JP6985646B2 - Liquid discharge head, liquid discharge unit, device that discharges liquid - Google Patents

Liquid discharge head, liquid discharge unit, device that discharges liquid Download PDF

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JP6985646B2
JP6985646B2 JP2018032970A JP2018032970A JP6985646B2 JP 6985646 B2 JP6985646 B2 JP 6985646B2 JP 2018032970 A JP2018032970 A JP 2018032970A JP 2018032970 A JP2018032970 A JP 2018032970A JP 6985646 B2 JP6985646 B2 JP 6985646B2
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将紀 加藤
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Ricoh Co Ltd
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Description

本発明は、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置に関する。 The present invention relates to a liquid discharge head, a liquid discharge unit, and a device for discharging a liquid.

液体吐出ヘッドにおいては、個別液室内の液体を加圧したときの圧力変動による圧力波が共通流路(共通液室ともいう。)に伝搬し、同じ個別液室や他の個別液室に再伝搬するクロストーク(相互干渉)によって吐出特性が低下する。 In the liquid discharge head, the pressure wave due to the pressure fluctuation when the liquid in the individual liquid chamber is pressurized propagates to the common flow path (also referred to as the common liquid chamber) and reappears to the same individual liquid chamber or another individual liquid chamber. Discharge characteristics deteriorate due to propagating crosstalk (mutual interference).

従来、1つの圧力室(個別液室)に対して2本の流体抵抗路を配置し、2本の流体抵抗路はそれぞれ開口(フィルタ)を介して保持基板の共通流路に通じている液体吐出ヘッドが知られている(特許文献1)。 Conventionally, two fluid resistance paths are arranged for one pressure chamber (individual liquid chamber), and each of the two fluid resistance paths is a liquid that leads to a common flow path of a holding substrate via an opening (filter). A discharge head is known (Patent Document 1).

特開2014−177101号公報Japanese Unexamined Patent Publication No. 2014-177101

上述した特許文献1に開示の構成にあっては、2本の流体抵抗路がそれぞれ通じる開口(フィルタ)は共通流路に直接臨んでいるので、個別液室で発生した残留振動による圧力波は、2本の流体抵抗路からそれぞれの開口を介して共通流路に伝搬する。 In the configuration disclosed in Patent Document 1 described above, since the opening (filter) through which the two fluid resistance paths communicate directly faces the common flow path, the pressure wave due to the residual vibration generated in the individual liquid chambers is generated. It propagates from the two fluid resistance paths to the common flow path through the respective openings.

このとき、個別液室から一方の開口を通じて共通流路に伝搬した圧力波が他方の開口を通じて個別液室に戻る時間と、他方の開口を通じて共通流路に伝搬した圧力波が一方の開口を通じて個別液室に戻る時間との間にほとんど差がない。 At this time, the time for the pressure wave propagating from the individual liquid chamber to the common flow path through one opening to return to the individual liquid chamber through the other opening and the pressure wave propagating to the common flow path through the other opening are individual through one opening. There is almost no difference between the time to return to the liquid chamber.

そのため、共通流路を介したクロストークを十分に抑制することができず、安定した吐出特性が得られないという課題がある。 Therefore, there is a problem that crosstalk via the common flow path cannot be sufficiently suppressed and stable discharge characteristics cannot be obtained.

本発明は上記の課題に鑑みてなされたものであり、安定した吐出特性を得ることを目的とする。 The present invention has been made in view of the above problems, and an object thereof is to obtain stable discharge characteristics.

上記の課題を解決するため、本発明に係る液体吐出ヘッドは、
液体を吐出する複数のノズルにそれぞれ通じる複数の個別液室と、
前記複数の個別液室にそれぞれ通じる複数の個別供給流路と、
前記複数の個別供給流路に通じる供給側共通流路と、
前記供給側共通流路と1又は2以上の前記個別供給流路との間に介在する中間供給流路と、を備え、
前記複数の個別供給流路は、それぞれ、
第1供給側流体抵抗路及び第2供給側流体抵抗路と、
前記第1供給側流体抵抗路に通じる第1個別供給口と、
前記第2供給側流体抵抗路に通じる第2個別供給口と、を含み、
前記第1供給側流体抵抗路の長さと前記第2供給側流体抵抗路の長さが異なり、
前記中間供給流路は、
1又は複数の前記第1個別供給口に通じる第1中間供給流路と、
1又は複数の前記第2個別供給口に通じる第2中間供給流路と、を含み、
前記第1中間供給流路と前記第2中間供給流路とは分離されており、
前記第2個別供給口から前記第2供給側流体抵抗路までの流路の長さは前記第1個別供給口から前記第1供給側流体抵抗路までの長さよりも長く、
前記第2個別供給口から前記第2供給側流体抵抗路までの流路の開口断面積は前記第1個別供給口から前記第1供給側流体抵抗路までの流路の開口断面積よりも大きい
構成とした。
In order to solve the above problems, the liquid discharge head according to the present invention is
Multiple individual liquid chambers that lead to multiple nozzles that discharge liquid, and
A plurality of individual supply channels leading to each of the plurality of individual liquid chambers,
A common flow path on the supply side leading to the plurality of individual supply flow paths,
An intermediate supply flow path interposed between the supply-side common flow path and one or more individual supply flow paths is provided.
Each of the plurality of individual supply channels
The first supply side fluid resistance path and the second supply side fluid resistance path,
The first individual supply port leading to the first supply side fluid resistance path,
Includes a second individual supply port leading to the second supply side fluid resistance path.
The length of the first supply-side fluid resistance path and the length of the second supply-side fluid resistance path are different.
The intermediate supply flow path is
A first intermediate supply flow path leading to one or more of the first individual supply ports,
Includes a second intermediate supply channel leading to one or more of the second individual supply ports.
The first intermediate supply flow path and the second intermediate supply flow path are separated from each other.
The length of the flow path from the second individual supply port to the second supply-side fluid resistance path is longer than the length from the first individual supply port to the first supply-side fluid resistance path.
The opening cross-sectional area of the flow path from the second individual supply port to the second supply-side fluid resistance path is larger than the opening cross-sectional area of the flow path from the first individual supply port to the first supply-side fluid resistance path. <br/> It was configured.

本発明によれば、安定した吐出特性を得ることができる。 According to the present invention, stable discharge characteristics can be obtained.

本発明の第1実施形態に係る液体吐出ヘッドのノズル配列方向と直交する方向に沿う図3のC−Cに相当する断面説明図である。It is sectional drawing corresponding to CC of FIG. 3 along the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 1st Embodiment of this invention. 同じく図3のD−D線に相当する断面説明図である。Similarly, it is a cross-sectional explanatory view corresponding to the DD line of FIG. 同ヘッドの図1のA−A線に相当するノズル板側から見た平面説明図である。It is a plane explanatory view seen from the nozzle plate side corresponding to line AA of FIG. 1 of the head. 同じく図1のB−B線に相当する共通流路部材側から見た平面説明図である。It is also a plan explanatory view seen from the common flow path member side corresponding to the line BB of FIG. 圧電素子に与える印加電圧の変化と圧電素子による個別液室の圧力変動及び共通流路からの戻り圧力波による個別液室の圧力変動を説明する説明図である。It is explanatory drawing explaining the change of the applied voltage given to a piezoelectric element, the pressure fluctuation of an individual liquid chamber by a piezoelectric element, and the pressure fluctuation of an individual liquid chamber by a return pressure wave from a common flow path. 本発明の第2実施形態に係る液体吐出ヘッドの要部分解平面説明図である。It is a disassembled plane explanatory view of the main part of the liquid discharge head which concerns on 2nd Embodiment of this invention. 本発明の第3実施形態に係る液体吐出ヘッドの要部分解平面説明図である。It is a disassembled plane explanatory view of the main part of the liquid discharge head which concerns on 3rd Embodiment of this invention. 本発明の第4実施形態に係る液体吐出ヘッドの要部平面説明図である。It is a plane explanatory view of the main part of the liquid discharge head which concerns on 4th Embodiment of this invention. 本発明に係る液体を吐出する装置の一例の要部平面説明図である。It is a plane explanatory view of the main part of an example of the apparatus which discharges a liquid which concerns on this invention. 同装置の要部側面説明図である。It is explanatory drawing of the main part side surface of the apparatus. 本発明に係る液体吐出ユニットの他の例の要部平面説明図である。It is a plane explanatory view of the main part of another example of the liquid discharge unit which concerns on this invention. 本発明に係る液体吐出ユニットの更に他の例の正面説明図である。It is a front explanatory view of still another example of the liquid discharge unit which concerns on this invention.

