JP6990331B2 - Capacitive coupling method Touch panel manufacturing method - Google Patents

Description

The present invention relates to a display device with a touch panel, and more particularly to a display device with a touch panel provided with a capacitance coupling type touch panel.

As the main method of the touch panel, a method of detecting a change in light and a method of detecting a change in electrical characteristics are known. Further, as a method for detecting a change in electrical characteristics, a capacitance coupling method is known. (See Patent Document 1 and Patent Document 2 below)

9 to 11 are views relating to a conventional capacitive touch panel, FIG. 9 is a plan view showing an electrode pattern, and FIG. 10 is a cross section showing a cross-sectional structure along the FF'line of FIG. FIG. 11 is a cross-sectional view showing a cross-sectional structure along the GG'line of FIG.

As shown in FIGS. 9 to 11, the conventional capacitance coupling type touch panel extends in the first direction (for example, the X direction) and intersects the first direction in the second direction (for example, Y). It has a plurality of electrodes 1X attached to the direction) and a plurality of electrodes 2Y intersecting the electrodes 1X and extending in the second direction and attached to the first direction. The plurality of electrodes 1X are arranged on the substrate 11 and covered with an insulating film 12 formed on the substrate 11. The plurality of electrodes 2Y are arranged on the insulating film 12 and covered with the protective film 13 formed on the insulating film 12. The electrodes 1X and 2Y are made of a transparent conductive material such as ITO (Indium Tin Oxide).

Japanese Unexamined Patent Publication No. 2008-65748 Japanese Patent Application No. 2007-175050

In the conventional capacitive touch panel, as shown in FIGS. 9 to 11, a plurality of electrodes 1X and a plurality of electrodes 2Y are formed in different conductive layers (lower layer and upper layer) via the insulating film 12. ing. In the case of such an electrode structure, the protective film 13 formed on the insulating film 12 and the upper electrode 1X is distorted by the upper electrode 1X. Since the optical path length is different between the upper layer and the upper layer, a color difference occurs between the electrode 1X in the lower layer and the electrode 2Y in the upper layer, and the electrode patterns of the electrodes 1X and 2Y become apparent. Such actualization of the electrode pattern causes deterioration of the optical characteristics and causes deterioration of the characteristics of the display device incorporating the touch panel, so countermeasures are required.

An object of the present invention is to provide a technique capable of suppressing deterioration of the characteristics of a touch panel.

The above and other objects and novel features of the invention will become apparent in the description and accompanying drawings herein.

A brief description of the representative inventions disclosed in the present application is as follows.

(1) The display device with a touch panel includes a display panel and a capacitance coupling type touch panel arranged on the surface of the display panel on the observer side, and the touch panel is on a substrate in a first direction. A plurality of first electrodes extending in the second direction intersecting with the first direction, and extending in the second direction intersecting with the first electrode and extending in the second direction. It has a plurality of second electrodes arranged side by side in one direction, and each of the plurality of first electrodes is formed in a layer different from the second electrode and intersects with the second electrode. It has a first portion and a second portion formed in the same layer separately from the second electrode, and the first portion includes the first portion and the second electrode. It is connected to the second portion via a contact hole formed in the insulating film between the two.

(2) In the above (1), the first portion of the first electrode is formed in a layer above the second electrode.

(3) In the above (1), the first portion of the first electrode is formed in a layer lower than the second electrode.

(4) In any of the above (1) to (3), the second electrode has a portion having a width wider than the width of the portion intersecting the first electrode between the first electrodes. The first electrode has a portion having a width wider than the width of the portion intersecting the second electrode between the second electrodes.

(5) In any of the above (1) to (4), the first and second electrodes are made of a transparent conductive material.

(6) In any of the above (1) to (5), the protective film formed on the substrate so as to cover the first and second electrodes is provided.

A brief description of the effects obtained by representative of the inventions disclosed in the present application is as follows.

According to the present invention, it is possible to suppress deterioration of the characteristics of the touch panel.

It is a top view which shows the electrode pattern of the touch panel incorporated in the display device with a touch panel of Embodiment 1 of this invention. It is an enlarged plan view of a part of FIG. It is sectional drawing which shows the cross-sectional structure along the AA' line of FIG. It is sectional drawing which shows the cross-sectional structure along the BB'line of FIG. It is a block diagram which shows the schematic structure of the display device with a touch panel of Embodiment 1 of this invention. It is a top view which shows the electrode pattern of the touch panel incorporated in the display device with a touch panel of Example 2 of this invention. It is sectional drawing which shows the cross-sectional structure along the DD'line of FIG. It is sectional drawing which shows the cross-sectional structure along the E-E'line of FIG. It is a top view which shows the electrode pattern of the touch panel of the conventional capacitance coupling type. It is sectional drawing which shows the cross-sectional structure along the FF'line of FIG. It is sectional drawing which shows the cross-sectional structure along the GG'line of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In all the drawings for explaining the embodiments of the invention, those having the same function are designated by the same reference numerals, and the repeated description thereof will be omitted.

