JP6753080B2 - Liquid discharge head, liquid discharge unit, device that discharges liquid - Google Patents

Description

The present invention relates to a liquid discharge head, a liquid discharge unit, and a device for discharging a liquid.

In the liquid discharge head, when the liquid in the individual liquid chamber is pressurized and the liquid is discharged, the pressure wave propagates from the individual liquid chamber to the common liquid chamber, and the pressure wave is reversed from the common liquid chamber to the other individual liquid chamber. Propagation causes crosstalk such as fluctuations in the discharge characteristics of the nozzles corresponding to the other individual liquid chambers.

Conventionally, there is a common liquid chamber in which a thin-walled film exposed on the surface and a damper member including a damper chamber that is in contact with the thin-walled film in the thickness direction and has lower rigidity than the thin-walled film are arranged (Patent Documents). 1).

Japanese Unexamined Patent Publication No. 2007-18312

However, in the configuration that attenuates the pressure wave transmitted to the common liquid chamber, it takes time for the pressure wave generated in the individual liquid chamber to reach the reservoir and be attenuated, and moreover, it does not reach the damper and directly others. The pressure component propagating in the individual liquid chambers cannot be attenuated.

Therefore, in particular, when the drive frequency becomes high and the pressure wave due to the next discharge is repeatedly propagated before the pressure wave is attenuated in the common liquid chamber, the liquid discharge characteristic is caused by the pressure fluctuation in the common liquid chamber. May vary.

The present invention has been made in view of the above problems, and an object of the present invention is to reduce variations in liquid discharge characteristics.

In order to solve the above problems, the liquid discharge head according to claim 1 of the present invention is
Multiple nozzles that discharge liquid and
A plurality of individual liquid chambers through which the nozzle communicates, and
It has a common liquid chamber that leads to the plurality of individual liquid chambers.
Between the common liquid chamber and the individual liquid chamber
A groove member having a plurality of slit grooves forming a flow path passing through the individual liquid chamber and the common liquid chamber, and
A lid member that covers the opening side of the slit groove is provided.
The member forming the individual liquid chamber, the lid member, and the member forming the common liquid chamber are laminated, and at least a part of the individual liquid chamber and the common liquid chamber is interposed through the lid member. Arranged side by side in the stacking direction,
The lid member has a reconstructably deformable damper facing the slit groove and a damper chamber arranged on the side opposite to the slit groove with the damper interposed therebetween.

According to the present invention, it is possible to reduce variations in liquid discharge characteristics.

It is sectional drawing which follows the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 1st Embodiment of this invention. Similarly, it is a cross-sectional explanatory view along the nozzle arrangement direction corresponding to the line AA of FIG. Similarly, it is a plan explanatory view corresponding to line BB of FIG. It is also an exploded perspective explanatory view. Similarly, it is a plan explanatory view which saw the damper chamber member of a lid member from the holding substrate side. It is a plane explanatory view which saw the damper chamber member of the lid member in the liquid discharge head which concerns on 2nd Embodiment of this invention from the holding substrate side. It is a plane explanatory view which saw the damper chamber member of the lid member in the liquid discharge head which concerns on 3rd Embodiment of this invention from the holding substrate side. It is sectional drawing which follows the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 4th Embodiment of this invention. It is also a plan explanatory view of a lid member. It is sectional drawing which follows the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 5th Embodiment of this invention. It is sectional drawing which follows the direction orthogonal to the nozzle arrangement direction of the liquid discharge head which concerns on 6th Embodiment of this invention. Similarly, it is a cross-sectional explanatory view along the nozzle arrangement direction. It is a main part plan explanatory view of an example of the apparatus which discharges a liquid which concerns on this invention. It is explanatory drawing of the main part of the apparatus. It is a plane explanatory view of the main part of another example of the liquid discharge unit which concerns on this invention. It is a front explanatory view of still another example of the liquid discharge unit which concerns on this invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The liquid discharge head according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 4. FIG. 1 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, FIG. 2 is a cross-sectional explanatory view along the nozzle arrangement direction corresponding to the line AA of FIG. 1, and FIG. 3 is also FIG. It is a plan explanatory view corresponding to the BB line of.