以下、本発明の実施形態について添付図面を参照して説明する。本発明の第1実施形態に係る液体吐出ヘッドについて図1ないし図4を参照して説明する。図1は同ヘッドのノズル配列方向と直交する方向に沿う図3のC−Cに相当する断面説明図、図2は同じく図3のD−D線に相当する断面説明図である。図3は同ヘッドの図1のA−A線に相当するノズル板側から見た平面説明図、図4は同じく図1のB−B線に相当する共通流路部材側から見た平面説明図である。 Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The liquid discharge head according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 4. FIG. 1 is a cross-sectional explanatory view corresponding to CC of FIG. 3 along a direction orthogonal to the nozzle arrangement direction of the head, and FIG. 2 is a cross-sectional explanatory view corresponding to the DD line of FIG. FIG. 3 is a plan explanatory view of the head seen from the nozzle plate side corresponding to the line AA of FIG. 1, and FIG. 4 is a plan view of the head seen from the common flow path member side corresponding to the line BB of FIG. It is a figure.

液体吐出ヘッド100は、ノズル板1と、流路板2と、壁面部材である振動板部材3と、圧力発生素子である圧電素子11と、保持基板50と、共通流路部材80とを備えている。ここで、流路板2及び振動板部材3及び圧電素子11で構成される部分が液室基板20となる。 The liquid discharge head 100 includes a nozzle plate 1, a flow path plate 2, a diaphragm member 3 which is a wall surface member, a piezoelectric element 11 which is a pressure generating element, a holding substrate 50, and a common flow path member 80. ing. Here, the portion composed of the flow path plate 2, the diaphragm member 3, and the piezoelectric element 11 is the liquid chamber substrate 20.

ノズル板1には、液体を吐出する複数のノズル4が形成されている。 A plurality of nozzles 4 for discharging liquid are formed on the nozzle plate 1.

流路板2及び振動板部材3で構成される液室基板20は、複数のノズル4が通じる複数の個別液室6と、複数の個別液室6にそれぞれ通じる複数の個別供給流路5を形成している。 The liquid chamber substrate 20 composed of the flow path plate 2 and the diaphragm member 3 has a plurality of individual liquid chambers 6 through which the plurality of nozzles 4 pass, and a plurality of individual supply flow paths 5 each through the plurality of individual liquid chambers 6. Is forming.

個別供給流路5は、個別液室6に通じる第1供給側流体抵抗路7A及び第2供給側流体抵抗路7Bで構成される流体抵抗部7と、第1供給側流体抵抗路7Aに通じる第1個別供給口9Aと、第2供給側流体抵抗路7Bが通じる供給側導入流路8B、供給側導入流路8Bに通じる第2個別供給口9Bを含む。流体抵抗部7及び供給側導入流路8Bは流路板2に設けた溝部で形成し、第1個別供給口9A、第2個別供給口9Bは、振動板部材3に形成した貫通穴で形成している。 The individual supply flow path 5 leads to a fluid resistance portion 7 composed of a first supply-side fluid resistance path 7A and a second supply-side fluid resistance path 7B leading to the individual liquid chamber 6, and a first supply-side fluid resistance path 7A. It includes a first individual supply port 9A, a supply side introduction flow path 8B through which a second supply side fluid resistance path 7B communicates, and a second individual supply port 9B leading through a supply side introduction flow path 8B. The fluid resistance portion 7 and the supply side introduction flow path 8B are formed by a groove portion provided in the flow path plate 2, and the first individual supply port 9A and the second individual supply port 9B are formed by a through hole formed in the diaphragm member 3. is doing.

また、振動板部材3は、個別液室6の壁面の一部を形成する変形可能な振動領域30を形成している。そして、この振動板部材3の振動領域30の個別液室6と反対側の面には、振動領域30と一体的に圧電素子11が設けられ、振動領域30と圧電素子11によって圧電アクチュエータ構成している。 Further, the diaphragm member 3 forms a deformable vibration region 30 that forms a part of the wall surface of the individual liquid chamber 6. A piezoelectric element 11 is provided integrally with the vibration region 30 on the surface of the vibration plate member 3 opposite to the individual liquid chamber 6, and the vibration region 30 and the piezoelectric element 11 form a piezoelectric actuator. ing.

圧電素子11は、振動領域30側から下部電極13、圧電層(圧電体)12及び上部電極14を順次積層形成して構成している。複数の圧電素子11の共通電極となる下部電極13は、ノズル配列方向ですべての圧電素子11に跨って形成される1つの電極層である。 The piezoelectric element 11 is configured by sequentially laminating and forming a lower electrode 13, a piezoelectric layer (piezoelectric body) 12 and an upper electrode 14 from the vibration region 30 side. The lower electrode 13, which is a common electrode of the plurality of piezoelectric elements 11, is one electrode layer formed so as to straddle all the piezoelectric elements 11 in the nozzle arrangement direction.

また、圧電素子11の個別電極となる上部電極14は、個別配線16を介して駆動回路部である駆動IC(以下、「ドライバIC」という。)500に接続されている。 Further, the upper electrode 14 which is an individual electrode of the piezoelectric element 11 is connected to a drive IC (hereinafter, referred to as “driver IC”) 500 which is a drive circuit unit via the individual wiring 16.

そして、液室基板20の振動板部材3側には、液室基板20上の圧電素子11を覆っている保持基板50が接着剤で接合されている。 A holding substrate 50 covering the piezoelectric element 11 on the liquid chamber substrate 20 is bonded to the diaphragm member 3 side of the liquid chamber substrate 20 with an adhesive.

保持基板50には、個別供給流路5に通じる供給側共通流路10と1又は2以上の個別供給流路5との間に介在する中間供給流路51を形成している。 The holding substrate 50 is formed with an intermediate supply flow path 51 interposed between the supply-side common flow path 10 leading to the individual supply flow path 5 and one or more individual supply flow paths 5.

中間供給流路51は、1又は複数の第1個別供給口9Aに通じる第1中間供給流路51Aと、1又は複数の第2個別供給口9Bに通じる第2中間供給流路51Bとを含み、第1中間供給流路51Aと第2中間供給流路51Bとは隔壁55で分離されている。 The intermediate supply flow path 51 includes a first intermediate supply flow path 51A leading to one or more first individual supply ports 9A and a second intermediate supply flow path 51B leading to one or more second individual supply ports 9B. The first intermediate supply flow path 51A and the second intermediate supply flow path 51B are separated by a partition wall 55.

ここでは、第1中間供給流路51Aはすべての第1個別供給口9Aに連通し、第2中間供給流路51Bはすべての第2個別供給口9Bに連通する構成としているが、これに限定されるものではない。 Here, the first intermediate supply flow path 51A communicates with all the first individual supply ports 9A, and the second intermediate supply flow path 51B communicates with all the second individual supply ports 9B, but the configuration is limited to this. It is not something that is done.

例えば、個々の第1個別供給口9A、第2個別供給口9B毎に第1中間供給流路51A、第2中間供給流路51Bを設ける構成とすることもできる。また、所定数の第1個別供給口9A、第2個別供給口9B毎に第1中間供給流路51A、第2中間供給流路51Bを設ける構成とすることもできる。 For example, a first intermediate supply flow path 51A and a second intermediate supply flow path 51B may be provided for each of the first individual supply ports 9A and the second individual supply port 9B. Further, it is also possible to provide a first intermediate supply flow path 51A and a second intermediate supply flow path 51B for each of a predetermined number of first individual supply ports 9A and second individual supply ports 9B.

また、保持基板50は、圧電素子11を収容する凹部52と、ドライバIC500を収容する開口部53が設けられている。 Further, the holding substrate 50 is provided with a recess 52 for accommodating the piezoelectric element 11 and an opening 53 for accommodating the driver IC 500.

共通流路部材80は、各個別液室6に液体を供給する供給側共通流路10を形成する。 The common flow path member 80 forms a supply-side common flow path 10 that supplies liquid to each individual liquid chamber 6.