[Example 1]
In the first embodiment, as an example of the display panel, an example in which the present invention is applied to a display device with a touch panel provided with a touch panel on a liquid crystal display panel will be described.

1 to 5 are views relating to the display device with a touch panel according to the first embodiment of the present invention, FIG. 1 is a plan view showing an electrode pattern of a touch panel incorporated in the display device with a touch panel, and FIG. 2 is a part of FIG. 3 is an enlarged plan view, FIG. 3 is a cross-sectional view showing a cross-sectional structure along the line AA'of FIG. 1, FIG. 4 is a cross-sectional view showing a cross-sectional structure along the line B-B'of FIG. 1, and FIG. Is a block diagram showing a schematic configuration of a display device with a touch panel. In addition, in FIG. 5, the touch panel 20 shows the cross-sectional structure along the CC'line of FIG.

As shown in FIG. 5, the display device with a touch panel of the first embodiment includes a liquid crystal display panel 30, a capacitive coupling type touch panel 20 arranged on the surface of the liquid crystal display panel 30 on the observer side, and the like. The liquid crystal display panel 30 is provided with a backlight 40 arranged under the surface opposite to the observer side. As the liquid crystal display panel 30, for example, a liquid crystal display panel of an IPS system, a TN system, a VA system, or the like is used.

As shown in FIGS. 1 to 4, the touch panel 20 extends in a first direction (for example, the X direction) and has a predetermined arrangement pitch in a second direction (for example, the Y direction) intersecting with the first direction. It has a plurality of electrodes 1X juxtaposed with the above electrode 1X, and a plurality of electrodes 2Y intersecting the electrode 1X and extending in the second direction and juxtaposed in the first direction at a predetermined arrangement pitch. There is.

Each of the plurality of electrodes 2Y has an electrode pattern in which a first portion 2a and a second portion 2b having a width wider than the width of the first portion 2a are alternately arranged in the second direction. It is formed. Each of the plurality of electrodes 2Y is arranged on the surface of the substrate 11 on the observer side, and is covered with the insulating film 12 formed on the upper layer thereof. As the substrate 11, a transparent insulating substrate such as glass is used.

Each of the plurality of electrodes 1X has an electrode pattern in which a first portion 1a and a second portion 1b having a width wider than the width of the first portion 1a are alternately arranged in the first direction. It is formed. The first portion 1a of each of the plurality of electrodes 1X is formed in a conductive layer different from that of the electrode 2Y, and intersects the first portion 2a of the electrode 2Y in a plane. The second portion 1b of each of the plurality of electrodes 1X is formed in a conductive layer on the same layer as the electrode 2Y separately from the electrode 2Y. In this embodiment, the first portion 1a of the electrode 1X is formed in a layer above the electrode 2Y.

The second portion 1b of each of the plurality of electrodes 1X is covered with the insulating film 12 like the electrodes 2Y. The first portion 1a of each of the plurality of electrodes 1X is arranged on the insulating film 12 and covered with the protective film 13 formed on the insulating film 12.

The first portion 1a of the electrode 1X intersects the first portion 2a of the electrode 2Y in a plane, and the first portion 1b of the electrode 1X is formed on two second portions 1b adjacent to each other with the first portion 2a interposed therebetween. The contact holes 12a formed in the insulating film 12 which is the interlayer insulating film between the portion 1a and the electrode 2Y are electrically and mechanically connected to each other.

That is, each of the plurality of electrodes 1X is formed in a conductive layer different from the electrode 2Y, and the first portion 1a intersecting with the electrode 2Y and the electrode 2Y are separated from each other and formed in the same layer as the electrode 2Y. The first portion 1a of the electrode 1X has a second portion 1b to be formed, and the first portion 1a of the electrode 1X is formed through a contact hole 12a formed in the insulating film 12 between the first portion 1a and the electrode 2Y. It is connected to the second portion 1b of.

The second portion 2b of the electrode 2Y is arranged between the first portions 1a of the two adjacent electrodes 1X when viewed in a plane. The second portion 1b of the electrode 1X is arranged between the first portions 2a of the two adjacent electrodes 2Y when viewed in a plane.

That is, the electrode 2Y has a portion having a width wider than the width of the portion intersecting the electrode 1X between the electrodes 1X, and the electrode 1X has a portion having a width wider than the width of the portion intersecting the electrode 2Y between the electrodes 2Y. have.

