JP2012023869A - Actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator capable of making a movable body perform a rotary motion and a linear motion, with a simple structure and has improved adaptability to apparatuses.SOLUTION: A two-axis actuator 1 includes a rotary drive unit 1a enabling a rotary motion around a shaft by a shaft 2, and a linear drive unit 1b enabling a linear motion in the axial direction of the shaft 2. The two-axis actuator 1 comprises: a turn table 3 to mount apparatuses; and a drive transmission unit 1c to transmit the linear motion of the shaft 2 to the turn table 3 without changing the motion direction, and also transmit the rotary motion of the shaft 2 to the turn table 3 after changing the direction of axis rotation by 90 degrees.

Description

  The present invention relates to an actuator capable of linearly moving a moving body and allowing the moving body to rotate around a predetermined rotation axis.

  In devices such as machine tools, assembly machines, and measuring instruments, it may be required to move a moving body such as a workpiece, a tool, a component, or a probe linearly and rotationally move with respect to a predetermined rotation axis. As an actuator capable of both linear motion and rotational motion, an actuator in which a linear pulse motor and a rotary pulse motor are coupled in the axial direction is known (for example, see Patent Document 1).

  However, in the above known technique, the output shaft linearly moves in the axial direction and rotates around the axis, and the rotational motion and linear motion are directly applied to machine tools, assembly machines, measuring instruments, etc. It could not be said that it was in a form that could be easily applied to equipment, and there were cases where it was not easy to use.

JP-A-8-237931

  The present invention has been made to solve the above-described disadvantages, and provides an actuator that can be rotated and linearly moved around a predetermined axis and can be more easily applied to a device. With the goal.

  In order to solve the above problems, the present invention provides a turntable on which a device can be mounted in an actuator that enables both a rotational movement around an axis by a shaft and a linear movement in the axial direction. Is transmitted to the turntable without changing the motion direction, and the maximum feature is that the rotational motion of the shaft is transmitted to the turntable after changing the rotation axis by 90 degrees.

More details
A shaft provided to be capable of rotating around an axis and linearly moving in the axial direction;
A rotational drive device that electromagnetically applies a rotational torque around the shaft to the shaft;
A linear drive device that electromagnetically applies an axial thrust to the shaft, and
An actuator that causes the shaft to perform rotational movement about an axis and linear movement in an axial direction;
A substantially disk-shaped turntable that can be mounted with a moving body that is subject to rotational movement and linear movement and has a central axis perpendicular to the axis of the shaft;
A drive transmission device that transmits the linear motion of the shaft to the turntable without changing the direction of motion, and transmits the rotational motion of the shaft to the turntable by changing the rotation axis of the shaft vertically;
Is further provided.

Here, an actuator configured so that one shaft can perform both a rotational motion around the shaft axis and a linear motion in the axial direction of the shaft, in the following, in the sense that it has a degree of freedom with respect to two axes. This is called a biaxial actuator. In an actual device such as a machine tool, an assembly machine, or a measuring instrument, it is required to move the moving body linearly and to rotate the moving body around a rotation axis perpendicular to the traveling direction of the linear motion. There are many cases. In the present invention, the turntable is rotated around an axis perpendicular to the traveling direction of the shaft, using a rotary drive device and a linear drive device that rotate the shaft around the axis and linearly move in the axial direction of the shaft. Is possible. As a result, the biaxial actuator can be more easily applied to the device, and the application range of the biaxial actuator can be expanded.

  In the present invention, means for solving the above-described problems can be used in combination as much as possible.

  According to the present invention, the biaxial actuator can be easily applied to various devices, and the rotational motion and linear motion of the biaxial actuator can be transmitted to the moving body in each device.

It is a perspective view of the biaxial actuator which concerns on this invention. It is sectional drawing, a top view, a bottom view, and a side view of the biaxial actuator which concerns on this invention. It is sectional drawing of the rotational drive part in the biaxial actuator of this invention. It is a figure which shows the state which removed the housing in the rotational drive part of this invention. It is a perspective view of the spline nut in the present invention. It is a figure which shows the permanent magnet and coil vicinity in the rotation drive part of this invention. It is a perspective view containing the partial cross section of the linear drive part of this invention. It is a perspective view which shows the some coil in the linear drive part of this invention. It is a figure for demonstrating the action | operation principle of the linear drive part of this invention. It is a system diagram of the biaxial actuator of the present invention. It is sectional drawing of the drive transmission part of this invention, a top view, and a side view.