この液体吐出ヘッド100においては、ドライバIC500から圧電素子11の上部電極14と下部電極13の間に電圧を与えることで、圧電層12が電極積層方向、すなわち電界方向に伸張し、振動領域30と平行な方向に収縮する。これにより、振動領域30の下部電極13側に引っ張り応力が発生し、振動領域30が個別液室6側に撓み、内部の液体を加圧することで、ノズル4から液体が吐出される。 In the liquid discharge head 100, by applying a voltage between the upper electrode 14 and the lower electrode 13 of the piezoelectric element 11 from the driver IC 500, the piezoelectric layer 12 expands in the electrode stacking direction, that is, in the electric field direction, and becomes a vibration region 30. It contracts in parallel directions. As a result, tensile stress is generated on the lower electrode 13 side of the vibration region 30, the vibration region 30 bends toward the individual liquid chamber 6, and the liquid inside is pressurized, so that the liquid is discharged from the nozzle 4.

次に、流体抵抗部7の第1供給側流体抵抗路7A及び第2供給側流体抵抗路7Bの流体抵抗について説明する。 Next, the fluid resistance of the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B of the fluid resistance section 7 will be described.

第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bとは、流体抵抗が略同じ(同じを含む。)であることが好ましい。 It is preferable that the first supply-side fluid resistance path 7A and the second supply-side fluid resistance path 7B have substantially the same (including the same) fluid resistance.

本実施形態では、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bとをノズル配列方向で並べて配置しているので、第2供給側流体抵抗路7Bの長さL2は第1供給側流体抵抗路7Aの長さL1よりも長くなる(L2>L1)。 In the present embodiment, since the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B are arranged side by side in the nozzle arrangement direction, the length L2 of the second supply side fluid resistance path 7B is the first. The length of the supply-side fluid resistance path 7A is longer than the length L1 (L2> L1).

また、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bは、流路板2を貫通しているので、深さ(高さ)は同じになる。そして、第2供給側流体抵抗路7Bの幅W2は第1供給側流体抵抗路7Aの幅W1よりも大きくしている(W2>W1)。 Further, since the first supply-side fluid resistance path 7A and the second supply-side fluid resistance path 7B penetrate the flow path plate 2, the depth (height) is the same. The width W2 of the second supply-side fluid resistance path 7B is larger than the width W1 of the first supply-side fluid resistance path 7A (W2> W1).

これにより、第2供給側流体抵抗路7Bの開口断面積(液体の流れの方向と直交する方向の断面積)は、第1供給側流体抵抗路7Aの断面積よりも大きくなり、長さと開口断面積で定まる流体抵抗を、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bで略同じにすることができる。 As a result, the opening cross-sectional area of the second supply-side fluid resistance path 7B (the cross-sectional area in the direction orthogonal to the direction of the liquid flow) becomes larger than the cross-sectional area of the first supply-side fluid resistance path 7A, and the length and the opening. The fluid resistance determined by the cross-sectional area can be made substantially the same in the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B.

このように、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bの各流体抵抗をほぼ同じにすることで、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bを流れる液体の流量がほぼ同一となるため、充填性不良ないしリフィル不良を低減することができる。 In this way, by making the fluid resistances of the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B substantially the same, the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B are made substantially the same. Since the flow rates of the fluids flowing through the water are almost the same, it is possible to reduce poor filling properties or poor refilling.

第1供給側流体抵抗路7Aの流体抵抗と第2供給側流体抵抗路7Bの流体抵抗の差が大きくなると、流体抵抗の低い流路の流量が多くなり、気泡が流体抵抗の高い流路に残存し易くなり、吐出不良を発生しやすくなる。 When the difference between the fluid resistance of the first supply-side fluid resistance path 7A and the fluid resistance of the second supply-side fluid resistance path 7B becomes large, the flow rate of the flow path having a low fluid resistance increases, and bubbles become a flow path having a high fluid resistance. It tends to remain, and discharge defects are likely to occur.

また、本実施形態では、第2供給側流体抵抗路7Bと第2個別供給口9Bとの間の供給側導入流路8Bの幅を第2供給側流体抵抗路7Bの幅よりも広くしている。 Further, in the present embodiment, the width of the supply side introduction flow path 8B between the second supply side fluid resistance path 7B and the second individual supply port 9B is made wider than the width of the second supply side fluid resistance path 7B. There is.

これにより、第1供給側流体抵抗路7A,第2供給側流体抵抗路7Bの各長さL、幅Wの設定自由度を高めることができ、流路を小型化して、ヘッドを小型化することができる。 As a result, the degree of freedom in setting the length L and width W of the first supply-side fluid resistance path 7A and the second supply-side fluid resistance path 7B can be increased, the flow path can be miniaturized, and the head can be miniaturized. be able to.

次に、本実施形態におけるクロストークの抑制について図5も参照して説明する。なお、図5は圧電素子に与える印加電圧の変化と圧電素子による個別液室の圧力変動及び共通流路からの戻り圧力波による個別液室の圧力変動を説明する説明図である。 Next, the suppression of crosstalk in the present embodiment will be described with reference to FIG. Note that FIG. 5 is an explanatory diagram illustrating changes in the applied voltage applied to the piezoelectric element, pressure fluctuations in the individual liquid chambers due to the piezoelectric elements, and pressure fluctuations in the individual liquid chambers due to the return pressure wave from the common flow path.

図5(a)に示すように、2つの駆動パルスP1を含む駆動波形を圧電素子11に印加して個別液室6を加圧し、液体を吐出させる。駆動パルスP1が印加されたとき、圧電素子11は振動領域30と同一面内に収縮することになり、振動領域30を撓ませて個別液室6の体積を収縮する。 As shown in FIG. 5A, a drive waveform including two drive pulses P1 is applied to the piezoelectric element 11 to pressurize the individual liquid chamber 6 and discharge the liquid. When the drive pulse P1 is applied, the piezoelectric element 11 contracts in the same plane as the vibration region 30, and the vibration region 30 is flexed to contract the volume of the individual liquid chamber 6.

したがって、駆動パルスP1を印加した場合、個別液室6の体積変化は、一度拡張してから収縮することになり、個別液室6の圧力は、図6(b)、(c)に実線で示すように変化することになる。 Therefore, when the drive pulse P1 is applied, the volume change of the individual liquid chamber 6 expands once and then contracts, and the pressure of the individual liquid chamber 6 is shown by a solid line in FIGS. 6 (b) and 6 (c). It will change as shown.

そして、個別液室6で生じた圧力波は、第1供給側流体抵抗路7Aから第1個別供給口9A、第1中間供給流路51Aを経て供給側共通流路10に伝搬する。そして、供給側共通流路10で反射されて、第1中間供給流路51A、第1個別供給口9A、第1供給側流体抵抗路7Aを経て個別液室6に再伝搬する。この第1供給側流体抵抗路7Aを通じた供給側共通流路10からの圧力成分による圧力変動を図5(b)に破線で示している。 Then, the pressure wave generated in the individual liquid chamber 6 propagates from the first supply-side fluid resistance path 7A to the supply-side common flow path 10 via the first individual supply port 9A and the first intermediate supply flow path 51A. Then, it is reflected by the supply-side common flow path 10 and re-propagates to the individual liquid chamber 6 via the first intermediate supply flow path 51A, the first individual supply port 9A, and the first supply-side fluid resistance path 7A. The pressure fluctuation due to the pressure component from the supply-side common flow path 10 through the first supply-side fluid resistance path 7A is shown by a broken line in FIG. 5 (b).

また、個別液室6で生じた圧力波は、第2供給側流体抵抗路7Bから第2個別供給口9B、第2中間供給流路51Bを経て供給側共通流路10に伝搬する。そして、供給側共通流路10で反射されて、第2中間供給流路51B、第2個別供給口9B、第2供給側流体抵抗路7Bを経て個別液室6に再伝搬する。この第2供給側流体抵抗路7Bを通じた供給側共通流路10からの圧力成分による圧力変動を図5(c)に破線で示している。 Further, the pressure wave generated in the individual liquid chamber 6 propagates from the second supply side fluid resistance path 7B to the supply side common flow path 10 via the second individual supply port 9B and the second intermediate supply flow path 51B. Then, it is reflected by the supply-side common flow path 10 and re-propagates to the individual liquid chamber 6 via the second intermediate supply flow path 51B, the second individual supply port 9B, and the second supply-side fluid resistance path 7B. The pressure fluctuation due to the pressure component from the supply-side common flow path 10 through the second supply-side fluid resistance path 7B is shown by a broken line in FIG. 5 (c).