This liquid discharge head includes a nozzle plate 1, a flow path plate 2, a diaphragm member 3, a piezoelectric element 11 which is a pressure generating means, a holding substrate 50 which also serves as a groove member, a lid member 80, and a common liquid chamber. A member 70 and a damper member 90 are provided.

A plurality of nozzles 4 for discharging a liquid are formed on the nozzle plate 1.

The flow path plate 2 forms, together with the nozzle plate 1 and the diaphragm member 3, an individual liquid chamber 6 through which the nozzle 4 communicates, a fluid resistance portion 7 through which the individual liquid chamber 6 communicates, and a liquid introduction portion 8 through which the fluid resistance portion 7 communicates. There is. The individual flow paths 5 and 5 composed of the individual liquid chamber 6, the fluid resistance portion 7, and the liquid introduction portion 8 are separated by a partition wall portion 5A.

Then, the individual flow path 5 enters the common liquid chamber 10 of the common liquid chamber member 70 via the opening 9 of the diaphragm member 3, the opening 51 of the holding substrate 50, and the slit groove 61 of the holding substrate 50. I understand.

The diaphragm member 3 is a wall surface member that forms a deformable vibration region (diaphragm) 30 that forms a part of the wall surface of the individual liquid chamber 6. In the present embodiment, the diaphragm member 3 and the flow path plate 2 are combined to form the flow path member 20.

A piezoelectric element 11 that can be flexed and deformed integrally with the vibration region 30 is provided on the surface of the vibration plate member 3 on the side opposite to the individual liquid chamber 6, and the piezoelectric actuator is provided by the vibration region 30 and the piezoelectric element 11. It is configured.

The piezoelectric element 11 is configured by sequentially laminating a lower electrode, a piezoelectric layer (piezoelectric body), and an upper electrode from the vibration region 30 side. The upper electrode, which is an individual electrode of the piezoelectric element 11, is connected to the drive IC (driver IC) 500.

The holding substrate 50 has a slit groove 61 provided in the in-plane direction forming a flow path through the common liquid chamber 10 and the individual liquid chamber 6, an opening 51 provided in the thickness direction, and a recess 52 for accommodating the piezoelectric element 11. And has an opening 53 for accommodating the driver IC 500.

Here, an independent opening 51 and a slit groove 61 are formed for each individual liquid chamber 6, but one opening 51 and a slit groove 61 correspond to each of two or more individual liquid chambers 6, or 2 It is also possible to have a configuration in which one slit groove 61 corresponds to each of the above individual liquid chambers 6.

The lid member 80 has a reconstructably deformable damper 81 that covers the opening side of the slit groove 61, and has a damper chamber 82 on the side opposite to the slit groove 61 with the damper 81 interposed therebetween.

The common liquid chamber member 70 forms the common liquid chamber 10. A damper member 90 is provided in which the damper 91 forming a part of the wall surface of the common liquid chamber 10 is held by the holding member 92.

In the liquid discharge head configured in this way, by applying a voltage from the driver IC 500 between the upper electrode and the lower electrode of the piezoelectric element 11, the piezoelectric layer 12 extends in the electrode stacking direction, that is, in the electric field direction, and the vibration region 30 Shrinks in the direction parallel to.

At this time, since the lower electrode side is constrained by the vibration region 30, tensile stress is generated on the lower electrode side of the vibration region 30, the vibration region 30 bends toward the individual liquid chamber 6, and the liquid inside is pressurized. Then, the liquid is discharged from the nozzle 4.

Next, the details of the damper configuration in the liquid discharge head will be described with reference to FIGS. 4 and 5. FIG. 4 is an exploded perspective explanatory view of the liquid discharge head, and FIG. 5 is a plan explanatory view of the damper chamber member of the lid member as viewed from the holding substrate side. It should be noted that the surface coating in the plan view of FIG. 5 is for distinguishing from other regions and does not show a cross section.