  Hereinafter, an exercise guidance device according to the present invention will be described in detail with reference to the drawings.

<Example 1>
FIG. 1 shows a perspective view of a biaxial actuator 1 in this embodiment. The biaxial actuator 1 is a composite actuator capable of causing the shaft 2 to perform a rotational motion around the axis and a linear motion in the axial direction, and includes a rotational drive unit 1a, a linear drive unit 1b, and a drive transmission unit 1c. Yes. In the rotation drive unit 1a, the shaft 2 can be rotated around the axis by the rotation torque around the axis acting on the shaft 2. Moreover, in the linear drive part 1b, when the axial driving force acts on the shaft 2, the shaft 2 can be linearly moved in the axial direction. Therefore, the shaft 2 can freely perform a rotational motion and a linear motion by the action of the rotational drive unit 1a and the linear drive unit 1b.

  Furthermore, in the drive transmission part 1c, the rotational motion and linear motion of the shaft 2 are transmitted to the turntable 3 via the transmission mechanism. The turntable 3 is capable of linear movement in the direction of the straight arrow in the drawing and rotation in the direction of the curved arrow in the drawing after the moving body in the device is mounted.

FIG. 2 shows a cross-sectional view, a plan view, a bottom view, and 2 of the biaxial actuator 1 in this embodiment.
A side view from the direction is shown. 2A is a cross-sectional view of the biaxial actuator, FIG. 2B is a plan view, FIG. 2C is a bottom view, and FIGS. 2D and 2E are side views. As can be seen from the cross-sectional view shown in FIG. 2 (a), the shaft 2 of the biaxial actuator 1 includes a spline shaft 2a on which the rotational torque around the axis of the shaft 2 acts in the rotational drive unit 1a, and a shaft in the linear drive unit 1b. The rod 2b on which the driving force in the direction acts is coupled at the connecting portion 2c so as to function as a single shaft 2.

  Next, the detailed structure of each of the rotation drive unit 1a, the rectilinear drive unit 1b, and the drive transmission unit 1c will be described. FIG. 3 shows a cross-sectional view of the rotation drive unit 1 a in the biaxial actuator 1. FIG. 4 is a perspective view showing a state in which the shaft 2 and spline nuts 10 and 11 and the rotary motor 4 are taken out of the rotation drive unit 1a. As shown in FIG. 3, the spline shaft 2 a rotatably accommodated in the housing 5 of the rotation drive unit 1 a is engaged with the two spline nuts 10 and 11 so that the linear movement is possible.

  Further, a rotary motor 4 for applying a rotational torque to the spline shaft 2a is formed between a portion of the spline shaft 2a where the spline nut 10 is engaged and a portion where the spline nut 11 is engaged. The spline nuts 10 and 11 are accommodated in nut holding members 12 and 13 formed of a combination of cylinders having different diameters, and rotate integrally with the nut holding members 12 and 13. The nut holding members 12 and 13 respectively accommodate the first cylindrical members 12a and 13a in which the side farther from the rotation motor 4 in the spline nuts 10 and 11 is accommodated, and the side closer to the rotation motor 4 in the spline nuts 10 and 11. It is comprised from 2nd cylindrical member 12b, 13b.

  The first cylindrical members 12a, 13a and the second cylindrical members 12b, 13b are a large-diameter cylindrical portion 12a1, 13a1, 12b1, 13b1 into which the spline nuts 10, 11 are inserted and a spline shaft 2a. Only a small diameter cylindrical portion 12a2, 13a2, 12b2, 13b2 having a relatively small diameter. The first cylindrical members 12a and 13a prevent the spline nuts 10 and 11 from coming off from the second cylindrical members 12b and 13b. The small-diameter cylindrical portions 12b2 and 13b2 of the second cylindrical members 12b and 13b extend in the direction of the rotary motor 4 and are arranged so that the ends thereof are opposed to each other. A gap may or may not be provided between the ends of the small diameter cylindrical portions 12b2 and 13b2.