ここで、個別液室6から第1供給側流体抵抗路7Aを通じて供給側共通流路10に通じる流路の長さと、個別液室6から第2供給側流体抵抗路7Bを通じて供給側共通流路10に通じる流路の長さとが異なっている。具体的には、第2供給側流体抵抗路7Bを通じる側が第1供給側流体抵抗路7Aを通じる側よりも長くなっている。 Here, the length of the flow path leading from the individual liquid chamber 6 to the supply side common flow path 10 through the first supply side fluid resistance path 7A and the supply side common flow path from the individual liquid chamber 6 through the second supply side fluid resistance path 7B. The length of the flow path leading to 10 is different. Specifically, the side through the second supply-side fluid resistance path 7B is longer than the side through the first supply-side fluid resistance path 7A.

したがって、図5(b)に示す第1供給側流体抵抗路7Aを通じて供給側共通流路10から戻ってくる圧力波の遅延時間(遅延量)td1よりも、図5(c)に示す第2供給側流体抵抗路7Bを通じて供給側共通流路10から戻ってくる圧力波の遅延時間(遅延量)td2が長くなる。なお、遅延時間tdは、個別液室6の圧電素子11による圧力変動のタイミングと供給側共通流路10からの再伝搬圧力波による圧力変動のタイミングとの時間差である。 Therefore, the second delay time (delay amount) td1 of the pressure wave returning from the supply-side common flow path 10 through the first supply-side fluid resistance path 7A shown in FIG. 5 (b) is more than that of the second supply-side fluid resistance path 7A shown in FIG. The delay time (delay amount) td2 of the pressure wave returning from the supply-side common flow path 10 through the supply-side fluid resistance path 7B becomes long. The delay time td is the time difference between the timing of the pressure fluctuation due to the piezoelectric element 11 of the individual liquid chamber 6 and the timing of the pressure fluctuation due to the repropagation pressure wave from the common flow path 10 on the supply side.

このように、個別液室6から長さの異なる第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bを介して供給側共通流路10に接続する構成をとることで、供給側共通流路10から個別液室6に再伝搬する圧力波の遅延量を異ならせて分散することができる。 In this way, the supply side is connected to the supply side common flow path 10 from the individual liquid chamber 6 via the first supply side fluid resistance passage 7A and the second supply side fluid resistance passage 7B having different lengths. The delay amount of the pressure wave repropagating from the common flow path 10 to the individual liquid chamber 6 can be different and dispersed.

これらの成分の足し合わせがクロストークに影響する成分となるため、特定のタイミング近傍に圧力振動のピークが集中することなく分散させることができる。これにより、供給側共通流路10からの圧力成分によるクロストーク現象を抑制することができる。 Since the addition of these components becomes a component that affects crosstalk, it is possible to disperse the peaks of pressure vibration in the vicinity of a specific timing without concentrating. This makes it possible to suppress the crosstalk phenomenon due to the pressure component from the common flow path 10 on the supply side.

ここで、1つの個別液室6(これを「個別液室6a」とする。)を駆動したとき、他の個別液室6(これを「個別液室6b」とする。)に対する供給側共通流路10を介した圧力干渉の経路は、次の(1)〜(4)の4種類となる。 Here, when one individual liquid chamber 6 (this is referred to as "individual liquid chamber 6a") is driven, the supply side is common to the other individual liquid chamber 6 (this is referred to as "individual liquid chamber 6b"). There are four types of pressure interference paths through the flow path 10 (1) to (4) below.

なお、個別液室6aについては、第1供給側流体抵抗路7Aa、第2供給側流体抵抗路7Baと表記し、個別液室6bについては、第1供給側流体抵抗路7Ab、第2供給側流体抵抗路7Bbと表記する。 The individual liquid chamber 6a is referred to as a first supply side fluid resistance path 7Aa and a second supply side fluid resistance path 7Ba, and the individual liquid chamber 6b is referred to as a first supply side fluid resistance path 7Ab and a second supply side. Notated as fluid resistance path 7Bb.

(1)個別液室6a−第1供給側流体抵抗路7Aa−供給側共通流路10−第1供給側流体抵抗路7Ab−個別液室6b、
(2)個別液室6a−第1供給側流体抵抗路7Aa−供給側共通流路10−第2供給側流体抵抗路7Bb−個別液室6b、
(3)個別液室6a−第2供給側流体抵抗路7Ba−供給側共通流路10−第1供給側流体抵抗路7Ab−個別液室6b、
(4)個別液室6a−第2供給側流体抵抗路7Ba−供給側共通流路10−第2供給側流体抵抗路7Bb−個別液室6b
(1) Individual liquid chamber 6a-First supply side fluid resistance passage 7Aa-Supply side common flow path 10-First supply side fluid resistance passage 7Ab-Individual liquid chamber 6b,
(2) Individual liquid chamber 6a-First supply side fluid resistance passage 7Aa-Supply side common flow path 10-Second supply side fluid resistance passage 7Bb-Individual liquid chamber 6b,
(3) Individual liquid chamber 6a-Second supply side fluid resistance passage 7Ba-Supply side common flow path 10-First supply side fluid resistance passage 7Ab-Individual liquid chamber 6b,
(4) Individual liquid chamber 6a-Second supply side fluid resistance passage 7Ba-Supply side common flow path 10-Second supply side fluid resistance passage 7Bb-Individual liquid chamber 6b

このように、個別液室6aで発生した圧力は、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bに分散される。同時に、個別液室6bへも第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bのそれぞれを経由して分散された圧力が圧力干渉として戻るため、上記の4種類に分散され、かつ、タイミングがずれた圧力波が個別液室6bに戻ることになる。 In this way, the pressure generated in the individual liquid chamber 6a is dispersed in the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B. At the same time, the pressure dispersed to the individual liquid chamber 6b via each of the first supply side fluid resistance path 7A and the second supply side fluid resistance path 7B returns as pressure interference, so that the pressure is dispersed into the above four types. At the same time, the pressure wave whose timing is deviated returns to the individual liquid chamber 6b.

これにより、個別液室6bに戻る圧力波のピークはブロードな形状となる。 As a result, the peak of the pressure wave returning to the individual liquid chamber 6b has a broad shape.

特に、供給側共通流路10を経由した圧力波の戻りは、個別液室6aと個別液室6bの距離によって変化し、上述した遅延時間を制御することは困難である。したがって、個別液室から供給側共通流路に伝搬する圧力のピークを分散させ、供給側共通流路から個別液室へ戻る圧力も分散させてピークを下げることで、クロストークを効果的に抑制することができる。 In particular, the return of the pressure wave via the common flow path 10 on the supply side changes depending on the distance between the individual liquid chambers 6a and the individual liquid chambers 6b, and it is difficult to control the delay time described above. Therefore, crosstalk is effectively suppressed by dispersing the peak of the pressure propagating from the individual liquid chamber to the common flow path on the supply side and also distributing the pressure returning from the common flow path on the supply side to the individual liquid chamber to lower the peak. can do.

これに対し、流体抵抗部が1つの流体抵抗路で構成される場合、複数の同じ流体抵抗路で構成される場合には、圧力波のピークが分散されなくなり、クロストークを抑制することができなくなり、吐出特性が不安定になる。 On the other hand, when the fluid resistance section is composed of one fluid resistance path and is composed of a plurality of the same fluid resistance paths, the peak of the pressure wave is not dispersed and crosstalk can be suppressed. It disappears and the discharge characteristics become unstable.

また、本実施形態においては、第1供給側流体抵抗路7Aが通じる第1個別供給口9Aと供給側共通流路10との間に第1中間供給流路51Aを、第2供給側流体抵抗路7Bが通じる第2個別供給口9Bと供給側共通流路10との間に第2中間供給流路51Bを、それぞれ配置している。 Further, in the present embodiment, the first intermediate supply flow path 51A is provided between the first individual supply port 9A through which the first supply side fluid resistance path 7A passes and the supply side common flow path 10, and the second supply side fluid resistance. A second intermediate supply flow path 51B is arranged between the second individual supply port 9B through which the road 7B communicates and the supply side common flow path 10.

ここで、第1中間供給流路51Aと第2中間供給流路51Bとは分離して配置している。 Here, the first intermediate supply flow path 51A and the second intermediate supply flow path 51B are arranged separately.

したがって、第1個別供給口9Aと第2個別供給口9Bが共通の中間供給流路に直接臨んでいる場合に比べて、第1個別供給口9Aと第2個別供給口9Bとの間の距離が長くなり、第1個別供給口9Aと第2個別供給口9Bとの間での圧力波の遅延量を大きくすることができる。 Therefore, the distance between the first individual supply port 9A and the second individual supply port 9B is compared with the case where the first individual supply port 9A and the second individual supply port 9B directly face the common intermediate supply flow path. Is long, and the delay amount of the pressure wave between the first individual supply port 9A and the second individual supply port 9B can be increased.