The holding substrate 50 has an opening 51 formed in the thickness direction (stacking direction) from the individual flow path 5 and a slit groove 61 opening on the common liquid chamber 10 side leading to the opening 51.

Then, a part of the opening 51 and the slit groove 61 is covered with the lid member 80. Therefore, the slit groove 61 has a portion 61a covered with the lid member 80 (this portion is referred to as a “flow path”) 61a and a portion 61b facing the common liquid chamber 10 without being covered with the lid member 80.

As shown in FIG. 4, the lid member 80 is composed of a flexible film 80A serving as a damper 81 and a damper chamber member 80B forming the damper chamber 82.

The flexible film 80A has a portion serving as a damper 81 and an opening 83A leading to the common liquid chamber 10. The damper chamber member 80B has a recess 80a forming the damper chamber 82 and a through hole 80b serving as an opening 83B leading to the common liquid chamber 10.

The damper 81 faces the opening of the opening 51 of the holding substrate 50 and the opening side of the slit groove 61. Here, the damper 81 is joined to the partition wall portion 62 between the slit grooves 61. Since the damper 81 is joined to the partition wall portion 62, the lid member 80 is suppressed from vibrating during damping.

With this configuration, a part of the pressure wave generated in the individual liquid chamber 6 due to the liquid discharge propagates to the slit groove 61 through the fluid resistance portion 7, the liquid introduction portion 8, the opening 9, and the opening 51. Then, it is transmitted from the slit groove 61 to the common liquid chamber 10.

At this time, since the damper 81 faces the opening 51 and the slit groove 61, the propagated pressure wave is absorbed or attenuated before reaching the common liquid chamber 10.

Here, the effect of the pressure damping of the damper on the pressure wave generated from the individual liquid chamber 6 is generated earlier as the distance from the source to the damper is shorter than that of the damper 91 arranged on the wall surface of the common liquid chamber 10. The damping effect can be exerted efficiently at an early stage.

As a result, the pressure wave can be quickly attenuated even when the high frequency drive is performed, and the variation in the liquid discharge characteristics can be reduced.

Further, in the present embodiment, the individual flow path 5 including the individual liquid chamber 6 of the flow path plate 2 is a flow path extending in the in-plane direction of the flow path plate 2, and the opening 51 of the holding substrate 50 is the holding substrate 50. It is a flow path extending in the thickness direction (lamination direction of each member), and the flow path 61a of the slit groove 61 is a flow path extending in the in-plane direction of the holding substrate 51 like the individual flow path 5.

Here, looking at the flow path 61a which is a part of these individual flow paths 5, the opening 51 and the slit groove 61 in a three-dimensional flow path structure, the flow path 61a of the holding substrate 51 and the flow path plate 2 are individually separated. The flow paths 5 face each other, and the flow paths of the opening 51 are connected between them. That is, the flow path 61a of the holding substrate 50 can be regarded as a flow path folded back with respect to the individual flow path 5.

In other words, in the configuration of the present embodiment, the flow path 61a composed of the opening 51 and the slit groove 61 covered with the lid member 80 is provided between the common liquid chamber 10 and the individual liquid chamber 6. In addition, it constitutes an individual communication passage 66 passing through the individual liquid chamber 6 of 1 (which may be 2 or more) and the common liquid chamber 10.

In the individual communication passage 66, the flow path 61a formed by the slit groove 61 opens into the common liquid chamber 10 and serves as a flow path portion through which the liquid flows in the direction opposite to the direction of the liquid flow in the individual liquid chamber 6.

Then, a member (flow path plate 2) forming the individual liquid chamber 6, a holding substrate 50 which is a member forming the flow path portion (flow path 61a) of the individual communication passage 66, and a member forming the common liquid chamber 10. The common liquid chamber member 70 is laminated and has a damper 81 facing the flow path 61a formed of the slit groove 61 which is a flow path portion.