  An annular permanent magnet 4b is provided on the outer peripheral surface of the second cylindrical members 12b and 13b near the ends of the small-diameter cylindrical portions 12b2 and 13b2 so that magnetic poles having different N and S poles appear alternately in the circumferential direction. It has been. A plurality of coils 4a are arranged so that the end faces of the coils face the outer peripheral surface of the permanent magnet 4b so as to surround the outer periphery of the annular permanent magnet 4b. A three-phase coil to which alternating currents of U, V, and W having different phases are applied is formed by the plurality of coils 4a. The coil 4a is provided with a core 4c for causing the magnetic field generated by the coil 4a to act on the permanent magnet 4b more efficiently. The core 4c has a cylindrical outer shape surrounding the permanent magnet 4b, and a center core 4d is extended toward the permanent magnet 4b (inner peripheral side). The coil 4a is formed of the center core 4d. It is formed in the form of being wound around. By fixing the core 4 c to the housing 5, the coil 4 a is also fixed to the housing 5.

  By flowing a three-phase alternating current through the plurality of coils 4a of the rotary motor 4, a rotating magnetic field acts on the permanent magnet 4b. And the nut holding members 12 and 13 rotate because rotational torque acts on the permanent magnet 4b. When the nut holding members 12 and 13 are rotated, the nut holding members 12 and 13 and the spline nuts 10 and 11 are rotated, and further, the spline shaft 2a engaged with the spline nuts 10 and 11 is rotated.

  The rotary bearings 14 and 15 are fitted on the outer sides of the first cylindrical members 12a and 13a near the ends of the small diameter cylindrical portions 12a2 and 13a2. The rotary bearings 14 and 15 support the nut holding members 12 and 13 and the spline nuts 10 and 11 rotatably with respect to the housing 5. For example, deep groove ball bearings are used for the rotary bearings 14 and 15. Thereby, the spline shaft 2a can smoothly rotate with respect to the housing 5.

  In FIG. 5, the perspective view of the spline nuts 10 and 11 engaged with the spline shaft 2a is shown. A plurality of ball rolling grooves 2c extending in the longitudinal direction are formed on the outer peripheral surface of the spline shaft 2a. A plurality of load ball rolling grooves 10a and 11a are formed on the inner peripheral surfaces of the spline nuts 10 and 11 so as to face the ball rolling grooves 2c of the spline shaft 2a.

  The spline nuts 10 and 11 are provided with cages 10c and 11c for holding the balls 10b and 11b. In the cages 10c and 11c, a plurality of ball circulation paths 10d and 11d are formed as rolling element circulation paths having a number corresponding to the number of load ball rolling grooves 10a and 11a of the spline nuts 10 and 11.

  A ball rolling groove 2c is formed on the outer peripheral surface of the spline shaft 2a, and the balls 10b and 11b are interposed between the spline nuts 10 and 11 and the spline shaft 2a. Smooth linear motion. Moreover, the tolerance with respect to the load of the direction orthogonal to the axis line of the spline shaft 2a can be enlarged. Moreover, it becomes possible to transmit the rotational torque which acts on the spline nuts 10 and 11 to the spline shaft 2a.

  FIG. 6 shows a plurality of permanent magnets 4b of the rotary motor 4 and a plurality of coils 4a facing the permanent magnets 4b. As described above, the rotary motor 4 is a synchronous rotary motor in which a plurality of coils 4a are opposed to a plurality of permanent magnets 4b. The coil 4a is formed by winding a copper wire in a ring shape, and is formed in a rectangular frame shape. In the present embodiment, the number of coils 4a is six, and two sets of three-phase coils are formed.

  The rotary motor 4 is adjacent to a magnetic sensor 6 that measures the rotation angle of the shaft 2 (spline shaft 2a). The magnetic sensor 6 detects a periodic change of the magnetic field when the permanent magnet 4b rotates. The magnetic sensor 6 mounted on the substrate is stored in a box-shaped storage container 6a, and then the periphery thereof is filled with a filler. The storage container 6a is fixed to the housing 5 with a set screw. As described above, the rotation drive unit 1a in the present embodiment causes a rotating magnetic field to act on the permanent magnet 4b by causing a three-phase alternating current to flow through the plurality of coils 4a of the rotary motor 4, and rotates the shaft 2. Torque is applied electromagnetically. Therefore, mechanical loss can be reduced and the shaft 2 can be rotated more efficiently. Moreover, the structure of the apparatus can be simplified.

