion for guiding the movement of the output portion in the axial direction. The actuator according to any one of claims 1 to 4,
A capturing unit that is fixed to the output unit of the actuator and captures the first object mounted on the second object.
The mounting head unit is equipped with. The mounting head unit according to claim 5 and
A holding device for holding the second object and
A mounting device.

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