That is, when the damper is arranged in the continuous passage leading to the common liquid chamber 10 in order to attenuate the pressure wave from the individual liquid chamber 6 at an early stage, the damper action becomes larger as the damper area is larger if the Young's modulus is the same.

In this case, when the damper is arranged on the liquid introduction portion 8 of the flow path plate 2 or the damper is arranged on the wall surface of the opening 51 of the holding substrate 50, in order to secure a wide damper area, a flow is required. The width of the road plate 2 must be widened, or the thickness of the holding substrate 50 must be increased. This makes the head uselessly large.

Therefore, as in the present embodiment, the individual passage 66 passing between the individual liquid chamber 6 and the common liquid chamber 10 is provided with a flow path portion in which the liquid flows in the direction opposite to the direction of the liquid flow in the individual liquid chamber 6. That is, by folding back the individual passage 66 and arranging the damper in the folded flow path portion, it is possible to suppress the increase in size of the head while securing a large damper area.

In this embodiment, the slit groove 61 is not covered by the lid member 80 but is formed as a portion 60b facing the common liquid chamber 10. However, the slit groove 61 is a portion covered by the lid member 80 ( Only the flow path portion 60a) may be used. In this case, for example, the portion corresponding to the portion 60b may be formed as one recess connected in the nozzle arrangement direction.

Next, the liquid discharge head according to the second embodiment of the present invention will be described with reference to FIG. FIG. 6 is a plan explanatory view of the damper chamber member of the lid member of the liquid discharge head as viewed from the holding substrate side.

In the present embodiment, the damper chamber member 80B is provided with a groove portion 80c that forms an air opening path 84 that leads the damper chamber 82 to the atmosphere.

As a result, the damper 81 can be stably displaced, and the reliability is improved.

Next, the liquid discharge head according to the third embodiment of the present invention will be described with reference to FIG. 7. FIG. 7 is a plan explanatory view of the damper chamber member of the lid member of the liquid discharge head as viewed from the holding substrate side.

In the present embodiment, the groove portion 80d formed in a snake line shape meandering through the open air passage 84 is provided.

As a result, evaporation of water in the liquid due to the air permeability of the damper 81 can be suppressed.

Next, the liquid discharge head according to the fourth embodiment of the present invention will be described with reference to FIGS. 8 and 9. FIG. 8 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, and FIG. 9 is a plan explanatory view of the lid member.

In the present embodiment, the lid member 80 is provided with a through hole 80e that serves as a damper chamber 82, one of the damper chambers 82 faces the damper 81A, which is the first damper facing the slit groove 61, and the other faces the common liquid chamber 10. A damper 81B, which is a second damper, is provided.

As a result, the damper chamber member 80B of the lid member 80 can be easily manufactured, and the pressure wave reaching the common liquid chamber 10 can be attenuated by the damper 81B.

Next, the liquid discharge head according to the fifth embodiment of the present invention will be described with reference to FIG. FIG. 10 is an explanatory cross-sectional view taken along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head.

In the present embodiment, the damper holding member 8C is provided on the peripheral edge of the damper 81.

As a result, the handleability (handleability) of the thin film damper 81 is improved.

Next, the liquid discharge head according to the sixth embodiment of the present invention will be described with reference to FIGS. 11 and 12. FIG. 11 is a cross-sectional explanatory view along a direction orthogonal to the nozzle arrangement direction of the liquid discharge head, and FIG. 12 is a cross-sectional explanatory view also along the nozzle arrangement direction.

In the present embodiment, the width W and the depth H of the slit groove 61 in the lateral direction (nozzle arrangement direction) are smaller than the opening diameter of the nozzle 4.

As a result, the foreign matter 300 that cannot pass through the nozzle 4 does not enter the slit groove 61 and is blocked by the end 80f of the lid member 80, so that the slit groove 61 functions as a filter groove.

Since the slit groove 61 constitutes the filter groove, even if a part of the slit groove 61 is covered with the foreign matter 300, the upstream side of the clogged portion opens into the common liquid chamber 10 to secure the flow path. Since it can be made, it can be a highly robust filter.