  Next, the linear drive unit 1b of the biaxial actuator 1 will be described.

  FIG. 7 is a perspective view (including a partial cross section) of the linear drive unit 1b. As shown in FIG. 7, the linear drive unit 1 b includes a base 24 as an entire board, a linear housing 21 attached to the base 24, and a rod as a mover housed in the linear housing 21 so as to be movable in the axial direction. 2b and a plurality of coils 20 as stators that are stacked in the axial direction of the rod 2b and fixed to the linear housing 21 so as to penetrate the hole through the rod 2b.

The rod 2b is made of a nonmagnetic material such as stainless steel and has a hollow space inside. A plurality of cylindrical permanent magnets 2c are arranged in the axial direction of the rod 2b in the hollow space of the rod 2b. The permanent magnet 2c is magnetized in a cylindrical axial direction. And it arrange | positions so that the mutually same pole may oppose, ie, N pole and N pole, and S pole and S pole may oppose. Between the permanent magnets 6, a pole shoe 2d made of a magnetic material such as iron is interposed. Note that a tip member 25 is provided on the rotation drive unit 1a side of the linear housing 21, and a terminal member 23 is provided on the opposite side of the linear housing 21 from the rotation drive unit 1a. It plays a role of connection with the part 1b and connection between the linear drive part 1b and the drive transmission part 1c. Further, a sensor holder 26 is provided between the terminal member 23 and the linear housing 21, and the sensor holder 26 is provided with a magnetic sensor so that the position of the rod 2b in the axial direction can be detected. .

  FIG. 8 shows a detailed view of the coil 20 and the coil holder 22 that holds the coil 20. The coil 20 is a copper wire wound in an annular shape and is held by a coil holder 22. The coil holder 22 is a resin injection-molded product, and is composed of a plate-like holder main body 22a that is elongated in the arrangement direction of the coils 20, and a plurality of thin spacer portions 22b that hang down from the holder main body 22a. The adjacent coils 20 are insulated from each other by the spacer portion 22b. The spacer portion 22b is formed in an annular shape like the front shape of the coil 20. The coil 20 is accommodated in the linear housing 21 while being held by the coil holder 22.

  FIG. 9 is a cross-sectional view of the rod 2b and the coil 20, and is a view for explaining the operating principle of the linear drive unit 1b. A set of three-phase coils composed of U, V, and W phases is formed by three of the plurality of coils 20 arranged in succession. When a three-phase alternating current having a phase difference of 120 degrees is passed through the three-phase coil formed by the coil 20, a moving magnetic field that moves in the axial direction of the coil 20 is generated. The rod 2b obtains a thrust by the moving magnetic field and performs a linear motion relative to the coil 20 at the same speed as the moving magnetic field. Thus, in the linear drive part 1b of a present Example, a three-phase alternating current is sent through the three-phase coil formed with the some coil 20, and a thrust is made to act electromagnetically on the rod 2b. Therefore, mechanical loss can be reduced, and the shaft 2 can be caused to linearly move more efficiently. Moreover, the structure of the apparatus can be simplified.

  FIG. 10 is a system diagram of the biaxial actuator 1 in the present embodiment. This system includes a control system for the rotation drive unit 1a and a control system for the linear drive unit 1b. The control system of the rotation drive unit 1a is a magnetic sensor 6 that detects the rotation angle of the nut holding members 10 and 11 (shaft 2) of the rotary motor 4, and an angle calculation circuit that interpolates the signal output from the magnetic sensor 6. And a rotation motor driver 31 that controls the rotation motor 4 based on a rotation angle signal calculated by the interpolator 30. The rotation motor driver 31 controls the rotation motor 4 so that the rotation angles of the nut holding members 10 and 11 coincide with the command value. The magnetic sensor 6 and the interpolator 30 are connected by an encoder cable 32, and the coil 4 a of the rotary motor 4 and the power converter of the rotary motor driver 31 are connected by a dynamic cable 34. The interpolator 30 and the rotary motor driver 31 are accommodated in the control panel 33.