The electrodes 1X and 2Y are made of a highly transparent material, for example, a transparent conductive material such as ITO (Indium Tin Oxide).

Note that FIG. 5 schematically shows that the capacitance of C1 and C3 is formed between the observer's finger 50 and the electrode 1X, and the capacitance of C2 is formed between the observer's finger 50 and the electrode 2Y. Shows. The touch panel 20 of this embodiment detects the capacitance difference in the coupling capacitance between the electrode 1X and the electrode 2Y, and detects the touch position coordinates in the touch surface of the touch panel 20 touched by the observer's finger 50.

Next, the manufacturing method of the touch panel 20 of this embodiment will be described with reference to FIGS. 1 to 4.

First, a first conductive film made of a transparent conductive material (for example, ITO) is formed on the surface of the substrate 11 on the observer side.

Next, for example, a positive resist is used to form a first mask of the electrode pattern on the first conductive film, and then the first mask is used as an etching mask to obtain the first conductive film. By etching, the electrode 2Y and the second portion 1b of the electrode 1X are formed on the substrate 11.

Next, the first mask is removed, and then an insulating film 12 made of, for example, a negative resist is formed on the substrate 11 including the electrode 2Y and the second portion 1b of the electrode 1X. In this step, the second portion 1b of the electrode 2Y and the electrode 1X is covered with the insulating film 12.

Next, a contact hole 12a is formed in a necessary portion of the insulating film 12, and then a second conductive film made of a transparent conductive material (for example, ITO) is formed on the insulating film 12 including the inside of the contact hole 12a. ..

Next, for example, a positive resist is used to form a second mask of the electrode pattern on the second conductive film, and then the second mask is used as an etching mask to obtain the second conductive film. By etching, the first portion 1a of the electrode 1X is formed on the insulating film 12. In this step, the first portion 1a of the upper layer is electrically and mechanically connected to the second portion 1b of the lower layer via the contact hole 12a. Further, the first portion 1a of the upper layer intersects with the first portion 1a of the electrode 2Y of the lower layer.

Next, by removing the second mask and then forming a protective film 13 made of, for example, a negative resist, on the insulating film 12 including the first portion 1a of the electrode 1X, FIGS. 1 to 1 to FIG. It has the structure shown in 4. In this step, the first portion 1a of the electrode 1X is covered with the protective film 13.

The formation of the peripheral wiring pattern can be inserted at an appropriate place between the above steps.

By the way, in the conventional capacitive touch panel, as shown in FIGS. 9 to 11, the plurality of electrodes 1X and the plurality of electrodes 2Y are formed on different conductive layers (lower layer and upper layer) via the insulating film 12. It is formed. In the case of such an electrode structure, the protective film 13 formed on the insulating film 12 and the upper electrode 1X is distorted by the upper electrode 1X. Since the optical path length is different between the upper layer and the upper layer, a color difference occurs between the electrode 2Y in the lower layer and the electrode 1X in the upper layer, and the electrode patterns of the electrode 1X and the electrode 2Y become apparent.

On the other hand, in the capacitive touch panel 20 of the present embodiment, as shown in FIGS. 1 to 4, the electrode 1X is formed in a layer different from the electrode 2Y so as to intersect the electrode 2Y. It has a first portion 1a and a second portion 1b formed in the same layer as the electrode 2Y separately from the electrode 2Y, and the first portion 1a is a combination of the first portion 1a and the electrode 2Y. It is connected to the second portion 1b via the contact hole 12a formed in the insulating film 12 between them.

In the case of such an electrode structure, since a uniform film-forming surface can be provided to the protective film 13, distortion caused by the protective film 13 can be suppressed, and an electrode pattern caused by a color difference due to the distortion of the protective film 13 appears. It is possible to suppress the change. As a result, deterioration of the optical characteristics due to the manifestation of the electrode pattern can be suppressed, so that deterioration of the characteristics of the display device incorporating the touch panel 20 can be suppressed.

Further, since the portion where the color difference occurs can be minimized, that is, only the first portion 1a of the electrode 1X can be used, the actualization of the electrode pattern caused by the color difference due to the optical path difference can be suppressed. As a result, deterioration of the optical characteristics due to the manifestation of the electrode pattern can be suppressed, so that deterioration of the characteristics of the display device incorporating the touch panel 20 can be suppressed.

Further, when a defect occurs in the first portion 1a (crosslinked portion) formed on the upper layer, it can be repaired by re-starting the step of forming the first portion 1a, and optics due to the manifestation of the electrode pattern. It is possible to suppress the deterioration of the characteristics and improve the workability.