Next, an example of the device for discharging the liquid according to the present invention will be described with reference to FIGS. 13 and 14. FIG. 13 is a plan view of the main part of the device, and FIG. 14 is a side view of the main part of the device.

This device is a serial type device, and the carriage 403 is reciprocated in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 is bridged over the left and right side plates 491A and 491B to movably hold the carriage 403. Then, the carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 bridged between the drive pulley 406 and the driven pulley 407.

The carriage 403 is equipped with a liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated. The liquid discharge head 404 of the liquid discharge unit 440 discharges liquids of, for example, yellow (Y), cyan (C), magenta (M), and black (K). Further, the liquid discharge head 404 is mounted by arranging a nozzle array composed of a plurality of nozzles in the sub-scanning direction orthogonal to the main scanning direction and directing the discharge direction downward.

The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

The supply mechanism 494 includes a cartridge holder 451 which is a filling portion for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is sent from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

This device includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412, which is a transport means, and a sub-scanning motor 416 for driving the transport belt 412.

The transport belt 412 attracts the paper 410 and transports it at a position facing the liquid discharge head 404. The transport belt 412 is an endless belt, and is hung between the transport roller 413 and the tension roller 414. Adsorption can be performed by electrostatic adsorption, air suction, or the like.

Then, the transport belt 412 orbits in the sub-scanning direction by rotationally driving the transport roller 413 via the timing belt 417 and the timing pulley 418 by the sub-scanning motor 416.

Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 for maintaining / recovering the liquid discharge head 404 is arranged on the side of the transport belt 412.

The maintenance / recovery mechanism 420 is composed of, for example, a cap member 421 that caps the nozzle surface (the surface on which the nozzle is formed) of the liquid discharge head 404, a wiper member 422 that wipes the nozzle surface, and the like.

The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

In this device configured in this way, the paper 410 is fed onto the transport belt 412 and sucked, and the paper 410 is transported in the sub-scanning direction by the orbital movement of the transport belt 412.

Therefore, by driving the liquid discharge head 404 in response to the image signal while moving the carriage 403 in the main scanning direction, the liquid is discharged to the stopped paper 410 to form an image.

As described above, since this device includes the liquid discharge head according to the present invention, it is possible to stably form a high-quality image.

Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 15 is an explanatory plan view of a main part of the unit.

This liquid discharge unit includes a housing portion composed of side plates 491A, 491B and a back plate 491C, a main scanning movement mechanism 493, a carriage 403, and a liquid among the members constituting the device for discharging the liquid. It is composed of a discharge head 404.

A liquid discharge unit in which at least one of the above-mentioned maintenance / recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit can be configured.

Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 16 is a front explanatory view of the unit.

This liquid discharge unit is composed of a liquid discharge head 404 to which the flow path component 444 is attached and a tube 456 connected to the flow path component 444.

The flow path component 444 is arranged inside the cover 442. A head tank 441 may be included instead of the flow path component 444. Further, a connector 443 that electrically connects to the liquid discharge head 404 is provided above the flow path component 444.

In the present application, the liquid to be discharged may have a viscosity and surface tension that can be discharged from the head, and is not particularly limited, but the viscosity becomes 30 mPa · s or less at room temperature, under normal pressure, or by heating or cooling. It is preferable that it is a thing. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, polymerizable compounds, resins, functionalizing materials such as surfactants, biocompatible materials such as DNA, amino acids and proteins, and calcium. , Solvents, suspensions, emulsions, etc. containing edible materials such as natural dyes, etc., for example, inks for inkjets, surface treatment liquids, constituents of electronic elements and light emitting elements, and formation of electronic circuit resist patterns. It can be used for applications such as liquids for three-dimensional modeling.

Piezoelectric actuators (laminated piezoelectric elements and thin-film piezoelectric elements), thermal actuators that use electrothermal conversion elements such as heat-generating resistors, and electrostatic actuators that consist of a vibrating plate and counter electrodes are used as energy sources for discharging liquid. Includes what to do.