  Similarly, in the control system of the linear drive unit 1b, a magnetic sensor 35 that detects the position of the rod 2b of the linear drive unit 1b in the axial direction, a position calculation circuit 36 that interpolates a signal output from the magnetic sensor 35, and a position The driver 37 for linear drive part which controls the linear drive part 1b based on the signal of the position which the calculation circuit 36 calculated is comprised. The linear drive unit driver 37 controls the linear drive unit 1 so that the position of the rod 2b matches the command value. The magnetic sensor 35 and the position calculation circuit 36 are connected by an encoder cable 38. The coil 20 of the linear drive unit 1 b and the power converter of the linear drive unit driver 37 are connected by a dynamic cable 39. Similarly to the interpolator 30 and the rotary motor driver 31, the position calculation circuit 36 and the linear drive unit driver 37 are also accommodated in the control panel 33.

  Next, the drive transmission part 1c of a present Example is demonstrated using FIG. 11A is a cross-sectional view as seen from the front of the drive transmission unit 1c, FIG. 11B is a plan view, and FIGS. 11C and 11D are side views. The drive transmission unit 1c converts the rotary motion and linear motion of the shaft 2 driven by the rotary drive unit 1a and the linear drive unit 1b into rotational motion and linear motion of the turntable 3, thereby making the biaxial actuator 1 more It is a part that makes it easy to apply to actual equipment and makes it easy to use.

  As shown in FIG. 11, the drive transmission unit 1c shares the base 24 of the apparatus with the linear drive unit 1b. A second terminal member 50 is provided on the opposite side of the base 24 to the rotation drive unit 1 a and is fixed to the base 24. The drive transmission unit 1c is provided with a linear motion guide device 51. Specifically, a rail 51a as a guide member is passed between the terminal member 23 of the linear drive unit 1b and the second terminal member 50 in parallel with the linear motion direction of the shaft 2. The moving block 51b is engaged with the rail 51a so that linear movement is possible along the rail 51a.

  A drive transmission base 52 is fixed to the moving block 51b. The drive transmission base 52 is a member that interlocks each mechanical element for transmitting the rotational motion and linear motion of the shaft 2 to the turntable 3. In FIG. 11, the drive transmission base 52 is fixed to the moving block 51b by a flat moving block coupling portion 52a extending horizontally. As a result, the drive transmission base 52 can move smoothly along the rail 51 a of the linear motion guide device 51.

  In addition, on the opposite side of the moving block coupling portion 52a in the drive transmission base 52 from the linear drive portion 1b, a flat plate-shaped shaft coupling portion 52b extending vertically downward is provided. An end portion of the shaft 2 (rod 2a) is rotatably coupled to the shaft coupling portion 52b. Specifically, a first pulley unit 53 including a first pulley shaft 53a and a first pulley 53b is fixed to an end portion of the shaft 2, and the first pulley shaft 53a and the first pulley 53b are connected to the shaft. It is designed to rotate and linearly move in conjunction with the movement of 2. The shaft coupling portion 52b of the drive transmission base 52 has a first pulley shaft 53a coupled to the shaft 2 passing through the bearing 52c so as to be smoothly rotatable, and a first pulley fixed to the first pulley shaft 53a. 53b and the end of the shaft 2 are sandwiched with a gap. That is, the shaft coupling portion 52 b follows only the linear motion of the shaft 2. Then, the rotational motion (and linear motion) of the shaft 2 is transmitted to the first pulley 53b. With this configuration, the shaft coupling portion 52b of the drive transmission base 52 also has a function as a bearing that rotatably supports one end of the shaft 2.

  A flat plate-like second pulley support portion 52 d extends vertically upward from the moving block coupling portion 52 a of the drive transmission base 52. A second pulley unit 54 is rotatably supported by the second pulley support portion 52d. Specifically, the second pulley shaft 54a is rotatably supported by the second pulley support portion 52e via the bearing 52e. A second pulley 54b is fixed on the opposite side of the second pulley shaft 54a from the linear drive portion 1b. A first bevel gear 54c as a first gear is fixed to the linear drive portion 1b side of the second pulley shaft 54a. As a result, the second pulley 54b and the first bevel gear 54c, which are fixed coaxially with each other, are configured to be smoothly and rotatably supported by the second pulley support portion 52d.