これにより、圧力干渉のピークをさらに低減することができ、供給側共通流路を経由するクロストークを大幅に抑制することができる。 As a result, the peak of pressure interference can be further reduced, and crosstalk via the common flow path on the supply side can be significantly suppressed.

次に、本発明の第2実施形態に係る液体吐出ヘッドについて図6を参照して説明する。図6は同ヘッドの要部分解平面説明図である。なお、共通流路部材には保持基板の第1中間供給流路、第2中間供給流路、第1中間回収流路及び第2中間隔週流路の各位置を仮想線で図示している。 Next, the liquid discharge head according to the second embodiment of the present invention will be described with reference to FIG. FIG. 6 is an explanatory view of the main part of the head in an exploded plan view. In the common flow path member, the positions of the first intermediate supply flow path, the second intermediate supply flow path, the first intermediate recovery flow path, and the second intermediate interval weekly flow path of the holding substrate are illustrated by virtual lines.

本実施形態の液体吐出ヘッド100は、フロースルー型ヘッド(個別液室循環型ヘッド)である。 The liquid discharge head 100 of the present embodiment is a flow-through type head (individual liquid chamber circulation type head).

液室基板20には、第1実施形態と同様に、個別液室6に通じる第1供給側流体抵抗路7A、第2供給側流体抵抗路7Bを含む供給側流体抵抗部7と、第1供給側流体抵抗路7Aに通じる第1個別供給口9Aと、第2供給側流体抵抗路7Bに通じる第2個別供給口9Bとを有している。 Similar to the first embodiment, the liquid chamber substrate 20 includes a first supply-side fluid resistance path 7A leading to the individual liquid chamber 6, a supply-side fluid resistance section 7 including a second supply-side fluid resistance path 7B, and a first. It has a first individual supply port 9A leading to the supply-side fluid resistance path 7A and a second individual supply port 9B leading to the second supply-side fluid resistance path 7B.

また、液室基板20には、個別回収流路155を有している。個別回収流路155は、個別液室6に通じる第1回収側流体抵抗路157A、第2回収側流体抵抗路157Bを含む回収側流体抵抗部157と、第1回収側流体抵抗路157Aに通じる第1個別回収口159A、第2回収側流体抵抗路157Bに通じる第2個別回収口159Bとを含む。 Further, the liquid chamber substrate 20 has an individual recovery flow path 155. The individual recovery flow path 155 leads to the recovery side fluid resistance section 157 including the first recovery side fluid resistance path 157A and the second recovery side fluid resistance path 157B leading to the individual liquid chamber 6, and the first recovery side fluid resistance path 157A. It includes a first individual recovery port 159A and a second individual recovery port 159B leading to a second recovery side fluid resistance path 157B.

そして、保持基板50には、複数の第1個別供給口9Aにそれぞれ通じる複数の第1中間供給流路51Aと、複数の第2個別供給口9Bにそれぞれ通じる複数の第2中間供給流路51Bとを有している。また、保持基板50には、複数の第1個別回収口159Aにそれぞれ通じる複数の第1中間回収流路151Aと、複数の第2個別回収口159Bにそれぞれ通じる複数の第2中間回収流路151Bとを有している。第1中間回収流路151Aと第2中間回収流路151Bで中間回収経路151を構成している。 Then, on the holding substrate 50, a plurality of first intermediate supply channels 51A communicating with the plurality of first individual supply ports 9A and a plurality of second intermediate supply channels 51B each communicating with the plurality of second individual supply ports 9B are provided. And have. Further, in the holding substrate 50, a plurality of first intermediate recovery channels 151A communicating with the plurality of first individual recovery ports 159A and a plurality of second intermediate recovery channels 151B each communicating with the plurality of second individual recovery ports 159B are provided. And have. The first intermediate recovery flow path 151A and the second intermediate recovery flow path 151B constitute the intermediate recovery path 151.

共通流路部材80には、保持基板50の第1中間供給流路51A、第2中間供給流路51Bが通じる供給側共通流路10と、第1中間回収流路151A、第2中間回収流路151Bが通じる回収側共通流路150とを有している。 The common flow path member 80 includes a supply-side common flow path 10 through which the first intermediate supply flow path 51A and the second intermediate supply flow path 51B of the holding substrate 50 pass, and the first intermediate recovery flow path 151A and the second intermediate recovery flow path. It has a recovery-side common flow path 150 through which the path 151B passes.

このように、第1供給側流体抵抗路7Aに通じる第1中間供給流路51Aと、第2供給側流体抵抗路7Bに通じる第2中間供給流路51Bとは分離し、これらの分離した第1中間供給流路51A及び第2中間供給流路51Bを介して供給側共通流路10に通じている。 In this way, the first intermediate supply flow path 51A leading to the first supply-side fluid resistance path 7A and the second intermediate supply flow path 51B leading to the second supply-side fluid resistance path 7B are separated from each other, and these are separated first. It is connected to the supply-side common flow path 10 via the first intermediate supply flow path 51A and the second intermediate supply flow path 51B.

同様に、第1回収側流体抵抗路157Aが通じる第1中間回収流路151Aと、第2回収側流体抵抗路157Bが通じる第2中間回収流路151Bが通じる回収側共通流路150とは分離し、これらの分離した第1中間回収流路151A及び第2中間回収流路151Bを介して回収側共通流路150に通じている。
ている。
Similarly, the first intermediate recovery flow path 151A through which the first recovery side fluid resistance path 157A passes and the recovery side common flow path 150 through which the second recovery side fluid resistance path 157B communicates are separated. Then, they are connected to the recovery side common flow path 150 via the separated first intermediate recovery flow path 151A and the second intermediate recovery flow path 151B.
ing.

したがって、前記第1実施形態と同様に、供給側共通流路10を介するクロストークを抑制することができるとともに、回収側共通流路150を介するクロストークを抑制することができる。 Therefore, similarly to the first embodiment, crosstalk via the supply-side common flow path 10 can be suppressed, and crosstalk via the recovery-side common flow path 150 can be suppressed.

次に、本発明の第3実施形態に係る液体吐出ヘッドについて図7を参照して説明する。図7は同ヘッドの要部分解平面説明図である。なお、共通流路部材には保持基板の第1中間供給流路及び第2中間供給流路の各位置を仮想線で図示している。 Next, the liquid discharge head according to the third embodiment of the present invention will be described with reference to FIG. 7. FIG. 7 is an explanatory view of a main part of the head in an exploded plan view. In the common flow path member, the positions of the first intermediate supply flow path and the second intermediate supply flow path of the holding substrate are illustrated by virtual lines.

本実施形態の液体吐出ヘッド100は、供給側共通流路10は、共通流路本流10aと共通流路支流10bで構成し、保持基板50の第1中間供給流路51A及び第2中間供給流路51Bはいずれも共通流路支流10bに通じている構成としている。 In the liquid discharge head 100 of the present embodiment, the supply-side common flow path 10 is composed of a common flow path main stream 10a and a common flow path tributary 10b, and the first intermediate supply flow path 51A and the second intermediate supply flow flow of the holding substrate 50. All of the roads 51B are configured to be connected to the common flow path tributary 10b.

このような共通流路構成であっても、前記第1実施形態と同様に、供給側共通流路10を介するクロストークを抑制することができる。なお、第2実施形態の回収側共通流路についても、同様に、共通流路本流と共通流路支流で構成することができる。 Even with such a common flow path configuration, crosstalk via the supply-side common flow path 10 can be suppressed as in the first embodiment. Similarly, the recovery-side common flow path of the second embodiment can be configured as a common flow path main stream and a common flow path tributary.

次に、本発明の第4実施形態に係る液体吐出ヘッドについて図8を参照して説明する。図8は同ヘッドの要部平面説明図である。 Next, the liquid discharge head according to the fourth embodiment of the present invention will be described with reference to FIG. FIG. 8 is an explanatory plan view of a main part of the head.

本実施形態では、第2供給側流体抵抗路7Bを屈曲させ、第1供給側流体抵抗路7Aと第2供給側流体抵抗路7Bの長さを異ならせている。 In the present embodiment, the second supply-side fluid resistance path 7B is bent so that the lengths of the first supply-side fluid resistance path 7A and the second supply-side fluid resistance path 7B are different.