[Example 2]
6 to 8 are views according to the display device with a touch panel according to the second embodiment of the present invention, FIG. 6 is a plan view showing an electrode pattern of a touch panel incorporated in the display device with a touch panel, and FIG. 7 is a D- A cross-sectional view showing a cross-sectional structure along the D'line, FIG. 8 is a cross-sectional view showing a cross-sectional structure along the EE'line of FIG.

The display device with a touch panel of the second embodiment basically has the same configuration as that of the first embodiment, and the following configurations are different.

That is, in the above-mentioned Example 1, as shown in FIGS. 1 to 4, the electrode 2Y and the second portion 1b of the electrode 1X are formed in the lower conductive layer, and the electrode 1X is formed in the conductive layer above this. An example in which the first portion 1a is formed has been described, but in the second embodiment, as shown in FIGS. 6 to 8, the first portion 1a of the electrode 1X is formed on the lower conductive layer, and the first portion 1a is formed from this. A second portion 1b of the electrode 2Y and the electrode 1X is formed on the upper conductive layer.

The first portion 1a (lower layer in this embodiment) of the electrode 1X intersects the first portion 2a of the electrode 2Y in a plane, and two second portions 1b adjacent to each other with the first portion 2a in between. (In this embodiment, the upper layer), electrically and mechanically, respectively, via a contact hole 12a formed in an insulating film 12 which is an interlayer insulating film between the first portion 1a of the electrode 1X and the electrode 2Y. It is connected.

Also in the second embodiment, since it is possible to suppress the manifestation of the electrode pattern caused by the color difference due to the distortion of the protective film 13 and the manifestation of the electrode pattern caused by the color difference due to the optical path difference, the optical characteristics due to the manifestation of the electrode pattern can be suppressed. Deterioration can be suppressed, and deterioration of the characteristics of the display device incorporating the touch panel 20 can be suppressed.

In the above-described embodiment, a display device with a touch panel provided with a touch panel on the liquid crystal display panel has been described as an example of the display panel, but the present invention is not limited to this, and the organic EL display panel and the inorganic EL display are not limited thereto. It can be applied to a display device with a touch panel having a touch panel on another display panel such as a panel.

Although the invention made by the present inventor has been specifically described above based on the above-mentioned Examples, the present invention is not limited to the above-mentioned Examples and can be variously modified without departing from the gist thereof. Of course.

1X Electrode 1a 1st part 1b 2nd part 2Y electrode 2a 1st part 2b 2nd part 11 Substrate 12 Insulation film 12a Contact hole 13 Protective film 20 Touch panel 30 Liquid crystal display panel 40 Backlight

Claims (4)

A first sensor electrode including a substrate, a plurality of rectangular first electrodes arranged on the substrate, and a first connection electrode connecting the first electrodes having a smaller area than the first electrode and adjacent to the first electrode. ,
A second electrode connecting a plurality of rectangular second electrodes arranged on the substrate at intervals parallel to each side of the first electrode and the second electrode having a smaller area than the second electrode and adjacent to the second electrode. A second sensor electrode with a connection electrode, and
The first connecting electrode on the substrate, the first electrode, and one insulating film covering the second electrode are provided.
The second connection electrode is connected to the end of the second electrode and the end of the adjacent second electrode via a contact hole provided in the insulating film.
The first sensor electrode extends in the first direction, the second sensor electrode extends in the second direction intersecting the first direction, and the first connection electrode and the second connection electrode of the first sensor electrode. The second connection electrode of the sensor electrode is a method for manufacturing a capacitance coupling type touch panel that intersects via the insulating film.
The step of forming the first conductive film on the substrate and
The step of forming an etching mask made of a positive resist on the first conductive film, and
A step of etching the first conductive film to form the first electrode, the first connection electrode, and the second electrode.
The step of removing the etching mask on the first conductive film and
A step of forming the insulating film made of a negative resist on the first electrode, the first connection electrode, and the second electrode on the substrate.
A step of forming a contact portion on the negative resist on the second electrode, and
The step of forming the second conductive film on the insulating film and
The step of forming an etching mask on the second conductive film and
The step of etching the second conductive film to form the second connection electrode, and
A method for manufacturing a capacitance coupling type touch panel, which comprises a step of removing an etching mask on the second conductive film. The method for manufacturing a capacitive coupling type touch panel according to claim 1, further comprising a step of forming a protective film made of a negative resist on the second connection electrode and the insulating film. The method for manufacturing a capacitive touch panel according to claim 2, wherein the first conductive film is obtained by forming ITO on the substrate. The method for manufacturing a capacitive touch panel according to claim 3, wherein the second conductive film has ITO formed on the insulating film.

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