  Further, the first pulley 53b and the second pulley 54b are coupled to each other by a belt 55 so as to be able to transmit the rotational motion thereof. Thereby, the rotational motion of the shaft 2 is transmitted to the first bevel gear 54c via the first pulley 53b, the belt 55, and the second pulley 54b.

From the upper end of the second pulley support portion 52e, a flat plate-like turntable support portion 52f extends horizontally toward the linear drive portion 1b. A turntable unit 56 is rotatably supported by the turntable support portion 52f. Specifically, a turntable shaft 56a is supported on the turntable support portion 52f via a bearing 52g so as to be smoothly rotatable. The turntable 3 is coaxially fixed to the upper end of the turntable shaft 56a. A second bevel gear 56b as a second gear is fixed to the lower end of the turntable shaft 56a. The second bevel gear 56b meshes with the first bevel gear 54c, and the rotation of the first bevel gear 54c is transmitted to the turntable 3 via the second bevel gear 56b.

  As described above, the rotational transmission and linear movement of the shaft 2 can be transmitted to the turntable 3 by the drive transmission unit 1c described above. At that time, the rotational motion around the axis of the shaft 2 can be converted into the rotational motion of the turntable 3 having a rotational axis that is 90 degrees different from that of the shaft 2. The first bevel gear 54c of the present embodiment has a rotation axis parallel to the axial direction of the shaft 2, and the second bevel gear 56b has a rotation axis perpendicular to the axial direction of the shaft 2. Yes. Then, the first bevel gear 54 c and the second bevel gear 56 b mesh with each other to transmit the rotational motion, thereby transmitting the rotational motion around the axis of the shaft 2 to the turntable 3. Therefore, the rotational motion around the axis of the shaft 2 can be more reliably converted into the rotational motion of the turntable 3 having a rotational axis different from that of the shaft 2 by a simpler mechanism.

  In the present embodiment, the rotational motion of the shaft 2 is transmitted to the first bevel gear 54c via the first pulley 53b, the belt 55, and the second pulley 54b. The error during transmission can be reduced, and the rotational motion of the shaft 2 can be transmitted to the first bevel gear 54c more accurately. Note that play, backlash, and the like in each mechanical element of the drive transmission unit 1c are appropriately adjusted according to the positional accuracy required for the moving body mounted on the turntable 3.

  In the biaxial actuator 1 shown in the present embodiment, rotational motion and propulsive force of linear motion are electromagnetically applied to the shaft 2 in which the spline shaft 2a and the rod 2b are integrated, so that rotational motion is performed. It is not necessary to provide an actuator and an actuator that performs linear motion separately, and the structure of the entire apparatus can be simplified. Further, in the biaxial actuator 1 shown in the present embodiment, the rotational drive unit 1 a and the linear drive unit 1 b are arranged in series in the axial direction of the shaft 2. Therefore, for example, it is not necessary to adopt a loading structure in which an actuator that performs rotational movement is mounted on a member that moves straight by an actuator that performs linear movement, so that the load required for the entire apparatus can be reduced and power consumption can be reduced. The device size can be reduced and the cost can be reduced.

  In this embodiment, the linear motion and rotational motion of the shaft 2 are transmitted upward from the first pulley unit 53 to the second pulley unit 54, and further from the first pulley unit 53 and the second pulley unit 54. Since the signal is transmitted back to the turntable unit 56 on the rotation drive unit 1a side, the overall length of the apparatus can be shortened. Moreover, since the rotational movement around the axis of the shaft 2 is converted into the horizontal rotation of the turntable 3 by the drive transmission unit 1c, the two-axis actuator can be easily applied to actual equipment such as a production apparatus and a measurement apparatus. It becomes possible.

  In the above embodiment, the rotation drive unit 1a corresponds to a rotation drive device. The linear drive unit 1b corresponds to a linear drive device. The drive transmission unit 1c corresponds to a drive transmission device. In the above embodiment, the combination of the first bevel gear 54c and the second bevel gear 56b is used as the combination of the first gear and the second gear, but this combination is not limited to the above. For example, a combination of hypoid gears may be used, or a worm gear that is a combination of a worm and a worm wheel may be used.