これにより、ノズル配列方向と直交する方向において、第1供給側流体抵抗路7Aに通じる第1個別供給口9Aと第2供給側流体抵抗路7Bに通じる第2個別供給口9Bとをほぼ同じ位置に配置することができる。 As a result, in the direction orthogonal to the nozzle arrangement direction, the first individual supply port 9A leading to the first supply side fluid resistance path 7A and the second individual supply port 9B leading to the second supply side fluid resistance path 7B are located at substantially the same positions. Can be placed in.

次に、本発明に係る液体を吐出する装置の一例について図9及び図10を参照して説明する。図9は同装置の要部平面説明図、図10は同装置の要部側面説明図である。 Next, an example of the device for discharging the liquid according to the present invention will be described with reference to FIGS. 9 and 10. FIG. 9 is an explanatory plan view of a main part of the device, and FIG. 10 is an explanatory view of a side surface of the main part of the device.

この装置は、シリアル型装置であり、主走査移動機構493によって、キャリッジ403は主走査方向に往復移動する。主走査移動機構493は、ガイド部材401、主走査モータ405、タイミングベルト408等を含む。ガイド部材401は、左右の側板491A、491Bに架け渡されてキャリッジ403を移動可能に保持している。そして、主走査モータ405によって、駆動プーリ406と従動プーリ407間に架け渡したタイミングベルト408を介して、キャリッジ403は主走査方向に往復移動される。 This device is a serial type device, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged over the left and right side plates 491A and 491B to movably hold the carriage 403. Then, the carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 bridged between the drive pulley 406 and the driven pulley 407.

このキャリッジ403には、本発明に係る液体吐出ヘッド404及びヘッドタンク441を一体にした液体吐出ユニット440を搭載している。液体吐出ユニット440の液体吐出ヘッド404は、例えば、イエロー(Y)、シアン(C)、マゼンタ(M)、ブラック(K)の各色の液体を吐出する。また、液体吐出ヘッド404は、複数のノズルからなるノズル列を主走査方向と直交する副走査方向に配置し、吐出方向を下方に向けて装着している。 The carriage 403 is equipped with a liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, liquids of each color of yellow (Y), cyan (C), magenta (M), and black (K). Further, the liquid discharge head 404 is mounted by arranging a nozzle row composed of a plurality of nozzles in a sub-scanning direction orthogonal to the main scanning direction and facing the discharge direction downward.

液体吐出ヘッド404の外部に貯留されている液体を液体吐出ヘッド404に供給するための供給機構494により、ヘッドタンク441には、液体カートリッジ450に貯留されている液体が供給される。 The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

供給機構494は、液体カートリッジ450を装着する充填部であるカートリッジホルダ451、チューブ456、送液ポンプを含む送液ユニット452等で構成される。液体カートリッジ450はカートリッジホルダ451に着脱可能に装着される。ヘッドタンク441には、チューブ456を介して送液ユニット452によって、液体カートリッジ450から液体が送液される。 The supply mechanism 494 includes a cartridge holder 451 which is a filling part for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is delivered from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

この装置は、用紙410を搬送するための搬送機構495を備えている。搬送機構495は、搬送手段である搬送ベルト412、搬送ベルト412を駆動するための副走査モータ416を含む。 This device includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

搬送ベルト412は用紙410を吸着して液体吐出ヘッド404に対向する位置で搬送する。この搬送ベルト412は、無端状ベルトであり、搬送ローラ413と、テンションローラ414との間に掛け渡されている。吸着は静電吸着、あるいは、エアー吸引などで行うことができる。 The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid discharge head 404. The transport belt 412 is an endless belt, and is hung between the transport roller 413 and the tension roller 414. Adsorption can be performed by electrostatic adsorption, air suction, or the like.

そして、搬送ベルト412は、副走査モータ416によってタイミングベルト417及びタイミングプーリ418を介して搬送ローラ413が回転駆動されることによって、副走査方向に周回移動する。 Then, the transport belt 412 orbits in the sub-scanning direction by rotationally driving the transport roller 413 via the timing belt 417 and the timing pulley 418 by the sub-scanning motor 416.

さらに、キャリッジ403の主走査方向の一方側には搬送ベルト412の側方に液体吐出ヘッド404の維持回復を行う維持回復機構420が配置されている。 Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 for maintaining / recovering the liquid discharge head 404 is arranged on the side of the transport belt 412.

維持回復機構420は、例えば液体吐出ヘッド404のノズル面(ノズルが形成された面)をキャッピングするキャップ部材421、ノズル面を払拭するワイパ部材422などで構成されている。 The maintenance / recovery mechanism 420 includes, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle is formed) of the liquid discharge head 404, a wiper member 422 that wipes the nozzle surface, and the like.

主走査移動機構493、供給機構494、維持回復機構420、搬送機構495は、側板491A,491B、背板491Cを含む筐体に取り付けられている。 The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

このように構成したこの装置においては、用紙410が搬送ベルト412上に給紙されて吸着され、搬送ベルト412の周回移動によって用紙410が副走査方向に搬送される。 In this apparatus configured in this way, the paper 410 is fed onto the transport belt 412 and sucked, and the paper 410 is conveyed in the sub-scanning direction by the circumferential movement of the conveyor belt 412.

そこで、キャリッジ403を主走査方向に移動させながら画像信号に応じて液体吐出ヘッド404を駆動することにより、停止している用紙410に液体を吐出して画像を形成
する。
Therefore, by driving the liquid ejection head 404 in response to the image signal while moving the carriage 403 in the main scanning direction, the liquid is ejected onto the stopped paper 410 to form an image.

このように、この装置では、本発明に係る液体吐出ヘッドを備えているので、高画質画像を安定して形成することができる。 As described above, since this device includes the liquid discharge head according to the present invention, it is possible to stably form a high-quality image.

次に、本発明に係る液体吐出ユニットの他の例について図11を参照して説明する。図11は同ユニットの要部平面説明図である。 Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 11 is an explanatory plan view of a main part of the unit.

この液体吐出ユニットは、前記液体を吐出する装置を構成している部材のうち、側板491A、491B及び背板491Cで構成される筐体部分と、主走査移動機構493と、キャリッジ403と、液体吐出ヘッド404で構成されている。 This liquid discharge unit includes a housing portion composed of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid among the members constituting the device for discharging the liquid. It is composed of a discharge head 404.

なお、この液体吐出ユニットの例えば側板491Bに、前述した維持回復機構420、及び供給機構494の少なくともいずれかを更に取り付けた液体吐出ユニットを構成することもできる。 It should be noted that a liquid discharge unit may be configured in which at least one of the above-mentioned maintenance / recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit.

次に、本発明に係る液体吐出ユニットの更に他の例について図12を参照して説明する。図12は同ユニットの正面説明図である。 Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 12 is a front explanatory view of the unit.

この液体吐出ユニットは、液体供給部材である流路部品444が取付けられた液体吐出ヘッド404と、流路部品444に接続されたチューブ456で構成されている。 This liquid discharge unit includes a liquid discharge head 404 to which a flow path component 444, which is a liquid supply member, is attached, and a tube 456 connected to the flow path component 444.

なお、流路部品444はカバー442の内部に配置されている。流路部品444に代えてヘッドタンク441を含むこともできる。また、流路部品444の上部には液体吐出ヘッド404と電気的接続を行うコネクタ443が設けられている。 The flow path component 444 is arranged inside the cover 442. A head tank 441 may be included instead of the flow path component 444. Further, a connector 443 that electrically connects to the liquid discharge head 404 is provided on the upper part of the flow path component 444.

本願において、吐出される液体は、ヘッドから吐出可能な粘度や表面張力を有するものであればよく、特に限定されないが、常温、常圧下において、または加熱、冷却により粘度が30mPa・s以下となるものであることが好ましい。より具体的には、水や有機溶媒等の溶媒、染料や顔料等の着色剤、重合性化合物、樹脂、界面活性剤等の機能性付与材料、DNA、アミノ酸やたんぱく質、カルシウム等の生体適合材料、天然色素等の可食材料、などを含む溶液、懸濁液、エマルジョンなどであり、これらは例えば、インクジェット用インク、表面処理液、電子素子や発光素子の構成要素や電子回路レジストパターンの形成用液、3次元造形用材料液等の用途で用いることができる。 In the present application, the liquid to be discharged may have a viscosity and surface tension that can be discharged from the head, and is not particularly limited, but the viscosity becomes 30 mPa · s or less at room temperature, under normal pressure, or by heating or cooling. It is preferable that it is a thing. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, polymerizable compounds, resins, functionalizing materials such as surfactants, biocompatible materials such as DNA, amino acids and proteins, and calcium. , Solvents, suspensions, emulsions, etc. containing edible materials such as natural pigments, such as inks for inkjets, surface treatment liquids, components of electronic and light emitting elements, and formation of electronic circuit resist patterns. It can be used in applications such as liquids and material liquids for three-dimensional modeling.