The "liquid discharge unit" is a liquid discharge head integrated with functional parts and a mechanism, and includes an aggregate of parts related to liquid discharge. For example, the "liquid discharge unit" includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, and a main scanning movement mechanism with a liquid discharge head.

Here, "integration" means, for example, a liquid discharge head and a functional component, a mechanism fixed to each other by fastening, adhesion, engagement, etc., or one in which one is movably held with respect to the other. Including. Further, the liquid discharge head, the functional parts, and the mechanism may be detachably attached to each other.

For example, as a liquid discharge unit, there is a liquid discharge head and a head tank integrated. In addition, there are cases in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter can be added between the head tank of these liquid discharge units and the liquid discharge head.

Further, as a liquid discharge unit, there is a liquid discharge head and a carriage integrated.

Further, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably by a guide member forming a part of the scanning movement mechanism. In some cases, the liquid discharge head, the carriage, and the main scanning movement mechanism are integrated.

Further, as a liquid discharge unit, there is a carriage to which a liquid discharge head is attached, in which a cap member which is a part of the maintenance / recovery mechanism is fixed, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. ..

Further, as a liquid discharge unit, there is a liquid discharge unit in which a tube is connected to a head tank or a liquid discharge head to which a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid of the liquid storage source is supplied to the liquid discharge head through this tube.

The main scanning movement mechanism shall also include a single guide member. Further, the supply mechanism includes a tube unit and a loading unit unit.

The "device for discharging a liquid" includes a device provided with a liquid discharge head or a liquid discharge unit and driving the liquid discharge head to discharge the liquid. The device for discharging the liquid includes not only a device capable of discharging the liquid to a device to which the liquid can adhere, but also a device for discharging the liquid into the air or the liquid.

The "device for discharging the liquid" can also include means for feeding, transporting, and discharging paper to which the liquid can adhere, and also includes a pretreatment device, a posttreatment device, and the like.

For example, as a "device that ejects a liquid", an image forming device that is a device that ejects ink to form an image on paper, and a powder is formed in layers in order to form a three-dimensional model (three-dimensional model). There is a three-dimensional modeling device (three-dimensional modeling device) that discharges the modeling liquid into the powder layer.

Further, the "device for discharging a liquid" is not limited to a device in which a significant image such as characters and figures is visualized by the discharged liquid. For example, those that form patterns that have no meaning in themselves and those that form a three-dimensional image are also included.

The above-mentioned "liquid-attachable" means a liquid to which the liquid can adhere at least temporarily, such as a liquid that adheres and sticks, and a liquid that adheres and permeates. Specific examples include media such as paper, recording paper, recording paper, film, cloth, and other recording media, electronic substrates, electronic components such as piezoelectric elements, powder layers (powder layers), organ models, and inspection cells. Yes, including anything to which the liquid adheres, unless otherwise specified.

The material of the above-mentioned "material to which liquid can be attached" may be paper, thread, fiber, cloth, leather, metal, plastic, glass, wood, ceramics or the like as long as the liquid can be attached even temporarily.

Further, the "device for discharging the liquid" includes, but is not limited to, a device in which the liquid discharge head and the device to which the liquid can adhere move relatively. Specific examples include a serial type device that moves the liquid discharge head, a line type device that does not move the liquid discharge head, and the like.

In addition, as a "device for ejecting a liquid", a treatment liquid coating device for ejecting a treatment liquid to the paper in order to apply the treatment liquid to the surface of the paper for the purpose of modifying the surface of the paper, etc. There is an injection granulator that injects a composition liquid in which a raw material is dispersed in a solution through a nozzle to granulate fine particles of the raw material.

In addition, image formation, recording, printing, printing, printing, modeling, etc. in the terms of the present application are all synonymous.