  In the above embodiment, the rotational motion of the shaft 2 is transmitted to the first bevel gear 54c via the first pulley 53b, the belt 55, and the second pulley 54b. The method of transmitting the motion to the first bevel gear (first gear) is not limited to this. You may attach a 1st gear directly to the edge part of the shaft 2, and you may transmit using another gear.

  In the above-described embodiment, the example in which the rotation drive unit 1a, the linear drive unit 1b, and the drive transmission unit 1c are arranged in series in the axial direction of the shaft 2 has been described. However, the rotation drive unit 1a and the linear drive unit 1b are described. The positional relationship of the drive transmission unit 1c may be changed as appropriate. For example, the rotary drive unit 1a may be placed on the linear drive unit 1b, and the spline shaft 2a and the rod 2b may be connected by a pulley and a belt. Further, other mechanisms such as a gear may be used.

  DESCRIPTION OF SYMBOLS 1 ... Biaxial actuator, 1a ... Rotary drive part, 1b ... Linear drive part, 1c ... Drive transmission part, 2 ... Shaft, 2a ... Spline shaft, 2b ... Rod DESCRIPTION OF SYMBOLS 3 ... Turntable, 4 ... Rotary motor, 5 ... Housing, 6 ... Magnetic sensor, 7 Cage, 10, 11 ... Spline nut, 12, 13 ... Nut holding member, DESCRIPTION OF SYMBOLS 20 ... Coil, 22 ... Coil holder, 51 ... Motion guide apparatus, 52 ... Drive transmission base, 53 ... 1st pulley unit, 54 ... 2nd pulley unit, 55 ...・ Belt, 56 ... Turntable unit

Claims (6)

A shaft provided to be capable of rotating around an axis and linearly moving in the axial direction;
A rotational drive device that electromagnetically applies a rotational torque around the shaft to the shaft;
A linear drive device that electromagnetically applies an axial thrust to the shaft, and
An actuator that causes the shaft to perform rotational movement about an axis and linear movement in an axial direction;
A substantially disk-shaped turntable that can be mounted with a moving body that is subject to rotational movement and linear movement and has a central axis perpendicular to the axis of the shaft;
A drive transmission device that transmits the linear motion of the shaft to the turntable without changing the direction of motion, and transmits the rotational motion of the shaft to the turntable by changing the rotation axis of the shaft vertically;
An actuator further comprising:   The actuator according to claim 1, wherein the rotation driving device, the linear driving device, and the drive transmission device are arranged in series in an axial direction of the shaft. The drive transmission device is
A first gear having a rotational axis parallel to the axial direction of the shaft and to which the rotational motion of the shaft is transmitted;
A second gear having a rotational axis perpendicular to the axial direction of the shaft and transmitting rotational motion to the turntable;
Have
3. The rotary motion around the shaft of the shaft is transmitted to the turntable by the first gear and the second gear meshing with each other to transmit the rotational motion. 4. Actuator. Transmission of rotational motion from the shaft to the first gear is
A first pulley provided coaxially with the shaft;
A second pulley provided coaxially with the first gear;
The actuator according to claim 3, wherein the actuator is performed by a belt hung between the first pulley and the second pulley. The rotational drive device is
A plurality of permanent magnets provided so that N-pole and S-pole magnetic poles are alternately formed in the circumferential direction of the shaft;
A plurality of coils arranged so as to surround the shaft in the circumferential direction and fixed so as to face the plurality of permanent magnets;
Have
5. The actuator according to claim 1, wherein a rotational torque around the shaft is applied to the shaft by generating a rotating magnetic field by energizing the plurality of coils. 6. The linear drive device is:
A plurality of permanent magnets magnetized in the axial direction inside the shaft;
A plurality of coils arranged in the axial direction of the shaft so that the shaft penetrates the space of the central portion,
Adjacent permanent magnets among the plurality of permanent magnets are arranged so that the same poles face each other,
The actuator according to claim 1, wherein an axial driving force is applied to the shaft by generating a moving magnetic field by energizing the plurality of coils.

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