液体を吐出するエネルギー発生源として、圧電アクチュエータ(積層型圧電素子及び薄膜型圧電素子)、発熱抵抗体などの電気熱変換素子を用いるサーマルアクチュエータ、振動板と対向電極からなる静電アクチュエータなどを使用するものが含まれる。 Piezoelectric actuators (laminated piezoelectric elements and thin-film piezoelectric elements), thermal actuators that use electric heat conversion elements such as heat-generating resistors, and electrostatic actuators that consist of a vibrating plate and counter electrodes are used as energy sources for discharging liquid. Includes what to do.

「液体吐出ユニット」は、液体吐出ヘッドに機能部品、機構が一体化したものであり、液体の吐出に関連する部品の集合体が含まれる。例えば、「液体吐出ユニット」は、ヘッドタンク、キャリッジ、供給機構、維持回復機構、主走査移動機構の構成の少なくとも一つを液体吐出ヘッドと組み合わせたものなどが含まれる。 The "liquid discharge unit" is a liquid discharge head integrated with functional parts and a mechanism, and includes a collection of parts related to liquid discharge. For example, the "liquid discharge unit" includes a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, a main scanning movement mechanism in which at least one of the configurations is combined with a liquid discharge head, and the like.

ここで、一体化とは、例えば、液体吐出ヘッドと機能部品、機構が、締結、接着、係合などで互いに固定されているもの、一方が他方に対して移動可能に保持されているものを含む。また、液体吐出ヘッドと、機能部品、機構が互いに着脱可能に構成されていても良い。 Here, the term "integration" means, for example, a liquid discharge head and a functional component, a mechanism in which the mechanism is fixed to each other by fastening, bonding, engagement, etc., or one in which one is movably held with respect to the other. include. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

例えば、液体吐出ユニットとして、液体吐出ヘッドとヘッドタンクが一体化されているものがある。また、チューブなどで互いに接続されて、液体吐出ヘッドとヘッドタンクが一体化されているものがある。ここで、これらの液体吐出ユニットのヘッドタンクと液体吐出ヘッドとの間にフィルタを含むユニットを追加することもできる。 For example, as a liquid discharge unit, there is a unit in which a liquid discharge head and a head tank are integrated. In some cases, the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the head tank of these liquid discharge units and the liquid discharge head.

また、液体吐出ユニットとして、液体吐出ヘッドとキャリッジが一体化されているものがある。 Further, as a liquid discharge unit, there is a unit in which a liquid discharge head and a carriage are integrated.

また、液体吐出ユニットとして、液体吐出ヘッドを走査移動機構の一部を構成するガイド部材に移動可能に保持させて、液体吐出ヘッドと走査移動機構が一体化されているものがある。また、液体吐出ヘッドとキャリッジと主走査移動機構が一体化されているものがある。 Further, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably by a guide member constituting a part of the scanning movement mechanism. In some cases, the liquid discharge head, the carriage, and the main scanning movement mechanism are integrated.

また、液体吐出ユニットとして、液体吐出ヘッドが取り付けられたキャリッジに、維持回復機構の一部であるキャップ部材を固定させて、液体吐出ヘッドとキャリッジと維持回復機構が一体化されているものがある。 Further, as a liquid discharge unit, there is a carriage to which a liquid discharge head is attached, in which a cap member which is a part of the maintenance / recovery mechanism is fixed, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. ..

また、液体吐出ユニットとして、ヘッドタンク若しくは流路部品が取付けられた液体吐出ヘッドにチューブが接続されて、液体吐出ヘッドと供給機構が一体化されているものがある。このチューブを介して、液体貯留源の液体が液体吐出ヘッドに供給される。 Further, as a liquid discharge unit, there is a liquid discharge unit in which a tube is connected to a head tank or a liquid discharge head to which a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid of the liquid storage source is supplied to the liquid discharge head through this tube.

主走査移動機構は、ガイド部材単体も含むものとする。また、供給機構は、チューブ単体、装填部単体も含むものする。 The main scanning movement mechanism shall include a single guide member. Further, the supply mechanism includes a single tube and a single loading unit.

「液体を吐出する装置」には、液体吐出ヘッド又は液体吐出ユニットを備え、液体吐出ヘッドを駆動させて液体を吐出させる装置が含まれる。液体を吐出する装置には、液体が付着可能なものに対して液体を吐出することが可能な装置だけでなく、液体を 気中や液中に向けて吐出する装置も含まれる。 The "device for discharging a liquid" includes a device provided with a liquid discharge head or a liquid discharge unit and driving the liquid discharge head to discharge the liquid. The device for discharging a liquid includes not only a device capable of discharging a liquid to a device to which the liquid can adhere, but also a device for discharging the liquid into the air or into the liquid.

この「液体を吐出する装置」は、液体が付着可能なものの給送、搬送、排紙に係わる手段、その他、前処理装置、後処理装置なども含むことができる。 The "device for discharging the liquid" can also include means for feeding, transporting, and discharging paper to which the liquid can adhere, as well as a pretreatment device, a posttreatment device, and the like.

例えば、「液体を吐出する装置」として、インクを吐出させて用紙に画像を形成する装置である画像形成装置、立体造形物(三次元造形物)を造形するために、粉体を層状に形成した粉体層に造形液を吐出させる立体造形装置(三次元造形装置)がある。 For example, as a "device that ejects a liquid", an image forming device that is a device that ejects ink to form an image on paper, and a three-dimensional object (three-dimensional object) are formed in layers in order to form a three-dimensional object. There is a three-dimensional modeling device (three-dimensional modeling device) that discharges the modeling liquid into the powder layer.

また、「液体を吐出する装置」は、吐出された液体によって文字、図形等の有意な画像が可視化されるものに限定されるものではない。例えば、それ自体意味を持たないパターン等を形成するもの、三次元像を造形するものも含まれる。 Further, the "device for discharging a liquid" is not limited to a device in which a significant image such as characters and figures is visualized by the discharged liquid. For example, those that form patterns that have no meaning in themselves and those that form a three-dimensional image are also included.

上記「液体が付着可能なもの」とは、液体が少なくとも一時的に付着可能なものであって、付着して固着するもの、付着して浸透するものなどを意味する。具体例としては、用紙、記録紙、記録用紙、フィルム、布などの被記録媒体、電子基板、圧電素子などの電子部品、粉体層(粉末層)、臓器モデル、検査用セルなどの媒体であり、特に限定しない限り、液体が付着するすべてのものが含まれる。 The above-mentioned "thing to which a liquid can adhere" means a material to which a liquid can adhere at least temporarily, such as a material to which the liquid adheres and adheres, and a material to which the liquid adheres and permeates. Specific examples include paper, recording paper, recording paper, film, recorded media such as cloth, electronic substrates, electronic components such as piezoelectric elements, powder layers (powder layers), organ models, and media such as inspection cells. Yes, and includes everything to which the liquid adheres, unless otherwise specified.

上記「液体が付着可能なもの」の材質は、紙、糸、繊維、布帛、皮革、金属、プラスチック、ガラス、木材、セラミックスなど液体が一時的でも付着可能であればよい。 The material of the above-mentioned "material to which a liquid can adhere" may be paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics or the like as long as the liquid can adhere even temporarily.

また、「液体を吐出する装置」は、液体吐出ヘッドと液体が付着可能なものとが相対的に移動する装置があるが、これに限定するものではない。具体例としては、液体吐出ヘッドを移動させるシリアル型装置、液体吐出ヘッドを移動させないライン型装置などが含まれる。 Further, the "device for discharging the liquid" includes, but is not limited to, a device in which the liquid discharge head and the device to which the liquid can adhere move relatively. Specific examples include a serial type device that moves the liquid discharge head, a line type device that does not move the liquid discharge head, and the like.