1 Nozzle plate 2 Flow path plate 3 Diaphragm member 4 Nozzle 6 Individual liquid chamber 10 Common liquid chamber 11 Piezoelectric element 50 Holding substrate (groove member)
51 Opening 61 Slit groove 80 Lid member 81 Damper 81A, 81B Damper 82 Damper chamber 70 Common liquid chamber member 403 Carriage 404 Liquid discharge head 430 Liquid discharge unit

Claims (12)

Multiple nozzles that discharge liquid and
A plurality of individual liquid chambers through which the nozzle communicates, and
It has a common liquid chamber that leads to the plurality of individual liquid chambers.
Between the common liquid chamber and the individual liquid chamber
A groove member having a plurality of slit grooves forming a flow path passing through the individual liquid chamber and the common liquid chamber, and
A lid member that covers the opening side of the slit groove is provided.
The member forming the individual liquid chamber, the lid member, and the member forming the common liquid chamber are laminated, and at least a part of the individual liquid chamber and the common liquid chamber is interposed through the lid member. Arranged side by side in the stacking direction,
The lid member has a reconstructably deformable damper facing the slit groove, and a damper chamber arranged on the side opposite to the slit groove with the damper interposed therebetween. Discharge head. The first aspect of the invention, wherein the lid member has a reconstructably deformable damper facing the slit groove and a damper facing the common liquid chamber on the opposite side via the damper chamber. Liquid discharge head. The liquid discharge head according to claim 1 or 2, wherein the slit groove has a width in the lateral direction smaller than the opening diameter of the nozzle. The liquid discharge head according to any one of claims 1 to 3, wherein the slit groove has a depth smaller than the opening diameter of the nozzle. The liquid discharge head according to any one of claims 1 to 4, further comprising a damper holding member for holding the peripheral edge portion of the damper. The liquid discharge head according to any one of claims 1 to 5, wherein the damper chamber is open to the atmosphere. The flow path formed by the slit groove is folded back with respect to the individual liquid chamber, and is folded back.
The liquid discharge head according to any one of claims 1 to 6, wherein a reconstructably deformable damper facing the slit groove faces the folded portion of the slit groove. A flow path member in which the plurality of individual liquid chambers are formed and a piezoelectric element is provided on a surface opposite to the side on which the individual liquid chambers are formed.
A holding substrate laminated on the flow path member and formed with a recess for accommodating the piezoelectric element.
It has a common liquid chamber member that is laminated on the holding substrate and forms the common liquid chamber.
The holding substrate also serves as the groove member, and the plurality of slit grooves are formed on the surface of the holding substrate on the common liquid chamber side.
The liquid discharge head according to any one of claims 1 to 7, wherein the lid member is arranged between the holding substrate and the common liquid chamber member. Multiple nozzles that discharge liquid and
A plurality of individual liquid chambers through which the nozzle communicates, and
It has a common liquid chamber that leads to the plurality of individual liquid chambers.
Between the common liquid chamber and the individual liquid chamber, an individual communication passage is provided through one or more of the individual liquid chambers and the common liquid chamber.
The individual passage has a flow path portion that opens into the common liquid chamber and allows the liquid to flow in a direction opposite to the direction of the liquid flow in the individual liquid chamber.
The member forming the individual liquid chamber, the member forming the flow path portion of the individual passage, the lid member covering the flow path portion, and the member forming the common liquid chamber are laminated.
At least a part of the individual liquid chamber and the common liquid chamber is arranged side by side in the stacking direction via the lid member.
A liquid discharge head characterized by having a damper facing the flow path portion. A liquid discharge unit comprising the liquid discharge head according to any one of claims 1 to 9. A head tank that stores the liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism that supplies the liquid to the liquid discharge head, a maintenance / recovery mechanism that maintains and recovers the liquid discharge head, and the liquid. The liquid discharge unit according to claim 10, wherein at least one of the main scanning moving mechanisms for moving the discharge head in the main scanning direction is integrated with the liquid discharge head. A device for discharging a liquid, which comprises the liquid discharge head according to any one of claims 1 to 9 or the liquid discharge unit according to claim 10 or 11.

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