また、「液体を吐出する装置」としては、他にも、用紙の表面を改質するなどの目的で用紙の表面に処理液を塗布するために処理液を用紙に吐出する処理液塗布装置、原材料を溶液中に分散した組成液を、ノズルを介して噴射させて原材料の微粒子を造粒する噴射造粒装置などがある。 In addition, as a "device for ejecting a liquid", a treatment liquid coating device for ejecting a treatment liquid to the paper in order to apply the treatment liquid to the surface of the paper for the purpose of modifying the surface of the paper, etc. There is an injection granulation device that granulates fine particles of raw materials by injecting a composition liquid in which raw materials are dispersed in a solution through a nozzle.

なお、本願の用語における、画像形成、記録、印字、印写、印刷、造形等はいずれも同義語とする。 In addition, in the term of this application, image formation, recording, printing, printing, printing, modeling, etc. are all synonymous.

1 ノズル板
2 流路板
3 振動板部材
4 ノズル
5 供給側個別流路
6 個別液室
7 供給側流体抵抗部
7A 第1供給側流体抵抗路
7B 第2供給側流体抵抗路
9A 第1個別供給口
9B 第2個別供給口
10 供給側共通流路
20 液室基板
50 保持基板
51A 第1中間供給流路
51B 第2中間供給流路
155 個別回収流路
157 回収側流体抵抗部
157A 第1回収側流体抵抗路
157B 第2回収側流体抵抗路
159A 第1個別回収口
159B 第2個別回収口
80 共通流路部材
100 液体吐出ヘッド
403 キャリッジ
404 液体吐出ヘッド
440 液体吐出ユニット
1 Nozzle plate 2 Flow plate 3 Vibration plate member 4 Nozzle 5 Supply side individual flow path 6 Individual liquid chamber 7 Supply side fluid resistance 7A 1st supply side fluid resistance path 7B 2nd supply side fluid resistance path 9A 1st individual supply Port 9B 2nd individual supply port 10 Supply side common flow path 20 Liquid chamber board 50 Holding board 51A 1st intermediate supply flow path 51B 2nd intermediate supply flow path 155 Individual recovery flow path 157 Recovery side fluid resistance part 157A 1st recovery side Fluid resistance path 157B 2nd recovery side fluid resistance path 159A 1st individual recovery port 159B 2nd individual recovery port 80 Common flow path member 100 Liquid discharge head 403 Carrying 404 Liquid discharge head 440 Liquid discharge unit

Claims (6)

液体を吐出する複数のノズルにそれぞれ通じる複数の個別液室と、
前記複数の個別液室にそれぞれ通じる複数の個別供給流路と、
前記複数の個別供給流路に通じる供給側共通流路と、
前記供給側共通流路と1又は2以上の前記個別供給流路との間に介在する中間供給流路と、を備え、
前記複数の個別供給流路は、それぞれ、
第1供給側流体抵抗路及び第2供給側流体抵抗路と、
前記第1供給側流体抵抗路に通じる第1個別供給口と、
前記第2供給側流体抵抗路に通じる第2個別供給口と、を含み、
前記第1供給側流体抵抗路の長さと前記第2供給側流体抵抗路の長さが異なり、
前記中間供給流路は、
1又は複数の前記第1個別供給口に通じる第1中間供給流路と、
1又は複数の前記第2個別供給口に通じる第2中間供給流路と、を含み、
前記第1中間供給流路と前記第2中間供給流路とは分離されており、
前記第2個別供給口から前記第2供給側流体抵抗路までの流路の長さは前記第1個別供給口から前記第1供給側流体抵抗路までの長さよりも長く、
前記第2個別供給口から前記第2供給側流体抵抗路までの流路の開口断面積は前記第1個別供給口から前記第1供給側流体抵抗路までの流路の開口断面積よりも大きい
ことを特徴とする液体吐出ヘッド。
Multiple individual liquid chambers that lead to multiple nozzles that discharge liquid, and
A plurality of individual supply channels leading to each of the plurality of individual liquid chambers,
A common flow path on the supply side leading to the plurality of individual supply flow paths,
An intermediate supply flow path interposed between the supply-side common flow path and one or more individual supply flow paths is provided.
Each of the plurality of individual supply channels
The first supply side fluid resistance path and the second supply side fluid resistance path,
The first individual supply port leading to the first supply side fluid resistance path,
Includes a second individual supply port leading to the second supply side fluid resistance path.
The length of the first supply-side fluid resistance path and the length of the second supply-side fluid resistance path are different.
The intermediate supply flow path is
A first intermediate supply flow path leading to one or more of the first individual supply ports,
Includes a second intermediate supply channel leading to one or more of the second individual supply ports.
The first intermediate supply flow path and the second intermediate supply flow path are separated from each other.
The length of the flow path from the second individual supply port to the second supply-side fluid resistance path is longer than the length from the first individual supply port to the first supply-side fluid resistance path.
The opening cross-sectional area of the flow path from the second individual supply port to the second supply-side fluid resistance path is larger than the opening cross-sectional area of the flow path from the first individual supply port to the first supply-side fluid resistance path. <br/> A liquid discharge head characterized by being.
前記第1個別供給口から前記個別液室までの流体抵抗と前記第2個別供給口から前記個別液室までの流体抵抗がほぼ同じである
ことを特徴とする請求項1に記載の液体吐出ヘッド。
The liquid discharge head according to claim 1, wherein the fluid resistance from the first individual supply port to the individual liquid chamber and the fluid resistance from the second individual supply port to the individual liquid chamber are substantially the same. ..
前記複数の個別液室にそれぞれ通じる複数の個別回収流路と、
前記複数の個別回収流路に通じる回収側共通流路と、
前記回収側共通流路と1又は2以上の前記個別回収流路との間に介在する中間回収流路と、を備え、
前記複数の個別回収流路は、それぞれ、
第1回収側流体抵抗路及び第2回収側流体抵抗路と、
前記第1回収側流体抵抗路に通じる第1個別回収口と、
前記第2回収側流体抵抗路に通じる第2個別回収口と、を含み、
前記中間回収流路は、
1又は複数の前記第1個別回収口に通じる第1中間回収流路と、
1又は複数の前記第2個別回収口に通じる第2中間回収流路と、を含み、
前記第1中間回収流路と前記第2中間回収流路とは分離されている
ことを特徴とする請求項1又は2に記載の液体吐出ヘッド。
A plurality of individual recovery channels leading to each of the plurality of individual liquid chambers,
A common flow path on the recovery side leading to the plurality of individual recovery channels,
An intermediate recovery flow path interposed between the recovery side common flow path and one or more individual recovery flow paths is provided.
Each of the plurality of individual collection channels
The first recovery side fluid resistance path and the second recovery side fluid resistance path,
The first individual recovery port leading to the first recovery side fluid resistance path,
Including a second individual recovery port leading to the second recovery side fluid resistance path,
The intermediate recovery flow path is
A first intermediate collection flow path leading to one or more of the first individual collection ports,
Includes a second intermediate recovery channel leading to one or more of the second individual recovery ports.
The liquid discharge head according to claim 1 or 2 , wherein the first intermediate recovery flow path and the second intermediate recovery flow path are separated from each other.
請求項1ないしのいずれかに記載の液体吐出ヘッドを含むことを特徴とする液体吐出ユニット。 A liquid discharge unit comprising the liquid discharge head according to any one of claims 1 to 3. 前記液体吐出ヘッドに供給する液体を貯留するヘッドタンク、前記液体吐出ヘッドを搭載するキャリッジ、前記液体吐出ヘッドに液体を供給する供給機構、前記液体吐出ヘッドの維持回復を行う維持回復機構、前記液体吐出ヘッドを主走査方向に移動させる主走査移動機構の少なくともいずれか一つと前記液体吐出ヘッドとを一体化した
ことを特徴とする請求項に記載の液体吐出ユニット。
A head tank that stores the liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism that supplies the liquid to the liquid discharge head, a maintenance / recovery mechanism that maintains and recovers the liquid discharge head, and the liquid. The liquid discharge unit according to claim 4 , wherein at least one of the main scanning moving mechanisms for moving the discharge head in the main scanning direction is integrated with the liquid discharge head.
請求項1ないしのいずれかに記載の液体吐出ヘッド、請求項若しくはに記載の液体吐出ユニットを備えている
ことを特徴とする液体を吐出する装置。
A device for discharging a liquid, comprising the liquid discharge head according to any one of claims 1 to 3 and the liquid discharge unit according to claim 4 or 5.
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